Pulsed power supply and excimer laser therefor

Abstract

The application discloses a kind of pulse power supply and corresponding excimer laser.The pulse power supply includes first power supply module, second power supply module, fast response module, high voltage module, first energy storage capacitor, second energy storage capacitor, current sampling module, first voltage sampling module and second voltage sampling module.The application adds fast response module on the basis of prior art, adjusts the voltage on the first energy storage capacitor according to real-time acquisition of relevant feedback current and voltage using the fast response module, solves the problem of slow response of high voltage module in the existing pulse power supply pulse discharge process, and ensures that the voltage output by the pulse power supply is stable and does not drop during the pulse discharge process of the pulse load.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of pulse power supply for laser, also relates to corresponding excimer laser, belong to laser technical field. BACKGROUND

[0002] Excimer laser is a kind of pulse gas laser for deep ultraviolet application scene, with high frequency, large energy, short wavelength, narrow linewidth etc., is the preferred laser light source of microelectronic lithography system.For the stability of excimer laser output energy, need to provide stable pulse power supply for discharge cavity.The pulse power supply needs to have fast response speed, high pulse peak power characteristics.

[0003] In prior art, high voltage module is usually used as pulse power supply, there is slow response problem in high voltage module during pulse discharge process, so that the pulse power supply appears to drop voltage, voltage drop problem brought in excimer laser pulse discharge process is often solved by increasing energy storage capacitor, and although increasing energy storage capacitor can reduce voltage drop in power supply process, but it cannot fundamentally solve the pulse power supply drop voltage problem in excimer laser pulse discharge process. SUMMARY

[0004] The primary technical problem to be solved by the present application is to provide a kind of pulse power supply for laser.

[0005] Another technical problem to be solved by the present application is to provide a kind of excimer laser comprising the above-mentioned pulse power supply.

[0006] In order to achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0007] According to the first aspect of the embodiment of the present application, a kind of pulse power supply is provided, including high voltage module, first fast response module, first energy storage capacitor, second energy storage capacitor, current sampling module and second voltage sampling module, the high voltage module is connected with the second energy storage capacitor, the second energy storage capacitor, the second voltage sampling module, the first fast response module and the first energy storage capacitor are connected with each other, the first fast response module is connected with the current sampling module, and the current sampling module is connected in series on the output loop of the first fast response module;

[0008] In the process of pulse load discharge, when the first fast response module judges that the feedback current collected by the current sampling module received first increases, then the voltage on the first energy storage capacitor changes in positive direction with the change of the feedback current, otherwise, the output voltage of the pulse power supply is adjusted and exited;

[0009] After the feedback current exits the regulation of the output voltage of the pulse power supply, the second voltage sampling module collects the voltage of the second energy storage capacitor, which is output as part of the output voltage of the pulse power supply to the first fast response module. If the first fast response module determines that the voltage reduction amplitude is large, the voltage on the first energy storage capacitor is controlled to change in the opposite direction of the change of the output voltage of the pulse power supply.

[0010] Preferably, the first fast response module comprises a second operational amplifier, a first comparator, a third resistor, a second resistor, a second comparator, an inverter, a control switch, a diode and an inductor.

[0011] The non-inverting input terminal of the second operational amplifier is connected to the output terminal of the second voltage sampling module, the inverting input terminal of the first operational amplifier is connected to the third reference voltage, the output terminal of the second operational amplifier is connected to one end of the third resistor, the non-inverting input terminal of the first comparator is connected to the output terminal of the current sampling module, the inverting input terminal of the first comparator is connected to the second reference voltage, the output terminal of the first comparator is connected to one end of the second resistor, the other end of the third resistor and the second resistor is connected to the inverting input terminal of the second comparator, the non-inverting input terminal of the second comparator is connected to a triangular wave, the output terminal of the second comparator is connected to the input terminal of the inverter, the output terminal of the inverter is connected to the control terminal of the control switch, the input terminal of the control switch is connected to the positive electrode of the first power supply module, the output terminal of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

[0012] According to a second aspect of the embodiment of the present application, a pulse power supply is provided, comprising a high-voltage module, a first energy storage capacitor, a second energy storage capacitor, a second fast response module, a current sampling module, a first voltage sampling module and a second voltage sampling module. The high-voltage module is connected to the second energy storage capacitor. The second energy storage capacitor, the second voltage sampling module, the first fast response module and the first energy storage capacitor are connected to each other. The first fast response module is connected to the current sampling module and the first voltage sampling module. The current sampling module is connected in series to the output loop of the first fast response module. The first voltage sampling module is connected to the output terminal of the pulse power supply.

[0013] In the pulse load discharging process, when the second fast response module judges that the feedback current collected by the first current sampling module received first increases, the voltage on the first energy storage capacitor is controlled to change in a positive direction with the change of the feedback current, otherwise, the adjustment of the output voltage of the pulse power supply is exited;

[0014] After the feedback current exits the adjustment of the output voltage of the pulse power supply, if the second fast response module judges that the output voltage of the pulse power supply collected by the first voltage sampling module received increases and / or the voltage on the second energy storage capacitor collected by the second voltage sampling module increases, the voltage on the first energy storage capacitor is controlled to change in a reverse direction with the change of the output voltage of the pulse power supply.

[0015] Alternatively, after the feedback current exits the adjustment of the output voltage of the pulse power supply, if the second fast response module judges that the decrease amplitude of the output voltage of the pulse power supply collected by the first voltage sampling module received becomes larger and / or the decrease amplitude of the voltage of the second energy storage capacitor collected by the second voltage sampling module becomes larger, the voltage on the first energy storage capacitor is controlled to change in a reverse direction with the change of the output voltage of the pulse power supply.

[0016] Preferably, the second fast response module comprises a first operational amplifier, a second operational amplifier, a first comparator, a first resistor, a second resistor, a third resistor, a second comparator, an inverter, a control switch, a diode and an inductor.

[0017] The non-inverting input of the first operational amplifier is connected to the first reference voltage, the inverting input of the first operational amplifier is connected to the output of the first voltage sampling module, the output of the first operational amplifier is connected to one end of the first resistor, the non-inverting input of the first comparator is connected to the output of the current sampling module, the inverting input of the first comparator is connected to the second reference voltage, the output of the first comparator is connected to one end of the second resistor, the non-inverting input of the second operational amplifier is connected to the output of the second voltage sampling module, the inverting input of the first operational amplifier is connected to the third reference voltage, the output of the second operational amplifier is connected to one end of the third resistor, the other ends of the first resistor, the second resistor, and the third resistor are connected to the inverting input of the second comparator, the non-inverting input of the second comparator is connected to a triangular wave, the output of the second comparator is connected to the input of the inverter, the output of the inverter is connected to the control end of the control switch, the input of the control switch is connected to the positive electrode of the first power supply module, the output of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

[0018] Preferably, the current sampling module is implemented using a current sensor.

[0019] Preferably, the first voltage sampling module and the second voltage sampling module are respectively implemented using voltage sensors.

[0020] Preferably, the control switch is implemented using a switching device.

[0021] According to a third aspect of the embodiments of the present invention, there is provided an excimer laser, comprising the above-mentioned pulse power supply.

[0022] The pulse power supply and the corresponding excimer laser provided by the present invention add a fast response module on the basis of the existing technology. The fast response module is used to adjust the voltage on the first energy storage capacitor according to the real-time collection of relevant feedback current and voltage, thereby solving the problem of slow response of the high-voltage module in the pulse discharge process of the existing pulse power supply and ensuring that the voltage output by the pulse power supply is stable and does not drop during the pulse discharge process of the pulse load. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The circuit diagram of the existing pulse power supply;

[0024] Figure 2 It is the working curve diagram of the existing pulse power supply;

[0025] Figure 3 A circuit diagram of the pulse power supply provided in Example 1 of the present invention;

[0026] Figure 4 A circuit schematic diagram of the first fast response module in the pulse power supply provided in Example 1 of the present invention;

[0027] Figure 5 A circuit diagram of a pulse power supply provided in Example 2 of the present invention;

[0028] Figure 6 This is a circuit schematic diagram of the second fast response module in the pulse power supply provided in Example 2 of the present invention. DETAILED DESCRIPTION

[0029] The technical content of the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] like Figure 1 As shown, when the existing high-voltage module (High Voltage Power Source, abbreviated as HVPS) is used as a pulse power supply, the larger the discharge energy storage capacitor C0 is, the smaller the voltage drop generated on the discharge energy storage capacitor C0 during the pulse discharge process. Since the response speed of the high-voltage module is slow, the capacitor can generally only be charged after the pulse ends. Therefore, when a pulse occurs quickly, the charging voltage of the high-voltage module on the discharge energy storage capacitor C0 during the pulse generation process is ignored.

[0031] like Figure 2 As shown, when the existing pulse power supply provides a stable pulse power supply for the discharge cavity, during the pulse discharge process, the pulse discharge load switch S1 is disconnected in the initial state, and the initial voltage on the discharge energy storage capacitor C0 is V0; at time t0, the pulse discharge load switch S1 is closed, and the discharge energy storage capacitor C0 begins to discharge the pulse load (excimer laser); at time t1, the pulse discharge load switch S1 is disconnected, and the discharge energy storage capacitor C0 finishes discharging the pulse load, and the voltage on the discharge energy storage capacitor C0 is V1 at this time; due to the slow response speed of the existing high-voltage module, during the entire pulse discharge process, it is considered that only the discharge energy storage capacitor C0 participates in the discharge, and the power of the entire pulse power supply can be calculated according to Q=1 / 2*C0*V0 2 Calculate the energy consumed in one pulse discharge cycle Q = 1 / 2*C0*V0 2 -1 / 2*C0*V1 2 =1 / 2*C0*(V0 2 -V1 2 ); then, the pulse discharge power P=1 / (t1-t0)*Q=1 / 2*(t1-t0)*C0*(V0 2 -V1 2); the pulse discharge power is provided by the discharge energy storage capacitor C0 voltage drop; when the pulse time is constant, if the discharge energy storage capacitor C0 voltage drop is to be reduced, the capacitance of the discharge energy storage capacitor C0 needs to be increased, if the capacitance is small, the discharge energy storage capacitor C0 voltage drop will increase, thereby reducing the discharge precision of the discharge energy storage capacitor C0; with the increase of the withstand voltage, the volume of the discharge energy storage capacitor C0 becomes very large, and various inconveniences exist in actual use.

[0032] Through the analysis of the existing pulse power supply in the process of pulsed discharge of excimer laser, it is not difficult to find that due to the slow response of the pulse power supply in the process of pulsed discharge, the pulse power supply appears voltage drop, and thus consumes certain energy. Therefore, in order to solve the problem of slow response in the process of pulsed discharge of the existing pulse power supply, and avoid the problem of voltage drop of the pulse power supply in the process of pulsed discharge of excimer laser, various pulse power supplies are provided, as shown in Figures 3-6 The embodiments are described in detail as follows.

[0033] Embodiment 1

[0034] As shown in Figure 3 The pulse power supply provided by the embodiment comprises a first power supply module V3, a second power supply module V2, a fast response module PS1, a high-voltage module, a first energy storage capacitor C1, a second energy storage capacitor C2, a current sampling module 1, a second voltage sampling module 3 and a pulse discharge switch K. The first power supply module V3 is connected with the fast response module PS1, the second power supply module V2 is connected with the high-voltage module, the positive electrode of the power supply of the fast response module PS1 is connected with one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, the fixed end of the pulse discharge switch K is connected with a pulse load, the pulse load, one end of the second energy storage capacitor C2 and the negative electrode of the power supply of the high-voltage module are grounded, the positive electrode of the power supply of the high-voltage module is connected with the other end of the first energy storage capacitor C1, the other end of the second energy storage capacitor C2 and the negative electrode of the power supply of the fast response module PS1. The current sampling module 1 is connected in series on the output loop of the fast response module PS1, the output end of the current sampling module 1 is connected with the first sampling end of the fast response module PS1, the input end of the second voltage sampling module 3 is connected with the other end of the second energy storage capacitor C2, the output end of the second voltage sampling module 3 is connected with the second sampling end of the fast response module PS1, and the neutral point of the second voltage sampling module 3 is grounded. The first power supply module V3 and the second power supply module V2 provide power supply voltage for the fast response module PS1 and the high-voltage module.

[0035] In the embodiment, the voltage on the first energy storage capacitor C1 and the second energy storage capacitor C2 is added as the output voltage of the pulse power supply, so as to provide the pulse power supply for the pulse load. The working principle of the pulse power supply is as follows:

[0036] When the pulse discharge switch K is in the off state, the pulse load is not discharged, and during this process, the output voltage of the high-voltage module has a ripple, so it is necessary to use the fast response module PS1 to adjust the output voltage of the pulse power supply according to the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3, so as to stabilize the output voltage of the pulse power supply and ensure the accuracy of the output voltage of the high-voltage module. At the same time, the fast response module PS1 and the high-voltage module not only charge the first energy storage capacitor C1 and the second energy storage capacitor C2, but also filter the charging voltage on the first energy storage capacitor C1 and the second energy storage capacitor C2.

[0037] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process, and during this process, the feedback current It on the output loop of the fast response module PS1 collected by the current sampling module 1 instantaneously increases a lot, so as to increase the voltage on the first energy storage capacitor C1 and increase the output voltage of the pulse power supply; when the feedback current It on the output loop of the fast response module PS1 collected by the current sampling module 1 decreases, the adjustment of the output voltage of the pulse power supply is exited. After the pulse discharge process of the pulse load and the feedback current It exits the adjustment of the output voltage of the pulse power supply, if the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 decreases by a large amplitude, the voltage on the first energy storage capacitor C1 is increased by using the fast response module PS1, so as to increase the output voltage of the pulse power supply.

[0038] Specifically, as shown in Figure 4 The fast response module PS1 includes a second operational amplifier U3, a first comparator U4, a third resistor R4, a second resistor R5, a second comparator U1, an inverter N, a control switch S, a diode D, and an inductor L. The non-inverting input terminal of the second operational amplifier U3 is connected to the output terminal of the second voltage sampling module 3, the inverting input terminal of the first operational amplifier U2 is connected to the third reference voltage Ur2, one end of the third resistor R4 is connected to the output terminal of the second operational amplifier U3, the non-inverting input terminal of the first comparator U4 is connected to the output terminal of the current sampling module 1, the inverting input terminal of the first comparator U4 is connected to the second reference voltage Ur3, one end of the first comparator U4 is connected to the second resistor R5, the other end of the third resistor R4 and the second resistor R5 is connected to the inverting input terminal of the second comparator U1, the non-inverting input terminal of the second comparator U1 is connected to a triangular wave, the output terminal of the second comparator U1 is connected to the input terminal of the inverter N, the output terminal of the inverter N is connected to the control terminal of the control switch S, the input terminal of the control switch S is connected to the positive electrode of the first power supply module V3, the output terminal of the control switch S is connected to the cathode of the diode D and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor C1 and the moving terminal of the pulse discharge switch K, the other end of the first energy storage capacitor C1 is connected to the anode of the diode D and the negative electrode of the first power supply module V3.

[0039] The third reference voltage Ur2 is a reference voltage of the high-voltage module output voltage.

[0040] The working principle of the fast response module PS1 is as follows: when the pulse discharge switch K is in an open state, the pulse load is not discharged. In this process, when the second voltage sampling module 3 collects the voltage Vt2 output by the high-voltage module and the voltage is greater than the third reference voltage Ur2, the second operational amplifier U3 outputs a voltage that is reduced through the third resistor R4. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle is increased, and the duty cycle output is reduced after the inverter N, so that the control switch S is turned on for a short time, the voltage on the first energy storage capacitor C1 is reduced, and the output voltage of the pulse power supply is reduced. When the second voltage sampling module 3 collects the voltage Vt2 on the second energy storage capacitor C2 and the voltage is less than the third reference voltage Ur2, the second operational amplifier U3 outputs a voltage that is increased through the third resistor R4. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle is reduced, and the duty cycle output is increased after the inverter N, so that the control switch S is turned on for a long time, the voltage on the first energy storage capacitor C1 is increased, and the output voltage of the pulse power supply is increased. At the same time, the first power supply module V3 charges the first energy storage capacitor C1 through the inductor L, and filters the charging voltage on the first energy storage capacitor C1.

[0041] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process, in which the first comparator U4 first receives the voltage VIt corresponding to the feedback current It collected by the current sampling module 1. If the voltage VIt exceeds the second reference voltage Ur3, the voltage output by the first comparator U4 through the second resistor R5 will rapidly increase. After the voltage is input to the second comparator U1 and compared with the triangular wave, the duty cycle output decreases significantly. After the duty cycle output is inverted by the inverter N, the duty cycle output is as large as possible, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is increased, thereby achieving the purpose of rapidly increasing the output voltage of the pulse power supply. When the voltage VIt corresponding to the feedback current It collected by the current sampling module 1 received by the first comparator U4 decreases to below the second reference voltage Ur3, the adjustment of the output voltage of the pulse power supply is exited. After the feedback current It exits the adjustment of the output voltage of the pulse power supply in the pulse discharge process of the pulse load, if the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 received by the second operational amplifier U3 is less than the third reference voltage Ur2, the voltage output by the second operational amplifier U3 through the third resistor R4 will increase. After the voltage is input to the second comparator U1 and compared with the triangular wave, the duty cycle output decreases, and the duty cycle output increases after being inverted by the inverter N, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is increased, thereby achieving the purpose of increasing the output voltage of the pulse power supply.

[0042] In summary, in the pulse discharge process of the pulse load, the feedback current in the output loop of the fast response module PS1 and the voltage output by the high-voltage module are collected in real time. The fast response module PS1 adjusts the voltage on the first energy storage capacitor C1 to change in a positive direction according to the change trend (mathematically represented as a first derivative) of the first obtained feedback current (to achieve the purpose of rapidly increasing the output voltage of the pulse power supply) or exits the adjustment of the output voltage of the pulse power supply. After the feedback current exits the adjustment of the output voltage of the pulse power supply, the fast response module PS1 adjusts the voltage on the first energy storage capacitor C1 to change in a reverse direction according to the change trend (mathematically represented as a first derivative) of the voltage Vt2 on the second energy storage capacitor C2 (as part of the output voltage of the pulse power supply), thereby solving the problem that the existing pulse power supply cannot guarantee the stability of the output voltage of the pulse power supply due to slow response in the pulse discharge process.

[0043] Embodiment 2

[0044] As Figure 5As shown, the pulse power supply provided by the embodiment comprises a first power supply module V3, a second power supply module V2, a fast response module PS1, a high voltage module, a first energy storage capacitor C1, a second energy storage capacitor C2, a current sampling module 1, a first voltage sampling module 2, a second voltage sampling module 3 and a pulse discharge switch K; the first power supply module V3 is connected to the fast response module PS1, the second power supply module V2 is connected to the high voltage module, the power supply positive pole of the fast response module PS1 is connected to one end of the first energy storage capacitor C1 and the moving end of the pulse discharge switch K, the fixed end of the pulse discharge switch K is connected to a pulse load, the pulse load, one end of the second energy storage capacitor C2 and the power supply negative pole of the high voltage module are grounded respectively, the power supply positive pole of the high voltage module is connected to the other end of the first energy storage capacitor C1, the other end of the second energy storage capacitor C2 and the power supply negative pole of the fast response module PS1; the current sampling module 1 is connected in series on the output loop of the fast response module PS1, the output end of the current sampling module 1 is connected to the first sampling end of the fast response module PS1, the input end of the first voltage sampling module 2 is connected to the voltage output end V, the output end of the first voltage sampling module 2 is connected to the second sampling end of the fast response module PS1, the input end of the second voltage sampling module 3 is connected to the other end of the second energy storage capacitor C2, the output end of the second voltage sampling module 3 is connected to the third sampling end of the fast response module PS1, and the neutral points of the first voltage sampling module 2 and the second voltage sampling module 3 are grounded. Among them, the first power supply module V3 and the second power supply module V2 provide power supply voltage for the fast response module PS1 and the high voltage module.

[0045] In the embodiment, the voltage on the first energy storage capacitor C1 and the second energy storage capacitor C2 is added as the output voltage of the pulse power supply, so as to provide the pulse power supply for the pulse load. The working principle of the pulse power supply is as follows:

[0046] When the pulse discharge switch K is in the off state, the pulse load is not discharged, and in this process, since the output voltage of the pulse power supply and the high voltage module fluctuates, it is necessary to use the fast response module PS1 to adjust the output voltage of the pulse power supply according to the voltage Vt1 output by the voltage output end V of the pulse power supply collected by the first voltage sampling module 2 and the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3, so as to stabilize the output voltage of the pulse power supply. At the same time, the fast response module PS1 and the high voltage module not only charge the first energy storage capacitor C1 and the second energy storage capacitor C2, but also filter the charging voltage on the first energy storage capacitor C1 and the second energy storage capacitor C2.

[0047] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process, in which the output loop feedback current It of the fast response module PS1 collected by the current sampling module 1 increases instantaneously, the voltage on the first energy storage capacitor C1 is increased, and the output voltage of the pulse power supply is increased; when the output loop feedback current It of the fast response module PS1 collected by the current sampling module 1 decreases, the adjustment of the output voltage of the pulse power supply is exited. After the pulse discharge process of the pulse load and the feedback current It exits the adjustment of the output voltage of the pulse power supply, the voltage Vt1 of the voltage output end Voutput of the pulse power supply collected by the first voltage sampling module 2 and / or the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 increases with the increase of the output voltage of the high-voltage module (i.e. the voltage Vt1 increases), so the voltage on the first energy storage capacitor C1 needs to be decreased by the fast response module PS1, so that the output voltage of the pulse power supply is decreased; similarly, in the pulse discharge process of the pulse load, if the decrease amplitude of the voltage Vt1 of the voltage output end Voutput of the pulse power supply collected by the first voltage sampling module 2 and / or the decrease amplitude of the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 becomes larger, the voltage on the first energy storage capacitor C1 is increased, so that the output voltage of the pulse power supply is increased.

[0048] Specifically, as Figure 6As shown, the fast response module PS1 includes a first operational amplifier U2, a second operational amplifier U3, a first comparator U4, a first resistor R3, a second resistor R5, a third resistor R4, a second comparator U1, an inverter N, a control switch S, a diode D and an inductor L; the non-inverting input terminal of the first operational amplifier U2 is connected with a first reference voltage Ur1, the inverting input terminal of the first operational amplifier U2 is connected with the output terminal of the first voltage sampling module 2, the output terminal of the first operational amplifier U2 is connected with one end of the first resistor R3, the non-inverting input terminal of the first comparator U4 is connected with the output terminal of the current sampling module 1, the inverting input terminal of the first comparator U4 is connected with a second reference voltage Ur3, one end of the output terminal of the first comparator U4 is connected with the second resistor R5, the non-inverting input terminal of the second operational amplifier U3 is connected with the output terminal of the second voltage sampling module 3, the inverting input terminal of the first operational amplifier U2 is connected with a third reference voltage Ur2, the output terminal of the second operational amplifier U3 is connected with one end of the third resistor R4, the other end of the first resistor R3, the second resistor R5 and the third resistor R4 is connected with the inverting input terminal of the second comparator U1, the non-inverting input terminal of the second comparator U1 is connected with a triangular wave, the output terminal of the second comparator U1 is connected with the input terminal of the inverter N, the output terminal of the inverter N is connected with the control terminal of the control switch S, the input terminal of the control switch S is connected with the positive pole of the first power supply module V3, the output terminal of the control switch S is connected with the cathode of the diode D and one end of the inductor, the other end of the inductor is connected with one end of the first energy storage capacitor C1 and the moving terminal of the pulse discharge switch K, the other end of the first energy storage capacitor C1 is connected with the anode of the diode D and the negative pole of the first power supply module V3.

[0049] The working principle of the fast response module PS1 in the embodiment is as follows: when the pulse discharge switch K is in the off state, the pulse load is not discharged. During the process, when the voltage Vt1 output by the voltage output end V of the pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is greater than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will decrease. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle becomes larger, and after the inverter N, the duty cycle output decreases, so that the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the pulse power supply. When the voltage Vt1 output by the voltage output end V of the pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is less than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will increase. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle decreases, and after the inverter N, the duty cycle output increases, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the pulse power supply. At the same time, when the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 received by the second operational amplifier U3 is greater than the third reference voltage Ur2, the voltage output by the second operational amplifier U3 through the third resistor R4 will decrease. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle becomes larger, and after the inverter N, the duty cycle output decreases, so that the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is controlled to decrease, thereby achieving the purpose of reducing the output voltage of the pulse power supply. When the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 received by the second operational amplifier U3 is less than the third reference voltage Ur2, the voltage output by the second operational amplifier U3 through the third resistor R4 will increase. After the voltage is input to the second comparator U1 and compared with the triangular wave, the output duty cycle decreases, and after the inverter N, the duty cycle output increases, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is controlled to increase, thereby achieving the purpose of increasing the output voltage of the pulse power supply. In addition, the first power supply module V3 charges the first energy storage capacitor C1 through the inductor L, and filters the charging voltage on the first energy storage capacitor C1.

[0050] When the pulse discharge switch K is in the on state, the pulse load enters the discharge process, in which the first comparator U4 first receives the voltage VIt corresponding to the feedback current It collected by the current sampling module 1. If the voltage VIt exceeds the second reference voltage Ur3, the voltage output by the first comparator U4 through the second resistor R5 will rapidly increase. After the voltage is input to the second comparator U1 and compared with the triangular wave, the duty cycle output is greatly reduced, and after the inverter N, the duty cycle output is as large as possible, so that the control switch S is turned on for a long time, and the voltage on the first energy storage capacitor C1 is increased, thereby achieving the purpose of rapidly increasing the output voltage of the pulse power supply. When the voltage VIt corresponding to the feedback current It collected by the current sampling module 1 received by the first comparator U4 decreases to below the second reference voltage Ur3, the adjustment of the output voltage of the pulse power supply is exited. After the pulse discharge process of the pulse load and the feedback current It exits the adjustment of the output voltage of the pulse power supply, the voltage Vt1 output by the voltage output end V of the pulse power supply collected by the first voltage sampling module 2 and / or the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 adjust the voltage on the first energy storage capacitor C1. When the following three conditions occur, the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is reduced, thereby achieving the purpose of reducing the output voltage of the pulse power supply. The first condition: when the voltage Vt1 output by the voltage output end V of the pulse power supply collected by the first voltage sampling module 2 received by the first operational amplifier U2 is greater than the first reference voltage Ur1, the voltage output by the first operational amplifier U2 through the first resistor R3 will decrease. After the voltage is input to the second comparator U1 and compared with the triangular wave, the duty cycle output increases, and after the inverter N, the duty cycle output decreases, so that the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is reduced, thereby achieving the purpose of reducing the output voltage of the pulse power supply. The second condition: when the voltage Vt2 on the second energy storage capacitor C2 collected by the second voltage sampling module 3 received by the second operational amplifier U3 is greater than the third reference voltage Ur2, the voltage output through the third resistor R4 will decrease. After the voltage is input to the second comparator U1 and compared with the triangular wave, the duty cycle output increases, and after the inverter N, the duty cycle output decreases, so that the control switch S is turned on for a short time, and the voltage on the first energy storage capacitor C1 is reduced, thereby achieving the purpose of reducing the output voltage of the pulse power supply.The third case: if the first voltage sampling module 2 collects the voltage Vt1 of the voltage output terminal V of the pulse power supply, and the voltage Vt2 of the second energy storage capacitor C2 collected by the second voltage sampling module 3 is greater than the third reference voltage Ur2, the voltage output by the first resistor R3 and the third resistor R4 will decrease, the voltage input to the second comparator U1 after the comparison with the triangular wave will increase the duty cycle, and the duty cycle output after the inverter N will decrease, so as to make the control switch S conduct for a short time, control the voltage of the first energy storage capacitor C1 to decrease, and thus achieve the purpose of decreasing the output voltage of the pulse power supply. When the above three cases are opposite, the control switch S conducts for a long time, and the voltage of the first energy storage capacitor C1 increases, so as to achieve the purpose of increasing the output voltage of the pulse power supply.

[0051] In summary, in the pulse discharge process of the pulse load, the feedback current It of the output loop of the fast response module PS1, the voltage output by the voltage output terminal V of the pulse power supply, and the voltage output by the high-voltage module are collected in real time. The fast response module PS1 adjusts the voltage of the first energy storage capacitor C1 to change in a positive direction according to the change trend (mathematically represented as a first derivative) of the first obtained feedback current It (to achieve the purpose of rapidly increasing the output voltage of the pulse power supply) or exits the adjustment of the output voltage of the pulse power supply. After the feedback current It exits the adjustment of the output voltage of the pulse power supply, the fast response module PS1 adjusts the voltage of the first energy storage capacitor C1 to change in a reverse direction according to the change of the output voltage of the pulse power supply. When the fast response module PS1 judges that the voltage output by the voltage output terminal V increases and / or the voltage Vt2 of the second energy storage capacitor C2 increases, the voltage of the first energy storage capacitor C1 is adjusted to change in a reverse direction according to the change of the output voltage of the pulse power supply. When the fast response module PS1 judges that the decrease amplitude of the voltage output by the voltage output terminal V becomes large and / or the decrease amplitude of the voltage Vt2 of the second energy storage capacitor C2 becomes large, the voltage of the first energy storage capacitor C1 is adjusted to change in a reverse direction according to the change of the output voltage of the pulse power supply.

[0052] On the basis of the above embodiment, the application further provides an excimer laser. The excimer laser comprises the above-mentioned various pulse power supplies.

[0053] It should be noted that the current sampling module 1 in the embodiment of the application can be implemented by using a current sensor. The first voltage sampling module 2 and the second voltage sampling module 3 can be respectively implemented by using a voltage sensor.

[0054] The pulse power supply provided by the present application adds a fast response module on the basis of the prior art, and utilizes the fast response module to adjust the voltage on the first energy storage capacitor according to the real-time collection of relevant feedback current and voltage, so as to solve the problem of slow response of the high-voltage module in the pulse discharge process of the existing pulse power supply, and ensure that the voltage output by the pulse power supply is stable and does not drop in the pulse discharge process of the pulse load.

[0055] The pulse power supply provided by the present application adds a fast response module on the basis of the prior art, and utilizes the fast response module to adjust the voltage on the first energy storage capacitor according to the real-time collection of relevant feedback current and voltage, so as to solve the problem of slow response of the high-voltage module in the pulse discharge process of the existing pulse power supply, and ensure that the voltage output by the pulse power supply is stable and does not drop in the pulse discharge process of the pulse load. The pulse power supply provided by the present application adds a fast response module on the basis of the prior art, and utilizes the fast response module to adjust the voltage on the first energy storage capacitor according to the real-time collection of relevant feedback current and voltage, so as to solve the problem of slow response of the high-voltage module in the pulse discharge process of the existing pulse power supply, and ensure that the voltage output by the pulse power supply is stable and does not drop in the pulse discharge process of the pulse load.

Claims

1. A pulsed power supply comprising a high voltage module, characterized in that The application also comprises a fast response module, a first power supply module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module and a second voltage sampling module; wherein the first power supply module is connected to the fast response module, the positive electrode of the power supply of the fast response module is connected to one end of the first energy storage capacitor and the moving end of the pulse discharge switch, the fixed end of the pulse discharge switch is connected to the pulse load, the pulse load, one end of the second energy storage capacitor and the negative electrode of the power supply of the high-voltage module are grounded, the positive electrode of the power supply of the high-voltage module is connected to the other end of the first energy storage capacitor, the other end of the second energy storage capacitor and the negative electrode of the power supply of the fast response module; the output end of the current sampling module is connected to the first sampling end of the fast response module, the input end of the second voltage sampling module is connected to the other end of the second energy storage capacitor, and the output end of the second voltage sampling module is connected to the second sampling end of the fast response module. During the discharge process of the pulse load, when the fast response module judges that the feedback current collected by the current sampling module received first increases, the voltage on the first energy storage capacitor is controlled to change in a positive direction with the change of the feedback current, otherwise, the adjustment of the output voltage of the pulse power supply is exited. After the feedback current exits the adjustment of the output voltage of the pulse power supply, the voltage of the second energy storage capacitor collected by the second voltage sampling module is output to the fast response module as part of the output voltage of the pulse power supply, and if the fast response module judges that the voltage reduction amplitude becomes larger, the voltage on the first energy storage capacitor is controlled to change in a reverse direction with the change of the output voltage of the pulse power supply.

2. The pulse power supply of claim 1, wherein: the fast response module comprises a second operational amplifier, a first comparator, a third resistor, a second resistor, a second comparator, an inverter, a control switch, a diode and an inductor; wherein the non-inverting input end of the second operational amplifier is connected to the output end of the second voltage sampling module, the inverting input end of the second operational amplifier is connected to a third reference voltage, the output end of the second operational amplifier is connected to one end of the third resistor, the non-inverting input end of the first comparator is connected to the output end of the current sampling module, the inverting input end of the first comparator is connected to a second reference voltage, the output end of the first comparator is connected to one end of the second resistor, the other end of the third resistor and the second resistor is connected to the inverting input end of the second comparator, the non-inverting input end of the second comparator is connected to a triangular wave, the output end of the second comparator is connected to the input end of the inverter, the output end of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

3. A pulsed power supply comprising a high voltage module, characterized in that The application also comprises a fast response module, a first power supply module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module, a first voltage sampling module and a second voltage sampling module; wherein the first power supply module is connected to the fast response module, the positive electrode of the power supply of the fast response module is connected to one end of the first energy storage capacitor and the moving end of the pulse discharge switch, the fixed end of the pulse discharge switch is connected to the pulse load, the pulse load, one end of the second energy storage capacitor and the negative electrode of the power supply of the high-voltage module are grounded respectively, the positive electrode of the power supply of the high-voltage module is connected to the other end of the first energy storage capacitor, the other end of the second energy storage capacitor and the negative electrode of the power supply of the fast response module; the output end of the current sampling module is connected to the first sampling end of the fast response module, the input end of the first voltage sampling module is connected to the voltage output end, the output end of the first voltage sampling module is connected to the second sampling end of the fast response module, the input end of the second voltage sampling module is connected to the other end of the second energy storage capacitor, and the output end of the second voltage sampling module is connected to the third sampling end of the fast response module. During the discharge process of the pulse load, when the fast response module judges that the feedback current collected by the current sampling module received first increases, the voltage on the first energy storage capacitor is controlled to change in a positive direction with the change of the feedback current, otherwise, the adjustment on the output voltage of the pulse power supply is exited. After the feedback current exits the adjustment on the output voltage of the pulse power supply, if the fast response module judges that the output voltage of the pulse power supply collected by the first voltage sampling module received and / or the voltage on the second energy storage capacitor collected by the second voltage sampling module increases, the voltage on the first energy storage capacitor is controlled to change in a reverse direction with the change of the output voltage of the pulse power supply.

4. A pulsed power supply comprising a high voltage module, characterized in that The application also comprises a fast response module, a first power supply module, a first energy storage capacitor, a second energy storage capacitor, a current sampling module, a first voltage sampling module and a second voltage sampling module; wherein the first power supply module is connected to the fast response module, the positive electrode of the power supply of the fast response module is connected to one end of the first energy storage capacitor and the moving end of the pulse discharge switch, the fixed end of the pulse discharge switch is connected to the pulse load, the pulse load, one end of the second energy storage capacitor and the negative electrode of the power supply of the high-voltage module are grounded respectively, the positive electrode of the power supply of the high-voltage module is connected to the other end of the first energy storage capacitor, the other end of the second energy storage capacitor and the negative electrode of the power supply of the fast response module; the output end of the current sampling module is connected to the first sampling end of the fast response module, the input end of the first voltage sampling module is connected to the voltage output end, the output end of the first voltage sampling module is connected to the second sampling end of the fast response module, the input end of the second voltage sampling module is connected to the other end of the second energy storage capacitor, and the output end of the second voltage sampling module is connected to the third sampling end of the fast response module. During the discharge process of the pulse load, when the fast response module judges that the feedback current collected by the current sampling module received first increases, the voltage on the first energy storage capacitor is controlled to change in a positive direction with the change of the feedback current, otherwise, the adjustment on the output voltage of the pulse power supply is exited. If the rapid response module determines that the decrease amplitude of the output voltage of the pulse power supply collected by the first voltage sampling module and / or the decrease amplitude of the voltage of the second energy storage capacitor collected by the second voltage sampling module is large after the feedback current exits the regulation of the output voltage of the pulse power supply, the voltage on the first energy storage capacitor is controlled to change in the opposite direction of the change of the output voltage of the pulse power supply.

5. The pulse power supply of claim 3 or 4, wherein: the rapid response module comprises a first operational amplifier, a second operational amplifier, a first comparator, a first resistor, a second resistor, a third resistor, a second comparator, an inverter, a control switch, a diode, and an inductor; wherein the non-inverting input terminal of the first operational amplifier is connected to a first reference voltage, the inverting input terminal of the first operational amplifier is connected to the output terminal of the first voltage sampling module, the output terminal of the first operational amplifier is connected to one end of the first resistor, the non-inverting input terminal of the first comparator is connected to the output terminal of the current sampling module, the inverting input terminal of the first comparator is connected to a second reference voltage, one end of the first comparator is connected to one end of the second resistor, the non-inverting input terminal of the second operational amplifier is connected to the output terminal of the second voltage sampling module, the inverting input terminal of the first operational amplifier is connected to a third reference voltage, the output terminal of the second operational amplifier is connected to one end of the third resistor, the other ends of the first resistor, the second resistor, and the third resistor are connected to the inverting input terminal of the second comparator, the non-inverting input terminal of the second comparator is connected to a triangular wave, the output terminal of the second comparator is connected to the input terminal of the inverter, the output terminal of the inverter is connected to the control terminal of the control switch, the input terminal of the control switch is connected to the positive electrode of the first power supply module, the output terminal of the control switch is connected to the cathode of the diode and one end of the inductor, the other end of the inductor is connected to one end of the first energy storage capacitor, and the other end of the first energy storage capacitor is connected to the anode of the diode and the negative electrode of the first power supply module.

6. The pulse power supply of claim 1, 3, or 4, wherein: the current sampling module is implemented by a current sensor.

7. The pulse power supply of claim 1, 3, or 4, wherein: the first voltage sampling module and the second voltage sampling module are respectively implemented by voltage sensors.

8. The pulse power supply of claim 2 or 5, wherein: the control switch is implemented by a switching device.

9. An excimer laser characterized by a pulse power supply as claimed in any one of claims 1 to 8.

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