Observation window shutter structure and vacuum coating apparatus

Abstract

The present application relates to a kind of observation window shutter structure and vacuum coating equipment. Observation window shutter structure includes shutter, shaft sleeve, connecting rod, magnetic force driving assembly and locking piece;Shutter is oppositely arranged with observation window, and located in the furnace cavity of vacuum coating equipment;Shaft sleeve is set on vacuum coating equipment;The first end of connecting rod is connected with shutter, and the second end of connecting rod is movably inserted into shaft sleeve;Magnetic force driving assembly is movably connected with shaft sleeve, for driving connecting rod to rotate around its axis by magnetic force, so that shutter rotates relative to observation window;Locking piece is used to limit the rotation of magnetic force driving assembly relative to shaft sleeve. Since observation window shutter structure adopts magnetic force to drive connecting rod to rotate, magnetic force driving assembly only needs to be connected with connecting rod through shaft sleeve, so as to drive connecting rod to rotate, so that the vacuum degree in furnace cavity can be guaranteed. At the same time, locking piece can prevent non-human external force from driving shutter to rotate, further ensuring the effectiveness of shutter shielding observation window.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to an observation window structure and a vacuum coating device. BACKGROUND

[0002] The vacuum coating device refers to a device for coating under high vacuum, including evaporation coating and sputtering coating. The evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions, and then deposits on the substrate surface to form a thin film through the processes of scattering points, island structure, wandering structure and layer growth. For sputtering coating, it can be simply understood as using electrons or high-energy laser to bombard the target material, and then sputtering the surface components in the form of atomic groups or ions, and finally depositing on the substrate surface to form a thin film through the film forming process.

[0003] In order to improve the coating quality, an observation window needs to be provided on the vacuum coating device to observe the coating thickness and uniformity of the product inside the vacuum coating device, so as to adjust the process parameters of the coating at any time. The observation window shutter is a shielding mechanism for observing the inside of the observation window of the vacuum coating device, and its main function is to prevent the deposition of the coating on the observation window so that the inside of the furnace cannot be seen clearly.

[0004] Generally, the observation window shutter is connected to the rotating shaft of the shutter to control the visibility of the observation window, so the O-ring needs to be sealed between the rotating shaft and the vacuum chamber. Therefore, during the rotation of the rotating shaft, air leakage phenomenon is easy to occur, which affects the vacuum degree of the vacuum coating device and further affects the coating quality. SUMMARY

[0005] Therefore, it is necessary to provide an observation window structure and a vacuum coating device for the connection problem of the observation window shutter.

[0006] An observation window shutter structure comprises:

[0007] A shutter is arranged opposite to the observation window and located in the furnace cavity of the vacuum coating device.

[0008] A shaft sleeve is arranged on the vacuum coating device.

[0009] A connecting rod is connected to the first end of the shutter, and the second end of the connecting rod is movably inserted into the shaft sleeve.

[0010] A magnetic drive assembly is movably connected to the shaft sleeve, and is used to drive the connecting rod to rotate around its axis by magnetic force, so that the shutter rotates relative to the observation window.

[0011] A locking member is used to limit the rotation of the magnetic drive assembly relative to the shaft sleeve.

[0012] The observation window shutter structure comprises a shutter, a shaft sleeve, a connecting rod, a magnetic drive assembly and a locking piece. The magnetic drive assembly is connected with the shutter through the shaft sleeve and the connecting rod, and is used to drive the shutter to rotate relative to the observation window. When the observation window is in use, the magnetic drive assembly can be operated to make the shutter perpendicular to the observation window, so as to ensure that the shutter does not block the field of view of the observation window. When the observation window is not in use, the magnetic drive assembly can be operated to make the shutter parallel to the observation window or completely cover the observation window, so as to avoid the deposition of the coating on the observation window. Since the observation window shutter structure is driven to rotate by the magnetic force, the magnetic drive assembly only needs to be connected with the connecting rod through the shaft sleeve, so as to drive the connecting rod to rotate. Therefore, the shaft sleeve can ensure the vacuum degree in the furnace cavity. Meanwhile, the locking piece can limit the rotation of the magnetic drive assembly relative to the shaft sleeve, so as to prevent the shutter from rotating due to external force, and further ensure the effectiveness of the shutter in blocking the observation window.

[0013] In one of the embodiments, the magnetic drive assembly comprises a first magnetic piece, the first magnetic piece is movably sleeved on the shaft sleeve, and a second end of the connecting rod is sleeved with a second magnetic piece, the magnetism of the second magnetic piece is opposite to that of the first magnetic piece.

[0014] In one of the embodiments, the magnetic drive assembly further comprises a rotating piece, an inner wall of the rotating piece is provided with the first magnetic piece, and the rotating piece is movably sleeved on the shaft sleeve.

[0015] In one of the embodiments, the magnetic drive assembly further comprises a first limiting piece and a second limiting piece, the first limiting piece and the second limiting piece are both sleeved on the shaft sleeve, the first limiting piece and the second limiting piece are oppositely arranged along the axial direction of the shaft sleeve, and the rotating piece is located between the first limiting piece and the second limiting piece.

[0016] In one of the embodiments, the locking piece can be arranged through the first limiting piece or the second limiting piece along the axial direction of the shaft sleeve, and abuts against the rotating piece.

[0017] In one of the embodiments, a first bearing is arranged on the rotating piece, and the shaft sleeve is arranged through the first bearing.

[0018] In one of the embodiments, an inner wall of the shaft sleeve is provided with a second bearing, and a second end of the connecting rod is arranged through the second bearing.

[0019] In one of the embodiments, the shape of the shutter is adapted to the shape of the observation window, and when the shutter is parallel to the observation window, the shutter can completely cover the observation window.

[0020] In one of the embodiments, an edge of the shutter is provided with a folding portion, and the folding portion is folded towards the observation window.

[0021] A vacuum coating equipment comprises an observation window, an equipment body, and the observation window shutter structure, the observation window is arranged on the equipment body, a furnace cavity is arranged in the equipment body, the observation window is used for observing products in the furnace cavity, a shutter of the observation window shutter structure is arranged opposite to the observation window, and a shaft sleeve of the observation window shutter structure is arranged on the equipment body.

[0022] The vacuum coating equipment, the observation window shutter structure comprises a shutter, a shaft sleeve, a connecting rod, a magnetic driving assembly, and a locking piece. The magnetic driving assembly is connected with the shutter through the shaft sleeve and the connecting rod, and is used for driving the shutter to rotate relative to the observation window. When the observation window is used, the magnetic driving assembly is operated to make the shutter perpendicular to the observation window, so that the field of view of the observation window is not blocked by the shutter. When the observation window is not used, the magnetic driving assembly is operated to make the shutter parallel to the observation window or completely block the observation window, so that coating is prevented from accumulating on the observation window. Since the connecting rod is driven to rotate by magnetic force, the magnetic driving assembly only needs to be connected with the connecting rod through the shaft sleeve, so that the shaft sleeve can ensure the vacuum degree in the furnace cavity. Meanwhile, the locking piece can limit the rotation of the magnetic driving assembly relative to the shaft sleeve, so that the shutter is prevented from rotating by non-human external force, and the effectiveness of the shutter in blocking the observation window is further ensured. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 is a structural schematic view of an observation window shutter structure in an embodiment;

[0024] Figure 2 FIG. 2 is a front view of the observation window shutter structure in the embodiment;

[0025] Figure 3 FIG. 3 is a side view of the observation window shutter structure in the embodiment;

[0026] Figure 4 FIG. 4 is a partial sectional view of the observation window shutter structure in the embodiment.

[0027] Corresponding reference signs: 100, observation window shutter structure; 10, observation window; 11, observation window flange; 20, shutter; 21, folding part; 30, shaft sleeve; 31, shaft cylinder; 32, shaft cover; 40, connecting rod; 41, second magnetic piece; 42, second bearing; 43, third limiting piece; 44, fourth limiting piece; 50, magnetic driving assembly; 51, first magnetic piece; 52, rotating piece; 53, first limiting piece; 54, second limiting piece; 55, first bearing; 56, first bearing seat; 57, fifth limiting piece; 60, locking piece; 70, connecting pipe; 80, connecting flange. DETAILED DESCRIPTION

[0028] In order to make the above objectives, characteristics and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below with reference to the drawings. In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the concept of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0029] The observation window shutter structure 100 and the vacuum coating equipment in some embodiments are described in detail below with reference to the drawings.

[0030] As shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 , in an embodiment, an observation window shutter structure 100 is provided, comprising a shutter 20, a shaft sleeve 30, a connecting rod 40, a magnetic drive assembly 50 and a locking member 60;

[0031] The shutter 20 is arranged opposite to the observation window 10 and located in the furnace cavity of the vacuum coating equipment; the shaft sleeve 30 is arranged on the vacuum coating equipment; the first end of the connecting rod 40 is connected with the shutter 20, and the second end of the connecting rod 40 is movably inserted into the shaft sleeve 30; the magnetic drive assembly 50 is movably connected with the shaft sleeve 30, for driving the connecting rod 40 to rotate around its axis by magnetic force, so that the shutter 20 rotates relative to the observation window 10; the locking member 60 is used to limit the rotation of the magnetic drive assembly 50 relative to the shaft sleeve 30.

[0032] The observation window shutter structure 100 described above comprises the shutter 20, the shaft sleeve 30, the connecting rod 40, the magnetic drive assembly 50 and the locking member 60. The magnetic drive assembly 50 is connected with the shutter 20 through the shaft sleeve 30 and the connecting rod 40, for driving the shutter 20 to rotate relative to the observation window 10. When the observation window 10 is used, operating the magnetic drive assembly 50 can make the shutter 20 perpendicular to the observation window 10, so as to ensure that the shutter 20 does not block the field of view of the observation window 10. When the observation window 10 is not used, operating the magnetic drive assembly 50 can make the shutter 20 parallel to the observation window 10, or completely block the observation window 10, so as to avoid the coating from accumulating on the observation window 10. Since the observation window shutter structure 100 adopts magnetic force to drive the connecting rod 40 to rotate, the magnetic drive assembly 50 only needs to be connected with the connecting rod 40 through the shaft sleeve 30, so as to drive the connecting rod 40 to rotate, thus ensuring the vacuum degree in the furnace cavity. At the same time, the locking member 60 can limit the rotation of the magnetic drive assembly 50 relative to the shaft sleeve 30, so as to prevent non-human external force from driving the shutter 20 to rotate, further ensuring the effectiveness of the shutter 20 in blocking the observation window 10.

[0033] Specifically, as shown in Figure 1 , Figure 2 andFigure 3 As shown in the drawings, in an embodiment, the vacuum coating equipment is provided with a connecting pipe 70, the connecting pipe 70 is connected with the shaft sleeve 30 through a connecting flange 80, and the second end of the connecting rod 40 is movably inserted into the shaft sleeve 30 through the connecting pipe 70. After the vacuum coating equipment is provided with the connecting pipe 70 and the connecting flange 80, the shaft sleeve 30 and the magnetic driving assembly 50 can be easily disassembled, repaired and replaced.

[0034] Further, as shown in the drawings, Figure 1 , Figure 2 and Figure 3 in an embodiment, the vacuum coating equipment is provided with an observation window flange 11, the observation window 10 is arranged on the observation window flange 11, the connecting pipe 70 is arranged on the observation window flange 11, and the second end of the connecting rod 40 is inserted into the shaft sleeve 30 through the observation window flange 11 and the connecting pipe 70 in sequence.

[0035] Specifically, as shown in the drawings, Figure 4 in an embodiment, the magnetic driving assembly 50 comprises a first magnetic member 51, the first magnetic member 51 is movably sleeved on the shaft sleeve 30, the second end of the connecting rod 40 is sleeved with a second magnetic member 41, and the magnetism of the second magnetic member 41 is opposite to that of the first magnetic member 51. Therefore, when the first magnetic member 51 rotates on the outer periphery of the shaft sleeve 30, the second magnetic member 41 is driven to rotate on the inner periphery of the shaft sleeve 30 through magnetic force, and the connecting rod 40 is further driven to rotate. The magnetic driving assembly 50 does not need to be directly connected with the connecting rod 40, so that the connecting rod 40 and the shaft sleeve 30 do not need to be rotationally sealed, only the shaft sleeve 30 needs to be sealingly installed, and the vacuum degree inside the vacuum coating equipment is effectively guaranteed.

[0036] In the specific embodiment, the observation window baffle structure 100 further comprises a first protective shell and a second protective shell, the first magnetic member 51 is arranged in the first protective shell, the second magnetic member 41 is arranged in the second protective shell, the first protective shell is movably sleeved on the shaft sleeve 30, and the second protective shell is fixedly sleeved on the connecting rod 40.

[0037] Specifically, as shown in the drawings, Figure 4 in an embodiment, the magnetic driving assembly 50 further comprises a rotating member 52, the inner wall of the rotating member 52 is provided with the first magnetic member 51, and the rotating member 52 is movably sleeved on the shaft sleeve 30.

[0038] In the specific embodiment, the inner wall of the rotating member 52 is provided with the first protective shell.

[0039] Specifically, as shown in the drawings, Figure 4 in an embodiment, the rotating member 52 is provided with a first bearing 55, and the shaft sleeve 30 penetrates through the first bearing 55.

[0040] And the observation window baffle structure 100 further comprises a first bearing seat 56, the first bearing seat 56 is sleeved on the first bearing 55, and the first bearing seat 56 is connected with the rotating piece 52 along the axial direction of the shaft sleeve 30. The first bearing seat 56 is used for supporting and fixing the relative position of the first bearing 55 and the rotating piece 52, so as to ensure the efficiency and reliability of the rotation of the rotating piece 52.

[0041] In the embodiment, two first bearings 55 are arranged, two first bearing seats 56 are arranged, the first bearing seat 56 corresponds to the first bearing 55 one by one, and the rotating piece 52 is arranged between the two first bearing seats 56, that is, the first bearing seat 56, the rotating piece 52 and the first bearing seat 56 are sequentially sleeved along the axial direction of the shaft sleeve 30, and the two first bearing seats 56 are connected with the rotating piece 52. The two first bearings 55 further improve the efficiency and reliability of the rotation of the rotating piece 52.

[0042] Specifically, as shown in the drawings, Figure 4 In an embodiment, the magnetic drive assembly 50 further comprises a first limiting piece 53 and a second limiting piece 54, the first limiting piece 53 and the second limiting piece 54 are sleeved on the shaft sleeve 30, the first limiting piece 53 and the second limiting piece 54 are oppositely arranged along the axial direction of the shaft sleeve 30, and the rotating piece 52 is located between the first limiting piece 53 and the second limiting piece 54. The first limiting piece 53 and the second limiting piece 54 are used for limiting the relative position of the rotating piece 52 in the axial direction of the shaft sleeve 30, so that the rotating piece 52 can only rotate around the circumferential direction of the shaft sleeve 30, ensuring the accuracy of the relative position of the first magnetic piece 51 and the second magnetic piece 41 on the rotating piece 52, ensuring the effective driving connection of the first magnetic piece 51 and the second magnetic piece 41 to the rotating rod 40, and improving the magnetic transmission efficiency.

[0043] The magnetic drive assembly 50 further comprises a fifth limiting piece 57, the fifth limiting piece 57 is fixedly sleeved on the rotating piece 52, the two ends of the fifth limiting piece 57 protrude from the two ends of the rotating piece 52 respectively, the first limiting piece 53 and the second limiting piece 54 are provided with a first limiting groove and a second limiting groove respectively, the two end faces of the fifth limiting piece 57 along the axial direction of the shaft sleeve 30 are spaced apart from the side walls of the first limiting groove and the second limiting groove respectively, and the inner surfaces of the fifth limiting piece 57 are spaced apart from the bottom walls of the first limiting groove and the second limiting groove respectively. Therefore, the fifth limiting piece 57 is used for limiting the relative position of the rotating piece 52 in the axial direction and the radial direction of the shaft sleeve 30, so that the rotating piece 52 can only rotate around the circumferential direction of the shaft sleeve 30, and the efficiency and reliability of the rotation of the rotating piece 52 are further improved.

[0044] In the embodiment, the first limiting piece 53 is connected with the end face of the shaft sleeve 30, and the second limiting piece 54 is sleeved on the shaft sleeve 30.

[0045] Specifically, as shown in the drawings, Figure 4As shown, in an embodiment, the locking member 60 can be inserted into the first limiting member 53 or the second limiting member 54 along the axial direction of the shaft sleeve 30 and abut against the rotating member 52. When the locking member is inserted into the first limiting member 53 or the second limiting member 54 along the axial direction of the shaft sleeve 30 and abuts against the rotating member 52, the rotating member 52 is stationary relative to the first limiting member 53 or the second limiting member 54. Since the first limiting member 53 or the second limiting member 54 is fixedly connected to the shaft sleeve 30, the rotating member 52 is stationary relative to the shaft sleeve 30, and the connecting rod is stationary relative to the shaft sleeve 30, thereby fixing the relative position of the baffle 20 and the observation window 10.

[0046] Specifically, as shown in the drawings, Figure 4 As shown, in an embodiment, the inner wall of the shaft sleeve 30 is provided with a second bearing 42, and the second end of the connecting rod 40 is inserted into the second bearing 42.

[0047] Among them, the second bearing 42 is provided with two, the second bearing 42 is respectively arranged at both ends of the shaft sleeve 30, and the second magnetic member 41 is arranged between the two second bearings 42.

[0048] In addition, the observation window baffle structure 100 further comprises a third limiting member 43 and a fourth limiting member 44, the third limiting member 43 is fixedly sleeved on the connecting rod 40, the fourth limiting member 44 is embedded on one end of the shaft sleeve 30 close to the equipment body, and the two ends of the third limiting member 43 abut against the second magnetic member 41 and the second bearing 42 respectively, the other end of the second bearing 42 abuts against the fourth limiting member 44, and the connecting rod 40 is provided with a shaft shoulder, and the two ends of the shaft shoulder abut against the second bearing 42 and the second magnetic member 41 respectively. That is, the connecting rod 40 is sequentially sleeved with the second bearing 42, the shaft shoulder, the second magnetic member 41, the third limiting member 43, the second bearing 42 and the fourth limiting member 44. The shaft shoulder, the third limiting member 43 and the fourth limiting member 44 are used to limit the position of the second magnetic member 41 and the second bearing 42 in the axial direction of the connecting rod 40, improve the accuracy of the relative position of the first magnetic member 51 and the second magnetic member 41, ensure the effective driving of the connecting rod 40 by the first magnetic member 51 and the second magnetic member 41, and improve the efficiency of magnetic transmission.

[0049] In the specific embodiment, the shaft sleeve 30 comprises a shaft cylinder 31 and a shaft cover 32, one end of the shaft cylinder 31 is connected with the connecting pipe 70, the other end of the shaft cylinder 31 is provided with the shaft cover 32, and the two ends of the second bearing 42 abut against the shaft cover 32 and the shaft shoulder respectively, for limiting the position of the second bearing 42 in the axial direction of the connecting rod 40. The second bearing 42 is used to improve the effectiveness of the rotation of the connecting rod 40 relative to the shaft sleeve 30.

[0050] Specifically, as shown in the drawings, Figure 1 , Figure 2 and Figure 3As shown in the drawings, in an embodiment, the shape of the baffle 20 is adapted to the shape of the observation window 10, and when the baffle 20 is parallel to the observation window 10, the baffle 20 can completely shield the observation window 10.

[0051] Specifically, as shown in the drawings, Figure 1 , Figure 2 and Figure 3 in an embodiment, the edge of the baffle 20 is provided with a folding part 21, and the folding part 21 is folded towards the observation window 10.

[0052] In the specific embodiment, the connecting rod 40 is connected with one edge of the baffle 20, and the other edges of the baffle 20 are all provided with the folding part 21, so that the baffle 20 forms a shielding cover facing the observation window 10, effectively improving the shielding effect of the baffle 20 on the observation window 10. And because the connecting rod 40 is connected with the edge of the baffle 20, when the baffle 20 is perpendicular to the observation window 10, the baffle 20 can completely move out of the observation field of view of the observation window 10, so as to not shield the observation field of view of the observation window 10.

[0053] As shown in the drawings, Figures 1 to 4 in an embodiment, a vacuum coating equipment is provided, which comprises an observation window 10, an equipment body and an observation window baffle structure 100. The observation window 10 is arranged on the equipment body, and a furnace cavity is arranged in the equipment body. The observation window 10 is used for observing products in the furnace cavity. The baffle 20 of the observation window baffle structure 100 is arranged opposite to the observation window 10, and the shaft sleeve 30 of the observation window baffle structure 100 is arranged on the equipment body.

[0054] The above-mentioned vacuum coating equipment, the observation window baffle structure 100 comprises a baffle 20, a shaft sleeve 30, a connecting rod 40, a magnetic drive assembly 50 and a locking part 60. The magnetic drive assembly 50 is connected with the baffle 20 through the shaft sleeve 30 and the connecting rod 40, and is used for driving the baffle 20 to rotate relative to the observation window 10. When the observation window 10 is used, the magnetic drive assembly 50 can be operated to make the baffle 20 perpendicular to the observation window 10, so as to ensure that the baffle 20 does not shield the observation field of view of the observation window 10. When the observation window 10 is not used, the magnetic drive assembly 50 can be operated to make the baffle 20 parallel to the observation window 10, or completely shield the observation window 10, so as to avoid that the coating is accumulated on the observation window 10. Because the observation window baffle structure 100 adopts the magnetic drive connecting rod 40 to rotate, the magnetic drive assembly 50 only needs to be connected with the connecting rod 40 through the shaft sleeve 30, so as to drive the connecting rod 40 to rotate, and therefore the shaft sleeve 30 can ensure the vacuum degree in the furnace cavity. At the same time, the locking part 60 can limit the rotation of the magnetic drive assembly 50 relative to the shaft sleeve 30, so as to prevent the baffle 20 from rotating due to non-human external force, and further ensure the effectiveness of the baffle 20 shielding the observation window 10.

[0055] Specifically, as shown in the drawings, Figure 1 , Figure 2 andFigure 3 As shown in the drawings, in an embodiment, a connecting pipe 70 is arranged on the equipment body, the connecting pipe 70 is connected with the shaft sleeve 30 through a connecting flange 80, and the second end of the connecting rod 40 is movably arranged in the shaft sleeve 30 through the connecting pipe 70. After the vacuum coating equipment is provided with the connecting pipe 70 and the connecting flange 80, the shaft sleeve 30 and the magnetic driving assembly 50 are facilitated to be disassembled, overhauled and replaced.

[0056] Further, as shown in the drawings, Figure 1 , Figure 2 and Figure 3 , in an embodiment, an observation window flange 11 is arranged on the equipment body, the observation window 10 is arranged on the observation window flange 11, the connecting pipe 70 is arranged on the observation window flange 11, and the second end of the connecting rod 40 is arranged on the shaft sleeve 30 through the observation window flange 11 and the connecting pipe 70 in sequence.

[0057] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0058] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first" and "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0059] In the present application, unless otherwise specifically defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0060] In the present application, unless specifically stated and limited otherwise, a first feature "on" or "under" a second feature can be directly contacting the first and second features, or indirectly contacting the first and second features through an intervening medium. Also, a first feature "over", "above" and "on top of" a second feature can be directly above or obliquely above the second feature, or simply mean that the first feature is horizontally higher than the second feature. A first feature "under", "below" and "underneath" a second feature can be directly below or obliquely below the second feature, or simply mean that the first feature is horizontally lower than the second feature.

[0061] It is to be understood that when an element as a preamble is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element or intervening elements can also be present. In the description of the present application, the terms "vertical", "horizontal", "upper", "lower", "left", "right", and similar terms are used for the purpose of description only and are not intended to limit the present application to a particular embodiment.

[0062] The technical features of the above embodiments can be combined in any manner. For the sake of brevity, not all possible combinations of the technical features of the above embodiments are described, however, it is to be understood that any combination of the technical features is within the scope of the present application.

[0063] The above embodiments only express several embodiments of the present application, and the description is specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of variations and improvements can be made, which are within the scope of the present application. Therefore, the scope of protection of the present application should be subject to the appended claims.

Claims

1. An observation window shutter structure, characterized by, The application relates to an observation window baffle structure. The observation window baffle structure comprises a baffle, a shaft sleeve, a connecting rod, a magnetic force driving assembly and a locking member. The baffle is arranged opposite to the observation window and located in a furnace cavity of a vacuum coating equipment. The shaft sleeve is arranged on the vacuum coating equipment. The first end of the connecting rod is connected with the baffle, and the second end of the connecting rod is movably arranged in the shaft sleeve. The magnetic force driving assembly is movably connected with the shaft sleeve, and is used for driving the connecting rod to rotate around the axis of the connecting rod by magnetic force, so that the baffle rotates relative to the observation window. The locking member is used for limiting the rotation of the magnetic force driving assembly relative to the shaft sleeve. The magnetic force driving assembly comprises a first magnetic member, the first magnetic member is movably arranged in the shaft sleeve, the second end of the connecting rod is sleeved with a second magnetic member, and the magnetism of the second magnetic member is opposite to that of the first magnetic member. The magnetic force driving assembly further comprises a rotating member, the inner wall of the rotating member is provided with the first magnetic member, and the rotating member is movably arranged in the shaft sleeve. The magnetic force driving assembly further comprises a first limiting member and a second limiting member, the first limiting member and the second limiting member are both arranged in the shaft sleeve, the first limiting member and the second limiting member are arranged opposite along the axial direction of the shaft sleeve, and the rotating member is located between the first limiting member and the second limiting member. The locking member can be arranged in the first limiting member or the second limiting member along the axial direction of the shaft sleeve and abuts against the rotating member.

2. The window blind structure of claim 1, wherein The rotating member is provided with a first bearing, and the shaft sleeve is arranged in the first bearing. The observation window baffle structure further comprises a connecting pipe, the second end of the connecting rod is movably arranged in the shaft sleeve through the connecting pipe.

3. The window blind structure of claim 2, wherein The observation window baffle structure further comprises a connecting flange, the connecting pipe is connected with the shaft sleeve through the connecting flange. The shaft sleeve comprises a shaft cylinder and a shaft cover, one end of the shaft cylinder is connected with the connecting pipe, and the shaft cover is arranged on the other end of the shaft cylinder.

4. The window blind structure of claim 2, wherein The observation window baffle structure further comprises an observation window flange, the observation window is arranged on the observation window flange, the connecting pipe is arranged on the observation window flange, and the second end of the connecting rod is sequentially arranged in the shaft sleeve through the observation window flange and the connecting pipe.

5. The window blind structure of claim 2, wherein The inner wall of the shaft sleeve is provided with a second bearing, and the second end of the connecting rod is arranged in the second bearing. The shape of the baffle is adapted to the shape of the observation window, and when the baffle is parallel to the observation window, the baffle can completely shield the observation window.

6. The window blind structure of claim 1, wherein The edge of the baffle is provided with a folding part, and the folding part is folded towards the observation window.

7. The window blind structure of claim 1, wherein The application relates to an observation window baffle structure.

8. The window blind structure of claim 7, wherein, ​ 9. A vacuum coating apparatus, characterized by, ​

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