Four-dimensional ultrasonic plane polishing experimental platform and use method thereof

Abstract

The invention discloses a four-dimensional ultrasonic plane polishing test bench and a method for using the same, comprising a polishing workbench, a spindle ultrasonic vibration device, a limit and transmission ultrasonic device, an ultrasonic atomization manipulator, and a control system; the polishing workbench is composed of a polishing workbench shell, a polishing disc ultrasonic rotation device, and a polishing liquid recovery device; the spindle ultrasonic vibration device, the limit and transmission ultrasonic device, and the ultrasonic atomization manipulator are respectively fixedly mounted on the middle and both sides of the upper surface of the polishing workbench; the control system connects and controls the polishing workbench, the spindle ultrasonic vibration device, the limit and transmission ultrasonic device, and the ultrasonic atomization manipulator. The four-dimensional ultrasonic test bench adopts a wedge structure and an adjustable locking structure, applies active rotation of the limit disc and includes a polishing liquid recovery device, so that the limit clamp is easy to adjust, the ultrasonic amplitude is adjustable, and the polishing liquid is easy to recycle. The four-dimensional ultrasonic vibration compound effectively improves the polishing efficiency of the workpiece to be processed in the limit disc.

Description

Technical Field

[0001] The invention relates to a polishing machine, in particular to a four-dimensional ultrasonic plane polishing experimental table for processing an ultra-precision plane and a use method thereof. Background Art

[0002] Ultrasonic vibration assisted abrasive flow polishing technology to prepare high-quality, large-size single-crystal SiC substrate materials is the primary problem to be solved in the manufacture of silicon carbide power semiconductor devices. Ultrasonic assisted processing is currently recognized by the industry as one of the efficient and high-quality processing methods for hard and brittle materials.

[0003] Regarding the existing ultrasonic vibration-assisted abrasive flow polishing technology: Patent No. CN 1120718562A discloses an abrasive flow polishing machine, but the patent does not consider the process of abrasive post-treatment, nor the specific mechanical composite process of the post-treatment abrasive device and the polishing machine, and the ultrasonic polishing loading is also uncontrollable; Patent No. CN 110746889A discloses a method for recycling polishing liquid in the process of semiconductor wafer processing, but the patent does not propose a specific implementation device and the structural distribution in the device, and also does not propose a specific mechanical composite method of the polishing liquid recovery device and the polishing machine; Patent No. CN 104669074A discloses a variable trajectory-ultrasonic elliptical vibration-assisted consolidated abrasive polishing machine, but the patent only considers single-dimensional ultrasonic vibration and does not consider multi-dimensional ultrasonic vibration composite; Patent No. CN 109693149A discloses a high-precision three-dimensional ultrasonic polishing device and its use method, but the patent only uses a three-degree-of-freedom robotic arm, and there is also room for composite higher-dimensional ultrasonic polishing; Patent No. CN 106282591A discloses a connection structure between an ultrasonic horn and a tool head, but the patent only proposes to use a flange plate structure to clamp and fix the tool head and the horn so that they are directly close to each other, but does not make the contact degree between the tool head and the horn controllable, so as to make the ultrasonic amplitude adjustable.

[0004] Therefore, it is necessary to design a high-efficiency polishing machine that takes into account the specific mechanical structure of the polishing liquid recovery device, the specific internal composite method of the polishing liquid recovery device and the polishing machine, and the multi-dimensional ultrasonic vibration composite, and has adjustable ultrasonic amplitude to solve the above problems. Summary of the invention

[0005] The present invention provides a four-dimensional ultrasonic plane polishing experimental platform and a use method thereof, aiming to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a four-dimensional ultrasonic plane polishing experimental table, comprising a polishing workbench, a spindle ultrasonic vibration device, a limit and transmission ultrasonic device, an ultrasonic atomization manipulator, and a control system; the polishing workbench is composed of a polishing workbench shell, a polishing disc ultrasonic rotation device, and a polishing liquid recovery device; the spindle ultrasonic vibration device, the limit and transmission ultrasonic device, and the ultrasonic atomization manipulator are respectively fixedly installed in the middle and on both sides of the upper surface of the polishing workbench; the control system connects and controls the polishing workbench, the spindle ultrasonic vibration device, the limit and transmission ultrasonic device, and the ultrasonic atomization manipulator.

[0007] Furthermore, the polishing workbench housing includes an upper box body, a lower box body and a support base;

[0008] The polishing disc ultrasonic rotating device comprises a rotating motor, a polishing disc, a transmission shaft, a coupling, a mounting slot, a first ultrasonic generating device, a protective sleeve, and a stirring blade;

[0009] The rotating motor is fixedly mounted at the bottom of the polishing workbench, and the output shaft of the rotating motor is perpendicular to the polishing disc;

[0010] The transmission shaft is connected to the rotating motor through a coupling, and the transmission shaft is provided with a mounting groove, and the first ultrasonic generating device is fixed in the mounting groove; the transmission shaft is connected to the polishing plate; a protective sleeve is installed on the outer surface of the transmission shaft; the stirring blade is installed at a fixed position of the coupling, and the stirring blade rotates with the coupling;

[0011] The protective cover comprises a first protective cover and a second protective cover; the protective cover is made of wear-resistant and water-resistant material; the lower end of the first protective cover is connected and fixed to the rotating motor; one end of the second protective cover is fixed to the stirring blade, and the second protective cover rotates with the stirring blade; the inner diameters of the first protective cover and the second protective cover are both larger than the maximum outer diameter of the coupling;

[0012] The polishing liquid recovery device comprises a thin wall, a liquid storage tank, a first air delivery pipe, a second liquid discharge pipe, a third liquid delivery pipe, a liquid return tank, a first end cover, a second end cover, and a liquid return pipe;

[0013] The thin wall includes a drainage groove; the thin wall is an inverted truncated cone-shaped shell, and the large end of the thin wall is tangent to the upper box body in the outer shell of the polishing workbench; the drainage grooves are evenly distributed on the inner thin wall of the thin wall; the small end of the thin wall is connected to the liquid storage tank;

[0014] The liquid storage tank comprises a sealing ring, a first bolt, a first side wall of the liquid storage tank, and a second side wall of the liquid storage tank; a through hole larger than the outer diameter of the first protective cover is provided at the bottom of the liquid storage tank; the bottom of the liquid storage tank is sealed with the first protective cover through the sealing ring, and the liquid storage tank, the first protective cover and the rotating motor are fixed by a group of first bolts; a first hole and a second hole are provided on the first side wall of the liquid storage tank, the first hole and the second hole are provided at positions symmetrical with respect to the stirring blade, and the first hole is provided above the second hole; the first hole and the second hole are respectively connected to the first air supply pipe and the second liquid discharge pipe;

[0015] The first gas delivery pipe and the second liquid discharge pipe include a first adjustable valve and a second adjustable valve; the second side wall of the liquid storage box is provided with a third hole at the same position as the second hole, and the third hole is connected to the third liquid delivery pipe;

[0016] The third liquid infusion pipe is a right-angle elbow pipe, which includes a third adjustable valve, a first coarse filter, and a second fine filter; the third liquid infusion pipe is connected to the liquid return tank;

[0017] The front wall of the liquid return tank is provided with a fourth hole and a fifth hole, and the fourth hole and the fifth hole are connected with a first end cover and a second end cover tangent to the holes; the first end cover and the second end cover can be opened and closed freely; the upper side of the liquid return tank is provided with a sixth hole, and the sixth hole is provided with a liquid return pipe inserted into the liquid return tank to the bottom;

[0018] The lower box body in the polishing workbench shell is provided with seventh to thirteenth holes, which respectively correspond to the first adjustable valve, the second adjustable valve, the third adjustable valve and the fourth hole, the fifth hole and the first air pipe and the second liquid discharge pipe.

[0019] Further, the spindle ultrasonic vibration device includes a base, a telescopic adjustment table, a spindle beam, a second ultrasonic generator, a weight, a flange plate, a second bolt, and a double nut locking structure;

[0020] The base is connected to a telescopic adjustment platform that can be telescopic in a direction perpendicular to the polishing disc; the telescopic adjustment platform is connected to a spindle beam; the spindle beam is connected to a second ultrasonic generator;

[0021] The end of the second ultrasonic generator is tightly connected to the weight; a flange plate is mounted on the second ultrasonic generator; a through hole is provided at the center of the flange plate to be tightly connected to the second ultrasonic generator, and the flange plate is provided with a pair of threaded through holes of equal diameter symmetrical about the center of the flange plate; a threaded hole of fixed depth is provided on the weight at the same position as the threaded through hole of the flange; the flange plate and the weight are connected by a pair of second bolts; the second bolts adopt an adjustable double-nut locking structure.

[0022] Furthermore, the position limiting and transmission ultrasonic device comprises a wedge-shaped mechanism, a position limiting ultrasonic device and a transmission device;

[0023] The wedge mechanism comprises a wedge base, an upper platform, a first wedge block, a second wedge block and a transmission screw;

[0024] The upper end surface of the wedge-shaped base is provided with a first rectangular groove, a second rectangular groove and the fourteenth to seventeenth holes of the same outer diameter and fixed depth as the cylindrical boss of the upper platform; the right end surface of the wedge-shaped base is provided with a transmission threaded hole of a fixed depth matched with the transmission screw; the first wedge block and the second wedge block are respectively installed in the first rectangular groove and the second rectangular groove, and one degree of freedom of the first wedge block and the second wedge block is limited in the length direction; the first wedge block and the second wedge block are provided with a transmission threaded hole in the center, and one end has a certain bevel angle; the transmission screw drives the first wedge block and the second wedge block through the threaded hole of fixed depth;

[0025] The upper platform is composed of an upper rectangular plate, a first cylindrical guide rod, a second cylindrical guide rod, a third cylindrical guide rod, a fourth cylindrical guide rod and a pair of wedge-shaped bosses;

[0026] The pair of wedge-shaped bosses and the first cylindrical guide rod, the second cylindrical guide rod, the third cylindrical guide rod, and the fourth cylindrical guide rod are welded and connected to the bottom surface of the upper rectangular plate; the first cylindrical guide rod to the fourth cylindrical guide rod are limited by the fourteenth hole to the seventeenth hole when the wedge mechanism is working; the first wedge block and the second wedge block beveled surface are tangentially matched with the pair of wedge bosses; the upper rectangular plate is fixedly connected to the limiting ultrasonic device and the transmission device;

[0027] The position-limiting ultrasonic device comprises an ultrasonic vibration fixture, a support column, and a fixing cover;

[0028] The ultrasonic vibration fixture comprises a third ultrasonic generator, a connecting platform, an arc-shaped fixture, a limiting rod and a limiting wheel;

[0029] One end of the third ultrasonic generator is connected to the connecting platform, and the other end is connected to the arc-shaped clamp, and the ultrasonic vibration directly acts on the arc-shaped clamp; a fixed number of limit rods are connected and fixed to the bottom surface of the arc-shaped clamp; the fixed number of limit rods are connected to the same number of limit wheels; the limit wheels can rotate around the limit rods;

[0030] The bottom end of the support column is fixedly connected to the upper rectangular plate, and the top end of the support column is provided with a threaded cylindrical boss; a through hole larger than the outer diameter of the cylindrical boss is provided at the center of the connecting platform, and the ultrasonic vibration fixture is screwed in and fixed through the fixing cover provided with a threaded hole of a fixed depth;

[0031] The transmission device includes an input motor, a transmission gear, and a limit plate;

[0032] The input motor is fixedly mounted on the upper rectangular plate; the input motor is connected to the transmission gear through a key; the transmission gear and the limit plate transmit the main power of rotation through gears;

[0033] The limiting plate includes a limiting ring, transmission teeth, and a through groove; a through hole larger than the outer diameter of the weight is opened in the center of the limiting ring; the thickness of the limiting ring is approximately one times the thickness of the weight; the outer periphery of the limiting ring is connected with transmission teeth meshing with the transmission gear; the bottom of the limiting ring is processed with a certain number of rectangular through grooves of a certain depth evenly distributed along the circumference; the bottom surface of the limiting ring is in contact with the polishing plate and is applied with ultrasonic vibration; the limiting ring is limited by the limiting wheel and is applied with ultrasonic vibration.

[0034] Furthermore, the ultrasonic atomization manipulator includes a six-axis manipulator and an ultrasonic atomization nozzle; the bottom of the six-axis manipulator is connected to the liquid return pipe, and the front end of the six-axis manipulator is equipped with an ultrasonic atomization nozzle for spraying polishing liquid between the polishing disk and the weight.

[0035] Furthermore, the first ultrasonic generating device includes an ultrasonic base fixedly connected to the mounting groove, an ultrasonic generator connected to the ultrasonic base, an ultrasonic transducer connected to the ultrasonic generator, a horn connected to the ultrasonic transducer and a connecting device connected to the horn, and an ultrasonic action head connected to the connecting device; the second ultrasonic generating device and the third ultrasonic generating device are composed of the same as the first ultrasonic generating device.

[0036] The method for using the above-mentioned four-dimensional ultrasonic plane polishing test bench comprises the following steps:

[0037] (1) The wedge-shaped mechanism is raised by a transmission screw, and the telescopic adjustment table is raised, and the workpiece to be processed is placed in the limit plate to limit it, so that the surface to be processed contacts the polishing plate, and the spindle telescopic adjustment table is adjusted so that the weight presses the workpiece to be processed, and then the second ultrasonic generator and the weight are adjusted to a suitable contact degree by the double nut locking structure, and the wedge-shaped mechanism is lowered by a transmission screw so that the limit ultrasonic device passes through the limit wheel to limit the limit plate, and at the same time, the limit plate is ensured to be correctly meshed with the transmission gear;

[0038] (2) The four-dimensional ultrasonic plane polishing experimental platform is started through the control system, and the four-dimensional ultrasonic plane polishing experimental platform starts to work; the output shafts of the rotating motor and the input motor start to rotate; the six-degree-of-freedom ultrasonic atomization manipulator works in coordination with the control system to adjust the ultrasonic atomization manipulator to a position and angle that meets the atomization requirements and provides an ultrasonic frequency f1; the spindle ultrasonic vibration device is started through the control system to provide an ultrasonic frequency f2 that acts on the weight and then is transmitted to the workpiece to be processed; the limiting ultrasonic device is started through the control system to provide an ultrasonic frequency f3 that is transmitted to the limiting plate through the limiting wheel and then indirectly acts on the workpiece to be processed; the polishing plate ultrasonic rotation device is started through the control system to provide an ultrasonic frequency f4 that acts on the polishing plate through the output shaft of the rotating motor and then acts on the workpiece to be processed;

[0039] (3) When the four-dimensional ultrasonic plane polishing experimental table starts working, the polishing liquid flows out from the bottom groove of the polishing disk, and then flows into the polishing liquid recovery device through the gap between the polishing disk and the outer shell of the polishing workbench, flows into the liquid storage tank after passing through the thin wall and the drainage groove, and is dispersed and stirred by the stirring blades in the liquid storage tank. The first adjustable valve connected to the first hole is opened to introduce the oxidant into the first hole, and the second adjustable valve connected to the second hole is closed. After sufficient oxidation, the third adjustable valve connected to the third hole is opened, and the first end cover and the second end cover are opened to a suitable angle. The pH is adjusted at the fourth hole and the pH value and other polishing liquid qualification tests are performed. The polishing liquid to be recovered in the return tank is electrolyzed through the fifth hole. The above process is adjusted until the polishing liquid in the return tank passes the qualification test. At this time, the ultrasonic atomization manipulator is controlled by the control system to absorb the liquid;

[0040] (4) When the four-dimensional ultrasonic plane polishing experimental table is finished working, the wedge-shaped mechanism is raised by the transmission screw, the telescopic adjustment table is raised, the processed workpiece is taken out for inspection, the wedge-shaped mechanism and the telescopic adjustment table are reset, the third adjustable valve connected to the third hole is closed, the first adjustable valve connected to the first hole is closed, the second adjustable valve connected to the second hole is opened to drain the liquid storage tank, the liquid return tank is drained through the fourth hole and the fifth hole, the liquid storage tank and the liquid return tank are cleaned, and the first end cover, the second end cover and the second adjustable valve are closed.

[0041] The beneficial technical effects of implementing the present invention are:

[0042] 1. The present invention adopts an ultrasonic atomizing manipulator, a spindle ultrasonic vibration device, a limiting ultrasonic device, and a polishing disk ultrasonic rotation device to act on the workpiece to be processed in four-dimensional ultrasonic composite, so that the ultrasonic polishing efficiency of the workpiece to be processed is effectively improved and the material removal rate is high.

[0043] 2. The present invention adopts a polishing liquid recovery device, so that the polishing process and the polishing liquid recovery process can be carried out simultaneously, saving processing time, reducing processing steps, and allowing the polishing liquid to be effectively recycled, saving costs and avoiding waste; the inverted frustum-shaped thin wall with drainage grooves evenly distributed around the circumference is conducive to the polishing liquid to flow quickly into the liquid storage tank, avoiding waste of polishing liquid; by controlling the adjustable valve of the polishing machine housing and controlling the polishing liquid post-processing process through the hole, the polishing liquid recovery process is controlled, which is easy to operate and control on site.

[0044] 3. The present invention adopts a six-axis manipulator, which has an additional degree of freedom of rotation of the atomizing nozzle compared to a five-axis manipulator, so that the polishing liquid can be sprayed more dispersedly, randomly and evenly onto the workpiece to be processed.

[0045] 4. The present invention adopts a double-nut locking structure to connect the ultrasonic transmitter and the weight, so that the ultrasonic vibration load on the weight can be controlled, thereby making the ultrasonic amplitude of the workpiece to be processed controllable.

[0046] 5. The present invention adopts a wedge-shaped structure, which can realize the upward and downward movement of the limiting clamp without disassembling the limiting clamp, which is convenient for operators to operate.

[0047] 6. The present invention applies active gear transmission to the limit plate, which increases the rotational freedom of the limit plate, makes the rotational polishing and grinding process of the polishing plate more complicated, and the polishing and grinding of the workpiece to be processed is more complete. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 It is a schematic diagram of the overall structure of the four-dimensional ultrasonic plane polishing experimental platform of the present invention;

[0049] Figure 2 It is a structural schematic diagram of a cross-sectional view of the internal polishing workbench of the present invention with the upper box body and the lower box body being disconnected;

[0050] Figure 3 It is a schematic structural diagram of a hidden protective cover of an ultrasonic rotating device for an inner polishing disk of the present invention;

[0051] Figure 4 It is a schematic diagram of the protective cover in the ultrasonic rotating device of the inner polishing disk of the present invention;

[0052] Figure 5 It is a structural schematic diagram of a cross-sectional view of the internal polishing liquid recovery device of the present invention, which is disconnected at the liquid storage tank and the third liquid infusion pipe;

[0053] Figure 6 It is a structural schematic diagram of the inner spindle ultrasonic vibration device of the present invention;

[0054] Figure 7 It is a structural schematic diagram of the internal limit and transmission ultrasonic device of the present invention;

[0055] Figure 8It is a structural schematic diagram of the inner wedge mechanism of the present invention;

[0056] Fig. 9 It is a schematic diagram of the structure of the ultrasonic atomization manipulator in the present invention;

[0057] Parts names and serial numbers in the figure:

[0058] Polishing workbench 10, polishing workbench shell 11, upper box 111, lower box 112, support base 113, polishing disc ultrasonic rotating device 12, rotating motor 121, polishing disc 122, transmission shaft 123, coupling 124, installation groove 125, first ultrasonic generating device 126, ultrasonic base 1261, ultrasonic generator 1262, ultrasonic transducer 1263, amplitude transformer 1264, connecting device 1265, ultrasonic action head 1266, protective cover 127, first protective cover 1271, second protective cover 1272, stirring blade 12 8, polishing liquid recovery device 13, thin wall 131, drainage groove 1311, liquid storage box 132, sealing ring 1321, first bolt 1322, first side wall 1323 of liquid storage box, second side wall 1324 of liquid storage box, first air delivery pipe 133, first adjustable valve 1331, second drainage pipe 134, second adjustable valve 1341, third delivery pipe 135, third adjustable valve 1351, first coarse filter 1352, second fine filter 1353, liquid return box 136, first end cover 137, second end cover 138, liquid return pipe 139, spindle super Acoustic vibration device 20, base 21, telescopic adjustment platform 22, spindle beam 23, second ultrasonic generator 24, weight 25, flange plate 26, second bolt 27, double nut locking structure 28, limit and transmission ultrasonic device 30, wedge mechanism 31, wedge base 311, first rectangular groove 3111, second rectangular groove 3112, upper platform 312, upper rectangular plate 3121, first cylindrical guide rod 3122, second cylindrical guide rod 3123, third cylindrical guide rod 3124, fourth cylindrical guide rod 3125, a pair of wedge-shaped bosses 3126, 3127, A first wedge block 313, a second wedge block 314, a transmission screw 315, a limiting ultrasonic device 32, an ultrasonic vibration clamp 321, a third ultrasonic generator 3211, a connecting platform 3212, an arc clamp 3213, a limiting rod 3214, a limiting wheel 3215, a support column 322, a fixing cover 323, a transmission device 33, an input motor 331, a transmission gear 332, a limiting plate 333, a limiting ring 3331, a transmission tooth 3332, a through groove 3333, an ultrasonic atomization manipulator 40, a six-axis manipulator 41, an ultrasonic atomization nozzle 42, and a control system 50. DETAILED DESCRIPTION

[0059] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. In the following description, specific details are set forth to facilitate a full understanding of the present invention, and the described experimental methods are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present invention.

[0060] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0061] In the present invention, for the convenience of description rather than limitation of the present invention, in the patent application specification and claims of the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. "Up", "down", "below", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship also changes accordingly. Moreover, the terms "include", "comprises", or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article, or device.

[0062] like Figure 1 , Figure 2 As shown, the present invention is a four-dimensional ultrasonic plane polishing test bench, comprising a polishing workbench 10, a spindle ultrasonic vibration device 20, a limit and transmission ultrasonic device 30, an ultrasonic atomization manipulator 40, and a control system 50; the polishing workbench 10 is composed of a polishing workbench housing 11, a polishing disc ultrasonic rotation device 12 and a polishing liquid recovery device 13; the spindle ultrasonic vibration device 20, the limit and transmission ultrasonic device 30, and the ultrasonic atomization manipulator 40 are respectively fixedly installed in the middle and on both sides of the upper surface of the polishing workbench 10; the control system 50 connects and controls the polishing workbench 10, the spindle ultrasonic vibration device 20, the limit and transmission ultrasonic device 30, and the ultrasonic atomization manipulator 40.

[0063] like Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the polishing workbench housing 11 includes an upper box body 111, a lower box body 112 and a support base 113;

[0064] The polishing disc ultrasonic rotating device 12 comprises a rotating motor 121, a polishing disc 122, a transmission shaft 123, a coupling 124, a mounting slot 125, a first ultrasonic generating device 126, a protective cover 127, and a stirring blade 128;

[0065] The rotating motor 121 is fixedly mounted at the bottom of the polishing workbench 10, and the output shaft of the rotating motor 121 is perpendicular to the polishing disc 122;

[0066] The transmission shaft 123 is connected to the rotating motor 121 through a coupling 124, and the transmission shaft 123 is provided with a mounting groove 125, and the first ultrasonic generating device 126 is fixed in the mounting groove 125; the transmission shaft 123 is connected to the polishing disc 122; a protective cover 127 is installed on the outer surface of the transmission shaft 123; the stirring blade 128 is installed at a fixed position of the coupling 124, and the stirring blade 128 rotates together with the coupling 124;

[0067] The protective cover 127 includes a first protective cover 1271 and a second protective cover 1272; the protective cover 127 is made of wear-resistant and water-resistant material; the lower end of the first protective cover 1271 is connected and fixed to the rotating motor 121; one end of the second protective cover 1272 is fixed to the stirring blade 128, and the second protective cover 1272 rotates with the stirring blade 128; the inner diameters of the first protective cover 1271 and the second protective cover 1272 are both larger than the maximum outer diameter of the coupling 124;

[0068] The polishing liquid recovery device 13 includes a thin wall 131, a liquid storage tank 132, a first air delivery pipe 133, a second liquid discharge pipe 134, a third liquid delivery pipe 135, a liquid return tank 136, a first end cover 137, a second end cover 138, and a liquid return pipe 139;

[0069] The thin wall 131 includes a drainage groove 1311; the thin wall 131 is an inverted truncated cone-shaped shell, and the large end of the thin wall 131 is tangent to the upper box body 111 in the polishing workbench shell 11; the drainage grooves 1311 are evenly distributed on the inner thin wall of the thin wall 131; the small end of the thin wall 131 is connected to the liquid storage tank 132;

[0070] The liquid storage tank 132 includes a sealing ring 1321, a first bolt 1322, a first side wall 1323 of the liquid storage tank, and a second side wall 1324 of the liquid storage tank; a through hole larger than the outer diameter of the first protective cover 1271 is opened at the bottom of the liquid storage tank 132; the bottom of the liquid storage tank 132 is sealed with the first protective cover 1271 through the sealing ring 1321, and the liquid storage tank 132, the first protective cover 1271 and the rotating motor 121 are fixed by a group of first bolts 1322; a first hole and a second hole are opened on the first side wall 1323 of the liquid storage tank, and the opening positions of the first hole and the second hole are symmetrical with respect to the stirring blade 128, and the first hole is opened above the second hole; the first hole and the second hole are respectively connected to the first air supply pipe 133 and the second liquid discharge pipe 134;

[0071] The first gas delivery pipe 133 and the second liquid discharge pipe 134 include a first adjustable valve 1331 and a second adjustable valve 1341; the second side wall 1324 of the liquid storage tank is provided with a third hole at the same position as the second hole, and the third hole is connected to the third liquid delivery pipe 135;

[0072] The third liquid infusion pipe 135 is a right-angle elbow pipe, which includes a third adjustable valve 1351, a first coarse filter 1352, and a second fine filter 1353; the third liquid infusion pipe 135 is connected to the liquid return tank 136;

[0073] The front wall of the liquid return tank 136 is provided with a fourth hole and a fifth hole, and the fourth hole and the fifth hole are connected with a first end cover 137 and a second end cover 138 that are tangent to the holes; the first end cover 137 and the second end cover 138 can be opened and closed freely; the upper side of the liquid return tank 136 is provided with a sixth hole, and the sixth hole is installed with a liquid return pipe 139 inserted into the liquid return tank 136 to the bottom;

[0074] The lower box body 112 in the polishing workbench housing 11 is provided with seventh to thirteenth holes, which respectively correspond to the first adjustable valve 1331 , the second adjustable valve 1341 , the third adjustable valve 1351 and the fourth hole, the fifth hole and the first air pipe 133 and the second liquid discharge pipe 134 .

[0075] like Figure 6 As shown, the spindle ultrasonic vibration device 20 includes a base 21, a telescopic adjustment platform 22, a spindle beam 23, a second ultrasonic generator 24, a weight 25, a flange plate 26, a second bolt 27, and a double nut locking structure 28;

[0076] The base 21 is connected to a telescopic adjustment platform 22 that can be telescopic in a direction perpendicular to the polishing disc 122; the telescopic adjustment platform 22 is connected to a spindle beam 23; the spindle beam 23 is connected to a second ultrasonic generator 24;

[0077] The end of the second ultrasonic generator 24 is tightly connected to the weight 25; a flange plate 26 is sleeved on the second ultrasonic generator 24; a through hole that can be tightly connected to the second ultrasonic generator 24 is opened in the center of the flange plate 26, and the flange plate 26 is opened with a pair of threaded through holes of equal diameter symmetrical about the center of the flange plate 26; the weight 25 is opened with a threaded hole of fixed depth at the same position as the threaded through hole of the flange; the flange plate 26 and the weight 25 are connected by a pair of second bolts 27; the second bolts 27 adopt an adjustable double nut locking structure 28.

[0078] like Figure 7 and Figure 8 As shown, the limiting and transmission ultrasonic device 30 includes a wedge-shaped mechanism 31, a limiting ultrasonic device 32 and a transmission device 33;

[0079] The wedge mechanism 31 includes a wedge base 311, an upper platform 312, a first wedge block 313, a second wedge block 314 and a transmission screw 315;

[0080] The upper end surface of the wedge base 311 is provided with a first rectangular groove 3111 and a second rectangular groove 3112 with a depth half the height of the first wedge block 313 and the second wedge block 314, and the fourteenth to seventeenth holes with the same outer diameter as the cylindrical boss of the upper end platform 312 and a fixed depth; the right end surface of the wedge base 311 is provided with a transmission threaded hole of a fixed depth that cooperates with the transmission screw 315; the first rectangular groove 3111 and the second rectangular groove 3112 are respectively installed with the first wedge block 313 and the second wedge block 314, and limit one degree of freedom of the first wedge block 313 and the second wedge block 314 in the length direction; the first wedge block 313 and the second wedge block 314 are provided with a transmission threaded hole in the center, and one end has a certain bevel angle; the transmission screw 315 drives the first wedge block 313 and the second wedge block 314 through the threaded hole of fixed depth;

[0081] The upper platform 312 is composed of an upper rectangular plate 3121, a first cylindrical guide rod 3122, a second cylindrical guide rod 3123, a third cylindrical guide rod 3124, a fourth cylindrical guide rod 3125 and a pair of wedge-shaped bosses 3126, 3127;

[0082] The pair of wedge-shaped bosses 3126, 3127 and the first cylindrical guide rod 3122, the second cylindrical guide rod 3123, the third cylindrical guide rod 3124, and the fourth cylindrical guide rod 3125 are welded and connected to the bottom surface of the upper rectangular plate 3121; the first cylindrical guide rod 3122 to the fourth cylindrical guide rod 3125 are limited by the fourteenth hole to the seventeenth hole when the wedge mechanism 31 is working; the first wedge block 313 and the second wedge block 314 chamfered surfaces are tangentially matched with the pair of wedge-shaped bosses 3126, 3127; the upper rectangular plate 3121 is fixedly connected to the limiting ultrasonic device 32 and the transmission device 33;

[0083] The position limiting ultrasonic device 32 includes an ultrasonic vibration fixture 321, a support column 322, and a fixing cover 323;

[0084] The ultrasonic vibration fixture 321 includes a third ultrasonic generator 3211, a connecting platform 3212, an arc-shaped fixture 3213, a limiting rod 3214 and a limiting wheel 3215;

[0085] One end of the third ultrasonic generator 3211 is connected to the connecting platform 3212, and the other end is connected to the arc-shaped clamp 3213, and the ultrasonic vibration directly acts on the arc-shaped clamp 3213; a fixed number of limit rods 3214 are connected and fixed to the bottom surface of the arc-shaped clamp 3213; the fixed number of limit rods 3214 are connected to the same number of limit wheels 3215; the limit wheels 3215 can rotate around the limit rods 3214;

[0086] The bottom end of the support column 322 is fixedly connected to the upper rectangular plate 3121, and the top of the support column 322 is provided with a threaded cylindrical boss; a through hole larger than the outer diameter of the cylindrical boss is provided at the center of the connecting platform 3212, and the ultrasonic vibration fixture 321 is screwed in and fixed through the fixing cover 323 provided with a threaded hole of a fixed depth;

[0087] The transmission device 33 includes an input motor 331, a transmission gear 332, and a limit plate 333;

[0088] The input motor 331 is fixedly mounted on the upper rectangular plate 3121; the input motor 331 is connected to the transmission gear 332 via a key; the transmission gear 332 and the limit plate 333 transmit the main power of rotation via gears;

[0089] The limiting plate 333 includes a limiting ring 3331, a transmission tooth 3332, and a through groove 3333; a through hole larger than the outer diameter of the weight 25 is opened in the center of the limiting ring 3331; the thickness of the limiting ring 3331 is approximately one times the thickness of the weight 25; the outer periphery of the limiting ring 3331 is connected with a transmission tooth 3332 meshing with the transmission gear 332; the bottom of the limiting ring 3331 is processed with a certain number of rectangular through grooves 3333 of a certain depth evenly distributed along the circumference; the bottom surface of the limiting ring 3331 is in contact with the polishing plate 122 and is applied with ultrasonic vibration; the limiting ring 3331 is limited by the limiting wheel 3215 and is applied with ultrasonic vibration.

[0090] like Fig. 9 As shown, the ultrasonic atomization manipulator 40 includes a six-axis manipulator 41 and an ultrasonic atomization nozzle 42; the bottom of the six-axis manipulator 41 is connected to the liquid return pipe 139, and the front end of the six-axis manipulator 41 is equipped with an ultrasonic atomization nozzle 42 for spraying polishing liquid between the polishing disc 122 and the weight 25.

[0091] like Figure 3 As shown, the first ultrasonic generating device 126 includes an ultrasonic base 1261 fixedly connected to the mounting groove 125, an ultrasonic generator 1262 connected to the ultrasonic base 1261, an ultrasonic transducer 1263 connected to the ultrasonic generator 1262, a horn 1264 connected to the ultrasonic transducer 1263 and a connecting device 1265 connected to the horn 1264, and an ultrasonic action head 1266 connected to the connecting device 1265; the second ultrasonic generating device and the third ultrasonic generating device have the same composition as the first ultrasonic generating device 126.

[0092] The following is an example of using the above-mentioned four-dimensional ultrasonic plane polishing test bench to process a workpiece to be processed.

[0093] The workpiece to be processed is a single crystal SiC substrate material with a size of 100×100mm×50mm and a flat polishing surface. The wedge-shaped mechanism 31 is raised by the transmission screw 315, and the telescopic adjustment platform 22 is raised. The workpiece to be processed is placed in the limit plate 333 so that it is limited, and the surface to be processed contacts the polishing plate 122. The spindle telescopic adjustment platform 22 is adjusted to make the weight 25 press the workpiece to be processed, and then the second ultrasonic generator 24 and the weight 25 are adjusted to a suitable contact degree by the double nut locking structure 28. The wedge-shaped mechanism 31 is lowered by the transmission screw 315, so that the limiting ultrasonic device 32 limits the limiting plate 333 through the limiting wheel 3215, and at the same time, it is ensured that the limiting plate 333 is correctly meshed with the transmission gear 332;

[0094] The four-dimensional ultrasonic plane polishing experimental platform is started by the control system 50, and the four-dimensional ultrasonic plane polishing experimental platform starts to work; the output shaft of the rotating motor 121 and the input motor 331 start to rotate; the six-degree-of-freedom ultrasonic atomization manipulator 40 works in coordination with the control system 50, the polishing liquid ultrasonic atomization nozzle 42 uses a silica abrasive suspension, the ultrasonic atomization manipulator 40 is adjusted to an angle of 45±5 degrees with the polishing disc 122, and the ultrasonic frequency f1 used for ultrasonic atomization is 50KHz; the spindle ultrasonic vibration device 20 is controlled by the control system The control system 50 is started, and the ultrasonic frequency f2 acting on the weight 25 and then transmitted to the workpiece to be processed is 20KHz; the limiting ultrasonic device 32 is started by the control system 50, and the ultrasonic frequency f3 transmitted to the limiting plate 333 through the limiting wheel 3215 and then indirectly acting on the workpiece to be processed is 20KHz; the polishing plate ultrasonic rotating device 12 is started by the control system 50, and the ultrasonic frequency f4 acting on the polishing plate 122 and then acting on the workpiece to be processed through the output shaft of the rotating motor 121 is 20KHz;

[0095] When the four-dimensional ultrasonic plane polishing experimental platform starts working, the silica polishing liquid flows out from the bottom groove 3333 of the polishing disc 122, and then flows into the polishing liquid recovery device 13 through the gap between the polishing disc 122 and the outer shell of the polishing workbench 10, and flows into the liquid storage tank 132 after passing through the thin wall 131 and the drainage groove 1311, and is dispersed and stirred by the stirring blade 128 in the liquid storage tank 132. The first adjustable valve 1331 connected to the first hole is opened to pass the silica oxidant into the first hole, and the second adjustable valve 1331 connected to the second hole is closed. Valve 1341, after being fully oxidized, open the third adjustable valve 1351 connected to the third hole, open the first end cover 137 and the second end cover 138 to a suitable angle, adjust the pH value in the fourth hole and perform a pH value and other silica polishing liquid qualification test, electrolyze the silica polishing liquid to be recovered in the return liquid tank 136 through the fifth hole, adjust the above process until the silica polishing liquid in the return liquid tank 136 passes the qualification test, and control the ultrasonic atomization manipulator 40 to absorb the liquid at this time through the control system 50;

[0096] When the four-dimensional ultrasonic plane polishing experimental platform is finished working, the wedge mechanism 31 is raised through the transmission screw 315, the telescopic adjustment platform 22 is raised, the processed workpiece is taken out for inspection, the wedge mechanism 31 and the telescopic adjustment platform 22 are reset, the third adjustable valve 1351 connected to the third hole is closed, the first adjustable valve 1331 connected to the first hole is closed, and the second adjustable valve 1341 connected to the second hole is opened to drain the liquid storage tank 132. After draining the liquid return tank 136 through the fourth hole and the fifth hole, the liquid storage tank 132 and the liquid return tank 136 are cleaned, and the first end cover 137, the second end cover 138 and the second adjustable valve 1341 are closed.

[0097] Due to the application of the above-mentioned scheme, compared with the prior art, the four-dimensional ultrasonic test bench of the present invention adopts a wedge structure and an adjustable locking structure, applies active rotation of the limit plate and includes a polishing liquid recovery device, so that the limit clamp is easy to adjust, the ultrasonic amplitude is adjustable, the polishing liquid is easy to recycle, and the four-dimensional ultrasonic vibration compound effectively improves the polishing efficiency of the workpiece to be processed in the limit plate.

[0098] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A four-dimensional ultrasonic plane polishing test bench, characterized in that: It includes a polishing workbench, a spindle ultrasonic vibration device, a limit and transmission ultrasonic device, an ultrasonic atomization manipulator, and a control system; the polishing workbench is composed of a polishing workbench shell, a polishing disc ultrasonic rotation device, and a polishing liquid recovery device; the spindle ultrasonic vibration device, the limit and transmission ultrasonic device, and the ultrasonic atomization manipulator are respectively fixedly installed in the middle and on both sides of the upper surface of the polishing workbench; the control system connects and controls the polishing workbench, the spindle ultrasonic vibration device, the limit and transmission ultrasonic device, and the ultrasonic atomization manipulator; The spindle ultrasonic vibration device includes a base, a telescopic adjustment table, a spindle beam, a second ultrasonic generator, a weight, a flange plate, a second bolt, and a double nut locking structure; The end of the second ultrasonic generator is tightly connected to the weight; the second ultrasonic generator is covered with a flange plate; a through hole that can be tightly connected to the second ultrasonic generator is opened in the center of the flange plate, and the flange plate is opened with a pair of threaded through holes of equal diameter and symmetrical about the center of the flange plate; the weight is opened with a threaded hole of fixed depth at the same position as the threaded through hole of the flange plate; the flange plate and the weight are connected by a pair of second bolts; the second bolts adopt an adjustable double nut locking structure; The limiting and transmission ultrasonic device comprises a wedge-shaped mechanism, a limiting ultrasonic device and a transmission device; The wedge mechanism comprises a wedge base, an upper platform, a first wedge block, a second wedge block and a transmission screw; The upper platform is composed of an upper rectangular plate, a first cylindrical guide rod, a second cylindrical guide rod, a third cylindrical guide rod, a fourth cylindrical guide rod and a pair of wedge-shaped bosses; The upper rectangular plate is fixedly connected to the limiting ultrasonic device and the transmission device; The position-limiting ultrasonic device comprises an ultrasonic vibration fixture, a support column, and a fixing cover; The ultrasonic vibration fixture comprises a third ultrasonic generator, a connecting platform, an arc-shaped fixture, a limiting rod and a limiting wheel; One end of the third ultrasonic generator is connected to the connecting platform, and the other end is connected to the arc-shaped clamp, and the ultrasonic vibration directly acts on the arc-shaped clamp; a fixed number of limit rods are connected and fixed to the bottom surface of the arc-shaped clamp; the fixed number of limit rods are connected to the same number of limit wheels; the limit wheels can rotate around the limit rods; The bottom end of the support column is fixedly connected to the upper rectangular plate, and the top end of the support column is provided with a threaded cylindrical boss; a through hole larger than the outer diameter of the cylindrical boss is provided at the center of the connecting platform, and the ultrasonic vibration fixture is screwed in and fixed through the fixing cover provided with a threaded hole of a fixed depth; The transmission device includes an input motor, a transmission gear, and a limit plate; The input motor is fixedly mounted on the upper rectangular plate; the input motor is connected to the transmission gear through a key; the transmission gear and the limit plate transmit the main power of rotation through gears; The limiting plate includes a limiting ring, transmission teeth, and a through groove; a through hole larger than the outer diameter of the weight is opened in the center of the limiting ring; the thickness of the limiting ring is approximately one times the thickness of the weight; the outer periphery of the limiting ring is connected with transmission teeth meshing with the transmission gear; the bottom of the limiting ring is processed with a certain number of rectangular through grooves of a certain depth evenly distributed along the circumference; the bottom surface of the limiting ring is in contact with the polishing plate and is applied with ultrasonic vibration; the limiting ring is limited by the limiting wheel and is applied with ultrasonic vibration.

2. A four-dimensional ultrasonic plane polishing test bench according to claim 1, characterized in that: The polishing workbench shell includes an upper box body, a lower box body and a supporting base; The polishing disc ultrasonic rotating device comprises a rotating motor, a polishing disc, a transmission shaft, a coupling, a mounting slot, a first ultrasonic generating device, a protective sleeve, and a stirring blade; The rotating motor is fixedly mounted at the bottom of the polishing workbench, and the output shaft of the rotating motor is perpendicular to the polishing disc; The transmission shaft is connected to the rotating motor through a coupling, and the transmission shaft is provided with a mounting groove, and the first ultrasonic generating device is fixed in the mounting groove; the transmission shaft is connected to the polishing plate; a protective sleeve is installed on the outer surface of the transmission shaft; the stirring blade is installed at a fixed position of the coupling, and the stirring blade rotates with the coupling; The protective cover comprises a first protective cover and a second protective cover; the protective cover is made of wear-resistant and water-resistant material; the lower end of the first protective cover is connected and fixed to the rotating motor; one end of the second protective cover is fixed to the stirring blade, and the second protective cover rotates with the stirring blade; the inner diameters of the first protective cover and the second protective cover are both larger than the maximum outer diameter of the coupling; The polishing liquid recovery device comprises a thin wall, a liquid storage tank, a first air delivery pipe, a second liquid discharge pipe, a third liquid delivery pipe, a liquid return tank, a first end cover, a second end cover, and a liquid return pipe; The thin wall includes a drainage groove; the thin wall is an inverted truncated cone-shaped shell, and the large end of the thin wall is tangent to the upper box body in the outer shell of the polishing workbench; the drainage grooves are evenly distributed on the inner thin wall of the thin wall; the small end of the thin wall is connected to the liquid storage tank; The liquid storage tank comprises a sealing ring, a first bolt, a first side wall of the liquid storage tank, and a second side wall of the liquid storage tank; a through hole larger than the outer diameter of the first protective cover is provided at the bottom of the liquid storage tank; the bottom of the liquid storage tank is sealed with the first protective cover through the sealing ring, and the liquid storage tank, the first protective cover and the rotating motor are fixed by a group of first bolts; a first hole and a second hole are provided on the first side wall of the liquid storage tank, the first hole and the second hole are provided at positions symmetrical with respect to the stirring blade, and the first hole is provided above the second hole; the first hole and the second hole are respectively connected to the first air supply pipe and the second liquid discharge pipe; The first gas delivery pipe and the second liquid discharge pipe include a first adjustable valve and a second adjustable valve; the second side wall of the liquid storage box is provided with a third hole at the same position as the second hole, and the third hole is connected to the third liquid delivery pipe; The third liquid infusion pipe is a right-angle elbow pipe, which includes a third adjustable valve, a first coarse filter, and a second fine filter; the third liquid infusion pipe is connected to the liquid return tank; The front wall of the liquid return tank is provided with a fourth hole and a fifth hole, and the fourth hole and the fifth hole are connected with a first end cover and a second end cover tangent to the holes; the first end cover and the second end cover can be opened and closed freely; the upper side of the liquid return tank is provided with a sixth hole, and the sixth hole is provided with a liquid return pipe inserted into the liquid return tank to the bottom; The lower box body in the polishing workbench shell is provided with seventh to thirteenth holes, which respectively correspond to the first adjustable valve, the second adjustable valve, the third adjustable valve and the fourth hole, the fifth hole and the first air pipe and the second liquid discharge pipe.

3. A four-dimensional ultrasonic plane polishing test bench according to claim 2, characterized in that: The base is connected to a telescopic adjustment platform which can be telescopically extended and retracted perpendicular to the direction of the polishing disc; the telescopic adjustment platform is connected to a main shaft beam; and the main shaft beam is connected to a second ultrasonic generator.

4. A four-dimensional ultrasonic plane polishing test bench according to claim 3, characterized in that: The upper end surface of the wedge-shaped base is provided with a first rectangular groove, a second rectangular groove and the fourteenth to seventeenth holes of the same outer diameter and fixed depth as the cylindrical boss of the upper platform; the right end surface of the wedge-shaped base is provided with a transmission threaded hole of a fixed depth matched with the transmission screw; the first wedge block and the second wedge block are respectively installed in the first rectangular groove and the second rectangular groove, and one degree of freedom of the first wedge block and the second wedge block is limited in the length direction; the first wedge block and the second wedge block are provided with a transmission threaded hole in the center, and one end has a certain bevel angle; the transmission screw drives the first wedge block and the second wedge block through the threaded hole of fixed depth; The pair of wedge-shaped bosses and the first cylindrical guide rod, the second cylindrical guide rod, the third cylindrical guide rod, and the fourth cylindrical guide rod are welded and connected to the bottom surface of the upper rectangular plate; the first cylindrical guide rod to the fourth cylindrical guide rod are limited by the fourteenth hole to the seventeenth hole when the wedge mechanism is working; the first wedge block and the second wedge block bevel surfaces are tangentially matched with the pair of wedge bosses.

5. The four-dimensional ultrasonic plane polishing test bench according to claim 4, characterized in that: The ultrasonic atomization manipulator comprises a six-axis manipulator and an ultrasonic atomization nozzle; the bottom of the six-axis manipulator is connected to the liquid return pipe, and the front end of the six-axis manipulator is equipped with an ultrasonic atomization nozzle for spraying polishing liquid between the polishing disc and the weight.

6. A four-dimensional ultrasonic plane polishing test bench according to claim 5, characterized in that: The first ultrasonic generating device includes an ultrasonic base fixedly connected to the mounting groove, an ultrasonic generator connected to the ultrasonic base, an ultrasonic transducer connected to the ultrasonic generator, a horn connected to the ultrasonic transducer and a connecting device connected to the horn, and an ultrasonic action head connected to the connecting device; the second ultrasonic generator and the third ultrasonic generating device have the same composition as the first ultrasonic generating device.

7. The method for using the four-dimensional ultrasonic plane polishing test bench according to claim 6 is characterized in that: The following steps are involved: (1) The wedge-shaped mechanism is raised by a transmission screw, and the telescopic adjustment table is raised, and the workpiece to be processed is placed in the limit plate to limit it, so that the surface to be processed contacts the polishing plate, and the telescopic adjustment table is adjusted so that the weight presses the workpiece to be processed, and then the second ultrasonic generator and the weight are adjusted to a suitable contact degree by the double nut locking structure, and the wedge-shaped mechanism is lowered by a transmission screw, so that the limit ultrasonic device passes through the limit wheel to limit the limit plate, and at the same time, ensure that the limit plate and the transmission gear are correctly meshed; (2) The four-dimensional ultrasonic plane polishing experimental platform is started through the control system, and the four-dimensional ultrasonic plane polishing experimental platform starts to work; the output shafts of the rotating motor and the input motor start to rotate; the six-degree-of-freedom ultrasonic atomization manipulator works in coordination through the control system to adjust the ultrasonic atomization manipulator to a position and angle that meets the atomization requirements and provides an ultrasonic frequency f1; the spindle ultrasonic vibration device is started through the control system to provide an ultrasonic frequency f2 that acts on the weight and then is transmitted to the workpiece to be processed; the limiting ultrasonic device is started through the control system to provide an ultrasonic frequency f3 that is transmitted to the limiting plate through the limiting wheel and then indirectly acts on the workpiece to be processed; the polishing plate ultrasonic rotation device is started through the control system to provide an ultrasonic frequency f4 that acts on the polishing plate through the output shaft of the rotating motor and then acts on the workpiece to be processed; (3) When the four-dimensional ultrasonic plane polishing experimental table starts working, the polishing liquid flows out from the bottom groove of the polishing disk, and then flows into the polishing liquid recovery device through the gap between the polishing disk and the outer shell of the polishing workbench, flows into the liquid storage tank after passing through the thin wall and the drainage groove, and is dispersed and stirred by the stirring blades in the liquid storage tank. The first adjustable valve connected to the first hole is opened to introduce the oxidant into the first hole, and the second adjustable valve connected to the second hole is closed. After sufficient oxidation, the third adjustable valve connected to the third hole is opened, and the first end cover and the second end cover are opened to a suitable angle. The pH value is adjusted at the fourth hole and the pH value polishing liquid qualification test is performed. The polishing liquid to be recovered in the return tank is electrolyzed through the fifth hole. The above process is adjusted until the polishing liquid in the return tank is qualified. At this time, the ultrasonic atomization manipulator is controlled by the control system to absorb the liquid; (4) When the four-dimensional ultrasonic plane polishing experimental table is finished working, the wedge-shaped mechanism is raised by the transmission screw, the telescopic adjustment table is raised, the processed workpiece is taken out for inspection, the wedge-shaped mechanism and the telescopic adjustment table are reset, the third adjustable valve connected to the third hole is closed, the first adjustable valve connected to the first hole is closed, the second adjustable valve connected to the second hole is opened to drain the liquid storage tank, the liquid return tank is drained through the fourth hole and the fifth hole, the liquid storage tank and the liquid return tank are cleaned, and the first end cover, the second end cover and the second adjustable valve are closed.

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