Arc halogen heating lamp

Abstract

The present invention discloses an arc-shaped halogen heating lamp, the heating lamp includes a quartz glass cover, a heating tungsten filament and a ceramic lamp cap, the quartz glass cover is provided with an arc portion and a column portion, the column portion is provided at both ends of the arc portion, and the column portion is perpendicular to the arc portion; the heating tungsten filament is used to heat the workpiece, and the heating tungsten filament is fixed inside the quartz glass cover; the quartz glass cover is used to isolate the heating tungsten filament from the air; the ceramic lamp cap is fixedly connected to the end of the quartz glass cover through ceramic mud. The present invention can be more friendly to the heating treatment of circular semiconductor wafers through the setting of an integrally formed tungsten filament lead and an arc-shaped quartz glass cover, and at the same time, when multiple arc-shaped halogen heating lamps work together, they can form a compact annular heating area, so that it can better utilize the reaction space, and then can improve the overall heating effect.

Description

Technical Field

[0001] The invention belongs to the technical field of wafer heating devices, and in particular relates to an arc-shaped halogen heating lamp. Background Art

[0002] With the continuous development of semiconductor technology, the heating devices and technologies in semiconductor equipment are constantly being updated. There are many types of heaters used in semiconductor process, such as heating rod heating, ceramic heating, electric heating wire heating, infrared heating, etc. Among them, infrared heating has the advantages of extremely high conversion efficiency and non-contact heating in the heating field, so it is widely used in the heating link of wafer process production.

[0003] Infrared heating mainly transfers energy in the form of infrared radiation through the conversion of electrical energy and infrared radiation energy. This energy has strong penetration in a transparent environment and can be directly irradiated onto the heated object without a transmission medium. After the heated object absorbs the infrared energy, it generates heat itself, thereby achieving a warming effect. Compared with contact heating, its heating process is extremely clean and efficient. At the same time, this infrared heating method can be divided into point bulb heating, linear lamp heating, circular lamp heating, spiral lamp heating, and other special-shaped lamp heating according to the shape of the heating lamp.

[0004] However, in the field of semiconductor epitaxy, the existing infrared heating forms are mainly bulb-type heating and straight tube-type heating. However, in the infrared heating scenario, there are often problems such as inappropriate heating space, a large number of point light sources, and cumbersome installation, which will cause a series of problems such as uneven temperature distribution of the heated object. Although special-shaped lamps can solve the problem of space adaptation, they will face the problem of high cost, which makes most companies unable to afford it.

[0005] Therefore, how to provide a heating lamp that can adapt to the wafer heating space, better balance the thermal field, can be combined as needed, and has controlled costs is an urgent problem that needs to be solved. Summary of the invention

[0006] The object of the present invention is to provide an arc-shaped halogen heating lamp to solve the problems raised in the above background technology.

[0007] To achieve the above object, the present invention provides the following technical solution: an arc-shaped halogen heating lamp, the heating lamp comprises a quartz glass cover, a heating tungsten filament and a ceramic lamp cap, the quartz glass cover is provided with an arc portion and a column portion, the column portion is provided at both ends of the arc portion, and the column portion is perpendicular to the arc portion;

[0008] The heating tungsten wire is used to heat the workpiece, and the heating tungsten wire is fixed inside the quartz glass cover through a circular ring holder;

[0009] The quartz glass cover is used to isolate the heating tungsten wire from the air, and the interior of the quartz glass cover is filled with halogen gas;

[0010] The ceramic lamp cap is used to fix and protect the pins. The ceramic lamp cap is fixedly connected to the end of the quartz glass cover through ceramic mud. The pins are arranged in the middle of the upper end of the ceramic lamp cap.

[0011] Furthermore, the arc length calculation formula of the arc portion of the quartz glass cover is as follows:

[0012] l=2πr / M-Δl

[0013] Wherein: l is the arc length of the arc part, r is the radius of the arc-shaped halogen heating lamp, M is the number of corresponding arc-shaped halogen heating lamps in the circular heating assembly, and Δl is the arc length between two adjacent ceramic lamp caps of two adjacent arc-shaped halogen heating lamps in the circular heating assembly.

[0014] Furthermore, the heating tungsten wire includes a tungsten wire lead and a spring-shaped luminous tungsten wire. The tungsten wire lead is arranged at both ends of the spring-shaped luminous tungsten wire, and the tungsten wire lead is perpendicular to the spring-shaped luminous tungsten wire. At the same time, the end of the tungsten wire lead is connected to the pin.

[0015] Furthermore, the tungsten wire lead and the spring-shaped light-emitting tungsten wire are an integrally formed structure.

[0016] Furthermore, the tungsten wire leads sequentially penetrate the column portion of the quartz glass cover and the ceramic lamp cap, and are then connected to the pins, and the lower ends of the pins are fixedly connected to the top of the ceramic lamp cap.

[0017] Furthermore, the spring-shaped luminous tungsten wire is an arc-shaped structure, and the spring-shaped luminous tungsten wire is fixed inside the arc portion of the quartz glass cover through a circular ring holder;

[0018] The tungsten wire lead is a linear structure, the lower end of the tungsten wire lead is located inside the quartz glass cover column body, and the length of the tungsten wire lead is not less than the sum of the length of the quartz glass cover column body and the height of the ceramic lamp cap.

[0019] Furthermore, the ceramic lamp cap includes a positioning slot, the middle of which is a hollow structure, the lower end of the positioning slot and the end of the quartz glass cover are fixedly sealed by ceramic mud, and the upper end of the positioning slot is fixedly connected to the lower end of the pin.

[0020] Furthermore, the outer upper end of the positioning slot is provided with a heat dissipation protrusion, and the heat dissipation protrusion is evenly distributed on the outer upper end of the positioning slot to improve the heat dissipation efficiency of the ceramic lamp cap. A positioning platform is fixed to the outer lower end of the positioning slot, and the positioning platform and the end of the quartz glass cover are fixed and sealed by ceramic mud.

[0021] Furthermore, a pin mounting hole is provided in the middle of the heat dissipation protrusion, the pin mounting hole is located in the middle of the upper end of the positioning slot, and the lower end of the pin is fixedly connected to the pin mounting hole.

[0022] Furthermore, a gap is provided between the lower end of the heat dissipation protrusion and the upper end of the positioning platform.

[0023] Technical effects and advantages of the present invention:

[0024] (1) The present invention can be more friendly to the heating treatment of circular semiconductor wafers through the setting of the integrally formed tungsten wire lead and the arc-shaped quartz glass cover. At the same time, when multiple arc-shaped halogen heating lamps work together, they can form a compact annular heating area, so that it can better utilize the heating space and adapt to the heating field requirements of the circular wafer, thereby improving the heating efficiency, making it more adaptable to the heating field, and heating the wafer more efficiently and evenly, while also reducing power loss;

[0025] (2) The present invention can increase the contact area between the ceramic lamp cap and the outside by arranging a heat dissipation protrusion on the outside of the ceramic lamp cap, thereby accelerating the heat dissipation of the pins of the arc-shaped halogen heating lamp during the operation of the arc-shaped halogen heating lamp, thereby better protecting the tungsten wire lead and the pins, and extending the service life of the heating lamp;

[0026] (3) The present invention can position the arc-shaped halogen heating lamp with high precision through the positioning groove of the ceramic lamp cap. When multiple arc-shaped halogen heating lamps are used in combination, high-precision positioning can be provided, thereby forming a balanced heating field for the use of multiple arc-shaped halogen heating lamps, providing a more convenient installation method. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the arc-shaped halogen heating lamp of the present invention;

[0028] Figure 2 A top view of the arc-shaped halogen heating lamp of the present invention;

[0029] Figure 3 This is a schematic structural diagram of the arc-shaped halogen heating lamp of the present invention after removing the ceramic lamp cap and pins;

[0030] Figure 4 It is an inner view of the arc-shaped halogen heating lamp of the present invention;

[0031] Figure 5 is a front view of the ceramic lamp cap of the present invention;

[0032] Figure 6 is a cross-sectional view of the ceramic lamp cap of the present invention;

[0033] Figure 7 It is a schematic structural diagram of the ceramic lamp cap of the present invention.

[0034] Description of the markings in the figure:

[0035] In the figure: 1. quartz glass cover; 2. ceramic lamp cap; 201. positioning slot; 202. heat dissipation protrusion; 203. positioning platform; 204. pin mounting hole; 3. pin; 4. tungsten wire lead; 5. spring-shaped luminous tungsten wire. DETAILED DESCRIPTION

[0036] It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in each embodiment of the present invention described below can be combined with each other as long as there is no conflict between them.

[0037] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0039] The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

[0040] Example 1

[0041] This embodiment provides an arc-shaped halogen heating lamp, referring to Figure 1 , Figure 2 and Figure 3As can be seen from the figure, the arc-shaped halogen heating lamp includes a quartz glass cover 1, a heating tungsten filament, a ceramic lamp cap 2 and a pin 3. The heating tungsten filament is fixed inside the quartz glass cover 1 through a circular ring holder, and the interior of the quartz glass cover 1 is filled with halogen gas, which is used to isolate the heating tungsten filament from the air. At the same time, the two ends of the quartz glass cover 1 are fixedly connected to the lower end of the ceramic lamp cap 2 through ceramic mud, and the upper end of the ceramic lamp cap 2 is fixedly connected to the lower end of the pin 3.

[0042] In this embodiment, the main body of the quartz glass cover 1 is an arc-shaped structure. Specifically, the quartz glass cover 1 is provided with an arc portion and a column portion, wherein the column portion is provided at both ends of the arc portion, and the column portion is perpendicular to the arc portion. In other words, the column portion and the arc portion are not located in the same plane, and the planes where the two are located are just perpendicular to each other.

[0043] It is worth noting that in actual use, multiple arc-shaped halogen heating lamps can be distributed in a circular ring on the reflective plate, and the workpiece can be heated by the joint action of multiple arc-shaped halogen heating plates. In this embodiment, the arc portion of the arc-shaped halogen heating plate is specifically arranged as follows:

[0044] The number of circular arc halogen heating lamps corresponding to the circular ring heating assembly on the reflector can be determined by the size of the workpiece and the circular ring halogen heating lamp thermal field simulation model. Since this embodiment is mainly used to protect the circular arc halogen heating lamps, in this embodiment, it is not specifically described how the number of circular arc halogen heating lamps corresponding to the circular ring heating assembly to be assembled is determined by the circular ring halogen heating lamp thermal field simulation model.

[0045] The length of the arc portion of the quartz glass cover 1 can be determined by the number of arc-shaped halogen heating lamps, specifically:

[0046]

[0047] Among them: l1 is the inner arc length of the arc part, l2 is the outer arc length of the arc part, R1 is the inner radius of the arc part, R2 is the outer radius of the arc part, M is the number of corresponding arc halogen heating lamps in the circular heating assembly, Δl1 is the inner arc length of the interval between two adjacent ceramic lamp caps of two adjacent arc halogen heating lamps in the circular heating assembly, Δl2 is the outer arc length of the interval between two adjacent ceramic lamp caps of two adjacent arc halogen heating lamps in the circular heating assembly.

[0048] refer to Figure 4 and Figure 5As can be seen from the figure, a heating tungsten wire is also arranged inside the quartz glass cover 1, and the heating tungsten wire is used to heat the workpiece. Specifically, the end of the heating tungsten wire extends out of the column of the quartz glass cover 1, passes through the interior of the ceramic lamp cap 2, and is fixedly connected to the lower end of the pin 3.

[0049] In this embodiment, the heating tungsten wire includes a tungsten wire lead 4 and a spring-shaped luminous tungsten wire 5, wherein the tungsten wire lead 4 is arranged at both ends of the spring-shaped luminous tungsten wire 5, and the tungsten wire lead 4 is perpendicular to the spring-shaped luminous tungsten wire 5. In other words, the tungsten wire lead 4 and the spring-shaped luminous tungsten wire 5 are not located in the same plane, and the planes where the two are located are just perpendicular to each other. It is worth noting that the tungsten wire lead 4 and the spring-shaped luminous tungsten wire 5 can be an integrated structure, that is, the two can be composed of the same tungsten wire.

[0050] refer to Figure 6 and Figure 7 As can be seen from the figure, the ceramic lamp cap 2 includes a positioning slot 201, the middle of which is a hollow structure, that is, the tungsten wire lead 4 can pass through the ceramic lamp cap 2 and connect with the pin 3. In other words, the upper end of the ceramic lamp cap 2 is fixedly connected to the lower end of the pin 3, and the lower end of the ceramic lamp cap 2 is fixedly connected to the column part of the quartz glass cover 1 through ceramic mud, and the column part is sleeved inside the lower end of the ceramic lamp cap 2.

[0051] Specifically, during the heating process of the arc-shaped halogen heating lamp, it heats the workpiece through thermal radiation, that is, heat is exchanged between the surfaces of the objects in the form of radiation. Since the arc-shaped halogen heating lamp is in a relatively parallel state with the workpiece during the heating process, the specific heat calculation formula is:

[0052]

[0053] Where: Φ is the heat of the arc-shaped halogen heating lamp, ξ is the emissivity of the arc-shaped halogen heating lamp, σ is the Stefan-Boltzmann constant, A1 is the area of ​​the arc-shaped halogen heating lamp, F 12 is the shape factor of the arc-shaped halogen heating lamp to the workpiece, T1 is the absolute temperature of the arc-shaped halogen heating lamp, and T2 is the absolute temperature of the workpiece.

[0054] In this embodiment, the calculation formula of the area A1 of the arc-shaped halogen heating lamp is as follows:

[0055]

[0056] Wherein: A1 is the area of ​​the arc-shaped halogen heating lamp, θ is the central angle of the corresponding point of the arc portion, h is the height of the arc portion, R1 is the inner radius of the arc portion, and R2 is the outer radius of the arc portion.

[0057] It can be seen from the above formula that, compared with the traditional point-type arc heating lamp composed of point-type halogen heating lamps, the area of ​​the arc-shaped halogen heating lamp of this embodiment is more fully utilized. In the process of heating by the traditional point-type arc heating lamp, there must be a gap between two adjacent point-type halogen heating lamps, and then at the same area, the heat of the point-type arc heating lamp must be the heat loss in the gap, and then it must be less than the heat of the arc-shaped halogen heating lamp proposed in this embodiment, which further demonstrates that the arc-shaped halogen heating lamp can better utilize the heating space and adapt to the heating field requirements of the circular wafer, and then improve the heating efficiency, so that it can be more adapted to the heating field, and heat the wafer more efficiently and evenly, while also reducing power loss.

[0058] Example 2

[0059] Embodiment 2 is designed as an arc-shaped halogen heating lamp, and its basic structure is the same as that of embodiment 1, except that the shape of the heating tungsten filament is the same as that of the quartz glass cover 1. Specifically, the spring-shaped luminous tungsten filament 5 is an arc-shaped structure, and the spring-shaped luminous tungsten filament 5 is fixed inside the arc portion of the quartz glass cover 1 by a circular ring retainer.

[0060] The tungsten wire lead 4 is a linear structure, which is located inside the column of the quartz glass cover 1. It is worth noting that the length of the tungsten wire lead 4 is not less than the sum of the length of the column of the quartz glass cover 1 and the length of the ceramic lamp cap 2. At the same time, the end of the tungsten wire lead 4 passes through the column of the quartz glass cover 1 and the positioning slot 201, and is connected to the lower end of the pin 3.

[0061] Specifically, through the setting of the integrally formed tungsten wire lead and the arc-shaped quartz glass cover 1, it can be more friendly to adapt to the heating treatment of circular semiconductor wafers. At the same time, when multiple arc-shaped halogen heating lamps work together, a compact circular heating area can be formed, so that it can better utilize the reaction space and thus improve the overall heating effect.

[0062] Example 3

[0063] Embodiment 3 is designed to be an arc-shaped halogen heating lamp, and its basic structure is the same as that of embodiment 1, except that a heat dissipation protrusion 202 is sleeved on the outer upper end of the positioning slot 201, and the heat dissipation protrusion 202 is evenly distributed on the outer upper end of the positioning slot 201, and a pin mounting hole 204 is provided in the middle of the heat dissipation protrusion 202, and the pin mounting hole 204 is located in the middle of the upper end of the positioning slot 201, that is, after the tungsten wire lead 4 is connected to the pin 3, the lower end of the pin 3 is connected to the pin mounting hole 204.

[0064] The heat dissipation protrusion 202 is used to improve the overall heat dissipation efficiency of the ceramic lamp cap 2. This is because by arranging the heat dissipation protrusion 202 on the outside of the ceramic lamp cap 2, the contact area between the ceramic lamp cap 2 and the outside can be increased, so that during the operation of the arc-shaped halogen heating lamp, the heat dissipation efficiency can be accelerated, thereby better protecting the tungsten wire lead and the pin 3.

[0065] In this embodiment, a positioning platform 203 is fixed to the outer lower end of the positioning slot 201, and the positioning platform 203 and the end of the quartz glass cover 1 are fixedly sealed by ceramic mud. It is worth noting that a gap is provided between the lower end of the heat dissipation protrusion 202 and the upper end of the positioning platform 203. The gap is used to match with the fastener, and the arc-shaped halogen heating lamp can be fixedly connected to the reflector plate through the fastener.

[0066] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A circular arc halogen heating lamp, comprising a quartz glass cover (1), a heating tungsten filament and a ceramic lamp cap (2), characterized in that: The quartz glass cover (1) is provided with a circular arc portion and a columnar portion, wherein the columnar portion is provided at both ends of the circular arc portion and is perpendicular to the circular arc portion; The heating tungsten wire is used to heat the workpiece, and the heating tungsten wire is fixed inside the quartz glass cover (1) through a circular ring retaining frame; The quartz glass cover (1) is used to isolate the heating tungsten wire from the air, and the interior of the quartz glass cover (1) is filled with halogen gas; The ceramic lamp cap (2) is used to fix and protect the pin (3); the ceramic lamp cap (2) is fixedly connected to the end of the quartz glass cover (1) through ceramic mud; the pin (3) is arranged in the middle of the upper end of the ceramic lamp cap (2); The ceramic lamp cap (2) comprises a positioning slot (201), the middle part of the positioning slot (201) is a hollow structure, the outer upper end of the positioning slot (201) is sleeved with a heat dissipation protrusion (202), the heat dissipation protrusion (202) is evenly distributed on the outer upper end of the positioning slot (201), and is used to improve the heat dissipation efficiency of the ceramic lamp cap (2), the outer lower end of the positioning slot (201) is fixed with a positioning platform (203), and the positioning platform (203) and the end of the quartz glass cover (1) are fixed and sealed by ceramic mud; A pin mounting hole (204) is provided in the middle of the heat dissipation protrusion (202), the pin mounting hole (204) is located in the middle of the upper end of the positioning slot (201), and the lower end of the pin (3) is fixedly connected to the pin mounting hole (204); A gap is provided between the lower end of the heat dissipation protrusion (202) and the upper end of the positioning platform (203), and the heat dissipation protrusion (202), the gap and the positioning platform (203) are arranged in sequence, a transition protrusion is provided between the heat dissipation protrusion (202) and the gap, a first notch is provided between the vertically arranged heat dissipation protrusions (202), a second notch is provided between the adjacent vertically arranged heat dissipation protrusions (202), a third notch is provided at one end of the transition protrusion close to the second notch, the first notch is connected to the second notch, and the second notch is connected to the third notch.

2. The arc-shaped halogen heating lamp according to claim 1, characterized in that: The specific calculation formula of the arc length of the arc portion of the quartz glass cover (1) is as follows: l=2πr / M-Δl Wherein: l is the arc length of the arc part, r is the radius of the arc-shaped halogen heating lamp, M is the number of corresponding arc-shaped halogen heating lamps in the circular heating assembly, and Δl is the arc length between two adjacent ceramic lamp caps of two adjacent arc-shaped halogen heating lamps in the circular heating assembly.

3. The arc-shaped halogen heating lamp according to claim 1, characterized in that: The heating tungsten wire comprises a tungsten wire lead (4) and a spring-shaped luminous tungsten wire (5), wherein the tungsten wire lead (4) is arranged at both ends of the spring-shaped luminous tungsten wire (5), and the tungsten wire lead (4) is perpendicular to the spring-shaped luminous tungsten wire (5), and the end of the tungsten wire lead (4) is connected to the pin (3).

4. The arc-shaped halogen heating lamp according to claim 3, characterized in that: The tungsten wire lead (4) and the spring-shaped luminous tungsten wire (5) are an integrally formed structure.

5. The arc-shaped halogen heating lamp according to claim 3 or 4, characterized in that: The tungsten wire lead (4) passes through the columnar portion of the quartz glass cover (1) and the ceramic lamp cap (2) in sequence, and is then connected to the pin (3), and the lower end of the pin (3) is fixedly connected to the top of the ceramic lamp cap (2).

6. The arc-shaped halogen heating lamp according to claim 5, characterized in that: The spring-shaped luminous tungsten wire (5) is an arc-shaped structure, and the spring-shaped luminous tungsten wire (5) is fixed inside the arc portion of the quartz glass cover (1) through a circular ring retaining frame; The tungsten wire lead (4) is a linear structure, the lower end of the tungsten wire lead (4) is located inside the column part of the quartz glass cover (1), and the length of the tungsten wire lead (4) is not less than the sum of the length of the column part of the quartz glass cover (1) and the height of the ceramic lamp cap (2).

Images