Mixed gas diversion system and method for controlling diversion gas flow

Abstract

This invention relates to the field of semiconductor equipment technology and provides a mixed gas splitting system, comprising: a gas mixing device; and a splitting device, the splitting device including a container, a splitting pipeline, and a pressure gauge, the splitting pipeline being connected to the output side of the container; the gas mixing device and the splitting device being connected to each other by a connecting pipeline, the container being disposed between the connecting pipeline and the splitting pipeline, and the pressure gauge being connected to the container or the connecting pipeline for measuring the pressure of the container or the connecting pipeline. This invention solves the technical problem in the prior art of not being able to accurately split and control the mixed gas each time it is used, achieving the technical effects of improving process uniformity, yield, and characteristics.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology and relates to a mixed gas splitting system and a method for controlling the flow rate of the split gas. Background Technology

[0002] With the enormous demand for semiconductors, semiconductor technology is advancing rapidly. Among the various aspects, the design and calibration of flow distribution systems have attracted much attention in order to precisely control the uniformity and accuracy of reactant gases during semiconductor manufacturing.

[0003] In semiconductor equipment, mass flow controllers are typically used to control the flow rates of various gases to meet the requirements of various semiconductor manufacturing processes. However, due to the different thermal conductivity of various gases, the output values ​​of the flow sensors within the mass flow controller will vary. Traditionally, a gas correction factor is used to adjust these values ​​to a value based on N2 to control the gas flow rate. However, when the supplied gas is a mixture, the proportions of the individual gas components vary, and the value of the gas correction factor cannot be known in advance, thus affecting the stability of the gas supply. Therefore, a gas splitting system and a method for controlling the split gas flow rate are needed to precisely split and control the gas each time it is used. Summary of the Invention

[0004] The purpose of this invention is to provide a mixed gas splitting system and a method for controlling the flow rate of the split gas, so as to solve the technical problem in the prior art that it is impossible to accurately split and control the mixed gas each time it is used.

[0005] In a first aspect, embodiments of the present invention provide a mixed gas splitting system, comprising: a gas mixing device; a splitting device, the splitting device including a container, a splitting pipeline and a pressure gauge, the splitting pipeline being connected to the output side of the container; the gas mixing device and the splitting device being connected to each other by a connecting pipeline, the container being disposed between the connecting pipeline and the splitting pipeline, and the pressure gauge being connected to the container or the connecting pipeline for measuring the pressure of the container or the connecting pipeline.

[0006] Preferably, the diversion line includes multiple diversion sub-lines, and the diversion device further includes multiple mass flow controllers, each disposed on one of the multiple diversion sub-lines, for controlling the individual flow rates of the multiple diversion sub-lines. The volume of the container is more than ten times the maximum flow volume per second of the mass flow controller.

[0007] The present invention also provides a method for controlling the flow rate of a split gas, comprising: a setting step, setting the flow rate of the first mass flow controller in each sub-line of the mixing device to a desired mixing ratio; an adjustment step, gradually adjusting the flow rate of the second mass flow controller in each sub-line of the split device from fully open to stabilize the pressure gauge reading; a calculation step, when the pressure gauge reading is stable, dividing the sum of the flow rates of the second mass flow controllers by the sum of the flow rates of the first mass flow controllers to calculate a mixed gas correction parameter; and a feedback step, feeding back the mixed gas correction parameter to the second mass flow controller of each sub-line to obtain the actual flow rate of each sub-line.

[0008] Preferably, the second mass flow controller gradually adjusts the flow rate from fully open at the same flow rate. The pressure gauge reading stabilizes for more than 10 seconds. A mixed gas splitting system as described above is used.

[0009] The embodiments of the present invention have at least the following technical effects:

[0010] This invention provides a mixed gas splitting system, comprising: a mixing device and a splitting device. The splitting device includes a container, a splitting pipeline, and a pressure gauge. The splitting pipeline is connected to the output side of the container. The mixing device and the splitting device are connected to each other by a connecting pipeline. The container is disposed between the connecting pipeline and the splitting pipeline. The pressure gauge is connected to the container or the connecting pipeline to measure the pressure of the container or the connecting pipeline. This system solves the technical problem in the prior art of not being able to accurately split and control the mixed gas each time it is used, achieving the technical effects of improving process uniformity, yield, and characteristics. Attached Figure Description

[0011] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of a mixed gas splitting system provided in the first embodiment of the present invention;

[0013] Figure 2A A flowchart illustrating the steps of a method for measuring corrected parameters of a mixed gas in a mixed gas splitting system according to the first embodiment of the present invention;

[0014] Figure 2B The curve of the pressure gauge reading of the mixed gas splitting system provided in the first embodiment of the present invention;

[0015] Figure 3 This is a schematic diagram of a mixed gas splitting system provided in the second embodiment of the present invention.

[0016] Icons: 10-Mixed gas splitting system; 11-Mixing device; 12-Split device; 13-First spray head; 14-Second spray head; 111-Manifold; 111a-Manifold sub-line; 111a1-Manual valve; 111a2-System valve; 111a3-Pressure regulating valve; 111a4-Filter; 111a5-Pneumatic control valve; 111b-Manifold sub-line; 111b1-Manual valve; 111b2-System valve; 111b3-Liquid mass flow meter; 111b4-Pneumatic control valve; 111b5-Vaporizer; 111c-Manifold sub-line; 111c1-Manual valve; 111c2-System valve; 111c3-Pressure regulating valve ; 111c4 - Filter; 111c5 - Pneumatic control valve; 112a - First mass flow controller; 112c - First mass flow controller; 113 - Output line; 121 - Input line; 122 - Container; 123 - Pressure gauge; 124 - Diversion line; 124a - Diversion sub-line; 124b - Diversion sub-line; 124c - Diversion sub-line; 125a - Second mass flow controller; 125b - Second mass flow controller; 125c - Second mass flow controller; 90 - Connecting line; 20 - Mixed gas diversion system; 21 - Mixing device; 22 - Diversion device; 231 - First spray head; 232 - Second spray head; 211 - Sink Flow line; 211a-Manifold line; 211a1-Manual valve; 211a2-System valve; 211a3-Pressure regulating valve; 211a4-Filter; 211a5-Pneumatic valve; 211b-Manifold line; 211b1-Manual valve; 211b2-System valve; 211b3-Liquid mass flow meter; 211b4-Pneumatic valve; 211b5-Vaporizer; 211c-Manifold line; 211c1-Manual valve; 211c2-System valve; 211c3-Pressure regulating valve; 211c4-Filter; 211c5-Pneumatic valve; 212a-First mass flow controller; 212c-First mass flow controller; 213-Transmission line Outgoing pipeline; 221-Input pipeline; 222-Container; 223-Pressure gauge; 224-Branch pipeline; 2241-First branch sub-pipeline system; 2242-Second branch sub-pipeline system; 2241A-First branch area pipeline; 2241B-Second branch area pipeline; 2241C-Third branch area pipeline; 2241D-Fourth branch area pipeline; 2242E-First branch area pipeline; 2242F-Second branch area pipeline; 2242G-Third branch area pipeline; 2242H-Fourth branch area pipeline; 225A~D-Second mass flow controller; 225E~H-Second mass flow controller; 91-Connecting pipeline. Detailed Implementation

[0017] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0019] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include multiple forms. It should be further understood that the term “comprising” as used in this specification means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or combinations thereof. The term “and / or” as used herein includes all or any units and all combinations thereof of one or more associated listed items.

[0020] <First Embodiment>

[0021] Please see Figure 1 A schematic diagram of the mixed gas splitting system according to the first embodiment of the present invention. Figure 1 As shown, the mixed gas splitting system 10 includes: a mixing device 11; and a splitting device 12. The mixing device includes a manifold 111; a plurality of first mass flow controllers 112a, 112c; and an output line 113. The splitting device 12 includes an input line 121; a container 122; a pressure gauge 123; a splitting line 124; and a plurality of second mass flow controllers 125a, 125b, 125c.

[0022] like Figure 1 As shown, the mixing device 11 consists of a first sub-line 111a, a second sub-line 111b, and a third sub-line 111c, which combine the output ends of each sub-line 111a, 111b, and 111c into an output line 113, forming a manifold 111. The input ends of each sub-line 111a, 111b, and 111c are respectively connected to a supply source for different raw materials. Figure 1As shown, the first manifold 111a and the third manifold 111c, from input to output, are respectively equipped with manual valves 111a1 and 111c1; system valves 111a2 and 111c2; pressure regulating valves 111a3 and 111c3; filters 111a4 and 111c4; pneumatic control valves 111a5 and 111c5; and first mass flow controllers 112a and 112c, used to supply different types of gases. The second manifold 111b, from input to output, is respectively equipped with a manual valve 111b1; system valve 111b2; liquid mass flow meter 111b3; pneumatic control valve 111b4; and vaporizer 111b5, used to supply raw materials such as tetraethoxysilane (TEOS) that are evaporated from liquid into gas.

[0023] The output line 113 of the mixing device 11 is connected to the input line 121 of the diversion device 12 to form a connecting line 90. A pressure gauge 123 is connected to the connecting line 90, while the input side of the container 122 is connected to the input line 121, and the output side is connected to the diversion line 124. The diversion line 124 of the diversion device 12 includes a first diversion sub-line 124a, a second diversion sub-line 124b, and a third diversion sub-line 124c. Each diversion sub-line 124a, 124b, and 124c then diverts the flow to the first spray head 13 and the second spray head 14, respectively. Multiple second mass flow controllers 125a, 125b, and 125c are respectively installed on the first diversion sub-line 124a, the second diversion sub-line 124b, and the third diversion sub-line 124c.

[0024] In the gas mixing device 11, manual valves 111a1, 111b1, and 111c1 are used to manually control the opening and closing of each manifold sub-line 111a, 111b, and 111c; system valves 112a2, 111b2, and 112c2 are used to systematically control the opening and closing of each manifold sub-line 111a, 111b, and 111c using an automatic control system; pressure regulating valves 111a3 and 111c3 are used to regulate the pressure on each manifold sub-line 111a and 111c; filters 111a4 and 111c4 are used to filter the gas in each manifold sub-line 111a and 111c; and pneumatic control valves 111a5 and 111c5 are used to control the pressure difference across the first mass flow controllers 112a and 112c, ensuring that it falls within the operable range designed for the first mass flow controllers 112a and 112c. In this embodiment, the pressure at the output end of the multiple first mass flow controllers is less than 50 kPa, and the pressure difference between the input end and the output end is greater than 100 kPa. They control the flow rate of the gas input from each manifold sub-line 112a and 112c respectively, and finally converge to the output line 113.

[0025] The second branch line 124b, used to supply raw materials such as tetraethoxysilane (TEOS) that are evaporated from liquid to gas, is equipped with a liquid mass flow meter 111b3, a pneumatic control valve 111b4, and a vaporizer 111b5. The liquid mass flow meter 111b3 controls the flow rate of the liquid raw material, thereby controlling the flow velocity on the second branch line 124b. The pneumatic control valve 111b4 regulates the pressure difference between the input and output ends, while the vaporizer 111b5 evaporates the liquid raw material controlled by the liquid mass flow meter 111b3 into gas and sends it out.

[0026] In the diversion device 12, pressure gauge 123 is used to measure the pressure on the connecting line 90; container 122 buffers and mixes the airflow from the mixing device 11. Multiple second mass flow controllers 125a, 125b, and 125c control the flow rates of each diversion sub-line 124a, 124b, and 124c, respectively.

[0027] To achieve buffering and mixing effects, the container volume needs to be more than ten times the maximum flow volume per second of the second mass flow controller.

[0028] Please continue reading. Figure 2A The diagram illustrates the steps of controlling the flow rate of the split gas using the mixed gas splitting system of the first embodiment of the present invention, and... Figure 2B , which represents the curve of the pressure gauge reading when using the mixed gas splitting system of the first embodiment of the present invention.

[0029] First, a setting process is performed to set the flow rates of the first mass flow controllers 112a and 112c in each of the manifolds 111a, 111b, and 111c in the mixing device 11 to the desired mixing ratio with the mass flow rate of the liquid mass meter 111b3. In this setting process, the flow rate of the first manifold 111a is set to 2 SLM, the flow rate of the second manifold 111b is set to 5 SLM, and the flow rate of the third manifold 111c is set to 1.5 SLM.

[0030] Next, a control process is performed. The flow rates of the second mass flow controllers 125a, 125b, and 125c on each branch sub-pipeline 124a, 124b, and 124c on the branch device 12 are gradually adjusted from fully open to a constant flow rate, so that the pressure gauge reading tends to stabilize. "Fully open" means that the second mass flow controllers 125a, 125b, and 125c are fully open to allow the total flow controlled by the first mass flow controllers 112a and 112c and the liquid mass flow meter 111b3 to pass through completely, without any airflow accumulating in the pipeline. In this control process, the first adjustment is to change the flow rate of the second mass flow controllers 125a, 125b, and 125c from fully open to 1 slm. At this time, the pressure gauge reading will gradually increase. Figure 2BAs shown in section A. Since the reading of pressure gauge 123 continuously rises, it indicates that gas is accumulating in the connecting pipeline 90 and container 122. Therefore, it can be concluded that the total flow rate of the manifold 111 in the mixing device 11, controlled by the first mass flow controllers 112a and 112c and the liquid mass flow meter 111b3, is greater than the total flow rate controlled by the second mass flow controllers 125a, 125b, and 125c. At this point, a second adjustment is required. During the second adjustment, the flow rates of the second mass flow controllers 125a, 125b, and 125c are increased, all adjusted to 2SLM. At the moment of adjustment, a momentary pressure drop will be observed in pressure gauge 123, followed by a gradual increase in the reading of pressure gauge 123. Figure 2B As shown in section B, gas continues to accumulate in the connecting pipeline 90 and container 122. This indicates that the total flow rate controlled by the first mass flow controllers 112a and 112c and the liquid mass flow meter 111b3 in the manifold of the mixing device 11 is still greater than the total flow rate controlled by the second mass flow controllers 125a, 125b, and 125c. At this point, a third adjustment is required. During the third adjustment, the flow rates of the second mass flow controllers 125a, 125b, and 125c are increased to 3 SLM each. At the moment of adjustment, a momentary pressure drop will be observed in the pressure gauge 123. Subsequently, although the pressure gauge reading becomes smoother, it still shows an upward trend. Figure 2B As shown in section C. This indicates that gas is still slowly accumulating in the connecting pipeline 90 and container 122. Therefore, the total flow rate controlled by the first mass flow controllers 112a and 112c and the liquid mass flow meter 111b3 in the manifold of the mixing device 11 is still slightly greater than the total flow rate controlled by the second mass flow controllers 125a, 125b, and 125c. At this point, a fourth adjustment is required. During the fourth adjustment, the flow rates of the second mass flow controllers 125a, 125b, and 125c are increased to 3.5 SLM each. At the moment of adjustment, pressure gauge 123 will observe a relatively slight instantaneous pressure drop compared to before, after which the pressure gauge 123 reading will stabilize at a horizontal level (approximately 10 seconds). Figure 2B As shown in section D. This means that the total flow rate controlled by the first mass flow controllers 112a, 112c and the liquid mass flow meter 111b3 in the manifold of the mixing device 11 is substantially the same as the total flow rate controlled by the second mass flow controllers 125a, 125b and 125c.

[0031] Next, the calculation process is performed. In the control process, after adjusting the second mass flow controllers 125a, 125b, and 125c to stabilize the reading of pressure gauge 123, the sum of the flow velocities of the second mass flow controllers 125a, 125b, and 125c of each branch sub-line 124a, 124b, and 124c is divided by the sum of the flow velocities of the first mass flow controllers 112a and 112c of each manifold sub-line 111a, 111b, and 111c and the liquid mass flow meter 111b3. The mixed gas correction parameter GCF can then be calculated. In the calculation process of this method, the sum of the flow rates of the second mass flow controllers 125a, 125b, and 125c is 10.5 SLM, and the sum of the flow rates of the first mass flow controllers 112a and 112c and the liquid mass flow meter 111b3 is 8.5 SLM. Therefore, the mixed gas correction parameter GCF in this embodiment can be calculated as 10.5 / 8.5 = 1.235.

[0032] Finally, a feedback process is performed. The mixed gas correction parameter GCF obtained from the aforementioned calculation process is 1.235. This number is fed back to the second mass flow controllers 125a, 125b, and 125c of each branch sub-pipeline 124a, 124b, and 124c, thereby obtaining the actual flow rate of each branch sub-pipeline 124a, 124b, and 124c.

[0033] After the mixed gas correction parameter GCF is calculated by the method of the first embodiment of the present invention, the mixed gas splitting system 10 can more accurately control the flow rates of the first splitting sub-line 124a, the second splitting sub-line 124b and the third splitting sub-line 124c, so that the spray flow rate of different spraying areas can be more accurately controlled, thereby improving the uniformity of the process, improving yield and characteristics.

[0034] <Second Embodiment>

[0035] Please see Figure 3 A schematic diagram of a gas mixing and splitting system 20 according to a second embodiment of the present invention is shown. Similar to the first embodiment, the gas mixing and splitting system 20 includes: a gas mixing device 21; and a splitting device 22. The gas mixing device 21 includes a manifold 211; a plurality of first mass flow controllers 212a, 212c; and an output line 213. The splitting device 22 includes an input line 221; a container 222; a pressure gauge 223; a splitting line 224; and a plurality of second mass flow controllers 225A-D, 225E-H.

[0036] The mixing device 21 consists of a first sub-line 211a, a second sub-line 211b, and a third sub-line 211c, and the output ends of each sub-line 211a, 211b, and 211c are combined into an output line to form the junction line 211. The first and third manifolds 211a and 211c, from input to output, are respectively equipped with manual valves 211a1 and 211c1; system valves 211a2 and 211c2; pressure regulating valves 211a3 and 211c3; filters 211a4 and 211c4; pneumatic control valves 211a5 and 211c5; and first mass flow controllers 212a and 212c. The second manifold 211b, from input to output, is respectively equipped with manual valve 211b1; system valve 211b2; liquid mass flow meter 211b3; pneumatic control valve 211b4; and vaporizer 211b5. Their functional configurations are the same as those of the mixing device in the first embodiment, and will not be described again here.

[0037] The output line 213 of the mixing device 21 is connected to the input line 221 of the diverting device 22 to form a connecting line 91. The pressure gauge 223 is connected to the connecting line 91, while the input side of the container 222 is connected to the input line 221, and the output side is connected to the diverting line 224. The diverting line 224 of the diverting device 22 is composed of a first diverting sub-line system 2241 and a second diverting sub-line system 2242. The supplied gas is first diverted to the first diverting sub-line system 2241 and the second diverting sub-line system 2242, and then supplied to the first spray head 231 and the second spray head 232 respectively. Both the first branch sub-pipeline system 2241 and the second branch sub-pipeline system 2242 include first branch area pipelines 2241A and 2242E; second branch area pipelines 2241B and 2242F; third branch area pipelines 2241C and 2242G; and fourth branch area pipelines 2241D and 2242H. Each branch area pipeline is equipped with a second mass flow controller 225A-D and 225E-H, which independently controls the flow rate of each branch area pipeline.

[0038] In the diversion device 22, the pressure gauge 223 is used to measure the pressure on the connecting pipeline 91; the container 222 is used to buffer and mix the airflow from the mixing device 21. Thus, the multiple second mass flow controllers 225A-D, 225E-H of this embodiment can control the flow rate of each diversion zone pipeline separately, allowing for more precise control of the gas supply to each area of ​​the first spray head 231 and the second spray head 232.

[0039] The method for controlling the flow rate of the split gas using the mixed gas splitting system 20 of the second embodiment is the same as that of the first embodiment. The flow rate of the second mass flow controllers 225A-D and 225E-H is adjusted by the control process. After finding the total flow rate that can maintain the gas pressure balance, the ratio of this flow rate to the flow rate displayed by the first mass flow controllers 212a and 212c and the liquid mass flow meter 211b3 is calculated. The mixed gas correction parameter GCF is fed back to the second mass flow controllers 225A-D and 225E-H to obtain the actual flow rate of each splitting area pipeline 2241A, 2242E, 2241B, 2242F, 2241C, 2242G, 2241D, and 2242H.

[0040] With the configuration of the second embodiment of the present invention, the flow rate of each area of ​​the first spray head 231 and the second spray head 232 can be controlled individually to achieve a more uniform supply.

[0041] <Third Embodiment>

[0042] The gas splitting system of the third embodiment is the same as the gas splitting system 10 of the first embodiment, except that the method of controlling the flow rate of the split gas is different. The method of controlling the flow rate of the split gas in the gas splitting system of the third embodiment will be described below.

[0043] First, a setting process is performed to set the flow rates of the first mass flow controllers 112a and 112c in each of the manifolds 111a, 111b, and 111c in the mixing device 11 to the desired mixing ratio with the mass flow rate of the liquid mass meter 111b3. In this setting process, the flow rate of the first manifold 111a is set to 2 SLM, the flow rate of the second manifold 111b is set to 5 SLM, and the flow rate of the third manifold 111c is set to 1.5 SLM.

[0044] Next, a control and recording process is performed. The second mass flow controllers 125a, 125b, and 125c of each branch sub-pipe 124a, 124b, and 124c are controlled to be fully open, and the flow readings of the second mass flow controllers 125a, 125b, and 125c in the fully open state are recorded. In this recording process, the flow reading of the second mass flow controller 125a is recorded as 3.4 SLM, the flow reading of the second mass flow controller 125b is recorded as 3.6 SLM, and the flow reading of the second mass flow controller 125c is recorded as 3.5 SLM, for a total of 10.5 SLM.

[0045] Next, an adjustment process is performed. The second mass flow controller 125c of the branch sub-line 124c is kept fully open, and the second mass flow controllers 125a and 125b of the branch sub-lines 124a and 124b are adjusted respectively so that the flow readings of the second mass flow controllers 125a and 125b are 3.5 SLM, which is one-third of the total of 10.5 SLM recorded in the recording process.

[0046] Finally, a proportional operation is performed. The second mass flow controller 125c of the branch line 124c remains fully open, and the second mass flow controllers 125a and 125b of the branch lines 124a and 124b are adjusted respectively. In this method, the flow ratio of the second mass flow controllers 125a, 125b, and 125c is set to 1:2:3. At this time, the flow readings of the second mass flow controllers 125a and 125b are adjusted to 1.75 SLM and 3.5 SLM respectively, while the reading of the fully open second mass flow controller 125c will be 5.25 SLM.

[0047] The method of the third embodiment of the present invention allows the mixed gas splitting system 10 to more accurately control the flow rates of the first splitting sub-line 124a, the second splitting sub-line 124b and the third splitting sub-line 124c, so that the spray flow rate of different spraying areas can be more accurately controlled, thereby improving the uniformity of the process, improving yield and characteristics.

[0048] Those skilled in the art will understand that the steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and schemes in the prior art that are similar to those disclosed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0049] In the description of this invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0050] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0051] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0052] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0053] It should be understood that although the steps in the flowcharts of the accompanying figures are shown sequentially as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the accompanying figures may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the sub-steps or stages of other steps.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for controlling the flow rate of a split gas, characterized in that, include: The process involves setting the flow rate of the first mass flow controller in each manifold of the mixing device to the desired mixing ratio. In the control process, the second mass flow controller of each branch sub-pipe of the branching device is gradually adjusted from fully open to stabilize the pressure gauge reading. In the calculation process, when the pressure gauge reading is stable, the sum of the flow rates of the second mass flow controller is divided by the sum of the flow rates of the first mass flow controller to calculate the mixed gas correction parameters; In the feedback process, the corrected parameters of the mixed gas are fed back to the second mass flow controller of each branch sub-pipeline to obtain the actual flow rate of each branch sub-pipeline.

2. The method for controlling the flow rate of the split gas according to claim 1, characterized in that, The second mass flow controller gradually adjusts the flow rate from fully open at the same flow rate.

3. The method for controlling the flow rate of the split gas according to claim 2, characterized in that, The pressure gauge reading stabilizes for more than 10 seconds.

4. A mixed gas splitting system, characterized in that, include: Mixing device; The diversion device includes a container, a diversion line and a pressure gauge, and the diversion line is connected to the output side of the container. The gas mixing device and the gas splitting device are connected to each other by a connecting pipeline, and the container is disposed between the connecting pipeline and the gas splitting pipeline. The pressure gauge is connected to the container or the connecting pipeline and is used to measure the pressure of the container or the connecting pipeline. When the mixed gas splitting system performs mixed gas splitting, it executes the method of controlling the flow rate of the split gas as described in any one of claims 1 to 3.

5. The mixed gas splitting system according to claim 4, characterized in that, The diversion pipeline includes multiple diversion sub-pipelines, and the diversion device further includes multiple mass flow controllers, which are respectively disposed on the multiple diversion sub-pipelines for controlling the individual flow rates of the multiple diversion sub-pipelines.

6. The mixed gas splitting system according to claim 4, characterized in that, The volume of the container is more than ten times the maximum flow volume per second of the mass flow controller.

Images