Vibration measurement and control device and method for inverted mountain-shaped multi-flexible beam coupling mechanical arm

Abstract

The invention discloses a vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupled mechanical arm, comprising a mechanical arm body, a vibration detection part and a drive control part; the mechanical arm body comprises a first flexible beam, a second flexible beam, a third flexible beam, a fourth flexible beam, a fifth flexible beam, a sixth flexible beam, a seventh flexible beam, an eighth flexible beam, a ninth flexible beam, a tenth flexible beam, a first pad, a second pad and a spring; the vibration detection part comprises a piezoelectric sensor, an acceleration sensor and a laser displacement sensor; the drive control part comprises a piezoelectric driver, a piezoelectric amplifier circuit, a charge amplifier, a terminal board, a motion control card and a computer; the computer receives detection signals of the piezoelectric sensor and the acceleration sensor arranged on the flexible beam and the laser displacement sensor projected on the flexible beam, obtains a control signal after processing, outputs the control signal to the piezoelectric amplifier circuit through the motion control card and the terminal board, and controls the vibration of the flexible beam through the piezoelectric driver.

Description

Technical Field

[0001] The invention relates to the field of positioning and vibration control of flexible structures, and in particular to a vibration measurement and control device and method for an inverted mountain-shaped multi-flexible beam coupling mechanical arm. Background Art

[0002] Flexible structures are widely used in aerospace and industrial production fields. Compared with rigid structures, they have the advantages of light weight, low energy consumption, high efficiency, and flexible operation. However, the low natural frequency of flexible structures and the easy excitation of low-frequency modal vibrations limit their application and development in certain fields.

[0003] In recent years, active vibration control of flexible structures has become a key and hot topic in the world. Accelerometers are light, easy to install, and have a wide frequency band. Accelerometer feedback control can increase the active damping of the system in a wide frequency band and enhance the robustness of the system. Since the application of accelerometers will introduce a large amount of high-frequency noise signals into the system, filtering is required. Piezoelectric ceramic materials have the advantages of fast response, wide frequency band, good linearity, and easy processing. They are particularly suitable for vibration control applications of flexible structures such as flexible beams. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings and deficiencies of the prior art and to provide a vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupled robotic arm. The present invention fully considers the influence of various factors on the vibration of the robotic arm and realizes real-time detection and active control of the vibration of the multi-flexible beam coupled robotic arm.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0006] A vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupling mechanical arm, comprising a mechanical arm body, a vibration detection part and a drive control part;

[0007] The robot arm body comprises a first flexible beam, a second flexible beam, a third flexible beam, a fourth flexible beam, a fifth flexible beam, a sixth flexible beam, a seventh flexible beam, an eighth flexible beam, a ninth flexible beam, a tenth flexible beam, a first pad, a second pad and a spring. The first flexible beam, the second flexible beam, the third flexible beam, the fourth flexible beam, the fifth flexible beam, the sixth flexible beam, the ninth flexible beam and the tenth flexible beam are placed vertically, the seventh flexible beam and the eighth flexible beam are placed horizontally, and the wide surfaces of the seventh flexible beam and the eighth flexible beam are perpendicular to the horizontal direction.

[0008] One end of the first flexible beam and the second flexible beam are fixed to two ends of the first pad respectively, one end of the third flexible beam and the fourth flexible beam are fixed to two ends of the second pad respectively, the other ends of the first flexible beam, the second flexible beam, the third flexible beam and the fourth flexible beam are all fixed to the experimental table, one end of the fifth flexible beam is fixed to the middle of the first pad, and the other end is fixed to the middle of the seventh flexible beam, one end of the sixth flexible beam is fixed to the middle of the second pad, and the other end is fixed to the middle of the eighth flexible beam, one end of the seventh flexible beam is fixed to one end of the ninth flexible beam, one end of the eighth flexible beam is fixed to one end of the tenth flexible beam, the other ends of the seventh flexible beam, the eighth flexible beam, the ninth flexible beam and the tenth flexible beam are all free ends, the free ends of the seventh flexible beam and the eighth flexible beam are coupled by a spring, and the free ends of the ninth flexible beam and the tenth flexible beam are coupled by a spring;

[0009] The vibration detection part includes a piezoelectric sensor, an acceleration sensor and a laser displacement sensor, the piezoelectric sensor is arranged on each flexible beam, the acceleration sensor is arranged on the ninth flexible beam and the tenth flexible beam, and the laser displacement sensor is projected on the free ends of the seventh flexible beam and the eighth flexible beam;

[0010] The driving control part includes a piezoelectric driver, a piezoelectric amplifying circuit, a charge amplifier, a terminal board, a motion control card and a computer. The piezoelectric driver is arranged on each flexible beam, the piezoelectric amplifying circuit is connected to the piezoelectric driver, the charge amplifier is connected to the piezoelectric sensor and the acceleration sensor, the laser displacement sensor, the piezoelectric amplifying circuit, the charge amplifier and the motion control card are respectively connected to the terminal board, and the computer is connected to the motion control card;

[0011] The computer receives the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor, obtains the control signal after processing, outputs it to the piezoelectric amplifier circuit through the motion control card and the terminal board, and controls the vibration of each flexible beam through the piezoelectric driver.

[0012] Furthermore, the flexible beams are fixed to each other, and the flexible beams are fixed to the first pad and the second pad respectively by clamping plates.

[0013] Furthermore, the piezoelectric sensor is a piezoelectric ceramic sheet, which is installed on the center line of each flexible beam in the width direction and 150 mm away from the clamping plate, with an attitude angle of 0° and single-sided pasting.

[0014] Furthermore, there are a total of 12 piezoelectric sensors, 2 pieces are each pasted on the seventh flexible beam and the eighth flexible beam, and 1 piece is each pasted on the first flexible beam, the second flexible beam, the third flexible beam, the fourth flexible beam, the fifth flexible beam, the sixth flexible beam, the ninth flexible beam and the tenth flexible beam.

[0015] Furthermore, the piezoelectric driver is a piezoelectric ceramic sheet, which is pasted on each flexible beam at a position 60 mm away from the clamping plate, symmetrical about the midline in the width direction, with a posture angle of 0°, and pasted symmetrically on both sides.

[0016] Furthermore, the piezoelectric driver has a total of 48 pieces, the seventh flexible beam and the eighth flexible beam are each pasted with 8 pieces, and the first flexible beam, the second flexible beam, the third flexible beam, the fourth flexible beam, the fifth flexible beam, the sixth flexible beam, the ninth flexible beam and the tenth flexible beam are each pasted with 4 pieces.

[0017] Furthermore, the motion control card includes an A / D conversion module, and the A / D conversion module is used for converting analog signals and digital signals.

[0018] Further, the springs coupled to the free ends of the seventh flexible beam and the eighth flexible beam are fixed by the first bracket, and the springs coupled to the free ends of the ninth flexible beam and the tenth flexible beam are fixed by the second bracket.

[0019] Furthermore, the laser displacement sensors are respectively opposite to the free ends of the seventh flexible beam and the eighth flexible beam, and the laser displacement sensors are fixed to the experimental table through a third bracket.

[0020] A vibration measurement and control method for an inverted mountain-shaped multi-flexible beam coupled mechanical arm, using the vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupled mechanical arm described in any one of the above, comprising the following steps:

[0021] S1. The piezoelectric sensor detects the vibration of each flexible beam, the acceleration sensor detects the vibration acceleration of the ninth flexible beam and the tenth flexible beam, and the laser displacement sensor detects the vibration displacement of the seventh flexible beam and the eighth flexible beam;

[0022] S2. The detection signals of the piezoelectric sensor and the acceleration sensor are transmitted through the charge amplifier and the terminal board, and are input into the computer through the motion control card. The detection signal of the laser displacement sensor is input into the computer by the terminal board and the motion control card;

[0023] S3. The computer processes the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor to obtain control signals, which are output to the piezoelectric amplifier circuit through the motion control card and the terminal board, and the vibration of each flexible beam is controlled by the piezoelectric driver.

[0024] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0025] 1. The present invention fixes multiple flexible beams together to form a mechanical arm through reasonable mechanical structure design, and couples them through springs, effectively eliminating the influence of other uncontrollable factors on the vibration control effect.

[0026] 2. The present invention uses a piezoelectric sensor to measure the strain information of the flexible beam, which can quickly respond to the vibration information of multiple low-order modes of the robotic arm, has good measurement sensitivity, and is light and cheap.

[0027] 3. The present invention uses an acceleration sensor to measure the vibration of the flexible beam at the installation point of the acceleration sensor, which is more accurate for local measurement.

[0028] 4. The present invention uses a laser displacement sensor for detection. The laser displacement sensor is particularly suitable for measuring rapid displacement changes, has no direct contact with the object being measured, and has higher measurement accuracy.

[0029] 5. The present invention adopts a detection method of a multi-sensor combination, which can achieve accurate and stable measurement of the vibration signal of the robot arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a partial structural schematic diagram of the vibration measurement and control device of the present invention.

[0031] Figure 2 It is a partial structural schematic diagram of the vibration measurement and control device of the present invention.

[0032] Figure 3 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0033] Figure 4 It is a schematic flow chart of the vibration measurement and control method of the present invention.

[0034] Description of Figure Numbers:

[0035] 100-laboratory table; 1-first flexible beam; 2-second flexible beam; 3-third flexible beam; 4-fourth flexible beam; 5-fifth flexible beam, 6-sixth flexible beam; 7-seventh flexible beam; 8-eighth flexible beam; 9-ninth flexible beam; 10-tenth flexible beam; 11-first pad; 12-second pad; 13-spring; 14-clamp; 15-piezoelectric sensor; 16-acceleration sensor; 17-laser displacement sensor; 18-first bracket; 19-second bracket; 20-third bracket; 21-piezoelectric driver; 22-piezoelectric amplifier circuit; 23-charge amplifier; 24-terminal board; 25-motion control card; 26-computer. DETAILED DESCRIPTION

[0036] The vibration measurement and control device and method of the inverted mountain-shaped multi-flexible beam coupling mechanical arm of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0037] See also Figure 1 and Figure 2The present invention discloses a vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupled mechanical arm, and the vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupled mechanical arm comprises a mechanical arm body, a vibration detection part and a drive control part. The mechanical arm body is arranged on a test bench 100, and the test bench 100 is assembled from three aluminum profiles with lengths of 900mm, 1880mm and 2880mm respectively. The table top of the test bench 100 is a 3000mm×2000mm×8mm stainless steel plate, and the table top is connected to the aluminum profile by screws, and each connection of the aluminum profile is fixed with an angle iron.

[0038] See also Figure 1 and Figure 3 The robot body includes a first flexible beam 1, a second flexible beam 2, a third flexible beam 3, a fourth flexible beam 4, a fifth flexible beam 5, a sixth flexible beam 6, an eighth flexible beam 8, an eighth flexible beam, a ninth flexible beam 9, a tenth flexible beam 10, a first pad 11, a second pad 12 and a spring 13. The first flexible beam 1, the second flexible beam 2, the third flexible beam 3, the fourth flexible beam 4, the fifth flexible beam 5, the sixth flexible beam 6, the ninth flexible beam 9 and the tenth flexible beam 10 are placed vertically, the eighth flexible beam 8 and the eighth flexible beam are placed horizontally, and the wide faces of the eighth flexible beam 8 and the eighth flexible beam are perpendicular to the horizontal direction.

[0039] See also Figure 1 and Figure 3 , one end of the first flexible beam 1 and the second flexible beam 2 are fixed to the two ends of the first pad 11 respectively, one end of the third flexible beam 3 and the fourth flexible beam 4 are fixed to the two ends of the second pad 12 respectively, and the other ends of the first flexible beam 1, the second flexible beam 2, the third flexible beam 3 and the fourth flexible beam 4 are all fixed to the experimental table 100. One end of the fifth flexible beam 5 is fixed to the middle of the first pad 11, and the other end is fixed to the middle of the eighth flexible beam 8, one end of the sixth flexible beam 6 is fixed to the middle of the second pad 12, and the other end is fixed to the middle of the eighth flexible beam, one end of the eighth flexible beam 8 is fixed to one end of the ninth flexible beam 9, one end of the eighth flexible beam is fixed to one end of the tenth flexible beam 10, and the other ends of the eighth flexible beam 8, the eighth flexible beam, the ninth flexible beam 9 and the tenth flexible beam 10 are all free ends, the free ends of the eighth flexible beam 8 and the eighth flexible beam are coupled by a spring 13, and the free ends of the ninth flexible beam 9 and the tenth flexible beam 10 are coupled by a spring 13. The flexible beams are fixed to each other, and the flexible beams are fixed to the first pad 11 and the second pad 12 respectively by L-shaped clamping plates 14 .

[0040] In this embodiment, the materials of the first flexible beam 1, the second flexible beam 2, the third flexible beam 3, the fourth flexible beam 4, the fifth flexible beam 5, the sixth flexible beam 6, the eighth flexible beam 8, the eighth flexible beam, the ninth flexible beam 9, and the tenth flexible beam 10 are exactly the same, all of which are epoxy resin sheets. The geometric dimensions of the first flexible beam 1, the second flexible beam 2, the third flexible beam 3, and the fourth flexible beam 4 are 800mm×150mm×3mm, the geometric dimensions of the fifth flexible beam 5 and the sixth flexible beam 6 are 600mm×150mm×3mm, the geometric dimensions of the eighth flexible beam 8 and the eighth flexible beam are 1750mm×150mm×2.5mm, and the geometric dimensions of the ninth flexible beam 9 and the tenth flexible beam 10 are 800mm×150mm×2mm. The elastic modulus of epoxy resin is E p =34.64Gpa, density is ρ=1840kg / m 3 .

[0041] See also Figure 1 and Figure 2 The vibration detection part includes a piezoelectric sensor 15, an acceleration sensor 16 and a laser displacement sensor 17. The piezoelectric sensor 15 is arranged on each flexible beam, the acceleration sensor 16 is arranged on the ninth flexible beam 9 and the tenth flexible beam 10, and the laser displacement sensor 17 is projected on the eighth flexible beam 8 and the free end of the eighth flexible beam.

[0042] See also Figure 1 and Figure 3 The piezoelectric sensor 15 is a piezoelectric ceramic sheet. The piezoelectric sensor 15 is installed at the center line of each flexible beam in the width direction and 150 mm away from the clamping plate 14. The attitude angle is 0° and it is pasted on one side. There are 12 piezoelectric sensors 15 in total. Two pieces are pasted on the eighth flexible beam 8 and the eighth flexible beam, and one piece is pasted on the first flexible beam 1, the second flexible beam 2, the third flexible beam 3, the fourth flexible beam 4, the fifth flexible beam 5, the sixth flexible beam 6, the ninth flexible beam 9 and the tenth flexible beam 10. The geometric dimensions of the piezoelectric sensor 15 are 25 mm × 10 mm × 1 mm.

[0043] See also Figure 1 , an acceleration sensor 16 is installed on each of the ninth flexible beam 9 and the tenth flexible beam 10 at the midline of the free end edge. The acceleration sensor 16 is a capacitive sensor with a nominal sensitivity of 1000mv / g and a measurement frequency range of 0-250Hz. The eighth flexible beam 8 and the spring 13 coupled to the free end of the eighth flexible beam are fixed by a first bracket 18, and the spring 13 coupled to the free end of the ninth flexible beam 9 and the tenth flexible beam 10 are fixed by a second bracket 19. The laser displacement sensor 17 is respectively opposite to the free ends of the eighth flexible beam 8 and the eighth flexible beam, and the laser displacement sensor 17 is fixed to the experimental table 100 by a third bracket 20.

[0044] See also Figure 2 and Figure 3 The driving control part includes a piezoelectric driver 21, a piezoelectric amplifier circuit 22, a charge amplifier 23, a terminal board 24, a motion control card 25 and a computer 26. The piezoelectric driver 21 is arranged on each flexible beam, the piezoelectric amplifier circuit 22 is connected to the piezoelectric driver 21, the charge amplifier 23 is connected to the piezoelectric sensor 15 and the acceleration sensor 16, the laser displacement sensor 17, the piezoelectric amplifier circuit 22, the charge amplifier 23 and the motion control card 25 are respectively connected to the terminal board 24, and the computer 26 is connected to the motion control card 25.

[0045] See also Figure 1 and Figure 3 The piezoelectric driver 21 is a piezoelectric ceramic sheet. The piezoelectric driver 21 is pasted on each flexible beam at a position 1460mm away from the clamping plate, and is symmetrical about the midline of the width direction, with a posture angle of 0°, and pasted symmetrically on both sides. There are a total of 48 piezoelectric drivers 21, 8 sheets are pasted on the eighth flexible beam 8 and the eighth flexible beam, 4 sheets are pasted on the first flexible beam 1, the second flexible beam 2, the third flexible beam 3, the fourth flexible beam 4, the fifth flexible beam 5, the sixth flexible beam 6, the ninth flexible beam 9 and the tenth flexible beam 10. The geometric dimensions of the piezoelectric sheet driver are 60mm×25mm×2mm, and the elastic modulus of the piezoelectric ceramic material is E p =63Gpa, d31=-166pm / V.

[0046] See also Figure 1 and Figure 3 The installation positions of the piezoelectric sensor 15 and the piezoelectric driver 21 on the first flexible beam 1, the second flexible beam 2, the third flexible beam 3, the fourth flexible beam 4, the fifth flexible beam 5, the sixth flexible beam 6, the eighth flexible beam 8 and the eighth flexible beam are the same. The installation positions of the piezoelectric sensor 15, the acceleration sensor 16 and the piezoelectric driver 21 on the ninth flexible beam 9 and the tenth flexible beam 10 are the same.

[0047] See also Figure 2 The amplification factor of the piezoelectric amplifier circuit 22 can reach 52 times, that is, -5V~+5V is amplified to -260~+260V. The motion control card 25 includes an A / D conversion module, which is used for converting analog signals and digital signals. The motion control card 25 provides a standard PCI bus interface, and there is a PCI-e slot in the mainboard of the computer 26, in which the motion control card 25 can be installed. The computer 26 receives the detection signals of the piezoelectric sensor 15, the acceleration sensor 16 and the laser displacement sensor 17, and obtains the control signal after processing, which is output to the piezoelectric amplifier circuit 22 through the motion control card 25 and the terminal board 24, and the vibration of each flexible beam is controlled through the piezoelectric driver 21.

[0048] See also Figure 1 , Figure 2 and Figure 4 The present invention also discloses a vibration measurement and control method for an inverted mountain-shaped multi-flexible beam coupled mechanical arm, which uses the vibration measurement and control device for the inverted mountain-shaped multi-flexible beam coupled mechanical arm, and comprises the following steps:

[0049] S1. The piezoelectric sensor 15 detects the vibration of each flexible beam, the acceleration sensor 16 detects the vibration acceleration of the ninth flexible beam 9 and the tenth flexible beam 10, and the laser displacement sensor 17 detects the vibration displacement of the eighth flexible beam 8 and the eighth flexible beam.

[0050] S2. The detection signals of the piezoelectric sensor 15 and the acceleration sensor 16 are transmitted through the charge amplifier 23 and the terminal board 24, and input into the computer 26 through the motion control card 25. The detection signals of the laser displacement sensor 17 are input into the computer 26 through the terminal board 24 and the motion control card 25.

[0051] S3. The computer 26 processes the detection signals of the piezoelectric sensor 15, the acceleration sensor 16 and the laser displacement sensor 17 to obtain control signals, which are output to the piezoelectric amplifier circuit 22 through the motion control card 25 and the terminal board 24, and the vibration of each flexible beam is controlled by the piezoelectric driver 21.

[0052] In summary, the present invention has the following advantages and beneficial effects:

[0053] 1. The present invention fixes a plurality of flexible beams together to form a mechanical arm through reasonable mechanical structure design, and couples them through springs 13, thereby effectively eliminating the influence of other uncontrollable factors on the vibration control effect.

[0054] 2. The present invention uses a piezoelectric sensor 15 to measure the strain information of the flexible beam, which can quickly respond to the vibration information of multiple low-order modes of the robot arm, has good measurement sensitivity, and is light and cheap.

[0055] 3. The acceleration sensor 16 is used in the present invention to measure the vibration of the flexible beam at the installation point of the acceleration sensor 16, which is more accurate for local measurement.

[0056] 4. The present invention uses a laser displacement sensor 17 for detection. The laser displacement sensor 17 is particularly suitable for measuring rapid displacement changes, has no direct contact with the object being measured, and has higher measurement accuracy.

[0057] 5. The present invention adopts a detection method of a multi-sensor combination, which can achieve accurate and stable measurement of the vibration signal of the robot arm.

[0058] The above description is a detailed description of the preferred feasible embodiments of the present invention, but the embodiments are not intended to limit the scope of the patent application of the present invention. All equivalent changes or modified changes completed under the technical spirit disclosed by the present invention should fall within the patent scope covered by the present invention.

Claims

1. A vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupling mechanical arm, characterized in that: It includes a mechanical arm body, a vibration detection part and a drive control part; The robot arm body comprises a first flexible beam, a second flexible beam, a third flexible beam, a fourth flexible beam, a fifth flexible beam, a sixth flexible beam, a seventh flexible beam, an eighth flexible beam, a ninth flexible beam, a tenth flexible beam, a first pad, a second pad and a spring. The first flexible beam, the second flexible beam, the third flexible beam, the fourth flexible beam, the fifth flexible beam, the sixth flexible beam, the ninth flexible beam and the tenth flexible beam are placed vertically, the seventh flexible beam and the eighth flexible beam are placed horizontally, and the wide surfaces of the seventh flexible beam and the eighth flexible beam are perpendicular to the horizontal direction. One end of the first flexible beam and the second flexible beam are fixed to two ends of the first pad respectively, one end of the third flexible beam and the fourth flexible beam are fixed to two ends of the second pad respectively, the other ends of the first flexible beam, the second flexible beam, the third flexible beam and the fourth flexible beam are all fixed to the experimental table, one end of the fifth flexible beam is fixed to the middle of the first pad, and the other end is fixed to the middle of the seventh flexible beam, one end of the sixth flexible beam is fixed to the middle of the second pad, and the other end is fixed to the middle of the eighth flexible beam, one end of the seventh flexible beam is fixed to one end of the ninth flexible beam, one end of the eighth flexible beam is fixed to one end of the tenth flexible beam, the other ends of the seventh flexible beam, the eighth flexible beam, the ninth flexible beam and the tenth flexible beam are all free ends, the free ends of the seventh flexible beam and the eighth flexible beam are coupled by a spring, and the free ends of the ninth flexible beam and the tenth flexible beam are coupled by a spring; The vibration detection part includes a piezoelectric sensor, an acceleration sensor and a laser displacement sensor, the piezoelectric sensor is arranged on each flexible beam, the acceleration sensor is arranged on the ninth flexible beam and the tenth flexible beam, and the laser displacement sensor is projected on the free ends of the seventh flexible beam and the eighth flexible beam; The driving control part includes a piezoelectric driver, a piezoelectric amplifying circuit, a charge amplifier, a terminal board, a motion control card and a computer. The piezoelectric driver is arranged on each flexible beam, the piezoelectric amplifying circuit is connected to the piezoelectric driver, the charge amplifier is connected to the piezoelectric sensor and the acceleration sensor, the laser displacement sensor, the piezoelectric amplifying circuit, the charge amplifier and the motion control card are respectively connected to the terminal board, and the computer is connected to the motion control card; The computer receives the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor, obtains the control signal after processing, outputs it to the piezoelectric amplifier circuit through the motion control card and the terminal board, and controls the vibration of each flexible beam through the piezoelectric driver.

2. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 1 is characterized in that: The flexible beams are fixed to each other, and the flexible beams are fixed to the first pad and the second pad respectively by clamping plates.

3. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 2 is characterized in that: The piezoelectric sensor is a piezoelectric ceramic piece. The piezoelectric sensor is installed on the center line of each flexible beam in the width direction and 150 mm away from the clamping plate. The attitude angle is 0° and it is pasted on one side.

4. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 3 is characterized in that: There are 12 piezoelectric sensors in total, 2 pieces are pasted on the seventh flexible beam and the eighth flexible beam, and 1 piece is pasted on the first flexible beam, the second flexible beam, the third flexible beam, the fourth flexible beam, the fifth flexible beam, the sixth flexible beam, the ninth flexible beam and the tenth flexible beam.

5. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 2, characterized in that: The piezoelectric driver is a piezoelectric ceramic sheet, which is pasted on each flexible beam at a position 60 mm away from the clamping plate, symmetrical about the midline in the width direction, with an attitude angle of 0°, and pasted symmetrically on both sides.

6. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 5, characterized in that: There are 48 piezoelectric drivers in total, 8 pieces are pasted on the seventh flexible beam and the eighth flexible beam, and 4 pieces are pasted on the first flexible beam, the second flexible beam, the third flexible beam, the fourth flexible beam, the fifth flexible beam, the sixth flexible beam, the ninth flexible beam and the tenth flexible beam.

7. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 1, characterized in that: The motion control card includes an A / D conversion module, which is used for converting analog signals and digital signals.

8. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 1, characterized in that: The springs coupled to the free ends of the seventh flexible beam and the eighth flexible beam are fixed by the first bracket, and the springs coupled to the free ends of the ninth flexible beam and the tenth flexible beam are fixed by the second bracket.

9. The vibration measurement and control device of the inverted mountain-shaped multi-flexible beam coupling mechanical arm according to claim 8, characterized in that: The laser displacement sensors are respectively opposite to the free ends of the seventh flexible beam and the eighth flexible beam, and the laser displacement sensors are fixed to the experimental table through the third bracket.

10. A vibration measurement and control method for an inverted mountain-shaped multi-flexible coupling mechanical arm, using the vibration measurement and control device for an inverted mountain-shaped multi-flexible beam coupling mechanical arm according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1. The piezoelectric sensor detects the vibration of each flexible beam, the acceleration sensor detects the vibration acceleration of the ninth flexible beam and the tenth flexible beam, and the laser displacement sensor detects the vibration displacement of the seventh flexible beam and the eighth flexible beam; S2. The detection signals of the piezoelectric sensor and the acceleration sensor are transmitted through the charge amplifier and the terminal board, and are input into the computer through the motion control card. The detection signal of the laser displacement sensor is input into the computer by the terminal board and the motion control card; S3. The computer processes the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor to obtain control signals, which are output to the piezoelectric amplifier circuit through the motion control card and the terminal board, and the vibration of each flexible beam is controlled by the piezoelectric driver.

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