Ultra-precision Geometric Error Measuring Instrument Based on Integrated Design of Reflective Mirror Probe

Abstract

The ultra-precision geometric error measuring instrument based on the integrated design of a probe and mirrors belongs to precision measuring instruments. In this measuring instrument, the probe is integrally designed with the first laser mirror, the second laser mirror, and the longitudinal laser mirror, and is placed in the relatively inner space of the angular displacement measuring component. The probe and the laser interferometer are fixed on a zero-expansion microcrystalline glass, eliminating the influence of thermal expansion error on the measurement accuracy in ultra-precision measuring instruments. The laser interferometer is used to measure angles and displacements, achieving sub-nanometer measurement accuracy in the three-axis directions and enabling the instrument to compensate for measurement errors in real time. The present invention has the characteristics of simple structure and high measurement accuracy, and can achieve ultra-precision measurement of micro-nano scale micro-devices.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement equipment, and mainly relates to a geometric error measuring instrument for evaluating the form and position errors of micro-devices with machining precision in the micro-nano scale. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Against this background, micro / nano technologies aiming at micro-machining, nano-structures and systems have emerged as the times require, and various micro / nano-scale micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, micro-steps, etc.

[0003] When faced with the measurement scenarios of micro-nano devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measurement dimensions of traditional coordinate measuring machines cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nano and picometer scales have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro-nano scale devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measurement device that can measure the three-dimensional device dimensions and form and position errors and has a resolution in the micro-nano scale to reliably evaluate the micro-nano scale micro-devices with complex shapes.

[0004] The invention patent "Small Micro-Nano Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro-nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component and a probe head to design a small micro-nano coordinate measuring machine. This micro-nano coordinate measuring machine has a relatively low cost, but it cannot measure the dimensions and form and position errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ultra-precision form and position error measuring instrument based on an integrated design of a mirror probe head, which can not only adapt to and meet the micro-nano scale precision measurement of the dimensions and form and position errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed and high efficiency.

[0006] To achieve the above-mentioned invention purpose, a technical solution provided by the present invention is as follows: An ultra-precision form and position error measuring instrument based on an integrated design of a mirror probe head, including a main base. Vertical support columns are arranged at intervals on the upper side of the main base, and a shaft seat is arranged at the top of the two vertical support columns; A transverse and longitudinal movement mechanism is arranged on the upper side of the main base and between the two vertical support columns, and an angular displacement measurement component is arranged on the upper side of the transverse and longitudinal movement mechanism;

[0007] A vertical shaft is slidably arranged on the shaft seat; a vertical shaft nano-motor for controlling the vertical movement of the vertical shaft is arranged on the shaft seat, and a buffer cylinder is arranged to compensate the gravity of the vertical shaft;

[0008] On both vertical sides of the vertical shaft, fixing grooves are respectively opened at one end close to the probe assembly. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a buffer cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove; the probe assembly is connected to the lower end face of the vertical shaft by a vertical connection block;

[0009] The angular displacement measurement assembly is composed of a vertical connection block, a first laser interferometer, a second laser interferometer, a longitudinal laser interferometer, a longitudinal interferometer base, and a measurement support frame. The first laser interferometer and the second laser interferometer are installed on the upper inclined surface of the measurement support frame, the longitudinal laser interferometer is installed on the upper end face of the longitudinal interferometer base, and a rotating shaft is installed at the relative space inner side sample fixing surface of the measurement support frame; the angular displacement measurement assembly is installed on the upper end face of the transverse moving block;

[0010] The probe assembly is composed of a first laser reflector, a second laser reflector, a longitudinal laser reflector, and a probe. The first laser reflector, the second laser reflector, and the longitudinal laser reflector are orthogonally installed; the probe is installed on the relative space inner side of the first laser reflector, the second laser reflector, and the longitudinal laser reflector;

[0011] The probe assembly is installed on the relative space inner side of the angular displacement measurement assembly;

[0012] The longitudinal interferometer base, the measurement support frame, the vertical connection block, the first laser reflector, the second laser reflector, and the longitudinal laser reflector are made of microcrystalline glass;

[0013] The ranging laser light rays generated by the first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer converge on the probe tip measuring sphere;

[0014] Preferably, the transverse and longitudinal movement mechanism can drive the angular displacement measurement assembly to move horizontally and longitudinally.

[0015] Preferably, the shaft seat is provided with a through vertical connection hole in the vertical direction, and an installation groove is opened on the inner wall of the vertical connection hole; the vertical shaft nano-motor is installed in the installation groove, and the output shaft of the vertical shaft nano-motor moves linearly and can drive the vertical shaft to slide vertically.

[0016] Preferably, the probe can be abutted against and measured with the sample placed on the angular displacement measurement assembly.

[0017] Preferably, the horizontal and vertical movement mechanism controls the angular displacement measurement component to move horizontally and vertically, and the vertical axis nano-motor controls the vertical axis to move the probe in the vertical direction;

[0018] The longitudinal laser interferometer obtains a displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ;

[0019] The first laser interferometer obtains a displacement of y″ and a rotation angle of r x ;

[0020] The second laser interferometer obtains a vertical axis displacement of z″ by;

[0021] Calculate the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula;

[0022] The compensation formula is:

[0023]

[0024] Preferably, in the coordinate system of the component to be measured, when measuring the component to be measured, the horizontal and vertical movement mechanism controls the angular displacement measurement component to move horizontally and vertically, and the vertical axis nano-motor controls the vertical axis to move the probe in the vertical direction; the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, i = 1,..., N;

[0025] The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through the conversion formula (1) to obtain the coordinates (a i , b i , c i ), i = 1,..., N

[0026] The conversion formula (1) is:

[0027] Where: θ = 135°

[0028] The rotating shaft drives the sample to be measured to rotate by an angle The rotation angle After that, the horizontal and vertical movement mechanism controls the angular displacement measurement component to move horizontally and vertically, and the vertical axis nano-motor controls the vertical axis to move the probe in the vertical direction; the coordinates (a2 j , b2j , c2 j ), j = N + 1, ..., N + K, where N and K are integers;

[0029] Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula (2) to obtain the coordinates (a j , b j , c j ); where the conversion formula (2) is:

[0030]

[0031] Combine the coordinates (a j , b j , c j ) of a number of position points to be detected and the coordinate values (a i , b i , c i ) of a number of position points to be detected to obtain a set of surface coordinate sets (a i , b i , c i ) of the workpiece to be measured, i = 1, ..., N + K.

[0032] The present invention provides an ultra-precision geometric error measuring instrument based on an integrated design of a mirror probe. The present invention uses a laser interferometer to measure the relative displacement between the probe and the workpiece to be measured, eliminates the Abbe error through structural design, and can obtain sub-nanometer measurement accuracy in the XYZ three-axis directions. Its accuracy is much higher than that of traditional dimensional and geometric error measuring instruments, and it has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability.

[0033] Specifically, the technical innovation and good effects of the present invention are as follows:

[0034] 1) In the measurement structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line. First-order measurement errors are eliminated through structural innovation, and high measurement accuracy is achieved.

[0035] 2) The vertical connection block, mirror, and laser interferometer mounting frame proposed by the present invention are made of microcrystalline glass, ensuring that the positions of the laser interferometer and the mirror group are not affected by the main error of ultra-precision instruments - thermal expansion, and can greatly improve the measurement accuracy.

[0036] 3) The probe assembly and the angular displacement measurement assembly proposed by the present invention can be transplanted and installed in existing low-precision geometric error measuring instruments, enabling low-precision geometric error measuring instruments to also have the ability to measure micro-nano-scale micro-devices with high precision.

[0037] 4) The present invention uses a laser interferometer to detect the relative displacement and relative rotation between the probe and the workpiece to be measured in real time, and compensates for the displacement error in real time, so as to achieve ultra-high-precision measurement of the geometric and positional errors of the surface of the workpiece to be measured.

[0038] In the present invention, the probe is combined with a cube-shaped mirror block, and together with the angular displacement measurement component, the relative movement between the probe and the workpiece to be measured is realized through the transverse and longitudinal movement mechanisms and the longitudinal nano-drive motor, achieving high measurement accuracy with a simple structure. Description of the Drawings

[0039] Figure 1 It is a schematic structural diagram of the ultra-precision geometric and positional error measuring instrument based on the integrated design of the mirror probe of the present invention;

[0040] Figure 2 is Figure 1 A schematic structural diagram of the probe assembly of the ultra-precision geometric and positional error measuring instrument based on the integrated design of the mirror probe of the present invention;

[0041] Figure 3 is Figure 1 A schematic structural diagram of the angular displacement measurement component of the ultra-precision geometric and positional error measuring instrument based on the integrated design of the mirror probe of the present invention;

[0042] Figure 4 It is a schematic diagram of the driving mechanism highlighted in the ultra-precision geometric and positional error measuring instrument based on the integrated design of the mirror probe of the present invention;

[0043] Reference numerals in the drawings: 100, main seat; 200, vertical support column; 300, shaft seat; 400, transverse and longitudinal movement mechanism; 410, longitudinal guide rail; 420, transverse guide rail; 430, transverse moving block; 500, probe assembly; 510, vertical connecting block; 520, first laser mirror; 530, second laser mirror; 540, longitudinal laser mirror; 550, probe; 600, angular displacement measurement component; 610, first laser interferometer; 620, second laser interferometer; 630, longitudinal laser interferometer; 640, longitudinal interferometer base; 650, rotating shaft; 660, measurement support frame; 670, sample fixing surface; 700, vertical movement mechanism; 710, vertical shaft; 720, vertical shaft nano-motor; 730, buffer cylinder; 740, cylinder fixing block; 750, vertical connecting hole; 760, installation groove; 770, fixing groove; Detailed Embodiments

[0044] In order to make the objectives, technical solutions, and advantages of the present invention clearer and more understandable, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0045] Embodiment

[0046] The present invention provides an ultra-precision geometric error measuring instrument based on an integrated design of a reflector probe. Refer to Figures 1 - 4 , which includes a main base 100. Vertical support columns 200 are arranged at intervals on the upper side of the main base 100. A shaft seat 300 is provided at the top of the two vertical support columns 200. A transverse and longitudinal movement mechanism 400 is provided on the upper side of the main base 100 and between the two vertical support columns 200. An angular displacement measurement assembly 600 is provided on the upper side surface of the transverse and longitudinal movement mechanism 400;

[0047] A vertical shaft 710 is slidably arranged on the shaft seat 300 in the vertical direction. A vertical shaft nano-motor 720 for controlling the vertical movement of the vertical shaft 710 is provided on the shaft seat 300, and a buffer cylinder 730 is provided to perform gravity compensation on the vertical shaft 710;

[0048] On both vertical sides of the vertical shaft 710, fixing grooves 770 are respectively opened at one end close to the probe assembly 500. The buffer cylinder 730 is fixedly installed on the inner wall of the vertical connection hole 750 by a buffer cylinder fixing block 740, and the telescopic end of the buffer cylinder 730 is connected to the inner wall of the fixing groove 770. The probe assembly 500 is connected to the lower end surface of the vertical shaft 710 by a vertical connection block 510;

[0049] The angular displacement measurement assembly 600 is composed of a first laser interferometer 610, a second laser interferometer 620, a longitudinal laser interferometer 630, a longitudinal interferometer base 640, and a measurement support frame 660. The first laser interferometer 610 and the second laser interferometer 620 are installed on the upper inclined surface of the measurement support frame 660, the longitudinal laser interferometer 630 is installed on the upper end surface of the longitudinal interferometer base 640, and a rotary shaft 650 is installed at the relative space inner side sample fixing surface 670 of the measurement support frame 660. The angular displacement measurement assembly 600 is installed on the upper end surface of the transverse movement block 430;

[0050] The probe assembly 500 is composed of a vertical connection block 510, a first laser mirror 520, a second laser mirror 530, a longitudinal laser mirror 540, and a probe 550. The first laser mirror 520, the second laser mirror 530, and the longitudinal laser mirror 540 are orthogonally installed; the probe 550 is installed inside the relative space of the first laser mirror 520, the second laser mirror 530, and the longitudinal laser mirror 540.

[0051] The probe assembly 500 is installed inside the relative space of the angular displacement measurement assembly 600.

[0052] The longitudinal interferometer base 640, the measurement support frame 660, the vertical connection block 510, the first laser mirror 520, the second laser mirror 530, and the longitudinal laser mirror 540 are made of glass-ceramics.

[0053] The ranging function laser rays generated by the first laser interferometer 610, the second laser interferometer 620, and the longitudinal laser interferometer 630 converge on the probe tip sphere of the probe 550; the laser rays emitted by the first laser interferometer 610, the second laser interferometer 620, and the longitudinal laser interferometer 630 include the ranging function laser rays and the angle measurement function laser rays.

[0054] Further, the transverse and longitudinal movement mechanism 400 can drive the angular displacement measurement assembly 600 to move horizontally and longitudinally.

[0055] Further, a through vertical connection hole 750 is provided in the vertical direction on the shaft seat 300, and an installation groove 760 is provided on the inner wall of the vertical connection hole 750; the vertical shaft nano motor 720 is installed in the installation groove 760, and the output shaft of the vertical shaft nano motor 720 moves linearly and can drive the vertical shaft 710 to slide vertically.

[0056] Further, the probe 550 can be in contact with the sample placed on the angular displacement measurement assembly 600 for contact measurement.

[0057] Among them, the above-mentioned vertical shaft nano motor 720 is a prior art, which can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other drive motors that can achieve linear movement, and is not limited here.

[0058] Among them, the above-mentioned transverse and longitudinal movement mechanism 400 is a prior art, which can be the two-dimensional displacement stage in the paper "Design and Control of a Dual-Stage Feed Drive", or other two-dimensional displacement stages that can achieve transverse and longitudinal movement, and is not limited here.

[0059] When the component under test mounted on the rotating shaft 650 moves horizontally or vertically, or when the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angular value r generated by the probe assembly around the axis perpendicular to the first laser mirror axis. y The rotation angle refers to the angular value r generated by the probe assembly around the axis perpendicular to the longitudinal laser mirror axis. x The yaw angle refers to the angular value r generated by the probe assembly around the axis perpendicular to the second laser mirror axis. z During the measurement process of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacement caused by the pitch angle, the yaw angle, and the rotation angle.

[0060] The compensation process is as follows. The horizontal and vertical movement mechanism 400 controls the angular displacement measurement assembly 600 to move horizontally and vertically, and the vertical shaft nanomotor 720 controls the vertical shaft 710 to move the probe 550 vertically; the longitudinal laser interferometer 630 obtains the displacement as x″ and the yaw angle as r. y The pitch angle obtained is r. z The first laser interferometer 610 obtains the displacement as y″ and the rotation angle r. x The second laser interferometer 620 obtains the vertical axis displacement as z″; according to the compensation formula, the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample are calculated.

[0061] The compensation formula is:

[0062]

[0063] When measuring the component under test, in the instrument coordinate system, the horizontal and vertical movement mechanism 400 controls the angular displacement measurement assembly 600 to move horizontally and vertically, and the vertical shaft nanomotor 720 controls the vertical shaft 710 to move the probe 550 vertically; when the probe 550 contacts the measured sample, after the feedback of the probe 550 reaches the set threshold, this contact position is the position point to be detected.

[0064] In the instrument coordinate system, when the probe 550 and the component under test move relative to each other, the probe 550 and the component under test are continuously moved into contact. When the probe 550 contacts the measured sample, this contact position is set as the i-th position point to be detected. According to the displacement values compensated by the first laser interferometer 610, the second laser interferometer 620, and the longitudinal laser interferometer 630, in the instrument coordinate system, the coordinates (a′ i , b′ i , c′ i ) of the i-th position point to be detected are obtained, where i = 1,..., N; the coordinates (a′ i , b′ i , c′i ), for \(i = 1,\cdots,N\), it needs to be transformed into the standard coordinate system through transformation formula 1 to obtain the coordinates \((a i , b i , c i ), for \(i = 1,\cdots,N\)

[0065] The transformation formula 1 is as follows:

[0066]

[0067] In this embodiment, \(\theta = 135^{\circ}\)

[0068] If the rotary shaft 650 is used in cooperation with the measurement, the rotary shaft 650 drives the sample to be measured to rotate by an angle The rotation angle After that, the horizontal and vertical movement mechanism 400 controls the angle displacement measurement component 600 to move horizontally and vertically, and the vertical axis nano-motor 720 controls the vertical axis 710 to move the probe 550 in the vertical direction, and the coordinates \((a2 j , b2 j , c2 j ) of the \(j\)-th position to be detected are obtained in the instrument coordinate system, where \(j = N + 1,\cdots,N + K\), and \(N\) and \(K\) are integers;

[0069] Since the rotary shaft 650 drives the sample to be measured to rotate, when the probe 550 contacts the sample to be measured before rotation, the contact position is set as the \(i\)-th position to be detected, and a set of coordinate values \((a i , b i , c i ) are obtained, for \(i = 1,\cdots,N\); after rotation, when the probe 550 contacts the sample to be measured, the contact position is set as the \(j\)-th position to be detected, and a new set of coordinate values \((a2 j , b2 j , c2 j ) are obtained, for \(j = N + 1,\cdots,N + K\). The coordinate system where the values are located also changes. The new set of coordinate values \((a1 j , b2 j , c2 j ) obtained after rotation, for \(j = N + 1,\cdots,N + K\), needs to be processed through transformation formula 2 to transform the surface coordinates \((a2 j , b2 j , c2 j ) into the standard coordinate system to obtain the coordinates \((a j , b j , c j ); where the transformation formula 2 is as follows:

[0070]

[0071] Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the workpiece to be measured (a i , b i , c i ), where i = 1,..., N + K.

[0072] If the rotary shaft 650 is not used, the displacements of each axis, namely x′, y′, and z′, can be measured by the first laser interferometer 610, the second laser interferometer 620, and the longitudinal laser interferometer 630. After a qualified contact is determined by the probe, based on the displacements of each axis x′, y′, and z′, through error compensation and data processing, a measuring point coordinate (x, y, z) on the surface of the workpiece to be measured can be obtained. By measuring several measuring points on the surface of the workpiece to be measured, high-precision measurement of the form and position errors of the workpiece to be measured with a complex shape can be achieved.

[0073] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0074] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0075] The embodiments described above only represent the implementation modes of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent for the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention. Therefore, the protection scope of the patent for the present invention shall be subject to the appended claims.

Claims

1. An ultra-precision geometric error measuring instrument based on the integrated design of a reflector probe, characterized in that: It includes a main base (100), on the upper side of which vertical support columns (200) are arranged at intervals. At the tops of the two vertical support columns (200), a shaft seat (300) is provided; On the upper side of the main base (100) and between the two vertical support columns (200), a transverse and longitudinal movement mechanism (400) is provided. On the upper side surface of the transverse and longitudinal movement mechanism (400), an angular displacement measurement component (600) is provided; On the shaft seat (300), a vertical shaft (710) is slidably arranged in the vertical direction; on the shaft seat (300), a vertical shaft nano-motor (720) for controlling the vertical movement of the vertical shaft (710) is provided, and a buffer cylinder (730) is provided to perform gravity compensation on the vertical shaft (710); On both vertical sides of the vertical shaft (710), fixing grooves (770) are respectively opened at one end close to the probe assembly (500). The buffer cylinder (730) is fixedly installed on the inner wall of the vertical connection hole (750) by a buffer cylinder fixing block (740), and the telescopic end of the buffer cylinder (730) is connected to the inner wall of the fixing groove (770); the probe assembly (500) is connected to the lower end surface of the vertical shaft (710) by a vertical connection block (510); The angular displacement measurement component (600) is composed of a first laser interferometer (610), a second laser interferometer (620), a longitudinal laser interferometer (630), a longitudinal interferometer base (640), and a measurement support frame (660). The first laser interferometer (610) and the second laser interferometer (620) are installed on the upper inclined surface of the measurement support frame (660), the longitudinal laser interferometer (630) is installed on the upper end surface of the longitudinal interferometer base (640), and a rotary shaft (650) is installed at the relative space inner side sample fixing surface (670) of the measurement support frame (660); the angular displacement measurement component (600) is installed on the upper end surface of the transverse moving block (430); The probe assembly (500) is composed of a vertical connection block (510), a first laser reflector (520), a second laser reflector (530), a longitudinal laser reflector (540), and a probe (550). The first laser reflector (520), the second laser reflector (530), and the longitudinal laser reflector (540) are orthogonally installed; the probe (550) is installed inside the relative space of the first laser reflector (520), the second laser reflector (530), and the longitudinal laser reflector (540); The probe assembly (500) is installed inside the relative space of the angular displacement measurement component (600); The longitudinal interferometer base (640), the measurement support frame (660), the vertical connection block (510), the first laser reflector (520), the second laser reflector (530), and the longitudinal laser reflector (540) are made of microcrystalline glass; The ranging laser light rays generated by the first laser interferometer (610), the second laser interferometer (620), and the longitudinal laser interferometer (630) converge on the probe ball of the probe (550).

2. The ultra-precision geometric error measuring instrument based on the integrated design of a mirror probe, as claimed in claim 1, wherein: The horizontal and vertical movement mechanism (400) can drive the angular displacement measurement component (600) to move horizontally and vertically.

3. The ultra-precision geometric error measuring instrument based on the integrated design of a mirror probe according to claim 1, characterized in that: The shaft seat (300) is provided with a through vertical connection hole (750) in the vertical direction, and an installation groove (760) is provided on the inner wall of the vertical connection hole (750); The vertical shaft nanomotor (720) is installed in the installation groove (760), the output shaft of the vertical shaft nanomotor (720) moves linearly, and can drive the vertical shaft (710) to slide in the vertical direction.

4. The ultra-precision geometric error measuring instrument based on the integrated design of a reflector probe, as claimed in claim 1, wherein: The probe (550) can be in contact with the sample placed on the angular displacement measurement component (600) for measurement.

5. The ultra-precision geometric error measuring instrument based on the integrated design of a mirror probe according to claim 1, characterized in that: The horizontal and vertical movement mechanism (400) controls the angular displacement measurement component (600) to move horizontally and vertically, and the vertical shaft nanomotor (720) controls the vertical shaft (710) to move the probe (550) in the vertical direction; The longitudinal laser interferometer (630) obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The first laser interferometer (610) obtains a displacement of y″ and obtains a rotation angle r x ; The second laser interferometer (620) obtains the vertical axis displacement as z″; Calculate the compensated horizontal axis displacement x′, vertical axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; The compensation formula is:

6. The ultra-precision geometric error measuring instrument based on the integrated design of a mirror probe according to claim 1, characterized in that: In the coordinate system of the device under test, when measuring the device under test, the transverse and longitudinal movement mechanism (400) controls the angular displacement measurement assembly (600) to move transversely and longitudinally, and the vertical axis nano-motor (720) controls the vertical axis (710) to move the probe (550) in the vertical direction; the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, where i = 1,..., N; The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1, ..., N, need to be transformed into the standard coordinate system through the transformation formula (1) to obtain the coordinates (a i , b i , c i ), where i = 1, ..., N The conversion formula (1) is as follows: Where: θ = 135° The rotating shaft (650) drives the sample to be measured to rotate by an angle Rotation angle After that, the transverse and longitudinal movement mechanism (400) controls the angle displacement measurement component (600) to move transversely and longitudinally. The vertical-axis nano-motor (720) controls the vertical-axis (710) to move the probe (550) in the vertical direction, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); among them, the conversion formula (2) is: Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the part to be measured (a i , b i , c i ), where i = 1, ..., N + K.

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