A PECVD reaction chamber electrode rod

Abstract

The present invention discloses an electrode rod for a PECVD reaction chamber, comprising a wiring rod, a connecting rod, an inner insulating seat, an outer insulating seat, a locking cylinder, a pressing assembly, and an electrode flange. The inner insulating seat and the outer insulating seat are sleeved on the connecting rod, and the outer locking cylinder is sleeved on the wiring rod and the outer insulating seat. The locking cylinder abuts against the outer side of a collar, and the other end of the locking cylinder is pressed against the outer insulating seat by the pressing assembly. One end of the connecting rod is provided with a first limiting groove connected to a threaded hole, and a limiting plate is provided in the first limiting groove. One end of the wiring rod is provided with a second limiting groove. When one end of the wiring rod is threadedly connected to the threaded hole of the connecting rod, the limiting plate is clamped in the first and second limiting grooves to limit axial movement between the wiring rod and the connecting rod. The locking cylinder has a square hole in the middle, and the wiring rod is provided with a square shaft shoulder on one side of the collar. The shaft shoulder is inserted into the square hole of the locking cylinder. The present invention has the advantages of simple structure, easy modification, and reliable connection.

Description

Technical Field

[0001] The present invention mainly relates to the technical field of PECVD equipment, and in particular to an electrode rod for a PECVD reaction chamber. Background Art

[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) is a process used to deposit passivation films on cell surfaces. To improve the physical and optical properties of these films, an electric field must be introduced into the graphite boat. Therefore, the electrode rod, a key component of the PECVD reaction chamber, plays a crucial role in the process.

[0003] The electrode rod structure of the PECVD reaction chamber currently designed by the applicant of this patent is as follows Figure 1 As shown, it specifically includes the following components: a connection rod 1, a protective cover 2, screws 3, a compression sleeve 4, an inner insulating seat 5, an insulating cap 6, a nut 7, a locking cylinder 8, an outer insulating seat 9, an electrode flange 10, an electrode head connecting rod 11, and sealing rings of various sizes. During installation, first connect the connection rod 1 to the electrode head connecting rod 11; then, install the sealing ring, outer insulating seat 9, sealing ring, inner insulating seat 5, sealing ring, electrode flange 10, and locking cylinder 8 in sequence; after installing the compression sleeve 4, secure it to the electrode flange 10 with screws 3, then install the two nuts 7 onto the connection rod; finally, install the protective cover 2 and insulating cap 6 onto the connection rod 1 in sequence.

[0004] From the application of the above structure, it has the following disadvantages and shortcomings: during the PECVD equipment process, the temperature inside the reaction chamber reaches above 600°. Due to the influence of thermal expansion and contraction, the electrode rod nut 7 is very easy to loosen, causing the connecting rod 1 to rotate radially, posing a hidden danger of poor contact of the electrode rod, which seriously affects the PECVD process results. Summary of the Invention

[0005] The technical problem to be solved by the present invention is: in response to the technical problems existing in the prior art, the present invention provides a PECVD reaction chamber electrode rod with reliable connection and improved discharge reliability.

[0006] In order to solve the above technical problems, the technical solution proposed by the present invention is:

[0007] A PECVD reaction chamber electrode rod, comprising a wiring rod, a connecting rod, an inner insulating seat, an outer insulating seat, a locking cylinder, a pressing assembly and an electrode flange; one end of the wiring rod is threadedly connected to one end of the wiring rod, the inner insulating seat is sleeved on the connecting rod, the outer insulating seat is sleeved on the connecting rod between the shaft ring on the wiring rod and the inner insulating seat, the locking cylinder is sleeved on the wiring rod and the outer insulating seat, the inner side of one end of the locking cylinder is abutted against the outer side of the shaft ring on the wiring rod, and the other end of the locking cylinder is pressed against the outer insulating seat by the pressing assembly. On the edge seat, one end of the connecting rod is provided with a first limit groove connected to the threaded hole, and a limit plate is provided in the first limit groove. One end of the connecting rod is provided with a second limit groove. When one end of the connecting rod is threadedly connected to the threaded hole of the connecting rod, the limit plate is clamped in the first limit groove and the second limit groove to limit the axial movement between the connecting rod and the connecting rod; the middle of the locking cylinder is a square hole, and the connecting rod is provided with a square shaft shoulder on one side of the shaft ring, and the shaft shoulder is passed through the square hole of the locking cylinder.

[0008] As a further improvement of the above technical solution:

[0009] One end of the outer insulating seat is against the inner side of the shaft ring, and the annular stop portion at the other end of the outer insulating seat is against the annular stop portion at one end of the inner insulating seat. The annular stops of the outer insulating seat and the inner insulating seat are both located between the locking tube and the electrode flange, and the other end of the inner insulating seat passes through the flange hole of the electrode flange.

[0010] The other end of the locking cylinder is provided with an annular stopper, and the inner side of the annular stopper of the locking cylinder abuts against the annular stopper of the outer insulating seat.

[0011] The clamping assembly includes an annular clamping sleeve and a screw. The cross-section of the clamping sleeve is L-shaped. One side of the clamping sleeve abuts against the outer side of the annular stop portion of the locking cylinder. The screw passes through one side of the clamping sleeve and is threadedly connected to the electrode flange.

[0012] A plurality of notches are provided in the circumferential direction of the annular retaining portion of the locking cylinder, each notch corresponds to a screw one by one, and the screw is located in the notch.

[0013] The limiting plate is in an arch shape.

[0014] The second limiting groove is an annular groove.

[0015] A first sealing member is provided between the outer insulating seat and the shaft collar.

[0016] A second sealing member is provided between the annular retaining portion of the inner insulating seat and the electrode flange.

[0017] A third sealing member is provided between the annular stop portion of the outer insulating seat, the annular stop portion of the inner insulating seat and the connecting rod.

[0018] Compared with the prior art, the advantages of the present invention are:

[0019] The electrode rod of the PECVD reaction chamber of the present invention is clamped in the first limiting groove of the connecting rod and the second limiting groove of the wiring rod through a limiting plate, thereby limiting the axial movement between the wiring rod and the connecting rod. On this basis, the square shoulder of the wiring rod is radially limited by the square hole of the locking cylinder; through the above-mentioned axial limitation and radial limitation, the reliability of the connection between the wiring rod and the connecting rod is ensured, the wiring rod and the connecting rod are prevented from loosening, and the discharge reliability of the electrode rod is improved.

[0020] The present invention provides a plurality of notches in the circumferential direction of the annular retaining portion of the locking cylinder, each notch corresponding to a screw one-to-one, and the screw is located in the notch, further realizing the radial limitation of the locking cylinder; therefore, through the cooperation between the above-mentioned clamping assembly and the notch, on the one hand, the connecting rod can be limited in the axial direction, and on the other hand, its radial limitation can also be realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a cross-sectional view of the electrode rod structure in the prior art.

[0022] Figure 2 This is a cross-sectional view of an electrode rod according to an embodiment of the present invention.

[0023] Figure 3 for Figure 2 AA view of the .

[0024] Figure 4 for Figure 3 A partial view of the .

[0025] Figure 5 Schematic diagram of the structure of the connecting rod in an embodiment of the present invention.

[0026] Figure 6 It is a structural diagram of the limiting plate in an embodiment of the present invention.

[0027] Figure 7 Schematic diagram of the structure of the locking cylinder in an embodiment of the present invention.

[0028] Figure 8 Schematic diagram of the structure of the connection rod in the embodiment of the present invention.

[0029] Legend: 1. Wiring rod; 101. Second limiting groove; 102. Shaft collar; 103. Shaft shoulder; 2. Protective cover; 3. Screw; 4. Compression sleeve; 5. Inner insulating seat; 6. Insulating cap; 7. Nut; 8. Locking cylinder; 801. Square hole; 802. Notch; 9. Outer insulating seat; 10. Electrode flange; 11. Connecting rod; 1101. First limiting groove; 12. Limiting plate; 13. First seal; 14. Second seal; 15. Third seal. DETAILED DESCRIPTION

[0030] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0031] like Figure 2 As shown, the electrode rod of the PECVD reaction chamber of the embodiment of the present invention includes a wiring rod 1, a connecting rod 11, an inner insulating seat 5, an outer insulating seat 9, a locking cylinder 8, a pressing assembly and an electrode flange 10; one end of the wiring rod 1 is threadedly connected to one end of the wiring rod 1, and the other end of the wiring rod 1 is provided with an insulating cap 6; wherein the inner insulating seat 5 is sleeved on the connecting rod 11, and the outer insulating seat 9 is sleeved on the connecting rod 11 between the shaft ring 102 on the wiring rod 1 and the inner insulating seat 5, that is, one end of the outer insulating seat 9 is against the inner side of the shaft ring 102, and the other end of the outer insulating seat 9 is against one end of the inner insulating seat 5, and the other end of the inner insulating seat 5 passes through the flange hole of the electrode flange 10; one end of the connecting rod 11 is provided with a first limiting groove 1101 (as shown in FIG. 1 ) which is connected to the threaded hole. Figure 5 As shown), a limiting plate 12 is provided in the first limiting groove 1101, and a second limiting groove 101 is provided at one end of the connecting rod 1 (as shown Figure 8 As shown), when one end of the connecting rod 1 is threadedly connected to the threaded hole of the connecting rod 11, the limiting plate 12 is clamped in the first limiting groove 1101 and the second limiting groove 101 to limit the axial movement between the connecting rod 1 and the connecting rod 11; the locking cylinder 8 is sleeved on the connecting rod 1 and the outer insulating seat 9, and the inner side of one end of the locking cylinder 8 is abutted against the outer side of the shaft ring 102 on the connecting rod 1, and the other end of the locking cylinder 8 is pressed on the outer insulating seat 9 through the pressing assembly, thereby pressing the outer insulating seat 9 and the inner insulating seat 5 onto the electrode flange 10; wherein the middle of the locking cylinder 8 is a square hole 801 (as shown Figure 7 As shown), the connecting rod 1 is provided with a square shoulder 103 (as shown) on one side of the collar 102. Figure 8 As shown), the square shoulder 103 is inserted into the square hole 801 of the locking cylinder 8.

[0032] The electrode rod of the PECVD reaction chamber of the present invention is clamped in the first limiting groove 1101 of the connecting rod 11 and the second limiting groove 101 of the wiring rod 1 through the limiting plate 12, thereby limiting the axial movement between the wiring rod 1 and the connecting rod 11. On this basis, the square shoulder 103 of the wiring rod 1 is radially limited by the square hole 801 of the locking cylinder 8; through the above-mentioned axial limitation and radial limitation, the reliability of the connection between the wiring rod 1 and the connecting rod 11 is ensured, the wiring rod 1 and the connecting rod 11 are prevented from loosening, and the discharge reliability of the electrode rod is improved.

[0033] In a specific embodiment, the annular stop at the other end of the outer insulating seat 9 abuts against the annular stop at one end of the inner insulating seat 5, and the annular stops of the outer insulating seat 9 and the inner insulating seat 5 are both located between the locking cylinder 8 and the electrode flange 10. The other end of the locking cylinder 8 is provided with an annular stop, and the inner side of the annular stop of the locking cylinder 8 abuts against the annular stop of the outer insulating seat 9. The annular stops of the locking cylinder 8, the outer insulating seat 9 and the inner insulating seat 5 are pressed against the electrode flange 10 by a clamping assembly. Specifically, the clamping assembly includes an annular clamping sleeve 4 and a screw 3 (or bolt, etc.). The cross-section of the clamping sleeve 4 is L-shaped, and one side of the clamping sleeve 4 abuts against the outer side of the annular stop of the locking cylinder 8. The screw 3 passes through one side of the clamping sleeve 4 and is threadedly connected to the electrode flange 10, thereby clamping the locking cylinder 8, the outer insulating seat 9 and the inner insulating seat 5 on the electrode flange 10. The above-mentioned clamping assembly has a simple structure and is easy to install.

[0034] Furthermore, a plurality of notches 802 (e.g., four notches, e.g., Figure 7 As shown in FIG. 8 , each notch 802 corresponds to a screw 3 (or bolt), and the screw 3 is located within the notch 802, further limiting the radial position of the locking cylinder 8. Therefore, the above-mentioned compression assembly and the notch 802 cooperate to limit the position of the connecting rod 1 in the axial direction and in the radial direction.

[0035] In a specific embodiment, the limiting plate 12 is in the shape of an arc (smaller than a semicircle), the first limiting groove 1101 is in the corresponding arc shape, and the second limiting groove 101 is an annular groove. The axial movement between the connecting rod 1 and the connecting rod 11 is limited by the arc-shaped limiting plate 12 located in the first limiting groove 1101 and the second limiting groove 101. Of course, in other embodiments, the second limiting groove 101 on the connecting rod 11 can also be set to an arc shape, and the position of the arc-shaped second limiting groove 101 corresponds to the position of the first limiting groove 1101, so that when the arc-shaped limiting plate 12 is located in the first limiting groove 1101 and the second limiting groove 101, it can not only achieve axial limitation between the connecting rod 1 and the connecting rod 11, but also limit the radial direction between the connecting rod 1 and the connecting rod 11, thereby ensuring the reliability of the connection.

[0036] In a specific embodiment, a first seal 13 is provided between the outer insulating seat 9 and the collar 102, a second seal 14 is provided between the annular retaining portion of the inner insulating seat 5 and the electrode flange 10, and a third seal 15 is provided between the annular retaining portion of the outer insulating seat 9, the annular retaining portion of the inner insulating seat 5, and the connecting rod 11. The sealing of each seal ensures a sealed connection between the various components.

[0037] After the connecting rod 1 of the present invention is threadedly connected to the connecting rod 11, it is axially restrained by a stopper plate 12. The square shoulder 103 of the connecting rod 1 is then inserted through the square hole 801 of the locking cylinder 8, where it is compressed by the compression sleeve 4. The screw 3 securing the compression sleeve 4 is then inserted through the notch 802 in the locking cylinder 8 to secure the locking cylinder 8. In the present invention, except for the connecting rod 1, locking cylinder 8, connecting rod 11, and stopper plate 12, all other components are identical to those in existing solutions, and the assembly method is consistent with existing electrode rod assembly methods. For existing PECVD reactor electrode rods, each component can be directly replaced, ensuring ease of replacement and modification.

[0038] As shown in this disclosure and the claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not specifically refer to the singular, but also include the plural. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0039] The above are merely preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions based on the principles of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, various improvements and modifications that do not depart from the principles of the present invention should be considered within the scope of protection of the present invention.

Claims

1. A PECVD reaction chamber electrode rod, characterized in that: The invention comprises a connecting rod (1), a connecting rod (11), an inner insulating seat (5), an outer insulating seat (9), a locking cylinder (8), a pressing assembly and an electrode flange (10); one end of the connecting rod (1) is threadedly connected to one end of the connecting rod (1); the inner insulating seat (5) is sleeved on the connecting rod (11); the outer insulating seat (9) is sleeved on the connecting rod (11) between the shaft ring (102) on the connecting rod (1) and the inner insulating seat (5); the locking cylinder (8) is sleeved on the connecting rod (1) and the outer insulating seat (9); the inner side of one end of the locking cylinder (8) is abutted against the outer side of the shaft ring (102) on the connecting rod (1); the other end of the locking cylinder (8) is pressed on the outer insulating seat (9) through the pressing assembly; the connecting rod (11) is A first limiting groove (1101) connected to the threaded hole is provided at one end, a limiting plate (12) is provided in the first limiting groove (1101), and a second limiting groove (101) is provided at one end of the connecting rod (1). When one end of the connecting rod (1) is threadedly connected to the threaded hole of the connecting rod (11), the limiting plate (12) is clamped in the first limiting groove (1101) and the second limiting groove (101) to limit the axial movement between the connecting rod (1) and the connecting rod (11); the middle of the locking cylinder (8) is a square hole (801), and the connecting rod (1) is provided with a square shaft shoulder (103) on one side of the shaft ring (102), and the shaft shoulder (103) is passed through the square hole (801) of the locking cylinder (8); The second limiting groove (101) is an annular groove; A first sealing member (13) is provided between the outer insulating seat (9) and the shaft ring (102).

2. The PECVD reaction chamber electrode rod according to claim 1, characterized in that: One end of the outer insulating seat (9) abuts against the inner side of the shaft ring (102), and the annular retaining portion at the other end of the outer insulating seat (9) abuts against the annular retaining portion at one end of the inner insulating seat (5). The annular retaining portions of the outer insulating seat (9) and the inner insulating seat (5) are both located between the locking cylinder (8) and the electrode flange (10), and the other end of the inner insulating seat (5) passes through the flange hole of the electrode flange (10).

3. The PECVD reaction chamber electrode rod according to claim 2, characterized in that: The other end of the locking cylinder (8) is provided with an annular stop portion, and the inner side of the annular stop portion of the locking cylinder (8) abuts against the annular stop portion of the outer insulating seat (9).

4. The PECVD reaction chamber electrode rod according to claim 3, characterized in that: The clamping assembly includes an annular clamping sleeve (4) and a screw (3). The cross section of the clamping sleeve (4) is L-shaped. One side of the clamping sleeve (4) abuts against the outer side of the annular retaining portion of the locking cylinder (8). The screw (3) passes through one side of the clamping sleeve (4) and is threadedly connected to the electrode flange (10).

5. The PECVD reaction chamber electrode rod according to claim 4, characterized in that: A plurality of notches (802) are provided in the circumferential direction of the annular retaining portion of the locking cylinder (8), each notch (802) corresponds to a screw (3) one by one, and the screw (3) is located in the notch (802).

6. The PECVD reaction chamber electrode rod according to any one of claims 1 to 5, characterized in that: The limiting plate (12) is in the shape of an arch.

7. The PECVD reaction chamber electrode rod according to any one of claims 2 to 5, characterized in that: A second sealing member (14) is provided between the annular retaining portion of the inner insulating seat (5) and the electrode flange (10).

8. The PECVD reaction chamber electrode rod according to any one of claims 2 to 5, characterized in that: A third sealing member (15) is provided between the annular stop portion of the outer insulating seat (9), the annular stop portion of the inner insulating seat (5), and the connecting rod (11).

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