Laser processing method, device, equipment and medium

Abstract

The present invention relates to the field of material processing technology and discloses a laser processing method, apparatus, equipment, and medium. The method comprises: obtaining laser incident parameters of a laser beam; performing phase difference calculation based on the laser incident parameters of the laser beam based on preset calculation rules to determine a corresponding spherical aberration phase diagram; loading the spherical aberration phase diagram into a preset spatial light modulator (SLM), performing phase compensation on the phase difference of the laser beam, and determining a laser beam with phase difference eliminated; and laser processing a material to be processed based on the laser beam. The present invention controls the laser beam through preset calculation rules and calculation algorithms, simplifies the processing procedure for laser beam phase difference correction, realizes dynamic calibration of spherical aberration, and simultaneously improves the phase difference calibration accuracy, reduces the correction cycle, increases the flexibility of correction, and reduces the difficulty of aberration correction.

Description

Technical Field

[0001] The present invention relates to the field of material processing technology, and in particular to a laser processing method, device, equipment and medium. Background Art

[0002] With the continuous development of laser processing technology and the continuous decline in the cost of laser processing, more and more processing operations are achieved through laser material processing. Among them, the processing of precision brittle materials is gradually replaced by laser processing instead of traditional CNC processing. Laser processing has become the main processing method for precision brittle materials.

[0003] However, in the process of processing transparent brittle materials with short-focus lasers, when the laser beam is focused deep into the transparent material, spherical aberration will occur when the laser beam is processing in the transparent material due to the different and mismatched refractive indices of the laser light between different transparent materials.

[0004] The spherical image causes the focal point of the laser beam to expand horizontally and / or vertically, reducing the peak intensity of the laser beam. This expansion and reduction in peak intensity will affect the quality and performance of the processed material. Especially in the micro-machining of transparent materials, spherical aberration will affect the performance of the surrounding structures and materials, to a certain extent reducing the processing accuracy of transparent materials. The quality and performance of laser processing of transparent brittle materials cannot be guaranteed.

[0005] Existing methods for correcting spherical aberration involve attaching an objective lens with a correction ring to the processing equipment performing laser processing. This method involves moving a lens assembly within the objective lens to reduce refraction of the laser beam and correct the spherical aberration of the laser beam. However, this corrective movement involving the objective lens makes micromachining of transparent materials extremely difficult, and dynamic calibration of spherical aberration is impossible. Furthermore, these objective lenses are typically designed and manufactured specifically, resulting in long lead times, limited flexibility, high costs, and significant correction difficulty. Summary of the Invention

[0006] The main purpose of the present invention is to provide a laser processing method, device, equipment and medium, which are intended to correct the spherical aberration of a laser beam when processing transparent brittle materials and reduce the difficulty of correcting the spherical aberration.

[0007] To achieve the above object, the present invention provides a laser processing method, which includes:

[0008] obtaining laser injection parameters of the laser beam;

[0009] Based on a preset calculation rule, a phase difference calculation is performed according to the laser injection parameters of the laser beam to determine a corresponding spherical aberration phase diagram;

[0010] Loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated;

[0011] Based on the laser beam, laser processing is performed on the material to be processed.

[0012] Preferably, the step of performing phase difference calculation according to the laser injection parameters of the laser beam based on a preset calculation rule to determine the corresponding spherical aberration phase diagram includes:

[0013] Based on a preset programming algorithm, the laser beam incident angle to the laser incident range of the preset incident angle is divided into N parts, where N is a positive integer;

[0014] Substituting the N laser incident ranges into a preset phase difference calculation formula respectively, and determining the phase difference corresponding to each portion in the N laser incident ranges;

[0015] Based on the phase difference, a spherical aberration phase map of the incident laser beam is determined.

[0016] Preferably, the step of determining the spherical aberration phase diagram of the incident laser beam based on the phase difference comprises:

[0017] Normalizing the phase difference corresponding to each portion of the N partial laser incident ranges to determine a phase difference value corresponding to the phase difference of each portion;

[0018] The phase difference value is converted into a preset bitmap to generate a bitmap BMP spherical aberration phase map corresponding to the phase difference value.

[0019] Preferably, before the step of loading the spherical aberration phase map into a preset spatial light modulator SLM to perform phase compensation on the phase difference of the laser beam, the method further comprises:

[0020] Based on a preset beam expander BET, the spot of the laser beam is adjusted to determine the spot size of the laser beam for laser operation;

[0021] Based on a preset half-wave plate HP, the polarization of the laser beam is adjusted to a linear polarization state;

[0022] Based on the adjusted spot size and linear polarization of the laser beam, the SLM receiving laser beam emitted from the reflector is determined.

[0023] Preferably, the step of loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining the laser beam with the phase difference eliminated comprises:

[0024] Determining the phase to be compensated of the laser beam received by the SLM based on a pre-calculated spherical aberration phase map;

[0025] Acquiring a control signal corresponding to the phase to be compensated based on a digital visual interface DVI preset by the spatial light modulator SLM;

[0026] Based on a preset fill factor in the spatial light modulator (SLM) reflective panel, loading a corresponding modulation depth according to the control signal;

[0027] Phase compensation corresponding to the modulation depth is performed on the laser beam received by the SLM to determine a laser beam with phase difference eliminated.

[0028] Preferably, after the steps of loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining the laser beam with the phase difference eliminated, the method further comprises:

[0029] injecting the laser beam with phase difference eliminated into a preset 4F transmission system;

[0030] performing beam focusing and beam filtering on the laser beam with phase difference eliminated by the 4F transmission system to obtain a laser beam for laser processing;

[0031] The laser beam for laser processing is incident on a preset material to be processed, thereby achieving laser processing of the material to be processed.

[0032] Preferably, after the step of performing beam focusing and beam filtering on the phase-aberration-eliminated laser beam through the 4F transmission system to obtain a laser beam for laser processing, the method further comprises:

[0033] Obtaining an incident morphology diagram corresponding to a laser beam in a preset objective lens in the 4F transmission system;

[0034] Based on the incident morphology diagram, laser parameters of the laser beam are determined, and based on the laser parameters, an effect of phase compensation of the laser beam is verified.

[0035] In addition, to achieve the above-mentioned purpose, an embodiment of the present invention further provides a phase difference elimination device, which includes:

[0036] A parameter acquisition module, used to acquire laser injection parameters of the laser beam;

[0037] a phase diagram determination module, configured to perform phase difference calculation according to the laser injection parameters of the laser beam based on a preset calculation rule, and determine a corresponding spherical aberration phase diagram;

[0038] A phase compensation module is used to load the spherical aberration phase map into a preset spatial light modulator SLM, perform phase compensation on the phase difference of the laser beam, and determine a laser beam with the phase difference eliminated;

[0039] The laser processing module is used to perform laser processing on the material to be processed based on the laser beam.

[0040] Preferably, the phase diagram determination module includes:

[0041] Based on a preset programming algorithm, the laser beam incident angle to the laser incident range of the preset incident angle is divided into N parts, where N is a positive integer;

[0042] Substituting the N laser incident ranges into a preset phase difference calculation formula respectively, and determining the phase difference corresponding to each portion in the N laser incident ranges;

[0043] Based on the phase difference, a spherical aberration phase map of the incident laser beam is determined.

[0044] Preferably, the phase diagram determination module further includes:

[0045] Normalizing the phase difference corresponding to each portion of the N partial laser incident ranges to determine a phase difference value corresponding to the phase difference of each portion;

[0046] The phase difference value is converted into a preset bitmap to generate a bitmap BMP spherical aberration phase map corresponding to the phase difference value.

[0047] Preferably, the phase compensation module includes:

[0048] Based on a preset beam expander BET, the spot of the laser beam is adjusted to determine the spot size of the laser beam for laser operation;

[0049] Based on a preset half-wave plate HP, the polarization of the laser beam is adjusted to a linear polarization state;

[0050] Based on the adjusted spot size and linear polarization of the laser beam, the SLM receiving laser beam emitted from the reflector is determined.

[0051] Preferably, the phase compensation module further includes:

[0052] Determining the phase to be compensated of the laser beam received by the SLM based on a pre-calculated spherical aberration phase map;

[0053] Acquiring a control signal corresponding to the phase to be compensated based on a digital visual interface DVI preset by the spatial light modulator SLM;

[0054] Based on a preset fill factor in the spatial light modulator (SLM) reflective panel, loading a corresponding modulation depth according to the control signal;

[0055] Phase compensation corresponding to the modulation depth is performed on the laser beam received by the SLM to determine a laser beam with phase difference eliminated.

[0056] Preferably, the phase compensation module further includes:

[0057] injecting the laser beam with phase difference eliminated into a preset 4F transmission system;

[0058] performing beam focusing and beam filtering on the laser beam with phase difference eliminated by the 4F transmission system to obtain a laser beam for laser processing;

[0059] The laser beam for laser processing is incident on a preset material to be processed, thereby achieving laser processing of the material to be processed.

[0060] Preferably, the phase compensation module further includes:

[0061] Obtaining an incident morphology diagram corresponding to a laser beam in a preset objective lens in the 4F transmission system;

[0062] Based on the incident morphology diagram, laser parameters of the laser beam are determined, and based on the laser parameters, an effect of phase compensation of the laser beam is verified.

[0063] In addition, to achieve the above-mentioned purpose, an embodiment of the present invention also proposes a device, which includes a memory, a processor, and a phase difference elimination program stored in the memory and runnable on the processor, and the phase difference elimination program is executed by the processor to implement the laser processing method steps described above.

[0064] In addition, to achieve the above-mentioned purpose, the present invention also provides a medium, which is a computer-readable storage medium, and a phase difference elimination program is stored on the computer-readable storage medium. When the phase difference elimination program is executed by the processor, the steps of the laser processing method described above are implemented.

[0065] The present invention proposes a laser processing method, device, equipment and medium. The laser processing method includes: obtaining laser injection parameters of a laser beam; performing phase difference calculation according to the laser injection parameters of the laser beam based on preset calculation rules to determine a corresponding spherical aberration phase diagram; loading the spherical aberration phase diagram into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated; and performing laser processing on a material to be processed based on the laser beam.

[0066] Compared to the prior art method of correcting spherical aberration of a laser beam using a lens assembly within an objective lens with a correction ring, the present invention calculates the phase difference of the laser beam, determines the corresponding spherical aberration phase diagram, and then loads this spherical aberration phase diagram into a preset spatial light modulator (SLM) to perform phase compensation on the laser beam, eliminating the phase difference of the laser beam and enabling laser processing of the material being processed. By controlling the laser beam through preset calculation rules and algorithms, the laser beam phase difference correction process is simplified, enabling dynamic calibration of spherical aberration, improving phase difference calibration accuracy, reducing the correction cycle, increasing correction flexibility, and reducing the difficulty of aberration correction. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] Figure 1 A schematic diagram of the device structure of the hardware operating environment involved in the embodiment of the laser processing method of the present invention;

[0068] Figure 2 This is a schematic flow chart of a first embodiment of the laser processing method of the present invention;

[0069] Figure 3 Schematic diagram of the focusing geometry flow chart of the first embodiment of the laser processing method of the present invention;

[0070] Figure 4 This is a schematic flow chart of a second embodiment of the laser processing method of the present invention;

[0071] Figure 5 This is a sub-flow diagram of step S23 in the second embodiment of the laser processing method of the present invention;

[0072] Figure 6 This is a schematic flow chart of a third embodiment of the laser processing method of the present invention;

[0073] Figure 7 This is a schematic diagram of a specific process for adjusting the laser beam in the fourth embodiment of the laser processing method of the present invention;

[0074] Figure 8 This is a schematic diagram of a specific process of focusing and filtering a laser beam in a fourth embodiment of the laser processing method of the present invention;

[0075] Figure 9 Schematic diagram of the laser beam flow process in the fourth embodiment of the laser processing method of the present invention;

[0076] Figure 10 This is a schematic diagram of a specific process for detecting the effect of a laser beam in the fourth embodiment of the laser processing method of the present invention;

[0077] Figure 11Schematic diagram of the effect of phase difference correction of the laser beam in the fourth embodiment of the laser processing method of the present invention;

[0078] Figure 12 Schematic diagram showing a comparison of focal depths of the laser beam undergoing phase difference correction in the fourth embodiment of the laser processing method of the present invention;

[0079] Figure 13 Schematic diagram of the functional modules of the phase difference elimination device of the laser processing method of the present invention.

[0080] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0081] It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0082] Specifically, refer to Figure 1 , Figure 1 This is a schematic diagram of the equipment structure of the hardware operating environment involved in the embodiment of the laser processing method of the present invention.

[0083] like Figure 1 As shown, the device may include: a processor 1001, such as a CPU, a network interface 1004, a user interface 1003, a memory 1005, and a communication bus 1002. Among them, the communication bus 1002 is used to realize the connection and communication between these components. The user interface 1003 may include a display screen (Display), an input unit such as a keyboard (Keyboard), and the user interface 1003 may also include a standard wired interface and a wireless interface. The network interface 1004 may optionally include a standard wired interface and a wireless interface (such as a WI-FI interface). The memory 1005 may be a high-speed RAM memory, or a stable memory (non-volatile memory), such as a disk memory. The memory 1005 may also be a storage device independent of the aforementioned processor 1001.

[0084] like Figure 1 As shown, memory 1005, a computer storage medium, may include an operating system, a network communication module, a user interface module, and a phase difference elimination program. The operating system manages and controls device hardware and software resources, supporting the execution of the phase difference elimination program and other software or programs. The network communication module manages and controls the network interface 1002. The user interface 1003 is primarily used for data communication with the client. The network interface 1004 is primarily used for establishing a communication connection with the server. The processor 1001 can be used to invoke the phase difference elimination program stored in memory 1005.

[0085] The phase difference elimination program stored in the memory 1005 implements the following steps when executed by the processor:

[0086] obtaining laser injection parameters of the laser beam;

[0087] Based on a preset calculation rule, a phase difference calculation is performed according to the laser injection parameters of the laser beam to determine a corresponding spherical aberration phase diagram;

[0088] Loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated;

[0089] Based on the laser beam, laser processing is performed on the material to be processed.

[0090] Furthermore, when the phase difference elimination program stored in the memory 1005 is executed by the processor, the following steps are also implemented:

[0091] Based on a preset programming algorithm, the laser beam incident angle to the laser incident range of the preset incident angle is divided into N parts, where N is a positive integer;

[0092] Substituting the N laser incident ranges into a preset phase difference calculation formula respectively, and determining the phase difference corresponding to each portion in the N laser incident ranges;

[0093] Based on the phase difference, a spherical aberration phase map of the incident laser beam is determined.

[0094] Furthermore, when the phase difference elimination program stored in the memory 1005 is executed by the processor, the following steps are also implemented:

[0095] Normalizing the phase difference corresponding to each portion of the N partial laser incident ranges to determine a phase difference value corresponding to the phase difference of each portion;

[0096] The phase difference value is converted into a preset bitmap to generate a bitmap BMP spherical aberration phase map corresponding to the phase difference value.

[0097] Furthermore, when the phase difference elimination program stored in the memory 1005 is executed by the processor, the following steps are also implemented:

[0098] Based on a preset beam expander BET, the spot of the laser beam is adjusted to determine the spot size of the laser beam for laser operation;

[0099] Based on a preset half-wave plate HP, the polarization of the laser beam is adjusted to a linear polarization state;

[0100] Based on the adjusted spot size and linear polarization of the laser beam, the SLM receiving laser beam emitted from the reflector is determined.

[0101] Furthermore, when the phase difference elimination program stored in the memory 1005 is executed by the processor, the following steps are also implemented:

[0102] Determining the phase to be compensated of the laser beam received by the SLM based on a pre-calculated spherical aberration phase map;

[0103] Acquiring a control signal corresponding to the phase to be compensated based on a digital visual interface DVI preset by the spatial light modulator SLM;

[0104] Based on a preset fill factor in the spatial light modulator (SLM) reflective panel, loading a corresponding modulation depth according to the control signal;

[0105] Phase compensation corresponding to the modulation depth is performed on the laser beam received by the SLM to determine a laser beam with phase difference eliminated.

[0106] Furthermore, when the phase difference elimination program stored in the memory 1005 is executed by the processor, the following steps are also implemented:

[0107] injecting the laser beam with phase difference eliminated into a preset 4F transmission system;

[0108] performing beam focusing and beam filtering on the laser beam with phase difference eliminated by the 4F transmission system to obtain a laser beam for laser processing;

[0109] The laser beam for laser processing is incident on a preset material to be processed, thereby achieving laser processing of the material to be processed.

[0110] Furthermore, when the phase difference elimination program stored in the memory 1005 is executed by the processor, the following steps are also implemented:

[0111] Obtaining an incident morphology diagram corresponding to a laser beam in a preset objective lens in the 4F transmission system;

[0112] Based on the incident morphology diagram, laser parameters of the laser beam are determined, and based on the laser parameters, an effect of phase compensation of the laser beam is verified.

[0113] Those skilled in the art will understand that Figure 1 The device structure shown in the figure does not constitute a limitation of the device, and may include more or fewer components than shown in the figure, or combine certain components, or arrange the components differently.

[0114] To better understand the above technical solutions, exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments described herein. Instead, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0115] Based on the above terminal device architecture but not limited to the above architecture, an embodiment of the laser processing method of the present invention is proposed.

[0116] Specifically, refer to Figure 2 , Figure 2 This is a flow chart of a first embodiment of a laser processing method according to the present invention, wherein the laser processing method comprises:

[0117] Step S10, obtaining laser injection parameters of the laser beam;

[0118] Step S20, performing phase difference calculation according to the laser injection parameters of the laser beam based on a preset calculation rule to determine a corresponding spherical aberration phase diagram;

[0119] Step S30, loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated;

[0120] Step S40: performing laser processing on the material to be processed based on the laser beam.

[0121] The laser processing method of the embodiment of the present application calculates the phase difference of the laser beam to determine the corresponding spherical aberration phase diagram, and loads the spherical aberration phase diagram into a preset spatial light modulator SLM to phase compensate the aberration of the laser beam, thereby eliminating the phase difference of the laser beam.

[0122] The following describes each step in detail:

[0123] Step S10, obtaining laser injection parameters of the laser beam;

[0124] Reference Figure 3 , Figure 3 The schematic diagram of the focusing geometry is shown in Figure 1. Specifically, point A is a laser incident point on the lens wavefront. After passing through a lens with a focal length of f, the incident light A is reflected by a medium with a refractive index of n1. The incident angle of point A is θ. i, and focused at point O. When the incident laser enters the material to be processed, at this time, the current material to be processed is a transparent brittle material. The material to be processed serves as the refractive medium of the laser beam with a refractive index of n2. Point B is the incident point of the incident light at point A on the surface of the medium with a refractive index of n2. After refraction, it is focused to point O'.

[0125] Furthermore, according to the preset refractive index formula, the refraction angle θ corresponding to the laser beam from point A to point B can be calculated. t :

[0126] Sin(θ i ) / sin(θ t )=n21 (1)

[0127] The incident angle of the laser beam is θ i The refraction angle is expressed as θ t Indicates that n21 is called the relative refractive index of the second medium to the first medium, that is, the relative refractive index of the material to be processed relative to the lens. The specific relative refractive index calculation formula is: n21 = n2 / n1.

[0128] Furthermore, based on the preset numerical aperture calculation formula, the refractive index n1 of the incident point of the laser beam and the incident angle θ at point A are used to calculate the numerical aperture. i , the corresponding numerical aperture NA can be calculated:

[0129] NA= n1 * sinθi (2)

[0130] Furthermore, point C is the incident point of the laser beam passing through the axis, point D is the incident point of the incident light passing through point C on the surface of the medium n2, depth d is the focus depth without refraction, and depth d' is the focus depth with refraction.

[0131] In a specific embodiment, the laser beam is incident on the material to be processed and refraction principle is used, and the laser beam optical path length, focal length and other laser parameters are calculated based on a preset calculation formula. The specific calculation formula is as follows:

[0132] ABO'=AB +BO' (3)

[0133]

[0134] Where ABO' is the angle of incidence when the angle is θ i , the optical path length of the laser beam when the incident point is A; AB is the optical path length between the incident point A and the incident point B of the material to be processed; BO' is the distance between the incident point B of the material to be processed and the focus point O' on the material to be processed; ABO' is the optical path length of the laser beam after it enters from the incident point A; d'=(h-sin(θi ))*tan(θ t ) is the distance from the laser beam with the incident point C entering the material to be processed from point D to the focusing point O' in the material to be processed.

[0135] Furthermore, since the laser beam enters the medium with a refractive index of n2, the laser beam with an incident point of C enters the material to be processed after passing through point D. The optical path difference between the optical path CDO' reaching point O' and the optical path difference ABO' produces a phase difference ΔΦ, which varies with the θ at different points on the wavefront. i The angle changes.

[0136] As a specific embodiment, the incident point, incident angle and corresponding optical path length of the laser beam are calculated by a preset formula, and the laser incident parameters corresponding to the laser beam for processing the material to be processed are determined.

[0137] Step S20, performing phase difference calculation according to the laser injection parameters of the laser beam based on a preset calculation rule to determine a corresponding spherical aberration phase diagram;

[0138] In a specific embodiment, the above-mentioned preset calculation rule can be a preset Matlab programming, which sets the incident angle range θ i The angle from 0 to 0 is divided into several parts, and each angle after equal division is substituted into the preset formula for calculation to determine the phase difference caused by the corresponding refractive index when the laser beam enters the material to be processed. After determining the phase difference of each equal part, the 2π normalization processing can be performed according to the phase difference value of each part, and the corresponding BMP spherical aberration phase map can be generated.

[0139] Among them, the preset calculation formula is:

[0140] ΔΦ = Φ(θ i )- Φ(0) (8)

[0141] Furthermore, the above-mentioned 2π normalization processing based on the phase difference value of each part is achieved by normalizing the calculated phase difference data, eliminating the influence of the dimension and value range differences between the numerical values, scaling the phase difference data of each angle according to the corresponding proportion, and performing a linear transformation of the deviation standardization on the original phase difference data, so that these data are mapped to the specified area, thereby facilitating comprehensive analysis.

[0142] Step S30, loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated;

[0143] In a specific embodiment, the acquired spherical aberration phase map is loaded into a preset spatial light modulator SLM to perform phase difference compensation on the laser beam, thereby eliminating the phase difference of the laser beam incident on the material to be processed, and determining the laser beam after the phase difference is eliminated.

[0144] Specifically, the above-mentioned spatial light modulator SLM means that under active control, it can modulate a certain parameter of the light field through liquid crystal molecules, such as by modulating the amplitude of the light field, modulating the phase through the refractive index, modulating the polarization state through the rotation of the polarization plane, or realizing the conversion of incoherent to coherent light, thereby writing certain information into the light wave and achieving the purpose of light wave modulation.

[0145] In this embodiment, the refractive index phase of the incident laser beam is modulated by the above-mentioned spatial light modulator SLM, and the polarization state of the laser beam is adjusted to online polarization to achieve phase adjustment of the laser beam, compensate for the phase difference of the laser beam, and achieve phase difference elimination of the laser beam.

[0146] Step S40: performing laser processing on the material to be processed based on the laser beam.

[0147] In a specific embodiment, the laser beam that achieves phase difference elimination of the laser beam is used to perform corresponding laser processing on the material to be processed.

[0148] This embodiment controls the laser beam through preset calculation rules and calculation algorithms, simplifies the processing procedure for laser beam phase difference correction, realizes dynamic calibration of spherical aberration, and at the same time improves the phase difference calibration accuracy. Phase difference correction is achieved through a spatial dimmer, which improves the flexibility of correction and reduces the difficulty of aberration correction.

[0149] Furthermore, based on the first embodiment of the laser processing method of the embodiment of the present application, a second embodiment of the laser processing method of the embodiment of the present application is proposed.

[0150] The difference between the second embodiment of the laser processing method and the first embodiment of the laser processing method is that this embodiment is a refinement of step S20, "calculating the phase difference according to the laser injection parameters of the laser beam based on the preset calculation rules to determine the corresponding spherical aberration phase diagram". Figure 4 , specifically including:

[0151] Step S21, based on a preset programming algorithm, dividing the laser incident range from the incident angle of the laser beam to the preset incident angle into N equal parts, where N is a positive integer;

[0152] Step S22, substituting the N parts of the laser incident range into a preset phase difference calculation formula to determine the phase difference corresponding to each part of the N parts of the laser incident range;

[0153] Step S23: determining a spherical aberration phase diagram of the incident laser beam based on the phase difference.

[0154] The following describes each step in detail:

[0155] Step S21, based on a preset programming algorithm, dividing the laser incident range from the incident angle of the laser beam to the preset incident angle into N equal parts, where N is a positive integer;

[0156] In a specific embodiment, the above-mentioned preset calculation rule can be a preset Matlab programming, and the laser beam incident angle to the preset incident angle range can be the incident angle range θ i to 0, and the angle is divided into N parts, wherein the several equally divided parts are all incident angle ranges of a laser beam, and the incident angle range can correspond to the phase difference of the laser beam.

[0157] Step S22, substituting the N parts of the laser incident range into a preset phase difference calculation formula to determine the phase difference corresponding to each part of the N parts of the laser incident range;

[0158] Furthermore, each of the equally divided laser incident angle ranges is substituted into a preset formula for calculation to determine the phase difference caused by the corresponding refractive index when the laser beam enters the material to be processed. The angles in the laser incident range divided into several parts can be substituted into the phase difference calculation formula for corresponding calculation. After the laser incident range is calculated, the phase difference corresponding to each angle in the corresponding range can be determined.

[0159] Step S23: determining a spherical aberration phase diagram of the incident laser beam based on the phase difference.

[0160] Further, refer to Figure 5 , step S23 specifically includes:

[0161] Step S231, normalizing the phase difference corresponding to each portion in the N partial laser incident ranges to determine a phase difference value corresponding to the phase difference of each portion;

[0162] Step S232 : performing a preset bitmap conversion on the phase difference value to generate a bitmap BMP spherical aberration phase map corresponding to the phase difference value.

[0163] In a specific embodiment, after determining the phase difference of each equally divided part, normalization processing can be performed according to the phase difference value of each part, and a corresponding BMP spherical aberration phase map can be generated. The above-mentioned 2π normalization processing according to the phase difference value of each part is achieved by normalizing the calculated phase difference data, eliminating the influence of the dimension and value range differences between the numerical values, scaling the phase difference data of each angle according to the corresponding proportion, and performing a deviation-standardized linear transformation on the original phase difference data, so that these data are mapped to the specified area, thereby facilitating comprehensive analysis.

[0164] This embodiment calculates the phase difference of the incident laser beam and determines the BMP phase map corresponding to the phase difference within a preset range as the data source for phase difference conversion, thereby improving the accuracy of the data source in the phase difference conversion process, improving the phase difference conversion accuracy of the laser beam, and ensuring the quality and performance of laser processing.

[0165] Furthermore, based on the first and second embodiments of the laser processing method of the embodiments of the present application, a third embodiment of the laser processing method of the embodiments of the present application is proposed.

[0166] The third embodiment of the laser processing method is different from the first, second and third embodiments of the diagnosis and teaching method in that this embodiment is a refinement of step S30, "loading the spherical aberration phase map to a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with phase difference eliminated", referring to Figure 6 , specifically including:

[0167] Step S31, determining the phase to be compensated of the laser beam received by the SLM based on the pre-calculated spherical aberration phase map;

[0168] Step S32, obtaining a control signal corresponding to the phase to be compensated based on a digital visual interface DVI preset by the spatial light modulator SLM;

[0169] Step S33, based on the preset fill factor in the reflective panel of the spatial light modulator SLM, loading the corresponding modulation depth according to the control signal;

[0170] Step S34 , performing phase compensation corresponding to the modulation depth on the laser beam received by the SLM to determine a laser beam with phase difference eliminated.

[0171] In a specific embodiment, by loading the above-mentioned spherical aberration phase map into a preset spatial light modulator SLM, the phase to be compensated for the current laser beam in the spatial light modulator is determined based on the incident angle of the laser beam and the refractive index of the material medium to be processed, and a control signal for phase compensation corresponding to the above-mentioned phase to be compensated is sent through the digital visual interface DVI.

[0172] Furthermore, the light modulation reflective panel of the above-mentioned spatial light modulator SLM is controlled according to the above-mentioned control signal to determine the modulation depth corresponding to the phase compensation, and the focusing depth of the laser beam is compensated for the optical position through the filling factor in the light modulation reflective panel to achieve filling compensation of the phase difference.

[0173] As a specific embodiment, the effective reflection area of ​​the light modulation reflection panel of the spatial light modulator SLM can be 16mm×12mm, the pixel size is 12.5μm, the filling factor exceeds 95%, and the SLM applies a compensation phase to the laser beam to correct spherical aberration. These pixels are controlled by an 8-bit signal sent by a computer through a digital visual interface DVI. This type of SLM can perform pure phase modulation from 0 to 2π in the visible light and near-infrared regions (400–1800nm).

[0174] In this embodiment, the phase difference of the laser beam is compensated by a preset spatial light modulator SLM, and the laser beam is controlled by preset calculation rules and calculation algorithms to achieve digital phase difference compensation and phase difference elimination of the laser beam, simplifying the processing procedure for laser beam phase difference correction, realizing dynamic calibration of spherical aberration, and reducing the difficulty of laser beam phase difference compensation.

[0175] Furthermore, based on the first, second and third embodiments of the laser processing method of the embodiments of the present application, a fourth embodiment of the laser processing method of the embodiments of the present application is proposed.

[0176] The difference between the fourth embodiment of the laser processing method and the first, second and third embodiments of the diagnostic teaching method is that this embodiment is an expansion and refinement of the steps before and after step S30, "loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining the laser beam with the phase difference eliminated."

[0177] Reference Figure 7 Before step S30 of "loading the spherical aberration phase map to a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated", the method further includes a solution for adjusting the laser beam, specifically including:

[0178] Step A1, adjusting the spot of the laser beam based on a preset beam expander BET to determine the spot size of the laser beam for laser operation;

[0179] Step A2: adjusting the polarization of the laser beam based on a preset half-wave plate HP to adjust the polarization state of the laser beam to linear polarization;

[0180] Step A3: determining the SLM receiving laser beam emitted from the reflector based on the adjusted spot size and linear polarization of the laser beam.

[0181] In a specific embodiment, the output light of the laser passes through the beam expander BET to adjust the laser spot to an appropriate size, and the laser beam passes through the half-wave plate HP to adjust the polarization state of the laser to linear polarization, wherein the incident direction of the laser beam is consistent with the polarization direction of the spatial light modulator SLM. The laser beam with an appropriate spot size and linear polarization is determined, and then passes through the reflector R1 to obtain the laser beam incident on the reflective liquid crystal spatial light modulator SLM.

[0182] Further, refer to Figure 8 After step S30 of "loading the spherical aberration phase map to a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated", the method further includes a scheme of beam focusing and beam filtering on the laser beam, specifically including:

[0183] Step B1, injecting the laser beam with phase difference eliminated into a preset 4F transmission system;

[0184] Step B2, performing beam focusing and beam filtering on the phase-aberration-eliminated laser beam through the 4F transmission system to obtain a laser beam for laser processing;

[0185] Step B3: incident the laser beam for laser processing onto a preset material to be processed, thereby achieving laser processing of the material to be processed.

[0186] In a specific embodiment, the phase-corrected laser beam adjusted in the spatial light modulator is emitted into a preset 4F transmission system, wherein the 4F system is composed of a lens L1, an aperture H, and a lens L2. The phase-corrected laser beam passes through the lens L1 with a focal length of f1 and the lens L2 with a focal length of f2. L1 is placed at a position f1 away from the SLM. The rear focus point of L1 coincides with the front focus point of the lens L2. The distance between L1 and L2 is f1+f2. The aperture H is placed at a preset position approximately 3-5 mm to the left of the common focal point of L1 and L2. The aperture is used to filter out high-frequency clutter or zero-polarity interference in the phase-corrected laser beam. Then, a reflective lens R2 is placed at the rear focus of the lens L2, and the reflected laser is incident on the objective lens L3. After focusing, it enters the material M to be processed, and the material to be processed is laser processed.

[0187] Reference Figure 9 , Figure 9 Schematic diagram of the beam flow process for operating a laser beam.

[0188] Furthermore, after step B2, "focusing and filtering the laser beam with phase difference eliminated by the 4F transmission system to obtain a laser beam for laser processing", the method further includes a scheme for effect detection of the laser beam, referring to Figure 10 , specifically including:

[0189] Step C1, obtaining an incident morphology diagram corresponding to a laser beam in a preset objective lens in the 4F transmission system;

[0190] Step C2: determining laser parameters of the laser beam based on the incident morphology diagram, and verifying the effect of phase compensation of the laser beam based on the laser parameters.

[0191] In a specific embodiment, in order to quantify and verify the effect of phase difference elimination, the light spot of the laser beam focus point (along the incident direction) is simulated and observed by a preset detection device. Through simulation, the morphology of the corrected and uncorrected light spots along the incident direction is compared.

[0192] Reference Figure 11 , Figure 11 Schematic diagram of the effect of phase correction for the laser beam. Specifically, the figure shows (a) the focal morphology of the light spot with a focal depth of S1 in the absence of a dielectric material with a refractive index of n2; (b) after inserting a workpiece material with a refractive index of n2, the incident light begins to refract upon entering the n2 material. Without phase compensation, the phase difference at the focal point caused by spherical aberration is severe, and the focal depth is stretched and deformed to S2; and (c) after inserting a workpiece material with a refractive index of n2, the incident laser begins to refract upon entering the n2 material. After the phase compensation of the present invention, the focal depth deformation caused by spherical aberration is effectively corrected, and the focal depth is S3.

[0193] Furthermore, from the above-mentioned schematic diagram of the phase difference correction effect, it can be seen that: S3 is significantly smaller than S2, and the corrected S3 almost reaches the level of S1. This result shows that the intensity distribution of the focal spot expands asymmetrically in the radial and longitudinal directions. With the increase of the focusing depth, the asymmetry and expansion degree of the laser beam are reduced to a certain extent, resulting in a decrease in the peak light density and a reduction in the laser processing quality.

[0194] Reference Figure 12 , Figure 12Schematic diagram of the focus depth comparison of the phase difference correction effect of the laser beam. Specifically, the phase compensation phase diagram loaded into the SLM is related to the depth d' of the focus point. Different depths have corresponding phase diagrams. During the processing, the phase diagram needs to be adjusted with the different depths. The correction phase diagrams corresponding to different focus depths d' are listed, where (a) d' = 200μm, (b) d' = 600μm and (c) d' = 1500μm. The phase diagrams of different depths of focus are simulated, where n2 = 1.6, spot size = 8mm, and wavelength = 1064nm. The three groups of pictures are also the 3D schematic diagrams corresponding to the above-mentioned different depths of focus, half the phase interface profile and the corresponding phase correction data.

[0195] This embodiment realizes the transmission of the laser beam through a preset laser beam reflection system, realizes the conversion of the laser beam between phase difference elimination systems, and further transmits the laser beam through a preset 4F transmission system to improve the beam quality for laser processing. Finally, the effect of phase difference elimination is determined by a preset detection device.

[0196] In addition, the embodiment of the present invention also provides a phase difference elimination device, referring to Figure 13 , Figure 13 Schematic diagram of the functional modules of the phase difference elimination device involved in the embodiment of the laser processing method of the present invention. Figure 13 As shown, the phase difference elimination device includes:

[0197] A parameter acquisition module 10 is used to acquire laser injection parameters of the laser beam;

[0198] a phase diagram determination module 20 for performing phase difference calculation according to the laser injection parameters of the laser beam based on a preset calculation rule to determine a corresponding spherical aberration phase diagram;

[0199] A phase compensation module 30 is configured to load the spherical aberration phase map into a preset spatial light modulator SLM, perform phase compensation on the phase difference of the laser beam, and determine a laser beam with the phase difference eliminated;

[0200] The laser processing module 40 is used to perform laser processing on the material to be processed based on the laser beam.

[0201] Preferably, the phase diagram determination module includes:

[0202] an incident range dividing unit, for dividing the laser incident range from the incident angle of the laser beam to the preset incident angle into N parts, based on a preset programming algorithm, wherein N is a positive integer;

[0203] A phase difference calculation unit is used to substitute the N parts of the laser incident range into a preset phase difference calculation formula to determine the phase difference corresponding to each part of the N parts of the laser incident range;

[0204] The spherical aberration phase diagram dividing unit is used to determine the spherical aberration phase diagram of the laser beam based on the phase difference.

[0205] Preferably, the phase diagram determination module further includes:

[0206] a normalization processing unit, configured to perform normalization processing on the phase difference corresponding to each portion in the N partial laser incident ranges, and determine a phase difference value corresponding to the phase difference of each portion;

[0207] The bitmap conversion unit is used to perform a preset bitmap conversion on the phase difference value to generate a bitmap BMP spherical aberration phase map corresponding to the phase difference value.

[0208] Preferably, the phase compensation module includes:

[0209] A spot adjustment unit, configured to adjust the spot of the laser beam based on a preset beam expander BET, and determine the spot size of the laser beam for laser operation;

[0210] a polarization adjustment unit, configured to adjust the polarization of the laser beam based on a preset half-wave plate HP, so as to adjust the polarization state of the laser beam to linear polarization;

[0211] The reflector emitting unit is used to determine the SLM receiving laser beam emitted from the reflector based on the adjusted spot size and linear polarization of the laser beam.

[0212] Preferably, the phase compensation module further includes:

[0213] a phase-to-be-compensated determining unit, configured to determine the phase-to-be-compensated of the laser beam received by the SLM based on a pre-calculated spherical aberration phase map;

[0214] a control signal determining unit, configured to obtain a control signal corresponding to the phase to be compensated based on a digital visual interface DVI preset by the spatial light modulator SLM;

[0215] A modulation depth loading unit, configured to load a corresponding modulation depth according to the control signal based on a fill factor preset in the reflective panel of the spatial light modulator SLM;

[0216] The beam phase compensation unit is used to perform phase compensation corresponding to the modulation depth on the laser beam received by the SLM, and determine the laser beam with the phase difference eliminated.

[0217] Preferably, the phase compensation module further includes:

[0218] A beam transmission unit, used for transmitting the laser beam with phase difference eliminated into a preset 4F transmission system;

[0219] a transmission system processing unit, configured to perform beam focusing and beam filtering on the phase-aberration-eliminated laser beam through the 4F transmission system to obtain a laser beam for laser processing;

[0220] The laser processing unit is used to direct the laser beam for laser processing into a preset material to be processed, thereby realizing laser processing of the material to be processed.

[0221] Preferably, the phase compensation module further includes:

[0222] An incident morphology map acquisition unit, configured to acquire an incident morphology map corresponding to a laser beam in a preset objective lens in the 4F transmission system;

[0223] The phase compensation effect testing unit is used to determine the laser parameters of the laser beam based on the incident morphology diagram, and to verify the effect of the phase compensation performed on the laser beam based on the laser parameters.

[0224] The principles and implementation process of logistics transportation implemented in this embodiment can be referred to the above embodiments and will not be described in detail here.

[0225] In addition, an embodiment of the present invention also proposes a device, which includes a memory, a processor, and a phase difference elimination program stored in the memory and runnable on the processor. When the phase difference elimination program is executed by the processor, the steps of the laser processing method described in the above embodiment are implemented.

[0226] In addition, to achieve the above-mentioned purpose, the present invention also provides a medium, which is a computer-readable storage medium, and a phase difference elimination program is stored on the computer-readable storage medium. When the phase difference elimination program is executed by the processor, the steps of the laser processing method described above are implemented.

[0227] Since the present phase difference elimination program adopts all the technical solutions of all the aforementioned embodiments when executed by the processor, it has at least all the beneficial effects brought about by all the technical solutions of all the aforementioned embodiments, which will not be described in detail here.

[0228] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or system comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or system. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or system comprising the element.

[0229] The serial numbers of the above embodiments of the present invention are for description only and do not represent the advantages or disadvantages of the embodiments.

[0230] Through the description of the above embodiments, those skilled in the art can clearly understand that the above embodiment methods can be implemented by means of software plus the necessary general hardware platform, and of course can also be implemented by hardware, but in many cases the former is a better embodiment. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) as described above, and includes a number of instructions for enabling a terminal device (which can be a mobile phone, computer, server, or network device, etc.) to execute the methods described in each embodiment of the present invention.

[0231] The above are only preferred embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention description and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A laser processing method, characterized in that: The laser processing method comprises: obtaining laser injection parameters of the laser beam; Based on a preset calculation rule, a phase difference calculation is performed according to the laser injection parameters of the laser beam to determine the corresponding spherical aberration phase diagram. This step includes: Based on a preset programming algorithm, the laser beam incident angle to the laser incident range of the preset incident angle is divided into N parts, where N is a positive integer; Substituting the N laser incident ranges into a preset phase difference calculation formula respectively, and determining the phase difference corresponding to each portion in the N laser incident ranges; Determining a spherical aberration phase diagram of the laser beam incident based on the phase difference, the step comprising: normalizing the phase difference corresponding to each portion of the N partial laser incident ranges to determine a phase difference value corresponding to the phase difference of each portion; The phase difference value is converted into a preset bitmap to generate a bitmap BMP spherical aberration phase map corresponding to the phase difference value; Loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining a laser beam with the phase difference eliminated; Based on the laser beam, laser processing is performed on the material to be processed.

2. The laser processing method according to claim 1, wherein: Before the step of loading the spherical aberration phase map into a preset spatial light modulator SLM to perform phase compensation on the phase difference of the laser beam, the method further includes: Based on a preset beam expander BET, the spot of the laser beam is adjusted to determine the spot size of the laser beam for laser operation; Based on a preset half-wave plate HP, the polarization of the laser beam is adjusted to a linear polarization state; Based on the adjusted spot size and linear polarization of the laser beam, it is determined that the spatial light modulator SLM emitted from the reflecting mirror receives the laser beam.

3. The laser processing method according to claim 2, wherein: The step of loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining the laser beam with the phase difference eliminated comprises: Determining the phase to be compensated of the laser beam received by the spatial light modulator SLM based on a pre-calculated spherical aberration phase map; Acquiring a control signal corresponding to the phase to be compensated based on a digital visual interface DVI preset by the spatial light modulator SLM; Based on a preset fill factor in the spatial light modulator (SLM) reflective panel, loading a corresponding modulation depth according to the control signal; Phase compensation corresponding to the modulation depth is performed on the laser beam received by the spatial light modulator SLM to determine a laser beam with phase difference eliminated.

4. The laser processing method according to claim 1, wherein: After the steps of loading the spherical aberration phase map into a preset spatial light modulator SLM, performing phase compensation on the phase difference of the laser beam, and determining the laser beam with the phase difference eliminated, the method further includes: injecting the laser beam with phase difference eliminated into a preset 4F transmission system; performing beam focusing and beam filtering on the laser beam with phase difference eliminated by the 4F transmission system to obtain a laser beam for laser processing; The laser beam for laser processing is incident on a preset material to be processed, thereby achieving laser processing of the material to be processed.

5. The laser processing method according to claim 4, wherein: After the step of performing beam focusing and beam filtering on the laser beam with phase difference eliminated by the 4F transmission system to obtain a laser beam for laser processing, the method further includes: Obtaining an incident morphology diagram corresponding to a laser beam in a preset objective lens in the 4F transmission system; Based on the incident morphology diagram, laser parameters of the laser beam are determined, and based on the laser parameters, an effect of phase compensation of the laser beam is verified.

6. A phase difference elimination device, characterized in that: The phase difference elimination device comprises: A parameter acquisition module, used to acquire laser injection parameters of the laser beam; A phase diagram determination module is used to perform phase difference calculation according to the laser injection parameters of the laser beam based on a preset calculation rule to determine the corresponding spherical aberration phase diagram. This step includes: based on a preset programming algorithm, dividing the laser injection range from the incident angle of the laser beam to the preset incident angle into N parts, where N is a positive integer; substituting the laser injection ranges of the N parts into a preset phase difference calculation formula to determine the phase difference corresponding to each part in the N partial laser injection ranges; based on the phase difference, determining the spherical aberration phase diagram of the laser beam injection, this step includes: normalizing the phase difference corresponding to each part in the N partial laser injection ranges to determine the phase difference value corresponding to the phase difference of each part; performing a preset bitmap conversion on the phase difference value to generate a bitmap BMP spherical aberration phase diagram corresponding to the phase difference value; A phase compensation module is used to load the spherical aberration phase map into a preset spatial light modulator SLM, perform phase compensation on the phase difference of the laser beam, and determine a laser beam with the phase difference eliminated; The laser processing module is used to perform laser processing on the material to be processed based on the laser beam.

7. A device, characterized in that The device includes a memory, a processor, and a phase difference elimination program stored in the memory and executable on the processor. When the phase difference elimination program is executed by the processor, the laser processing method according to any one of claims 1 to 5 is implemented.

8. A medium, which is a computer-readable storage medium, characterized in that: The computer-readable storage medium stores a phase difference elimination program, which, when executed by a processor, implements the steps of the laser processing method according to any one of claims 1 to 5.

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