Alignment device for spatial alignment of split equipment

Abstract

The present invention discloses an alignment device for spatial alignment of split-type equipment, belonging to the technical field of split-type equipment alignment devices. It comprises a laser and a third position detector mounted on a first split, and a reflector mounted on a second split, as well as a first beam splitter, a second beam splitter, a first position detector, and a second position detector mounted on the second split. A laser, two beam splitters, and three position detectors are mounted on the split equipment. This solution can measure the offset of two translational degrees of freedom in the x and y axes, as well as three rotational degrees of freedom (θx, θy, and θz) with the x, y, and z axes as rotation axes, providing offset data for the ultimate realization of five-dimensional spatial alignment.

Description

Technical Field

[0001] The invention relates to an alignment device for spatial alignment of split-type equipment, belonging to the technical field of split-type equipment alignment devices. Background Art

[0002] Split-type equipment refers to a complete set of equipment consisting of multiple separate parts. As the entire unit moves through space, the different parts must maintain constant relative distances and angles in certain directions and angles. The device used to detect whether the relative distances and angles between the parts remain constant is generally called an alignment device.

[0003] In a three-dimensional rectangular coordinate system, the spatial position relationship between the two bodies includes not only the three translational degrees of freedom along the x, y, and z axes, but also the three rotational degrees of freedom with the x, y, and z axes as the rotation axes and the rotation angles represented by θx, θy, and θz.

[0004] For example, two split devices maintain their relative positions in the x- and y-axis directions, and there is no change in the three relative rotation angles θx, θy, and θz. Only relative translation occurs in the z-axis direction. That is, except for the z-axis direction, there is no relative change in the other five dimensions. This is called five-dimensional spatial alignment.

[0005] In another application scenario, the two split devices always maintain their relative positions in the x, y, and z axes in the relative coordinate system during spatial movement, and the three relative rotation angles θx, θy, and θz do not change. That is, all six degrees of freedom do not change, which is called six-dimensional spatial alignment.

[0006] Currently, spatial alignment of split-type equipment is achieved by improving the control accuracy of motion devices (such as manipulators and six-axis translation stages) to ensure that the relative positions and angles between different moving parts do not change. This places high demands on the repeatability of the motion devices, which in turn drives up the cost of the entire device.

[0007] Therefore, an alignment device for spatial alignment of split-type equipment is provided. The alignment device is used to detect the alignment status of each dimension, and the motion device adjusts the position of each split according to the feedback detection results. This process has low requirements for the repeatability accuracy of the motion device and there is no repetitive cumulative error. Summary of the Invention

[0008] The technical problem to be solved by the present invention is to provide an alignment device for spatial alignment of split equipment, which solves the problem that there is currently a lack of an alignment device that can accurately detect multi-degree-of-freedom deviation when performing spatial alignment of split equipment.

[0009] The technical problem to be solved by the present invention is achieved by adopting the following technical solutions:

[0010] The first option:

[0011] An alignment device for spatial alignment of split-type equipment, comprising a laser and a third position detector mounted on a first split body, and a reflector mounted on a second split body;

[0012] It also includes a first optical splitter, a second optical splitter, a first position detector, and a second position detector installed on the second split body;

[0013] When the first split body and the second split body complete spatial alignment and are relatively stationary, the laser emitted by the laser is reflected by the reflector and then vertically illuminated on the coordinate origin of the third position detector. The optical path between the laser and the third position detector is called the original light beam. The first beam splitter splits the original light beam into a first beam perpendicular to the original light beam. The second beam splitter splits the original light beam or the first beam into a second beam perpendicular to the corresponding original light beam or the first beam. The first beam and the second beam are respectively vertically illuminated on the coordinate origins of the corresponding first position detector and the second position detector. There is an optical path difference between the first position detector, the second position detector and the laser.

[0014] Principle of spatial counterpoint:

[0015] In a three-dimensional rectangular coordinate system, the spatial position relationship between the two bodies includes not only the three translational degrees of freedom along the x, y, and z axes, but also the three rotational degrees of freedom with the x, y, and z axes as the rotation axes and the rotation angles represented by θx, θy, and θz.

[0016] The first body moves in translation along the z-axis with respect to the second body, while the other dimensions x, y, θx, θy, and θz remain unchanged. When the body is spatially aligned and relatively stationary, the laser emitted by the laser emits light along the z-axis from the first body to the second body.

[0017] The laser beam emitted by the laser passes through a reflector, a first beam splitter, and a second beam splitter. Each split beam enters a first position detector, a second position detector, and a third position detector, respectively. These detectors are used to detect the position of the incident light spot. These detectors are position-sensitive detectors or four-quadrant detectors.

[0018] According to the principle that light propagates in a straight line in the same homogeneous medium:

[0019] a. When the first split body and the laser undergo translation (Δx, Δy) on the plane perpendicular to the z-axis (xoy plane), and rotation (Δθx, Δθy) on the other two axes perpendicular to the z-axis (x-axis, y-axis), the light spot positions on the light-receiving surfaces of the first and second position detectors will change, respectively.

[0020] b. When the first split body and the laser rotate in the z-axis direction (Δθz), the position of the light spot on the optical surface of the detector at the third position will change.

[0021] The following is a further description of the spatial alignment steps:

[0022] Five-dimensional spatial counterpoint:

[0023] The first body and the second body undergo relative translational motion along the z-axis, while other dimensions x, y, θx, θy, and θz remain unchanged.

[0024] Spatial alignment steps:

[0025] (1) First, based on the light spot offset coordinates (△x1, △y1) and (△x2, △y2) measured by the first position detector and the second position detector, as well as the optical path difference between the first position detector and the second position detector, the rotation angle (△θx, △θy) of the first split body with the x-axis and y-axis as the rotation axis is accurately calculated, and then the rotation angle is adjusted back to the original relative angle by the motion device (manipulator), that is, △θx and △θy are reset to zero;

[0026] (2) Then, when △θx and △θy return to zero, the light spot offset coordinates (△x2, △y2) measured by the second position detector are adjusted back to their original relative positions in the x and y directions through the motion device (manipulator), that is, △x2 and △y2 are returned to zero;

[0027] (3) Finally, the light spot offset coordinates (△x3, △y3) provided by the third position detector are used to calculate the rotation angle △θz with the z-axis as the rotation axis, and the z-axis rotation angle is corrected to zero through the motion device (manipulator).

[0028] The second preferred option:

[0029] A convex lens is provided between the first spectrometer and the first position detector. When the spatial alignment is completed, the focus of the convex lens falls on the coordinate origin of the first position detector.

[0030] This solution differs from the previous one only in that there is a convex lens. In the spatial alignment step (1):

[0031] The first split beam does not directly hit the light-receiving surface of the first position detector, but is converged on the light-receiving surface in the focal plane through a convex lens. At this time, the coordinates of the light spot are only related to the laser incident angle (△θx, △θy). According to the light spot offset coordinates (△x1, △y1) obtained on the first position detector side, the rotation angle (△θx, △θy) of the first split body with the x-axis and y-axis as the rotation axis can be calculated, and then the rotation angle is adjusted back to the original relative angle through the motion device (manipulator), that is, △θx and △θy are reset to zero. The other steps are the same as the above solution.

[0032] Both of the above solutions can realize five-dimensional spatial alignment measurement.

[0033] A third preferred solution is that, based on the first solution or the second solution, the first split body or the second split body is provided with a rangefinder for measuring the relative movement distance between the two.

[0034] This solution can use a rangefinder to measure the offset Δz of the first split relative to the second split in the z-axis direction, thus achieving five-dimensional spatial alignment measurement.

[0035] As a preferred example, the reflector is a right-angle reflector composed of two or three mutually perpendicular plane reflectors, or a corner cube prism that reflects the incident light at 180°.

[0036] The multiple plane mirrors contained in the right-angle reflector are arranged separately, and the optical components can be arranged more flexibly.

[0037] Corner cube prisms, also known as retroreflective mirrors, have three mutually perpendicular reflective surfaces. Corner cube prisms are solid prisms made of transparent materials. They use the principle of total internal reflection of light on the reflective surface. Regardless of the incident angle, the reflected light is always parallel to the incident light, and the reflection angle is always maintained at 180°.

[0038] The beneficial effects of the present invention are:

[0039] (1) A laser, two beam splitters, and three position detectors are installed on the split device. This solution can measure the offset of the two translational degrees of freedom in the x and y axes, as well as the three rotational degrees of freedom θx, θy, and θz with the x, y, and z axes as the rotation axes, providing offset data for the ultimate realization of five-dimensional spatial alignment.

[0040] (2) Setting a rangefinder in the z-axis direction of the split device can add z-axis offset measurement on the basis of five-dimensional spatial alignment, providing comprehensive offset data for the ultimate realization of six-dimensional spatial alignment. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1This is a schematic diagram of the structure of Example 1 when the spatial five-dimensional alignment is completed;

[0042] Figure 2 This is a schematic diagram of the structure of Example 1 when the two-space five-dimensional alignment is completed;

[0043] Figure 3 This is a schematic structural diagram of the first sub-body of Structure 1 of Example 1, in which the first sub-body is deflected Δθy relative to the second sub-body;

[0044] Figure 4 Schematic diagram of the structure in which the light path is deflected by Δθy after the light path is expanded in Structure 1 of Example 1;

[0045] Figure 5 This is a schematic structural diagram of the first sub-body of Structure 1 of Example 1, in which the first sub-body is deflected Δθx relative to the second sub-body;

[0046] Figure 6 Schematic diagram of the structure in which the light path is expanded and deflected by Δθx in Structure 1 of Example 1;

[0047] Figure 7 This is a schematic structural diagram of the first sub-body of Structure 1 of Example 1, in which the first sub-body is translated Δx relative to the second sub-body;

[0048] Figure 8 This is a schematic diagram of the structure of Example 1, in which the first sub-body is deflected Δθz relative to the second sub-body;

[0049] Figure 9 Schematic diagram of the structure of the first split body deflection Δθz observed from the z-axis direction in Structure 1 of Example 1;

[0050] Figure 10 This is a schematic diagram of the structure of Example 2 when the three-space five-dimensional alignment is completed;

[0051] Figure 11 This is a schematic diagram of the structure of Example 2 when the four-space five-dimensional alignment is completed;

[0052] Figure 12 This is a schematic structural diagram of the first sub-body of Structure 3 in Example 2, which is deflected by Δθy relative to the second sub-body;

[0053] Figure 13 This is a schematic diagram of the optical path structure of the three convex lenses in Example 2;

[0054] Figure 14 This is a schematic diagram of the structure of Example 2 when the five-dimensional alignment of the structure is completed;

[0055] Figure 15 This is a schematic diagram of the optical path structure of the five convex lenses in Example 2;

[0056] Figure 16This is a schematic diagram of the optical path structure at the convex lens after △x and △y are reset to zero in Structure 5 of Example 2;

[0057] Figure 17 Schematic diagram of optical path calculation at the convex lens after △x and △y are reset to zero in Structure 5 of Example 2;

[0058] Figure 18 This is a schematic diagram of the structure including the rangefinder in Structure 6 of Example 3;

[0059] Figure 19 The figure is a schematic diagram of the structure of a right-angle reflector composed of three mutually perpendicular plane reflectors;

[0060] Figure 20 Schematic diagram of the structure of a corner cube prism.

[0061] In the figure: 1. First split body; 2. Second split body; 3. Laser; 4. First position detector; 5. Second position detector; 6. Third position detector; 7. Reflector; 701. Plane reflector; 8. First beam splitter; 9. Second beam splitter; 10. Rangefinder; 11. Convex lens; 12. Right-angle reflector; 13. Corner cube prism. DETAILED DESCRIPTION

[0062] In order to make the technical means, creative features, objectives and effects of the present invention easier to understand, the present invention is further described below in conjunction with specific embodiments.

[0063] Example 1

[0064] like Figure 1 、 Figure 2 As shown, the horizontal direction is the x-axis, the vertical direction is the z-axis, and the direction perpendicular to the xoz plane is the y-axis. The spatial alignment device includes a laser 3 and a third position detector 6 installed on the first split body 1, and a reflector 7, a first beam splitter 8, a second beam splitter 9, a first position detector 4, and a second position detector 5 installed on the second split body 2;

[0065] The first position detector 4 , the second position detector 5 , and the third position detector 6 are commercially available position sensitive detectors or four-quadrant detectors.

[0066] A position sensitive detector (PSD) is a light detecting element that detects the position of the center of gravity (light spot) of a point-shaped light beam on a light-receiving surface and is often used in combination with a light source (laser). A convex lens 11 is usually placed in front of the PSD to obtain a light spot on the light-receiving surface, thereby measuring the light spot position. Alternatively, the convex lens 11 can be omitted. Without the convex lens 11, the light spot position is measured, while with the convex lens 11, the light angle is measured. A PSD is a photoelectric device that operates based on the inhomogeneous semiconductor lateral photoelectric effect and is sensitive to the position of incident light. The size of the detected signal is independent of the distribution of the incident light spot and is only related to the position of the energy center of gravity (light spot) of the incident light.

[0067] The four-quadrant detector consists of four independent photodiodes with identical performance. These four photodiodes are placed near the focal plane, symmetrically about the axis of the optical system. As the light spot moves across the four-quadrant detector, the light-receiving area of ​​each quadrant changes, causing the current intensity generated in each quadrant to vary. This current change in each quadrant is processed through current-to-voltage conversion and analog-to-digital (A / D) conversion, and then the data is processed to calculate the displacement of the center of the light spot relative to the center of the four-quadrant detector.

[0068] In addition to the above two position detectors, other commercially available position detectors that can be used to measure the position of the light spot can also be used.

[0069] Structure 1: Figure 1 As shown, when the first split body 1 and the second split body 2 complete spatial alignment and are relatively stationary, the laser emitted by the laser 3 is reflected by the reflector 7 and vertically irradiated on the coordinate origin of the third position detector 6. The optical path between the laser 3 and the third position detector 6 is called the original light beam. The first beam splitter 8 splits the original light beam into a first sub-beam perpendicular to the original light beam, and the second beam splitter 9 splits the original light beam into a second sub-beam perpendicular to the corresponding original light beam. The first sub-beam and the second sub-beam are respectively vertically irradiated on the coordinate origins of the corresponding first position detector 4 and the second position detector 5. There is an optical path difference between the first position detector 4, the second position detector 5 and the laser 3.

[0070] Structure 2: Figure 2As shown, when the first split body 1 and the second split body 2 complete spatial alignment and are relatively stationary, the laser light emitted by the laser 3 is reflected by the reflector 7 and perpendicularly illuminates the coordinate origin of the third position detector 6. The optical path between the laser 3 and the third position detector 6 is called the original beam. The first beam splitter 8 splits the original beam into a first sub-beam perpendicular to the original beam. The second beam splitter 9 splits the first sub-beam into a second sub-beam perpendicular to the corresponding first sub-beam. The first and second sub-beams respectively perpendicularly illuminate the coordinate origins of the corresponding first and second position detectors 4 and 5. There is an optical path difference between the first and second position detectors 4 and 5 and the laser 3. The dotted box in the figure is the projection of the second position detector 5 on the optical path of the first sub-beam.

[0071] Optical path difference: S1 is the optical path between the emission point of the laser 3 and the light-receiving surface of the first position detector 4. S2 is the optical path between the emission point of the laser 3 and the light-receiving surface of the second position detector 5. In the following cases, S2>S1 is used. S2-S1 is the optical path difference between the first position detector 4 and the second position detector 5. The existence of an optical path difference between the first position detector 4, the second position detector 5 and the laser 3 indicates that S2-S1 is not equal to 0.

[0072] Application scenario 1: Five-dimensional spatial alignment

[0073] During normal operation, the first split body 1 and the second split body 2 only undergo relative translational motion along the z-axis, and other dimensions x, y, θx, θy, and θz cannot change.

[0074] Assuming the initial state before alignment, the deviations in each dimension (x, y, θx, θy, θz) of the five-dimensional spatial alignment are: △x, △y, △θx, △θy, △θz.

[0075] The steps of the five-dimensional alignment of structure 1 (the steps of structure 2 are basically the same as those of structure 1):

[0076] (1) First, Figure 3-Figure 6 As shown, (△θx, △θy) returns to zero:

[0077] According to the light spot offset coordinates (△x1, △y1) and (△x2, △y2) measured by the light receiving surfaces of the first position detector 4 and the second position detector 5, as well as the optical path difference between the first position detector 4 and the second position detector 5 (the position detector closer to the optical path of the laser 3 is called the first position detector 4), the rotation angle (△θx, △θy) of the first split 1 with the x-axis and y-axis as the rotation axis is accurately calculated, and then the rotation angle is adjusted back to the original relative angle through the motion device (manipulator) (the adjustment of the motion device in this article is based on the light-emitting point of the laser 3, the base point is used as the rotation center during rotation, and the base point is used as the translation starting point during translation), that is, △θx and △θy are reset to zero.

[0078] like Figure 4 、 Figure 6 As shown, after the folded optical path is straightened, the translation (△x, △y) of the first segment 1 relative to the second segment 2 in the x and y directions will not affect the calculation of the rotation angle (△θx, △θy). The calculation formula is as follows:

[0079] △θx=arctan((△y2-△y1) / (S2-S1))

[0080] △θy=arctan((△x2-△x1) / (S2-S1))

[0081] Among them, S1 is the optical path between the emission point of the laser 3 and the light-receiving surface of the first position detector 4, S2 is the optical path between the emission point of the laser 3 and the light-receiving surface of the second position detector 5, and S2-S1 is the optical path difference between the first position detector 4 and the second position detector 5. This optical path difference is a fixed value and does not change with the change of S1 and S2.

[0082] (2) Then, if Figure 4 、 Figure 6 、 Figure 7 As shown, (△x, △y) returns to zero:

[0083] When △θx and △θy return to zero, the light spot offset coordinates (△x2 and △y2) measured by the second position detector 5 are adjusted back to their original relative positions in the x and y directions through the motion device (manipulator), that is, △x and △y are returned to zero;

[0084] The specific calculation process, such as Figure 7 As shown, taking the translation in the △x direction as an example, displacements △x1 and △x2 of the same distance will appear on the light-receiving surfaces of the first position detector 4 and the second position detector 5, that is, △x=△x1=△x2.

[0085] like Figure 4 、 Figure 6 As shown in the figure, when △θx and △θy return to zero, the new offset coordinates of the light spot measured by the light receiving surfaces of the first position detector 4 and the second position detector 5 are (△x1, △y1) and (△x2, △y2). Then, the translation of the first split body 1 relative to the second split body 2 in the x and y directions is (△x, △y):

[0086] △x=△x1=△x2

[0087] △y=△y1=△y2

[0088] (3) Finally, Figure 8 、 Figure 9 As shown, △θz returns to zero

[0089] The light spot offset coordinates (△x3, △y3) provided by the third position detector 6 are used to calculate the rotation angle △θz with the z-axis as the rotation axis, and the z-axis rotation angle is corrected to zero through the motion device (manipulator).

[0090] like Figure 8 、 Figure 9 As shown, the calculation formula is as follows:

[0091] △θz=arcsin(△y3 / S3)

[0092] Wherein, S3 is the optical distance between the emission point of the laser 3 and the coordinate origin of the light receiving surface of the third position detector 6.

[0093] Example 2

[0094] Based on the existing structure of Example 1, a convex lens 11 is added. By utilizing the focal plane properties of convex lens 11, the effects of light translation are eliminated, and only the light deflection angle is considered. This allows for relatively accurate zeroing of Δθx and Δθy. In this calculation, a thin lens is used, meaning that the focal length f is much greater than the lens thickness, so the lens thickness can be ignored in the calculation.

[0095] Structure three, such as Figure 10 As shown, the second beam splitter 9 splits the original light beam into a second beam perpendicular to the corresponding original light beam, and a convex lens 11 is provided between the first beam splitter 8 and the first position detector 4. When the spatial alignment is completed, the focus of the convex lens 11 falls on the coordinate origin of the first position detector 4.

[0096] Structure 4, such as Figure 11 As shown, the second beam splitter 9 splits the first beam into a second beam perpendicular to the corresponding first beam, and a convex lens 11 is provided between the first beam splitter 8 and the first position detector 4. When the spatial alignment is completed, the focus of the convex lens 11 falls on the coordinate origin of the first position detector 4, and the second beam splitter 9 is located between the first beam splitter 8 and the convex lens 11.

[0097] The above two structures ( Figure 10 、 Figure 11 ) After the folded optical path is unfolded, the alignment steps are the same. Figure 10 For example, this solution is different from the previous embodiment 1 only in that there is a convex lens 11 .

[0098] In the spatial five-dimensional alignment step (1): Figure 12 、 Figure 13As shown, the first split light beam does not directly hit the light receiving surface of the first position detector 4, but is converged on the light receiving surface in the focal plane through the convex lens 11. At this time, the coordinates of the light spot are only related to the laser incident angle (△θx, △θy). According to the light spot offset coordinates (△x1, △y1) obtained on the side of the first position detector 4, the rotation angle (△θx, △θy) of the first split body 1 with the x-axis and y-axis as the rotation axis can be calculated, and then the rotation angle is adjusted back to the original relative angle through the motion device (manipulator), that is, △θx and △θy are reset to zero.

[0099] like Figure 13 As shown, the calculation process is as follows (the calculation principles of △θx and △θy are the same, △θy is used as an example):

[0100] △θy=arctan(△x1 / f)

[0101] △θx=arctan(△y1 / f)

[0102] Here, f is one times the focal length of the convex lens 11 .

[0103] The subsequent steps are the same as steps (2) and (3) of Example 1.

[0104] Structure 5, such as Figure 14-17 As shown, the second beam splitter 9 splits the first beam into a second beam that is perpendicular to the corresponding first beam. A convex lens 11 is provided between the first beam splitter 8 and the first position detector 4. When the spatial alignment is completed, the focus of the convex lens 11 falls on the coordinate origin of the first position detector 4. The convex lens 11 is located between the first beam splitter 8 and the second beam splitter 9.

[0105] like Figure 14 、 15 As shown, steps (1) and (3) of structure 5 are the same as steps (1) and (3) of structures 3 and 4. The difference is that (△x, △y) are reset to zero in step (2). The calculation process of the differences is described in detail below:

[0106] In step (2) of structure 5, (△x, △y) is reset to zero:

[0107] like Figure 16 、 Figure 17 As shown, after returning △θx and △θy to zero, the light spot offset coordinates (0, 0) measured by the light receiving surface of the first position detector 4 and the light spot offset coordinates (△x2, △y2) measured by the light receiving surface of the second position detector 5 are used. Unfold the folded light path and according to the similar triangle theorem:

[0108] △x=△x2*f / (S1-S2)

[0109] Among them, f is the focal length of the convex lens 11, S1 is the optical path between the emission point of the laser 3 and the light-receiving surface of the first position detector 4, S2 is the optical path between the emission point of the laser 3 and the light-receiving surface of the second position detector 5, and S1 - S2 is the optical path difference between the first position detector 4 and the second position detector 5. This optical path difference is a definite value and does not change with the changes of S1 and S2 (in this case, S1 > S2. Similarly, when S1 < S2, △x can also be calculated through the similarity triangle theorem).

[0110] Adjust the x and y directions back to their original relative positions through the motion device (manipulator), that is, set △x and △y to zero.

[0111] Both of the above-mentioned Embodiment 1 and Embodiment 2 can achieve the alignment measurement of five-dimensional spatial alignment.

[0112] Embodiment 3

[0113] Structure Six, as Figure 18 shown, based on Embodiment 1 or Embodiment 2, a rangefinder 10 for measuring the relative movement distance between the two is provided on the first split body 1 or the second split body 2, and the rangefinder 10 can adopt a laser rangefinder.

[0114] Six-dimensional spatial alignment:

[0115] After completing the five-dimensional spatial alignment through the solution of Embodiment 1 or 2, this solution can measure the offset △z of the first split body 1 relative to the second split body 2 in the z-axis direction through the rangefinder 10, and set △z to zero through the motion device (manipulator). Realize the alignment measurement of six-dimensional spatial alignment.

[0116] Embodiment 4

[0117] As Figure 1 、 Figure 19 、 Figure 20 shown, in the above-mentioned embodiments, the reflector 7 adopts a right-angle reflector 12 composed of two or three mutually perpendicular plane reflectors 701, or adopts a corner cube prism 13 that reflects the incident light by 180°.

[0118] As Figure 19 shown, the multiple plane reflectors 701 (3 plane reflectors 701 are adopted in the figure) included in the right-angle reflector 12 can be of an integral type ( Figure 14 ), or can be arranged in a split type ( Figure 1 ). When arranged in a split type ( Figure 1 ), each optical component can be arranged more flexibly.

[0119] As Figure 20As shown, the corner cube prism 13, also known as a retroreflector, has three mutually perpendicular reflective surfaces. The corner cube prism 13 is a solid prism made of a transparent material. It uses the principle of total internal reflection of light on the reflective surface. Regardless of the incident angle, the reflected light is always parallel to the incident light, and the reflection angle is always maintained at 180°. The compact structure helps to reduce the size of the entire device.

[0120] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art will appreciate that the present invention is not limited to the foregoing embodiments and that various modifications and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such modifications and improvements are intended to fall within the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An alignment device for spatial alignment of split-type equipment, comprising a laser and a third position detector mounted on a first split body, and a reflector mounted on a second split body, characterized in that: It also includes a first optical splitter, a second optical splitter, a first position detector, and a second position detector installed on the second split body; When the first split body and the second split body complete spatial alignment and are relatively stationary, the laser emitted by the laser is reflected by the reflector and then vertically illuminated on the coordinate origin of the third position detector. The optical path between the laser and the third position detector is called the original light beam. The first beam splitter splits the original light beam into a first beam perpendicular to the original light beam. The second beam splitter splits the original light beam or the first beam into a second beam perpendicular to the corresponding original light beam or the first beam. The first beam and the second beam are respectively vertically illuminated on the coordinate origins of the corresponding first position detector and the second position detector. There is an optical path difference between the first position detector, the second position detector and the laser.

2. The alignment device for spatial alignment of split-type equipment according to claim 1, characterized in that: The first split body or the second split body is provided with a distance meter for measuring the relative movement distance between the two.

3. The alignment device for spatial alignment of split equipment according to claim 1, characterized in that: A convex lens is provided between the first spectrometer and the first position detector. When the spatial alignment is completed, the focus of the convex lens falls on the coordinate origin of the first position detector.

4. The alignment device for spatial alignment of split-type equipment according to claim 3, characterized in that: The first split body or the second split body is provided with a distance meter for measuring the relative movement distance between the two.

5. An alignment device for spatial alignment of split-type equipment according to any one of claims 1 to 4, characterized in that: The reflector is a right-angle reflector composed of two or three mutually perpendicular plane reflectors, or a corner cube prism that reflects the incident light at 180 degrees.

6. An alignment device for spatial alignment of split equipment according to any one of claims 1 to 4, characterized in that: The first position detector, the second position detector and the third position detector are position sensitive detectors or four-quadrant detectors.

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