Blade, machining system, machining method, turbine blade, and turbomachine

Abstract

The present invention provides a blade, a processing system, a processing method, a turbine blade, and a turbomachinery. The blade (BL) is a blade used in fluid and includes: a substrate (BM) and a coating layer (TBC) formed on the substrate. On the surface of the coating layer, a plurality of first grooves (9) and a plurality of second grooves (7) are formed, and the spacing (P9) of the plurality of first grooves is different from the spacing (P7) of the plurality of second grooves.

Description

TECHNICAL FIELD

[0001] The present application relates to, for example, a technical field of a blade such as a turbine blade and a processing system and a processing method of processing the blade. BACKGROUND

[0002] As an example of the blade, a turbine blade used for a turbine can be cited. For example, Patent Literature 1 describes a turbine blade in which a heat-resistant layer is formed on a surface. The blade such as the turbine blade is required to appropriately reduce a resistance of the blade to a fluid.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: European Patent No. 2283169 SUMMARY

[0006] According to a first embodiment, there is provided a blade used in a fluid, the blade including: a base material; and a coating layer formed on the base material, a plurality of first grooves and a plurality of second grooves being formed on a surface of the coating layer, a pitch of the plurality of first grooves being different from a pitch of the plurality of second grooves.

[0007] According to a second embodiment, there is provided a blade used in a fluid machine, the blade including: a base material; and a coating layer formed on the base material, a plurality of first grooves and a plurality of second grooves being formed on a surface of the coating layer, a depth of the plurality of first grooves being different from a depth of the plurality of second grooves.

[0008] According to a third embodiment, there is provided a blade used in a fluid, the blade including: a base material; and a coating layer formed on the base material, a plurality of first grooves and a plurality of second grooves being formed on a surface of the coating layer, a pitch of the plurality of first grooves being different from a pitch of the plurality of second grooves.

[0009] According to a fourth embodiment, there is provided a processing system including: a beam irradiation device that irradiates an energy beam to a surface of a coating layer formed on a base material and in which a plurality of second grooves are formed; and a control device that controls the beam irradiation device so as to form a plurality of first grooves on the surface of the coating layer at a pitch different from a pitch of the plurality of second grooves.

[0010] According to a fifth embodiment, there is provided a processing method including: forming a plurality of second grooves on a surface of a coating layer formed on a base material; and forming a plurality of first grooves on the surface at a pitch different from a pitch of the plurality of second grooves.

[0011] According to a sixth embodiment, there is provided a turbine blade used in a fluid, the turbine blade including: a base material; and a heat-resistant layer formed on the base material, a rib structure being formed on a second surface opposite to a first surface facing the base material, and reducing transfer of heat from the fluid toward the base material.

[0012] According to a seventh embodiment, there is provided a processing system including: a beam irradiation device that irradiates an energy beam to a surface of a heat-resistant layer formed on a base material, the heat-resistant layer reducing transfer of heat from a fluid toward the base material; and a control device that controls the beam irradiation device to form a rib structure on the surface.

[0013] According to an eighth embodiment, there is provided a blade used in a fluid, wherein a rib structure is formed on a surface of a base material, and a coating layer is formed on the surface on which the rib structure is formed.

[0014] According to a ninth embodiment, there is provided a blade used in a fluid, the blade including: a base material on a surface of which a rib structure is formed; and a coating layer formed on the surface on which the rib structure is formed.

[0015] According to a tenth embodiment, there is provided a blade used in a fluid, the blade including a base material on a surface of which: a plurality of first grooves are arranged on a first partition in a first pitch direction; and a plurality of second grooves are arranged on a second partition adjacent to the first partition in a second pitch direction different from the first pitch direction.

[0016] According to an eleventh embodiment, there is provided a blade used in a fluid, the blade including: a base material; and a coating layer formed on the base material, on the coating layer: a plurality of first grooves are arranged on a first partition in a first pitch direction; and a plurality of second grooves are arranged on a second partition adjacent to the first partition in a second pitch direction different from the first pitch direction.

[0017] According to a twelfth embodiment, there is provided a processing method including: forming a rib structure on a surface of a base material; and forming a coating layer on the surface on which the rib structure is formed. BRIEF DESCRIPTION OF DRAWINGS

[0018] Fig. 1 is a cross-sectional view schematically showing an overall structure of a processing system of the present embodiment.

[0019] Fig. 2 is a system structure view showing a system structure of the processing system of the present embodiment.

[0020] Fig. 3is a perspective view showing the appearance of a turbine.

[0021] Fig. 4 is a perspective view showing the appearance of a turbine blade.

[0022] Fig. 5 is a sectional view showing the structure of a turbine blade.

[0023] Fig. 6 is a sectional view showing the structure of a processing head of the present embodiment.

[0024] Fig. 7 is a timing chart showing the measurement light incident to the detector and the interference light detected by the detector.

[0025] Fig. 8 (a) of FIG. 8 is a perspective view showing a rib structure, Fig. 8 (b) of FIG. 8 is a sectional view showing the rib structure Fig. 8 (a) of FIG. 8 is a sectional view showing the rib structure Fig. 8 (c) of FIG. 8 is a plan view showing the rib structure.

[0026] FIG. 9(a) is a sectional view showing a processing light EL irradiated to a turbine blade in order to form a rib structure, and FIG. 9(b) is a plan view showing a moving track of an irradiation position of the processing light on a surface of the turbine blade.

[0027] Fig. 10 is a perspective view showing a rib structure.

[0028] Fig. 11 is a perspective view showing a rib structure.

[0029] Fig. 12 is a sectional view showing an example of the rib structure formed in the first modification example.

[0030] Fig. 13 is a sectional view showing an example of the rib structure formed in the first modification example.

[0031] Fig. 14 is a sectional view showing an example of the rib structure formed in the first modification example.

[0032] Fig. 15 is a sectional view showing an example of the rib structure formed in the first modification example.

[0033] Fig. 16 is a sectional view showing an example of the rib structure formed in the first modification example.

[0034] Fig. 17 is a sectional view showing an example of the rib structure formed in the first modification example.

[0035] Fig. 18 Fig. 9 is a sectional view showing an example of a rib structure formed in a first modification example.

[0036] Fig. 19 Fig. 10 (a) is a sectional view showing a turbine blade formed with a plurality of grooves, Fig. 19 Fig. 10 (b) is a plan view showing a turbine blade formed with a plurality of grooves.

[0037] Fig. 20 Fig. 11 is a sectional view showing a turbine blade formed with both a groove and a rib structure.

[0038] Fig. 21 Fig. 12 is a perspective view showing a turbine blade formed with both a groove and a rib structure.

[0039] Fig. 22 Fig. 13 is a plan view showing a turbine blade formed with both a groove and a rib structure.

[0040] Fig. 23 Fig. 14 is a perspective view showing a turbine blade formed with both a rib structure and a groove shallower than the groove of the rib structure.

[0041] Fig. 24 Fig. 15 is a plan view showing a turbine blade formed with both a groove and a rib structure.

[0042] Fig. 25 Fig. 16 is a plan view showing a turbine blade formed with both a groove and a rib structure.

[0043] Fig. 26 Fig. 17 is a plan view showing a turbine blade formed with a rib structure.

[0044] Fig. 27 Fig. 18 is a perspective view showing a radial turbine blade formed with a rib structure.

[0045] Fig. 28 Fig. 19 is a view showing a turbomachine into which the turbine blade is incorporated.

[0046] [Explanation of symbols]

[0047] 1: processing device

[0048] 3: stage device

[0049] 4: control device

[0050] 5, 114: frame

[0051] 7, 7X, 7Y, 9: groove

[0052] 8: convex structure

[0053] 11: processing head

[0054] 12: head driving system

[0055] 13, 34: position measuring device

[0056] 21: processing light source

[0057] 22#1, 22#2: measurement light source

[0058] 31: stage

[0059] 32: stage

[0060] 33: stage driving system

[0061] 71: bottom

[0062] 72: partition wall

[0063] 81, 82: side surface

[0064] 83: top

[0065] 84: boundary portion

[0066] 91: petiole

[0067] 92: blade body

[0068] 111: processing optical system

[0069] 112: measurement optical system

[0070] 113: emission optical system

[0071] 120, 1120, 1125, 1127: mirror

[0072] 160: exit portion

[0073] 831, 841: flat surface

[0074] 832, 842: curved surface

[0075] 911: seat

[0076] 921: positive pressure surface

[0077] 922: negative pressure surface

[0078] 923: root portion

[0079] 924: tip portion

[0080] 925: leading edge surface

[0081] 926: trailing edge surface

[0082] 1111: position adjustment optical system

[0083] 1112: angle adjustment optical system

[0084] 1121, 1122, 1124, 1131: beam splitter

[0085] 1123, 1126: detector

[0086] 1132: galvanometer mirror

[0087] 1132X: X-scan mirror

[0088] 1132Y: Y-scan mirror

[0089] 1133: f theta lens

[0090] 9111: positive pressure side pedestal

[0091] 9112: negative pressure side pedestal

[0092] BL: turbine blade

[0093] BM: base material

[0094] BU: burner

[0095] CO: compressor

[0096] D, D9: thickness

[0097] D7: depth

[0098] D83, D842: dimension

[0099] DY: dynamo

[0100] EL: machining light

[0101] F1, F2: arrow

[0102] FU: fuel

[0103] ML, ML#1, ML#1-1, ML#1-2, ML#1-3, ML#2, ML#2-1, ML#2-2, ML#2-3: measurement light

[0104] P7, P8, P9: pitch

[0105] RB, TB: rib structure

[0106] RT: rotor

[0107] SA, SA#1, SA#2, SA#3, SA#4, SA#5, SA#6: surface area

[0108] SH: shaft

[0109] SYS: machining system

[0110] T: turbine

[0111] TBC: thermal barrier coating

[0112] TM: turbomachinery

[0113] TU: turbine unit

[0114] W: workpiece

[0115] W7, W9: width DETAILED DESCRIPTION

[0116] Embodiments of a blade, a processing system, and a processing method will be described below with reference to the accompanying drawings. Embodiments of a blade, a processing system, and a processing method will be described below using a processing system SYS that performs a processing process using a processing light EL. However, the present application is not limited to the embodiments described below.

[0117] Furthermore, in the following description, the positional relationship of various constituent elements that constitute the processing system SYS is described using an XYZ orthogonal coordinate system defined by X, Y, and Z axes that are orthogonal to each other. In the following description, for the sake of convenience of description, the X-axis direction and the Y-axis direction are each assumed to be a horizontal direction (i.e., a prescribed direction in a horizontal plane), and the Z-axis direction is assumed to be a vertical direction (i.e., a direction orthogonal to the horizontal plane, and substantially an up-down direction). Furthermore, the directions of rotation (in other words, the directions of inclination) about the X, Y, and Z axes are referred to as the θX direction, the θY direction, and the θZ direction, respectively. Here, the Z-axis direction can also be assumed to be the direction of gravity. Furthermore, the XY plane can also be assumed to be the horizontal direction.

[0118] (1) Configuration of processing system SYS

[0119] First, the structure of the processing system SYS of the present embodiment will be described with reference to Fig. 1 and Fig. 2 . Fig. 1 is a cross-sectional view schematically showing the structure of the processing system SYS of the present embodiment. Fig. 2 is a system configuration view showing the system configuration of the processing system SYS of the present embodiment.

[0120] As shown in Fig. 1 and Fig. 2As shown, the processing system SYS includes the processing device 1, the processing light source 21, the measurement light source 22, the stage device 3, and the control device 4. At least a part of the processing device 1 and the stage device 3 are housed in the internal space of the frame 5. The internal space of the frame 5 can be purged with a purge gas such as nitrogen or can not be purged with a purge gas. The internal space of the frame 5 can be vacuumed or can not be vacuumed. However, the processing device 1 and the stage device 3 can not be housed in the internal space of the frame 5. That is, the processing system SYS can not include the frame 5 that houses the processing device 1 and the stage device 3.

[0121] The processing device 1 can perform processing on a workpiece W as a processing target under the control of the control device 4. The workpiece W can be, for example, a metal, an alloy (e.g., duralumin), a semiconductor (e.g., silicon), a resin, a composite material (e.g., at least one of Carbon Fiber Reinforced Plastic (CFRP) and a coating (as an example, a coating layer applied to a base material)), a glass, or an object including any material other than these.

[0122] In the present embodiment, the processing device 1 can perform processing on a turbine blade BL as an example of the workpiece W. The turbine blade BL is a member used in a turbine T as an example of a fluid machine. Specifically, the turbine blade BL is a blade-like member that constitutes an airfoil of the turbine T. An example of the turbine T is shown in FIG. 1. Fig. 3 Fig. 4 Fig. 3 is a perspective view showing the appearance of the turbine T. Fig. 4 is a perspective view showing the appearance of the turbine blade BL. As shown in Fig. 3 Fig. 4 As shown, the turbine T includes a plurality of turbine blades BL. The turbine blade BL includes a shank 91 and a blade body 92 that is joined to the shank 91 and extends from the shank 91 toward the radial direction outside of the turbine T. At least one of the shank 91 and the blade body 92 can include a single metal. At least one of the shank 91 and the blade body 92 can include a plurality of metals. At least one of the shank 91 and the blade body 92 can be manufactured by an existing manufacturing method (e.g., a manufacturing method using at least one of casting, forging, additive processing, subtractive processing, and mechanical processing). The shank 91 and the blade body 92 can be integrally manufactured. Alternatively, the separately manufactured shank 91 and the blade body 92 can be joined by an existing joining method (e.g., a joining method using at least one of fusion, brazing, and adhesion). The plurality of shanks 91 included in each of the plurality of turbine blades BL can be joined to each other. The joined plurality of shanks 91 can constitute at least a part of a rotatable rotor RT.​​​

[0123] The blade body 92 extends from a platform 911 of the blade stem 91 toward the radial direction outside of the turbine T. The platform 911 includes a positive pressure side platform 9111 and a negative pressure side platform 9112. The blade body 92 includes a positive pressure surface 921, a negative pressure surface 922 on the opposite side of the positive pressure surface 921, a root 923 bonded to the blade stem 91, and a tip 924 constituting an end on the opposite side of the root 923. The blade body 92 further includes a leading edge surface 925 between the positive pressure surface 921 and the negative pressure surface 922, and a trailing edge surface 926 between the positive pressure surface 921 and the negative pressure surface 922 on the opposite side of the leading edge surface 925. The surface of at least one of the positive pressure surface 921, the negative pressure surface 922, the leading edge surface 925, and the trailing edge surface 926 can also include a curved surface. For example, Fig. 4 In the example shown, the surface of at least the positive pressure surface 921 and the negative pressure surface 922 each includes a curved surface.

[0124] In addition, the turbine T can also be one in which the rotor RT and the turbine blade BL are integrally formed.

[0125] The turbine T can be rotated using the flow of fluid supplied to the turbine T. Specifically, fluid (e.g., at least one of water, steam, air, and gas) is supplied to the turbine T. The fluid supplied to the turbine T flows along the surface of each of the plurality of turbine blades BL. Thus, the turbine blade BL is used in the fluid. As a result, the kinetic energy of the fluid is converted into the rotational energy of the turbine T by the plurality of turbine blades BL. As an example of such a turbine T, at least one of a steam turbine using steam as the fluid, and a gas turbine using combustion gas as the fluid can be cited. As another example of such a turbine T, at least one of a hydraulic turbine using water as the fluid and a wind turbine using air as the fluid can be cited. Also, the turbine T can also generate the flow of fluid by its rotation.

[0126] The temperature of the fluid supplied to the turbine blade BL can be high. For example, in the case where the turbine blade BL is used for a jet engine (i.e., in the case where the turbine blade BL is used for a gas turbine), high-temperature combustion gas is supplied to the turbine blade BL as the fluid. At this time, in order to reduce the effects of heat on the base material BM constituting the turbine blade BL, the turbine blade BL can also be subjected to heat-resistant treatment. Specifically, as a cross-sectional view (IV-IV' cross-sectional view) indicating the structure of the turbine blade BL Fig. 4 Fig. 5 ​As shown, the turbine blade BL can also include a base material BM having a blade shape, and a heat-resistant layer TBC formed on a surface of the base material BM. The heat-resistant layer TBC is formed on a portion of the surface of the base material BM that is affected by heat from the fluid. The heat-resistant layer TBC is a coating layer for reducing the transfer of heat from the fluid toward the base material BM. Thus, the turbine blade BL contacts the fluid via the heat-resistant layer TBC during use of the turbine blade BL (i.e., during a period in which the turbine blade BL is supplied with the fluid). That is, during use of the turbine blade BL, the heat-resistant layer TBC (more specifically, a surface of the heat-resistant layer TBC that is exposed to the outside, on the opposite side from the surface of the heat-resistant layer TBC that faces the base material BM) contacts the fluid. As a result, the transfer of heat from the fluid toward the base material BM is reduced by the heat-resistant layer TBC located between the fluid and the base material BM. Thus, the effect of heat on the base material BM is reduced. As an example of such a heat-resistant layer TBC, a layer containing ceramic can be given. The layer containing ceramic can also be a layer formed of a porous material, for example.

[0127] In addition, Fig. 5 In the example shown, as described above, the positive pressure surface 921 and the negative pressure surface 922 each include a curved surface, and thus the surface of the base material BM and the heat-resistant layer TBC also include a curved surface. That is, the surface of the base material BM that faces the heat-resistant layer TBC includes a curved surface. The surface of the heat-resistant layer TBC that is exposed to the outside also includes a curved surface. However, whether or not the positive pressure surface 921 and the negative pressure surface 922 include a curved surface, the surface of the base material BM and the heat-resistant layer TBC can include a curved surface or can not include a curved surface. In addition, the curved surface can be a curved surface in which the curvature of each point on the surface changes in only one direction, like a portion of a cylinder, or can be a curved surface in which the curvature of each point on the surface changes in two directions, like a portion of a sphere. The surface of the base material BM and the heat-resistant layer TBC can also be a flat surface.

[0128] Again in Fig. 1 In addition, Fig. 2 In the example shown, as described above, the positive pressure surface 921 and the negative pressure surface 922 each include a curved surface, and thus the surface of the base material BM and the heat-resistant layer TBC also include a curved surface. That is, the surface of the base material BM that faces the heat-resistant layer TBC includes a curved surface. The surface of the heat-resistant layer TBC that is exposed to the outside also includes a curved surface. However, whether or not the positive pressure surface 921 and the negative pressure surface 922 include a curved surface, the surface of the base material BM and the heat-resistant layer TBC can include a curved surface or can not include a curved surface. In addition, the curved surface can be a curved surface in which the curvature of each point on the surface changes in only one direction, like a portion of a cylinder, or can be a curved surface in which the curvature of each point on the surface changes in two directions, like a portion of a sphere. The surface of the base material BM and the heat-resistant layer TBC can also be a flat surface.

[0129] The processing apparatus 1 can also perform a removal process by irradiating the workpiece W with a processing light EL to remove a portion of the workpiece W. In the case of the removal process, the processing apparatus 1 can also form on the workpiece W the part described below. Fig. 8 (a) to Fig. 8 (c) The rib structure RB is described in detail on one side. The rib structure RB is a structure that can reduce the resistance of the surface of the workpiece W to the fluid (especially at least one of frictional resistance and turbulent frictional resistance). In addition, the fluid referred to here refers to a medium (e.g., at least one of gas and liquid) that flows relative to the surface of the workpiece W. For example, the medium may also be referred to as a fluid when the surface of the workpiece W moves relative to the medium while the medium itself is stationary.

[0130] The processing apparatus 1 may also perform additive processing, in addition to or replacing removal processing, by irradiating the workpiece W with processing light EL to add new structures to the workpiece W. In this case, the processing apparatus 1 may also form the rib structure RB on the surface of the workpiece W by performing additive processing. Alternatively, the processing apparatus 1 may also perform machining by bringing a tool into contact with the workpiece W, in addition to or replacing at least one of removal processing and additive processing. In this case, the processing apparatus 1 may also form the rib structure RB on the surface of the workpiece W by performing machining.

[0131] The processing light EL is supplied from the processing light source 21 that generates the processing light EL to the processing apparatus 1 via a light propagation component (not shown) (e.g., an optical fiber and at least one of a mirror). The processing apparatus 1 irradiates the workpiece W with the processing light EL supplied from the processing light source 21.

[0132] The processing apparatus 1 can then measure the workpiece W under the control of the control device 4. The processing apparatus 1 illuminates the workpiece W with a measuring light ML to measure it. The measuring light ML can be any type of light as long as it can measure the workpiece W by illuminating it. In this embodiment, an example of a laser is used for illustration, but the measuring light ML can also be a different type of light than a laser. Furthermore, the wavelength of the measuring light ML can be any wavelength as long as it can measure the workpiece W by illuminating it. For example, the measuring light ML can be visible light or invisible light (e.g., at least one of infrared light, ultraviolet light, and extreme ultraviolet light). The measuring light ML can also include pulsed light (e.g., pulsed light with a emission time of less than picoseconds). Alternatively, the measuring light ML may not include pulsed light. In other words, the measuring light ML can also be continuous light.

[0133] The wavelength of the measurement light ML can also be different from the wavelength of the processing light EL. For example, the wavelength of the measurement light ML can also be shorter than the wavelength of the processing light EL. As an example, as the measurement light ML, light of a wavelength band of 266 nm or 355 nm can be used, and as the processing light EL, light of a wavelength band of 532 nm, 1 μm, or 10 μm can be used. At this time, the spot diameter of the measurement light ML on the workpiece W is smaller than the spot diameter of the processing light EL on the workpiece W. As a result, the measurement resolution by the measurement light ML is higher than the processing resolution by the processing light EL. However, the wavelength of the measurement light ML can also be not shorter than the wavelength of the processing light EL. The wavelength of the measurement light ML can also be the same as the wavelength of the processing light EL.

[0134] The measurement light ML is supplied to the processing device 1 from the measurement light source 22, which is a generation source of the measurement light ML, via an optical propagation member (for example, at least one of an optical fiber and a mirror) not shown. The processing device 1 irradiates the measurement light ML supplied from the measurement light source 22 to the workpiece W.

[0135] In the present embodiment, the measurement light source 22 can also include an optical comb light source. The optical comb light source is a light source that can generate light including frequency components arranged at equal intervals on a frequency axis (hereinafter referred to as "optical frequency comb") as pulsed light. At this time, the measurement light source 22 emits pulsed light including frequency components arranged at equal intervals on a frequency axis as the measurement light ML. However, the measurement light source 22 can also include a light source different from the optical comb light source.

[0136] Fig. 2 In the illustrated example, the processing system SYS includes a plurality of measurement light sources 22. For example, the processing system SYS can include a measurement light source 22#1 and a measurement light source 22#2. The plurality of measurement light sources 22 respectively emit a plurality of measurement lights ML that are phase-synchronized with each other and have interference. For example, the oscillation frequencies of the plurality of measurement light sources 22 can also be different. Therefore, the plurality of measurement lights ML respectively emitted by the plurality of measurement light sources 22 become a plurality of measurement lights ML having different pulse frequencies (for example, the number of pulsed light per unit time, which is the inverse of the emission period of the pulsed light). As an example, the measurement light source 22#1 can emit the measurement light ML#1 having a pulse frequency of 25 GHz, and the measurement light source 22#2 can emit the measurement light ML#2 having a pulse frequency of 25 GHz + α (for example, + 100 kHz). However, the processing system SYS can also include a single measurement light source 22.

[0137] Also, the processing device 1 can measure the state of the workpiece W using the measurement light ML. The state of the workpiece W can also include the position of the workpiece W. The position of the workpiece W can also include the position of the surface of the workpiece W. The position of the surface of the workpiece W can also include the position of each surface portion into which the surface of the workpiece W is subdivided in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. The position of the surface of the workpiece W can also include the position of each surface portion into which the surface of the workpiece W is subdivided in at least one of the θX direction, the θY direction, and the θZ direction. In addition, the position of each surface portion in at least one of the θX direction, the θY direction, and the θZ direction can also be considered equivalent to the posture of each surface portion (i.e., the orientation of each surface portion (e.g., the direction of the normal line of each surface portion), which is substantially equivalent to the amount of inclination of each surface portion with respect to at least one of the X-axis, the Y-axis, and the Z-axis). At this time, the state of the workpiece can also be said to substantially include the shape (e.g., the three-dimensional shape) of the workpiece W. Furthermore, the state of the workpiece W can also include the size of the workpiece W (e.g., the size in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction).

[0138] In order to process and measure the workpiece W, the processing device 1 includes a processing head 11 that respectively emits the processing light EL and the measurement light ML toward the workpiece W, a head driving system 12 that moves the processing head 11, and a position measuring device 13. Furthermore, the processing head 11 includes a processing optical system 111, a measurement optical system 112, and an emission optical system 113. In addition, the structure of the processing head 11 will be described later in detail.

[0139] The head driving system 12 moves the processing head 11 in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction under the control of the control device 4. In addition, the head driving system 12 can also move the processing head 11 in at least one of the θX direction, the θY direction, and the θZ direction in addition to or instead of at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction.

[0140] When the processing head 11 moves, the positional relationship between the stage 32 (further, the workpiece W placed on the stage 32) described later and the processing head 11 changes. That is, when the stage 32 moves, the relative positions of the stage 32 and the workpiece W and the processing head 11 change. Furthermore, when the positional relationship between the stage 32 and the workpiece W and the processing head 11 changes, the positional relationship between the stage 32 and the workpiece W and each optical system included in the processing head 11 (i.e., at least one of the processing optical system 111, the measurement optical system 112, and the emission optical system 113) changes. Furthermore, when the positional relationship between the stage 32 and the workpiece W and the processing head 11 changes, the irradiation positions of the processing light EL and the measurement light ML on the workpiece W each change.

[0141] The position measuring device 13 is a sensor that can measure the position of the processing head 11. The position measuring device 13 can include, for example, at least one of an encoder and a laser interferometer. The control device 4 can also move the processing head 11 based on the measurement result obtained by the position measuring device 13. That is, the control device 4 can also change the positional relationship between the stage 32 and the work W and the processing head 11 based on the measurement result obtained by the position measuring device 13.

[0142] The stage device 3 includes a table plate 31, a stage 32, a stage drive system 33, and a position measuring device 34. The table plate 31 is disposed on a support surface that is not illustrated. The stage 32 is disposed on the table plate 31. Between the support surface and the table plate 31, an anti-vibration device that is not illustrated for reducing the transmission of vibration of the table plate 31 toward the stage 32 can also be provided.

[0143] The work W is placed on the stage 32. The stage 32 can also hold the placed work W. For example, the stage 32 can hold the work W by vacuum chucking and / or electrostatic chucking the work W. Alternatively, the stage 32 can not hold the placed work W.

[0144] The stage drive system 33 moves the stage 32 under the control of the control device 4. Specifically, the stage drive system 33 moves the stage 32 relative to at least one of the table plate 31 and the processing device 1. For example, the stage drive system 33 can move the stage 32 in at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction under the control of the control device 4.

[0145] When the stage 32 moves, the positional relationship between the stage 32 (and the work W placed on the stage 32) and the processing head 11 changes. Further, when the positional relationship between the stage 32 and the work W and the processing head 11 changes, the positional relationship between the stage 32 and the work W and each optical system included in the processing head 11 changes. Further, when the positional relationship between the stage 32 and the work W and the processing head 11 changes, the irradiation positions of the processing light EL and the measurement light ML on the work W change.

[0146] The position measuring device 34 is a sensor that can measure the position of the stage 32. The position measuring device 34 can include, for example, at least one of an encoder and a laser interferometer. The control device 4 can also move the stage 32 based on the measurement result obtained by the position measuring device 34. That is, the control device 4 can also change the positional relationship between the stage 32 and the work W and the processing head 11 based on the measurement result obtained by the position measuring device 34.

[0147] The control device 4 controls the operation of the processing system SYS. For example, the control device 4 sets a processing condition of the workpiece W, and controls the processing device 1 and the stage device 3 to process the workpiece W in accordance with the set processing condition. For example, the control device 4 sets a measurement condition of the workpiece W, and controls the processing device 1 and the stage device 3 to measure the workpiece W in accordance with the set measurement condition.

[0148] The control device 4 may, for example, also include an arithmetic device and a storage device. The arithmetic device may, for example, also include at least one of a Central Processing Unit (CPU) and a Graphics Processing Unit (GPU). The control device 4 functions as a device that controls the operation of the processing system SYS by executing a computer program with the arithmetic device. The computer program is a computer program for causing the control device 4 (for example, the arithmetic device) to perform (that is, execute) the operation described later that the control device 4 should perform. That is, the computer program is a computer program for causing the control device 4 to function so that the processing system SYS performs the operation described later. The computer program executed by the arithmetic device can be recorded in the storage device (that is, a recording medium) included in the control device 4, or in any storage medium (for example, a hard disk or a semiconductor memory) built in the control device 4 or externally provided to the control device 4. Alternatively, the arithmetic device can download the computer program to be executed from a device outside the control device 4 via a network interface.

[0149] The control device 4 can also not be provided inside the processing system SYS. For example, the control device 4 can also be provided as a server or the like outside the processing system SYS. In this case, the control device 4 and the processing system SYS can be connected using a wired and / or wireless network (or data bus and / or communication line). As the wired network, for example, a network using an interface of a serial bus system typified by at least one of Institute of Electrical and Electronics Engineers (IEEE) 1394, RS-232x, RS-422, RS-423, RS-485, and Universal Serial Bus (USB) can be used. As the wired network, a network using an interface of a parallel bus system can also be used. As the wired network, a network using an interface complying with Ethernet (registered trademark) typified by at least one of 10BASE-T, 100BASE-TX, and 1000BASE-T can also be used. As the wireless network, a network using electric waves can also be used. As an example of the network using electric waves, a network complying with IEEE 802. lx (for example, at least one of wireless Local Area Network (LAN) and Bluetooth (registered trademark)) can be cited. As the wireless network, a network using infrared rays can also be used. As the wireless network, a network using optical communication can also be used. In this case, the control device 4 and the processing system SYS can be configured to transmit and receive various information via the network. Further, the control device 4 can also be able to transmit information such as a command or a control parameter to the processing system SYS via the network. The processing system SYS can also include a reception device that receives information such as a command or a control parameter from the control device 4 via the network. Alternatively, a first control device that performs a part of the processing performed by the control device 4 can be provided inside the processing system SYS, and a second control device that performs another part of the processing performed by the control device 4 can be provided outside the processing system SYS.

[0150] In addition, as the recording medium of the computer program executed by the recording operation device, at least one of a compact disc read only memory (CD-ROM), a compact disc-recordable (CD-R), a compact disc-rewritable (CD-RW), a floppy disk, a magneto-optical disc (MO), a digital versatile disc read only memory (DVD-ROM), a digital versatile disc random access memory (DVD-RAM), a digital versatile disc-recordable (DVD-R), DVD+R, a digital versatile disc-rewritable (DVD-RW), DVD+RW, a Blu-ray (registered trademark), and the like, a magnetic medium such as a magnetic tape, an optical magnetic disc, a semiconductor memory such as a USB memory, and any medium in which a program can be stored can be used. The recording medium can include a machine in which a computer program can be recorded (for example, a general-purpose machine or a dedicated machine in which a computer program is installed in a state in which the computer program can be executed in at least one form of software and firmware). Furthermore, each process or function included in the computer program can be implemented by a logical processing block implemented in the control device 4 (that is, a computer) by executing the computer program, can be implemented by hardware such as a prescribed gate array (FPGA, ASIC) included in the control device 4, or can be implemented in a form in which a logical processing block and a partial hardware module implementing a part of the hardware are mixed.

[0151] (2) Configuration of processing head 11

[0152] Next, an example of the structure of the machining head 11 will be described with reference to Fig. 6 , FIG. 6. Fig. 6 is a cross-sectional view showing an example of the structure of the machining head 11.

[0153] As shown in Fig. 6As shown, the machining head 11 includes a machining optical system 111, a measurement optical system 112, and an emission optical system 113. The machining optical system 111, the measurement optical system 112, and the emission optical system 113 are housed in a frame 114. However, at least one of the machining optical system 111, the measurement optical system 112, and the emission optical system 113 can not be housed in the frame 114.

[0154] The machining optical system 111 is an optical system that causes the machining light EL emitted from the machining light source 21 to be incident. The machining optical system 111 is an optical system that causes the machining light EL incident to the machining optical system 111 to be emitted toward the emission optical system 113. That is, the machining optical system 111 is an optical system that guides the machining light EL emitted from the machining light source 21 toward the emission optical system 113. The machining light EL emitted by the machining optical system 111 is irradiated to the workpiece W via the emission optical system 113.

[0155] The machining optical system 111 can include, for example, a position adjustment optical system 1111 and an angle adjustment optical system 1112. The position adjustment optical system 1111 can adjust the emission position of the machining light EL from the machining optical system 111. The position adjustment optical system 1111 can include, for example, a parallel plane plate that can be tilted with respect to the traveling direction of the machining light EL, and the emission position of the machining light EL is changed by changing the tilt angle of the parallel plane plate. The angle adjustment optical system 1112 can adjust the emission angle of the machining light EL from the machining optical system 111. The angle adjustment optical system 1112 can include, for example, a mirror that can be tilted with respect to the traveling direction of the machining light EL, and the emission angle of the machining light EL is changed by changing the tilt angle of the mirror. However, the machining optical system 111 can not include at least one of the position adjustment optical system 1111 and the angle adjustment optical system 1112. The machining optical system 111 can include other optical elements or optical members in addition to or instead of at least one of the position adjustment optical system 1111 and the angle adjustment optical system 1112.

[0156] The machining light EL emitted from the machining optical system 111 is incident to the emission optical system 113. The emission optical system 113 includes a beam splitter (e.g., a polarization beam splitter) 1131, a galvanometer mirror 1132, and an fθ lens 1133.

[0157] The beam splitter 1131 emits the machining light EL incident to the beam splitter 1131 toward the galvanometer mirror 1132. Fig. 6 In the example shown, the machining light EL incident to the beam splitter 1131 passes through a polarization separation surface, and thus is emitted toward the galvanometer mirror 1132. Therefore, Fig. 6In the example shown, the machining light EL is caused to be incident on the polarization separation surface of the beam splitter 1131 in a state in which the polarization direction thereof is made to pass through the polarization separation surface (for example, a polarization direction in which the machining light EL becomes p-polarized light with respect to the polarization separation surface).

[0158] The machining light EL emitted from the beam splitter 1131 is incident on the galvanometer mirror 1132. The galvanometer mirror 1132 causes the machining light EL to be deflected (that is, changes the emission angle of the machining light EL) and thereby changes the irradiation position of the machining light EL on the workpiece W. For example, the galvanometer mirror 1132 includes an X-scan mirror 1132X and a Y-scan mirror 1132Y. The X-scan mirror 1132X and the Y-scan mirror 1132Y are each a tilt angle variable mirror whose angle with respect to the optical path of the machining light EL incident on the galvanometer mirror 1132 is changed. The X-scan mirror 1132X causes the machining light EL to be deflected by wobbling or rotating (that is, changing the angle of the X-scan mirror 1132X with respect to the optical path of the machining light EL) to change the irradiation position of the machining light EL on the workpiece W in the X-axis direction. The Y-scan mirror 1132Y causes the machining light EL to be deflected by wobbling or rotating (that is, changing the angle of the Y-scan mirror 1132Y with respect to the optical path of the machining light EL) to change the irradiation position of the machining light EL on the workpiece W in the Y-axis direction.

[0159] The machining light EL from the galvanometer mirror 1132 is incident on the fθ lens 1133. The fθ lens 1133 is an optical system for irradiating the machining light EL from the galvanometer mirror 1132 toward the workpiece W. In particular, the fθ lens 1133 is an optical system for condensing the machining light EL from the galvanometer mirror 1132 onto the workpiece W. Therefore, the fθ lens 1133 irradiates the machining light EL in a converging state toward the workpiece W. As a result, the workpiece W is machined by the machining light EL.

[0160] The measurement optical system 112 is an optical system in which the measurement light ML emitted from the measurement light source 22 is incident. The measurement optical system 112 is an optical system that emits the measurement light ML incident on the measurement optical system 112 toward the emission optical system 113. That is, the measurement optical system 112 is an optical system that guides the measurement light ML emitted from the measurement light source 22 toward the emission optical system 113. The measurement light ML emitted from the measurement optical system 112 is irradiated onto the workpiece W via the emission optical system 113.

[0161] The measurement optical system 112 includes, for example, a mirror 1120, a beam splitter 1121, a beam splitter 1122, a detector 1123, a beam splitter 1124, a mirror 1125, a detector 1126, and a mirror 1127.

[0162] The measurement light ML emitted from the measurement light source 22 is incident on the beam splitter 1121. Specifically, the measurement light ML emitted from the measurement light source 22#1 (hereinafter referred to as "measurement light ML#1") is incident on the beam splitter 1121. The measurement light ML emitted from the measurement light source 22#2 (hereinafter referred to as "measurement light ML#2") is incident on the beam splitter 1121 via the mirror 1120. The beam splitter 1121 emits the measurement light ML#1 and the measurement light ML#2 incident on the beam splitter 1121 toward the beam splitter 1122.

[0163] The beam splitter 1122 reflects a part of the measurement light ML#1 incident on the beam splitter 1122, i.e., the measurement light ML#1-1, toward the detector 1123. The beam splitter 1122 emits another part of the measurement light ML#1 incident on the beam splitter 1122, i.e., the measurement light ML#1-2, toward the beam splitter 1124. The beam splitter 1122 reflects a part of the measurement light ML#2 incident on the beam splitter 1122, i.e., the measurement light ML#2-1, toward the detector 1123. The beam splitter 1122 emits another part of the measurement light ML#2 incident on the beam splitter 1122, i.e., the measurement light ML#2-2, toward the beam splitter 1124.

[0164] The measurement light ML#1-1 and the measurement light ML#2-1 emitted from the beam splitter 1122 are incident on the detector 1123. The detector 1123 detects the interference light generated by the interference of the measurement light ML#1-1 and the measurement light ML#2-1. Specifically, the detector 1123 detects the interference light by receiving the interference light. Therefore, the detector 1123 can also include a light-receiving element (a light-receiving portion, typically a photoelectric conversion element) that can receive light. The detection result of the detector 1123 is output to the control device 4.

[0165] The measurement light ML#1-2 and the measurement light ML#2-2 emitted from the beam splitter 1122 are incident on the beam splitter 1124. The beam splitter 1124 emits at least a part of the measurement light ML#1-2 incident on the beam splitter 1124 toward the mirror 1125. The beam splitter 1124 emits at least a part of the measurement light ML#2-2 incident on the beam splitter 1124 toward the mirror 1127.

[0166] The measurement light ML#1-2 emitted from the beam splitter 1124 is incident on the mirror 1125. The measurement light ML#1-2 incident on the mirror 1125 is reflected by the reflecting surface (the reflecting surface can also be referred to as a reference surface) of the mirror 1125. Specifically, the mirror 1125 reflects the measurement light ML#1-2 incident on the mirror 1125 toward the beam splitter 1124. That is, the mirror 1125 emits the measurement light ML#1-2 incident on the mirror 1125 toward the beam splitter 1124 as the reflected light, that is, the measurement light ML#1-3. The measurement light ML#1-3 emitted from the mirror 1125 is incident on the beam splitter 1124. The beam splitter 1124 emits the measurement light ML#1-3 incident on the beam splitter 1124 toward the beam splitter 1122. The measurement light ML#1-3 emitted from the beam splitter 1124 is incident on the beam splitter 1122. The beam splitter 1122 emits the measurement light ML#1-3 incident on the beam splitter 1122 toward the detector 1126.

[0167] On the other hand, the measurement light ML#2-2 emitted from the beam splitter 1124 is incident on the mirror 1127. The mirror 1127 reflects the measurement light ML#2-2 incident on the mirror 1127 toward the emission optical system 113. That is, the mirror 1127 emits the measurement light ML#2-2 incident on the mirror 1127 toward the emission optical system 113.

[0168] The measurement light ML#2-2 emitted from the mirror 1127 is incident on the emission optical system 113. The beam splitter 1131 of the emission optical system 113 emits the measurement light ML#2-2 incident on the beam splitter 1131 toward the galvanometer mirror 1132. Fig. 4 In the example shown, the measurement light ML#2-2 incident on the beam splitter 1131 is reflected on the polarization separation surface, and thus is emitted toward the galvanometer mirror 1132. Therefore, Fig. 4 In the example shown, the measurement light ML#2-2 is incident on the polarization separation surface of the beam splitter 1131 in a state in which the measurement light ML#2-2 has a polarization direction that can be reflected by the polarization separation surface (for example, a polarization direction in which the measurement light ML#2-2 becomes s-polarized light with respect to the polarization separation surface).

[0169] Here, as described above, in addition to the measurement light ML#2-2, the machining light EL is also incident on the beam splitter 1131. That is, both the measurement light ML#2-2 and the machining light EL pass through the beam splitter 1131. The beam splitter 1131 emits the machining light EL and the measurement light ML#2-2, which are incident on the beam splitter 1131 from different directions, toward the same direction, that is, toward the same galvanometer mirror 1132. Thus, the beam splitter 1131 substantially functions as a synthesis optical system that synthesizes the machining light EL and the measurement light ML#2-2.

[0170] The measurement light ML#2-2 emitted from the beam splitter 1131 is incident to the galvanometer mirror 1132. The galvanometer mirror 1132 changes the irradiation position of the measurement light ML#2-2 on the work W by deflecting the measurement light ML#2-2. For example, the X-scan mirror 1132X deflects the measurement light ML#2-2 by wobbling or rotating (that is, changing the angle of the X-scan mirror 1132X with respect to the optical path of the measurement light ML#2-2) to change the irradiation position of the measurement light ML#2-2 on the work W in the X-axis direction. The Y-scan mirror 1132Y deflects the measurement light ML#2-2 by wobbling or rotating (that is, changing the angle of the Y-scan mirror 1132Y with respect to the optical path of the measurement light ML#2-2) to change the irradiation position of the measurement light ML#2-2 on the work W in the Y-axis direction.

[0171] The measurement light ML#2-2 from the galvanometer mirror 1132 is incident to the fθ lens 1133. The fθ lens 1133 is an optical system for condensing the measurement light ML#2-2 from the galvanometer mirror 1132 onto the work W. The fθ lens 1133 is an optical system for irradiating the measurement light ML#2-2 from the galvanometer mirror 1132 to the work W. The work W is measured by the measurement light ML (specifically, the measurement light ML#2-2).

[0172] Here, as described above, in addition to the measurement light ML#2-2, the processing light EL is also incident to the galvanometer mirror 1132. That is, the processing light EL and the measurement light ML#2-2 synthesized by the beam splitter 1131 are incident to the galvanometer mirror 1132. Thus, both the measurement light ML#2-2 and the processing light EL pass through the same galvanometer mirror 1132. Therefore, the galvanometer mirror 1132 can change the irradiation position of the processing light EL on the work W and the irradiation position of the measurement light ML#2-2 on the work W synchronously. That is, the galvanometer mirror 1132 can change the irradiation position of the processing light EL on the work W and the irradiation position of the measurement light ML#2-2 on the work W in linkage.

[0173] When the measurement light ML#2-2 is irradiated to the work W, light due to the irradiation of the measurement light ML#2-2 is generated from the work W. That is, when the measurement light ML#2-2 is irradiated to the work W, light due to the irradiation of the measurement light ML#2-2 is emitted from the work W. The light due to the irradiation of the measurement light ML#2-2 (in other words, the light emitted from the work W due to the irradiation of the measurement light ML#2-2) can include at least one of the measurement light ML#2-2 reflected by the work W (that is, reflected light), scattered light generated due to the irradiation of the measurement light ML#2-2 to the work W, the measurement light ML#2-2 diffracted by the work W (that is, diffracted light), and the measurement light ML#2-2 transmitted through the work W (that is, transmitted light).

[0174] At least a part of the light (hereinafter, referred to as "measurement light ML#2-3") emitted from the work W due to the irradiation of the measurement light ML#2-2 is incident on the emission optical system 113. The measurement light ML#2-3 incident on the emission optical system 113 is emitted toward the measurement optical system 112 via the fθ lens 1133 and the galvanometer mirror 1132. The beam splitter 1131 emits the measurement light ML#2-3 incident on the beam splitter 1131 toward the measurement optical system 112. Fig. 6 In the example shown, the measurement light ML#2-3 incident on the beam splitter 1131 is reflected at the polarization separation surface, and thus emitted toward the measurement optical system 112. Therefore, Fig. 6 In the example shown, the measurement light ML#2-3 is incident on the polarization separation surface of the beam splitter 1131 in a state in which the measurement light ML#2-3 has a polarization direction that can be reflected by the polarization separation surface.

[0175] The measurement light ML#2-3 emitted from the beam splitter 1131 is incident on the mirror 1127 of the measurement optical system 112. The mirror 1127 reflects the measurement light ML#2-3 incident on the mirror 1127 toward the beam splitter 1124. The beam splitter 1124 emits at least a part of the measurement light ML#2-3 incident on the beam splitter 1124 toward the beam splitter 1122. The beam splitter 1122 emits at least a part of the measurement light ML#2-3 incident on the beam splitter 1122 toward the detector 1126.

[0176] As described above, in addition to the measurement light ML#2-3, the measurement light ML#1-3 is also incident on the detector 1126. That is, the measurement light ML#2-3 that has passed through the work W toward the detector 1126 and the measurement light ML#1-3 that has not passed through the work W toward the detector 1126 are incident on the detector 1126. In addition, the measurement light ML#1-3 can also be referred to as reference light. The detector 1126 detects interference light generated by interference between the measurement light ML#1-3 and the measurement light ML#2-3. Specifically, the detector 1126 detects the interference light by receiving the interference light. Therefore, the detector 1126 can also include a light-receiving element (light-receiving portion) that can receive light. The detection result of the detector 1126 is output to the control device 4.

[0177] The control device 4 calculates the state of the work W on the basis of the detection result of the detector 1123 and the detection result of the detector 1126. Here, the principle of calculating the state of the work W on the basis of the detection result of the detector 1123 and the detection result of the detector 1126 will be described with reference to Fig. 7

[0178] Fig. 7 ​is a timing chart showing the measurement light ML#1-1 incident to the detector 1123, the measurement light ML#2-1 incident to the detector 1123, the interference light detected by the detector 1123, the measurement light ML#1-3 incident to the detector 1126, the measurement light ML#2-3 incident to the detector 1126, and the interference light detected by the detector 1126. The pulse frequency of the measurement light ML#1 is different from the pulse frequency of the measurement light ML#2, and thus the pulse frequency of the measurement light ML#1-1 is different from the pulse frequency of the measurement light ML#2-1. Thus, the interference light of the measurement light ML#1-1 and the measurement light ML#2-1 becomes the interference light of the pulsed light appearing in synchronization with the timing at which the pulsed light constituting the measurement light ML#1-1 and the pulsed light constituting the measurement light ML#2-1 are incident to the detector 1123 at the same time. Similarly, the pulse frequency of the measurement light ML#1-3 is different from the pulse frequency of the measurement light ML#2-3. Thus, the interference light of the measurement light ML#1-3 and the measurement light ML#2-3 becomes the interference light of the pulsed light appearing in synchronization with the timing at which the pulsed light constituting the measurement light ML#1-3 and the pulsed light constituting the measurement light ML#2-3 are incident to the detector 1126 at the same time.

[0179] Here, the position (position on the time axis) of the pulsed light forming the interference light detected by the detector 1126 varies based on the positional relationship between the machining head 11 and the workpiece W. The reason for this is that the interference light detected by the detector 1126 is the interference light of the measurement light ML#2-3 that has passed through the workpiece W toward the detector 1126 and the measurement light ML#1-3 that has not passed through the workpiece W toward the detector 1126. On the other hand, the position (position on the time axis) of the pulsed light forming the interference light detected by the detector 1123 does not vary based on the positional relationship between the machining head 11 and the workpiece W. Therefore, it can be said that the time difference between the pulsed light forming the interference light detected by the detector 1126 and the pulsed light forming the interference light detected by the detector 1123 indirectly indicates the positional relationship (typically, the distance between the machining head 11 and the workpiece W) between the machining head 11 and the workpiece W. Therefore, the control device 4 is able to calculate the state of the workpiece W based on the time difference between the pulsed light forming the interference light detected by the detector 1126 and the pulsed light forming the interference light detected by the detector 1123. Specifically, the control device 4 is able to calculate the position of the portion of the workpiece W irradiated with the measurement light ML#2-2 based on the time difference between the pulsed light forming the interference light detected by the detector 1126 and the pulsed light forming the interference light detected by the detector 1123. That is, the control device 4 is able to obtain information related to the position of the portion of the workpiece W irradiated with the measurement light ML#2-2. Furthermore, if the measurement light ML#2-2 is irradiated to multiple positions of the workpiece W and / or if the measurement light ML#2-2 is irradiated in a manner of scanning the surface of the workpiece W, the control device 4 is also able to calculate the shape of the workpiece W.

[0180] The calculated state of workpiece W can also be used to control the machining system SYS. Specifically, the calculated state of workpiece W can also be used to control machining device 1. The calculated state of workpiece W can also be used to control machining head 11. The calculated state of workpiece W can also be used to control head drive system 12. The calculated state of workpiece W can also be used to control stage device 3. The calculated state of workpiece W can also be used to control stage drive system 33.

[0181] For example, the control device 4 can also change the relative positional relationship between the workpiece W and the processing head 11 based on the calculated state of the workpiece W, so that the relative positional relationship between the workpiece W and the processing head 11 becomes the desired positional relationship. That is, the control device 4 can also control the device that can change the relative positional relationship between the workpiece W and the processing head 11 based on the calculated state of the workpiece W, so that the relative positional relationship between the workpiece W and the processing head 11 becomes the desired positional relationship. As an example of a device that can change the relative positional relationship between the workpiece W and the processing head 11, at least one of the head drive system 12 and the stage drive system 33 can be listed. In addition, as an example of "desired positional relationship", the positional relationship of irradiating the desired position on the workpiece W with processing light EL and / or measuring light ML can be listed.

[0182] For example, the control device 4 can also change the irradiation position of the machining light EL based on the calculated state of the workpiece W, so as to irradiate the desired position on the workpiece W with the machining light EL. As an example of a device that can change the irradiation position of the machining light EL, the angle adjustment optical system 1112 of the machining optical system 111, the galvanometer mirror 1132 of the emission optical system 113, the head drive system 12, and the stage drive system 33 can be listed.

[0183] For example, the control device 4 can also change the irradiation position of the measuring light ML based on the calculated state of the workpiece W, so as to irradiate the measuring light ML at the desired position on the workpiece W. As an example of a device that can change the irradiation position of the measuring light ML, the angle adjustment optical system 1112 of the processing optical system 111, the galvanometer mirror 1132 of the emission optical system 113, the head drive system 12, and the stage drive system 33 can be listed.

[0184] (3) Rib structure RB

[0185] Then, while referring to Fig. 8 (a) to Fig. 8 (c) will explain the rib structure RB formed on the workpiece W by the machining system SYS. Fig. 8 (a) is a three-dimensional view representing the rib structure RB. Fig. 8 (b) is a cross-sectional view showing the rib structure RB. Fig. 8(a) Sectional view of VIII-VIII', Fig. 8 (c) is a top view showing the rib structure RB. Furthermore, the following description will focus particularly on the rib structure RB formed on a turbine blade BL, which is a specific example of a workpiece W. However, it is also possible for the rib structure RB formed on a workpiece W different from the turbine blade BL to have the same structure.

[0186] like Fig. 8 (a) to Fig. 8 (c) The rib structure RB may also include a structure in which a plurality of convex structures 8 extending along a first direction along the surface of the turbine blade BL (i.e., the surface of the substrate BM and the heat-resistant layer TBC) are arranged along a second direction, the second direction being along the surface of the turbine blade BL and intersecting the first direction. Fig. 8 (a) to Fig. 8 In the example shown in (c), the rib structure RB comprises a structure consisting of multiple convex structures 8 extending along the X-axis and arranged along the Y-axis.

[0187] The convex structure 8 is a structure that protrudes along a direction intersecting both the direction in which the convex structure 8 extends and the direction in which the convex structures 8 are arranged. The convex structure 8 is a structure that protrudes from the surface of the turbine blade BL. Fig. 8 (a) to Fig. 8 In the example shown in (c), the convex structure 8 is a structure that protrudes along the Z-axis direction.

[0188] Between adjacent convex structures 8, grooves 9 are formed that are recessed compared to the surrounding structures. Therefore, the rib structure RB may also include a structure formed by a plurality of grooves 9 extending along a first direction along the surface of the turbine blade BL and arranged along a second direction that is along the surface of the turbine blade BL and intersects the first direction.

[0189] As described above, the machining system SYS of this embodiment forms the rib structure RB by performing a removal process. Therefore, the machining system SYS can also form the rib structure RB by performing a removal process that removes the portion of the turbine blade BL that forms the groove 9. That is, the machining system SYS can also form the rib structure RB by performing a removal process that removes a portion of the turbine blade BL while retaining the portion of the turbine blade BL that forms the convex structure 8. For example, as shown in FIG9(a), a cross-sectional view of the machining light EL irradiated on the turbine blade BL to form the rib structure RB, and in FIG9(b), a plan view showing the movement trajectory of the irradiation position of the machining light EL on the surface of the turbine blade BL, the machining system SYS can also irradiate the turbine blade BL with the machining light EL in a manner that irradiates the portion of the surface of the turbine blade BL that forms the groove 9. Specifically, the machining system SYS can also form the rib structure RB through repeated scanning and stepping actions. The scanning action involves irradiating the surface of the turbine blade BL with the machining light EL while moving the irradiation position of the machining light EL along the X-axis direction extending from the groove 9. The stepping action involves moving the irradiation position of the machining light EL along the Y-axis direction intersecting the X-axis direction extending from the groove 9 without irradiating the surface of the turbine blade BL. In this case, it can also be said that the machining system SYS forms the rib structure RB (i.e., forms the convex structure 8) by forming the groove 9.

[0190] Again in Fig. 8 (a) to Fig. 8 In (c), the convex structure 8 includes, for example, a pair of side surfaces 81 and 82 facing opposite sides. Fig. 8 (a) to Fig. 8 In the example shown in (c), the convex structure 8 includes a side 81 facing the -Y side and a side 82 facing the +Y side. Each of the pair of side surfaces 81 and 82 is planar. However, at least one of the pair of side surfaces 81 and 82 may also comprise a curved surface.

[0191] The pair of side surfaces 81 and 82 may also not be parallel to each other. In this case, the pair of side surfaces 81 and 82 included in the convex structure 8 may also be located at one end of them ( Fig. 8 (a) to Fig. 8 In the example shown in (c), the upper end of the +Z side is connected. The portion of the pair of side surfaces 81 and 82 included in the convex structure 8 constitutes the top 83 of the convex structure 8. It can also be considered that the pair of side surfaces 81 and 82 are connected via the top 83 of the convex structure 8. Fig. 8 (a) to Fig. 8In the example shown in (c), the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. At this time, the shape of the cross section of the convex structure 8 including the Z-axis is a triangular shape. However, the shape of the cross section of the convex structure 8 including the Z-axis can have any shape other than the triangular shape. Also, the pair of side surfaces 81 and 82 can be parallel to each other.

[0192] The side surface 81 of one convex structure 8 and the side surface 82 of another convex structure 8 adjacent to the one convex structure 8 in the direction in which the convex structures 8 are arranged can also be connected at their other end portions (the lower end of the -Z side in the example shown in (c)). The portion connecting the side surface 81 of one convex structure 8 and the side surface 82 of another convex structure 8 constitutes a boundary portion 84 of one convex structure 8 and another convex structure 8. In other words, between two adjacent convex structures 8, there is a boundary portion 84 that corresponds to a concave region that is concave compared to the surroundings. At this time, it can also be considered that two adjacent convex structures 8 are connected via the boundary portion 84. Fig. 8 The example shown in (a) to (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. However, the pair of side surfaces 81 and 82 can be connected such that the lower end of the side surface 81 meets the lower end of the side surface 82. Fig. 8 The example shown in (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. At this time, the shape of the cross section of the convex structure 8 including the Z-axis is a triangular shape. However, the shape of the cross section of the convex structure 8 including the Z-axis can have any shape other than the triangular shape. Also, the pair of side surfaces 81 and 82 can be parallel to each other. Fig. 8 The example shown in (a) to (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. However, the pair of side surfaces 81 and 82 can be connected such that the lower end of the side surface 81 meets the lower end of the side surface 82. Fig. 8 The example shown in (a) to (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. However, the pair of side surfaces 81 and 82 can be connected such that the lower end of the side surface 81 meets the lower end of the side surface 82.

[0193] In the case where the turbine blade BL includes the base material BM and the heat-resistant layer TBC, as shown in Fig. 8 The example shown in (a) to (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. However, the pair of side surfaces 81 and 82 can be connected such that the lower end of the side surface 81 meets the lower end of the side surface 82. Fig. 8 The example shown in (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. At this time, the shape of the cross section of the convex structure 8 including the Z-axis is a triangular shape. However, the shape of the cross section of the convex structure 8 including the Z-axis can have any shape other than the triangular shape. Also, the pair of side surfaces 81 and 82 can be parallel to each other. Fig. 8 The example shown in (a) to (c) is an example in which the pair of side surfaces 81 and 82 are connected such that the upper end of the side surface 81 meets the upper end of the side surface 82. However, the pair of side surfaces 81 and 82 can be connected such that the lower end of the side surface 81 meets the lower end of the side surface 82. Fig. 10In the example shown in (c), the rib structure RB is formed on the surface of the heat-resistant layer TBC that faces the +Z side. The processing system SYS can also form the rib structure RB on the surface of the heat-resistant layer TBC that is opposite the surface facing the base material BM. The processing system SYS can also form the rib structure RB on the surface of the heat-resistant layer TBC of the turbine blade BL that is in contact with the fluid in use. In this case, the processing system SYS does not directly process the base material BM, and thus can relatively easily reform the rib structure RB. Specifically, in the reforming of the rib structure RB, first, the heat-resistant layer TBC in which the rib structure RB is formed is temporarily peeled off, and then a new heat-resistant layer TBC is formed. Subsequently, the processing system SYS forms a new rib structure RB on the newly formed heat-resistant layer TBC. Thus, for deterioration (e.g., breakage, etc.) of the rib structure RB, the rib structure RB can be relatively easily dealt with by reforming. Furthermore, since the processing system SYS does not directly process the base material BM, the rib structure RB can also be formed on the surface of the base material BM that is difficult to directly process or on which the rib structure RB is not originally formed. That is, as long as the heat-resistant layer TBC is formed on the surface of the base material BM, and the heat-resistant layer TBC is processed by the processing system SYS, the rib structure RB can be relatively easily formed.

[0194] Alternatively, in the case where the turbine blade BL includes the base material BM and the heat-resistant layer TBC, as shown in a perspective view that represents the rib structure RB, i.e., FIG. 6B, the processing system SYS can also form the rib structure RB on the base material BM. Specifically, the processing system SYS can form the rib structure RB on the surface of the base material BM that faces the heat-resistant layer TBC (in the example shown in the drawing, the upper surface that faces the +Z side). In this case, as shown in FIG. 6C, the heat-resistant layer TBC can be formed on the surface of the base material BM on which the rib structure RB is formed. Since the heat-resistant layer TBC covers the surface of the base material BM, the surface shape of the heat-resistant layer TBC can be substantially the same as the surface shape of the base material BM on which the heat-resistant layer TBC is formed. Thus, the turbine blade BL on which the heat-resistant layer TBC is formed on the base material BM on which the rib structure RB is formed can be considered to be substantially equivalent to the turbine blade BL on which the rib structure RB is formed on the heat-resistant layer TBC. Fig. 10 Fig. 11 Alternatively, in the case where the turbine blade BL includes the base material BM and the heat-resistant layer TBC, as shown in a perspective view that represents the rib structure RB, i.e., FIG. 6B, the processing system SYS can also form the rib structure RB on the base material BM. Specifically, the processing system SYS can form the rib structure RB on the surface of the base material BM that faces the heat-resistant layer TBC (in the example shown in the drawing, the upper surface that faces the +Z side). In this case, as shown in FIG. 6C, the heat-resistant layer TBC can be formed on the surface of the base material BM on which the rib structure RB is formed. Since the heat-resistant layer TBC covers the surface of the base material BM, the surface shape of the heat-resistant layer TBC can be substantially the same as the surface shape of the base material BM on which the heat-resistant layer TBC is formed. Thus, the turbine blade BL on which the heat-resistant layer TBC is formed on the base material BM on which the rib structure RB is formed can be considered to be substantially equivalent to the turbine blade BL on which the rib structure RB is formed on the heat-resistant layer TBC.

[0195] Alternatively, in the case where the turbine blade BL includes the base material BM and the heat-resistant layer TBC, as shown in a perspective view that represents the rib structure RB, i.e., FIG. 6B, the processing system SYS can also form the rib structure RB on the base material BM. Specifically, the processing system SYS can form the rib structure RB on the surface of the base material BM that faces the heat-resistant layer TBC (in the example shown in the drawing, the upper surface that faces the +Z side). In this case, as shown in FIG. 6C, the heat-resistant layer TBC can be formed on the surface of the base material BM on which the rib structure RB is formed. Since the heat-resistant layer TBC covers the surface of the base material BM, the surface shape of the heat-resistant layer TBC can be substantially the same as the surface shape of the base material BM on which the heat-resistant layer TBC is formed. Thus, the turbine blade BL on which the heat-resistant layer TBC is formed on the base material BM on which the rib structure RB is formed can be considered to be substantially equivalent to the turbine blade BL on which the rib structure RB is formed on the heat-resistant layer TBC. (4) Modification of the action of forming the rib structure RB

[0196] (4-1) First modification of the action of forming the rib structure RB ​​

[0197] Next, a variation of the action that forms the rib structure RB will be explained.

[0198] Fig. 8

[0199] In the first variation, the machining system SYS may also form at least one of the top 83 and the boundary portion 84 of the convex structure 8 in a shape similar to that described above. Fig. 8 (a) to Fig. 10 to Fig. 11 (c) and Fig. 12 to Fig. 18 The rib structures RB with different shapes are shown below. (Refer to the following...) Fig. 12 to Fig. 18 The rib structure RB formed in the first modified example will be explained. Fig. 12 These are cross-sectional views representing an example of the rib structure RB formed in the first modified example.

[0200] like Fig. 12 As shown, the machining system SYS can also form the rib structure RB by including a plane 831 on the top 83 of the convex structure 8. The plane 831 connects one end of a pair of side surfaces 81 and 82 included in the convex structure 8. Fig. 12 In the example shown, this refers to the upper part of the +Z side. That is, a pair of side surfaces 81 and 82 are connected via a plane 831 that forms the top 83. Therefore, Fig. 12 In the example shown, the upper end of side 81 is not directly connected to the upper end of side 82. Plane 831 intersects both sides 81 and 82. Plane 831 faces the opposite direction to the substrate BM. Fig. 13 In the example shown, the face is the +Z side (and is the top). Therefore, plane 831 can also be called the top surface.

[0201] like Fig. 13 As shown, the machining system SYS can also form the rib structure RB by including a curved surface 832 on the top 83 of the convex structure 8. The curved surface 832 connects one end of a pair of side surfaces 81 and 82 included in the convex structure 8. Fig. 13 In the example shown, this refers to the upper part of the +Z side. That is, a pair of side surfaces 81 and 82 are connected via a curved surface 832 that forms the top 83. Therefore, Fig. 13 In the example shown, the upper end of side 81 is not directly connected to the upper end of side 82. Curved surface 832 intersects both sides 81 and 82. Curved surface 832 faces the opposite direction to the substrate BM. Fig. 14 In the example shown, the surface is on the +Z side (and is the top). Therefore, surface 832 can also be called the top surface. Surface 832 can also be a surface that convexes to the opposite side of the substrate BM.

[0202] like Fig. 14As shown, the processing system SYS can also form the rib structure RB in a manner in which the top portion 83 of the convex structure 8 includes both the flat surface 831 and the pair of curved surfaces 832. For example, the top portion 83 can include the flat surface 831 and a pair of curved surfaces 832 sandwiching the flat surface 831. One end portion of the pair of curved surfaces 832 is connected to one end portion (e.g., an upper end portion) of the pair of side surfaces 81 and 82 included in the convex structure 8, respectively. Further, the flat surface 831 is connected to the other end portion of the pair of curved surfaces 832. That is, one of the pair of curved surfaces 832 is connected to the flat surface 831 and the side surface 81, and the other of the pair of curved surfaces 832 is connected to the flat surface 831 and the side surface 82. At this time, the pair of side surfaces 81 and 82 are connected via the flat surface 831 and the pair of curved surfaces 832 constituting the top portion 83. Thus, Fig. 12 to Fig. 14 In the example shown, the upper end portion of the side surface 81 and the upper end portion of the side surface 82 are not directly connected to each other.

[0203] Fig. 12 In the example shown, the size D83 of the top portion 83 can also be set based on the pitch P8 of the convex structures 8. For example, the size D83 of the top portion 83 can also be set to be within a range of at least 1% to 9% (i.e., several %) of the pitch P8 of the convex structures 8. For example, the size D83 of the top portion 83 can also be set to be within a range of at least 1% to 6% of the pitch P8 of the convex structures 8. For example, the size D83 of the top portion 83 can also be set to be within a range of at least 1% to 3% of the pitch P8 of the convex structures 8. In addition, the "size D83 of the top portion 83" in the present embodiment can refer to the size (typically, the width) of the surface constituting the top portion 83 in the direction in which the convex structures 8 are arranged. Fig. 13 In the example shown, the size D83 of the top portion 83 can refer to the size of the flat surface 831 included in the top portion 83 in the Y-axis direction. Fig. 14 In the example shown, the size D83 of the top portion 83 can refer to the size of the curved surface 832 included in the top portion 83 in the Y-axis direction. Fig. 12 In the example shown, the size D83 of the top portion 83 can refer to the sum of the sizes of the flat surface 831 and the pair of curved surfaces 832 included in the top portion 83 in the Y-axis direction. Also, the "pitch P8 of the convex structures 8" in the present embodiment can refer to the interval between two adjacent convex structures 8 in a direction (pitch direction) intersecting the direction in which the convex structures 8 extend. Fig. 12In the example shown, "the spacing P8 of the convex structures 8" can also refer to the interval between two adjacent convex structures 8 in the Y-axis direction. Since convex structures 8 and grooves 9 are alternately formed in the direction intersecting the direction extending from the convex structures 8, "the spacing P8 of the convex structures 8" can also be considered substantially the same as "the spacing P9 of the grooves 9". In addition, "the spacing P9 of the grooves 9" in this embodiment can also refer to the interval between two adjacent grooves 9 in the direction intersecting the direction extending from the grooves 9 (the spacing direction). Fig. 13 to Fig. 14 In the example shown, "slot spacing P9" can also refer to the interval between two adjacent slots 9 in the Y-axis direction.

[0204] Fig. 15 In the example shown, the radius of curvature of surface 832 is set to be in the range of 1 micrometer to 9 micrometers (i.e., several micrometers). The radius of curvature of surface 832 can also be set to be in the range of 1 micrometer to 6 micrometers. The radius of curvature of surface 832 can also be set to be in the range of 1 micrometer to 4 micrometers. The radius of curvature of surface 832 can also be set to be in the range of 1 micrometer to 2 micrometers.

[0205] Thus, when the top 83 includes at least one of a plane 831 and a curved surface 832, compared to the case where the top 83 does not include either a plane 831 or a curved surface 832 (resulting in the upper end of side 81 being directly connected to the upper end of side 82), the angle of the corner formed at the top 83 becomes gentler (i.e., larger). Consequently, the probability of cracks forming at the top 83 decreases. Therefore, the machining system SYS can form a rib structure RB with relatively high durability. In particular, the top 83 including the curved surface 832 can also be considered substantially equivalent to a top 83 with chamfering. As a result, when the top 83 includes the curved surface 832, compared to the case where the top 83 includes a plane 831, the probability of cracks forming at the top 83 becomes even smaller. That is, therefore, the machining system SYS can form a rib structure RB with even higher durability.

[0206] like Fig. 15 As shown, the machining system SYS can also form the rib structure RB by including a plane 841 in the boundary portion 84 of the convex structure 8. The plane 841 connects two adjacent convex structures 8. That is, two adjacent convex structures 8 are connected via the plane 841 constituting the boundary portion 84. Specifically, the plane 841 connects the lower end of the side surface 81 of one convex structure 8 to the lower end of the side surface 82 of another convex structure 8 adjacent to one convex structure 8. Therefore, Fig. 12 In the example shown, the lower end of side 81 of one convex structure 8 is not directly connected to the lower end of side 82 of another convex structure 8. Plane 841 intersects with both sides 81 and 82. Plane 841 is on the opposite side of the substrate BM.Fig. 16 In the example shown, the face is the +Z side (and is the top). Therefore, plane 841 can also be called the top surface.

[0207] like Fig. 16 As shown, the machining system SYS can also form the rib structure RB by including a curved surface 842 in the boundary portion 84 of the convex structure 8. The curved surface 842 connects two adjacent convex structures 8. That is, two adjacent convex structures 8 are connected via the curved surface 842 constituting the boundary portion 84. Specifically, the curved surface 842 connects the lower end of the side surface 81 of one convex structure 8 to the lower end of the side surface 82 of another convex structure 8 adjacent to one convex structure 8. Therefore, Fig. 12 In the example shown, the lower end of side 81 of one convex structure 8 is not directly connected to the lower end of side 82 of another convex structure 8. The curved surface 842 intersects with both sides 81 and 82. The curved surface 842 faces the opposite direction to the substrate BM. Fig. 17 In the example shown, the surface is on the +Z side (and is the top). Therefore, surface 842 can also be called the top surface. Surface 842 can also be a surface that convexes towards the substrate BM side.

[0208] like Fig. 17 As shown, the machining system SYS can also form the rib structure RB by including both a plane 841 and a curved surface 842 in the boundary portion 84 of the convex structure 8. For example, the boundary portion 84 may also include a plane 841 and a pair of curved surfaces 842. One end of one of the pairs of curved surfaces 842 is connected to the other end (e.g., the lower end) of the side surface 81 included in one of the convex structures 8. One end of the other pair of curved surfaces 842 is connected to the other end (e.g., the lower end) of the side surface 82 included in another convex structure 8 adjacent to one of the convex structures 8. Furthermore, the plane 841 connects to the other end of the pair of curved surfaces 842. That is, one of the pairs of curved surfaces 842 may connect the plane 841 to the side surface 81 of one convex structure 8, and the other of the pairs of curved surfaces 842 may connect the plane 841 to the side surface 82 of another convex structure 8. In this case, two adjacent convex structures 8 are connected via the plane 841 and the pair of curved surfaces 842 constituting the boundary portion 84. Therefore, Fig. 17 In the example shown, the lower end of side 81 is not directly connected to the lower end of side 82.

[0209] Fig. 17In the example shown, the sum of the dimensions D842 of a pair of curved surfaces 842 (i.e., 2 × D842) can also be set based on the spacing P8 of the convex structures 8. For example, the sum of the dimensions D842 of a pair of curved surfaces 842 can also be less than the spacing P8 of the convex structures 8. In addition, the “dimension D842 of curved surface 842” in this embodiment can also refer to the dimension (typically the width) of the curved surfaces 842 in the direction in which the convex structures 8 are arranged. Fig. 16 In the example shown, the dimension D842 of surface 842 can also refer to the dimension of surface 842 in the Y-axis direction. Furthermore, Fig. 17 as well as Fig. 18 In the example shown, the radius of curvature of surface 842 can also be set to be in the range of 1 micrometer to 9 micrometers (i.e., several micrometers). The radius of curvature of surface 842 can also be set to be in the range of 1 micrometer to 6 micrometers. The radius of curvature of surface 842 can also be set to be in the range of 1 micrometer to 4 micrometers. The radius of curvature of surface 842 can also be set to be in the range of 1 micrometer to 2 micrometers.

[0210] Thus, when the boundary portion 84 includes at least one of a plane 841 and a curved surface 842, compared to the case where the boundary portion 84 does not include a plane 841 and a curved surface 842 (resulting in the lower end of the side surface 81 being directly connected to the lower end of the side surface 82), the angle of the corner formed in the boundary portion 84 becomes gentler. As a result, the possibility of cracks forming in the boundary portion 84 is reduced. Therefore, the machining system SYS can form a rib structure RB with relatively high durability. In particular, the boundary portion 84 including the curved surface 842 can also be considered substantially equivalent to a boundary portion 84 with chamfering. As a result, when the boundary portion 84 includes the curved surface 842, compared to the case where the boundary portion 84 includes a plane 841, the possibility of cracks forming in the boundary portion 84 becomes even smaller. Therefore, the machining system SYS can form a rib structure RB with even higher durability.

[0211] like Fig. 18 As shown, the machining system SYS can also form the rib structure RB by having the top 83 of the convex structure 8 include at least one of a plane 831 and a curved surface 832, and the boundary portion 84 of the convex structure 8 include at least one of a plane 841 and a curved surface 842. Fig. 12 to Fig. 18 This indicates that the top 83 includes a plane 831 and a pair of curved surfaces 832, and the boundary portion 84 includes a plane 841 and a pair of curved surfaces 842, forming a rib structure RB. In this case, the machining system SYS can also form a rib structure RB with higher durability.

[0212] In addition, the aforementioned Fig. 12 to Fig. 18 This illustrates an example of the processing system SYS forming rib structures RB on a heat-resistant layer TBC. However, the processing system SYS can also form rib structures RB on a substrate BM.Fig. 12 to Fig. 18 The machining system SYS can also form the rib structure RB having the shape shown in the drawing. At this time, the machining system SYS can also form the rib structure RB having relatively high durability.

[0213] Furthermore, the rib structure RB having the shape shown in the drawing is formed on the base material BM. At this time, the machining system SYS can also form the rib structure RB having relatively high durability. (4-2) Second modification of the action of forming the rib structure RB In the case where the rib structure RB having the shape shown in the drawing is formed, as described above, the angle of the corner formed at at least one of the top portion 83 and the boundary portion 84 of the convex structure 8 forming the rib structure RB becomes gentle. As a result, compared with the case where the angle of the corner formed at at least one of the top portion 83 and the boundary portion 84 is relatively steep (i.e., relatively small), the adhesion of the heat-resistant layer TBC to the corner is improved.

[0214] Furthermore, in the case where the angle of the corner formed at at least one of the top portion 83 and the boundary portion 84 is gentle, compared with the case where the angle of the corner formed at at least one of the top portion 83 and the boundary portion 84 is relatively steep, the possibility that the surface treatment of the surface of the base material BM on which the rib structure RB is formed is appropriately performed is higher. For example, the possibility that the surface of the base material BM on which the rib structure RB is formed is appropriately quenched as an example of the surface treatment is higher. As a result, as described later, in the case where an arbitrary coating layer is formed on the base material BM by performing the surface treatment such as quenching on the surface of the base material BM, the possibility that the arbitrary coating layer is appropriately formed on the base material BM on which the rib structure RB is formed is higher.

[0215] Fig. 19

[0216] In the second modification example, the machining system SYS can also form the rib structure RB on the turbine blade BL on which the groove 7 different from the groove 9 used for forming the rib structure RB is formed. Here, the turbine blade BL on which the groove 7 is formed is described with reference to Fig. 19 (a) of FIG. 10 and Fig. 19 (b) of FIG. 11. Fig. 19 (a) of FIG. 10 is a cross-sectional view showing the turbine blade BL on which the groove 7 is formed, Fig. 19 (b) of FIG. 11 is a plan view showing the turbine blade BL on which the groove 7 is formed.

[0217] As described above with reference to Fig. 19 (a) of FIG. 10 and Fig. 19In the example shown in (b), the turbine blade BL can be formed with a plurality of grooves 7 extending along a third direction along the surface of the turbine blade BL. For example, the turbine blade BL can be formed with a single groove 7 extending along a third direction along the surface of the turbine blade BL. For example, the turbine blade BL can be formed with a plurality of grooves 7 extending along a third direction along the surface of the turbine blade BL. The plurality of grooves 7 extending along the third direction can be arranged along a fourth direction intersecting the third direction. For example, the turbine blade BL can be formed with a plurality of grooves 7 extending along a plurality of different directions along the surface of the turbine blade BL, respectively. For example, the turbine blade BL can be formed with at least one groove 7 extending along a third direction along the surface of the turbine blade BL and at least one groove 7 extending along a fourth direction along the surface of the turbine blade BL, the fourth direction being a direction along the surface of the turbine blade BL and intersecting the third direction. Fig. 19 In the example shown in (a) and Fig. 19 In the example shown in (b), the turbine blade BL can be formed with a plurality of grooves 7 extending along a third direction along the surface of the turbine blade BL. For example, the turbine blade BL can be formed with a single groove 7 extending along a third direction along the surface of the turbine blade BL. For example, the turbine blade BL can be formed with a plurality of grooves 7 extending along a third direction along the surface of the turbine blade BL. The plurality of grooves 7 extending along the third direction can be arranged along a fourth direction intersecting the third direction. For example, the turbine blade BL can be formed with a plurality of grooves 7 extending along a plurality of different directions along the surface of the turbine blade BL, respectively. For example, the turbine blade BL can be formed with at least one groove 7 extending along a third direction along the surface of the turbine blade BL and at least one groove 7 extending along a fourth direction along the surface of the turbine blade BL, the fourth direction being a direction along the surface of the turbine blade BL and intersecting the third direction.

[0218] The depth D7 of the groove 7 Fig. 19 In the example shown in (a), the depth D7 of the groove 7 can be set based on the thickness D9 of the heat-resistant layer TBC in which the groove 7 is formed (the dimension along the Z-axis direction). Fig. 20 to Fig. 22 In the example shown in (a), the depth D7 of the groove 7 can be set based on the thickness D9 of the heat-resistant layer TBC in which the groove 7 is formed (the dimension along the Z-axis direction). For example, the depth D7 of the groove 7 can be set to be smaller than the thickness D9 of the heat-resistant layer TBC. The depth D7 of the groove 7 can be set to be 30% or less of the thickness D9 of the heat-resistant layer TBC. For example, in a case where the thickness D9 of the heat-resistant layer TBC is 300 micrometers to 1 millimeter, the depth D7 of the groove 7 can be set to be 90 micrometers (= 300 micrometers x 30%) to 300 micrometers (= 1 millimeter x 30%) or less.

[0219] In a case where a plurality of grooves 7 are formed, the depths D7 of the plurality of grooves 7 can be the same as each other. Alternatively, the depths D7 of at least two of the plurality of grooves 7 can be different from each other. For example, the depth of the groove 7 formed on a first portion of the surface of the turbine blade BL can be different from the depth of the groove 7 formed on a second portion of the surface of the turbine blade BL. For example, the depth D7 of the groove 7 extending along a third direction can be different from the depth D7 of the groove 7 extending along a fourth direction intersecting the third direction.

[0220] In the case where the plurality of grooves 7 are formed, the plurality of grooves 7 can also be formed so as to be arranged at the same pitch P7. In addition, the "pitch P7 of the grooves 7" in the present embodiment can also refer to the interval of two grooves 7 adjacent in a direction (pitch direction) intersecting the direction in which the grooves 7 extend. Fig. 20 In the example shown, the "pitch P7 of the grooves 7X" can also refer to the interval of two grooves 7X adjacent in the Y-axis direction. The "pitch P7 of the grooves 7Y" can also refer to the interval of two grooves 7X adjacent in the X-axis direction. Alternatively, the plurality of grooves 7 can also be formed so as to be arranged at different pitches P7. For example, the pitch P7 of the grooves 7 extending along the third direction can also be different from the pitch P7 of the grooves 7 extending along the fourth direction. For example, the pitch P7 of the grooves 7 formed in the third portion of the surface of the turbine blade BL can also be different from the pitch P7 of the grooves 7 formed in the fourth portion of the turbine blade BL.

[0221] The grooves 7 can also be grooves that can mitigate stress of the turbine blade BL. That is, the grooves 7 can also have a function of mitigating stress of the turbine blade BL. In particular, since the grooves 7 are formed in the heat-resistant layer TBC, the grooves 7 can also be grooves that can mitigate stress of the heat-resistant layer TBC. For example, when the temperature of the heat-resistant layer TBC changes, the heat-resistant layer TBC can possibly expand and contract. That is, the heat-resistant layer TBC can possibly expand or contract. The grooves 7 can also be grooves that mitigate stress generated in the heat-resistant layer TBC due to expansion and contraction of the heat-resistant layer TBC. For example, at this time, if the heat-resistant layer TBC deforms in a manner in which the width of the grooves 7 changes in correspondence with changes in expansion and contraction of the heat-resistant layer TBC, stress generated in the heat-resistant layer TBC due to expansion and contraction of the heat-resistant layer TBC is mitigated. As a result, the possibility of the heat-resistant layer TBC being damaged due to stress is relatively small. Therefore, it is possible to manufacture a turbine blade BL that is relatively strong against stress and in which the resistance to fluid is appropriately reduced.

[0222] The groove 7 can also be formed using a different processing system than the processing system SYS. For example, the groove 7 can also be formed using other processing systems that can form the groove 7 using laser cutting or laser etching. The processing system SYS can also form the rib structure RB on the turbine blade BL, which has the groove 7 formed by other processing systems, under the control of the control device 4. In this case, the processing system SYS can also form the rib structure RB based on information related to the formed groove 7. For example, the processing system SYS can also use a measuring light ML to measure the formed groove 7 and form the rib structure RB based on information related to the measurement result of the measuring light ML on the groove 7. As a specific example, the processing system SYS can also determine the position of the groove 7 on the surface of the turbine blade BL (e.g., the surface of the heat-resistant layer TBC) based on information related to the measurement result of the measuring light ML on the groove 7, and irradiate the position with the processing light EL at a position that has a predetermined positional relationship with the determined position of the groove 7, thereby forming the rib structure RB. That is, the information related to the measurement result of the groove 7 can also be used as information for controlling the irradiation position of the processing light EL (so-called servo information).

[0223] Alternatively, groove 7 can also be formed by machining system SYS. That is, machining system SYS can also form groove 7 by removing material using machining light EL, similar to the case of forming groove 9 for forming rib structure RB, under the control of control device 4. In this case, machining system SYS can also form rib structure RB after forming groove 9 under the control of control device 4. Alternatively, machining system SYS can also form groove 7 after forming rib structure RB under the control of control device 4.

[0224] When the machining system SYS forms the rib structure RB on the turbine blade BL with the groove 7 (or forms the rib structure RB on the turbine blade BL before forming the groove 7), it can also form the rib structure RB that satisfies the structural conditions shown below. Hereinafter, with reference to... Fig. 21 On the one hand, the structural conditions that the rib structure RB should meet are explained. Fig. 22 This is a cross-sectional view of a turbine blade BL, which has both grooves 7 and rib structures RB. Fig. 20 to Fig. 22 This is a three-dimensional view of a turbine blade BL, which has both grooves 7 and rib structures RB. Fig. 12 This is a top view showing the turbine blade BL, which has both grooves (7) and rib structures (RB). Additionally, Fig. 15 In the example shown, the machining system SYS forms a top 83 containing a plane 831, a boundary portion 84 containing a plane 841, and a rib structure RB that satisfies the structural conditions (i.e., containing...). Fig. 12 The top 83 shown and Fig. 15The boundary portion 84 shown is a rib structure RB that satisfies the structural conditions. However, the machining system SYS can also form a rib structure RB as described below, that is, including a rib structure RB having the same... Fig. 20 The shapes shown are tops of different shapes 83 and / or have the same shape as Fig. 21 The shapes shown are boundary portions 84 of different shapes, and they satisfy the structural conditions described later.

[0225] The structural conditions may also include depth conditions related to the depth D9 of the groove 9 forming the rib structure RB. For example, the depth conditions may also include a first depth condition related to the depth D9 of the groove 9 itself. The first depth condition may also include the condition that the depth D9 of the groove 9 is from 1 micrometer to 99 micrometers (i.e., several micrometers to tens of micrometers). For example, the depth conditions may also include, in addition to or instead of the first depth condition, a second depth condition related to the relationship between the depth D9 of the groove 9 and the thickness D of the heat-resistant layer TBC. Fig. 20 as well as Fig. 21 As shown, the second depth condition may also include the condition that the depth D9 of the groove 9 is less than the thickness D of the heat-resistant layer TBC. The second depth condition may also include the condition that the depth D9 of the groove 9 is more than 0.2% and less than 20% of the thickness D of the heat-resistant layer TBC. For example, the depth condition may also include a third depth condition related to the relationship between the depth D9 of the groove 9 and the depth D7 of the groove 7, in addition to or replacing at least one of the first and second depth conditions. Fig. 20 as well as Fig. 21 As shown, the third depth condition can also include the condition that the depth D9 of slot 9 is different from the depth D7 of slot 7. For example... Fig. 20 as well as Fig. 21 As shown, the third depth condition can also include the condition that the depth D9 of groove 9 is less than the depth D7 of groove 7 (i.e., groove 9 is shallower than groove 7). In other words, as... Fig. 23 as well as Fig. 23 As shown, the third depth condition may also include the condition that the depth D7 of groove 7 is greater than the depth D9 of groove 9 (i.e., groove 7 is deeper than groove 9). The third depth condition may also include the condition that the depth D7 of groove 7 is more than 1.5 times and less than 15 times the depth D9 of groove 9.

[0226] Here, when the third depth condition in the depth conditions is met (especially the condition that the depth D9 of slot 9 is less than the depth D7 of slot 7), the likelihood that the effect of the rib structure RB (i.e., the reduction effect of the turbine blade BL surface on fluid resistance) will be hindered by slot 9 becomes smaller. Specifically, as Fig. 23As shown, assuming the depth D9 of groove 9 is greater than the depth D7 of groove 7, the bottom 71 of groove 7 is located above the bottom (i.e., boundary 84) of groove 9. As a result, between the plurality of convex structures 8, the bottom 71 of groove 7 becomes a spacer wall 72 on the upper surface. The spacer wall 72 is as follows... Fig. 21 As shown, fluid flowing along the multiple convex structures 8 may be blocked between them (i.e., inside the groove 9). That is, the partition wall 72, as... Fig. 21 As shown, the flow of fluid along the convex structure 8 may be disturbed. In particular, when the direction in which the convex structure 8 extends intersects the direction in which the groove 7 extends, the possibility of the partition wall 72 disturbing the flow of fluid along the convex structure 8 increases. However, if the depth D9 of the groove 9 is less than the depth D7 of the groove 7, then as... Fig. 20 As shown, the bottom 71 of the groove 7 does not appear between the multiple convex structures 8, becoming the partition wall 72 on the upper surface. As a result, as... Fig. 22 As shown, the flow of fluid flowing along the multiple convex structures 8 between them (i.e., inside the groove 9) is less likely to be disturbed by the partition wall 72. Therefore, the effect of reducing the surface resistance of the turbine blades BL to the fluid, provided by the rib structure RB, can be appropriately enjoyed. However, when the direction in which the convex structures 8 extend is parallel to the direction in which the groove 7 extends, in the rib structure RB containing multiple convex structures 8, sections with different heights may be formed due to the groove 7 (e.g., structures with heights different from the convex structures 8), which may potentially reduce the effectiveness of the rib structure RB.

[0227] The structural conditions may also include spacing conditions related to the spacing P9 of the slots 9 forming the rib structure RB. The spacing conditions may also include conditions related to the relationship between the spacing P9 of the slots 9 and the spacing P7 of the slots 7. In particular, the spacing conditions may also include conditions related to the relationship between the spacing P9 of the slots 9 in one direction and the spacing P7 of the slots 7 in the same direction. Fig. 20 as well as Fig. 22 In the example shown, the spacing condition may also include a condition relating to the relationship between the spacing P9 of the slots 9 in the Y-axis direction and the spacing P7 of the slots 7 in the Y-axis direction. However, the spacing condition may also include a condition relating to the relationship between the spacing P9 of the slots 9 in one direction and the spacing P7 of the slots 7 in another direction that is different from the first direction. Fig. 20 as well as Fig. 22In the example shown, the spacing condition may also include conditions related to the relationship between the spacing P9 of slot 9 in the Y-axis direction and the spacing P7 of slot 7 in the X-axis direction. For example, the spacing condition may also include the condition that the spacing P9 of slot 9 is different from the spacing P7 of slot 7. For example, the spacing condition may also include the condition that the spacing P7 of slot 7 is greater than the spacing P9 of slot 9. For example, the spacing condition may also include the condition that the spacing P7 of slot 7 is more than twice the spacing P9 of slot 9. When the condition that the spacing P7 of slot 7 is more than twice the spacing P9 of slot 9 is met, such as... Fig. 21 as well as Fig. 22 As shown, two or more slots 9 are formed between two adjacent slots 7 in a direction intersecting the direction extending from slot 7 (i.e., the direction of the shorter side of slot 7). In this case, the spacing condition may also include the condition that the spacing P7 of slot 7 and the spacing P9 of slot 9 are set such that two or more slots 9 are formed between two adjacent slots 7 in a direction intersecting the direction extending from slot 7. For example, the spacing condition may also include the condition that the spacing P7 of slot 7 is more than 20 times and less than 30 times the spacing P9 of slot 9. In other words, the spacing condition may also include the condition that the spacing P7 of slot 7 and the spacing P9 of slot 9 are set such that 20 or more and 30 or less slots 9 are formed between two adjacent slots 7 in a direction intersecting the direction extending from slot 7. For example, the spacing condition may also include the condition that the spacing P7 of slot 7 is an integer multiple of the spacing P9 of slot 9. When the condition that the spacing P7 of slot 7 is an integer multiple of the spacing P9 of slot 9 is satisfied, an integer number of slots 9 are formed between two adjacent slots 7 in a direction intersecting the direction extending from slot 7. At this point, the machining system SYS is able to relatively easily form a rib structure RB with a regular structure on the turbine blade BL with grooves 7.

[0228] The structural conditions may also include width conditions related to the width W9 of the groove 9 forming the rib structure RB. Width conditions may also include conditions related to the relationship between the width W9 of the groove 9 and the width W7 of the groove 7. Furthermore, in this embodiment, "width W9 of the groove 9" may also refer to the dimension of the groove 9 in the direction intersecting the direction in which the groove 9 extends (i.e., the direction of the shorter side of the groove 9). Similarly, in this embodiment, "width W7 of the groove 7" may also refer to the dimension of the groove 7 in the direction intersecting the direction in which the groove 7 extends (i.e., the direction of the shorter side of the groove 7). For example, the width condition may also include the condition that the width W9 of the groove 9 is different from the width W7 of the groove 7. For example, the width condition may also include the condition that the width W7 of the groove 7 is wider than the width W9 of the groove 9. For example, the width condition may also include the condition that the width W7 of the groove 7 is in the range of more than one time and less than ten times the width W9 of the groove 9.

[0229] The structural conditions may also include extension direction conditions related to the direction in which the slot 9 forming the rib structure RB extends. Extension direction conditions may also include conditions related to the relationship between the extension directions of at least one slot 9 and at least one slot 7. Furthermore, in this embodiment, "the direction in which the slot 9 extends" may also refer to the direction in which the slot 9 extends along the surface of the turbine blade BL on which the slot 9 is formed (e.g., the surface of the heat-resistant layer TBC). Similarly, in this embodiment, "the direction in which the slot 7 extends" may also refer to the direction in which the slot 7 extends along the surface of the turbine blade BL on which the slot 7 is formed (e.g., the surface of the heat-resistant layer TBC). For example, the extension direction condition may also include the condition that the extension direction of at least one slot 9 is the same as the extension direction of at least one slot 7. That is, the extension direction condition may also include the condition that the extension direction of at least one slot 9 is parallel to the extension direction of at least one slot 7. For example, the extension direction condition may also include the condition that the extension direction of at least one slot 9 is different from the extension direction of at least one slot 7. That is, the extension direction condition may also include the condition that the extension direction of at least one slot 9 intersects the extension direction of at least one slot 7. In particular, the extension direction condition may also include the condition that the direction in which at least one slot 9 extends is orthogonal to the direction in which at least one slot 7 extends. Fig. 22 as well as Fig. 22 In the example shown, the extension direction condition includes the condition that, when at least one slot 7X extends along the X-axis direction and at least one slot 7Y extends along the Y-axis direction, the extension direction of each of the plurality of slots 9 is the same as the extension direction of slot 7X (i.e., the X-axis direction). However, the extension direction condition may also include the condition that, when at least one slot 7 extends along the X-axis direction and at least one slot 7 extends along the Y-axis direction, at least one of the plurality of slots 9 extends along at least one of the X-axis and Y-axis directions.

[0230] Furthermore, the structural conditions may also include a spacing direction condition related to the spacing direction of the slots 9 forming the rib structure RB. The spacing direction condition may also include a condition related to the relationship between the spacing directions of the plurality of slots 9 and the spacing directions of the plurality of slots 7. Additionally, in this embodiment, "the spacing direction of the plurality of slots 9" may also refer to the spacing direction along the surface of the turbine blade BL on which the plurality of slots 9 are formed (e.g., the surface of the heat-resistant layer TBC). Similarly, in this embodiment, "the spacing direction of the plurality of slots 7" may also refer to the spacing direction along the surface of the turbine blade BL on which the slots 7 are formed (e.g., the surface of the heat-resistant layer TBC). For example, the spacing direction condition may also include the condition that the spacing direction of the plurality of slots 9 is the same as the spacing direction of the plurality of slots 7. That is, the spacing direction condition may also include the condition that the spacing direction of the plurality of slots 9 is parallel to the spacing direction of the plurality of slots 7. For example, the spacing direction condition may also include the condition that the spacing direction of the plurality of slots 9 is different from the spacing direction of the plurality of slots 7. That is, the spacing direction condition may also include the condition that the spacing direction of the plurality of slots 9 intersects the spacing direction of the plurality of slots 7. In particular, the spacing direction condition may also include the condition that the spacing direction of the multiple slots 9 is orthogonal to the spacing direction of the multiple slots 7. Fig. 24 as well as Fig. 24 In the example shown, the spacing direction condition may also include the following condition: when the spacing direction of the plurality of slots 7X is the Y-axis direction and the spacing direction of the plurality of slots 7Y is the X-axis direction, the spacing direction of each of the plurality of slots 9 is the same as the spacing direction of slot 7X (i.e., the Y-axis direction). However, the spacing direction condition may also include the following condition: when the spacing direction of the plurality of slots 7 is the X-axis direction and the spacing direction of the plurality of slots 7 is the Y-axis direction, the spacing direction of the plurality of slots 9 is the same as at least one of the X-axis direction and the Y-axis direction.

[0231] The structural conditions described above are, for example, based on the premise that turbine blades BL are manufactured with relatively strong resistance to stress and appropriately reduced resistance to fluid. Therefore, when the structural conditions are met, compared to cases where the structural conditions are not met, turbine blades BL exhibit relatively stronger resistance to stress and / or lower resistance to fluid.

[0232] In the case of forming multiple slots 7, such as Fig. 24As shown, the surface of the turbine blade BL (e.g., the surface of the heat-resistant layer TBC) can be divided into multiple surface regions SA by multiple grooves 7. In this case, the structural conditions associated with the grooves 9 formed in the first surface region SA of the multiple surface regions SA can also be the same as the structural conditions associated with the grooves 9 formed in the second surface region SA of the multiple surface regions SA, which are different from the first surface region SA. As described above, the structural conditions are conditions related to at least one of the depth W9, spacing P9, width W9, spacing direction, and extension direction of the groove 9. At least one of the depth W9, spacing P9, width W9, spacing direction, and extension direction of the groove 9 is an example of the characteristics of the groove 9. Therefore, the characteristics of the grooves 9 formed in the first surface region SA of the multiple surface regions SA can also be the same as the characteristics of the grooves 9 formed in the second surface region SA of the multiple surface regions SA. Furthermore, Fig. 25 This represents an example where the structural conditions are the same across all the multiple surface regions SA.

[0233] Alternatively, the structural conditions associated with the groove 9 formed in the first surface region SA of the multiple surface regions SA and the structural conditions associated with the groove 9 formed in the second surface region SA of the multiple surface regions SA can also be different. That is, the characteristics of the groove 9 formed in the first surface region SA of the multiple surface regions SA and the characteristics of the groove 9 formed in the second surface region SA of the multiple surface regions SA can also be different. For example, a top view of a turbine blade BL showing both the groove 7 and the rib structure RB is shown. Fig. 19 to Fig. 24 As shown, the spacing P9 of the grooves 9 formed in surface regions SA#1 to SA#3 can also be different from the spacing P9 of the grooves 9 formed in surface regions SA#4 to SA#6. For example... Fig. 26 As shown, the direction in which the grooves 9 formed in surface regions SA#1 to SA#3 extend may differ from the direction in which the grooves 9 formed in surface regions SA#4 to SA#6 extend. Furthermore, as... Fig. 26 As shown, the spacing direction of the plurality of grooves 9 formed in surface regions SA#1 to SA#3 may be different from the spacing direction of the plurality of grooves 9 formed in surface regions SA#4 to SA#6.

[0234] Furthermore, as shown in the top view of the turbine blade BL, which has both groove 7 and rib structure RB, (5) ModificationAs shown, the spacing P9 of the grooves 9 formed in surface region SA#1 and the spacing P9 of the grooves 9 in surface region SA#2 adjacent to surface region SA#1 in the extension direction of the grooves 9 can also be different. The extension direction (or spacing direction) of the grooves 9 formed in surface region SA#2 and the extension direction (or spacing direction) of the grooves 9 in surface region SA#3 adjacent to surface region SA#2 in the extension direction of the grooves 9 can also be different. The extension direction (or spacing direction) of the grooves 9 formed in surface region SA#2 and the extension direction (or spacing direction) of the grooves 9 formed in surface region SA#5 can also be different, wherein surface region SA#5 is adjacent in a direction (spacing direction) intersecting with the extension direction of the grooves 9 formed in surface region SA#2. Furthermore, the extension direction (or spacing direction) and spacing P9 of the grooves 9 formed in surface region SA#5, and the extension direction (or spacing direction) and spacing P9 of the grooves 9 in surface region SA#6 adjacent to surface region SA#5 in the extension direction of the grooves 9 can each be different.

[0235] The structural conditions (in other words, the characteristics of the groove 9) applicable to each surface region SA can also be set according to the characteristics of the fluid in contact with each surface region SA. For example, the structural conditions (in other words, the characteristics of the groove 9) applicable to each surface region SA can also be set to conditions (characteristics) that reduce the resistance of each surface region SA to the fluid in contact with each surface region SA. As a result, compared with the case where the structural conditions (in other words, the characteristics of the groove 9) are the same for multiple surface regions SA, it is possible to manufacture turbine blades BL with appropriately reduced resistance to the fluid.

[0236] In addition, the aforementioned Fig. 12 to Fig. 18 An example of forming groove 7 in the heat-resistant layer TBC is shown. However, groove 7 can also be formed in the substrate BM. In this case, the processing system SYS can also form rib structure RB on the substrate BM where groove 7 is formed. Alternatively, the processing system SYS can form rib structure RB on the substrate BM after forming rib structure RB. In this case, the processing system SYS can also form rib structure RB on the substrate BM in a manner that satisfies the aforementioned structural conditions.

[0237] Moreover, such as Fig. 27 As shown, groove 7 may not need to be formed on the heat-resistant layer TBC. Additionally, Fig. 27 For ease of understanding, the diagram shows lines representing the boundaries of each surface region SA#1 to SA#6, but these lines are imaginary.

[0238] Fig. 27

[0239] The machining system SYS may also separately include: a machining head that illuminates the workpiece W with machining light EL, while not illuminating the workpiece W with measuring light ML; and a measuring head that illuminates the workpiece W with measuring light ML, while not illuminating the workpiece W with machining light EL.

[0240] In the description, the machining system SYS includes an emission optical system 113 that directs both the machining light EL and the measurement light ML toward the workpiece W. However, the machining system SYS may also separately include: an emission optical system 113 that directs the machining light EL toward the workpiece W; and an emission optical system 113 that directs the measurement light ML toward the workpiece W. In this case, each emission optical system 113 may not include a beam splitter 1131 that combines the machining light EL and the measurement light ML.

[0241] In the above description, the processing apparatus 1 can measure the workpiece W. However, the processing apparatus 1 can also be used for a workpiece W that cannot be measured. In this case, the processing apparatus 1 may not include the measuring optical system 112. The processing system SYS may also not include the measuring light source 22.

[0242] In the description, the processing apparatus 1 includes a head drive system 12. However, the processing apparatus 1 may also exclude the head drive system 12. That is, the processing head 11 may also be immovable. In this case, the processing apparatus 1 may also exclude the position measuring device 13.

[0243] In the description, the stage device 3 includes a stage drive system 33. However, the stage device 3 may also not include the stage drive system 33. That is, the stage 32 may also be immovable. In this case, the stage device 3 may also not include the position measuring device 34.

[0244] In the description, the processing system SYS processes a turbine blade BL comprising a substrate BM and a heat-resistant layer TBC. However, the processing system SYS can also process a turbine blade BL comprising a substrate BM and any coating layer formed on the substrate BM that is different from the heat-resistant layer TBC. In this case, the processing system SYS can also form a rib structure RB on any coating layer. For example, the processing system SYS can also form a rib structure RB on any coating layer that includes a side reference. Fig. 28 The top 83 and the boundary portion 84 are described as having at least one rib structure RB. For example, the processing system SYS may also form the rib structure RB on any coating layer having a groove 9 that is different from the groove 7 forming the rib structure RB. For example, the processing system SYS may also form the rib structure RB and the groove 9 that is different from the groove 7 forming the rib structure RB on any coating layer. For example, the processing system SYS may also form any coating layer on the substrate BM on which the rib structure RB is formed. In addition, as an example of any coating layer, a protective layer for protecting the substrate BM can be listed.

[0245] Any coating layer formed on the substrate BM may also include a newly formed layer by adding material to the substrate BM. Alternatively, any coating layer formed on the substrate BM may also include a layer corresponding to a portion of the substrate BM whose properties have changed. That is, any coating layer may also include a layer that is newly formed by changing the properties of a portion of the substrate BM and is in contact with a portion of the substrate BM whose properties have not changed, and corresponds to the portion of the substrate BM whose properties have changed. In other words, the portion of the substrate BM whose properties have changed may be used as the coating layer, and the portion of the substrate BM whose properties have not changed may be used as the substrate BM. As an example of such a layer corresponding to the portion of the substrate BM whose properties have changed, a portion whose properties have changed by quenching can be listed. In this case, the coating layer may also be formed by surface treatment of the surface of the substrate BM. As an example of surface treatment, quenching can be listed. Quenching may include at least one of high-frequency quenching, flame quenching, laser quenching, and electron beam quenching. The coating layer formed by such quenching is harder than the portion of the substrate BM whose properties have not changed by quenching. Quenching can also be considered a specific example of surface hardening treatment used to harden the surface of the substrate BM. In this case, the coating layer functions as a protective layer to protect the surface of the substrate BM.

[0246] In the description, the machining system SYS processes the axial-flow turbine blade BL. However, as... Fig. 28 As shown, the machining system SYS can also machine radial turbine blades BL. ​ As shown by arrows F1 and F2, the fluid enters the turbine blade BL parallel to the rotation axis 120 of the turbine blade BL and flows out from the outlet portion 160 in a direction intersecting the rotation axis 120.

[0247] At this time, the rib structure RB can also be divided into multiple surface regions SA. The structural conditions associated with the groove 9 of the first surface region SA#1 formed in the multiple surface regions SA can also be the same as the structural conditions associated with the groove 9 of the second surface region SA#2 formed in the multiple surface regions SA that is different from the first surface region SA#1. As described above, the structural conditions are conditions associated with at least one of the depth W9, spacing P9, width W9, spacing direction, and extension direction of the groove 9. At least one of the depth W9, spacing P9, width W9, spacing direction, and extension direction of the groove 9 is an example of the characteristics of the groove 9. Therefore, the characteristics of the groove 9 of the first surface region SA formed in the multiple surface regions SA can also be the same as the characteristics of the groove 9 of the second surface region SA formed in the multiple surface regions SA. Furthermore, the structural conditions associated with the groove 9 of the first surface region SA#1 formed in the multiple surface regions SA and the structural conditions associated with the groove 9 of the third surface region SA#3 formed in the multiple surface regions SA can also be different. Here, the partition shape of the multiple surface regions SA#1 to SA#4 may not be as shown. ​ As shown, it is a rectangle.

[0248] In the description, the machining system SYS processes a turbine blade BL, which is an example of a workpiece W. However, the machining system SYS can also process any blade, which is different from the turbine blade BL and is another example of a workpiece W. This arbitrary blade, like the turbine blade BL, may include a substrate and an arbitrary coating layer formed on the surface of the substrate. In this case, for example, the machining system SYS may form a rib structure RB on any blade different from the turbine blade BL. That is, the machining system SYS may form a rib structure RB on at least one of the substrate and the coating layer included in any blade. As an example of an arbitrary blade, the blade constituting a propeller wing can be cited. A propeller, for example, is a component that converts the rotational force output from a prime mover, including at least one of an engine and a motor, into the propulsive force of a moving body, including at least one of an aircraft and a ship.

[0249] Alternatively, the machining system SYS can also machine any object that is different from the blade and is another example of the workpiece W. This arbitrary object, like the turbine blade BL, may include a substrate and any coating layer formed on the surface of the substrate. In this case, for example, the machining system SYS can also form a rib structure RB on the arbitrary object. That is, the machining system SYS can also form a rib structure RB on at least one of the substrate and the coating layer included in the arbitrary object.

[0250] In the description, the machining system SYS forms a rib structure RB that reduces the surface resistance of the workpiece W to the fluid. However, the machining system SYS may also form a structure on the workpiece W with a function different from reducing the surface resistance of the workpiece W to the fluid. For example, the machining system SYS may also form a rib structure on the workpiece W to reduce noise generated when the fluid moves relative to the surface of the workpiece W. For example, the machining system SYS may also form a rib structure on the workpiece W to generate vortices in the flow of fluid on the surface of the workpiece W. For example, the machining system SYS may also form a structure on the workpiece W to impart hydrophobicity to the surface of the workpiece W.

[0251] In the description, the machining system SYS forms a rib structure RB on the surface of the workpiece W. However, the machining system SYS can also form arbitrary structures of arbitrary shapes on the surface of the workpiece W. As an example of an arbitrary structure, micro-nanoscale fine texture structures (typically convex-concave structures) formed regularly or irregularly can be listed. Such fine texture structures may also include at least one of a sharkskin structure and a dimple structure that reduces resistance caused by fluids (gases and / or liquids). The fine texture structure may also include a lotus surface structure that has at least one of hydrophobic and self-cleaning functions (e.g., a lotus effect). The fine texture structure may also include at least one of the following: a fine protrusion structure with liquid transport function (see U.S. Patent Publication No. 2017 / 0044002); a texture structure with hydrophilic function; a texture structure with antifouling function; a moth-eye structure with at least one of reflectivity reduction function and hydrophobic function; a texture structure that enhances the structural color by interfering only a specific wavelength of light; a pillar array structure with adhesive function utilizing van der Waals' force; a texture structure with aerodynamic noise reduction function; a honeycomb structure with droplet trapping function; and a texture structure that improves the adhesion to layers formed on the surface.

[0252] In the description, the machining system SYS processes the workpiece W by irradiating it with machining light EL. However, the machining system SYS can also process the workpiece W by irradiating it with an arbitrary energy beam different from light. In this case, the machining system SYS may include a beam irradiation device capable of irradiating any energy beam, in addition to or replacing the machining light source 21. Examples of arbitrary energy beams include at least one of charged particle beams and electromagnetic waves. Examples of charged particle beams include at least one of electron beams and focused ion beams.

[0253] In the description, the turbine T can also be referred to as a turbomachinery. The turbomachinery may also include multiple turbine Ts. Furthermore, as... ​ As shown, the turbomachinery TM can also be connected to the generator DY to drive the generator DY. ​ In this design, the turbomachinery TM includes: a compressor CO that compresses air; a combustor BU that mixes fuel FU with the air compressed by the compressor CO for combustion; a turbine unit TU including multiple turbines T; and a rotatable shaft SH connecting the compressor CO and the turbine unit TU. The turbine unit TU rotates about the shaft SH via combustion gases from the combustor BU. This rotational force is transmitted via the shaft SH to a generator DY and also to the compressor CO. Furthermore, the turbomachinery may also include a jet engine.

[0254] The elements of the various embodiments described can be appropriately combined. Some of the elements of the various embodiments may also be omitted. The elements of the various embodiments can be appropriately substituted for the elements of other embodiments. Furthermore, to the extent permitted by law, all publicly available publications and U.S. patent publications relating to the apparatus, etc., cited in the various embodiments are incorporated herein by reference.

[0255] Furthermore, the present invention may be appropriately modified without departing from the spirit or idea of ​​the invention as can be read from the claims and the specification as a whole, and the blades, processing systems and processing methods that are modified as described above are also included in the technical concept of the present invention.

Claims

1. A blade for use in a fluid, said blade comprising: Substrate; as well as A coating layer is formed on the substrate. On the surface of the coating layer, a plurality of first grooves having a first depth and a plurality of second grooves having a second depth deeper than the first depth are formed. The spacing between the plurality of first slots is smaller than the spacing between the plurality of second slots. The plurality of first grooves are grooves used to form a rib structure that reduces the resistance of the coating layer to the fluid. At least one of the plurality of second grooves extends along the surface of the coating layer in a different direction than at least one of the plurality of first grooves extends along the surface of the coating layer.

2. The blade according to claim 1, wherein The rib structure has multiple convex structures formed along the arrangement direction of the plurality of first grooves. The first groove is formed between adjacent convex structures. Each of the plurality of convex structures has a top. The top has a width smaller than the spacing of the convex structure.

3. The blade according to claim 2, wherein The width of the top of the convex structure is 1% to 9% of the spacing between the convex structures.

4. The blade according to claim 1, wherein The rib structure has multiple convex structures formed along the arrangement direction of the plurality of first grooves. The first groove is formed between adjacent convex structures. The plurality of convex structures each have a top that is narrower than the bottom of the plurality of first grooves in the arrangement direction.

5. The blade according to claim 4, wherein The top includes a pair of curved surfaces connected to a pair of sides of the convex structure.

6. The blade according to claim 1, wherein The plurality of first slots are formed between two second slots in the plurality of second slots.

7. The blade according to claim 1, wherein The first depth is more than 0.2% and less than 20% of the thickness of the coating layer.

8. The blade according to claim 7, wherein The second depth is less than 30% of the thickness of the coating layer.

9. The blade according to claim 1, wherein The second depth is more than 1.5 times and less than 15 times the first depth.

10. The blade according to claim 1, wherein The width of the first slot is different from the width of the second slot.

11. The blade according to claim 1, wherein The width of the second groove is greater than or equal to the width of the first groove.

12. The blade according to claim 1, wherein The width of the second groove is more than 1 and less than 10 times the width of the first groove.

13. The blade according to claim 12, wherein The spacing of the second groove is more than 20 times and less than 30 times the spacing of the first groove.

14. The blade according to claim 1, wherein The spacing of the second slot is an integer multiple of the spacing of the first slot.

15. The blade according to claim 1, wherein At least one of the plurality of second grooves extends along the surface of the coating layer in the same direction as at least one of the plurality of first grooves extends along the surface of the coating layer.

16. The blade according to claim 1, wherein At least one of the plurality of second grooves extends along a first direction along the surface of the coating layer. At least one of the plurality of second grooves extends along a second direction that follows the surface of the coating layer and intersects the first direction. At least one of the plurality of first grooves extends along either the first direction or the second direction.

17. The blade according to claim 1, wherein The surface of the coating layer is divided into multiple regions by the plurality of second grooves. The characteristics of the first groove formed in the first region of the plurality of regions are different from the characteristics of the first groove formed in the second region of the plurality of regions, which is different from the first region.

18. The blade according to claim 17, wherein The characteristics include at least one of width, spacing, and direction of extension.

19. The blade according to claim 1, wherein The surface of the coating layer is divided into multiple regions by the plurality of second grooves. The depth of the first groove formed in the first region of the plurality of regions is the first depth, and the depth of the first groove formed in the second region of the plurality of regions, which is different from the first region, is a third depth different from the first depth.

20. The blade according to claim 1, wherein The second groove includes grooves that can alleviate the stress of the coating layer.

21. The blade according to claim 20, wherein The coating layer includes a heat-resistant layer that reduces the transfer of heat from the fluid toward the substrate.

22. The blade according to claim 1, wherein The blades are turbine blades.

23. A turbomachinery comprising blades as claimed in any one of claims 1 to 22.

24. A processing system, comprising: A beam irradiation device irradiates an energy beam onto the surface of a coating layer formed on a substrate and having a plurality of second grooves having a second depth. as well as The control device controls the beam irradiation device to form a plurality of first grooves on the surface of the coating layer at a spacing smaller than the spacing of the plurality of second grooves and a first depth shallower than the second depth. The plurality of first grooves are grooves used to form a rib structure that reduces the resistance of the coating layer to fluid. At least one of the plurality of second grooves extends along the surface of the coating layer in a different direction than at least one of the plurality of first grooves extends along the surface of the coating layer.

25. The processing system according to claim 24, further comprising: The measuring device measures the plurality of second grooves. The control device controls the beam irradiation device to form the plurality of first slots based on information related to the plurality of second slots measured by the measuring device.

26. A processing method, comprising: A plurality of second grooves are formed at a second depth on the surface of the coating layer formed on the substrate; as well as On the surface, a plurality of first grooves, shallower than the second depth, are formed at a spacing smaller than the spacing of the plurality of second grooves. The plurality of first grooves are grooves used to form a rib structure that reduces the resistance of the coating layer to fluid. At least one of the plurality of second grooves extends along the surface of the coating layer in a different direction than at least one of the plurality of first grooves extends along the surface of the coating layer.

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