Micromechanical component for a rotational speed sensor and method for manufacturing the same, rotational speed sensor

Abstract

A micromechanical component for a speed sensor has two rotor masses (12a, 12b) that are mirror-symmetric about a first plane of symmetry (14) oriented perpendicular to a substrate surface (10) and intersecting these rotor masses at the center, and can be placed in a torsional vibration motion (16a, 16b) about a rotation axis (18a, 18b) oriented perpendicular to the substrate surface, and four vibrating masses (22a, 22b, 24a and 24b) that are mirror-symmetric about the first plane of symmetry and can be deflected by means of the rotor masses parallel to the first plane of symmetry. The first rotor mass (12a) and the first pair of vibrating masses (22a, 22b) attached to the first rotor mass are mirror-symmetric about a second plane of symmetry (26) oriented perpendicular to the substrate surface and the first plane of symmetry, and the second rotor mass (12b) and the second pair of vibrating masses (24a, 24b) attached to the second rotor mass are mirror-symmetric about the second rotor mass (12b) and the second pair of vibrating masses (24a, 24b) attached to the second rotor mass.

Description

Technical Field

[0001] This invention relates to a micromechanical component for a speed sensor and a speed sensor itself. The invention also relates to a method for manufacturing the micromechanical component for a speed sensor. Background Technology

[0002] DE 10 2017 216 010 A1 discloses a micromechanical speed sensor device having two rotor masses that can be placed in torsional vibration motion via a drive frame device. Furthermore, four vibrating masses can be placed in harmonic vibration motion via the drive frame device. The two rotor masses and four vibrating masses are mirror-symmetric about a plane of symmetry intersecting the rotor masses at their center. Summary of the Invention

[0003] The present invention provides a micromechanical component for a speed sensor according to the present invention, a speed sensor according to the present invention, and a method for manufacturing the micromechanical component for a speed sensor according to the present invention.

[0004] Advantages of the present invention

[0005] This invention proposes a micromechanical component that can be advantageously used as at least part of a speed sensor, particularly a 3-axis speed sensor. Based on the micromechanical component according to the invention being constructed / arranged not only mirror-symmetrically with respect to a first plane of symmetry intersecting the two rotor masses at their centers but also mirror-symmetrically with respect to a second plane of symmetry oriented perpendicular to the first plane of symmetry, the speed sensor implemented by the corresponding micromechanical component is relatively insensitive to external linear and rotational accelerations. The sensor design of the corresponding micromechanical component according to the invention is relatively "starr-free" particularly for modes / interference modes excited by the external linear and rotational accelerations of the micromechanical component, thus, in response to external linear and rotational accelerations, the two rotor masses and four vibrational masses of the corresponding micromechanical component perform at most a small amount of movement. This helps improve the measurement accuracy of the speed sensor implemented by the corresponding micromechanical component according to the invention and helps avoid erroneous measurements by the corresponding speed sensor.

[0006] Another advantage of the micromechanical component according to the invention is its relatively low vibration sensitivity, even at higher frequencies. Nevertheless, the sensor design of the corresponding micromechanical component requires only a relatively small mounting space, thus enabling the miniaturization of speed sensors as well. Based on the relatively low vibration sensitivity and relatively small mounting space requirement of the corresponding micromechanical component according to the invention, the invention also facilitates the use of speed sensors implemented with this micromechanical component in a wider variety of ways.

[0007] In an advantageous embodiment of the micromechanical component, the two rotor masses and four vibrating masses are constructed and / or arranged such that the common center of gravity of the stationary first rotor mass, the stationary second rotor mass, the stationary first pair of vibrating masses, and the stationary second pair of vibrating masses lies in the intersection of the first and second planes of symmetry. This improves the robustness of the micromechanical component relative to disturbance modes that are excited by external linear and rotational accelerations.

[0008] Preferably, the two rotor masses and four vibrating masses are constructed and / or arranged such that even when the two rotor masses are positioned in their respective torsional vibrations, allowing the four vibrating masses to deflect parallel to the first plane of symmetry, the common center of gravity of the first rotor mass, the second rotor mass, the first pair of vibrating masses, and the second pair of vibrating masses remains located at the intersection of the first and second planes of symmetry. Therefore, in the embodiments of the micromechanical components described herein, conventional position reversal adjustment can be eliminated without any problems. This also eliminates the need for coupling between the two rotor masses and the four vibrating masses.

[0009] More preferably, the two rotor masses are constructed and / or arranged such that when the two rotor masses are subjected to their respective torsional vibrations, the vector sum of the first torque of the first torsional vibration of the first rotor mass and the second torque of the second torsional vibration of the second rotor mass is equal to zero. This also prevents the torque of one of the two rotor masses from undesirably coupling into the sensor design of the corresponding micromechanical component, even when the two rotor masses are subjected to their respective torsional vibrations.

[0010] In another advantageous embodiment of the micromechanical component, the two rotor masses are constructed and / or arranged such that the two rotor masses, placed in their respective torsional vibrations, can tilt about a rotational axis located in a first plane of symmetry and about an additional rotational axis oriented perpendicular to the first plane of symmetry. Therefore, the two rotor masses can be used not only to detect the first rotational motion of the corresponding micromechanical component about a first axis located in the first plane of symmetry and oriented parallel to the substrate surface, but also to detect the second rotational motion of the corresponding micromechanical component about a second axis located in a second plane of symmetry and oriented parallel to the substrate surface.

[0011] Each of the two rotor masses can be attached, in particular, to a first rocker structure (Wippenstruktur) oriented parallel to the first plane of symmetry via a first spring, and to a second rocker structure oriented parallel to the first plane of symmetry via a second spring. As explained more precisely below, unwanted movements of the two rotor masses can be specifically suppressed by means of at least one rocker structure. Thus, at least one rocker structure advantageously resists the occurrence of unwanted disturbance modes.

[0012] In another advantageous embodiment of the micromechanical component, the four vibrating masses are constructed and / or arranged such that, by means of two rotor masses placed in their respective torsional vibrational motions, the first vibrating mass in the first pair can be placed in a first harmonic vibrational motion oriented parallel to the first plane of symmetry; the second vibrating mass in the first pair can be placed in a second harmonic vibrational motion oriented parallel to the first plane of symmetry; the first vibrating mass in the second pair, mirror-symmetric to the first vibrating mass in the first pair about the second plane of symmetry, can be placed in the second harmonic vibrational motion; and the second vibrating mass in the second pair, mirror-symmetric to the second vibrating mass in the first pair about the second plane of symmetry, can be placed in the first harmonic vibrational motion, wherein the first harmonic vibrational motion is phase-shifted by 180° relative to the second harmonic vibrational motion. Therefore, the vector sum of the pulses of the harmonic vibrational motions of the four vibrating masses is zero, thus eliminating concerns about one pulse of a vibrating mass undesirably coupling into the sensor design of the corresponding micromechanical component.

[0013] Preferably, the four vibrating masses are constructed and / or arranged such that the four vibrating masses, placed in their respective harmonic vibrational motions, can additionally be adjusted parallel to the second plane of symmetry. As explained more precisely below, in this case, the four vibrating masses can be used to detect the (additional) third rotational motion of the respective micromechanical components about a third axis oriented perpendicular to the substrate surface.

[0014] The aforementioned advantages are also ensured in speed sensors with such micromechanical components. Specifically, the speed sensor can be, in particular, a triaxial speed sensor. In this case, a triaxial speed sensor should be understood as being able to detect not only the first rotational motion of the speed sensor about a first axis oriented in a first plane of symmetry and parallel to the substrate surface using two rotor masses, and the second rotational motion of the speed sensor about a second axis oriented in a second plane of symmetry and parallel to the substrate surface using two rotor masses, but also the third rotational motion of the speed sensor about a third axis oriented perpendicular to the substrate surface using four vibrating masses. In this case, detecting the corresponding rotational motion can be understood not only as proving the corresponding rotational motion, but also as measuring physical parameters reflecting the corresponding rotational motion, such as rotational rate, rotational speed, and / or angular velocity.

[0015] Furthermore, the aforementioned advantages are also achieved by implementing a corresponding manufacturing method for a micromechanical component used in a speed sensor, wherein the manufacturing method can be extended based on the above-described embodiment of the micromechanical component. Attached Figure Description

[0016] Further features and advantages of the invention are described below with reference to the accompanying drawings. The drawings show:

[0017] Figure 1 : A schematic diagram of the first embodiment of the micromechanical component;

[0018] Figure 2 A partial schematic diagram of the second embodiment of the micromechanical component;

[0019] Figure 3 : A schematic diagram of the third embodiment of the micromechanical component;

[0020] Figure 4 : A schematic diagram of the fourth embodiment of the micromechanical component;

[0021] Figure 5 : A schematic diagram of the fifth embodiment of the micromechanical component; and

[0022] Figure 6 : A flowchart illustrating one embodiment of a method for manufacturing a micromechanical component for a speed sensor. Detailed Implementation

[0023] Figure 1 A schematic diagram showing a first embodiment of the micromechanical component is provided.

[0024] exist Figure 1 The micromechanical component schematically shown has a substrate with a substrate surface 10. This substrate may be, for example, a semiconductor substrate, especially a silicon substrate.

[0025] The micromechanical component also has a one-piece first rotor mass 12a and a one-piece second rotor mass 12b. The one-piece construction of the first / second rotor mass 12a or 12b should be understood as the corresponding first / second rotor mass 12a or 12b being implemented as a continuous and compact part. The first rotor mass 12a and the second rotor mass 12b are oriented relative to the substrate surface 10 and are mirror-symmetric about a first plane of symmetry 14 that intersects the first rotor mass 12a and the second rotor mass 12b at their center. Furthermore, the first rotor mass 12a and the second rotor mass 12b are constructed / arranged such that the first rotor mass 12a can be placed in a first torsional vibration motion 16a about a first rotation axis 18a oriented perpendicular to the substrate surface 10, and the second rotor mass 12b can be placed in a second torsional vibration motion 16b about a second rotation axis 18b oriented parallel to the first rotation axis 18a, wherein the second torsional vibration motion 16b is phase-shifted by 180° relative to the first torsional vibration motion 16a.

[0026] By way of example only, in the embodiment of the micromechanical component described herein, each of the two rotor masses 12a and 12b has an internal groove through which the rotation axis 18a or 18b of the corresponding rotor mass 12a or 12b extends, wherein each internal groove is defined by the inner edge of the corresponding rotor mass 12a or 12b. Exemplarily, each of the two rotor masses 12a and 12b is further attached to / into the micromechanical component by at least one rotor mass attachment spring 20, which extends from the inner edge of the corresponding rotor mass 12a or 12b to an anchoring region fixed on the substrate surface 10.

[0027] Furthermore, the micromechanical component includes a first pair of vibrating masses 22a and 22b and a second pair of vibrating masses 24a and 24b, which are mirror-symmetric about a first plane of symmetry 14. The four vibrating masses 22a, 22b, 24a, and 24b can be additionally constructed / arranged such that they can be deflected parallel to the first plane of symmetry 14 by means of two rotor masses 12a and 12b placed in their respective torsional vibration movements 16a or 16b. For this purpose, the first pair of vibrating masses 22a and 22b are (indirectly) attached to the first rotor mass 12a, while the second pair of vibrating masses 24a and 24b are (indirectly) attached to the second rotor mass 12b. Each of the four vibrating masses 22a, 22b, 24a and 24b can be attached to / into the micromechanical component, for example, by at least one (not shown) mass attachment spring, which extends in particular from the corresponding vibrating mass 22a, 22b, 24a or 24b to an anchoring region fixed on the substrate surface 10.

[0028] Furthermore, the first rotor mass 12a and the first pair of vibrating masses 22a and 22b are mirror-symmetric about the second symmetry plane 26 with respect to the second rotor mass 12b and the second pair of vibrating masses 24a and 24b, which is oriented perpendicular to the substrate surface 10 and perpendicular to the first symmetry plane 14. Since the two rotor masses 12a and 12b and the four vibrating masses 22a, 22b, 24a and 24b are mirror-symmetric not only about the first symmetry plane 14 but also about the second symmetry plane 26, the external linear acceleration and rotational acceleration affect all these sensor elements 12a, 12b, 22a, 22b, 24a and 24b so “equally” that “faulty motion” of the sensor elements 12a, 12b, 22a, 22b, 24a and 24b attributable to external linear acceleration and rotational acceleration can be reliably identified. Therefore, sensor elements 12a, 12b, 22a, 22b, 24a, and 24b can be advantageously used to detect the rotational motion of micromechanical components, especially the three-dimensional rotational motion of micromechanical components, without external linear acceleration and rotational acceleration causing erroneous signals during detection. Another advantage of sensor elements 12a, 12b, 22a, 22b, 24a, and 24b being mirror-symmetric not only about the first symmetry plane 14 but also about the second symmetry plane 26 is that the space requirement generated in this way is reduced, which facilitates meeting the installation space requirements using micromechanical components.

[0029] In the embodiment described herein, the two rotor masses 12a and 12b and the four vibrating masses 22a, 22b, 24a and 24b are additionally constructed / arranged such that the common center of gravity S of the non-moving first rotor mass 12a, the non-moving second rotor mass 12b, the non-moving first pair of vibrating masses 22a and 22b, and the non-moving second pair of vibrating masses 24a and 24b lies in the intersection of the first plane of symmetry 14 and the second plane of symmetry 26. This additionally contributes to improving the robustness of the micromechanical components described herein relative to external linear and rotational accelerations.

[0030] Furthermore, the arrangement / construction of the two rotor masses 12a and 12b of the micromechanical component described herein ensures that, even if the two rotor masses 12a and 12b are placed in their respective torsional vibration movements 16a or 16b, the vector sum of the first torque of the first torsional vibration movement 16a of the first rotor mass 12a and the second torque of the second torsional vibration movement 16b of the second rotor mass 12b is (almost always) equal to zero. Therefore, even if the two rotor masses 12a and 12b are placed in their respective torsional vibration movements 16a or 16b, there is no need to worry about the undesirable coupling of one of the torques of one of the two rotor masses 12a and 12b.

[0031] Furthermore, each of the two rotor masses 12a and 12b is constructed / arranged such that the two rotor masses 12a and 12b, placed in their respective torsional vibration motions 16a or 16b, can respectively tilt about a first rotation axis (not shown) oriented in the first plane of symmetry 14 (and preferably parallel to the substrate surface 10) and about a second rotation axis (not shown) oriented perpendicular to the first plane of symmetry 14 (and preferably parallel to the substrate surface 10). Therefore, when the micromechanical component performs a first rotational motion about a first axis A1 oriented in the first plane of symmetry 14 and parallel to the substrate surface 10, the Coriolis force causes a first tilting motion of the two rotor masses 12a and 12b placed in their respective torsional vibration motions 16a or 16b about their respective first rotation axes, wherein, due to the 180° phase angle between the first torsional vibration motion 16a and the second torsional vibration motion 16b, the first tilting motion of the two rotor masses 12a and 12b is mirror-symmetric about the second plane of symmetry 26. The mirror-symmetric motion of the two rotor masses 12a and 12b about the second plane of symmetry 26 is not triggered by external linear acceleration and rotational acceleration.

[0032] Each of the two rotor masses 12a and 12b can be associated with a first pair of sensor electrodes 28a and 28b, which extend along a first plane of symmetry 14 adjacent to the associated rotor mass 12a or 12b, respectively, wherein each of the sensor electrodes 28a and 28b forms a capacitor with the associated rotor mass 12a or 12b. For example, the sensor electrodes 28a and 28b can be fixed on the substrate surface 10. During differential analysis processing of the signals obtained by means of the sensor electrodes 28a and 28b, the mirror symmetry of the first tilting motion of the two rotor masses 12a and 12b about the second plane of symmetry 26 causes amplification of the signal triggered by the first rotational motion of the micromechanical component about the first axis A1, and the differential analysis process automatically corrects / "filters out" erroneous signals of the sensor electrodes 28a and 28b that can be attributed to the external linear acceleration and rotational acceleration of the micromechanical component. Therefore, the first rotational motion of the micromechanical component about the first axis A1 can be reliably detected by means of the two rotor masses 12a and 12b.

[0033] Accordingly, when the micromechanical component performs a second rotational motion about a second axis A2 located within the second symmetry plane 26 and oriented parallel to the substrate surface 10, the Coriolis force causes a second tilting motion of the rotor masses 12a and 12b placed in their respective torsional vibration motions 16a or 16b. Due to the 180° phase angle between the first torsional vibration motion 16a and the second torsional vibration motion 16b, the second tilting motions of the two rotor masses 12a and 12b are symmetrical about the center of gravity S. This symmetrical motion of the two rotor masses 12a and 12b about the center of gravity S is not triggered by external linear velocity and rotational acceleration.

[0034] Therefore, each of the two rotor masses 12a and 12b can also be equipped with a second pair of sensor electrodes 30a and 30b, which extend adjacent to the assigned rotor mass 12a or 12b along lines oriented parallel to the second plane of symmetry 26, wherein each of the sensor electrodes 30a and 30b forms a capacitor with the assigned rotor mass 12a or 12b. The sensor electrodes 30a and 30b can also be fixed to the substrate surface 10. During differential analysis processing of the signals obtained by means of the sensor electrodes 30a and 30b, the point symmetry of the second tilting motion of the two rotor masses 12a and 12b about the center of gravity S causes an amplification of the signal attributable to the second rotational motion of the micromechanical component about the second axis A2, while the differential analysis automatically corrects / "filters out" erroneous signals of the external linear acceleration and rotational acceleration of the micromechanical component based on the sensor electrodes 30a and 30b. Therefore, the second rotational motion of the micromechanical component around the second axis A2 can also be reliably detected by means of the two rotor masses 12a and 12b.

[0035] Therefore, the two rotor masses 12a and 12b can be referred to as a dual rotor, which can be advantageously used to perform vibration-resistant measurements against the first axis A1 and the second axis A2.

[0036] As an advantageous extension, the two rotor masses 12a and 12b are additionally coupled to each other by (optionally) an intermediate spring 36, which does not resist a first tilting motion of the two rotor masses 12a and 12b triggered by a first rotational motion of the micromechanical component about a first axis A1 and mirror-symmetric about a second plane of symmetry 26, but suppresses asymmetrical motion of the two rotor masses 12a and 12b about their first axis of rotation about the second plane of symmetry 26, which is conventionally triggered by external linear acceleration and rotational acceleration of the micromechanical component. Figure 1 In the example, the intermediate spring 36 is an O-type spring. An O-type spring should be understood as a type of spring having a beam-shaped first end section (attached to the first rotor mass 12a), a beam-shaped second end section (attached to the second rotor mass 12b), and an intermediate section located between the two end sections, wherein the intermediate section is formed by four beam-shaped spring sections in an O-shape or a rectangular shape. However, this configuration of the intermediate spring 36 should only be interpreted as exemplary.

[0037] As an additional (optional) extension, each of the two rotor masses 12a and 12b is further attached by a first spring 32a to a first rocker structure 34a oriented parallel to the first plane of symmetry 14, and by a second spring 32b to a second rocker structure 34b oriented parallel to the first plane of symmetry 14. Each of the rocker structures 34a and 34b is capable of tilting about a rocker axis located in the second plane of symmetry 26 (and preferably parallel to the substrate surface 10). Each of the rocker structures 34a and 34b can be attached to / into the micromechanical component, for example, by at least one rocker structure attachment spring 35, which extends from the corresponding rocker structure 34a or 34b to an anchoring region fixed on the substrate surface 10. The rocker structures 34a and 34b do not resist the second tilting motion of the two rotor masses 12a and 12b symmetrical about the center of gravity S. Instead, the mirror-symmetric motion of the two rotor masses 12a and 12b about their respective second rotation axes about the second plane of symmetry 26 is suppressed by the two rocker structures 34a and 34b.

[0038] The four vibrating masses 22a, 22b, 24a, and 24b are connected to their respective rotor masses 12a or 12b such that: by means of the two rotor masses 12a and 12b placed in their respective torsional vibration motions 16a or 16b, the first vibrating mass 22a in the first pair can be placed in / is placed in the first harmonic vibration motion 38a oriented parallel to the first plane of symmetry 14; the second vibrating mass 22b in the first pair can be placed in / is placed in the second harmonic vibration motion 38b oriented parallel to the first plane of symmetry 14; the first vibrating mass 24a in the second pair, which is mirror-symmetric to the first vibrating mass 22a in the first pair about the second plane of symmetry 26, can be placed in / is placed in the second harmonic vibration motion 38b; and the second vibrating mass 24b in the second pair, which is mirror-symmetric to the second vibrating mass 22b in the first pair about the second plane of symmetry 26, can be placed in / is placed in the first harmonic vibration motion 38a. The key advantage described herein, which uses two rotor masses 12a and 12b to excite harmonic vibrations of four vibrating masses 22a, 22b, 24a, and 24b, resulting in harmonic vibrations 38a and 38b, is that the first harmonic vibration 38a is phase-shifted by 180° relative to the second harmonic vibration 38b. Additionally, the four vibrating masses 22a, 22b, 24a, and 24b, placed within their respective harmonic vibrations 38a or 38b, can be deflected / adjusted parallel to the second plane of symmetry 26.

[0039] As the micromechanical component undergoes a third rotational motion about a third axis (not shown) oriented perpendicular to the substrate surface 10, the Coriolis force causes the four vibrating masses 22a, 22b, 24a, and 24b, placed in their respective harmonic vibrational motions 38a or 38b, to deflect parallel to the second plane of symmetry 26. The 180° phase angle between the first and second harmonic vibrational motions 38a and 38b causes a first adjustment motion 40a of the first vibrating mass 22a in the first pair and a second adjustment motion 40b of the second vibrating mass 24a in the second pair, pointing in the opposite direction to the first adjustment motion 40a. Therefore, the Coriolis-triggered adjustment motions 40a and 40b of the four vibrating masses 22a, 22b, 24a, and 24b are mirror-symmetric about the first plane of symmetry 14. The external linear acceleration and rotational acceleration of the micromechanical component do not trigger the mirror-symmetric adjustment movements 40a and 40b of the four vibrating masses 22a, 22b, 24a, and 24b about the first symmetry plane 14. Therefore, the third rotational motion of the micromechanical component about the third axis can also be reliably detected by means of the four vibrating masses 22a, 22b, 24a, and 24b.

[0040] Therefore, preferably, the vibrating masses 22a, 22b, 24a, and 24b are configured with (adjustable together) electrode elements 42, which each form a capacitor with a fixed electrode 44, which is, for example, fixed on the substrate surface 10. When differential analysis is performed on the signals obtained by means of the electrode elements 42 and the fixed electrodes 44, the mirror symmetry of the adjustment movements 40a and 40b of the four vibrating masses 22a, 22b, 24a, and 24b about the first symmetry plane 14 causes an amplification of the signal attributable to the third rotational motion of the micromechanical component about the third axis. This differential analysis automatically corrects / "filters out" erroneous signals from the electrode elements 42 and the fixed electrodes 44 based on the external linear acceleration and rotational acceleration of the micromechanical component.

[0041] exist Figure 1In this embodiment, the four vibrating masses 22a, 22b, 24a, and 24b are merely exemplary frame structures. Each of the four vibrating masses 22a, 22b, 24a, and 24b can be attached to an adjacent first or second rocker structure 34a or 34b, for example, via a spring element 46. Optionally, the two first vibrating masses 22a and 24a can each be attached to a first coupling rocker 50a via a spring element 48, and the two second vibrating masses 22b and 24b can each be attached to a second coupling rocker 50b via a spring element 48. More preferably, in this case, each of the two coupling rockers 50a and 50b is capable of tilting about a rocker axis that intersects centrally with the corresponding coupling rocker 50a or 50b and is oriented perpendicular to the substrate surface 10. In this case, the coupling rocker arm 50a or 50b does not resist the mirror-symmetric adjustment movements 40a and 40b of the four vibrating masses 22a, 22b, 24a and 24b about the first symmetry plane 14, while the asymmetrical movements of the first symmetry plane 14 relative to the first symmetry plane 14 are suppressed by the two coupling rocker arms 50a or 50b.

[0042] Figure 1 Another advantage of the micromechanical components is that even if the two rotor masses 12a and 12b are thus placed in their respective torsional vibrations 16a or 16b, such that the four vibrating masses 22a, 22b, 24a, and 24b can deflect / have deflected, especially deflected, into their respective harmonic vibrations 38a or 38b, parallel to the first plane of symmetry 14, the common center of gravity S still lies in the intersection of the first plane of symmetry 14 and the second plane of symmetry 26. Therefore, there is no need to worry about undesirable pulse coupling into the micromechanical components during the movement of the sensor elements 12a, 12b, 22a, 22b, 24a, and 24b.

[0043] Figure 2 A partial schematic diagram of a second embodiment of the micromechanical component is shown.

[0044] Figure 2 The micromechanical component differs from the previously described embodiment only in the shape of its intermediate spring 36. For example, Figure 2 The intermediate spring 36 has a first end section, a second end section and a beam-shaped intermediate section located between the two end sections. The first end section has a fork joint attached to the first rotor mass 12a, and the second end section has a fork joint attached to the second rotor mass 12b.

[0045] about Figure 2 Other features and advantages of micromechanical components (see reference) Figure 1 The implementation method.

[0046] Figure 3 A schematic diagram showing a third embodiment of the micromechanical component is shown.

[0047] As an extension to the previously described implementation, in Figure 3 The micromechanical component schematically shown also has a first pair of drive structures 52a and 52b and a second pair of drive structures 54a and 54b. The first drive structure 52a of the first pair is attached to the first rotor mass 12a via at least one first spring element 56a, while the second drive structure 52b of the first pair is attached to the first rotor mass 12a via at least one second spring element 56b. Correspondingly, the first drive structure 54a of the second pair, which is mirror-symmetrical with respect to the first drive structure 52a of the first pair about a second plane of symmetry 26, is attached to the second rotor mass 12b via at least one first spring element 58a, while the second drive structure 54b of the second pair, which is mirror-symmetrical with respect to the second drive structure 52b of the first pair about the second plane of symmetry 26, is attached to the second rotor mass 12b via at least one second spring element 58b.

[0048] The four driving structures 52a, 52b, 54a, and 54b are constructed / arranged such that the first driving structure 52a in the first pair can be placed in the first harmonic vibration motion 38a oriented parallel to the first symmetry plane 14; the second driving structure 52b in the first pair can be placed in the second harmonic vibration motion 38b oriented parallel to the first symmetry plane 14 and phase-shifted by 180° relative to the first harmonic vibration motion 38a; the first driving structure 54a in the second pair, phase-shifted by 180°, can be placed in the second harmonic vibration motion 38b; and the second driving structure 54b in the second pair can be placed in the first harmonic vibration motion 38a. Preferably, the four driving structures 52a, 52b, 54a, and 54b are each constructed with (not shown) electrode elements, which form capacitors with each (not shown) fixed electrode, for example, fixed on the substrate surface 10. Each of the four drive structures 52a, 52b, 54a and 54b can be, for example, a drive frame.

[0049] The harmonic vibrations 38a and 38b of the four drive structures 52a, 52b, 54a, and 54b cause torsional vibrations 16 or 16b of the two rotor masses 12a and 12b, and harmonic vibrations 38a or 38b of the attached vibrating masses 22a, 22b, 24a, and 24b. This is only an example; in... Figure 3In this embodiment, the first vibrating mass 22a of the first pair is (directly) attached to the side of the first drive structure 52a of the first pair pointing away from the first rotor mass 12a; the second vibrating mass 22b of the first pair is (directly) attached to the side of the second drive structure 52b of the first pair pointing away from the first rotor mass 12a; the first vibrating mass 24a of the second pair is (directly) attached to the side of the first drive structure 54a of the second pair pointing away from the second rotor mass 12b; and the second vibrating mass 24b of the second pair is (directly) attached to the side of the second drive structure 54b of the second pair pointing away from the second rotor mass 12b. This can be interpreted as the "external attachment" of drive structures 52a, 52b, 54a, and 54b to the two rotor masses 12a and 12b, and the "external attachment" of each vibrating mass 22a, 22b, 24a, and 24b to one drive structure of each of the drive structures 52a, 52b, 54a, and 54b. (For clarity, in) Figure 3 Electrodes 28a, 28b, 30a, 30b, 42, and 44 are not shown in the diagram.

[0050] about Figure 3 Further features and advantages of the micromechanical components are described in the previously described embodiments.

[0051] Figure 4 A schematic diagram showing a fourth embodiment of the micromechanical component is provided.

[0052] exist Figure 4 In the case of micromechanical components, four grooves 60 are constructed in each of the two rotor masses 12a and 12b. In each opening 60, either a drive structure 52a, 52b, 54a, or 54b corresponding to the corresponding rotor mass 12a or 12b is arranged, or a vibrating mass 22a, 22b, 24a, or 24b corresponding to the corresponding rotor mass 12a or 12b is arranged. Therefore, the vibrating masses 22a, 22b, 24a, and 24b and the drive structures 52a, 52b, 54a, and 54b are integrated separately into the openings 60 of the rotor masses 12a and 12b. The vibrating masses 22a, 22b, 24a, and 24b and the drive structures 52a, 52b, 54a, and 54b are coupled to the corresponding rotor mass 12a or 12b via springs 46, 56a, 56b, 58a, and 58b, respectively. Furthermore, in Figure 4 The construction of rocker structures 34a and 34b is omitted in the micromechanical components because, in this embodiment, the coupling rockers 50a and 50b also affect the tilting of the rotor masses 12a and 12b. (For clarity, in...) Figure 4Electrodes 28a, 28b, 30a, 30b, 42, and 44 are not shown in the diagram.

[0053] about Figure 4 Further features and advantages of the micromechanical components are described in the previously described embodiments.

[0054] Figure 5 A schematic diagram showing a fifth embodiment of the micromechanical component is shown.

[0055] exist Figure 5 In the schematically illustrated micromechanical components, the two rotor masses 12a and 12b are respectively constructed in a cross shape or a plus shape. This can be understood as each of the two rotor masses 12a and 12b having four arms extending outward from its center. In the intermediate space 62 between two adjacent arms of each rotor mass 12a or 12b, either a drive structure 52a, 52b, 54a or 54b associated with the corresponding rotor mass 12a or 12b is engaged, or a vibrating mass 22a, 22b, 24a or 24b associated with the corresponding rotor mass 12a or 12b is engaged. The vibrating masses 22a, 22b, 24a and 24b and the drive structures 52a, 52b, 54a and 54b are coupled to the associated rotor mass 12a or 12b via springs 46, 56a, 56b, 58a and 58b, respectively. (For clarity, in...) Figure 5 Electrodes 28a, 28b, 30a, 30b, 42, and 44 are not shown in the diagram.

[0056] about Figure 5 Other features and advantages of micromechanical components (see reference) Figures 1 to 3 The implementation method.

[0057] In the case of all the micromechanical components described above, the rotor masses 12a and 12b, vibrating masses 22a, 22b, 24a and 24b, drive structures 52a, 52b, 54a and 54b, rocker structures 34a and 34b, coupling rockers 50a and 50b, and all springs 20, 32a, 32b, 35, 36, 46 and 48 can all be structured from a semiconductor layer, particularly, for example, a silicon layer, deposited on the substrate surface 10. Optionally, in... Figure 1 In or in Figure 2 The spring type and structure shown in the diagram correspond to the intermediate spring 36.

[0058] All the micromechanical components described above are suitable for use as (at least a portion thereof) speed sensors, for example, particularly as 3-axis speed sensors, by means of which can detect not only a first rotational motion about a first axis A1, a second rotational motion about a second axis A2, but also a third rotational motion about a third axis oriented perpendicular to the substrate surface 10. The detection of the corresponding rotational motion can be understood not only as proof of the corresponding rotational motion, but also as a measurement of physical parameters reflecting the corresponding rotational motion, such as rotational speed, rotational velocity, and / or angular velocity. For each of the three axes, the detection can be implemented with high robustness relative to external linear acceleration and rotational acceleration, because error signals attributable to external linear acceleration and rotational acceleration can be automatically corrected / "filtered out" by means of differential analysis processing of the signals. The micromechanical components described above can be used not only for closed-loop regulation but also for open-loop operation.

[0059] Figure 6 A flowchart illustrating one embodiment of a method for manufacturing a micromechanical component for a speed sensor is shown.

[0060] In method step S1, the one-piece first rotor mass and the one-piece second rotor mass of the micromechanical component are configured / arranged in a mirror-symmetric manner about a substrate surface perpendicular to the substrate of the micromechanical component and intersecting the first rotor mass and the second rotor mass at the center, such that the first rotor mass can be placed in a first torsional vibration motion about a first rotation axis oriented perpendicular to the substrate surface and the second rotor mass can be placed in a second torsional vibration motion about a second rotation axis oriented parallel to the first rotation axis, the second torsional vibration motion being phased 180° with respect to the first torsional vibration motion.

[0061] As method step S2, the four vibrating masses of the micromechanical component are constructed / arranged in a mirror-symmetric manner about a first plane of symmetry, such that the four vibrating masses can be deflected parallel to the first plane of symmetry by means of two rotor masses placed in their respective torsional vibrational motions. Method steps S1 and S2 can be performed in any temporal order, simultaneously, or overlapping in time. Furthermore, method steps S1 and S2 are performed such that the first rotor mass and the first pair of vibrating masses attached to the first rotor mass are constructed / arranged in a mirror-symmetric manner about a second plane of symmetry, and the second rotor mass and the second pair of vibrating masses attached to the second rotor mass are constructed / arranged in a mirror-symmetric manner about a second plane of symmetry, which is perpendicular to the substrate surface and oriented perpendicular to the first plane of symmetry. Therefore, the implementation of the manufacturing method described herein also achieves the advantages mentioned above.

Claims

1. A micromechanical component for a speed sensor, the micromechanical component having: A substrate having a substrate surface (10); A one-piece first rotor mass (12a) and a one-piece second rotor mass (12b), the first rotor mass and the second rotor mass being constructed and / or arranged mirror-symmetrically about a first plane of symmetry (14) oriented perpendicular to the substrate surface (10) and intersecting the first rotor mass (12a) and the second rotor mass (12b) at their center, such that the first rotor mass (12a) can be placed in a first torsional vibration motion (16a) about a first rotation axis (18a) oriented perpendicular to the substrate surface (10), and the second rotor mass (12b) can be placed in a second torsional vibration motion (16b) about a second rotation axis (18b) oriented parallel to the first rotation axis (18a), the second torsional vibration motion being phased 180° with respect to the first torsional vibration motion (16a); and Four vibrating masses (22a, 22b, 24a and 24b) are constructed and / or arranged in a mirror-symmetric manner about the first plane of symmetry (14) such that the four vibrating masses (22a, 22b, 24a and 24b) can be deflected parallel to the first plane of symmetry (14) by means of two rotor masses (12a, 12b) placed in their respective torsional vibrations (16a, 16b); Its features are, The first pair of vibrating masses (22a, 22b) attached to the first rotor mass (12a) and the four vibrating masses (22a, 22b, 24a and 24b) are constructed and / or arranged with respect to a second plane of symmetry (26) and mirror symmetry with respect to a second pair of vibrating masses (24a, 24b) attached to the second rotor mass (12b) and the four vibrating masses (22a, 22b, 24a and 24b), the second plane of symmetry being perpendicular to the substrate surface (10) and oriented perpendicular to the first plane of symmetry (14).

2. The micromechanical component according to claim 1, wherein, The two rotor masses (12a, 12b) and the four vibrating masses (22a, 22b, 24a and 24b) are constructed and / or arranged such that the common center of gravity (S) of the non-moving first rotor mass (12a), the non-moving second rotor mass (12b), the non-moving first pair of vibrating masses (22a, 22b), and the non-moving second pair of vibrating masses (24a, 24b) lies in the line of intersection of the first plane of symmetry (14) and the second plane of symmetry (26).

3. The micromechanical component according to claim 2, wherein, The two rotor masses (12a, 12b) and the four vibrating masses (22a, 22b, 24a and 24b) are constructed and / or arranged such that even if the two rotor masses (12a, 12b) are placed in their respective torsional vibrations (16a, 16b), such that the four vibrating masses (22a, 22b, 24a and 24b) can deflect parallel to the first plane of symmetry (14), the common center of gravity (S) of the first rotor mass (12a), the second rotor mass (12b), the first pair of vibrating masses (22a, 22b), and the second pair of vibrating masses (24a, 24b) still lies in the intersection of the first plane of symmetry (14) and the second plane of symmetry (26).

4. The micromechanical component according to any one of claims 1 to 3, wherein, The two rotor masses (12a, 12b) are constructed and / or arranged such that when the two rotor masses (12a, 12b) are placed in their respective torsional vibrations (16a, 16b), the vector sum of the first torque of the first torsional vibration (16a) of the first rotor mass (12a) and the second torque of the second torsional vibration (16b) of the second rotor mass (12b) is equal to zero.

5. The micromechanical component according to any one of claims 1 to 3, wherein, The two rotor masses (12a, 12b) are constructed and / or arranged such that the two rotor masses (12a, 12b) placed in their respective torsional vibrations (16a, 16b) can tilt about a rotation axis located in the first plane of symmetry (14) and about an additional rotation axis oriented perpendicular to the first plane of symmetry (14).

6. The micromechanical component according to any one of claims 1 to 3, wherein, Each of the two rotor masses (12a, 12b) is attached by a first spring (32a) to a first rocker structure (34a) oriented parallel to the first plane of symmetry (14), and by a second spring (32b) to a second rocker structure (34b) oriented parallel to the first plane of symmetry (14).

7. The micromechanical component according to any one of claims 1 to 3, wherein, The four vibrating masses (22a, 22b, 24a and 24b) are constructed and / or arranged such that, by means of two rotor masses (12a, 12b) placed in their respective torsional vibrations (16a, 16b), the first vibrating mass (22a) of the first pair can be placed in a first harmonic vibration (38a) oriented parallel to the first plane of symmetry (14), the second vibrating mass (22b) of the first pair can be placed in a second harmonic vibration (38b) oriented parallel to the first plane of symmetry (14), and the second pair can be placed in a second harmonic vibration (38b). The first vibrating mass (24a) of the second pair, which is mirror-symmetric to the first vibrating mass (22a) of the first pair about the second symmetry plane (26), is placed in the second harmonic vibration motion (38b), and the second vibrating mass (24b) of the second pair, which is mirror-symmetric to the second vibrating mass (22b) of the first pair, is placed in the first harmonic vibration motion (38a), wherein the first harmonic vibration motion (38a) is phase-shifted by 180° relative to the second harmonic vibration motion (38b).

8. The micromechanical component according to claim 7, wherein, The four vibrating masses (22a, 22b, 24a and 24b) are constructed and / or arranged such that the four vibrating masses (22a, 22b, 24a and 24b) placed in their respective harmonic vibrations (38a, 38b) can also be adjusted parallel to the second plane of symmetry (26).

9. A speed sensor having a micromechanical component according to any one of the preceding claims.

10. A method for manufacturing a micromechanical component for a speed sensor, the method comprising the following steps: With respect to a substrate surface (10) perpendicular to the substrate of the micromechanical component and a first symmetry plane (14) intersecting the first rotor mass (12a) and the second rotor mass (12b) at their center, the micromechanical component is constructed and / or arranged in a one-piece first rotor mass (12a) and a one-piece second rotor mass (12b), such that the first rotor mass (12a) can be placed in a first torsional vibration motion (16a) about a first rotation axis (18a) perpendicular to the substrate surface (10), and the second rotor mass (12b) can be placed in a second torsional vibration motion (16b) about a second rotation axis (18b) parallel to the first rotation axis (18a), the second torsional vibration motion being phased 180° with respect to the first torsional vibration motion (16a); and The four vibrating masses (22a, 22b, 24a and 24b) of the micromechanical component are constructed and / or arranged in a mirror-symmetric manner about the first plane of symmetry (14) such that the four vibrating masses (22a, 22b, 24a and 24b) can be deflected parallel to the first plane of symmetry (14) by means of two rotor masses (12a, 12b) placed in their respective torsional vibrations (16a, 16b); Its features are, The first rotor mass (12a) and the first pair of rotor masses (22a, 22b) of the four vibrating masses (22a, 22b, 24a and 24b) attached to the first rotor mass (12a) are constructed and / or arranged with respect to a second symmetry plane (26) and mirror symmetry with the second pair of rotor masses (24a, 24b) of the second rotor mass (12b) and the second pair of rotor masses (24a and 24b) attached to the second rotor mass (12b) of the four vibrating masses (22a, 22b, 24a and 24b), the second symmetry plane being perpendicular to the substrate surface (10) and oriented perpendicular to the first symmetry plane (14).

Images