An upper electrode contact processing circuit, an opening mechanism and a semiconductor device

Abstract

The present application discloses an upper electrode contact treatment circuit, an opening mechanism and a semiconductor device. The upper electrode contact treatment circuit includes a first control switch and a contact detection circuit. The first control switch is connected in series between a first power supply branch and a driving device; when the contact detection circuit detects that an upper electrode contact phenomenon occurs, it controls the first control switch to close, so that the first power supply branch supplies power to the driving device, and the driving device drives the upper electrode to descend, so that the upper electrode falls back onto the reaction chamber. It can be seen that when the opening mechanism lifts the upper electrode in the present application, it can detect whether the upper electrode has a contact phenomenon, and when the upper electrode has a contact phenomenon, it automatically converts the original upper electrode lifting action into a upper electrode descending action, so that the upper electrode falls back onto the reaction chamber, thereby timely discovering and dealing with the upper electrode contact phenomenon, avoiding a series of problems caused by too large a difference in the overhang amounts at the four corners of the upper electrode, and ensuring the safety and reliability of the equipment opening process.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment, and in particular to an upper electrode tap processing circuit, a cover opening mechanism and a semiconductor device. Background Art

[0002] Please refer to Figure 1 and Figure 2 , Figure 1 It is a schematic diagram of the structure of a semiconductor device in the prior art when the cover is not opened. Figure 2 The schematic diagram of the structure of a semiconductor device when opening the cover in the prior art. The semiconductor device includes: an upper electrode 1, a reaction chamber 2, an opening mechanism 3, an upper cover assembly 4, a radio frequency column 5 fixedly connected to the upper electrode 1, and a coil column 6 fixedly connected to the upper cover assembly 4 (when normally lifted or lowered, the radio frequency column 5 is coaxial with the coil column 6, and the radio frequency column 5 can be inserted into the coil column 6); wherein, the opening mechanism is a key component of the semiconductor device. When maintaining the upper cover assembly and the reaction chamber, the upper electrode is lifted by the opening mechanism to separate the upper electrode from the reaction chamber, and the upper cover assembly and the reaction chamber are exposed to the outside, providing convenience for maintenance actions.

[0003] However, since the components in the cover opening mechanism are connected by screws and the materials of the components are all plastic materials, when the cover opening mechanism lifts the upper electrode, the components and the connecting parts of the components will be subjected to a certain degree of tension, pressure, bending, etc., resulting in a certain degree of deformation. Therefore, when the cover opening mechanism lifts the upper electrode, the four corners of the upper electrode will have a problem of inconsistent distances (overhang) from the surface of the reaction chamber in the vertical direction (called overlapping phenomenon). If the overhang difference of the four corners of the upper electrode is too large, the positioning pins on the upper surface of the reaction chamber may not be aligned with the pin holes on the lower surface of the upper electrode when the cover is closed, causing friction between the positioning pins and the pin holes, thereby causing metal debris to enter the reaction chamber and cause chamber contamination. In addition, when the cover opening mechanism lifts the upper electrode alone, if the overhang difference of the four corners of the upper electrode is too large, it will also cause the RF column to tilt, so that the RF column and the coil column are not coaxial, causing interference between the two. In severe cases, the upper cover assembly will be mistakenly lifted, causing damage to the upper cover assembly, and there is a risk of the upper cover assembly falling. Summary of the invention

[0004] The purpose of the present application is to provide an upper electrode overlap processing circuit, a cover opening mechanism and a semiconductor device. When the cover opening mechanism lifts the upper electrode, it can detect whether the upper electrode has overlapped. When the upper electrode has overlapped, the original upper electrode lifting action is automatically converted into an upper electrode lowering action, so that the upper electrode falls back onto the reaction chamber, thereby timely discovering and processing the overlap of the upper electrode, avoiding a series of problems caused by excessive differences in the overhang amount of the four corners of the upper electrode, and ensuring the safety and reliability of the equipment opening process.

[0005] To solve the above technical problems, the present application provides an upper electrode contact treatment circuit, which is applied to a semiconductor device. The semiconductor device includes an upper electrode, a reaction chamber, and an opening / closing mechanism. The opening / closing mechanism includes a driving device for driving the upper electrode to rise or fall. The upper electrode contact treatment circuit includes:

[0006] A first control switch, which is connected in series between a first power supply branch and the driving device. When the first control switch is closed, the first power supply branch supplies power to the driving device.

[0007] A contact detection circuit for controlling the on / off of the first control switch. When the contact detection circuit detects that the upper electrode has a contact phenomenon, it controls the first control switch to close, so that the first power supply branch supplies power to the driving device. The driving device drives the upper electrode to descend, so that the upper electrode falls back onto the reaction chamber.

[0008] Optionally, the first control switch is a first electromagnetic relay. The first electromagnetic relay includes:

[0009] A first coil, which is connected to the contact detection circuit;

[0010] A first normally open switch, which is connected in series between the first power supply branch and the driving device. When the first normally open switch is closed, the first power supply branch supplies power to the driving device.

[0011] The contact detection circuit is specifically configured to, when detecting that the upper electrode has a contact phenomenon, energize the first coil to attract the first normally open switch.

[0012] Optionally, the contact detection circuit includes:

[0013] A normally open travel switch, which is arranged on the side of the opening / closing mechanism opposite to the upper electrode. The normally open travel switch is not in contact with the upper electrode and remains open when the upper electrode does not have a contact phenomenon; when the upper electrode has a contact phenomenon, it is compressed and closed by the upper electrode.

[0014] A normally closed travel switch, which is arranged on the upper surface of the reaction chamber. The normally closed travel switch is compressed and opened by the upper electrode when the semiconductor device is not opened; when the semiconductor device is opened, it is separated from the upper electrode and closed.

[0015] Wherein, the normally open travel switch and the normally closed travel switch are both connected in series on the power supply branch of the first coil, and the first coil is energized when both the normally open travel switch and the normally closed travel switch are closed.

[0016] Optionally, the upper electrode contact treatment circuit further includes an alarm. The first electromagnetic relay further includes:

[0017] A second normally open switch is connected in series to the power supply branch of the alarm. When the first coil is energized, it attracts the second normally open switch, causing the alarm to be powered on and alarm.

[0018] Optionally, the series branch formed by the second normally open switch and the alarm is connected in parallel with the normally open travel switch and in series with the normally closed travel switch.

[0019] To solve the above technical problems, the present application also provides an opening mechanism applied to a semiconductor device. The semiconductor device includes an upper electrode and a reaction chamber. The opening mechanism includes:

[0020] A driving device for driving the upper electrode to rise or fall;

[0021] Any one of the above upper electrode tap processing circuits;

[0022] A second control switch is connected in series between the second power supply branch and the driving device. When the second control switch is closed, the second power supply branch supplies power to the driving device, and the driving device drives the upper electrode to rise.

[0023] A start switch for controlling the on / off of the first control switch and the second control switch. When the start switch makes the first control switch open and the second control switch closed, the second power supply branch supplies power to the driving device, and the driving device drives the upper electrode to rise, so that the upper electrode is separated from the reaction chamber; when the start switch makes the first control switch closed and the second control switch open, the first power supply branch supplies power to the driving device, so that the upper electrode falls back onto the reaction chamber.

[0024] Optionally, the driving device is a three-phase motor; when the first power supply branch supplies power to the three-phase motor, it is used to make the three-phase motor rotate in a first direction to drive the upper electrode to fall; when the second power supply branch supplies power to the three-phase motor, it is used to make the three-phase motor rotate in a second direction to drive the upper electrode to rise.

[0025] Optionally, the first power supply branch and the second power supply branch are respectively used to connect the three-phase connection terminals of the three-phase motor to the three live wires of the three-phase power supply;

[0026] Any two of the three-phase connection methods of the first power supply branch and the second power supply branch are swapped with each other.

[0027] Optionally, the start switch is a rocker switch; the rocker switch includes: a first static contact, a second static contact, and a moving contact for receiving single-phase power input;

[0028] The first control switch is a first electromagnetic relay; the first electromagnetic relay includes:

[0029] Normally-closed switch;

[0030] A first coil, connected to the second stationary contact;

[0031] A first normally-open switch, connected in series between the first power supply branch and the driving device. When the first normally-open switch is closed, the first power supply branch supplies power to the driving device;

[0032] The second control switch is a second electromagnetic relay; the second electromagnetic relay includes:

[0033] A second coil, connected in series with the normally-closed switch, and the series branch formed by the normally-closed switch and the second coil is connected to the first stationary contact;

[0034] A third normally-open switch, connected in series between the second power supply branch and the driving device. When the third normally-open switch is closed, the second power supply branch supplies power to the driving device;

[0035] The rocker switch is used to connect the moving contact piece to the first stationary contact when the first end is pressed, so that the second coil is energized to attract the third normally-open switch; when the second end is pressed, the moving contact piece is connected to the second stationary contact, so that the first coil is energized to attract the first normally-open switch and disconnect the normally-closed switch, so that the first power supply branch supplies power to the driving device.

[0036] Optionally, the opening mechanism further includes:

[0037] A switching device, connected in series on the total power supply branch of the circuit in the opening mechanism that requires power-off, and used to control the power-on state of the corresponding circuit through its on-off state.

[0038] Optionally, the switching device is connected between one end of the total power supply branch and the moving contact piece, and the other end of the total power supply branch is connected to the first coil and the second coil.

[0039] Optionally, one end of the tap detection circuit of the upper electrode tap processing circuit is connected between the second stationary contact and the first coil, and the other end is connected between the switching device and the moving contact piece.

[0040] To solve the above technical problems, the present application also provides a semiconductor device, including an upper electrode, a reaction chamber, and any one of the above opening mechanisms.

[0041] The present application provides an upper electrode contact treatment circuit, including a first control switch and a contact detection circuit. The first control switch is connected in series between a first power supply branch and a driving device; the contact detection circuit is used to control the on / off of the first control switch. When the contact detection circuit detects that the upper electrode has a contact phenomenon, it controls the first control switch to close, so that the first power supply branch supplies power to the driving device, and the driving device drives the upper electrode to descend, causing the upper electrode to fall back onto the reaction chamber. It can be seen that when the opening mechanism lifts the upper electrode in the present application, it can detect whether the upper electrode has a contact phenomenon, and when the upper electrode has a contact phenomenon, it automatically converts the original upper electrode lifting action into an upper electrode descending action, causing the upper electrode to fall back onto the reaction chamber, so as to timely discover and handle the contact phenomenon of the upper electrode, avoid a series of problems caused by too large a difference in the overhang amounts at the four corners of the upper electrode, and ensure the safety and reliability of the equipment during the opening process.

[0042] The present application also provides an opening mechanism and a semiconductor device, which have the same beneficial effects as the above-mentioned contact treatment circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the technical solutions in the present application or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0044] Figure 1 FIG. 12 is a schematic structural diagram of a semiconductor device when the cover is not opened in the prior art;

[0045] Figure 2 FIG. 16 is a schematic structural diagram of a semiconductor device when the cover is opened in the prior art;

[0046] Figure 3 FIG. 20 is a schematic circuit diagram of an upper electrode contact treatment circuit provided by an embodiment of the present application;

[0047] Figure 4 FIG. 24 is a specific circuit diagram of an upper electrode contact treatment circuit provided by an embodiment of the present application;

[0048] Figure 5 FIG. 28 is a schematic installation position diagram of a normally open travel switch and a normally closed travel switch provided by an embodiment of the present application;

[0049] Figure 6 FIG. 32 is a schematic structural diagram of an upper electrode when it does not have a contact phenomenon during rising provided by an embodiment of the present application;

[0050] Figure 7Schematic diagram of a structure where the upper electrode has a bridging phenomenon when rising, provided by an embodiment of the present application;

[0051] Figure 8 Schematic diagram of a structure of an open cover mechanism provided by an embodiment of the present application;

[0052] Figure 9 Specific circuit schematic diagram of an open cover mechanism provided by an embodiment of the present application;

[0053] Figure 10 Specific circuit schematic diagram of an open cover mechanism when normally lifting the upper electrode provided by an embodiment of the present application;

[0054] Figure 11 Specific circuit schematic diagram of an open cover mechanism when normally lowering the upper electrode provided by an embodiment of the present application;

[0055] Figure 12 Specific circuit schematic diagram of an open cover mechanism when abnormally lowering the upper electrode provided by an embodiment of the present application. Detailed implementation manners

[0056] The core of the present application is to provide an upper electrode bridging processing circuit, an open cover mechanism and a semiconductor device. When the open cover mechanism lifts the upper electrode, it can detect whether the upper electrode has a bridging phenomenon, and when the upper electrode has a bridging phenomenon, automatically convert the original upper electrode lifting action into a upper electrode lowering action, so that the upper electrode falls back onto the reaction chamber, thereby timely discovering and dealing with the bridging phenomenon of the upper electrode, avoiding a series of problems caused by too large a difference in the overhang amounts at the four corners of the upper electrode, and ensuring the safety and reliability of the equipment during the open cover process.

[0057] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the present application.

[0058] Such as Figure 1 and Figure 2As shown, the cover opening mechanism 3 is a key component of the semiconductor device. When maintaining the upper cover assembly 4 and the reaction chamber 2, the upper electrode 1 is lifted by the cover opening mechanism 3 to separate the upper electrode 1 from the reaction chamber 2, and the upper cover assembly 4 and the reaction chamber 2 are then exposed, providing convenience for maintenance operations. However, since the components in the cover opening mechanism 3 are connected by screws and the materials of all components are plastic materials, when the cover opening mechanism 3 lifts the upper electrode 1, the components and their connection parts will bear certain tensile, compressive, and bending forces, resulting in a certain degree of deformation. Therefore, when the cover opening mechanism 3 lifts the upper electrode 1, there will be a problem that the distances (sag amounts) between the four corners of the upper electrode 1 and the surface of the reaction chamber 2 in the vertical direction are inconsistent (referred to as the lapping phenomenon). If the sag amount differences of the four corners of the upper electrode 1 are too large, a series of problems will occur.

[0059] To address the above technical problems, the present application provides an upper electrode lapping processing circuit. Please refer to Figure 3 , Figure 3 which is a schematic structural diagram of an upper electrode lapping processing circuit provided by an embodiment of the present application. This upper electrode lapping processing circuit is applied to a semiconductor device, and the semiconductor device includes: an upper electrode 1, a reaction chamber 2, and a cover opening mechanism 3; the cover opening mechanism 3 includes: a driving device for driving the upper electrode 1 to rise or fall. Based on this, the upper electrode lapping processing circuit includes:

[0060] A first control switch 31, connected in series between the first power supply branch and the driving device. When the first control switch 31 is closed, the first power supply branch supplies power to the driving device; in an alternative embodiment of this embodiment, the driving device can be, for example, a motor. Further, the driving device can be, for example, a three-phase motor, and the first power supply branch is connected to a three-phase power supply to supply power to the three-phase motor.

[0061] A lapping detection circuit 32, used to control the on / off of the first control switch 31. When the lapping detection circuit 32 detects that the upper electrode 1 has a lapping phenomenon, it controls the first control switch 31 to close, so that the first power supply branch supplies power to the driving device, and the driving device drives the upper electrode 1 to descend, causing the upper electrode 1 to fall back onto the reaction chamber 2.

[0062] In specific applications, the first control switch 31 is connected in series between the first power supply branch and the driving device. When the first control switch 31 is closed, the first power supply branch can supply power to the driving device, and at this time, the driving device can drive the upper electrode 1 to descend; when the first control switch 31 is open, the first power supply branch cannot supply power to the driving device, and at this time, the driving device stops driving the upper electrode 1 to descend.

[0063] The on / off state of the first control switch 31 is controlled by the contact detection circuit 32. Specifically, when the semiconductor device is opened (the upper electrode 1 rises), the contact detection circuit 32 can detect whether the upper electrode 1 has a contact phenomenon. When it detects that the upper electrode 1 has a contact phenomenon, it controls the first control switch 31 to close. At this time, the first power supply branch starts to supply power to the driving device, and the driving device starts to drive the upper electrode 1 to descend, so that the upper electrode 1 falls back onto the reaction chamber 2, preventing the over-large difference in the overhang amounts of the four corners of the upper electrode 1.

[0064] The upper electrode contact processing circuit provided by this application can detect whether the upper electrode has a contact phenomenon when the opening mechanism lifts the upper electrode. When the upper electrode has a contact phenomenon, it automatically converts the original upper electrode lifting action into a lower electrode descending action, so that the upper electrode falls back onto the reaction chamber, thereby timely detecting and processing the contact phenomenon of the upper electrode, avoiding a series of problems caused by the over-large difference in the overhang amounts of the four corners of the upper electrode, and ensuring the safety and reliability of the equipment opening process.

[0065] Please refer to Figure 4 , Figure 4 which is a schematic structural diagram of an upper electrode contact processing circuit provided by an embodiment of this application.

[0066] As an optional embodiment, the first control switch 31 is a first electromagnetic relay; the first electromagnetic relay includes:

[0067] A first coil KM1, connected to the contact detection circuit 32;

[0068] A first normally open switch KM11, connected in series between the first power supply branch and the driving device. When the first normally open switch KM11 is closed, the first power supply branch supplies power to the driving device; in Figure 4 the example, the driving device is a three-phase motor M, and the first power supply branch is connected to the three live wires L1 to L3 of the three-phase power supply;

[0069] The contact detection circuit 32 is specifically configured to, when detecting that the upper electrode 1 has a contact phenomenon, energize the first coil KM1 to attract the first normally open switch KM11, so that the first power supply branch can supply power to the driving device.

[0070] In this embodiment, the first coil KM1 and the first normally open switch KM11 in the first electromagnetic relay cooperate to work: when the first coil KM1 is de-energized, the first normally open switch KM11 is disconnected, and at this time the first power supply branch cannot supply power to the driving device; when the first coil KM1 is energized, the first normally open switch KM11 is closed, and at this time the first power supply branch can supply power to the driving device.

[0071] In a specific application, when the semiconductor device is opened (the upper electrode 1 rises), the short - circuit detection circuit 32 can detect whether a short - circuit phenomenon occurs in the upper electrode 1. When it detects that a short - circuit phenomenon occurs in the upper electrode 1, it energizes the first coil KM1 to attract the first normally - open switch KM11. At this time, the first power - supply branch starts to supply power to the driving device, and the driving device starts to drive the upper electrode 1 to descend, so that the upper electrode 1 falls back onto the reaction chamber 2.

[0072] As an alternative embodiment, as Figure 4 and Figure 5 shown, the short - circuit detection circuit 32 includes:

[0073] A normally - open travel switch SQ1, which is arranged on the side of the opening mechanism 3 opposite to the upper electrode 1. When there is no short - circuit phenomenon in the upper electrode 1, the normally - open travel switch SQ1 does not contact the upper electrode 1 and remains open. When a short - circuit phenomenon occurs in the upper electrode 1, it is compressed by the upper electrode 1 and closes.

[0074] A normally - closed travel switch SQ2, which is arranged on the upper surface of the reaction chamber 2. When the semiconductor device is not opened, the normally - closed travel switch SQ2 is compressed by the upper electrode 1 and is disconnected. When the semiconductor device is opened, it is separated from the upper electrode 1 and closes.

[0075] Among them, both the normally - open travel switch SQ1 and the normally - closed travel switch SQ2 are connected in series to the power - supply branch of the first coil KM1, and the first coil KM1 is energized when both the normally - open travel switch SQ1 and the normally - closed travel switch SQ2 are closed.

[0076] In this embodiment, as Figure 5 shown, the normally - open travel switch SQ1 is fixed to the opening mechanism 3 by a screw 7, and the normally - closed travel switch SQ2 is fixed to the reaction chamber 2 by a screw 8.

[0077] If no short - circuit phenomenon occurs when the upper electrode 1 rises, as Figure 6 shown, the distance between the bottom end of the side surface of the upper electrode 1 and the side surface of the opening mechanism 3 is D1. If a short - circuit phenomenon occurs when the upper electrode 1 rises, as Figure 7 shown, the distance between the bottom end of the side surface of the upper electrode 1 and the side surface of the opening mechanism 3 is D2 (D2 < D1, and D2 is generally 10 mm).

[0078] In specific applications, if there is no connection problem when the upper electrode 1 rises, the normally open travel switch SQ1 is not in contact with the upper electrode 1, and the normally open travel switch SQ1 remains open; if there is a connection problem when the upper electrode 1 rises, the upper electrode 1 will compress the normally open travel switch SQ1, and the normally open travel switch SQ1 will close. If the semiconductor device is not opened (the upper electrode 1 is not separated from the reaction chamber 2), the upper electrode 1 compresses the normally closed travel switch SQ2, and the normally closed travel switch SQ2 opens; if the semiconductor device is opened (the upper electrode 1 rises and the upper electrode 1 is separated from the reaction chamber 2), the normally closed travel switch SQ2 is separated from the upper electrode 1, and the normally closed travel switch SQ2 closes.

[0079] Therefore, if there is no connection problem when the upper electrode 1 rises, the normally open travel switch SQ1 is open and the normally closed travel switch SQ2 is closed. At this time, the first coil KM1 of the first control switch 31 cannot be powered by the power supply branch where the normally open travel switch SQ1 and the normally closed travel switch SQ2 are located; if there is a connection problem when the upper electrode 1 rises, the normally open travel switch SQ1 and the normally closed travel switch SQ2 are both in the closed state. At this time, the first coil KM1 of the first control switch 31 can be powered by the power supply branch where the normally open travel switch SQ1 and the normally closed travel switch SQ2 are located to attract the first normally open switch KM11. At this time, the first power supply branch starts to supply power to the driving device, and the driving device starts to drive the upper electrode 1 to descend, so that the upper electrode 1 falls back onto the reaction chamber 2.

[0080] As an optional embodiment, as Figure 4 shown, the upper electrode connection processing circuit further includes an alarm H; the first electromagnetic relay further includes:

[0081] A second normally open switch KM12, connected in series to the power supply branch of the alarm H. When the first coil KM1 is energized, it attracts the second normally open switch KM12 to power on the alarm H for alarm.

[0082] In this embodiment, the first coil KM1 and the second normally open switch KM12 in the first electromagnetic relay cooperate: when the first coil KM1 is de-energized, the second normally open switch KM12 is open, and the power supply branch of the alarm H is disconnected; when the first coil KM1 is energized, the second normally open switch KM12 is closed, and the power supply branch of the alarm H is turned on. In addition, the alarm H can be a buzzer or other devices with an alarm function.

[0083] In specific applications, if there is a connection problem when the upper electrode 1 rises, the normally open travel switch SQ1 and the normally closed travel switch SQ2 are both in the closed state. At this time, the first coil KM1 of the first control switch 31 can be powered by the power supply branch where the normally open travel switch SQ1 and the normally closed travel switch SQ2 are located to attract the second normally open switch KM12, turn on the power supply branch of the alarm H, and power on the alarm H for alarm, so as to remind the maintenance personnel to correct the connection problem of the upper electrode 1 in time.

[0084] As an alternative embodiment, a series branch formed by the second normally open switch KM12 and the alarm H is connected in parallel with the normally open travel switch SQ1, and the series branch formed by the second normally open switch KM12 and the alarm H is connected in series with the normally closed travel switch SQ2.

[0085] Please refer to Figure 8 , Figure 8 , which is a schematic structural diagram of an opening mechanism provided by an embodiment of the present application.

[0086] The opening mechanism is applied to a semiconductor device and includes:

[0087] A driving device 81 for driving the upper electrode 1 to rise or fall;

[0088] An upper electrode tap processing circuit 82;

[0089] A second control switch 83 is connected in series between the second power supply branch and the driving device 81. When the second control switch 83 is closed, the second power supply branch supplies power to the driving device 81, and the driving device 81 drives the upper electrode 1 to rise;

[0090] A start switch 84 is used to control the on / off of the first control switch 31 and the second control switch 83. When the start switch 84 makes the first control switch 31 open and the second control switch 83 closed, the second power supply branch supplies power to the driving device 81, and the driving device 81 drives the upper electrode 1 to rise so that the upper electrode 1 is separated from the reaction chamber 2; when the start switch 84 makes the first control switch 31 closed and the second control switch 83 open, the first power supply branch supplies power to the driving device 81 so that the upper electrode 1 falls back onto the reaction chamber 2.

[0091] In a specific application, the second control switch 83 is connected in series between the second power supply branch and the driving device 81. When the second control switch 83 is closed, the second power supply branch can supply power to the driving device 81, and at this time the driving device 81 can drive the upper electrode 1 to rise; when the second control switch 83 is open, the second power supply branch cannot supply power to the driving device 81, and at this time the driving device 81 stops driving the upper electrode 1 to rise.

[0092] The on / off state of the first control switch 31 is controlled by the tap detection circuit 32 of the upper electrode tap processing circuit 82 and the start switch 84, and the on / off state of the second control switch 83 is controlled by the start switch 84. Specifically, when the semiconductor device needs to lift the upper electrode 1, the first control switch 31 can be turned off and the second control switch 83 can be turned on through the start switch 84. At this time, the second power supply branch starts to supply power to the driving device 81, and the driving device 81 starts to drive the upper electrode 1 to rise, separating the upper electrode 1 from the reaction chamber 2; when the semiconductor device needs to lower the upper electrode 1, the first control switch 31 can be turned on and the second control switch 83 can be turned off through the start switch 84. At this time, the first power supply branch starts to supply power to the driving device 81, and the driving device 81 starts to drive the upper electrode 1 to descend, causing the upper electrode 1 to fall back onto the reaction chamber 2.

[0093] For the introduction of the upper electrode tap processing circuit 82 provided in this embodiment, please refer to the embodiment of the upper electrode tap processing circuit above, and details will not be repeated in this application.

[0094] As an alternative embodiment, as Figure 9 shown, the driving device 81 is a three-phase motor M; when the first power supply branch supplies power to the three-phase motor M, it is used to make the three-phase motor M rotate in the first direction to drive the upper electrode 1 to descend; when the second power supply branch supplies power to the three-phase motor M, it is used to make the three-phase motor M rotate in the second direction to drive the upper electrode 1 to rise. In Figure 9 the example, when the first normally open switch KM11 is closed, the three input terminals of the three-phase motor M from right to left are respectively connected to the live wires L1, L2, and L3 of the three-phase power supply through the first power supply branch; when the third normally open switch KM21 is closed, the three input terminals of the three-phase motor M from right to left are respectively connected to the live wires L3, L2, and L1 of the three-phase power supply through the first power supply branch. Thus, when the first normally open switch KM11 is closed and when the third normally open switch KM21 is closed, the rotation direction of the three-phase motor M is different, so as to realize driving the upper electrode 1 to descend or rise.

[0095] In this embodiment, the power supply branch of the three-phase motor M includes a first power supply branch and a second power supply branch. If the first power supply branch of the three-phase motor M starts to be energized, the three-phase motor M rotates in the first direction (such as reverse rotation), and at this time, the three-phase motor M can drive the upper electrode 1 to descend, causing the upper electrode 1 to fall back onto the reaction chamber 2 (the process of closing the cover); if the second power supply branch of the three-phase motor M starts to be energized, the three-phase motor M rotates in the second direction (such as forward rotation), and at this time, the three-phase motor M can drive the upper electrode 1 to rise, separating the upper electrode 1 from the reaction chamber 2 (the process of opening the cover). It should be noted that the first power supply branch and the second power supply branch of the three-phase motor M cannot be energized simultaneously, otherwise there will be a conflict.

[0096] As an alternative embodiment, the first power supply branch and the second power supply branch are respectively used to connect the three-phase terminals of the three-phase motor M to the three live wires of the three-phase power supply;

[0097] Any two phases in the three-phase wiring modes of the first power supply branch and the second power supply branch are swapped with each other.

[0098] In this embodiment, the three-phase power supply of the three-phase motor M is a three-phase four-wire power supply (three-phase four-wire: three live wires L1, L2, L3 and one neutral wire N, the live wire L1 corresponds to phase A power, the live wire L2 corresponds to phase B power, and the live wire L3 corresponds to phase C power), and the three-phase terminals of the three-phase motor M are U, V, and W respectively (the terminal U corresponds to phase A power, the terminal V corresponds to phase B power, and the terminal W corresponds to phase C power). Then, the three-phase wiring mode corresponding to the second power supply branch (the motor forward rotation wiring mode) is: the terminal U of the three-phase motor M is connected to the live wire L1 of the three-phase power supply, the terminal V of the three-phase motor M is connected to the live wire L2 of the three-phase power supply, and the terminal W of the three-phase motor M is connected to the live wire L3 of the three-phase power supply; the three-phase wiring mode corresponding to the first power supply branch (the motor reverse rotation wiring mode) is: swap any two phases in the three-phase wiring mode corresponding to the second power supply branch. For example, one of the three-phase wiring modes corresponding to the first power supply branch is: the terminal U of the three-phase motor M is connected to the live wire L1 of the three-phase power supply, the terminal V of the three-phase motor M is connected to the live wire L3 of the three-phase power supply, and the terminal W of the three-phase motor M is connected to the live wire L2 of the three-phase power supply.

[0099] Please refer to Figure 9 , Figure 9 which is a specific circuit schematic diagram of an opening mechanism provided by an embodiment of the present application.

[0100] As an alternative embodiment, the start switch 84 is a rocker switch DP; the rocker switch DP includes: a first static contact, a second static contact, and a moving contact for receiving single-phase power input;

[0101] The first control switch 31 is a first electromagnetic relay; the first electromagnetic relay includes:

[0102] Normally closed switch KM13;

[0103] The first coil KM1, connected to the second static contact;

[0104] The first normally open switch KM11, connected in series between the first power supply branch and the driving device 81. When the first normally open switch KM11 is closed, the first power supply branch supplies power to the driving device 81;

[0105] The second control switch 83 is a second electromagnetic relay; the second electromagnetic relay includes:

[0106] The second coil KM2 is connected in series with the normally closed switch KM13, and the series branch formed by the normally closed switch KM13 and the second coil KM2 is connected to the first static contact;

[0107] The third normally open switch KM21 is connected in series between the second power supply branch and the driving device 81. When the third normally open switch KM21 is closed, the second power supply branch supplies power to the driving device 81;

[0108] The rocker switch DP is used to connect the moving contact piece to the first static contact when the first end is pressed, so that the second coil KM2 is energized to attract the third normally open switch KM21; when the second end is pressed, the moving contact piece is connected to the second static contact, so that the first coil KM1 is energized to attract the first normally open switch KM11 and disconnect the normally closed switch KM13, so that the first power supply branch supplies power to the driving device 81.

[0109] In this embodiment, the first coil KM1 and the first normally open switch KM11 in the first electromagnetic relay cooperate to work: when the first coil KM1 is de-energized, the first normally open switch KM11 is disconnected, and at this time the first power supply branch cannot supply power to the driving device 81; when the first coil KM1 is energized, the first normally open switch KM11 is closed, and at this time the first power supply branch can supply power to the driving device 81.

[0110] The first coil KM1 and the normally closed switch KM13 in the first electromagnetic relay cooperate to work: when the first coil KM1 is de-energized, the normally closed switch KM13 is closed; when the first coil KM1 is energized, the normally closed switch KM13 is disconnected.

[0111] The second coil KM2 and the third normally open switch KM21 in the second electromagnetic relay cooperate to work: when the second coil KM2 is de-energized, the third normally open switch KM21 is disconnected, and at this time the second power supply branch cannot supply power to the driving device 81; when the second coil KM2 is energized, the third normally open switch KM21 is closed, and at this time the second power supply branch can supply power to the driving device 81.

[0112] The rocker switch DP is a spring automatic reset switch. When the first end of the rocker switch DP is pressed, the moving contact piece of the rocker switch DP is connected to the first static contact; when the second end of the rocker switch DP is pressed, the moving contact piece of the rocker switch DP is connected to the second static contact; when the rocker switch DP is not pressed, the moving contact piece of the rocker switch DP is not connected to the first static contact and the second static contact.

[0113] In specific applications, when the semiconductor device needs to lift the upper electrode 1, press the first end of the rocker switch DP. As Figure 10As shown, when the rocker switch DP is pressed at the first end, its moving contact piece is connected to the first static contact point. Since the first coil KM1 is not powered on and the normally closed switch KM13 is in the closed state, the second coil KM2 can be powered on to attract the third normally open switch KM21. At this time, the second power supply branch starts to supply power to the driving device 81, and the driving device 81 starts to drive the upper electrode 1 to rise, separating the upper electrode 1 from the reaction chamber 2.

[0114] When the semiconductor device needs to stop lifting the upper electrode 1, release the rocker switch DP. The moving contact piece of the rocker switch DP is no longer connected to the first static contact point, the second coil KM2 is powered off, and the third normally open switch KM21 is disconnected. At this time, the second power supply branch stops supplying power to the driving device 81, and the driving device 81 stops driving the upper electrode 1 to rise.

[0115] When the semiconductor device needs to lower the upper electrode 1, press the second end of the rocker switch DP. As Figure 11 shown, when the rocker switch DP is pressed at the second end, its moving contact piece is connected to the second static contact point, and the first coil KM1 can be powered on to attract the first normally open switch KM11 and disconnect the normally closed switch KM13. Attracting the first normally open switch KM11 can achieve: the first power supply branch starts to supply power to the driving device 81, and the driving device 81 starts to drive the upper electrode 1 to descend, causing the upper electrode 1 to fall back onto the reaction chamber 2; disconnecting the normally closed switch KM13 can achieve: the second coil KM2 is powered off, the third normally open switch KM21 is disconnected, and the second power supply branch cannot supply power to the driving device 81.

[0116] As an alternative embodiment, the cover opening mechanism further includes:

[0117] A switching device, connected in series on the total power supply branch of the circuit in the cover opening mechanism that requires power-off, for controlling the power-on state of the corresponding circuit through its on-off state.

[0118] As an alternative embodiment, the switching device is connected between one end of the total power supply branch and the moving contact piece, and the other end of the total power supply branch is connected to the first coil KM1 and the second coil KM2.

[0119] In this embodiment, as Figure 9As shown in the figure, the switch device can be the stop button S1 connected between one end of the total power supply branch and the moving contact piece. In addition, the opening mechanism can also include safety devices such as the circuit breaker Q and the thermal relay F. Among them, the stop button S1 is the stop button for the upper electrode tap processing circuit 82 and the starting circuit of the three-phase motor M. When the stop button S1 is pressed, the upper electrode tap processing circuit 82 and the starting circuit of the three-phase motor M stop working. The circuit breaker Q is the main switch of the main circuit where the three-phase motor M is located. When the semiconductor device is not opened, the circuit breaker Q is disconnected, and the states of the other switches will not turn on the three-phase motor M. The thermal relay F is a protection switch device for the three-phase motor M. When the three-phase motor M overheats, the metal sheet inside the thermal relay F deforms, disconnecting the main circuit where the three-phase motor M is located.

[0120] As an alternative embodiment, one end of the tap detection circuit 32 of the upper electrode tap processing circuit 82 is connected between the second static contact and the first coil KM1, and the other end is connected between the switch device and the moving contact piece.

[0121] In specific applications, as Figure 12 shown in the figure, if a tapping phenomenon occurs when the upper electrode 1 is rising, the normally open travel switch SQ1 and the normally closed travel switch SQ2 are both in the closed state. At this time, the first coil KM1 can be powered by the power supply branch where the normally open travel switch SQ1 and the normally closed travel switch SQ2 are located. On the one hand, the normally closed switch KM13 is disconnected, the second coil KM2 is de-energized, and the third normally open switch KM21 is disconnected. On the other hand, the first normally open switch KM11 is attracted, the three-phase motor M starts to reverse, and the upper electrode 1 descends. On the third hand, the second normally open switch KM12 is attracted, making the power supply branch of the alarm H conductive, and the alarm H is powered on to alarm, reminding the maintenance personnel that the upper electrode 1 is about to descend. At this time, the maintenance personnel release the toggle switch DP. When the upper electrode 1 continues to descend and contacts the normally closed travel switch SQ2, the normally closed travel switch SQ2 is disconnected, disconnecting the power supply branch of the alarm H, and the alarm H stops alarming. The first coil KM1 loses power, and the upper electrode 1, the reaction chamber 2, and the opening mechanism 3 return to the state before opening the cover. At this time, arrange for the maintenance personnel to timely repair the connection parts such as screws and timely correct the tapping phenomenon of the upper electrode 1.

[0122] This application also provides a semiconductor device, including an upper electrode, a reaction chamber, and an opening mechanism.

[0123] For the introduction of the semiconductor device provided by this application, please refer to the embodiments of the opening mechanism above, and this application will not elaborate here.

[0124] Those of ordinary skill in the art can know that with the development of technology and the emergence of new scenarios, the technical solutions provided by the embodiments of this application are also applicable to similar technical problems.

[0125] The terms "first", "second", etc. in the description and claims of this application are used to distinguish similar objects and do not necessarily describe a specific order or sequence. It should be understood that such terms can be interchanged under appropriate circumstances, which is only a way of distinguishing objects with the same attributes when describing the embodiments of this application. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion, so that a process, method, system, product or device including a series of units need not be limited to those units, but may include other units not clearly listed or inherent to these processes, methods, products or devices.

[0126] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments or equivalently replace some of the technical features. And these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. An upper electrode connection head processing circuit is applied to a semiconductor device. The semiconductor device includes an upper electrode, a reaction chamber, and an opening / closing mechanism. The opening / closing mechanism includes a driving device for driving the upper electrode to rise or fall. It is characterized in that, The upper electrode contact treatment circuit includes: A first control switch, connected in series between a first power supply branch and the driving device. When the first control switch is closed, the first power supply branch supplies power to the driving device. A contact detection circuit, used to control the on / off of the first control switch. When the contact detection circuit detects that the upper electrode has a contact phenomenon, it controls the first control switch to close, so that the first power supply branch supplies power to the driving device, and the driving device drives the upper electrode to descend, causing the upper electrode to fall back onto the reaction chamber.

2. The upper electrode tap processing circuit according to claim 1, characterized in that The first control switch is a first electromagnetic relay; the first electromagnetic relay includes: A first coil, connected to the contact detection circuit; A first normally open switch, connected in series between the first power supply branch and the driving device. When the first normally open switch is closed, the first power supply branch supplies power to the driving device. The contact detection circuit is specifically used to, when detecting that the upper electrode has a contact phenomenon, energize the first coil to attract the first normally open switch.

3. The upper electrode tap processing circuit according to claim 2, characterized in that, The contact detection circuit includes: A normally open travel switch, arranged on the side surface of the cover opening mechanism opposite to the upper electrode; the normally open travel switch is not in contact with the upper electrode and remains open when the upper electrode does not have a contact phenomenon; when the upper electrode has a contact phenomenon, it is compressed and closed by the upper electrode. A normally closed travel switch, arranged on the upper surface of the reaction chamber; the normally closed travel switch is compressed and opened by the upper electrode when the semiconductor device is not opened; when the semiconductor device is opened, it disengages from the upper electrode and closes. Wherein, both the normally open travel switch and the normally closed travel switch are connected in series on the power supply branch of the first coil, and the first coil is energized when both the normally open travel switch and the normally closed travel switch are closed.

4. The upper electrode tap processing circuit according to claim 3, wherein The upper electrode contact treatment circuit further includes an alarm; the first electromagnetic relay further includes: A second normally open switch, connected in series on the power supply branch of the alarm. When the first coil is energized, it attracts the second normally open switch, causing the alarm to be powered on and alarm.

5. The upper electrode tap processing circuit according to claim 4, wherein, The series branch composed of the second normally open switch and the alarm is connected in parallel with the normally open travel switch and in series with the normally closed travel switch.

6. An opening mechanism is applied to a semiconductor device, and the semiconductor device includes an upper electrode and a reaction chamber, characterized in that, The cover opening mechanism includes: A driving device, used to drive the upper electrode to rise or fall; The upper electrode contact treatment circuit according to any one of claims 1-5; A second control switch, connected in series between a second power supply branch and the driving device. When the second control switch is closed, the second power supply branch supplies power to the driving device, and the driving device drives the upper electrode to rise. A start switch, used to control the on / off states of the first control switch and the second control switch. When the start switch disconnects the first control switch and closes the second control switch, the second power supply branch supplies power to the drive device, and the drive device drives the upper electrode to rise, so that the upper electrode is separated from the reaction chamber; when the start switch closes the first control switch and disconnects the second control switch, the first power supply branch supplies power to the drive device to make the upper electrode fall back onto the reaction chamber.

7. The opening mechanism according to claim 6, wherein, The drive device is a three-phase motor; when the first power supply branch supplies power to the three-phase motor, it is used to make the three-phase motor rotate in a first direction to drive the upper electrode to descend; when the second power supply branch supplies power to the three-phase motor, it is used to make the three-phase motor rotate in a second direction to drive the upper electrode to rise.

8. The open lid mechanism according to claim 7, wherein, The first power supply branch and the second power supply branch are respectively used to connect the three-phase terminals of the three-phase motor to the three live wires of a three-phase power supply. Any two phases in the three-phase wiring modes of the first power supply branch and the second power supply branch are swapped with each other.

9. The opening mechanism according to claim 6, wherein The start switch is a rocker switch; the rocker switch includes: a first static contact, a second static contact, and a moving contact for receiving single-phase power input. The first control switch is a first electromagnetic relay; the first electromagnetic relay includes: A normally closed switch; A first coil, connected to the second static contact; A first normally open switch, connected in series between the first power supply branch and the drive device. When the first normally open switch is closed, the first power supply branch supplies power to the drive device. The second control switch is a second electromagnetic relay; the second electromagnetic relay includes: A second coil, connected in series with the normally closed switch, and the series branch formed by the normally closed switch and the second coil is connected to the first static contact; A third normally open switch, connected in series between the second power supply branch and the drive device. When the third normally open switch is closed, the second power supply branch supplies power to the drive device. The rocker switch is used to connect the moving contact to the first static contact when the first end is pressed, so that the second coil is energized to attract the third normally open switch; when the second end is pressed, the moving contact is connected to the second static contact, so that the first coil is energized to attract the first normally open switch and disconnect the normally closed switch, so that the first power supply branch supplies power to the drive device.

10. The opening mechanism according to claim 9, characterized in that, The opening mechanism further includes: A switching device, connected in series on the total power supply branch of the circuit in the opening mechanism that requires power-off, and used to control the power-on state of the corresponding circuit through its on / off state.

11. The open lid mechanism according to claim 10, characterized in that, The switching device is connected between one end of the total power supply branch and the moving contact, and the other end of the total power supply branch is connected to the first coil and the second coil.

12. The opening mechanism according to claim 10, wherein, One end of the tap detection circuit of the upper electrode tap processing circuit is connected between the second static contact and the first coil, and the other end is connected between the switching device and the moving contact.

13. A semiconductor device, characterized in that, It includes an upper electrode, a reaction chamber, and an open cover mechanism as described in any one of claims 6-12.

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