Measurement and correction system and method for aberration of full transmission path of laser beam

Abstract

The present invention discloses a measurement and correction system and a measurement and correction method for the aberration of the entire laser beam transmission path. Among them, the measurement and correction method includes: an objective optical path aberration measurement and correction device, an auxiliary optical path aberration measurement and correction device, and a transmitting optical path and transfer aberration measurement and correction device; obtaining the objective optical path aberration through the objective optical path aberration measurement and correction device, transferring the objective optical path aberration through the auxiliary optical path aberration measurement and correction device, and finally completing the superposition of the transmitting optical path aberration and the objective optical path aberration through the transmitting optical path and transfer aberration measurement and correction device, and performing closed-loop correction.

Description

Technical Field

[0001] The present invention relates to the field of optical technologies, and particularly to a measurement and correction system and method for aberrations in the full transmission path of a laser beam. Background Art

[0002] With the development of technology, laser transmission has found applications in multiple scenarios. In many applications of laser transmission, such as laser processing, space debris removal, laser propulsion, laser remote charging, directed energy weapons, etc., it is required that the laser beam maintains good beam quality when converging to the target. After the laser beam is emitted from the laser, during the transmission process to reach the target, it is interfered by various aberrations in the transmission path, including optical system aberrations and transmission medium aberrations (such as atmospheric turbulence). Usually, adaptive optical technologies are needed to correct these aberrations.

[0003] To achieve the measurement and correction of aberrations in the full transmission path, special optical path structures, methods, devices, etc. are required. A relatively common one is the common path / common mode method. This method uses a precision corner cube array to reflect the sampled beam from a certain direction, generates a pseudo-phase conjugate wave similar to the aberration of the incident beam, and simultaneously performs wavefront detection on another beam in the opposite direction. Based on the simultaneous operation of two sets of adaptive optical system components, seamless connection measurement of the full optical path aberration can be achieved, and the influence of common path aberrations in the optical path can be eliminated.

[0004] However, the existing common path / common mode aberration measurement and correction method requires the use of a precision corner cube array, which has high processing requirements, and there are diffraction effects, dihedral angle errors, surface shape errors, etc. Its fidelity depends on the number of its units and the array structure, and the alignment requirements in the optical path are high, and mismatch errors are likely to occur. Summary of the Invention

[0005] The present invention aims to overcome the defects existing in the prior art, and the present invention adopts the following technical solutions:

[0006] On the one hand, the present invention provides a measurement and correction system for aberrations in the full transmission path of a laser beam, which includes: an aberration measurement and correction device for the target optical path, an aberration measurement and correction device for the auxiliary optical path, and an aberration measurement and correction device for the emission optical path and transfer aberrations;

[0007] The aberration measurement and correction device for the target optical path includes a target light source, a second dichroic mirror, a first dichroic mirror, and a first set of adaptive optical components; wherein, the beam in the direction of the target light source is transmitted through the second dichroic mirror and then reflected by the first dichroic mirror and enters the first set of adaptive optical components for detection and correction, so that the first set of adaptive optical components carry the aberrations of the target optical path;

[0008] The auxiliary optical path aberration measurement and correction device includes an auxiliary light source, a third dichroic mirror, and a second set of adaptive optical components. Among them, the light beam emitted by the auxiliary light source sequentially passes through the third dichroic mirror, the second dichroic mirror, and the second set of adaptive optical components. The second set of adaptive optical components is used to detect and correct the target optical path aberration carried by the first set of adaptive optical components, so that the second set of adaptive optical components carries the target optical path aberration.

[0009] The emission optical path and transfer aberration measurement and correction device includes an emission light source and a third set of adaptive optical components. Among them, the laser beam emitted by the emission light source carries an emission optical path aberration. After the laser beam is transmitted through the second dichroic mirror and then reflected by the second set of adaptive optical components, the target optical path aberration is superimposed. The third set of adaptive optical components detects and performs closed-loop correction on the laser beam superimposed with the target optical path aberration and the emission optical path aberration.

[0010] Optionally, the first set of adaptive optical components includes a first wavefront modulator, a first wavefront detector, and a first wavefront controller. After the light beam of the target light source is transmitted through the second dichroic mirror, it sequentially passes through the first wavefront modulator and is reflected by the first dichroic mirror into the first wavefront detector. After being corrected by the first set of adaptive optical components, the first wavefront modulator carries the target optical path aberration.

[0011] The second set of adaptive optical components includes a second wavefront modulator, a second wavefront detector, and a second wavefront controller. The light beam of the auxiliary light source is sequentially reflected by the third dichroic mirror, the second wavefront modulator, the second dichroic mirror, and the first wavefront modulator, and then transmitted through the first dichroic mirror and enters the second wavefront detector. After the second set of adaptive optical components performs closed-loop correction, the second wavefront modulator carries the target optical path aberration.

[0012] The third set of adaptive optical components includes a third wavefront modulator, a third wavefront detector, and a third wavefront controller. The laser beam carrying the emission optical path aberration emitted by the emission light source sequentially passes through the reflection of the third wavefront modulator, the transmission of the second dichroic mirror, the reflection of the second wavefront modulator, and the transmission of the third dichroic mirror and enters the third wavefront detector, and is subjected to closed-loop correction by the third set of adaptive optical components.

[0013] Optionally, the wavelength of the target light source is λ 1 = 1030 nm; the wavelength of the auxiliary light source is λ 2 = 970 nm; the wavelength of the emission light source is λ 3 = 1064 nm.

[0014] Optionally, the first dichroic mirror reflects the target light source and transmits the auxiliary light source; the second dichroic mirror reflects the auxiliary light source and transmits the target light source and the emission light source; the third dichroic mirror reflects the auxiliary light source and transmits the emission light source.

[0015] Optionally, the first wavefront modulator uses a coating that highly reflects the target light source and the auxiliary light source; the second wavefront modulator uses a coating that highly reflects the auxiliary light source and the emission light source; the third wavefront modulator uses a coating that highly reflects the emission light source.

[0016] On the other hand, the present application also provides a method for measuring and correcting the aberration of the full transmission path of a laser beam. This measurement and correction method is implemented based on the above-mentioned measurement and correction system, and includes the following steps:

[0017] S1. Based on the target beam, perform wavefront measurement and closed-loop correction on the first group of adaptive optical components, obtain the target optical path aberration and correct it;

[0018] S2. Based on the auxiliary beam, perform wavefront measurement and closed-loop correction on the second group of adaptive optical components, and complete the transfer of the target optical path aberration;

[0019] S3. Based on the emission beam, perform wavefront measurement and closed-loop correction on the third group of adaptive optical components, obtain the aberration of the full transmission path of the beam including the emission optical path and the reflection surface of the dichroic mirror, and correct it.

[0020] Optionally, in step S1, the first group of adaptive optical components includes a first wavefront modulator, a first wavefront detector, and a first wavefront controller; after the target beam is transmitted through the second dichroic mirror, it is sequentially reflected by the first wavefront modulator and the first dichroic mirror and enters the first wavefront detector. After being corrected by the first group of adaptive optical components, the first wavefront modulator carries the target optical path aberration.

[0021] Optionally, in step S2, the second group of adaptive optical components includes a second wavefront modulator, a second wavefront detector, and a second wavefront controller; the auxiliary beam is sequentially reflected by the third dichroic mirror, the second wavefront modulator, the second dichroic mirror, and the first wavefront modulator, and then enters the second wavefront detector after passing through the first dichroic mirror. After being subjected to closed-loop correction by the second group of adaptive optical components, the second wavefront modulator carries the target optical path aberration.

[0022] Optionally, in step S3, the third group of adaptive optical components includes a third wavefront modulator, a third wavefront detector, and a third wavefront controller; the transmitted beam carrying the transmitted optical path aberration is reflected by the third wavefront modulator, transmitted by the second dichroic mirror, reflected by the second wavefront modulator, and transmitted by the third dichroic mirror in sequence and then enters the third wavefront detector, and is corrected in a closed loop by the third group of adaptive optical components.

[0023] Optionally, the wavelength of the target beam is λ 1 = 1030 nm; the wavelength of the auxiliary beam is λ 2 = 970 nm; the wavelength of the transmitted beam is λ 3 = 1064 nm.

[0024] Technical effects of the present invention: The present invention discloses a measurement and correction system and a measurement and correction method for the aberration of the entire transmission path of a laser beam. The measurement and correction system includes: a target optical path aberration measurement and correction device, an auxiliary optical path aberration measurement and correction device, and a transmitted optical path and transfer aberration measurement and correction device; the target optical path aberration is obtained through the target optical path aberration measurement and correction device, and the target optical path aberration is transferred by the auxiliary optical path aberration measurement and correction device. Finally, the superposition of the transmitted optical path aberration and the target optical path aberration is completed through the transmitted optical path and transfer aberration measurement and correction device, and closed-loop correction is performed. This measurement and correction system avoids the use of precision and difficult-to-align devices such as corner cube arrays. By adding a group of adaptive optical components, the aberration measured in a certain direction is transferred and recombined, and the measurement and correction of the entire path aberration in the laser beam transmission process are solved by using traditional adaptive optical technology. The processing requirements are low, and there are no diffraction effects, dihedral angle errors, surface shape errors, etc., and mismatch errors are not likely to occur. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 Schematic diagram of a measurement and correction system for the aberration of the entire transmission path of a laser beam according to an embodiment of the present invention;

[0027] Figure 2 Schematic diagram for the description of the second dichroic mirror in a measurement and correction system for the aberration of the entire transmission path of a laser beam according to an embodiment of the present invention;

[0028] Figure 3Schematic diagram of a measurement and correction system for aberration in the full transmission path of a laser beam according to another embodiment of the present invention;

[0029] Figure 4 Flow example diagram of a method for measuring and correcting aberration in the full transmission path of a laser beam according to an embodiment of the present invention. Detailed implementation manners

[0030] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation to the present invention.

[0031] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present application. However, those skilled in the art should clearly understand that the present application can also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits and methods are omitted to avoid unnecessary details from interfering with the description of the present application.

[0032] It should be understood that when used in the specification of the present application and the appended claims, the term "comprising" indicates the presence of the described features, wholes, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or their combinations.

[0033] It should also be understood that the term "and / or" used in the specification of the present application and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0034] As used in the specification of the present application and the appended claims, the term "if" can be interpreted as "when", "once", "in response to determining" or "in response to detecting" according to the context. Similarly, the phrase "if determined" or "if [the described condition or event] is detected" can be interpreted as meaning "once determined", "in response to determining", "once [the described condition or event] is detected" or "in response to detecting [the described condition or event]" according to the context.

[0035] In addition, in the description of the specification of the present application and the appended claims, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0036] References to "one embodiment" or "some embodiments" etc. described in the specification of this application mean that specific features, structures, or characteristics described in connection with that embodiment are included in one or more embodiments of this application. Thus, statements such as "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments", etc. that appear in different places in this specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized. The terms "comprising", "including", "having" and their variants all mean "including but not limited to", unless otherwise specifically emphasized.

[0037] This application provides a measurement and correction system for the aberration of the entire transmission path of a laser beam, which is applied to measure and correct the aberration on the path from the emission light source to the target light source.

[0038] Reference Figure 1 as shown Figure 1 is a schematic diagram of a measurement and correction system for the aberration of the entire transmission path of a laser beam according to an embodiment of the present invention. The measurement and correction system for the aberration of the entire transmission path of the laser beam includes:

[0039] a target optical path aberration measurement and correction device, an auxiliary optical path aberration measurement and correction device, and an emission optical path and transfer aberration measurement and correction device;

[0040] The target optical path aberration measurement and correction device includes a target light source 1, a second dichroic mirror 21, a first dichroic mirror 11, and a first group of adaptive optical components;

[0041] After the light beam emitted from the direction of the target light source 1 passes through the second dichroic mirror 21 by transmission and then is reflected by the first dichroic mirror 11 and enters the first group of adaptive optical components for detection and correction, the first group of adaptive optical components carry the target optical path aberration.

[0042] The auxiliary optical path aberration measurement and correction device includes an auxiliary light source 2, a third dichroic mirror 31, and a second group of adaptive optical components;

[0043] The light beam emitted by the auxiliary light source 2 sequentially passes through the third dichroic mirror 31, the second dichroic mirror 21, and the second group of adaptive optical components. The second group of adaptive optical components is used to detect and correct the target optical path aberration on the first group of adaptive optical components so that the second group of adaptive optical components carry the target optical path aberration.

[0044] The emission optical path and transfer aberration measurement and correction device includes an emission light source 3 and a third group of adaptive optical components;

[0045] The emitted light source 3 emits a laser beam carrying an emission light path aberration. The laser beam is transmitted through the second dichroic mirror 21 and then reflected by the second group of adaptive optical components, and then the target light path aberration is superimposed. The third group of adaptive optical components detects and performs closed-loop correction on the laser beam with the target light path phase difference and the emission light path aberration superimposed thereon.

[0046] The target light path aberration is obtained through the target light path aberration measurement and correction device, and the target light path aberration is transferred by the auxiliary optical path aberration measurement and correction device. Finally, the emission light path aberration and the target light path aberration are superimposed through the emission light path and transferred aberration measurement and correction device, and closed-loop correction is performed. This avoids the use of precision and difficult-to-align devices such as corner cube arrays. By adding a group of adaptive optical components, the aberration measured in a certain direction is transferred and recombined, and the traditional adaptive optical technology is used to solve the full-path aberration measurement and correction in the laser beam transmission process. The processing requirements are low, and there are no diffraction effects, dihedral angle errors, surface shape errors, etc., and mismatch errors are not likely to occur.

[0047] In some embodiments, the first group of adaptive optical components includes: a first wavefront modulator 12, a first wavefront detector 13, and a first wavefront controller 14; the beam of the target light source 1 is transmitted through the second dichroic mirror 21, and then reflected by the first wavefront modulator 12 and the first dichroic mirror 11 in sequence and enters the first wavefront detector 13. After being corrected by the first group of adaptive optical components, the first wavefront modulator 12 carries the target light path aberration.

[0048] The second group of adaptive optical components includes: a second wavefront modulator 22, a second wavefront detector 23, and a second wavefront controller 24; the beam of the auxiliary light source 2 is reflected by the third dichroic mirror 31, the second wavefront modulator 22, the second dichroic mirror 21, and the first wavefront modulator 12 in sequence, and then transmitted through the first dichroic mirror 11 and enters the second wavefront detector 23. In this way, since the auxiliary beam passes through the first wavefront modulator 12 carrying the target light path aberration and is then subjected to closed-loop correction by the second group of adaptive optical components, the second wavefront modulator 22 carries the target optical path aberration, that is, the target light path aberration carried by the first wavefront modulator 12 is transferred to the second wavefront modulator 22.

[0049] The third group of adaptive optical components includes: a third wavefront modulator 32, a third wavefront detector 33, and a third wavefront controller 34; the light beam of the emission light source 3 carrying the emission light path aberration is reflected by the third wavefront modulator 32, transmitted by the second dichroic mirror 21, reflected by the second wavefront modulator 22, and transmitted by the third dichroic mirror 31 in sequence and then enters the third wavefront detector 33. Thus, the emission light path aberration carried by the emission light beam can be superimposed on the emission light path aberration carried by the second wavefront modulator 22, and finally, the whole path aberration measurement and correction are realized through the closed-loop correction of the third group of adaptive optical components during the transmission process of the whole emission light beam.

[0050] Compared with using a corner cube array where only a pseudo phase conjugate wave can be realized due to the 180° flip of the reflected light of each corner cube, by using a wavefront detector and a wavefront modulator for measurement, modulation, and transfer, it can ensure better integrity and fidelity of the light beam during the transmission process of the emission light beam.

[0051] In some embodiments, the wavelength of the target light source 1 is λ 1 = 1030 nm;

[0052] The wavelength of the auxiliary light source 2 is λ 2 = 970 nm;

[0053] The wavelength of the emission light source 3 is λ 3 = 1064 nm.

[0054] In some embodiments, the first dichroic mirror 11 reflects the target light source 1 and transmits the auxiliary light source 2; the second dichroic mirror 21 reflects the auxiliary light source 2 and transmits the target light source 1 and the emission light source 3; the third dichroic mirror 31 reflects the auxiliary light source 2 and transmits the emission light source 1. It can be understood that the reflection and transmission bands of each dichroic mirror can be exchanged by changing the coating.

[0055] In some embodiments, the first wavefront modulator 12 uses a coating that highly reflects the target light source and the auxiliary light source; the second wavefront modulator 22 uses a coating that highly reflects the auxiliary light source and the emission light source; the third wavefront modulator 32 uses a coating that highly reflects the emission light source. It can be understood that each wavefront modulator can exchange the reflection bands by changing the coating.

[0056] Reference Figure 4 As shown, the present invention also provides a measurement and correction method for the full transmission path of a laser beam. The measurement and correction method is realized based on the above measurement and correction system, and the measurement and correction method includes the following steps:

[0057] S1. Based on the target beam, perform wavefront measurement and closed-loop correction on the first group of adaptive optical components to obtain and correct the target optical path aberration;

[0058] Specifically, in the step S1, the first group of adaptive optical components includes a first wavefront modulator 12, a first wavefront detector 13, and a first wavefront controller 14; after the target beam 1 is transmitted through the second dichroic mirror 21, it is reflected by the first wavefront modulator 12 and the first dichroic mirror 11 in sequence and enters the first wavefront detector 13. After being corrected by the first group of adaptive optical components, the first wavefront modulator 12 carries the target optical path aberration.

[0059] S2. Based on the auxiliary beam, perform wavefront measurement and closed-loop correction on the second group of adaptive optical components to complete the transfer of the target optical path aberration;

[0060] Specifically, in the step S2, the second group of adaptive optical components includes a second wavefront modulator 22, a second wavefront detector 23, and a second wavefront controller 24; the beam of the auxiliary light source 2 is reflected by the third dichroic mirror 31, the second wavefront modulator 22, the second dichroic mirror 21, and the first wavefront modulator 12 in sequence, and then enters the second wavefront detector 23 after being transmitted through the first dichroic mirror 11. In this way, since the auxiliary beam passes through the first wavefront modulator 12 carrying the target optical path aberration and then undergoes closed-loop correction by the second group of adaptive optical components, the second wavefront modulator 22 carries the target optical path aberration, that is, the target optical path aberration carried by the first wavefront modulator 12 is transferred to the second wavefront modulator 22.

[0061] S3. Based on the emission beam, perform wavefront measurement and closed-loop correction on the third group of adaptive optical components to obtain and correct the aberration of the entire beam transmission path including the emission optical path and the dichroic mirror reflection surface;

[0062] Specifically, in the step S3, the third group of adaptive optical components includes a third wavefront modulator 32, a third wavefront detector 33, and a third wavefront controller 34; the beam of the emission light source 3 carrying the emission optical path aberration is reflected by the third wavefront modulator 32, transmitted through the second dichroic mirror 21, reflected by the second wavefront modulator 22, and transmitted through the third dichroic mirror 31 and then enters the third wavefront detector 33. In this way, the emission optical path aberration carried by the emission beam can be superimposed on the emission optical path aberration carried by the second wavefront modulator 22, and finally, closed-loop correction is performed by the third group of adaptive optical components, realizing the full-path aberration measurement and correction in the entire emission beam transmission process.

[0063] In some embodiments, the wavelength of the target beam is λ 1 = 1030 nm;

[0064] The wavelength of the auxiliary beam is λ 2 = 970 nm;

[0065] The wavelength of the emission beam is λ 3 = 1064 nm.

[0066] The working principle of the technical solution of the above embodiments is as follows:

[0067] First, the laser beam with a wavelength of λ 1 from the target light source 1 passes through the target optical path, carrying the target optical path aberration, and reaches the second dichroic mirror 21. After the second dichroic mirror 21 highly transmits λ 1 , λ 1 reaches the first wavefront modulator 12, is reflected by the first wavefront modulator 12 to the first dichroic mirror 11, and then is highly reflected by the first dichroic mirror 11. Finally, it reaches the first wavefront detector 13 to measure the aberration. The first wavefront controller 14 calculates the control signal and drives the first wavefront modulator 12 for correction. At this time, the first wavefront modulator 12 has a surface shape opposite to the target optical path aberration.

[0068] Then, the laser beam with a wavelength of λ 2 from the auxiliary light source 2 passes through the third dichroic mirror 31 and is highly reflected by the second wavefront modulator 22, reaches the second dichroic mirror 21, and then is highly reflected by the second dichroic mirror 21 for λ 2 , reaches the first wavefront modulator 12, and after being highly reflected by the first wavefront modulator 12 for λ 2 , it is highly transmitted after reaching the first dichroic mirror 11. Finally, it reaches the second wavefront detector 23 to measure the aberration. The aberration measured by the second wavefront detector 23 is mainly generated by the first wavefront modulator 12. Therefore, after the wavefront is corrected, the second wavefront modulator 22 has a surface shape opposite to that of the first wavefront modulator 12. Since the first wavefront modulator 12 has a surface shape opposite to the target optical path aberration, the second wavefront modulator 22 has a surface shape consistent with the target optical path aberration.

[0069] Finally, the laser beam with a wavelength of λ 3The laser beam is reflected by the third wavefront modulator 32, reaches the second dichroic mirror 21 with high transmittance. Since the power of the emission light source 3 is very high, the laser beam still has enough energy to pass through the second dichroic mirror 21 and reach the second wavefront modulator 22. After being reflected by the second wavefront modulator 22, it reaches the third dichroic mirror 31 and is highly transmitted to reach the third wavefront detector 33 to measure the aberration. The third wavefront controller 34 calculates the control signal and drives the third wavefront modulator 32 for correction. The aberration measured by the third wavefront detector 33 is generated by the second wavefront modulator 22 and superimposed with the aberration of the emission light path. As mentioned above, the surface shape of the second wavefront modulator 22 is consistent with the target light path aberration. Therefore, the third wavefront detector 33 measures the aberration of the entire transmission path. After closed-loop correction, the third wavefront modulator 32 has a surface shape opposite to the aberration of the entire transmission path, so that the beam aberration reaching the target light source 1 is canceled, and thus has good beam quality.

[0070] Reference Figure 2 shown in Figure 2 is a schematic diagram for the description of the second dichroic mirror in the measurement and correction system of the aberration of the entire transmission path of the laser beam.

[0071] The target light path aberration is φA, the emission light path aberration is φC, the reflecting surface of the second dichroic mirror 21 is deformed due to the laser thermal effect, the front aberration is φB, and the aberration behind the reflecting surface is -φB.

[0072] When the beam of the target light source 1 reaches the second dichroic mirror 21, since it is transmitted through, it is not affected by the surface shape of the dichroic mirror, and the surface shape of the first wavefront modulator 12 is -φA.

[0073] The beam of the auxiliary light source 2 is reflected by the rear reflecting surface of the second dichroic mirror 21 and the first wavefront modulator 12. After closed-loop correction, the surface shape of the second wavefront modulator 22 is φA + φB.

[0074] The beam of the emission light source 3 passes through the third wavefront modulator 32, the second dichroic mirror 21, and the second wavefront modulator 22 in sequence. Since it is transmitted through the second dichroic mirror 21, it is not affected by the second dichroic mirror 21. After closed-loop correction, the surface shape of the third wavefront modulator 32 is opposite to the measured aberration, that is, -φA - φB - φC.

[0075] After the above correction, most of the energy of the beam of the emission light source 3 reaches the target light source 1 after being reflected by the second dichroic mirror 21. The aberration on its path is φA + φB + φC, which is exactly opposite to the surface shape of the third wavefront modulator 32. Therefore, after mutual cancellation, the beam reaching the target light source 1 has no aberration and can maintain good beam quality.

[0076] The technical principle of this application to solve the measurement and correction of aberrations in the entire transmission path of a laser beam from a light source to a target is to use adaptive optics technology to transfer the aberrations in a certain direction to superimpose and measure and correct the aberrations in another direction, so as to complete the correction of the entire transmission path and enable the laser beam to have a good wavefront and beam quality when it reaches the target. Based on this technical principle, the solutions of the above embodiments can be changed. Figure 3 FIG. is a schematic diagram of a measurement and correction system for aberrations in the entire transmission path of a laser beam according to another embodiment of the present invention, which can be specifically referred to Figure 3 as shown.

[0077] In this embodiment, specifically, the first wavefront detector 13, the first wavefront controller 14, and the first wavefront modulator 12 first measure and correct the aberrations in the emission light path, and obtain a surface shape opposite to the aberrations in the emission light path on the first wavefront modulator 12. Then, based on the auxiliary light source 2, the second wavefront modulator 22, the second wavefront controller 24, and the second wavefront detector 23, the aberrations on the first wavefront modulator 12 are transferred to the second wavefront modulator 22 to obtain a surface shape consistent with the aberrations in the emission light path. Finally, the third wavefront modulator 32, the third wavefront detector 33, and the third wavefront controller 34 measure and correct the superimposed target light path aberrations and the aberrations generated by the second wavefront modulator 22. That is, the third wavefront modulator 32 completes the correction of the aberrations in the entire transmission path, and the laser beam has a good wavefront and beam quality from the emission light source 3 to the target light source 1.

[0078] In addition, for each dichroic mirror, the reflection and transmission bands can be exchanged by changing the coating, which does not affect the implementation of this technical solution.

[0079] The measurement and correction system and method for the aberration of the full laser beam transmission path provided by this application connect and interact with each other through the target optical path aberration measurement and correction device, the auxiliary optical path aberration measurement and correction device, and the emission optical path and transfer aberration measurement and correction device. By adopting an optical structure form that is completely different from the corner cube array, it avoids using devices such as corner cube arrays that are difficult to assemble and align precisely. Instead, a set of adaptive optical components is added to transfer and recombine the aberration measured in a certain direction, and the full-path aberration measurement and correction during the laser beam transmission process are solved by using traditional adaptive optical technology. In this application, all use wavefront modulators with continuous mirrors to achieve, without diffraction effects, dihedral angle errors, etc. In addition, this application can also reduce the requirements for the alignment of the optical path. The alignment errors and optical processing errors in the optical path alignment can be eliminated through the calibration and correction of the adaptive optical system, while the mismatch error of the corner cube array in the prior art solution cannot be eliminated by the adaptive optical system. And compared with reflecting the sampling beam from a certain direction through the corner cube array, this application does not use the corner cube array, can avoid the 180° flip of the reflected light of each corner cube and can only achieve a pseudo-phase conjugate wave, but uses a wavefront detector and a wavefront modulator for measurement, modulation and transfer, with better integrity and fidelity.

[0080] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

[0081] The specific embodiments of the present invention described above do not constitute a limitation to the protection scope of the present invention. Any other corresponding changes and deformations made according to the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A measurement and correction system for the aberration of the full transmission path of a laser beam, characterized in that, it includes: an objective optical path aberration measurement and correction device, an auxiliary optical path aberration measurement and correction device, and a transmitting optical path and transfer aberration measurement and correction device; The objective optical path aberration measurement and correction device includes an objective light source, a second dichroic mirror, a first dichroic mirror, and a first group of adaptive optical components; wherein, the beam in the direction of the objective light source is transmitted through the second dichroic mirror and then reflected by the first dichroic mirror into the first group of adaptive optical components for detection and correction, so that the first group of adaptive optical components carry the objective optical path aberration; The auxiliary optical path aberration measurement and correction device includes an auxiliary light source, a third dichroic mirror, and a second group of adaptive optical components; wherein, the beam emitted by the auxiliary light source sequentially passes through the third dichroic mirror, the second dichroic mirror, and the second group of adaptive optical components, and the second group of adaptive optical components is used to detect and correct the objective optical path aberration carried by the first group of adaptive optical components, so that the second group of adaptive optical components carry the objective optical path aberration; The transmitting optical path and transfer aberration measurement and correction device includes a transmitting light source and a third group of adaptive optical components; wherein, the laser beam emitted by the transmitting light source carries the transmitting optical path aberration, and the laser beam is transmitted through the second dichroic mirror and then reflected by the second group of adaptive optical components and superimposed with the objective optical path aberration, and the third group of adaptive optical components detects and performs closed-loop correction on the laser beam superimposed with the objective optical path aberration and the transmitting optical path aberration.

2. The measurement and correction system according to claim 1, characterized in that, The first group of adaptive optical components includes a first wavefront modulator, a first wavefront detector, and a first wavefront controller. The beam of the objective light source is transmitted through the second dichroic mirror and then reflected by the first wavefront modulator and the first dichroic mirror in sequence and enters the first wavefront detector; After being corrected by the first group of adaptive optical components, the first wavefront modulator carries the objective optical path aberration; The second group of adaptive optical components includes a second wavefront modulator, a second wavefront detector, and a second wavefront controller. The beam of the auxiliary light source is sequentially reflected by the third dichroic mirror, the second wavefront modulator, the second dichroic mirror, and the first wavefront modulator, and then transmitted through the first dichroic mirror and enters the second wavefront detector; After being subjected to closed-loop correction by the second group of adaptive optical components, the second wavefront modulator carries the objective optical path aberration; The third group of adaptive optical components includes a third wavefront modulator, a third wavefront detector, and a third wavefront controller; the laser beam carrying the transmitting optical path aberration emitted by the transmitting light source is sequentially reflected by the third wavefront modulator, transmitted through the second dichroic mirror, reflected by the second wavefront modulator, and transmitted through the third dichroic mirror and then enters the third wavefront detector, and is subjected to closed-loop correction by the third group of adaptive optical components.

3. The measurement and calibration system according to claim 2, characterized in that: The wavelength of the target light source is λ 1 = 1030 nm; The wavelength of the auxiliary light source is λ 2 = 970 nm; The wavelength of the emission light source is λ 3 = 1064 nm.

4. The measurement and calibration system according to claim 2, characterized in that: the first dichroic mirror reflects the target light source and transmits the auxiliary light source; the second dichroic mirror reflects the auxiliary light source and transmits the target light source and the emission light source; the third dichroic mirror reflects the auxiliary light source and transmits the emission light source.

5. The measurement and calibration system according to claim 2, characterized in that: the first wavefront modulator uses a coating that highly reflects the target light source and the auxiliary light source; the second wavefront modulator uses a coating that highly reflects the auxiliary light source and the emission light source; the third wavefront modulator uses a coating that highly reflects the emission light source.

6. A method for measuring and calibrating the aberration of the full transmission path of a laser beam, the measurement and calibration method is implemented based on the aberration measurement and calibration system according to claim 1, characterized in that, the measurement and calibration method includes the following steps: S1, based on the target beam, perform wavefront measurement and closed-loop calibration on the first group of adaptive optical components, obtain the target optical path aberration and correct it; S2, based on the auxiliary beam, perform wavefront measurement and closed-loop calibration on the second group of adaptive optical components, and complete the transfer of the target optical path aberration; S3, based on the emission beam, perform wavefront measurement and closed-loop calibration on the third group of adaptive optical components, obtain the aberration of the full transmission path of the beam including the emission optical path and the reflecting surface of the dichroic mirror, and correct it.

7. The measurement and calibration method according to claim 6, characterized in that, in the step S1, the first group of adaptive optical components includes a first wavefront modulator, a first wavefront detector and a first wavefront controller; after the target beam is transmitted through the second dichroic mirror, it is reflected by the first wavefront modulator and the first dichroic mirror in sequence and enters the first wavefront detector. After being corrected by the first group of adaptive optical components, the first wavefront modulator carries the target optical path aberration.

8. The measurement and calibration method according to claim 7, characterized in that, in the step S2, the second group of adaptive optical components includes a second wavefront modulator, a second wavefront detector and a second wavefront controller; the auxiliary beam is reflected by the third dichroic mirror, the second wavefront modulator, the second dichroic mirror and the first wavefront modulator in sequence, and then enters the second wavefront detector after being transmitted through the first dichroic mirror. After being subjected to closed-loop calibration by the second group of adaptive optical components, the second wavefront modulator carries the target optical path aberration.

9. The measurement and calibration method according to claim 8, characterized in that: In the step S3, the third group of adaptive optical components includes a third wavefront modulator, a third wavefront detector, and a third wavefront controller; the emitted light beam carrying the aberration of the emission light path is reflected by the third wavefront modulator, transmitted by the second dichroic mirror, reflected by the second wavefront modulator, and transmitted by the third dichroic mirror in sequence and then enters the third wavefront detector, and is subjected to closed-loop correction by the third group of adaptive optical components.

10. According to the measurement and correction method described in claim 6, it is characterized in that: The wavelength of the target beam is λ 1 = 1030 nm; The wavelength of the auxiliary beam is λ 2 = 970 nm; The wavelength of the emitted light beam is λ 3 = 1064 nm.

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