Substrate cross-machine production method and display panel production line

Abstract

The present application discloses a substrate cross-machine production method and a display panel production line. By judging whether the substrate and the machine meet the preset cross-machine requirements, and when the substrate and the machine both meet the preset cross-machine requirements, a transition machine is set between two adjacent process machines, so that the substrate can be directly moved from the previous process machine to the next process machine through the transition machine without the need for on-and-off machine operations, which can effectively improve the production capacity of the display panel and save manpower and material resources.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a substrate cross-machine method and a display panel production line. Background Art

[0002] The color filter substrate production line in the existing display panel manufacturers uses the technology of integrating color filters with array substrates. The process sequence is Thin Film Transistor (TFT)-Red filter layer (R)-Green filter layer (G)-Blue filter layer (G)-Array TFT process-Black Matrix (BM)-Indium Tin Oxide coating (ITO). In the whole process, each workstation needs to send the multi-layer cassette containing glass to the feeding machine of the production line. After completing the process, the glass substrate that has completed the process needs to be withdrawn from the receiving machine of the production line to the multi-layer storage position; then plan again to send the multi-layer cassette containing glass substrates to the next process.

[0003] Existing production lines still require frequent loading and unloading of glass substrates in adjacent main processes such as R, G, B, BM, and ITO, as well as waiting for path planning and delivery, which will cause certain production capacity losses. Summary of the invention

[0004] The embodiments of the present application provide a substrate cross-machine method and a display panel production line, which are intended to solve the problem of frequent loading and unloading of machines and resulting in loss of production capacity in the display panel production process under the prior art.

[0005] In a first aspect, an embodiment of the present application provides a substrate cross-machine production method, which is applied to a display panel production line, wherein the display panel production line includes a first process machine for completing a first process in a display panel production process, a second process machine for completing a second process, and a transition machine connecting the first process machine and the second process machine and not completing a process, wherein the first process is before the second process;

[0006] The method comprises:

[0007] After the substrate completes the first process on the first process machine, determining whether the first process machine is in a cross-machine mode;

[0008] Determine whether the quality grade of the substrate meets the preset substrate quality grade requirements;

[0009] Determining whether the second process machine parameter meets the preset machine parameter requirement;

[0010] If the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameter meets the preset machine parameter requirement, then it is determined that the substrate can be produced across machines;

[0011] After the substrate enters the second process tool from the transition tool, the second process is directly performed in the second process tool.

[0012] Furthermore, if the first process machine is in a cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameter meets the preset machine parameter requirement, then determining that the substrate can be produced across machines includes:

[0013] If the first process machine is in a cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement and the second process machine parameter meets the preset machine parameter requirement, a preset cross-line permission flag is obtained, and the preset cross-line permission flag is updated to the first parameter;

[0014] determining whether the second process is a downstream process adjacent to the first process;

[0015] If the second process is a downstream process adjacent to the first process, maintaining the preset cross-line permission flag as the first parameter;

[0016] The substrate is produced across machines according to the preset cross-line permission mark, and the substrate directly enters the second process from the first process.

[0017] Furthermore, the method further comprises:

[0018] If the first process machine is not in the cross-machine mode, or the substrate quality level does not meet the preset substrate quality level requirement, or the second process machine parameter does not meet the preset machine parameter requirement, it is determined that the substrate cannot be produced across machines, and the preset cross-line permission flag is updated to the second parameter;

[0019] If the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameters meet the preset machine parameter requirements, and the second process is not a downstream process adjacent to the first process, then it is determined that the substrate cannot be produced across machines, and the preset cross-line permission flag is updated to the second parameter.

[0020] Furthermore, a first control system is preset to control the display panel production line, and a plurality of second control systems are preset to control the first process and the second process respectively; the first process machine includes a plurality of sub-machines, the plurality of sub-machines are arranged in a process sequence of the first process, the sub-machine at the end of the first process is taken as the target machine, and the target machine includes a buffer zone;

[0021] Before the substrate is produced across machines according to the preset cross-line permission mark and the substrate directly enters the second process from the first process, the method further includes:

[0022] When the substrate enters the buffer zone, the second control system corresponding to the first process determines whether the substrate can be produced across machines;

[0023] If the substrate can be produced across machines, the second control system corresponding to the first process generates a cross-line detection request and sends it to the first control system;

[0024] The first control system obtains the preset cross-line permission mark and the preset substrate sampling strategy corresponding to the substrate according to the cross-line detection request;

[0025] The first control system updates the preset cross-line permission flag according to the preset substrate sampling strategy.

[0026] Furthermore, the preset substrate sampling strategy includes the sampling frequency and sampling type corresponding to the substrate; the substrate is placed in a preset cassette, and multiple substrates are stored in the cassette at the same time;

[0027] The first control system updates the preset cross-line permission flag according to the preset substrate sampling inspection strategy, including:

[0028] Determining whether the substrate is sampled according to the sampling frequency;

[0029] If the substrate is sampled, the sampled substrate is taken as the target substrate, and the cassette where the target substrate is located is taken as the target cassette;

[0030] Updating the preset cross-line permission flag corresponding to the target substrate as a second parameter;

[0031] Updating the sampling type parameter corresponding to the target substrate to the first sampling type parameter;

[0032] Updating the preset cross-line permission flags corresponding to all substrates in the target cassette except the target substrate as the second parameter;

[0033] The sampling type parameters corresponding to all the substrates in the target cassette except the target substrate are updated to second sampling type parameters.

[0034] Furthermore, the method further comprises:

[0035] If the substrate has not been sampled, updating the preset cross-line permission flag corresponding to the substrate to a third parameter;

[0036] The sampling inspection type parameter corresponding to the substrate is updated to the second sampling inspection type parameter.

[0037] Furthermore, after the first control system acquires the preset cross-line permission mark corresponding to the substrate, the method further includes:

[0038] If the preset cross-line permission identifier corresponding to the substrate is the second parameter, the sampling type parameter corresponding to the substrate is directly updated to the second sampling type parameter.

[0039] Furthermore, before the substrate completes the first process and determines whether the first process machine is in a cross-machine mode, the method further includes:

[0040] Sending a preset machine access request to the first control system;

[0041] The first control system acquires, according to the on-machine request, material information corresponding to the substrate and target process information of a next process associated with the first process;

[0042] The second control system acquires the material information corresponding to the substrate and the target process information;

[0043] The second control system determines whether the process information of the second process matches the target process information according to the process information.

[0044] Furthermore, when the substrate is taped out on the first process machine, it is determined whether machine parameters of the second process machine are successfully set.

[0045] In a second aspect, an embodiment of the present application further provides a display panel production line, comprising a first process machine for completing a first process in a display panel production process, a second process machine for completing a second process, and a transition machine for connecting the first process machine and the second process machine and not completing a process, wherein the first process is before the second process, and the display panel production line is used to implement the steps in the substrate cross-machine production method as described in any of the above items.

[0046] The substrate cross-machine production method and display panel production line provided in the embodiments of the present application determine whether the substrate and the machine meet the preset cross-machine requirements. When the substrate and the machine both meet the preset cross-machine requirements, a transition machine is set between two adjacent process machines to allow the substrate to be directly moved from the previous process machine to the next process machine through the transition machine without the need for on- and off-machine operations, thereby effectively improving the production capacity of the display panel and saving manpower and material resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.

[0048] Figure 1 A schematic flow chart of an embodiment of a substrate cross-machine production method provided in an embodiment of the present application;

[0049] Figure 2 A schematic diagram of another embodiment of the process of substrate cross-machine production provided in the embodiment of the present application may include:

[0050] Figure 3 A schematic diagram of an embodiment of a substrate sampling inspection provided in an embodiment of the present application;

[0051] Figure 4 A flowchart of an embodiment of updating a preset cross-line permission identifier provided in an embodiment of the present application. DETAILED DESCRIPTION

[0052] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0053] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0054] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0055] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0056] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the various specific processes and material examples provided by the present application, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.

[0057] The present application provides a substrate cross-machine production method and a display panel production line, which are described below respectively.

[0058] The substrate cross-machine production method provided in the present application is applied to a display panel production line. In actual display panel production, the display panel production line includes multiple process machines used in the display panel production process. For example, it includes a first process machine that completes a first process, a second process machine that completes a second process, and a transition machine that connects the first process machine and the second process machine but does not complete the process.

[0059] The actual display panel production line may also include a cassette (CST) for loading glass. Before the display panel is produced, the multi-layer cassette needs to be loaded onto the machine to load the glass onto the production line. After the corresponding display panel process is completed, the unloading operation is performed to unload the glass substrate from the production line and store it in the cassette (CST). The actual display panel production line may also include a device (Stocker) for conveying and storing cassettes.

[0060] In an actual production environment, each process machine corresponds to its own machine identification. For example, FBMPH100 ​​is a process machine for performing a black matrix process (Black Matrix, BM), and FBMPH100 ​​is the machine identification corresponding to the machine; and FBITO100 is a process machine for coating indium tin oxide (ITO); FBITO100 is also the machine identification corresponding to the machine. FBRPH100, FBGPH100, FBBPH100, and FBWPH100 ​​are process machines for preparing RGBW color resist layers, respectively; BRPH100, FBGPH100, FBBPH100, and FBWPH100 ​​are also machine identifications. In the embodiments of the present application, generally speaking, there is a one-to-one correspondence between the machine identification and the machine.

[0061] And because the order of multiple processes of the display panel is absolutely related, the FBMPH100 ​​machine and the FBITO100 machine are adjacent, with the FBMPH100 ​​machine in front and the FBITO100 machine in the back. Similarly, FBRPH100, FBGPH100, FBBPH100 ​​and FBWPH100 ​​are also arranged in the order of RGBW processes.

[0062] In the embodiment of the present application, the operator can selectively start the transition machine between different processes according to actual needs to carry out cross-machine production. For example, only FBRPH100 ​​to FBGPH100 ​​can be selected to start cross-machine production; or FBRPH100, FBGPH100, FBBPH100, and FBWPH100 ​​can be selected to start cross-machine production.

[0063] For all process machines on the display panel production line, each process machine includes two cross-machine modes (Short Cut Mode), namely: cross-machine mode (Short Cut Mode is enabled) and non-cross-machine mode; and the machine mode of the machine can be switched between the two modes. When the machine is in the cross-machine mode, the substrate can be produced across machines; when the machine is in the non-cross-machine mode, the substrate cannot be produced across machines, and the substrate still needs to be produced according to the operation of first getting off the machine and then getting on the machine in the prior art.

[0064] In the embodiment of the present application, two adjacent processes are considered as a group of associated processes, and the substrate is produced across machines between the associated processes. If the substrate needs to be produced across machines, the machines corresponding to the two adjacent processes need to be switched to the cross-machine mode, that is, the Short Cut Mode of the process machine is switched to enable.

[0065] In a specific embodiment, if cross-machine production between the FBGPH100 ​​process and the FBBPH100 ​​process is to be enabled, the Short Cut Mode of the process machine corresponding to FBBPH100 ​​needs to be switched to enable, or the process machine corresponding to FBBPH100 ​​needs to generate a machine mode switching request (Short Cut Mode Change Command), and send the machine mode switching request (Short Cut Mode Change Command) to the process machine corresponding to FBBPH100, so as to realize the switching of the machine mode of the process machine corresponding to FBBPH100.

[0066] It should be noted that, in the embodiments of the present application, the cross-machine mode corresponding to the process machine corresponding to each process needs to be reported to the control system at all times so that the operator can confirm the cross-machine mode corresponding to each process machine.

[0067] like Figure 1 As shown, it is a schematic diagram of a process flow of an embodiment of a substrate cross-machine production method provided in an embodiment of the present application, which may include:

[0068] 11. After the substrate completes the first process on the first process machine, determine whether the first process machine is in a cross-machine mode.

[0069] In the embodiment of the present application, after the substrate completes the first process of the display panel, it is necessary to determine whether the substrate can be produced across machines, so that the substrate can be produced in other subsequent processes without being taken off the machine. Therefore, after the substrate completes the first process, it is necessary to first determine whether the first process machine is in a cross-machine mode. Only when the first process machine is in a cross-machine mode can the substrate be operated across machines.

[0070] 12. Determine whether the quality grade of the substrate meets the preset substrate quality grade requirements.

[0071] Specifically, when a substrate is produced across machines, it is also necessary to ensure that the quality level (Job Data) of the substrate meets the preset substrate quality level requirements; that is, the substrate does not have various abnormalities. In a specific embodiment of the present application, if the quality level of the substrate meets the preset substrate quality level requirements, the quality level (Job Data) of the substrate can be OK.

[0072] It should be noted that, for different substrates, the quality grade requirements of the substrates corresponding to the substrates are also different; for different substrates, it is only necessary that the quality grade of the substrate meets the quality grade requirements of the substrate corresponding to itself.

[0073] 13. Determine whether the second process machine parameters meet the preset machine parameter requirements.

[0074] In an embodiment of the present application, since the substrate needs to be taped out from the first process machine to the second process machine for performing a second process in the second process machine, it is also necessary to confirm whether the second process machine is properly set up; that is, to confirm whether the machine parameters corresponding to the second process machine meet the preset machine parameter requirements.

[0075] For example, if the second process machine is a machine for preparing ITO, it is necessary to confirm whether the material required for preparing ITO is correct, whether the thickness parameters for preparing ITO are set correctly, etc.

[0076] 14. If the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameters meet the preset machine parameter requirements, it is determined that the substrate can be produced across machines.

[0077] In the above embodiment, only when the first process machine is in cross-machine mode and the quality level of the substrate meets the preset substrate quality level requirement, and the machine parameters of the second process machine meet the preset machine parameter requirements, can the substrate be cross-machine produced.

[0078] It should be noted that in the embodiments of the present application, multiple judgments are actually required before it is finally confirmed that the substrate can be produced across machines. Here, it is only preliminarily determined that the substrate can be produced across machines.

[0079] 15. After the substrate enters the second process machine from the transition machine, it directly enters the second process in the second process machine.

[0080] In an embodiment of the present application, a transition machine is further arranged between the first process machine and the second process machine, and the transition machine is connected to the first process machine and the second process machine at the same time; so that the substrate can directly reach the transition machine from the first process machine, and then directly enter the second process machine from the transition machine, and carry out the second process production in the second process machine.

[0081] The substrate cross-machine production method provided in the embodiment of the present application determines whether the substrate and the machine meet the preset cross-machine requirements. When the substrate and the machine both meet the preset cross-machine requirements, a transition machine is set between two adjacent process machines to allow the substrate to be directly moved from the previous process machine to the next process machine through the transition machine without the need for on- and off-machine operations, thereby effectively improving the production capacity of the display panel and saving manpower and material resources.

[0082] In the embodiment of the present application, the entire display panel production line is controlled by the first control system, and each process also corresponds to a second control system. When the display panel process includes multiple processes, there are also multiple second control systems, and the first control system can control multiple second control systems.

[0083] In the above embodiment, after the substrate completes the first process and before determining whether the first process machine is in the cross-machine mode, the substrate needs to be loaded on the first process machine to perform the first process. Figure 2 As shown, another process diagram of substrate cross-machine production provided by the embodiment of the present application may include:

[0084] 21. Send a preset machine request to the first control system.

[0085] In an embodiment of the present application, before the substrate is actually put on the machine for display panel processing, the first control system needs to first connect multiple process machines to establish a complete display panel production line. Take the first control system as a manufacturing execution system (MES system), the second control system as a block control system (BC system), the first process as a BM process, and the second process as an ITO process as an example; the MES system controls the entire display panel production line, while the BC system only controls a single process. Specifically, the BM process can correspond to a BC system, and the ITO process also corresponds to a BC system; but the BC systems corresponding to the BM process and the ITO process are not the same.

[0086] Before the substrate is actually manufactured, the MES system first establishes a complete display panel production line. For example, based on the actual display panel production process, the MES system sets the first process machine corresponding to the BM process as the upstream machine (Machine), and the second process machine corresponding to the ITO process as the downstream machine (Linked-Machine-Name).

[0087] When the MES system has established a complete display panel production line, the BC system corresponding to the BM process can switch the first process machine corresponding to the BM process to the cross-machine mode, that is, switch the Short Cut Mode of the first process machine corresponding to the BM process to enable. At the same time, the BC system corresponding to the BM process needs to report the machine mode switch request (CF Short Cut Mode Change Request) of the BM process to the MES system, and the MES system records that the first process machine corresponding to the BM process is in the cross-machine mode.

[0088] At this time, the cassette (CST) loaded with multiple substrates needs to be loaded to the first process machine to carry out the first process. Therefore, the cassette (CST) generates a loading request and sends the loading request to the first control system, that is, to the MES system.

[0089] 22. The first control system obtains the material information corresponding to the substrate and the target process information of the next process associated with the first process according to the machine loading request.

[0090] When the first control system receives the machine request, it will download the material information (Process-Line-List) corresponding to the substrate in the cassette (CST) and the target process information of the next process associated with the first process according to the machine request.

[0091] The material information includes but is not limited to the type of substrate, the number of substrates, etc. The target process information may include information such as a machine identification (PPID); the machine identification is used to determine which process the machine is performing, and each machine corresponds to a machine identification (PPID).

[0092] The purpose of obtaining the inventory information is to confirm whether the substrate currently required to be loaded is the substrate required to undergo the display panel process, and whether the information such as the number of substrates is correct. The purpose of obtaining the target process information of the next process associated with the first process machine is to confirm whether the downstream machine (Linked-Machine-Name) confirmed in the above content is the correct machine.

[0093] 23. The second control system obtains the material information and target process information corresponding to the substrate.

[0094] After the first control system (MES system) obtains the material information and target process information, the first control system (MES system) needs to send the obtained material information and target process information to the second control system (BC) corresponding to the BM process. The second control system (BC) corresponding to the BM process obtains the material information and target process information corresponding to the substrate.

[0095] 24. The second control system determines whether the process information of the second process matches the target process information based on the process information.

[0096] After the second control system (BC) corresponding to the BM process obtains the billing information and target process information, the substrate will be loaded onto the machine; that is, the substrate enters the machine corresponding to the BM process. After the substrate is loaded onto the machine, the second control system corresponding to the BM process will notify the second control system corresponding to the TIO process to perform a machine identification confirmation (Recipe ID Register Check) on all machines in all TIO processes to determine whether the machine located downstream of the BM process machine is the machine corresponding to the ITO process.

[0097] After receiving the machine identification confirmation information, the second control system corresponding to the second process will confirm its own machine, obtain the confirmation result (Check Result) and reply the confirmation result to the second control system corresponding to the first process. The first process machine records the machine identification confirmation result (CF Short Cut Recipe ID Check Result) at this time.

[0098] In the above embodiment, the machine identification confirmation result (CF Short Cut Recipe ID Check Result) may include two situations: OK / NG; wherein OK indicates that the downstream machine is the machine corresponding to the second process, and NG indicates that the downstream machine is not the machine corresponding to the second process, or the machine corresponding to the second process is incomplete and the complete second process cannot be implemented.

[0099] In the above embodiment, when the substrate is loaded onto the machine and the first process is being performed, that is, when the substrate is taped out on the first process substrate, it is also necessary to determine whether the machine parameters of the second process machine are successfully set.

[0100] The machine identification confirmation is only to confirm that the downstream machine is the second process machine corresponding to the second process; and judging whether the machine parameters of the second process machine are successfully set is to ensure that the substrate obtained after the second process can meet the substrate requirements.

[0101] It should be noted that in an actual display panel production line, each process of the display panel includes multiple sub-machines, that is, the first process machine and the second process machine actually include multiple sub-machines, and the multiple sub-machines are also arranged in the actual display panel process order.

[0102] Take the first process as BM process and the second process as ITO process as an example; both BM process and ITO process correspond to multiple sub-machines. For BM process, BM process includes loading machine (Loader) and unloading machine (Unloader); substrate enters the production line at loading machine (Loader) and exits the production line at unloading machine (Unloader). And BM process also includes baking machine (Oven) etc.

[0103] In the embodiment of the present application, when the substrate is taped to the oven machine, the BC system corresponding to the BM process notifies the BC system corresponding to the ITO process to perform machine parameter checks (Recipe Parameter Check) on all machines in the ITO process. After receiving the notification, the BC system corresponding to the TIO process will perform machine parameter checks on all machines in the ITO process and send the check results (Check Result) to the BC system corresponding to the BM process. The BC system corresponding to the BM process will record the machine parameter check results (CF Short Cut Recipe Parameter Request Result) of the ITO system at this time.

[0104] In the above embodiment, the machine parameter detection result (CF Short Cut Recipe Parameter RequestResult) can also include two situations: OK / NG. Among them, OK means that the machine parameters of the machine corresponding to the ITO process are normal; while NG means that the machine parameters of the machine corresponding to the ITO process are abnormal.

[0105] In the above embodiment, after the substrate has completed all processes in the first process, the substrate will arrive at the unloader in the first process machine, and the substrate will be produced across machines. However, before the substrate is produced across machines, it will be determined whether the production line and the substrate meet the conditions for cross-machine production.

[0106] Among them, if the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirements and the second process machine parameters meet the preset machine parameter requirements; it is also necessary to inquire whether the second process can receive the substrate. Specifically, the preset cross-line permission flag (Permit Flag) can be obtained first, and the preset cross-line permission flag (Permit Flag) can be updated to the first parameter. Specifically, the value of the Permit Flag can be updated to M; that is, the first parameter is M.

[0107] At this time, it is also necessary to determine whether the second process is the second process adjacent to the first process. If the second process is the downstream process adjacent to the first process, the preset cross-line permission flag (Permit Flag) is maintained as the first parameter; and the substrate is cross-machine produced according to the cross-line permission flag (Permit Flag), that is, the substrate directly enters the second process from the first process.

[0108] Specifically, the aforementioned determination of whether the first process is a cross-machine mode, whether the quality level of the substrate meets the preset substrate quality requirements, and whether the second process machine parameters meet the preset machine parameter requirements are all determined by the second control system corresponding to the first process to determine whether the first process machine and the substrate meet the cross-machine requirements. In the embodiment of the present application, the first control system is also required to determine whether the second process machine meets the cross-machine requirements.

[0109] Specifically, the first control system mainly determines whether the second process is a downstream process adjacent to the first process, that is, determines whether the machine located downstream of the first process is the machine for performing the second process. If so, the first control system does not update the preset cross-line permission flag (Permit Flag). The BC system corresponding to the first process determines that the preset cross-line permission flag (Permit Flag) at this time is still the first parameter, and determines that the substrate can be produced across machines.

[0110] In the above embodiment, if the first process machine is not in the cross-machine mode, or the quality level of the substrate does not meet the preset substrate quality level requirement, or the second process machine parameter does not meet the preset machine parameter requirement, it is determined that the substrate cannot be produced across machines, and while obtaining the preset cross-line permission flag (Permit Flag), the preset cross-line permission flag (Permit Flag) needs to be updated to the second parameter. Specifically, the preset cross-line permission flag (Permit Flag) can be updated to N; that is, the second parameter is N.

[0111] In other embodiments of the present application, if the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirements, and the second process machine parameters meet the preset machine parameter requirements, but the second process is not a downstream process adjacent to the first process, then it is determined that the substrate cannot be produced across machines, and the preset cross-line permission flag is updated to the second parameter N.

[0112] In a specific embodiment of the present application, the first process is a BM process and the second process is an ITO process. When the substrate completes all processes in the BM process and reaches the unloader in the BM process, the unloader will collect the cross-line query request (Permission Request Report) issued by each substrate and send the cross-line query request to the BC system of the BM process. After receiving the cross-line query request (Permission Request Report), the BC system of the BM process will determine whether the machine and substrate corresponding to the BM process meet the cross-machine conditions.

[0113] Specifically, the BC system of the BM process will determine whether the machine mode (CF Short Cut Mode) of the machine corresponding to the BM process is the cross-machine mode (enable); at the same time, it will determine whether the quality level of the substrate (Job Judge) meets the preset substrate quality level requirements, that is, the quality level of the substrate (Job Judge) is OK. It is also necessary to determine whether the machine parameters corresponding to the ITO process meet the preset machine parameter requirements, that is, the machine parameter detection result (CF Short Cut Recipe Parameter Request Result) corresponding to the ITO process is OK.

[0114] If the above three conditions are all met, the preset cross-line permission flag (Permit Flag) is obtained, and the preset cross-line permission flag (Permit Flag) is updated as the first parameter, that is, the Permit Flag is M.

[0115] After the BC system judgment corresponding to the BM process is completed, the MES system needs to make another judgment; however, the MES system judges whether the ITO process is a downstream machine adjacent to the BM process. If the ITO process is a downstream machine adjacent to the BM process, the MES system does not update the preset cross-line permission flag (Permit Flag).

[0116] If the ITO process is not a downstream process adjacent to the BM process, the MES needs to update the preset cross-line permission flag (Permit Flag) to the second parameter, that is, update the preset cross-line permission flag (Permit Flag) to N; at the same time, the MES system sends the updated preset cross-line permission flag (Permit Flag) to the BC system corresponding to the BM process.

[0117] The BC system corresponding to the BM process will record the preset cross-line permission flag (Permit Flag), and determine whether the preset cross-line permission flag (Permit Flag) corresponds to the first parameter or the second parameter to determine whether the substrate can be cross-line produced.

[0118] It should be noted that in the embodiment of the present application, since the substrates are placed in a cassette (CST), and a cassette (CST) will store multiple substrates at the same time. In an actual display panel production line, there will also be multiple substrates at the same time. Therefore, in the embodiment of the present application, when each substrate arrives at the unloader, the BC system will determine whether the substrate can be produced across machines; and the BC system will record the preset cross-line permission flags (Permit Flags) corresponding to all substrates.

[0119] In the embodiment of the present application, when the substrates are undergoing various display panel manufacturing processes on the display panel production line, the operator can also perform random inspections on the substrates on the production line to confirm that no abnormalities occur during the substrate preparation process. And for different substrates, the type of random inspection required for the substrates is also different.

[0120] In the embodiment of the present application, since the actual display panel production line includes multiple machines, that is, each process includes multiple sub-machines. Therefore, the first process machine includes multiple sub-machines, and the multiple sub-machines are arranged according to the process sequence of the actual first process. The sub-machine at the end of the first process is taken as the target machine, and the first target sub-machine includes a buffer; in the actual display panel production process, when the substrate is flown to the buffer of the first target sub-machine, the substrate will be taken out for random inspection. However, not all substrates will be randomly inspected.

[0121] like Figure 3 As shown, a schematic diagram of an embodiment of substrate sampling inspection provided by an embodiment of the present application may include:

[0122] 31. When the substrate enters the buffer zone, the second control system corresponding to the first process determines whether the substrate can be produced across machines.

[0123] In the embodiment of the present application, when the substrate enters the buffer zone, the substrate is still in the first process machine and has not yet entered the second process machine. At this time, the second control system corresponding to the first process machine will again determine whether the substrate can be produced across machines.

[0124] At this time, the second control system corresponding to the first process machine determines whether the substrate can be produced across machines, including: the second control system corresponding to the first process machine determines: whether the first process machine is in a cross-machine mode; whether the quality level of the substrate meets the preset substrate quality level requirements; whether the preset cross-line permission flag (Permit Flag) corresponding to the substrate is the first parameter; whether the machine parameters of the second process machine are normal. If the above conditions are all met, the second control system corresponding to the first process machine determines that the substrate can be produced across machines.

[0125] 32. If the substrate can be produced across machines, the second control system corresponding to the first process generates a cross-line detection request and sends it to the first control system.

[0126] When the second control system corresponding to the first process machine determines again that the substrate can be produced across machines, since random inspection is still required, the second control system corresponding to the first process needs to generate a cross-line random inspection request (CF Short Cut Sample Check Request) and send the cross-line random inspection request (CF Short Cut Sample Check Request) to the first control system to request random inspection.

[0127] 33. The first control system obtains a preset cross-line permission mark and a preset substrate sampling strategy corresponding to the substrate according to the cross-line detection request.

[0128] When the first control system receives the production cross-line detection request (CF Short Cut Sample Check Request), the first control system will obtain the preset cross-line permission flag (Permit Flag) corresponding to the substrate and the preset substrate sampling strategy.

[0129] The preset substrate sampling strategy may include sampling frequency and sampling type corresponding to the substrate. The sampling frequency may be one tenth, one twentieth, etc., and the sampling type may include: over-baking detection, debris risk detection, display unevenness (mura) detection, etc.

[0130] 34. The first control system updates the preset cross-line permission mark according to the preset substrate sampling strategy.

[0131] Since the preset sampling inspection strategy includes the sampling inspection frequency and sampling inspection type corresponding to the substrate, the substrate can be sampled according to the preset substrate sampling inspection strategy, and the preset cross-line permission flag (Permit Flag) corresponding to each substrate can be updated.

[0132] Specifically, Figure 4 As shown, a schematic diagram of a flow chart of an embodiment of updating a preset cross-line permission flag provided in an embodiment of the present application may include:

[0133] 41. Determine whether the substrate is inspected based on the inspection frequency.

[0134] The aforementioned sampling inspection frequency may be one tenth, one twentieth, etc.; therefore, whether the substrate is sampled can be determined based on the sampling inspection frequency.

[0135] 42. If a substrate is sampled, the sampled substrate is referred to as a target substrate, and the cassette where the target substrate is located is referred to as a target cassette.

[0136] 43. Update a preset cross-line permission flag corresponding to the target substrate as a second parameter.

[0137] If the substrate is sampled, the sampled substrate is used as the target substrate, and the cassette (CST) where the target substrate is located is the target cassette. Since the target substrate is sampled, the target substrate needs to be removed from the machine and cannot be used for subsequent display panel processes; that is, the target substrate cannot be produced across machines. At this time, the preset cross-line permission flag (PermitFlag) corresponding to the target substrate needs to be updated as the second parameter; that is, N.

[0138] 44. Update the sampling type parameter corresponding to the target substrate to the first sampling type parameter.

[0139] Since the target substrate is sampled, the preset cross-line permission mark corresponding to the target substrate is set as the second parameter; while confirming that the target substrate is sampled, the sample type (Sample Type) corresponding to the target substrate is also confirmed, and the sample type parameter corresponding to the target substrate needs to be updated to the first sample type parameter. The first sample type parameter indicates that the substrate has a corresponding sample type.

[0140] 45. Update the preset cross-line permission flags corresponding to all substrates other than the target substrate in the target cassette as the second parameter.

[0141] 46. ​​Update the sampling type parameters corresponding to all substrates in the target cassette except the target substrate to the second sampling type parameters.

[0142] In an embodiment of the present application, in an actual display panel production line, a plurality of substrates are stored in a cassette (CST), and when a substrate in the cassette (CST) is sampled, the cassette is actually unloaded from the machine, rather than the target substrate in the cassette (CST) being sampled being unloaded from the machine.

[0143] When the target substrate to be sampled appears according to the sampling frequency, the substrates that continue to flow through will be unconditionally designated to be filled into the cassette until the maximum number of substrates that the cassette can accommodate is reached. In this way, the substrates in the entire cassette will be collected into the same cassette and sent to the same sampling station. However, according to the sampling frequency, it can be determined that only some of the substrates in the target cassette are sampled, and some of the substrates are not sampled, but are still removed from the machine and cannot be processed in the subsequent process. For this part of the substrates that have not been sampled but removed from the machine, that is, all other substrates in the target cassette except the target substrate, these substrates cannot be processed in the subsequent display panel process, so the preset cross-line permission flag (Permit Flag) corresponding to these substrates is the second parameter.

[0144] In the above embodiment, although other substrates in the target cassette except the target substrate are also unloaded, they are not actually sampled, so some substrates do not have corresponding sample types (Sample Type); at this time, the sample type parameters corresponding to all other substrates in the target cassette except the target substrate can be updated to the second sample type parameters. The second sample type parameters represent that the substrates do not have corresponding sample types.

[0145] In the above embodiment, if it is determined according to the preset sampling strategy that no substrate in the entire cassette (CST) is sampled, then all substrates in the entire cassette (CST) can be produced across machines to perform subsequent display panel related processes. At this time, if the substrate is not sampled, the preset cross-line permission flag (Permit Flag) corresponding to the substrate can be updated to the third parameter; specifically, it can be Y, which means that the substrate has not been sampled and can be produced across machines. At the same time, it is also necessary to update the sampling type parameter corresponding to this type of substrate to the second sampling type parameter, indicating that this type of substrate has no corresponding sampling type. The above method can be used to divide the substrates into three categories to better determine the flow direction of the substrates.

[0146] In one embodiment of the present application, the sampling inspection frequency of the substrates can be one in twenty minutes, and the maximum number of substrates that can be stored in a cassette is fifteen, that is, a cassette can only store fifteen substrates at most. When the sampling inspection is performed, if there is a target substrate to be inspected in the cassette, the preset cross-line permission flag (PermitFlag) corresponding to the target substrate is updated to the second parameter, and the target substrate will be removed from the machine and cannot be used for subsequent processes.

[0147] While determining that the target substrate is sampled, it is also determined that the sample inspection type corresponding to the target substrate is to perform mura detection on the substrate; that is, the target substrate has a certain sample inspection type. At this time, the sample inspection type parameter corresponding to the target substrate has a value, which is the first sample inspection type parameter. And other substrates in the same cassette as the target substrate will also be unloaded, but will not be detected; the preset cross-line permission flag (Permit Flag) corresponding to this type of substrate is also updated to the second parameter, but the sample inspection type parameter corresponding to this type of substrate has no value, which is the second sample inspection type parameter.

[0148] In other embodiments of the present application, after the first control system obtains the preset cross-line permission flag (Permit Flag) corresponding to the substrate, if the preset cross-line permission flag (Permit Flag) corresponding to the substrate itself is the second parameter, the sampling type parameter corresponding to the substrate is directly updated to the second sampling type parameter.

[0149] Specifically, the preset cross-line permission flag (Permit Flag) corresponding to the substrate is itself the second parameter, indicating that regardless of whether the substrate is sampled or not, the substrate cannot be produced across machines and the substrate itself will be removed from the machine; therefore, the substrate has no corresponding sampling type, and the sampling type parameter corresponding to this type of substrate is the second sampling type parameter.

[0150] In the embodiment of the present application, after determining whether a substrate needs to be sampled in the buffer of the first process machine, the sampled substrate will be removed from the machine, while the substrate not sampled will be produced across machines to continue the subsequent display panel process.

[0151] Specifically, when the second control system corresponding to the first process sends a cross-line sampling request (CF Short Cut Sample Check Request) to the first control system, and the first control system determines whether to conduct a sampling and replies the cross-line sampling result (CF Short Cut Sample Check Reply) to the second control system corresponding to the first process, the first control system can control the substrate to be produced across machines.

[0152] Specifically, the second control system corresponding to the first process will again determine whether the machine and the substrate meet the cross-machine condition. In some embodiments, the second control system corresponding to the first process again determines: whether the first process machine is in cross-machine mode; whether the second process machine adjacent to the first process machine and located downstream of the first process machine is a machine for performing the second process; and whether the machine parameter settings of the second process machine are correct.

[0153] At the same time, the sampling results corresponding to each substrate, the machine status of the second process machine, and whether the second control system corresponding to the second process machine controls the second process machine normally are also obtained.

[0154] In the above embodiment, only substrates that are not subject to random inspection, i.e., substrates whose cross-line permission flag (Permit Flag) is preset as the third parameter, will undergo subsequent processes. When such substrates undergo cross-machine production, the second control system corresponding to the first process will generate a substrate release command (Glass Out Result Command) to inform the first process machine to release the substrate.

[0155] When the substrate release instruction is generated, it is also determined whether the substrate is released successfully to generate a substrate release result. The substrate release result may include OK_To Short Cut or NG_To Unloader; OK_To Short Cut means that the substrate is released successfully, while NG_To Unloader means that the substrate is not released successfully.

[0156] In the above embodiment, after obtaining the substrate release result, the second control system corresponding to the first process substrate will send the substrate release result to the transition machine set between the first process machine and the second process machine; and at this time the substrate is taped out from the first process machine to the transition machine.

[0157] While the substrate is being taped out to the transition machine, the second control system corresponding to the first process machine generates a process end signal (CF Short Cut Glass Process End) and sends the process end signal (CF Short Cut Glass Process End) to the first control system to notify the first control system that the first process corresponding to the substrate is ended.

[0158] As for the substrates that are not released successfully, it is necessary to collect such substrates into the cassette of the first process machine to realize unloading.

[0159] In a specific embodiment of the present application, take the first process as the BM process, the second process as the ITO process, the first control system as the MES system, and the second control system as the BC system as an example. The BM process includes multiple sub-machines, among which the sub-machine at the end of the BM process is the unloader; and the TIO process also includes multiple sub-machines, among which the sub-machine at the first position of the TIO process is the loader. In an embodiment of the present application, any two adjacent processes are connected through a transition machine, that is, the unloader in the BM process and the loader in the TIO process are connected through a transition machine; the substrate can be directly taped from the BM process to the TIO process through the transition machine.

[0160] When the MES system replies the substrate sampling result (CF Short Cut Sample Check Reply) to the BC system corresponding to the BM process, the substrate on the unloader of the BM process can be produced across machines. Specifically, the BC system corresponding to the BM process will determine the following: whether the machine mode (CFShort Cut Mode) of the unloader of the BM process is enabled; whether the substrate identification confirmation result (CF Short Cut Recipe IDCheck Result) of the TIO process is OK; whether the machine parameter detection result (CF Short Cut Recipe ParameterRequest Result) of the TIO process is OK.

[0161] The BC system corresponding to the BM process will also determine: the sampling results corresponding to each substrate, including the preset cross-line permission flag (Permit Flag) and the sampling type (Sample Type). It will also determine the status of the feeder (Loader) of the TIO process; whether the BC system corresponding to the TIO process is connected normally. If the preset cross-line permission flag (PermitFlag) corresponding to the substrate is the third parameter, that is, Y, the BC system of the BM process will send a substrate release command (Glass Out Result Command) to the unloader (Unloader) of the BM process to prompt the unloader (Unloader) of the BM process to release the substrate.

[0162] At the same time, the BC system of the BM process will also determine whether the substrate is released successfully; if it is released successfully, the BM process unloader will be informed that the cross-line result is OK_To Short Cut; if it is not released successfully, the BM process unloader will be informed that the cross-line result is NG_To Unloader. At the same time, the BM process unloader will send the substrate with the cross-line result of OK_To Short Cut to the transition machine.

[0163] At this time, the BC system of the BM process will generate a process end signal (CF Short Cut Glass ProcessEnd) and report it to the MES system, reminding the MES system that the substrate has completed the first process. The substrate with the cross-line result of OK_ToShort Cut will be collected into the cassette (CST) at the unloader of the BM process.

[0164] In other embodiments of the present application, when the substrate arrives at the transition machine, the transition machine will automatically report substrate entry confirmation information (Glass In Check Request) to the second control system corresponding to the second process. The second control system corresponding to the second process will report substrate machine confirmation information (Glass Process Started) to the first control system to control the substrate from the transition substrate to the second process machine for subsequent processes.

[0165] In other embodiments of the present application, the substrate cross-machine production method provided in the embodiments of the present application also supports when a substrate is abnormally lost on a transition machine, that is, when a substrate enters a transition machine but the relevant information of the substrate cannot be obtained, the operator can manually report the substrate entry confirmation information (Glass In Check Request) to the second control system.

[0166] If the reported substrate entry confirmation information (Glass In Check Request) contains a prompt information (Report Flag), and the prompt information (Report Flag) is 1; after the second control system corresponding to the second process receives the substrate entry confirmation information (Glass In Check Request) manually reported by the operator, the second control system corresponding to the second process will initiate a material acquisition request (CF Short Cut Permit Request) to the first control system.

[0167] The first control system will re-acquire the material information of the substrate according to the material acquisition request (CF Short Cut Permit Request), and reply the material information to the second control system corresponding to the second process. After the second control system corresponding to the second process re-acquires the material information corresponding to the substrate, it will re-report the substrate machine confirmation information (Glass Process Started) to the first control system to control the substrate to be taped out from the transition machine to the second process machine.

[0168] It should be noted that, in the embodiment of the present application, the first control system and the second control system are actually controlled by a programmable logic controller (PLC). The transition machine is set between the first process machine and the second process machine, and the transition machine can communicate with both the first process machine and the second process machine; in order to maintain the independence between different processes, that is, to ensure that the second control system corresponding to each different process can only control its own corresponding process, the network numbers (Network No) corresponding to different processes need to be inconsistent to ensure the independence of the second control system. For example, the network number (Network No) corresponding to the BM process is 1, and the network number (Network No) corresponding to the TIO process is 2.

[0169] An embodiment of the present application also provides a display panel production line, which includes a first process machine for completing a first process in the display panel production process, a second process machine for completing a second process, and a transition machine that connects the first process machine and the second process machine and does not complete the process, wherein the first process is before the second process, and the display panel production line is used to implement the steps in the substrate cross-machine production method as described in any of the above items.

[0170] The display panel production line provided in the embodiment of the present application determines whether the substrate and the machine meet the preset cross-machine requirements. When the substrate and the machine both meet the preset cross-machine requirements, a transition machine is set between two adjacent process machines to allow the substrate to be directly moved from the previous process machine to the next process machine through the transition machine without the need for on- and off-machine operations, thereby effectively improving the production capacity of the display panel and saving manpower and material resources.

[0171] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0172] The above is a detailed introduction to a substrate cross-machine production method and a display panel production line provided in an embodiment of the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and its core idea of ​​the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for producing a substrate across machines, characterized in that: Applicable to a display panel production line, the display panel production line includes a first process machine for completing a first process in the display panel production process, a second process machine for completing a second process, and a transition machine connecting the first process machine and the second process machine for not completing a process, wherein the first process is before the second process; The method comprises: After the substrate completes the first process on the first process machine, determining whether the first process machine is in a cross-machine mode; Determine whether the quality grade of the substrate meets the preset substrate quality grade requirements; Determining whether the second process machine parameter meets the preset machine parameter requirement; If the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameter meets the preset machine parameter requirement, then it is determined that the substrate can be produced across machines; After the substrate enters the second process tool from the transition tool, the second process is directly performed in the second process tool.

2. The substrate cross-machine production method according to claim 1, characterized in that: If the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameter meets the preset machine parameter requirement, then determining that the substrate can be produced across machines includes: If the first process machine is in a cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement and the second process machine parameter meets the preset machine parameter requirement, a preset cross-line permission flag is obtained, and the preset cross-line permission flag is updated to the first parameter; determining whether the second process is a downstream process adjacent to the first process; If the second process is a downstream process adjacent to the first process, maintaining the preset cross-line permission flag as the first parameter; The substrate is produced across machines according to the preset cross-line permission mark, and the substrate directly enters the second process from the first process.

3. The substrate cross-machine production method according to claim 2, characterized in that: The method further comprises: If the first process machine is not in the cross-machine mode, or the substrate quality level does not meet the preset substrate quality level requirement, or the second process machine parameter does not meet the preset machine parameter requirement, it is determined that the substrate cannot be produced across machines, and the preset cross-line permission flag is updated to the second parameter; If the first process machine is in cross-machine mode, the quality level of the substrate meets the preset substrate quality level requirement, and the second process machine parameters meet the preset machine parameter requirements, and the second process is not a downstream process adjacent to the first process, then it is determined that the substrate cannot be produced across machines, and the preset cross-line permission flag is updated to the second parameter.

4. The substrate cross-machine production method according to claim 2, characterized in that: A first control system is preset to control the display panel production line, and a plurality of second control systems are preset to control the first process and the second process respectively; the first process machine includes a plurality of sub-machines, the plurality of sub-machines are arranged in a process sequence of the first process, the sub-machine at the end of the first process is taken as the target machine, and the target machine includes a buffer zone; Before the substrate is produced across machines according to the preset cross-line permission mark and the substrate directly enters the second process from the first process, the method further includes: When the substrate enters the buffer zone, the second control system corresponding to the first process determines whether the substrate can be produced across machines; If the substrate can be produced across machines, the second control system corresponding to the first process generates a cross-line detection request and sends it to the first control system; The first control system obtains the preset cross-line permission mark and the preset substrate sampling strategy corresponding to the substrate according to the cross-line detection request; The first control system updates the preset cross-line permission flag according to the preset substrate sampling strategy.

5. The substrate cross-machine production method according to claim 4, characterized in that: The preset substrate sampling strategy includes the sampling frequency and sampling type corresponding to the substrate; the substrate is placed in a preset cassette, and multiple substrates are stored in the cassette at the same time; The first control system updates the preset cross-line permission flag according to the preset substrate sampling inspection strategy, including: Determining whether the substrate is sampled according to the sampling frequency; If the substrate is sampled, the sampled substrate is taken as the target substrate, and the cassette where the target substrate is located is taken as the target cassette; Updating the preset cross-line permission flag corresponding to the target substrate as a second parameter; Updating the sampling type parameter corresponding to the target substrate to the first sampling type parameter; Updating the preset cross-line permission flags corresponding to all substrates in the target cassette except the target substrate as the second parameter; The sampling type parameters corresponding to all the substrates in the target cassette except the target substrate are updated to second sampling type parameters.

6. The substrate cross-machine production method according to claim 5, characterized in that: The method further comprises: If the substrate has not been sampled, updating the preset cross-line permission flag corresponding to the substrate to a third parameter; The sampling inspection type parameter corresponding to the substrate is updated to the second sampling inspection type parameter.

7. The substrate cross-machine production method according to claim 6, characterized in that: After the first control system acquires the preset cross-line permission mark corresponding to the substrate, the method further includes: If the preset cross-line permission identifier corresponding to the substrate is the second parameter, the sampling type parameter corresponding to the substrate is directly updated to the second sampling type parameter.

8. The substrate cross-machine production method according to claim 4, characterized in that: After the substrate completes the first process and before determining whether the first process machine is in a cross-machine mode, the method further includes: Sending a preset machine access request to the first control system; The first control system acquires, according to the on-machine request, material information corresponding to the substrate and target process information of a next process associated with the first process; The second control system acquires the material information corresponding to the substrate and the target process information; The second control system determines whether the process information of the second process matches the target process information according to the process information.

9. The substrate cross-machine production method according to claim 8, characterized in that: The method further comprises: When the substrate is taped out on the first process machine, it is determined whether the machine parameters of the second process machine are successfully set.

10. A display panel production line, characterized in that: The display panel production line includes a first process machine for completing a first process in the display panel production process, a second process machine for completing a second process, and a transition machine connecting the first process machine and the second process machine for not completing a process, wherein the first process is before the second process, and the display panel production line is used to implement the steps in the substrate cross-machine production method as described in claims 1-9.

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