Fast measurement device of global profile of hemispherical resonator

Abstract

The device for fast measuring the global profile of a hemispherical resonator belongs to a precision measuring equipment; the device is composed of two non-contact probes, the axis of the hemispherical resonator and the axis of the non-contact probes are at a certain angle, cooperating with the rotation of the hemispherical resonator along its own axis, the global profile of the inner and outer shells and the center rod of the hemispherical resonator can be measured without multiple indexing; the device is designed for the hemispherical resonator, the structure is unique, and the size and form error of the hemispherical resonator can be measured at high speed and high precision.

Description

TECHNICAL FIELD

[0001] The present application belongs to precision measuring instrument, mainly relates to a kind of high-speed high-precision evaluation hemispherical resonator size and shape error measuring instrument. BACKGROUND

[0002] Hemispherical resonator gyro is a new generation of inertial navigation equipment, it has high precision, small volume, strong impact resistance, long life, high reliability and other unique advantages, due to the excellent performance of gyro, military and civilian fields have huge demand.

[0003] Hemispherical resonator as the core and sensitive components of hemispherical resonator gyro, made of hard and brittle quartz glass material, is a hemispherical thin shell structure with central support rod, the vibration characteristics of resonator directly determine the gyro performance. But due to the existence of processing error, hemispherical resonator structure exists in different degrees of shape error, the mode mismatch phenomenon caused by these errors seriously affects the gyro performance.

[0004] Now usually adopt coordinate measurement, profile scanning method to measure resonator, but due to the special structure of resonator, the method of coordinate measurement needs resonator to carry out multiple indexing, the measurement speed is slow, there is measurement error, high-precision measurement is limited by probe length difficult to measure resonator inner contour. Profile scanning method needs two-dimensional profile data to be separated by error, data processing, and then the shape error can be evaluated, the measurement error is larger. Existing measurement means is difficult to meet the demand of high-speed high-precision measurement and evaluation of hemispherical resonator. SUMMARY

[0005] The purpose of the present application is to solve the problems existing in the prior art, combined with the huge demand of current hemispherical resonator gyro production capacity, a kind of hemispherical resonator shape error special measuring device is designed, without multiple indexing, once measuring hemispherical resonator inner and outer contour shape error. Not only can adapt to and satisfy the precise measurement of hemispherical resonator, but also realize the purpose of high measurement precision, good measurement repeatability, fast measurement speed and high efficiency.

[0006] The purpose of the present application is realized as follows: a kind of hemispherical resonator global profile rapid measuring device, inner contour probe head 1 and outer contour probe head 2 are fixed by using probe head fixing frame, and the measurement points of inner contour probe head 1 and outer contour probe head 2 coincide. Hemispherical resonator 5 is placed within the measurement range of inner contour probe head 1 and outer contour probe head 2, the axis of hemispherical resonator 5 and the beam axis of inner contour probe head 1 and outer contour probe head 2 form a certain angle, and hemispherical resonator 5 rotates along its own axis.

[0007] The technical innovation of the present application and the good effect produced are as follows:

[0008] 1) composite two non-contact probes, can effectively measure the inner and outer profiles of the resonator, and will not cause damage to the resonator itself;

[0009] 2) without multiple indexing and fixing, once measurement obtains all inner and outer profile data of the hemispherical resonator, improves the measurement speed; at the same time, the measurement data does not need to be processed multiple times, and the measurement accuracy is extremely high;

[0010] 3) the axis of the hemispherical resonator is arranged at a certain angle with the light beam axis of the inner profile probe and the outer profile probe, effectively eliminating the measurement blind area of the large inclination part of the hemispherical resonator shell in non-contact measurement, and can effectively measure the inner and outer profiles of the hemispherical resonator thin-walled shell and the center support rod. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 is a schematic diagram of the device

[0012] Figure number explanation: 1, inner profile probe; 2, outer profile probe; 3, probe fixing frame; 4, probe optical fiber interface; 5, hemispherical resonator; DETAILED DESCRIPTION

[0013] The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0014] A hemispherical resonator global profile rapid measurement device, the inner profile probe 1 and the outer profile probe 2 are fixed by using the probe fixing frame 3, and the measurement points of the inner profile probe 1 and the outer profile probe 2 coincide; the probe fixing frame 3 can move in the transverse direction, the longitudinal direction and the vertical direction; the hemispherical resonator 5 is placed within the measurement range of the inner profile probe 1 and the outer profile probe 2, the axis of the hemispherical resonator 5 is at a certain angle with the light beam axis of the inner profile probe 1 and the outer profile probe 2, and the hemispherical resonator 5 rotates along its own axis.

[0015] The inner profile probe 1 and the outer profile probe 2 use non-contact probes.

[0016] The inner profile probe 1 and the outer profile probe 2 are connected with the controller through optical fibers, and the detected signals are fed back to the controller. Since the measurement points of the inner profile probe 1 and the outer profile probe 2 coincide, the probe fixing frame 3 can be moved in the transverse direction, the longitudinal direction and the vertical direction, and the inner profile probe 1 and the outer profile probe 2 can measure the inner and outer profiles of the resonator respectively.

[0017] When measuring the inner profile, since the axis of the hemispherical resonator 5 is at a certain angle with the light beam axis of the inner profile probe 1, the hemispherical resonator 5 rotates along its own axis, and can perform global non-contact scanning measurement on the resonator inner profile and the middle rod along a certain path. When scanning the inner profile, the outer profile probe 2 generates a light beam that is not on the focal plane, so the reflected light signal cannot be detected, which has no effect on the inner profile measurement result.

[0018] In the measurement of the outer profile, the hemispherical resonator 5 rotates along its own axis, and the outer profile and the middle rod can be globally and non-contact scanned and measured along a certain path, because the axis of the hemispherical resonator 5 and the beam axis of the outer profile probe 2 are at a certain angle. In the scanning of the outer profile, the inner profile probe 1 produces a beam out of the focal plane, so the reflected light signal cannot be detected, and the measurement result of the outer profile is not affected.

[0019] In the present embodiment, the spectral confocal sensor is used as the inner profile probe 1 and the outer profile probe 2. In the measurement of the inner profile, the inner profile probe 1 is first moved to the position of the profile to be measured. When the displacement signal detected by the inner profile probe 1 crosses zero, it is considered that the measurement point is qualified, and the measurement point is marked as a starting point of each. Then, the hemispherical resonator 5 is rotated, and the circular profile at the position of the hemispherical resonator 5 is scanned and measured according to the displacement signal measured by the inner profile probe 1.

[0020] The axis of the hemispherical resonator 5 and the beam axis of the outer profile probe 2 are at a certain angle, and the inner profile probe 1 and the outer profile probe 2 can take points along a certain path on the inner and outer profiles of the hemispherical resonator 5, and cooperate with the rotating motion of the hemispherical resonator 5, so that the hemispherical resonator 5 can be quickly and globally measured at high speed and high precision without multiple indexing of the hemispherical resonator 5.

Claims

1. A fast measurement device of global profile of a hemispherical resonator, characterized in that: The inner profile measuring head (1) and the outer profile measuring head (2) are fixed by using a measuring head fixing frame (3), the measuring points of the inner profile measuring head (1) and the outer profile measuring head (2) are coincident; the measuring head fixing frame (3) can move along the transverse direction, the longitudinal direction and the vertical direction; a hemispherical resonator (5) is arranged in the measuring range of the inner profile measuring head (1) and the outer profile measuring head (2), the axis of the hemispherical resonator (5) is at a certain angle with the optical beam axis of the inner profile measuring head (1) and the outer profile measuring head (2), the hemispherical resonator (5) rotates along its own axis, the measuring head optical fiber interface (4) is connected with a special controller; when measuring the inner profile, the axis of the hemispherical resonator (5) is at a certain angle with the optical beam axis of the inner profile measuring head (1), the hemispherical resonator (5) rotates along its own axis, and the inner profile of the resonator and the middle rod can be globally and non-contactly scanned and measured along a certain path; when scanning the inner profile, the optical beam of the outer profile measuring head (2) is not on the focal plane, so that the light reflection signal cannot be detected, and the inner profile measurement result is not affected; when measuring the outer profile, the axis of the hemispherical resonator (5) is at a certain angle with the optical beam axis of the outer profile measuring head (2), the hemispherical resonator (5) rotates along its own axis, and the outer profile of the resonator and the middle rod can be globally and non-contactly scanned and measured along a certain path; when scanning the outer profile, the optical beam of the inner profile measuring head (1) is not on the focal plane, so that the light reflection signal cannot be detected, and the outer profile measurement result is not affected.

2. The hemispherical resonator global profile fast measurement device of claim 1, wherein: The inner profile measuring head (1) and the outer profile measuring head (2) are non-contact measuring heads.

Images