Low-light detection devices and semiconductor equipment

Abstract

This invention discloses a low-light detection device and a semiconductor device. According to an embodiment of the invention, the low-light detection device includes: a rotating platform, a first moving platform, a second moving platform, a probe card, an air inlet, and an air outlet. The rotating platform has a transparent support stage for carrying a test sample. The first moving platform is rotatably mounted on the rotating platform and can move along a first direction. The second moving platform is movably mounted on the first moving platform and can move along a second direction, the first and second directions being perpendicular. The first and second moving platforms cooperate with the rotating platform to define a receiving chamber. The second moving platform has an observation section, which is formed as a transparent element for observing the interior of the receiving chamber. The probe card is movably mounted vertically within the receiving chamber. The device can provide a stable temperature environment for the test sample and can adjust the probe card to ensure accurate placement of the probe on the test sample.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to a low-light detection device and a semiconductor equipment. Background Technology

[0002] Existing low-light detection equipment lacks a dedicated observation chamber specifically designed to keep integrated circuit samples in a sealed state for high and low temperature environments. The industry practice typically involves fixing the test sample and then directing a high- or low-temperature airflow generated by an external temperature source onto the sample surface to maintain a specific temperature. This method prevents the sample from being moved or adjusted once placed in the chamber, and also hinders the connection and detection of the sample by external probes. Furthermore, the connection between the chamber and the high- or low-temperature gas generator via a pipe allows the gas to enter the chamber, reducing its airtightness and increasing the risk of contamination to the test sample. Moreover, the high- or low-temperature airflow enters the instrumentation through the pipe and impacts the sample surface, placing the detection lens very close to the sample. This inevitably leads to interference or even damage to the lens from the high- or low-temperature air, affecting its accuracy and lifespan. Summary of the Invention

[0003] The purpose of this invention is to provide a low-light detection device that can provide a stable temperature environment for the test sample and can adjust the probe card so that the probes of the probe card are accurately embedded in the test sample, which facilitates the test operation.

[0004] According to an embodiment of the present invention, a low-light detection device includes: a rotating platform having a transparent support stage for carrying a test sample; a first movable platform rotatably disposed on the rotating platform and movable along a first direction; a second movable platform movably disposed on the first movable platform and movable along a second direction, the first direction being perpendicular to the second direction; both the first and second movable platforms having hollow structures with open bottoms to cooperate with the rotating platform in defining a receiving chamber; the support stage being located at the bottom of the receiving chamber; and the second movable platform having an observation section formed as a transparent element for observing the interior of the receiving chamber; and a probe card movably disposed vertically within the receiving chamber and located between the support stage and the observation section.

[0005] An air inlet and an air outlet are formed on the first or second mobile platform and connected to the receiving chamber. The air inlet is used to introduce gas at a specific temperature required for detection into the receiving chamber, and the air outlet is used to discharge the gas from the receiving chamber.

[0006] According to some embodiments of the present invention, the low-light detection device further includes a rotating disk, and the rotating platform is provided with a rotating track surrounding at least a portion of the support platform in the circumferential direction. The rotating disk is rotatably fitted within the rotating track, and the first moving platform is fixedly connected to the rotating disk.

[0007] Optionally, the rotating disk is provided with a fixed protrusion, and the first moving platform is provided with a reserved groove that cooperates with the fixed protrusion.

[0008] According to some embodiments of the present invention, the low-light detection device further includes a first moving device. The first moving platform is provided with a first slide groove extending along a first direction. The first moving device includes a first driving device and a first slider that is slidably engaged with the first slide groove. The first slider is connected to the rotating platform. The first driving device drives the first slider to slide in the first slide groove to drive the first moving platform to move.

[0009] Optionally, the first driving device may be a lead screw, which at least partially extends into the first groove, and the first slider is sleeved on the lead screw and slidably connected to the lead screw.

[0010] According to some embodiments of the present invention, the second mobile platform is provided with a first opening and a second opening communicating with the receiving compartment, the observation part is provided at the first opening, and the second opening is open and corresponds to the position of the external wiring harness connector of the probe card so as to facilitate the external connection of the external wiring harness connector.

[0011] According to some embodiments of the present invention, the first mobile platform is provided with a fixed part, the second mobile platform is formed with a second slide groove, the low light detection device further includes a second moving device, the second moving device includes a second driving device and a second slider, the second slider is slidably connected to the second slide groove and fixedly connected to the fixed part, the second driving device is connected to the second slider so that the second slider slides relative to the second slide groove to drive the second mobile platform to move along the second direction.

[0012] According to some embodiments of the present invention, the low-light detection device further includes at least one third moving device, which extends at least partially into the receiving chamber and is connected to the probe card to drive the probe card to move in a vertical direction.

[0013] Optionally, there are three third moving devices, and the three third moving devices are arranged in a triangular pattern on the horizontal plane.

[0014] According to some embodiments of the present invention, the observation unit is detachably mounted on the second mobile platform.

[0015] According to some embodiments of the present invention, the rotating platform has a gas inlet and a gas channel, the gas channel being in communication with the gas inlet for guiding the gas flowing in through the gas inlet to the side of the support platform away from the receiving chamber, so that the gas flows through the back of the support platform to cool or defrost the support platform.

[0016] According to some embodiments of the present invention, both the support platform and the observation section are double-layered vacuum glass.

[0017] According to some embodiments of the present invention, a temperature detection device is also included, which is used to detect the temperature inside the containment chamber in real time.

[0018] According to some embodiments of the present invention, the temperature detection device is a temperature sensor, which is disposed on the probe card and connected to the external wiring harness connector of the probe card, so as to lead out the signal of the temperature sensor through the external wiring harness connector.

[0019] The present invention also proposes a semiconductor device.

[0020] The semiconductor device according to an embodiment of the present invention includes: a low-light detection device as described in the above embodiment; a high-low temperature gas generating device connected to the gas inlet; a first detection lens disposed below the support platform and facing the back of the support platform for observing and detecting the test sample; and a second detection lens disposed above the observation section for observing whether the probe of the probe card is aligned with the test sample.

[0021] According to an embodiment of the present invention, the low-light detection device, by setting a first moving platform, a second moving platform, and a rotating platform, not only forms a closed receiving chamber to hold and contain the test sample, but also allows the first moving platform, the second moving platform, and the rotating platform to move relative to each other, so that the probe card can translate and rotate relative to the test sample in the horizontal direction, and can also move up and down in the vertical direction, thereby adjusting the position of the probe card and the test sample so that the probe card can be accurately attached to the circuit of the test sample; by setting an air inlet, the gas required for detection is introduced into the receiving chamber to provide a stable and specific temperature environment required for detection of the test sample; an observation section is provided on the second moving platform, and a detection lens can be formed above the second moving platform, so that the detection lens can observe the position of the probe card and the test sample through the observation section to ensure that the probe card can be accurately attached to the test sample, and also to separate the detection lens from the test sample to avoid damage to the detection lens. Attached Figure Description

[0022] Figure 1This is a schematic diagram of the rotating platform and rotating disk of the low-light detection device according to an embodiment of the present invention;

[0023] Figure 2 This is a cross-sectional schematic diagram of the rotating platform of the low-light detection device according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the first moving platform of the low-light detection device according to an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the structure of the low-light detection device according to an embodiment of the present invention after the rotating platform and the first moving platform are connected;

[0026] Figure 5 This is a schematic diagram of the structure of the second moving platform of the low-light detection device according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the probe card of the low-light detection device according to an embodiment of the present invention;

[0028] Figure 7 This is a schematic diagram of the structure of a low-light detection device according to an embodiment of the present invention at one angle;

[0029] Figure 8 This is a cross-sectional schematic diagram of a low-light detection device according to an embodiment of the present invention;

[0030] Figure 9 This is a schematic diagram of the structure of a semiconductor device according to an embodiment of the present invention.

[0031] Figure label:

[0032] 1000: Semiconductor Equipment

[0033] 100: Low-light detection device;

[0034] 1: Rotating platform; 11: Support platform; 12: Rotary disk; 13: Rotating track; 14: Fixed protrusion; 15: Gas inlet; 16: Gas passage; 17: Reserved groove.

[0035] 2: First mobile platform, 21: Fixed part,

[0036] 3: Second mobile platform; 31: Observation unit; 32: First opening; 33: Second opening;

[0037] 4: Probe card; 41: External wiring harness connector; 42: Connection hole;

[0038] 5: Storage compartment; 51: Air inlet; 52: Air outlet;

[0039] 6: First moving device; 61: First slide rail; 62: First slider; 63: First driving device; 64: First direction adjustment knob;

[0040] 7: Second moving device; 71: Second direction adjustment knob;

[0041] 8: Third mobile device;

[0042] 200: First detection lens; 300: Second detection lens;

[0043] 400: High and low temperature gas generating device. Detailed Implementation

[0044] The following detailed description of a low-light detection device 100 proposed in this invention, in conjunction with the accompanying drawings and specific embodiments, provides further insight.

[0045] The low-light detection device 100 according to an embodiment of the present invention is described below with reference to the accompanying drawings.

[0046] Combination Figures 1-8 As shown, the low-light detection device 100 according to an embodiment of the present invention includes a rotating platform 1, a first moving platform 2, a second moving platform 3, a probe card 4, an air inlet 51, and an air outlet 52.

[0047] Specifically, the rotating platform 1 is equipped with a transparent support platform 11 for carrying the test sample. The transparent support platform 11 not only carries the test sample but also facilitates the detection lens to detect and observe the test sample through the transparent support platform 11. The first moving platform 2 is rotatably mounted on the rotating platform 1 and can move along a first direction. The second moving platform 3 is movably mounted on the first moving platform 2 and can move along a second direction. The first and second directions are perpendicular to each other. That is, on the horizontal plane of the rotating platform 1, the first moving platform 2 can move relative to the rotating platform 1 along the first direction, and the second moving platform 3 can move relative to the rotating platform 1 and the first moving platform 2 along the second direction. The first moving platform 2 can rotate relative to the rotating platform 1, and the second moving platform 3 is mounted on the first moving platform 2, so that the second moving platform 3 can also rotate relative to the rotating platform 1 on the horizontal plane.

[0048] The first moving platform 2 and the second moving platform 3 have hollow structures with open bottoms to cooperate with the rotating platform 1 to define the receiving chamber 5. The support platform 11 is located at the bottom of the receiving chamber 5. Specifically, the first moving platform 2 is located on the rotating platform 1 and the support platform 11 is located inside the first moving platform 2. Figure 2 -Figure 4 and Figure 8As shown, the first moving platform 2 can form a hollow frame structure surrounding the support platform 11. The second moving platform 3 is set on the first moving platform 2, with an open bottom and corresponding to the support platform 11. The first moving platform 2, the second moving platform 3 and the rotating platform 1 together form a closed receiving chamber 5. The support platform 11 is located inside the receiving chamber 5 and at the bottom of the receiving chamber 5. The test sample is placed on the support platform 11 so that it is located inside the closed receiving chamber 5. Thus, a chamber for placing the test sample can be formed by the first moving platform 2, the second moving platform 3 and the rotating platform 1.

[0049] The second mobile platform 3 is equipped with an observation section 31, which is formed as a transparent part for observing the interior of the receiving chamber 5. This allows for easy observation and detection of the test samples inside the receiving chamber 5. The observation section 31 can be located on the side or top of the mobile platform, for example... Figure 8 As shown, the observation unit 31 is located on the top wall of the second moving platform 3. This facilitates the observation of the test sample and probe card 4 inside the housing chamber 5 and makes it easy to adjust the position of the probe card 4 to accurately attach it to the test sample. On the other hand, the test sample is located at the bottom of the housing chamber 5, which also makes the distance between the test sample and the observation unit 31 greater, thereby reducing the damage of temperature to the probe lens.

[0050] The probe card 4 is movably disposed within the receiving chamber 5 and located between the support platform 11 and the observation section 31. The probe card 4 is used for alignment and connection with the test sample. The probe card 4 is disposed within the receiving chamber 5, and the test sample is placed on the support platform 11 of the rotating platform 1. Thus, the first moving platform 2 and the second moving platform 3 move and rotate relative to the rotating platform 1, thereby enabling the probe card 4 to move and rotate relative to the rotating platform 1 in the first and second directions on the horizontal plane. At the same time, the probe card 4 can also move within the receiving chamber 5, for example, it can move in the vertical direction perpendicular to the horizontal plane. Thus, the probe card 4 can move relative to the support platform 11 in the first and second directions on the horizontal plane and in the vertical direction, and it can also rotate relative to the support platform 11. That is to say, the probe card 4 can rotate on the horizontal plane and translate in the first and second directions on the horizontal plane, and it can also move up and down in the vertical direction within the receiving chamber 5. Thus, the position of the probe card 4 can be adjusted in three dimensions so that the probe of the probe card 4 can be accurately inserted into the circuit of the test sample.

[0051] Optionally, both the support platform 11 and the observation unit 31 can be double-layered vacuum glass. The double-layered hollow glass not only allows observation of the interior of the containment chamber 5, but also provides thermal insulation, preventing the temperature inside the containment chamber 5 from affecting the external detection lens.

[0052] Air inlet 51 and air outlet 52 are formed on the first moving platform 2 or the second moving platform 3 and are connected to the receiving chamber 5, in such a way Figure 8 In the example shown, the air inlet 51 and the air outlet 52 are located on the second moving platform 3. The air inlet 51 is used to introduce gas at a specific temperature required for testing into the receiving chamber 5, and the air outlet 52 is used to discharge the gas from the receiving chamber 5. Specifically, the air inlet 51 can be connected to the high and low temperature gas generating device 400. The gas required for testing can enter the receiving chamber 5 through the air inlet 51 to form a specific temperature environment required for testing within the receiving chamber 5, thereby providing the required temperature environment for testing the test sample. This eliminates the need to directly blow hot or cold air onto the surface of the test sample, not only providing a stable specific temperature testing environment for the test sample, but also facilitating temperature control of the environment.

[0053] Therefore, the low-light detection device 100 according to the present invention, by setting a first moving platform 2, a second moving platform 3 and a rotating platform 1, can not only form a closed receiving chamber 5 to hold and contain the test sample, but also the first moving platform 2, the second moving platform 3 and the rotating platform 1 can move relative to each other, so that the probe card 4 can translate and rotate relative to the test sample in the horizontal direction, and can also move up and down in the vertical direction, thereby adjusting the position of the probe card 4 and the test sample so that the probe card 4 can be accurately attached to the circuit of the test sample; by setting an air inlet 51, the gas required for detection is introduced into the receiving chamber 5 to provide a stable specific temperature environment required for the test sample; the second moving platform 3 is provided with an observation part 31, and the detection lens can be formed above the second moving platform 3, so that the detection lens can observe the position of the probe card 4 and the test sample through the observation part 31 to ensure that the probe card 4 can be accurately attached to the test sample, and also to separate the detection lens from the test sample to avoid damage to the detection lens.

[0054] In some embodiments of the present invention, such as Figure 1 and Figure 4 As shown, the low-light detection device 100 according to an embodiment of the present invention may include a rotating disk 12, a rotating platform 1 having a rotating track 13 surrounding at least a portion of the support platform 11, the rotating disk 12 being rotatably fitted within the rotating track 13, and a first moving platform 2 being fixedly connected to the rotating disk 12. Thus, the rotating disk 12 rotates along the rotating track 13, thereby driving the first moving platform 2 to rotate relative to the rotating platform 1 in the direction surrounding the support platform 11, thereby realizing the rotation of the first moving platform 2 in the horizontal plane. Specifically, as... Figure 1 As shown, the rotating track 13 can be formed in an arc shape, and the rotating track 13 can include at least two arc-shaped tracks. There can be at least two rotating disks 12 that cooperate with the rotating track 13. In this way, the first moving platform 2 can be stably supported by the fixed connection of at least two rotating disks 12 with the first moving platform 2, making the structure of the first moving platform 2 and the rotating platform 1 more stable.

[0055] Optionally, such as Figure 1 and Figure 4 As shown, the rotating disk 12 may be provided with a fixed protrusion 14, and the first moving platform 2 is provided with a reserved groove 17 that cooperates with the fixed protrusion 14. By inserting the fixed protrusion 14 into the reserved groove 17, the first moving platform 2 and the rotating disk 12 can be fixedly connected.

[0056] In some embodiments of the present invention, such as Figure 3 As shown, the low-light detection device 100 may further include a first moving device 6, which drives the first moving platform 2 to move along a first direction. Specifically, the first moving platform 2 is provided with a first slide groove 61 extending along the first direction. The first moving device 6 includes a first driving device 63 and a first slider 62 slidably engaged with the first slide groove 61. The first slider 62 is connected to the rotating platform 1. The first driving device 63 drives the first slider 62 to slide in the first slide groove 61 to drive the first moving platform 2 to move. The first driving device 63 may be disposed on the first moving platform 2. The first driving device 63 drives the first slider 62 to slide along the first slide groove 61, while the first slider 62 is fixed to the rotating platform 1, thereby enabling the first moving platform 2 with the first slide groove 61 to move along the first direction. Figure 3 In the example shown, the reserved groove 17 can be formed on the first slider 62. The first slider 62 is fixedly connected to the rotating disk 12 by the fixed connection between the reserved groove 17 and the fixed protrusion 14. This not only facilitates the connection between the first moving platform 2 and the rotating platform 1, but also results in a simple and compact structure.

[0057] Optionally, the first moving device 6 can be a lead screw drive structure, and the first driving device 63 can be a lead screw. The lead screw extends at least partially into the first sliding groove 61, and the first slider 62 is sleeved on the lead screw and slidably connected to it. When the lead screw extends into the first sliding groove 61, its axial direction is consistent with the first direction. Thus, the lead screw rotates to drive the first slider 62 to slide along the axial direction of the lead screw. The first slider 62 is fixed to the rotating platform 1, so that the lead screw moves relative to the rotating platform 1 along its axial direction, i.e., the first direction, thereby driving the first moving platform 2 to move along the first direction. The sliding engagement between the first slider 62 and the first sliding groove 61 also makes the sliding connection between the first slider 62 and the first moving platform 2 smoother and more stable.

[0058] Optionally, the first moving platform 2 may also be equipped with a first direction adjustment knob 64, which is connected to the first drive device 63. Movement in the first direction is achieved by adjusting the first direction adjustment knob 64, facilitating operation. Furthermore, the gap between the rotating platform 1 and the first moving platform 2 is small. Without affecting the movement and rotation of the first moving platform 2 relative to the rotating platform 1, heat-insulating material can be filled between the first moving platform 2 and the rotating platform 1. This isolates the containment chamber 5 from the outside environment, reducing temperature transfer between the containment chamber 5 and the outside world. This not only stabilizes the temperature inside the containment chamber 5 but also prevents temperature changes inside the containment chamber 5 from affecting the external detection lens.

[0059] In some embodiments of the present invention, the first moving platform 2 is provided with a fixing part 21, the second moving platform 3 is formed with a second slide groove, the second slide groove extends along a second direction, and the low-light detection device 100 further includes a second moving device 7, the second moving device 7 is used to drive the second moving platform 3 to move along the second direction, the second moving device 7 includes a second driving device and a second slider, the second slider is slidably connected to the second slide groove and fixedly connected to the fixing part 21, the second driving device is connected to the second slider so that the second slider slides relative to the second slide groove, thereby driving the second moving platform 3 to move along the second direction.

[0060] Specifically, the second driving device is mounted on the second moving platform 3, and the second slider is slidably mounted in the second slide groove and can slide in the second direction within the second slide groove. The second driving device is used to drive the second slider to move in the second direction. Since the second slider is fixedly connected to the fixing part 21, the second moving platform 3 with the second slide groove moves relative to the first moving platform 2 with the fixing part 21, thereby realizing the movement of the second moving platform 3 in the second direction.

[0061] Optionally, the structure of the second moving device 7 can be the same as that of the first moving device 6. For example, the second moving device 7 can be a lead screw drive structure, wherein the second drive device is a lead screw, the second slider is sleeved on the lead screw and is movable along the axial direction of the lead screw, the lead screw is mounted on the second moving platform 3, and since the second slider is fixedly connected to the first moving platform 2, the lead screw rotates to move relative to the second slider in the second direction, thereby driving the second moving platform 3 to move relative to the first moving platform 2 in the second direction.

[0062] Optionally, the second moving platform 3 may also be equipped with a second direction adjustment knob 71, which is connected to the second drive device. Movement in the second direction is achieved by adjusting the second direction adjustment knob 71. Furthermore, the gap between the first moving platform 2 and the second moving platform 3 is small. Without affecting the movement of the second moving platform 3, heat-insulating material can be filled between the second moving platform 3 and the first moving platform 2. This further isolates the containment chamber 5 from the outside environment, reducing temperature transfer between the containment chamber 5 and the outside world, stabilizing the temperature inside the containment chamber 5, and preventing temperature changes inside the containment chamber 5 from affecting the external detection lens.

[0063] In some embodiments of the present invention, the low-light detection device 100 further includes at least one third moving device 8, that is, there may be one or more third moving devices 8. When there is one third moving device 8, it facilitates the vertical adjustment of the probe card 4 by the third moving device 8. When there are multiple third moving devices 8, the multiple third devices can be connected to multiple points of the probe card 4 to make the connection structure between the probe card 4 and the third moving device 8 more stable. For example, Figure 6 and Figure 7 There can be three third moving devices 8, and the three third moving devices 8 are arranged in a triangle on the horizontal plane. The probe card 4 is provided with three connecting holes 42 that cooperate with the third moving devices 8. In this way, the probe card 4 is connected to the three third moving devices 8 arranged in a triangle, which also makes the structure of the probe card 4 more stable.

[0064] like Figure 8 As shown, the third moving device 8 extends at least partially into the receiving chamber 5 and is connected to the probe card 4 to drive the probe card 4 to move vertically. Specifically, the probe card 4 is located inside the receiving chamber 5, and the lower end of the third moving device 8 extends into the receiving chamber 5 and is connected to the probe card 4. By adjusting the third moving device 8, the probe card 4 can move up and down in the vertical direction so that the probe can accurately be embedded in the test sample. Optionally, the third moving device 8 can be a telescopic screw structure or other lifting device capable of vertical movement; the present invention does not impose any particular limitation on this. Furthermore, the low-light detection device 100 may also include a third-direction adjustment knob, which is connected to the third moving device 8 and located outside the receiving chamber 5. The third moving device 8 is adjusted by adjusting the third-direction adjustment knob, which has a simple structure and is easy to operate.

[0065] In some embodiments of the present invention, combined with Figures 5-7 As shown, the second mobile platform 3 has a first opening 32 and a second opening 33 communicating with the receiving compartment 5. The observation unit 31 is located at the first opening 32, and the second opening 33 is open and corresponds to the position of the external wiring harness connector 41 of the probe card 4 so as to facilitate the external connection of the external wiring harness connector 41. Specifically, as Figure 5 As shown, the first opening 32 and the second opening 33 are located on the top of the second moving platform 3. The first opening 32 corresponds vertically to the probe portion of the probe card 4. The observation part 31 is located at the first opening 32 to close it, thereby facilitating observation of the position of the probe and the test sample so that the probe can accurately attach to the test sample. The second opening 33 corresponds to the position of the external wiring harness connector 41 of the probe card 4, facilitating the connection of the external wiring harness connector 41 of the probe card 4 to the outside. Optionally, the observation part 31 is detachably mounted on the second moving platform 3.

[0066] In some embodiments of the present invention, such as Figure 2 As shown, the rotating platform 1 has a gas inlet 15 and a gas channel 16. The gas channel 16 is connected to the gas inlet 15 to guide the gas flowing in from the gas inlet 15 to the side of the support platform 11 away from the receiving chamber 5, so that the gas flows through the back of the support platform 11 to cool or defrost it. Specifically, when the temperature inside the receiving chamber 5 is high, the temperature of the support platform 11 becomes too high, which can easily affect the detection lens located below the support platform 11. At this time, cold air can be introduced through the gas inlet 15 and the gas channel 16 to cool the support platform 11 and prevent damage to the detection lens. When cold air is introduced into the receiving chamber 5 and the temperature of the support platform 11 is low, frost can easily form on the surface of the support platform 11, affecting the observation of the detection lens. At this time, warm air can be introduced into the gas inlet 15 and the gas channel 16 to remove the frost, thereby ensuring the observation effect of the detection lens.

[0067] In such Figure 2 and Figure 8 In the example shown, the gas inlet 15 is formed on the side wall of the rotating platform 1, and the gas channel 16 is formed inside the rotating platform 1. One end of the gas channel 16 is connected to the gas inlet 15, and the other end of the gas channel 16 is opened adjacent to the support platform 11. The other end of the gas channel 16 is opened below the support platform 11, so that the gas flows out in a horizontal direction. In this way, the gas can be prevented from directly blowing on the lower surface of the support platform 11 when it flows out, and the gas can flow evenly across the lower surface of the support platform 11 to uniformly heat or cool the support platform 11.

[0068] In some embodiments of the present invention, the low-light detection device 100 may further include a temperature detection device, which is used to detect the temperature inside the containment chamber 5 in real time, thereby enabling real-time monitoring of the temperature inside the containment chamber 5, and the temperature inside the containment chamber 5 can be adjusted in real time according to the detection results of the temperature detection device, thereby achieving precise control of the temperature inside the containment chamber 5.

[0069] In some embodiments of the present invention, the temperature detection device can be a temperature sensor, which can be mounted on the probe card 4 and connected to the external wiring harness connector 41 of the probe card 4. The signal from the temperature sensor is then output through the external wiring harness connector 41. This eliminates the need for additional temperature detection lines to connect the temperature detection device. Furthermore, the temperature sensor is mounted on the probe card 4, which is used to attach to the test sample, ensuring close proximity between the temperature sensor and the test sample. This allows for real-time monitoring of the ambient temperature near the test sample, thereby enabling precise temperature control of the test sample environment. Optionally, the temperature detection device can be connected to the high and low temperature gas generating device 400 via the external wiring harness connector 41 on the probe card 4. This allows the temperature detection results within the containment chamber 5 to be fed back to the high and low temperature gas generating device 400, which can adjust the temperature of the gas input into the containment chamber 5, thereby achieving real-time automatic temperature control within the containment chamber 5.

[0070] The present invention also proposes a semiconductor device 1000.

[0071] like Figure 9 As shown, the semiconductor device 1000 according to an embodiment of the present invention includes a low-light detection device 100, a high-low temperature gas generating device 400, a first detection lens 200 and a second detection lens 300. The high-low temperature gas generating device 400 is connected to the air inlet 51. The first detection lens 200 is disposed below the support platform 11 and facing the back of the support platform 11 for observing and detecting the test sample. The second detection lens 300 is disposed above the observation section 31 for observing whether the probe of the probe card 4 is aligned with the test sample.

[0072] According to an embodiment of the present invention, the semiconductor device 1000 can generate high and low temperature gases through the high and low temperature gas generating device 400 to provide the low-light detection device 100 with specific temperature gases required for detection, so that a stable temperature environment can be formed in the containment chamber 5 of the low-light detection device 100, providing the specific temperature environment required for detection of the test sample. The high and low temperature gas generating device 400 can be connected to the air inlet 51 of the low-light detection device 100 through a gas pipe to input the gas into the containment chamber 5, without having to blow the gas onto the surface of the test sample through the gas pipe, so that the test environment temperature of the test sample is more stable and accurate.

[0073] The interior of the receiving chamber 5 can be observed through the first detection lens 200 and the second detection lens 300. Specifically, the first detection lens 200 is positioned below the support platform 11 to observe the test sample from bottom to top, and the second detection lens 300 is positioned above the observation section 31 to observe the test sample from top to bottom. The first moving platform 2 and the second moving platform 3 are moved or rotated based on the observations from the first detection lens 200 and the second detection lens 300, thereby adjusting the position of the probe holder 4 so that the probe can accurately attach to the test sample. Optionally, the semiconductor device 1000 may also include a support structure, through which the first detection lens 200 and the second detection lens 300 can be fixed.

[0074] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A low-light detection device, characterized in that, include: A rotating platform, wherein the rotating platform is provided with a transparent support platform for supporting test samples; A first mobile platform is rotatably mounted on the rotating platform and can move along a first direction; The second mobile platform is movably mounted on the first mobile platform and can move along a second direction, which is perpendicular to the second direction. The first and second mobile platforms have hollow structures with open bottoms to cooperate with the rotating platform to define a receiving chamber. The support platform is located at the bottom of the receiving chamber. The second mobile platform is provided with an observation part, which is formed as a transparent part for observing the interior of the receiving chamber. A probe card, which is movably disposed vertically within the receiving chamber and located between the support platform and the observation unit; An air inlet and an air outlet are formed on the first or second mobile platform and connected to the receiving chamber. The air inlet is used to introduce gas at a specific temperature required for detection into the receiving chamber, and the air outlet is used to discharge the gas from the receiving chamber. The rotating platform has a gas inlet and a gas channel. The gas channel is connected to the gas inlet to guide the gas flowing in through the gas inlet to the side of the support platform away from the receiving chamber, so that the gas flows through the back of the support platform to cool or defrost the support platform.

2. The low-light detection device according to claim 1, characterized in that, It also includes a rotating disk, and the rotating platform is provided with a rotating track surrounding at least a portion of the support platform in the circumferential direction. The rotating disk is rotatably fitted within the rotating track, and the first moving platform is fixedly connected to the rotating disk.

3. The low-light detection device according to claim 2, characterized in that, The rotating disk is provided with a fixed protrusion, and the first moving platform is provided with a reserved groove that cooperates with the fixed protrusion.

4. The low-light detection device according to claim 1, characterized in that, It also includes a first moving device. The first moving platform is provided with a first slide groove extending along a first direction. The first moving device includes a first driving device and a first slider that is slidably engaged with the first slide groove. The first slider is connected to the rotating platform. The first driving device drives the first slider to slide in the first slide groove to drive the first moving platform to move.

5. The low-light detection device according to claim 4, characterized in that, The first driving device may be a lead screw, which at least partially extends into the first sliding groove, and the first slider is sleeved on the lead screw and slidably connected to the lead screw.

6. The low-light detection device according to claim 1, characterized in that, The second mobile platform has a first opening and a second opening that communicate with the receiving compartment. The observation unit is located at the first opening, and the second opening is open and corresponds to the position of the external wiring harness connector of the probe card so as to facilitate the external connection of the external wiring harness connector.

7. The low-light detection device according to claim 1, characterized in that, The first mobile platform is provided with a fixed part, the second mobile platform is formed with a second slide groove, and the low-light detection device further includes a second mobile device. The second mobile device includes a second driving device and a second slider. The second slider is slidably connected to the second slide groove and fixedly connected to the fixed part. The second driving device is connected to the second slider so that the second slider slides relative to the second slide groove to drive the second mobile platform to move along the second direction.

8. The low-light detection device according to claim 1, characterized in that, It also includes at least one third moving device, which extends at least partially into the receiving chamber and is connected to the probe card to drive the probe card to move in a vertical direction.

9. The low-light detection device according to claim 8, characterized in that, The third moving device consists of three units, and the three third moving devices are arranged in a triangular pattern on the horizontal plane.

10. The low-light detection device according to claim 1, characterized in that, The observation unit is detachably mounted on the second mobile platform.

11. The low-light detection device according to claim 1, characterized in that, Both the support platform and the observation unit are double-layered vacuum glass.

12. The low-light detection device according to claim 1, characterized in that, It also includes a temperature detection device for real-time monitoring of the temperature inside the containment chamber.

13. The low-light detection device according to claim 12, characterized in that, The temperature detection device is a temperature sensor, which is mounted on the probe card and connected to the external wiring harness connector of the probe card, so as to lead out the signal of the temperature sensor through the external wiring harness connector.

14. A semiconductor device, characterized in that, include: The low-light detection device according to any one of claims 1-13; A high and low temperature gas generating device, wherein the high and low temperature gas generating device is connected to the air inlet; A first detection lens is disposed below the support platform and facing the back of the support platform for observing and detecting the test sample; The second detection lens is positioned above the observation section to observe whether the probes of the probe card are aligned with the test sample.

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