An OLED and substrate post-cleaning air drying device

Abstract

The present invention discloses a device for carrying and transporting OLED and substrates for air-drying after cleaning, comprising an air-drying platform and an air-drying arm. The air-drying platform comprises two groups, and the two groups of air-drying platforms are arranged at intervals in a straight line direction; the air-drying arm is arranged on the side of the air-drying platform and extends in a straight line along the setting direction of the two groups of air-drying platforms; the air-drying platform and the air-drying arm are hollow supporting structures. The OLED substrate to be air-dried is placed on the air-drying platform, and the air-drying arm passes through the air-drying platform from below to support the OLED substrate and then rises to the top of the air-drying platform. After moving in a straight line through the air-drying assembly arranged on the side of the air-drying platform for air-drying, the air-drying arm descends so that the OLED substrate is supported by the air-drying platform, and the air-drying arm passes through the air-drying platform from top to bottom and returns in a straight line from the bottom of the air-drying platform. The present invention adopts a hollow vacuum carrying and transporting structure, which simultaneously completes the upper and lower air-drying actions during the carrying and transporting process, and realizes independent adsorption and fixation of the OLED and FPC, ensuring position stability during the transport and air-drying process.

Description

Technical Field

[0001] The present invention relates to the field of automation equipment, and in particular to an OLED and substrate post-cleaning air-drying device. Background Art

[0002] In the field of flat panel display device production equipment, the components involved include glass substrates, cover plates, FPCs, and various optical film materials. When assembling and bonding the components of flat panel display devices, pre-processing steps are required. For example, the cleaning step is an essential front-end step when assembling and bonding flat panel display devices. Its function is to clean the screen surface. In the OLED screen production process, there is an intermediate layer of glue between the OLED and the upper substrate. This intermediate layer of glue needs to be removed by laser stripping. The laser is irradiated on the substrate surface, passes through the substrate, and then shoots onto the intermediate glue layer to achieve the function of stripping the glue layer. In order to ensure that the laser effectively penetrates the substrate and reduce the obstruction caused by debris on the substrate surface, the substrate surface needs to be cleaned before laser stripping. Since the debris sticking to the substrate surface is difficult to remove, the generally used process is grinding cleaning, that is, the grinding disk is pressed against the substrate surface and the substrate surface is ground by the rotation of the grinding disk to separate the debris from the substrate surface and then remove it.

[0003] Since the OLED substrate needs to be sprayed and rinsed with liquid or a mixture of gas and liquid during the cleaning process to help improve the cleanliness of the cleaning; therefore, liquid will remain on the surface of the substrate after the grinding and cleaning is completed. The residual liquid needs to be dried and removed before entering the next process. The drying process generally adopted is air drying, and the upper and lower surfaces need to be dried at the same time during drying. Traditional air drying equipment cannot complete the drying of the upper and lower surfaces of the OLED while conveying the sheet OLED; and because the strong wind during air drying will impact the OLED, if the OLED is conveyed during the air drying process without fixed measures, it is very easy to be blown by the strong wind, resulting in position displacement, affecting the air drying and conveying. In addition, since the side of the OLED is connected to the FPC, the shape structure and material properties of the FPC are different from those of the OLED. Therefore, the OLED and FPC need to adopt different load-bearing and adsorption / transportation mechanism designs during the conveying, air drying and adsorption and transportation processes. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to address the deficiencies of the above-mentioned existing technologies and provide an OLED and substrate post-cleaning air-drying device that adopts a hollow vacuum carrying and transporting structure, synchronously completes the upper and lower surface air-drying actions during the carrying and transporting process, and realizes independent adsorption and fixation of OLED and FPC, ensuring the position stability during the transport and air-drying process.

[0005] The technical solution adopted by the present invention is as follows: A device for air-drying OLED and substrates after cleaning, comprising an air-drying platform and an air-drying lifting arm, wherein the air-drying platform comprises two groups, and the two groups of air-drying platforms are arranged at intervals in a straight line direction; the air-drying lifting arm is arranged on the side of the air-drying platform and extends in a straight line along the setting direction of the two groups of air-drying platforms; the air-drying platform and the air-drying lifting arm are hollow supporting structures, and the OLED substrate to be air-dried is placed on the air-drying platform, and the air-drying lifting arm passes through the air-drying platform from below to support the OLED substrate and then rises to above the air-drying platform, moves in a straight line through the air-drying component arranged on the side of the air-drying platform for air-drying, and then the air-drying lifting arm descends so that the OLED substrate is supported by the air-drying platform, and the air-drying lifting arm passes through the air-drying platform from top to bottom, and returns in a straight line from below the air-drying platform to carry the next group of OLED substrates.

[0006] Preferably, the air-drying platform includes a platform support, a platform bracket, an OLED bearing part and an FPC bearing part, wherein the above-mentioned platform support is vertically arranged in the air-drying box; the above-mentioned platform bracket is horizontally arranged on the platform support, the platform bracket is a double-layer structure, and a moving channel is formed in the middle of the platform bracket; the above-mentioned OLED bearing part is arranged on one side of the platform bracket, and the OLED and its substrate are supported and adsorbed and fixed by the OLED bearing part, and the FPC bearing part is arranged on the other side of the platform bracket, and the FPC connected to one side of the OLED is supported by the FPC bearing part, and the OLED bearing part and the FPC bearing part are upper and lower hollow structures to facilitate the movement and upper and lower air-drying of the OLED substrate.

[0007] Preferably, the OLED supporting part includes an OLED supporting plate, an OLED support bar, a vacuum joint and an OLED suction nozzle, wherein the above-mentioned OLED supporting plate includes at least two pieces, the OLED supporting plate is arranged on the inner side of the carrier bracket, and a through groove is provided in the middle of the OLED supporting plate; the above-mentioned OLED support bar includes at least two, the OLED support bar is arranged on the OLED supporting plate in parallel and spaced along both sides of the through groove, adjacent OLED support bars form a strip-shaped gap running through from top to bottom, and the OLED support bars form an OLED supporting area on the OLED supporting plate; the above-mentioned OLED supporting plate and OLED support bar are respectively provided with air paths inside, and the air paths of the OLED supporting plate and the OLED support bar are connected; the above-mentioned vacuum joint is arranged on the side of the OLED supporting plate and is connected with the air path inside the OLED supporting plate; the above-mentioned OLED suction nozzle includes at least two, the OLED suction nozzle is arranged on the OLED support bar and is connected with the air path inside the OLED support bar, and a vacuum negative pressure is generated at the OLED suction nozzle to suck and fix the OLED substrate downward.

[0008] Preferably, the FPC bearing portion includes an FPC bearing board, which includes at least two FPC bearing boards. The FPC bearing boards are horizontally arranged on the outside of the bearing bracket corresponding to the OLED bearing boards, and at least two strip-shaped gaps are opened on the FPC bearing boards.

[0009] Preferably, the air-drying moving arm includes a linear module, a slide, a lifting motor, a supporting component, an OLED moving component and an FPC moving component, wherein the linear module is arranged on the side of the air-drying platform along the linear direction; the slide is slidably connected to the linear module and driven by the linear module; the lifting motor is arranged on one side of the slide; the supporting component is slidably arranged on the other side of the slide along the vertical direction and is connected to the output end of the lifting motor, and the lifting motor drives the supporting component to move up and down; the OLED moving component is arranged on one side of the supporting component, and the FPC moving component is arranged on the On the other side; at the first set of air-drying platforms, the OLED moving components and the FPC moving components move upward through the through slots and strip gaps of the air-drying platforms. The OLED moving components hold and adsorb the OLED, and the FPC moving components hold the FPC, driving the OLED and FPC to move synchronously in a straight line. After the air-drying components air-dry the upper and lower surfaces of the OLED and FPC, the OLED and FPC are placed on the air-drying platforms at the cache station; the OLED moving components and the FPC moving components pass through the through slots and strip gaps of the air-drying platforms and move down into the moving channel, and return in a straight line to the bottom of the previous set of air-drying platforms in the moving channel.

[0010] Preferably, the supporting component includes a lifting seat and a support rod, wherein the lifting seat is slidably connected to the other side of the slide seat in the vertical direction and is connected to the output end of the lifting motor; the support rod includes at least two, the support rods are horizontally spaced and connected to the upper part of the lifting seat, and an air path is provided inside the support rods.

[0011] Preferably, the OLED transport component includes an OLED transport support bar, a transport vacuum joint and a transport nozzle, wherein the above-mentioned OLED transport support bar includes at least two, and the OLED transport support bars are arranged on the support rod in parallel and at intervals, and extend horizontally to the left and right sides of the support rod to form an OLED support area; an air path is provided inside the OLED transport support bar, and the air path is connected to the air path inside the support rod; the above-mentioned transport vacuum joint is arranged on the support rod and connected to the air path of the support rod; the above-mentioned transport nozzle includes at least two, and the transport nozzle is arranged on the OLED transport support bar and connected to the air path of the OLED transport support bar, and a vacuum negative pressure is generated at the transport nozzle to adsorb the OLED substrate.

[0012] Preferably, the FPC moving component includes an FPC moving support bar and a moving suction nozzle. The FPC moving support bar includes at least two FPC moving supports, which are arranged on the support rod in parallel and at intervals, and extend horizontally to the left and right sides of the support rod to form an FPC support area; an air path is provided inside the FPC moving support bar, and the air path is connected to the air path inside the support rod. A moving suction nozzle is provided on the FPC moving support bar, and the moving suction nozzle is connected to the air path inside the FPC moving support bar.

[0013] The beneficial effects of the present invention are:

[0014] The present invention innovates to address the deficiencies and defects of the existing technology and designs an OLED and substrate post-cleaning air-drying device that adopts a hollow vacuum carrying and transporting structure, which simultaneously completes the upper and lower surface air-drying actions during the carrying and transporting process, and realizes independent adsorption and fixation of OLED and FPC, ensuring the position stability during the transport and air-drying process.

[0015] In order to solve the problems of upper and lower surface air drying, OLED stability during transportation and air drying, and independent bearing and adsorption of OLED and FPC, the present invention is innovatively designed with an air drying carrier and an air drying lifting arm, and upper and lower air drying components are set between the air drying station and the cache station; the air drying carrier and the air drying lifting arm of the present invention adopt an upper and lower hollow structure design as a whole, and the air drying carrier and the air drying lifting arm move in an interlaced manner in the vertical direction, thereby ensuring unobstructed air drying of the upper and lower surfaces of the OLED, and realizing the lifting, support and placement of the OLED; in addition, the OLED bearing area or FPC bearing area of the air drying carrier and the air drying lifting arm also has a vacuum adsorption function. When the air drying carrier or the air drying lifting arm lifts and supports the OLED or FPC, a downward vacuum negative pressure adsorption force is generated, and the vacuum negative pressure adsorption force realizes the fixation of the OLED position, ensuring the stability of transportation and air drying.

[0016] Specifically, the air-drying platform of the present invention adopts a platform bracket with an upper and lower double-layer structure design as the carrying body, the lower part of the platform bracket forms a moving channel, the upper part of the platform bracket is a carrying plane, and is provided with an OLED carrying component and an FPC carrying component. The OLED carrying component is mainly based on the OLED carrying board, including two OLED carrying boards arranged in parallel, and a through groove is opened in the middle of the OLED carrying board to facilitate the air-drying moving arm to pass up and down; the OLED carrying board is provided with a plurality of OLED branches at parallel intervals near both sides of the through groove, and a gap space is formed between adjacent OLED branches to facilitate the air-drying moving arm to pass up and down; an OLED carrying area is formed between the OLED carrying board and the OLED branches. In addition, the present invention further provides interconnected air paths inside the OLED carrier board and the OLED support strips. A vacuum connector is connected to the side of the OLED carrier board to facilitate external connection to a vacuum generator. A plurality of OLED suction nozzles are arranged on the OLED support strips. The vacuum connector and the OLED suction nozzles are respectively connected to the air paths inside the OLED carrier board and the OLED support strips, thereby generating a vacuum negative pressure at the OLED suction nozzles to downwardly absorb and fix the OLED placed on the OLED support strips; the FPC carrier portion is close to one side of the OLED carrier portion. The FPC carrier portion is an FPC carrier plate with a plurality of strip-shaped slits, which is used to support the FPC on one side of the OLED and ensure that it can be air-dried and moved up and down.

[0017] The air-drying moving arm of the present invention is arranged on the side of the air-drying platform as a whole along the straight direction. The air-drying moving arm uses a linear module and a slide as a linear driving structure. The linear module drives the slide to move back and forth between the two air-drying boxes in a straight line; a lifting seat is slidably provided on the side wall of the slide in the vertical direction, and the lifting seat is driven by a lifting motor to move up and down in the vertical direction; two support rods are provided in parallel and at intervals on the side of the lifting seat, and the support rods serve as the bearing body, and an OLED moving area and an FPC moving area are respectively provided thereon, which respectively realize the adsorption and moving of the OLED and its FPC; the present invention arranges OLED moving supports in parallel and at intervals on the support rods, and the OLED moving supports extend horizontally to the left and right sides of the support rod, and multiple OLED moving supports form a horizontal support surface for supporting the OLED; multiple FPC moving supports are provided on the side of the OLED moving support bar, and the FPC moving supports extend horizontally to the left and right sides of the support rod, forming a horizontal support surface for supporting the FPC. At the same time, the support rods, OLED transport support bars, and FPC transport support bars of the present invention are all provided with air circuits, and the three air circuits are interconnected. The sides of the support rods are provided with transport vacuum joints, and the OLED transport support bars and FPC transport support bars are provided with multiple transport suction nozzles. The transport vacuum joints and transport suction nozzles are all connected to the air circuits so as to generate vacuum negative pressure at the transport suction nozzles to downwardly absorb the OLED and FPC held on the OLED transport support bars and FPC transport support bars. When the air-drying lifting arm is working, the support bars pass up and down through the through slots of the air-drying platform. The OLED transport support bars and FPC transport support bars are interlaced with the OLED support bars and FPC supporting board of the air-drying platform, and the OLED and FPC on them are lifted from below the air-drying platform, or the lifted OLED and FPC are placed on the air-drying platform and then moved downward through the through slots. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is one of the three-dimensional structural diagrams of the present invention.

[0019] Figure 2 This is the second schematic diagram of the three-dimensional structure of the present invention.

[0020] Figure 3 This is the third schematic diagram of the three-dimensional structure of the present invention.

[0021] Figure 4 This is one of the three-dimensional structural schematic diagrams of the air-drying carrier of the present invention.

[0022] Figure 5 This is the second schematic diagram of the three-dimensional structure of the air-drying carrier of the present invention.

[0023] Figure 6 This is the third schematic diagram of the three-dimensional structure of the air-drying carrier of the present invention.

[0024] Figure 7 This is one of the three-dimensional structural schematic diagrams of the air-drying lifting arm of the present invention.

[0025] Figure 8 This is the second schematic diagram of the three-dimensional structure of the air-drying lifting arm of the present invention.

[0026] Figure 9 This is the third schematic diagram of the three-dimensional structure of the air-drying lifting arm of the present invention. DETAILED DESCRIPTION

[0027] The present invention will be further described below with reference to the accompanying drawings:

[0028] like Figures 1 to 9 As shown, the technical solution adopted by the present invention is as follows: an OLED and substrate post-cleaning air-drying device, comprising an air-drying platform 2 and an air-drying lifting arm 3, wherein the above-mentioned air-drying platform 2 includes two groups, and the two groups of air-drying platforms 2 are arranged at intervals in a straight line direction; the above-mentioned air-drying lifting arm 3 is arranged on the side of the air-drying platform 2, and extends in a straight line along the setting direction of the two groups of air-drying platforms 2; the air-drying platform 2 and the air-drying lifting arm 3 are hollow supporting structures, and the OLED substrate to be air-dried is placed on the air-drying platform 2, and the air-drying lifting arm 3 passes through the air-drying platform 2 from below to support the OLED substrate and then rises to the top of the air-drying platform 2, and moves in a straight line through the air-drying component arranged on the side of the air-drying platform 2 for air-drying, and then the air-drying lifting arm 3 descends so that the OLED substrate is supported by the air-drying platform 2, and the air-drying lifting arm 3 passes through the air-drying platform 2 from top to bottom, and returns in a straight line from the bottom of the air-drying platform 2 to support the next group of OLED substrates.

[0029] The air-drying platform 2 includes a platform support 21, a platform bracket 22, an OLED bearing part and an FPC bearing part, wherein the above-mentioned platform support 21 is vertically arranged in the air-drying box; the above-mentioned platform bracket 22 is horizontally arranged on the platform support 21, and the platform bracket 22 is a double-layer structure with a moving channel A formed in the middle of the platform bracket 22; the above-mentioned OLED bearing part is arranged on one side of the platform bracket 22, and the OLED and its substrate are supported and adsorbed and fixed by the OLED bearing part, and the FPC bearing part is arranged on the other side of the platform bracket 22, and the FPC connected to one side of the OLED is supported by the FPC bearing part, and the OLED bearing part and the FPC bearing part are hollow structures in the upper and lower parts, so as to move and air-dry the OLED substrate up and down.

[0030] The OLED supporting portion includes an OLED supporting plate 23, an OLED support bar 24, a vacuum joint 25, and an OLED suction nozzle 26. The OLED supporting plate 23 includes at least two pieces, and the OLED supporting plate 23 is arranged on the inner side of the carrier bracket 22. A through groove B is provided in the middle of the OLED supporting plate 23; the OLED support bar 24 includes at least two pieces, and the OLED support bar 24 is arranged on both sides of the through groove B in parallel and spaced apart on the OLED supporting support plate 23. Adjacent OLED support bars 24 form a strip-shaped gap that runs through from top to bottom. The OLED support bars 24 are arranged on the OLED supporting plate 23. An OLED supporting area is formed on the board 23; air paths are respectively provided inside the OLED supporting board 23 and the OLED support bar 24, and the air paths of the OLED supporting board 23 and the OLED support bar 24 are connected; the vacuum joint 25 is provided on the side of the OLED supporting board 23 and is connected to the air path inside the OLED supporting board 23; the OLED suction nozzles 26 include at least two, and the OLED suction nozzles 26 are provided on the OLED support bar 24 and are connected to the air path inside the OLED support bar 24. A vacuum negative pressure is generated at the OLED suction nozzles 26 to suck and fix the OLED substrate downward.

[0031] The FPC supporting portion includes an FPC supporting board 27 . The FPC supporting board 27 includes at least two pieces. The FPC supporting board 27 is horizontally arranged outside the supporting bracket 22 corresponding to the OLED supporting board 23 . At least two strip-shaped gaps are opened on the FPC supporting board 27 .

[0032] The air-drying moving arm 3 includes a linear module 31, a slide 32, a lifting motor 33, a supporting component, an OLED moving component and an FPC moving component, wherein the linear module 31 is arranged on the side of the air-drying carrier 2 along the linear direction; the slide 32 is slidably connected to the linear module 31 and driven by the linear module 31; the lifting motor 33 is arranged on one side of the slide 32; the supporting component is slidably arranged on the other side of the slide 32 along the vertical direction, and is connected to the output end of the lifting motor 33, and the lifting motor 33 drives the supporting component to move up and down; the OLED moving component is arranged on one side of the supporting component, and the FPC moving component is arranged On the other side of the supporting component; at the first group of air-drying platforms 2, the OLED moving component and the FPC moving component move upward through the through slot B and the strip gap of the air-drying platform, the OLED moving component holds and adsorbs the OLED, and the FPC moving component holds the FPC, driving the OLED and FPC to move synchronously in a straight line. After the air-drying components air-dry the upper and lower surfaces of the OLED and FPC, the OLED and FPC are placed on the air-drying platform 2 of the cache station; the OLED moving component and the FPC moving component pass through the through slot B and the strip gap of the air-drying platform 2 and move down to the moving channel A, and return in a straight line to the bottom of the previous group of air-drying platforms 2 in the moving channel A.

[0033] The supporting component includes a lifting seat 34 and a support rod 35, wherein the lifting seat 34 is slidably connected to the other side of the slide 32 in the vertical direction and is connected to the output end of the lifting motor 33; the support rod 35 includes at least two, and the support rods 35 are horizontally spaced and connected to the upper part of the lifting seat 34, and an air path is provided inside the support rods 35.

[0034] The OLED transport components include an OLED transport support bar 36, a transport vacuum connector 37, and a transport suction nozzle 38. The OLED transport support bars 36 include at least two, which are arranged parallel and spaced apart on the support rod 35 and extend horizontally to the left and right sides of the support rod 35 to form an OLED support area. An air path is provided inside the OLED transport support bar 36, which is connected to the air path inside the support rod 35. The transport vacuum connector 37 is arranged on the support rod 35 and connected to the air path of the support rod 35. The transport suction nozzles 38 include at least two, which are arranged on the OLED transport support bar 36 and connected to the air path of the OLED transport support bar 36. A vacuum negative pressure is generated at the transport suction nozzles 38 to adsorb the OLED substrate.

[0035] The FPC moving components include FPC moving supports 39 and a moving suction nozzle 38. The FPC moving supports 39 include at least two. The FPC moving supports 39 are arranged in parallel and spaced apart on the support rod 35, and extend horizontally to the left and right sides of the support rod 35 to form an FPC support area; an air path is provided inside the FPC moving support 39, and the air path is connected to the air path inside the support rod 35. A moving suction nozzle 38 is provided on the FPC moving support 39, and the moving suction nozzle 38 is connected to the air path inside the FPC moving support 39.

[0036] Furthermore, the present invention designs an OLED and substrate post-cleaning air-drying device that adopts a hollow vacuum carrying and transporting structure, which simultaneously completes the upper and lower surface air-drying actions during the carrying and transporting process, and realizes independent adsorption and fixation of OLED and FPC, ensuring the position stability during the transport and air-drying process.

[0037] In order to solve the problems of upper and lower surface air drying, OLED stability during transportation and air drying, and independent bearing and adsorption of OLED and FPC, the present invention is innovatively designed with an air drying carrier and an air drying lifting arm, and upper and lower air drying components are set between the air drying station and the cache station; the air drying carrier and the air drying lifting arm of the present invention adopt an upper and lower hollow structure design as a whole, and the air drying carrier and the air drying lifting arm move in an interlaced manner in the vertical direction, thereby ensuring unobstructed air drying of the upper and lower surfaces of the OLED, and realizing the lifting, support and placement of the OLED; in addition, the OLED bearing area or FPC bearing area of the air drying carrier and the air drying lifting arm also has a vacuum adsorption function. When the air drying carrier or the air drying lifting arm lifts and supports the OLED or FPC, a downward vacuum negative pressure adsorption force is generated, and the vacuum negative pressure adsorption force realizes the fixation of the OLED position, ensuring the stability of transportation and air drying. Specifically, the air-drying platform of the present invention adopts a platform bracket with an upper and lower double-layer structure design as the carrying body, the lower part of the platform bracket forms a moving channel, the upper part of the platform bracket is a carrying plane, and is provided with an OLED carrying component and an FPC carrying component. The OLED carrying component is mainly based on the OLED carrying board, including two OLED carrying boards arranged in parallel, and a through groove is opened in the middle of the OLED carrying board to facilitate the air-drying moving arm to pass up and down; the OLED carrying board is provided with a plurality of OLED branches at parallel intervals near both sides of the through groove, and a gap space is formed between adjacent OLED branches to facilitate the air-drying moving arm to pass up and down; an OLED carrying area is formed between the OLED carrying board and the OLED branches. In addition, the present invention further provides interconnected air paths inside the OLED carrier board and the OLED support strips. A vacuum connector is connected to the side of the OLED carrier board to facilitate external connection to a vacuum generator. A plurality of OLED suction nozzles are arranged on the OLED support strips. The vacuum connector and the OLED suction nozzles are respectively connected to the air paths inside the OLED carrier board and the OLED support strips, thereby generating a vacuum negative pressure at the OLED suction nozzles to downwardly absorb and fix the OLED placed on the OLED support strips; the FPC carrier portion is close to one side of the OLED carrier portion. The FPC carrier portion is an FPC carrier plate with a plurality of strip-shaped slits, which is used to support the FPC on one side of the OLED and ensure that it can be air-dried and moved up and down.The air-drying moving arm of the present invention is arranged on the side of the air-drying platform as a whole along the straight direction. The air-drying moving arm uses a linear module and a slide as a linear driving structure. The linear module drives the slide to move back and forth between the two air-drying boxes in a straight line; a lifting seat is slidably provided on the side wall of the slide in the vertical direction, and the lifting seat is driven by a lifting motor to move up and down in the vertical direction; two support rods are provided in parallel and at intervals on the side of the lifting seat, and the support rods serve as the bearing body, and an OLED moving area and an FPC moving area are respectively provided thereon, which respectively realize the adsorption and moving of the OLED and its FPC; the present invention arranges OLED moving supports in parallel and at intervals on the support rods, and the OLED moving supports extend horizontally to the left and right sides of the support rod, and multiple OLED moving supports form a horizontal support surface for supporting the OLED; multiple FPC moving supports are provided on the side of the OLED moving support bar, and the FPC moving supports extend horizontally to the left and right sides of the support rod, forming a horizontal support surface for supporting the FPC. At the same time, the support rods, OLED transport support bars, and FPC transport support bars of the present invention are all provided with air circuits, and the three air circuits are interconnected. The sides of the support rods are provided with transport vacuum joints, and the OLED transport support bars and FPC transport support bars are provided with multiple transport suction nozzles. The transport vacuum joints and transport suction nozzles are all connected to the air circuits so as to generate vacuum negative pressure at the transport suction nozzles to downwardly absorb the OLED and FPC held on the OLED transport support bars and FPC transport support bars. When the air-drying lifting arm is working, the support bars pass up and down through the through slots of the air-drying platform. The OLED transport support bars and FPC transport support bars are interlaced with the OLED support bars and FPC supporting board of the air-drying platform, and the OLED and FPC on them are lifted from below the air-drying platform, or the lifted OLED and FPC are placed on the air-drying platform and then moved downward through the through slots.

[0038] The embodiments of the present invention are merely to introduce specific implementation methods and are not intended to limit the scope of protection. Persons skilled in the art may make certain modifications inspired by these embodiments. Therefore, any equivalent changes or modifications made in accordance with the scope of the present invention are within the scope of the patent claims of the present invention.

Claims

1. An air drying device for cleaning OLED and substrate, characterized by: The invention comprises an air-drying platform (2) and an air-drying lifting arm (3), wherein the air-drying platform (2) comprises two groups, and the two groups of air-drying platforms (2) are arranged at intervals along a straight line direction; the air-drying lifting arm (3) is arranged on the side of the air-drying platform (2) and extends straightly along the arrangement direction of the two groups of air-drying platforms (2); the air-drying platform (2) and the air-drying lifting arm (3) are hollow supporting structures, and the OLED substrate to be air-dried is placed on the air-drying platform (2); the air-drying lifting arm (3) passes through the air-drying platform (2) from below, supports the OLED substrate, and then rises to the top of the air-drying platform (2); after moving along a straight line through the air-drying assembly arranged on the side of the air-drying platform (2) for air-drying, the air-drying lifting arm (3) descends so that the OLED substrate is supported by the air-drying platform (2); the air-drying lifting arm (3) passes through the air-drying platform (2) from top to bottom, and returns straightly from the bottom of the air-drying platform (2) to support the next group of OLED substrates.

2. The OLED and substrate post-cleaning air-drying device according to claim 1, characterized in that: The air-drying platform (2) includes a platform support (21), a platform bracket (22), an OLED bearing part and an FPC bearing part, wherein the platform support (21) is vertically arranged in the air-drying box; the platform bracket (22) is horizontally arranged on the platform support (21), the platform bracket (22) is a double-layer structure, and a moving channel (A) is formed in the middle of the platform bracket (22); the OLED bearing part is arranged on one side of the platform bracket (22), and the OLED and its substrate are supported and adsorbed and fixed by the OLED bearing part, and the FPC bearing part is arranged on the other side of the platform bracket (22), and the FPC connected to one side of the OLED is supported by the FPC bearing part, and the OLED bearing part and the FPC bearing part are hollow structures in the upper and lower parts, so as to facilitate the movement and air-drying of the OLED substrate.

3. The OLED and substrate post-cleaning air-drying device according to claim 2, characterized in that: The OLED carrying portion comprises an OLED carrying plate (23), an OLED support bar (24), a vacuum joint (25) and an OLED suction nozzle (26), wherein the OLED carrying plate (23) comprises at least two pieces, the OLED carrying plate (23) is arranged on the inner side of the carrier bracket (22), and a through groove (B) is provided in the middle of the OLED carrying plate (23); the OLED support bar (24) comprises at least two pieces, the OLED support bar (24) is arranged on the OLED carrying plate (23) in parallel and spaced along both sides of the through groove (B), and adjacent OLED support bars (24) form a strip-shaped gap that passes through from top to bottom, and the OLED support bar (24) is arranged on the OLED An OLED carrying area is formed on the D carrying plate (23); air paths are respectively provided inside the OLED carrying plate (23) and the OLED support bar (24), and the air paths of the OLED carrying plate (23) and the OLED support bar (24) are communicated with each other; the vacuum joint (25) is arranged on the side of the OLED carrying plate (23) and is communicated with the air path inside the OLED carrying plate (23); the OLED suction nozzles (26) include at least two, and the OLED suction nozzles (26) are arranged on the OLED support bar (24) and are communicated with the air path inside the OLED support bar (24); vacuum negative pressure is generated at the OLED suction nozzles (26) so as to downwardly absorb and fix the OLED substrate.

4. The OLED and substrate post-cleaning air-drying device according to claim 3, characterized in that: The FPC bearing portion includes an FPC bearing plate (27), which includes at least two FPC bearing plates (27). The FPC bearing plates (27) are horizontally arranged on the outside of the carrier bracket (22) corresponding to the OLED bearing plates (23), and at least two strip-shaped gaps are opened on the FPC bearing plates (27).

5. The OLED and substrate post-cleaning air-drying device according to claim 4, characterized in that: The air-drying moving arm (3) comprises a linear module (31), a slide (32), a lifting motor (33), a supporting component, an OLED moving component and an FPC moving component, wherein the linear module (31) is arranged on the side of the air-drying carrier (2) along the linear direction; the slide (32) is slidably connected to the linear module (31) and driven by the linear module (31); the lifting motor (33) is arranged on one side of the slide (32); the supporting component is slidably arranged on the other side of the slide (32) along the vertical direction and is connected to the output end of the lifting motor (33), and the lifting motor (33) drives the supporting component to move up and down; the OLED moving component is arranged on one side of the supporting component, and the FPC The C moving component is arranged on the other side of the supporting component; at the first set of air-drying platforms (2), the OLED moving component and the FPC moving component pass upward through the through slot (B) and the strip-shaped gap of the air-drying platform, the OLED moving component holds and absorbs the OLED, and the FPC moving component holds the FPC, driving the OLED and the FPC to move synchronously in a straight line through the air-drying assembly to air-dry the upper and lower surfaces of the OLED and the FPC, and then placing the OLED and the FPC on the air-drying platform (2) at the buffer station; the OLED moving component and the FPC moving component pass through the through slot (B) and the strip-shaped gap of the air-drying platform (2) and move downward into the moving channel (A), and return in a straight line to the bottom of the previous set of air-drying platforms (2) in the moving channel (A).

6. The OLED and substrate post-cleaning air-drying device according to claim 5, characterized in that: The supporting component includes a lifting seat (34) and a support rod (35), wherein the lifting seat (34) is slidably connected to the other side of the slide seat (32) along the vertical direction and is connected to the output end of the lifting motor (33); the support rod (35) includes at least two, and the support rods (35) are horizontally spaced and connected to the upper part of the lifting seat (34), and an air path is provided inside the support rod (35).

7. The OLED and substrate post-cleaning air-drying device according to claim 6, characterized in that: The OLED moving component comprises an OLED moving support bar (36), a moving vacuum joint (37) and a moving suction nozzle (38), wherein the OLED moving support bar (36) comprises at least two, the OLED moving support bars (36) are arranged on the support rod (35) in parallel and at intervals, and extend horizontally to the left and right sides of the support rod (35) to form an OLED support area; an air path is provided inside the OLED moving support bar (36), and the air path is connected to the air path inside the support rod (35); the moving vacuum joint (37) is arranged on the support rod (35) and connected to the air path of the support rod (35); the moving suction nozzle (38) comprises at least two, the moving suction nozzle (38) is arranged on the OLED moving support bar (36) and connected to the air path of the OLED moving support bar (36), and a vacuum negative pressure is generated at the moving suction nozzle (38) to adsorb the OLED substrate.

8. The OLED and substrate post-cleaning air-drying device according to claim 6, characterized in that: The FPC moving component includes an FPC moving support bar (39) and a moving suction nozzle (38). The FPC moving support bar (39) includes at least two FPC moving support bars (39). The FPC moving support bars (39) are arranged on the support rod (35) in parallel and at intervals, and extend horizontally to the left and right sides of the support rod (35) to form an FPC support area. An air path is provided inside the FPC moving support bar (39), and the air path is connected to the air path inside the support rod (35). A moving suction nozzle (38) is provided on the FPC moving support bar (39), and the moving suction nozzle (38) is connected to the air path inside the FPC moving support bar (39).

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