Attaching device

Abstract

This invention discloses a bonding device, relating to the field of photomask bonding technology. The bonding device includes: a film positioning assembly for film positioning; a bonding assembly disposed on top of the film positioning assembly; and a photomask positioning assembly covering the film positioning assembly for photomask positioning. By covering the film positioning assembly with the photomask positioning assembly, the photomask and film are brought closer together or separated, and the bonding assembly bonds the photomask and film together. This invention solves the problem that existing bonding methods mainly involve flat or curved surface bonding, and can only achieve products within a 90-180 degree angle. Current products require bonding to curved or flat surfaces on the sides, and existing bonding methods do not meet the requirements for bonding circumferential surfaces.

Description

Technical Field

[0001] This invention relates to the field of photomask bonding technology, and more particularly to a bonding device. Background Technology

[0002] Currently, most bonding devices on the market use two flat plates (a) bonded together by rollers (b). The bonding method is as follows: Figure 1 As shown.

[0003] Existing bonding technologies primarily involve bonding planar or curved surfaces, and can only be used for products with angles between 90 and 180 degrees. Current products require bonding to both curved and planar surfaces on the sides, and existing bonding methods fail to meet the requirements for bonding circumferential surfaces. Currently, no effective solution has been proposed to address these issues. Summary of the Invention

[0004] Purpose of the invention: To provide a bonding device to solve the above-mentioned problems existing in the prior art.

[0005] Technical solution: A bonding device includes: a film positioning assembly for film positioning; a bonding assembly disposed on top of the film positioning assembly; and a photomask positioning assembly covering the film positioning assembly for photomask positioning; by covering the film positioning assembly with the photomask positioning assembly, the photomask and the film are brought closer together or separated, and the photomask and the film are bonded together by the bonding assembly.

[0006] Preferably, the diaphragm positioning assembly includes: a positioning head embedded in the photomask positioning assembly, a sealing plate being provided at the bottom of the positioning head, a support rod being provided at the bottom of the sealing plate, and the support rod being concentric with the sealing plate.

[0007] Preferably, the positioning head and the sealing plate form a top-open receiving cavity.

[0008] Preferably, a suction plate is provided at the bottom of the accommodating cavity, and the suction plate is arranged concentrically with the positioning head.

[0009] Preferably, the suction plate is provided with a first sealing ring and a second sealing ring on the side near the sealing plate, and the diameter of the first sealing ring is smaller than the diameter of the second sealing ring.

[0010] Preferably, the sealing plate is provided with an air pipe connector.

[0011] Preferably, the support rod has a through-hole at its center, and the first threaded hole corresponds to a through-hole at the center of the sealing plate.

[0012] Preferably, the bonding component includes: a silicone head disposed within the accommodating cavity and located above the suction plate, with a diaphragm disposed above the silicone head.

[0013] Preferably, the silicone head is provided with an array of through holes.

[0014] Preferably, the photomask positioning assembly includes a hollow cylindrical shell, with a plurality of grooves on one side of the shell for fixing the photomask.

[0015] Beneficial effects: In this embodiment, a positioning and bonding method is adopted. By covering the film positioning component with the photomask positioning component, the photomask and the film are brought close to or separated from each other. The bonding component is then used to bond the photomask and the film together, achieving the purpose of bonding the photomask and the film. This achieves the technical effect of bonding to various surfaces, thereby solving the technical problem that the bonding method of the prior art is mainly for flat or curved surfaces, and can only be used for products within 90 to 180 degrees. Current products require bonding to curved and flat surfaces on the sides, and the existing bonding method cannot meet the relevant requirements for bonding to circumferential surfaces. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of existing technology;

[0017] Figure 2 This is a perspective view of the bonding device of the present invention;

[0018] Figure 3 This is a front view of the bonding device of the present invention;

[0019] Figure 4 This is a bottom view of the bonding device of the present invention;

[0020] Figure 5 This is a cross-sectional view of the bonding device of the present invention;

[0021] Figure 6 This is a schematic diagram of the diaphragm structure of the bonding device of the present invention;

[0022] Figure 7 This is a schematic diagram of the silicone head structure of the bonding device of the present invention;

[0023] Figure 8 This is a schematic diagram of the suction plate structure of the bonding device of the present invention.

[0024] The attached figures are labeled as follows: 1. Diaphragm positioning assembly; 11. Positioning head; 12. Sealing plate; 121. Air pipe connector; 122. Second threaded hole; 13. Support rod; 131. First threaded hole; 14. Accommodating cavity; 15. Suction plate; 16. First sealing ring; 17. Second sealing ring; 2. Adhesion assembly; 21. Silicone head; 211. Through hole; 3. Photomask positioning assembly; 31. Housing; 32. Groove; 4. Diaphragm. Detailed Implementation

[0025] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0026] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0027] Furthermore, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0028] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0029] like Figure 2-8As shown, this application relates to a bonding device. This bonding device includes: a diaphragm positioning assembly 1 for positioning a diaphragm 4; the diaphragm positioning assembly 1 refers to an assembly capable of positioning the diaphragm 4, thereby ensuring the accuracy of the diaphragm's position and facilitating subsequent processes. Further, the diaphragm positioning assembly 1 includes: a positioning head 11 embedded in the photomask positioning assembly 3, a sealing plate 12 disposed at the bottom of the positioning head 11, and a support rod 13 disposed at the bottom of the sealing plate 12, the support rod 13 being concentrically arranged with the sealing plate 12. The positioning head 11 and the support rod 13 are welded or integrally formed, achieving a good fixed connection effect, thereby achieving a stable connection effect and thus achieving a good positioning effect for the diaphragm.

[0030] A bonding component 2 is disposed on top of the membrane positioning component 1. The bonding component 2 is capable of bonding membranes 4 and photomasks of various shapes, thereby achieving good adaptation and bonding effect. Further, the bonding component 2 includes a silicone head 21 disposed within the accommodating cavity 14 and located above the suction plate 15, with the membrane 4 disposed above the silicone head 21. Due to its softness and toughness, the silicone head 21 deforms under force, enabling it to cooperate with photomasks of various shapes, thus achieving a good adaptation effect and ensuring a good bonding effect with the membrane 4. Furthermore, the silicone head 21 has a plurality of through holes 211 arranged in an array. The presence of multiple through holes 211 enables a good suction effect, allowing the membrane 4 to be well adsorbed onto the silicone head 21, thereby achieving a precise bonding effect. Preferably, the size of the through holes 211 is larger than the size of the silicone head 21 during deformation. This prevents the through holes 211 from becoming blocked due to deformation, thus affecting the suction effect.

[0031] A photomask positioning component 3, covering the diaphragm positioning component 1, is used for photomask positioning. The photomask positioning component 3 refers to the component used to position the photomask, achieving a good photomask positioning effect, thereby ensuring the photomask is in a stable state and thus achieving a good fit. The shape of the photomask is not shown in the figure due to protection requirements. Further, the photomask positioning component 3 includes a hollow cylindrical shell 31, with multiple grooves 32 for fixing the photomask on one side. By using a hollow cylindrical shell 31, the photomask can be accommodated; simultaneously, by providing multiple grooves 32 on one side, a good fixing effect on the photomask can be achieved.

[0032] By covering the film positioning component 1 with the photomask positioning component 3, the photomask and film 4 are brought closer together or separated, and then bonded together with the film 4 by the bonding component 2. Covering the film positioning component 3 with the photomask positioning component 1 provides a good foundation for the photomask and film 4 to come close together for bonding, while also ensuring good separation after bonding. Furthermore, the bonding component 2, located within the photomask positioning component 3, ensures a good bonding effect between the photomask and film 4, facilitating the bonding of photomasks of various shapes with the film 4, thus achieving flexible use. The bonding process of this device simplifies product positioning, and the bonding method better meets product requirements, ensuring both efficiency and bonding accuracy.

[0033] As can be seen from the above description, this application achieves the following technical effects:

[0034] In this embodiment, a positioning and bonding method is adopted. The photomask positioning component 3 is placed on the film positioning component 1 to bring the photomask and film 4 closer together or separate them. The bonding component 2 then bonds the photomask and film 4 together, achieving the purpose of bonding the photomask and film 4. This achieves the technical effect of bonding to various surfaces, thereby solving the technical problem that the bonding method of the prior art is mainly for flat or curved surfaces, and can only be used for products within 90 to 180 degrees. Current products require bonding to curved and flat surfaces on the sides, and the existing bonding method cannot meet the relevant requirements for bonding to circumferential surfaces.

[0035] Furthermore, the positioning head 11 and the sealing plate 12 form a top-open receiving cavity 14. By fixing the sealing plate 12 to the bottom of the positioning head 11, a top-open receiving cavity 14 can be formed, thereby achieving a good placement effect. Even further, a suction plate 15 is provided at the bottom of the receiving cavity 14, and the suction plate 15 is concentrically arranged with the positioning head 11. By providing the suction plate 15 at the bottom of the receiving cavity 14, a good suction effect can be achieved, thereby achieving a negative pressure adsorption effect in the receiving cavity 14, and thus achieving a good adsorption and fixation effect for the diaphragm 4.

[0036] Furthermore, a first sealing ring 16 and a second sealing ring 17 are respectively provided on the side of the suction plate 15 near the sealing plate 12, wherein the diameter of the first sealing ring 16 is smaller than the diameter of the second sealing ring 17. By providing the first sealing ring 16 and the second sealing ring 17 on one side of the suction plate 15, a good sealing effect can be achieved, thereby ensuring a good adsorption effect. The first sealing ring 16 is located near the second thread, which can prevent air from leaking from the thread, thereby affecting the suction effect and thus affecting the adsorption effect of the diaphragm 4. The second sealing ring 17 is located on the outer edge of the suction plate 15. It can prevent air from leaking from the outer edge of the suction plate 15, thereby affecting the suction effect.

[0037] Furthermore, an air pipe connector 121 is provided on the sealing plate 12. By providing an air pipe connector 121 on the sealing plate 12, a good connection with the external air source can be achieved, thereby ensuring a stable air intake effect.

[0038] Furthermore, a through-hole 131 is provided at the center of the support rod 13, and the first threaded hole 131 is correspondingly provided with a through-hole 122 provided at the center of the sealing plate 12. By providing the first threaded hole 131 and the second threaded hole 122 respectively, a good threaded connection effect can be achieved. Preferably, the threaded hole matches the M8 screw. This facilitates installation and fixation.

[0039] The workflow of this invention is as follows:

[0040] First, fix the bonding component 2 onto the film 4 positioning component 1; then install the photomask onto the photomask positioning component 3, and transport the film 4 to the bonding component 2 via the stage for positioning. After the position of the product is identified and confirmed by the CCD, bonding is then performed.

[0041] The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be made to the technical solutions of the present invention, and all such equivalent transformations fall within the protection scope of the present invention.

Claims

1. A conforming device, characterized by, The application relates to a film sheet positioning assembly, a lamination assembly and a mask positioning assembly. The film sheet positioning assembly is used for film sheet positioning. The lamination assembly is arranged on the top of the film sheet positioning assembly. The mask positioning assembly is arranged on the film sheet positioning assembly and used for mask positioning. The mask and the film sheet are close to or separated from each other by arranging the mask positioning assembly on the film sheet positioning assembly, and the mask and the film sheet are laminated through the lamination assembly. The film sheet positioning assembly comprises a positioning head embedded in the mask positioning assembly, a sealing plate arranged at the bottom of the positioning head, and a supporting rod arranged at the bottom of the sealing plate and coaxial with the sealing plate. The positioning head and the sealing plate form an open top containing cavity. An air suction plate is arranged at the bottom of the containing cavity and coaxial with the positioning head. First and second sealing rings are arranged on the side of the air suction plate close to the sealing plate. The diameter of the first sealing ring is smaller than that of the second sealing ring. A first screw hole is arranged at the center of the supporting rod. A second screw hole is arranged at the center of the sealing plate.

2. The apparatus of claim 1, wherein The mask positioning assembly comprises a hollow cylindrical shell.

3. The apparatus of claim 1, wherein Air pipe joints are arranged on the sealing plate.

4. The apparatus of claim 3, wherein The lamination assembly comprises a silica gel head arranged in the containing cavity and above the air suction plate. A film sheet is arranged above the silica gel head. Multiple through holes are arranged on the silica gel head.

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