Vacuum device temperature sensor assembly

Abstract

A vacuum apparatus temperature sensor assembly and a method for measuring the temperature of a vacuum apparatus are disclosed. The vacuum apparatus temperature sensor assembly includes: a sheet-like substrate configured to conform to the shape of an item, equipment, or device whose temperature is to be determined; and a temperature sensor thermally coupled to the sheet-like substrate, wherein the sheet-like substrate is configured to provide a thermal path from the device to the temperature sensor. In this manner, the substrate provides a larger area for coupling to the device than the area of ​​the temperature sensor, which enables the average temperature of the device to be more reliably and accurately transmitted to the temperature sensor and makes the temperature measurement less dependent on the exact placement of the temperature sensor relative to the device.

Description

Technical Field

[0001] The technical field of the present invention relates to a vacuum device temperature sensor assembly and a method for measuring the temperature of a vacuum device. Background Art

[0002] Temperature sensor assemblies are known. Temperature sensors can be used to measure the temperature of a variety of different items, equipment or devices.

[0003] While such temperature sensors exist, their use can have unintended consequences, particularly where accurately measuring the temperature of an item, equipment, or device is important to provide accurate and reliable temperature control.

[0004] It would therefore be desirable to provide an improved temperature sensor assembly. Summary of the Invention

[0005] According to a first aspect, a vacuum apparatus temperature sensor assembly is provided, comprising: a sheet-like substrate configured to conform to the shape of an item, equipment, or device whose temperature is to be determined; and a temperature sensor thermally coupled to the sheet-like substrate, wherein the sheet-like substrate is configured to provide a thermal path from the vacuum apparatus to the temperature sensor.

[0006] The first aspect recognizes that a problem with existing temperature sensor arrangements is that the temperatures reported by those arrangements may be unreliable because the temperature measured by the temperature sensor may be highly dependent on its positioning. Therefore, a temperature sensor assembly is provided. The assembly may include a substrate. The substrate may be a sheet-like substrate. The substrate may be configured, arranged or adapted to be shaped, adapted or conform to the shape of the device whose temperature is to be determined. The device may be a vacuum device. The assembly may include a temperature sensor. The sensor may be thermally coupled to or attached to the substrate. The substrate may provide a thermal path from the device to the sensor. In this way, the substrate provides an area larger than the area of ​​the temperature sensor for coupling to the device, which enables the average temperature of the device to be transmitted to the temperature sensor more reliably and accurately, and makes the temperature measurement less dependent on the exact placement of the temperature sensor relative to the device.

[0007] The sheet substrate may be configured to conform to an outer surface of the vacuum device. In other words, the sheet substrate may be wrapped around the outside of the device to provide a heat path across the sheet substrate and the vacuum device.

[0008] The sheet substrate may be flexible to conform to the outer surface of the vacuum device. This not only helps provide close contact between the sheet substrate and the vacuum device to promote heat transfer, but also helps keep the placed sheet substrate in place.

[0009] The sheet-like substrate may be a planar sheet.

[0010] The sheet-like substrate may be longer in length than in width.

[0011] The width of the sheet substrate can be greater than the distance between the heater elements of the vacuum device. By making the width greater than this distance, it can be ensured that the sheet substrate will always cover the heater elements.

[0012] The length of the sheet-like substrate may be greater than the length of the outer surface of the vacuum device.

[0013] The sheet-like substrate may have a length that provides a plurality of turns around the vacuum device. This again helps to improve the retention of the sheet-like substrate on the vacuum device.

[0014] The sheet substrate may be configured to provide greater thermal conductivity across the surface between the plurality of windings.Thus, the primary heat transfer path is over the surface of the substrate rather than between the layers of windings.

[0015] The sheet substrate may have a thermal conductivity that reduces temperature variations across the surface of the sheet compared to temperature variations across the surface of the vacuum apparatus. Thus, the sheet substrate may help average temperature differences across different portions of the vacuum apparatus to provide more reliable temperature readings.

[0016] The thermal mass of the sheet substrate may be lower than that of the vacuum device. This enables the sheet substrate to heat up or cool down faster than the vacuum device and therefore respond to temperature changes at least as quickly as the vacuum device.

[0017] The sheet substrate may be interposed between the temperature sensor and the vacuum device.

[0018] The temperature sensor may cover the sheet-like substrate.

[0019] The thermal conductivity of the sheet substrate may be greater than that of the vacuum device. This enables the sheet substrate to heat up or cool down faster than the vacuum device and thus respond to temperature changes at least as quickly as the vacuum device.

[0020] The sheet-like substrate may have a thermal conductivity greater than 8 W·m-1·K-1.

[0021] The sheet-like substrate may be metal and / or carbon and / or graphene.

[0022] The sheet substrate may include an insulating layer. Providing an insulating layer helps reduce the effect of external temperature changes on the temperature experienced by the temperature sensor.

[0023] The sheet-like insulating layer may be arranged on a sheet-like substrate. Thus, the sheet-like insulating layer may be formed as part of a layer of the sheet-like substrate.

[0024] The assembly may include an outer insulating layer covering the sheet substrate and the temperature sensor.

[0025] According to a second aspect, a method is provided comprising: adapting a sheet-like substrate to the shape of a vacuum device whose temperature is to be determined; and thermally coupling a temperature sensor to the sheet-like substrate to provide a heat path from the vacuum device to the temperature sensor.

[0026] The method may include conforming the sheet-form substrate to an exterior surface of the vacuum apparatus.

[0027] The method may include configuring the sheet-form substrate to be flexible to conform to an outer surface of a vacuum device.

[0028] The method may include configuring the sheet-form substrate into a planar sheet.

[0029] The method may include configuring the sheet-form substrate to be longer than it is wide.

[0030] The method may include configuring the sheet substrate to have a width greater than a distance between heater elements of a vacuum apparatus.

[0031] The method may include configuring the sheet-form substrate to have a length greater than a length of an outer surface of the vacuum apparatus.

[0032] The method may include configuring the sheet-form substrate to have a length that provides a plurality of turns around a vacuum apparatus.

[0033] The method may include configuring the sheet-form substrate to provide greater thermal conductivity across its surface between the plurality of windings.

[0034] The method may include configuring the sheet-form substrate to have a thermal conductivity that reduces temperature variations across a surface of the sheet compared to temperature variations across a surface of the vacuum apparatus.

[0035] The method may include configuring the sheet-like substrate to have a thermal mass lower than a thermal mass of a vacuum apparatus.

[0036] The method may include interposing the sheet-form substrate between a temperature sensor and a vacuum device.

[0037] The method may include covering the sheet-like substrate with a temperature sensor.

[0038] The method may include configuring the sheet-like substrate to have a thermal conductivity greater than a thermal conductivity of the vacuum device.

[0039] The method may include configuring the sheet-form substrate to have a thermal conductivity greater than 8 W·m-1·K-1.

[0040] The method may include configuring the sheet-like substrate as at least one of metal and carbon, preferably graphene.

[0041] The method may include configuring the sheet-form substrate to include an insulating layer.

[0042] The method may include positioning a sheet-form insulating layer on a sheet-form substrate.

[0043] The method may include covering the sheet-like substrate and the temperature sensor with an outer insulating layer.

[0044] Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and in combinations other than those explicitly set out in the claims.

[0045] Where an apparatus feature is described as being operable to provide a function, it will be understood that this includes apparatus features that provide the function or that are adapted or configured to provide the function. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Embodiments of the present invention will now be further described with reference to the accompanying drawings, in which:

[0047] Figure 1A and Figure 1B A temperature sensor assembly according to one embodiment is shown. DETAILED DESCRIPTION

[0048] Before discussing the embodiments in more detail, an overview will first be provided. Embodiments provide a temperature sensor suitable for providing reliable, accurate, and consistent temperature readings of a device, such as a conduit coupled to an abatement device or a vacuum pump. The sensor comprises a substrate that can be reshaped to closely fit the shape of a vacuum device and provides a thermal path to a temperature sensor that measures the temperature of the vacuum device or a portion thereof. The substrate is typically formed from a sheet that can be wrapped or mounted around the vacuum device or a portion thereof and is typically sized to wrap around the vacuum device or a portion thereof multiple times. The sheet is also typically sized to be wide enough to reliably contact any localized heating or cooling devices on the vacuum device to reduce temperature variations that might otherwise occur due to placement of the temperature sensor at different locations relative to any localized heating or cooling devices.

[0049] Temperature sensor assembly

[0050] Figure 1A and Figure 1BA temperature sensor assembly 10 is shown according to one embodiment. Figure 1A is a plan view, and Figure 1B The temperature sensor assembly 10 includes a heat conductive sheet 20 and a temperature sensor 30 such as a thermistor, a thermocouple, or the like.

[0051] The temperature sensor 30 is connected to a device (not shown) that receives a signal indicating the temperature measured by the temperature sensor 30 via one or more wires 40. The temperature sensor 30 is typically bonded to the first surface 50 of the thermally conductive sheet 20 using thermal bonds to enhance the thermal coupling between the thermally conductive sheet 20 and the temperature sensor 30. However, the temperature sensor 30 may also be simply placed on the thermally conductive sheet 20 and held in place by wrapping the thermally conductive sheet 20 or by an insulating layer 70.

[0052] The thermally conductive sheet 20 has an overall length L and an overall width W, where the length L is typically longer than the width W. In this example, the temperature sensor 30 is positioned centrally along the width W, but toward one end of the length L of the thermally conductive sheet 20. The thermally conductive sheet 20 is made of a flexible, noble material, or a material that can conform to the outer surface of the vacuum device 80 to which it is applied. Furthermore, the thermally conductive sheet 20 is made of a material with a greater thermal conductivity and / or a lower thermal mass than the vacuum device 80 to which it is applied. This helps ensure that the temperature of the thermally conductive sheet 20 does not change more slowly than the temperature of the vacuum device 80 to which it is applied. Typically, the thermally conductive sheet 20 is made of a metal (such as aluminum or copper) or a carbon material (such as graphene). While the thermally conductive sheet 20 is rectangular in this example, it will be appreciated that this need not be the case and that any suitable shape can be provided to accommodate the vacuum device to which it is applied, such as a circular, oval, irregular shape, or even a shape with gaps or openings to allow protrusions of the vacuum equipment to pass through.

[0053] In this example, the temperature sensor assembly 10 is configured for application to a vacuum device 80 (in this example, a tube) that is heated by means of a heater coil 90 that defines a spiral along the cylindrical surface of the vacuum device 80. However, it will be appreciated that the temperature sensor assembly 10 can be configured for application to other devices where temperature is to be measured. The length L is configured to be greater than the circumference of the vacuum device 80. Typically, the length L is set to be a multiple of the circumference to provide multiple turns of the thermally conductive sheet 20 around the vacuum device 80. Even if the turns may touch, the primary heat path is along the thermally conductive sheet 20, not between adjacent turns of the sheet 20. The width W is selected to be no less than the distance D between the turns of the heater 90. This helps ensure that no matter where the thermally conductive sheet 20 is positioned along the axial length of the vacuum device 80, it will always cover at least one of the turns of the heater 90. This arrangement helps provide an accurate average temperature reading that is less susceptible to local temperature variations experienced by the vacuum device 80. An insulating layer 70 , such as a polymer, is optionally provided and applied after the thermally conductive sheet 20 has been applied to the vacuum apparatus 80 , or may have been bonded to the thermally conductive sheet 20 before it is applied to the vacuum apparatus 80 .

[0054] In operation, a thermally conductive sheet 20 of suitable shape and size is provided for application to the vacuum apparatus 80, a temperature sensor 30 is thermally coupled to the thermally conductive sheet 20, and wires 40 are attached to the thermally conductive sheet 20. The thermally conductive sheet 20 is wrapped around the vacuum apparatus 80, with the second surface 60 contacting the vacuum apparatus 80; in this example, it is wrapped in a plurality of turns. The width W of the thermally conductive sheet 20 is wider than the distance D between the turns of the heater 90, and thus the thermally conductive sheet 20 will cover at least one of the turns of the heater 90. Then, an insulating layer 70 is wrapped around the exposed first surface 50 of the thermally conductive sheet 20.

[0055] As the temperature of heater 90 changes, the high thermal conductivity and low thermal mass of thermally conductive sheet 20 together with the insulating effect of insulating layer 70 allow the temperature change to be quickly transmitted through thermally conductive sheet 20 to temperature sensor 30, and the temperature is then indicated by a signal through wire 40.

[0056] Although illustrative embodiments of the present invention have been disclosed herein in detail with reference to the accompanying drawings, it should be understood that the invention is not limited to the precise embodiments described and that various changes and modifications may be implemented herein by those skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

[0057] Reference numerals

[0058] Temperature sensor assembly 10

[0059] Thermal conductive sheet 20

[0060] Temperature sensor 30

[0061] Wire 40

[0062] First surface 50

[0063] Second surface 60

[0064] Insulation layer 70

[0065] Vacuum device 80

[0066] Heater 90

Claims

1. A method for measuring the temperature of a vacuum device, comprising: Adapting a sheet-like substrate that is a planar sheet and is flexible to an outer surface of a vacuum device whose temperature is to be determined, the vacuum device having heater elements, the sheet-like substrate having a width greater than a distance between the heater elements and having a length to provide a plurality of turns around the vacuum device; as well as A temperature sensor is thermally coupled to the sheet substrate to provide a thermal path from the vacuum device to the temperature sensor by interposing the sheet substrate between the temperature sensor and the vacuum device.

2. A vacuum device temperature sensor assembly, comprising: a vacuum device whose temperature is to be determined, the vacuum device having a heater element; a sheet-like substrate that is a planar sheet and is flexible to conform to an outer surface of the vacuum apparatus, wherein the width of the sheet-like substrate is greater than the distance between the heater elements, and wherein the sheet-like substrate has a length to provide a plurality of turns around the vacuum apparatus; and A temperature sensor is thermally coupled to the sheet substrate, wherein the sheet substrate is configured to provide a thermal path from the vacuum apparatus to the temperature sensor, and wherein the sheet substrate is interposed between the temperature sensor and the vacuum apparatus.

3. The vacuum apparatus temperature sensor assembly of claim 2, comprising an outer insulating layer covering the sheet substrate and the temperature sensor, the sheet substrate being configured to provide greater thermal conductivity across the sheet substrate than between the plurality of windings.

4. The vacuum device temperature sensor assembly according to claim 2 or 3, wherein: The sheet substrate has a thermal conductivity selected to reduce temperature variations across a surface of the sheet substrate as compared to temperature variations across a surface of the vacuum apparatus.

5. The vacuum device temperature sensor assembly according to claim 2 or 3, wherein: The thermal mass of the sheet-like substrate is selected to be lower than the thermal mass of the vacuum device.

6. The vacuum device temperature sensor assembly according to claim 2 or 3, wherein: The temperature sensor covers the sheet-like substrate.

7. The vacuum device temperature sensor assembly according to claim 2 or 3, wherein: The thermal conductivity of the sheet-like substrate is selected to be greater than the thermal conductivity of the vacuum device.

Images