Detection Device, Detection Method, Detection System and Storage Medium

Abstract

The present invention provides a detection device, comprising: a positioning module, the positioning module includes: a positioning light source assembly that generates a first positioning light beam and a second positioning light beam, and the wavelengths of the first positioning light beam and the second positioning light beam are different; an imaging assembly that forms a first positioning image according to the first positioning signal light and forms a second positioning image according to the second positioning signal light; a processing module that obtains first position information according to the first positioning image and obtains second position information according to the second positioning image; a detection module that detects a first target to be measured according to the first position information and detects a second target to be measured according to the second position information. The positioning module can image the target to be measured, obtain the position information of the target to be measured, and perform detection according to the position information, which can improve the detection accuracy. The different wavelengths of the first positioning light beam and the second positioning light beam can accurately position different targets to be measured.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor detection equipment, in particular to a detection equipment, a detection method, a detection system and a storage medium. Background Art

[0002] In the manufacturing process of semiconductor chips, it is necessary to detect the properties of certain targets to be measured on the surface of the wafer, such as film thickness, particle contamination, critical dimensions, defects, etc., to ensure product quality. In order to improve the detection speed, it is often necessary to locate the target to be measured before detection, obtain the position information of the target to be measured, so that the measurement optical path can locate the target to be measured according to the position information of the target to be measured.

[0003] The prior art often locates the target to be measured according to the design drawing of the semiconductor chip. However, the manufacturing error of the semiconductor chip will cause the position of the target to be measured to deviate, resulting in inaccurate measurement results. Summary of the Invention

[0004] To solve the above problems, the present invention proposes a detection equipment, which can improve the positioning accuracy of the measurement system for different targets to be measured, and further improve the detection accuracy.

[0005] The technical solution of the present invention provides a detection method, including: a positioning module, the positioning module includes: a positioning light source assembly, generating a first positioning light beam and a second positioning light beam, the wavelengths of the first positioning light beam and the second positioning light beam are different, the first positioning light beam forms a first positioning signal light after passing through the first target to be measured of the object to be measured, and the second positioning light beam forms a second positioning signal light after passing through the second target to be measured of the object to be measured; an imaging component, configured to form a first positioning image according to the first positioning signal light and form a second positioning image according to the second positioning signal light;

[0006] a processing module, obtaining the first position information of the first target to be measured according to the first positioning image, and obtaining the second position information of the second target to be measured according to the second positioning image;

[0007] a detection module, detecting the first target to be measured according to the first position information and detecting the second target to be measured according to the second position information.

[0008] Optionally, the imaging component includes: a first imaging unit, configured to detect the first positioning signal light and form a first positioning image according to the first positioning signal light; a second imaging unit, configured to detect the second positioning signal light and form a second positioning image according to the second positioning signal light.

[0009] Optionally, the first positioning signal light and the second positioning signal light emitted from the object to be measured propagate along the same path, and the detection device further includes a first beam splitter for splitting the first positioning signal light and the second positioning signal light, so that at least part of the first positioning signal light reaches the first imaging unit along a first path, and at least part of the second positioning signal light reaches the second imaging unit along a second path.

[0010] Optionally, the magnification factors of the first imaging unit and the second imaging unit are different; the first beam splitter is further configured to cause at least part of the first positioning signal light to reach the second imaging unit along the second path, and part of the second positioning signal light to reach the first imaging unit along the first path; the first imaging unit is further configured to detect the second positioning signal light; the second imaging unit is further configured to detect the first positioning signal light.

[0011] Optionally, the first imaging unit includes: a first tube lens and a first image collector, with a first distance between the first tube lens and the first image collector; the second imaging unit includes: a second tube lens and a second image collector, with a second distance between the second tube lens and the second image collector.

[0012] Optionally, the first imaging unit and the second imaging unit further include objective lenses for collecting the first positioning signal light and the second positioning signal light, and the first beam splitter is used for splitting the first positioning signal light and the second positioning signal collected by the objective lenses; the focal lengths of the first tube lens and the second tube lens are different; and / or, the first distance and the second distance are different.

[0013] Optionally, the first distance is the focal length of the first tube lens, and the second distance is the focal length of the second tube lens.

[0014] Optionally, the objective lens is further configured to receive the first positioning light beam to converge the first positioning light beam onto the object to be measured, and receive the second positioning light beam to converge the second positioning light beam onto the object to be measured.

[0015] Optionally, the first positioning light beam has a first wavelength, and the second positioning light beam has a second wavelength; the first imaging unit includes a first filter for filtering the first positioning signal to filter out the light of the second wavelength; the second filter is for filtering the second positioning signal to filter out the light of the first wavelength.

[0016] Optionally, the number of the first endoscopes is multiple, and the focal lengths of the multiple first endoscopes are different; the detection device further includes one or a combination of the following: a first switching component, a second switching component, and a third switching component; the first switching component includes: a first switcher for switching the first endoscopes so that different first endoscopes are in the optical path; a first driver for driving the first switcher or the first image sensor to move along the optical axis of the first positioning signal light;

[0017] The second switching component includes: a second switcher for switching the first endoscopes so that different first endoscopes are in the optical path; a second driver for driving the second switcher or the second image sensor to move along the optical axis of the second positioning signal light;

[0018] The third switching component includes: a third switcher for fixing the first endoscope and the second endoscope, and the third switcher is used to exchange the first endoscope and the second endoscope; a third driver for driving the first image sensor and the second image sensor to move along the optical axis.

[0019] Optionally, the detection device further includes: a beam combiner for combining the first positioning light beam and the second positioning light beam, and the combined first positioning light beam and second positioning light beam propagate along the same path to the object to be measured.

[0020] Optionally, it further includes: a second beam splitter for reflecting the first positioning light beam and the second positioning light beam combined by the beam combiner to reach the object to be measured, and transmitting the first positioning signal light and the second positioning signal light to the imaging component; or, transmitting the first positioning light beam and the second positioning light beam combined by the beam combiner to reach the object to be measured, and reflecting the first positioning signal light and the second positioning signal light to the imaging component.

[0021] Optionally, the detection module includes: a detection light source for emitting a detection light beam to the object to be measured, and the detection light beam forms a detection signal light after passing through the object to be measured; a detection component for receiving the detection signal light and detecting the object to be measured according to the detection signal light;

[0022] The detection device further includes: a third beam splitter for splitting the detection signal light from the first positioning signal light and splitting the detection signal light from the second positioning signal light;

[0023] A fourth beam splitter for reflecting the detection light beam to the object to be measured and transmitting the detection signal light to the detection component; or, for transmitting the detection light beam to the object to be measured and reflecting the detection signal light to the detection component.

[0024] Optionally, when the detection device further includes an objective lens, the objective lens is further configured to receive the detection light beam, converge the detection light beam onto the object to be measured, and collect the detected signal light, and the detection component is configured to detect the detected signal light collected by the objective lens.

[0025] Optionally, the detection light source is a broadband light source, and the detection component is a spectrometer; the first detection light beam has a first wavelength, and the second detection light beam has a second wavelength; the detection light beam includes at least light of the first wavelength and the second wavelength.

[0026] Optionally, the first object to be measured is located on the surface of the object to be measured, and the surface of the second object to be measured is covered with a thin film; the first positioning light beam is visible light, and the second positioning light beam is infrared light.

[0027] The technical solution of the present invention further provides a detection method for a detection device, the detection device is as described above, and the detection method includes: performing a first detection process on the object to be measured, and / or performing a second detection process on the object to be measured;

[0028] The steps of the first detection process include: generating a first positioning light beam through the positioning light source assembly, and the first positioning light beam forms a first positioning signal light after passing through the object to be measured; forming a first positioning image by the imaging assembly according to the first positioning signal light; obtaining first position information of the first object to be measured in the object to be measured according to the first positioning image; detecting the first object to be measured by the detection module according to the first position information;

[0029] The steps of the second detection process include: generating a second positioning light beam through the positioning light source assembly, and the second positioning light beam forms a second positioning signal light after passing through the object to be measured, and the wavelength of the second positioning light beam is different from that of the first positioning light beam; forming a second positioning image by the imaging assembly according to the second positioning signal light; obtaining second position information of the second object to be measured in the object to be measured according to the second positioning image; detecting the second object to be measured by the detection module according to the second position information.

[0030] Optionally, the imaging assembly includes: a first imaging unit configured to detect the first positioning signal light and form a first positioning image according to the first positioning signal light; a second imaging unit configured to detect the second positioning signal light and form a second positioning image according to the second positioning signal light; the magnification of the first imaging unit is greater than the magnification of the second imaging unit;

[0031] Forming a first positioning image by an imaging component according to the first positioning signal light includes: when the size of the target to be measured is less than or equal to a first preset size, detecting the first positioning signal light by the first imaging unit and forming a first positioning image according to the first positioning signal light of the first target to be measured; when the size of the target to be measured is greater than the first preset size, detecting the first positioning signal light by the second imaging unit and forming a first positioning image according to the first positioning signal light of the first target to be measured;

[0032] Forming a second positioning image by an imaging component according to the second positioning signal light includes: when the size of the target to be measured is less than or equal to a second preset size, detecting the second positioning signal light by the first imaging unit and forming a second positioning image according to the second positioning signal light of the second target to be measured; when the size of the second target to be measured is greater than the second preset size, detecting the second positioning signal light by the second imaging unit and forming a second positioning image according to the second positioning signal light of the second target to be measured.

[0033] Optionally, the detection device further includes a first beam splitter for splitting the first positioning signal light and the second positioning signal light, so that at least part of the first positioning signal light reaches the first imaging unit along a first path, and at least part of the first positioning signal light reaches the second imaging unit along a second path; at least part of the second positioning signal light reaches the first imaging unit along the second path, and at least part of the second positioning signal light reaches the second imaging unit along the first path;

[0034] Detecting the first positioning signal light by the first imaging unit is parallel to detecting the first positioning signal light by the second imaging unit; detecting the second positioning signal light by the first imaging unit is parallel to detecting the second positioning signal light by the second imaging unit.

[0035] Optionally, the first positioning light beam has a first wavelength, and the second positioning light beam has a second wavelength; the first imaging unit includes a first filter for filtering the first positioning signal to filter out the light of the second wavelength; a second filter for filtering the second positioning signal to filter out the light of the first wavelength; the detection method includes: the first detection process is parallel to the second detection process.

[0036] Optionally, there are more than two first targets to be measured. The step of detecting the first targets to be measured by the detection module according to the first position information includes: performing a first path planning on the detection order of the first targets to be measured according to the first position information to obtain a first detection path, where the first path planning makes the length of the first detection path less than a preset value or makes the first detection path the shortest; sequentially detecting the first targets to be measured by the detection module according to the first detection path; or,

[0037] There are more than two second targets to be measured. The step of detecting the second targets to be measured by the detection module according to the second position information includes: performing a second path planning on the detection order of the second targets to be measured according to the second position information to obtain a second detection path, where the second path planning makes the length of the second detection path less than a preset value or makes the second detection path the shortest; sequentially detecting the second targets to be measured by the detection module according to the second detection path; or,

[0038] The step of detecting the first targets to be measured by the detection module according to the first position information and detecting the second targets to be measured by the detection module according to the second position information includes: performing a third path planning on the detection order of the first targets to be measured and the second targets to be measured according to the first position information and the second position information to obtain a third detection path, where the third path planning makes the length of the third detection path less than a preset value or makes the third detection path the shortest; sequentially detecting the targets to be measured by the detection module according to the third detection path.

[0039] The technical solution provided by the present invention has the following advantages compared with the prior art:

[0040] In the detection device provided by the technical solution of the present invention, the wavelengths of the first positioning light beam and the second positioning light beam are different. Positioning lights with different wavelengths have different penetration abilities for different film layers, and thus can detect targets to be measured with different film layers or exposed ones, obtain the positioning images of the targets to be measured, and accurately obtain the position information of the targets to be measured according to the positioning images. Thereby, the detection module can perform positioning according to the position information of different targets to be measured, improve the positioning accuracy, and further can accurately obtain the parameters to be detected of the targets to be measured through the detection module.

[0041] Furthermore, the magnification factors of the first imaging unit and the second imaging unit are different. The first imaging unit is further configured to detect the second positioning signal light, and the second imaging unit is further configured to detect the first positioning signal light. Different magnification images of the target to be measured on different film layers can be obtained through the first imaging unit and the second imaging unit, so that high-magnification images of small targets to be measured with different film layers can be formed, and then precise positioning of the small targets to be measured can be performed. Moreover, images of large detection targets can be obtained through a large field of view, so as to detect different targets to be measured while ensuring the positioning accuracy and speed.

[0042] Furthermore, the magnification factors of the first imaging unit and the second imaging unit are different, and the first beam splitter is further configured to make at least part of the second positioning signal light reach the first imaging unit along the second path, and at least part of the second positioning signal light reach the second imaging unit along the first path. Then, the first positioning signal light can be simultaneously obtained through the first imaging unit and the second imaging unit, and different magnification images of the first target to be measured can be simultaneously formed through the first imaging unit and the second imaging unit. Similarly, the second positioning signal light can be simultaneously obtained through the first imaging unit and the second imaging unit, so as to simultaneously form different magnification images of the second target to be measured. Furthermore, the detection speed can be increased and the structure of the detection device can be simplified.

[0043] Furthermore, when the first light source and the second light source simultaneously emit the first positioning light and the second positioning light, and the first filter can filter, the first filter can filter out the light of the second wavelength, so that the influence of the light of the second wavelength on the first positioning signal light returned by the first target to be measured can be prevented. Similarly, the second filter can filter out the light of the first wavelength, and the influence of the light of the first wavelength on the second positioning signal light returned by the second target to be measured can be prevented. Furthermore, the first target to be measured and the second target to be measured can be detected simultaneously through the first positioning signal light and the second positioning signal light without affecting the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The present invention will be specifically described below with reference to the accompanying drawings and in combination with embodiments. The advantages and implementation manners of the present invention will become more obvious. Among them, the content shown in the drawings is only used to explain the present invention and does not constitute any limitation to the present invention. The drawings are only schematic and are not drawn strictly to scale. In the drawings:

[0045] Figure 1 is a schematic structural diagram of an embodiment of the detection device provided by the technical solution of the present invention;

[0046] Figure 2 is a schematic structural diagram of a second embodiment of the detection device provided by the technical solution of the present invention;

[0047] Figure 3 It is a schematic structural diagram of the third embodiment of the detection device provided by the technical solution of the present invention;

[0048] Figure 4 It is a schematic structural diagram of the fourth embodiment of the detection device provided by the technical solution of the present invention;

[0049] Figure 5 It is a schematic structural diagram of the fifth embodiment of the detection device provided by the technical solution of the present invention;

[0050] Figure 6 It is a schematic structural diagram of each step of an embodiment of the detection method of the detection device provided by the technical solution of the present invention. Detailed implementation manners

[0051] The detection device provided by the technical solution of the present invention can accurately locate different targets to be detected through the first positioning signal light and the second positioning signal light with different wavelengths, thereby improving the detection accuracy of the detection module.

[0052] In order to improve the positioning of the target to be detected in the detection device, in addition to the non-contact measurement optical path, an imaging optical path also needs to be equipped so that the device operator can find the measurement position of the pattern wafer, realize automatic alignment and measurement of the pattern wafer, or take pictures of the measurement points of non-pattern wafers, so as to obtain the position of the target to be detected according to the image of the object to be detected. However, the surface structure of the object to be detected is often very complex, and a single imaging optical path is difficult to meet the detection requirements.

[0053] The present invention realizes the penetration of different film layers through the first positioning signal light and the second positioning signal light with different wavelengths, so as to be able to locate different targets to be detected and improve the detection accuracy of the detection module.

[0054] The technical solution of the present invention provides a detection method and a positioning module. The positioning module includes: a positioning light source assembly that generates a first positioning light beam and a second positioning light beam. The wavelengths of the first positioning light beam and the second positioning light beam are different. The first positioning light beam forms a first positioning signal light after passing through a first measurement target of the object to be measured, and the second positioning light beam forms a second positioning signal light after passing through a second measurement target of the object to be measured; an imaging assembly that is used to form a first positioning image according to the first positioning signal light and form a second positioning image according to the second positioning signal light; a processing module that obtains first position information of the first measurement target according to the first positioning image and obtains second position information of the second measurement target according to the second positioning image; a detection module that detects the first measurement target according to the first position information and detects the second measurement target according to the second position information. The detection device includes a positioning module that can image the object to be measured, thereby obtaining the position information of the object to be measured. The detection module can perform detection according to the position information, which can improve the detection accuracy. In addition, the different wavelengths of the first positioning light beam and the second positioning light beam can accurately position different measurement targets.

[0055] Figure 1 FIG. 4 is a schematic structural diagram of an embodiment of a detection device for an object to be measured provided by the technical solution of the present invention.

[0056] Refer to Figure 1 , the technical solution of the present invention provides a detection device for an object to be measured, including:

[0057] A positioning module 1, the positioning module 1 includes: a positioning light source assembly that generates a first positioning light beam and a second positioning light beam. The wavelengths of the first positioning light beam and the second positioning light beam are different. The first positioning light beam forms a first positioning signal light after passing through a first measurement target of the object to be measured, and the second positioning light beam forms a second positioning signal light after passing through a second measurement target of the object to be measured; an imaging assembly that is used to form a first positioning image according to the first positioning signal light and form a second positioning image according to the second positioning signal light;

[0058] A processing module that obtains first position information of the first measurement target according to the first positioning image and obtains second position information of the second measurement target according to the second positioning image;

[0059] A detection module 2 that detects the first measurement target according to the first position information and detects the second measurement target according to the second position information.

[0060] The wavelengths of the first positioning light beam and the second positioning light beam are different. Positioning lights with different wavelengths have different penetration capabilities for different film layers, and thus can detect a target to be measured with different film layers or exposed parts, obtain a positioning image of the target to be measured, and accurately obtain the position information of the target to be measured based on the positioning image, so that the detection module can perform positioning according to the position information of different targets to be measured, improve the positioning accuracy, and further accurately obtain the parameters to be detected of the target to be measured through the detection module 2.

[0061] In this embodiment, the positioning light source assembly includes: a first light source 111 for generating a first positioning light beam; and a second light source 112 for generating a second positioning light beam.

[0062] The first positioning light beam has a first wavelength, and the second positioning light beam has a second wavelength.

[0063] In this embodiment, the first positioning light beam is a single-wavelength light beam, and the second positioning light beam is a single-wavelength light beam. In other embodiments, the first positioning light beam may be a broadband light beam, and the second positioning light beam is a broadband light beam.

[0064] Specifically, the first positioning light beam includes infrared light, and the second positioning light beam includes visible light.

[0065] Visible light is used to image a target to be measured whose surface is not covered by a film layer. The transmittance of the semiconductor film layer to visible light is low, and the reflectance is high. Imaging the exposed target to be measured with visible light can reduce the interference of the pattern at the bottom of the target to be measured on the image, improve the image contrast, and thus improve the positioning accuracy of the exposed target to be measured. The transmittance of the semiconductor film layer to infrared light is high, and infrared light can be used to image the target to be measured covered by the film layer, so as to position the target to be measured covered by the film layer.

[0066] In this embodiment, the first positioning light beam is perpendicularly incident on the surface of the object to be measured, and the second positioning light beam is perpendicularly incident on the surface of the object to be measured. That is, the incident angle of the first positioning light beam is zero, and the incident angle of the second positioning light beam is zero. The incident angle is the angle between the light beam incident on the surface of the object to be measured and the normal line of the surface of the object to be measured. In other embodiments, the incident angle of the first positioning light beam is an acute angle or the incident angle of the second positioning light beam is an acute angle.

[0067] In this embodiment, the center of the first light spot formed by the first positioning light beam on the surface of the object to be measured coincides with the center of the second light spot formed by the first positioning light beam on the surface of the object to be measured. The coincidence of the centers of the first light spot and the second light spot can shorten the scanning stroke and improve the positioning speed during the scanning of the surface of the object to be measured. In other embodiments, the first light spot and the second light spot are separated or partially coincident.

[0068] In this embodiment, the positioning light source assembly generates two positioning light beams, a first positioning light beam and a second positioning light beam. In other embodiments, the positioning light source assembly may generate three or more positioning light beams, and the wavelengths of the three or more positioning light beams are different.

[0069] The detection device further includes: a beam combiner 110, configured to combine the first positioning light beam and the second positioning light beam, and the combined first positioning light beam and second positioning light beam propagate along the same path to the object to be measured.

[0070] In this embodiment, the beam combiner 110 is a semi-transmissive and semi-reflective mirror. The beam combiner 110 transmits the first positioning light beam and reflects the second positioning light beam; or, the beam combiner 110 reflects the first positioning light beam and transmits the second positioning light beam.

[0071] In other embodiments, the beam combiner 110 may be a movable mirror, and the beam combiner 110 can enter and exit the optical path. When the beam combiner enters the optical path, it reflects the first positioning light beam to the same path, and when the beam combiner leaves the optical path, the second positioning light beam bypasses the beam combiner 110 and enters the same path. Or, when the beam combiner enters the optical path, it reflects the second positioning light beam to the same path, and when the beam combiner leaves the optical path, the first positioning light beam bypasses the beam combiner 110 and enters the same path.

[0072] In other embodiments, the first positioning light beam and the second positioning light beam are incident on the surface of the object to be measured along different paths. The incident angle of the first positioning light beam is different from the incident angle of the second positioning light beam. The incident angle of the first positioning light beam is zero, and the incident angle of the second positioning light beam is an acute angle; or, the incident angle of the second positioning light beam is zero, and the incident angle of the first positioning light beam is an acute angle; or, the incident angles of the first positioning light beam and the second positioning light beam are both acute angles, and the incident angles of the first positioning light beam and the second positioning light beam are different. The incident angle of the larger one of the first positioning light beam and the second positioning light beam is 50° to 85°, for example, 75°; the incident angle of the smaller one of the first positioning light beam and the second positioning light beam is 10° to 40°, for example, 15° or 30°.

[0073] The detection device further includes: a second beam splitter 130, configured to reflect the first positioning light beam and the second positioning light beam after being combined by the beam combiner 110 to reach the object to be measured, and transmit the first positioning signal light beam and the second positioning signal light beam to reach the imaging assembly; or, transmit the first positioning light beam and the second positioning light beam after being combined by the beam combiner 110 to reach the object to be measured, and reflect the first positioning signal light beam and the second positioning signal light beam to reach the imaging assembly.

[0074] The second beam splitter 130 is a semi-transmissive and semi-reflective mirror.

[0075] In this embodiment, the imaging assembly includes: a first imaging unit, configured to detect the first positioning signal light beam and form a first positioning image according to the first positioning signal light beam; a second imaging unit, configured to detect the second positioning signal light beam and form a second positioning image according to the second positioning signal light beam.

[0076] In other embodiments, the imaging assembly may include only one imaging unit, and the imaging unit is configured to detect the first positioning signal light beam and the second positioning signal light beam.

[0077] In this embodiment, the first positioning signal light beam is formed by the first positioning light beam being reflected by the object to be measured, and the second positioning signal light beam is formed by the second positioning light beam being reflected by the object to be measured. Both the first imaging unit and the second imaging unit perform bright-field imaging on the object to be measured.

[0078] In other embodiments, the first positioning signal light beam is formed by the first positioning light beam being scattered by the object to be measured, and / or the second signal light beam is formed by the second positioning light beam being scattered by the object to be measured. One or both of the first imaging unit and the second imaging unit perform dark-field imaging.

[0079] The first imaging unit and the second imaging unit further include an objective lens 150, and the objective lens is configured to collect the first positioning signal light beam and the second positioning signal light beam. In this embodiment, the objective lens 150 is further configured to converge the first positioning light beam and the second positioning light beam onto the surface of the object to be measured. The first positioning light beam and the second positioning light beam sharing the same objective lens 150 can simplify the device structure.

[0080] Specifically, in this embodiment, the first positioning signal light beam and the second positioning signal light beam emitted from the object to be measured propagate along the same path. The objective lens 150 is configured to collect the first positioning signal light beam and the second positioning signal light beam.

[0081] Since the first positioning signal light beam and the second positioning signal light beam emitted from the object to be measured propagate along the same path, the first positioning signal light beam and the second positioning signal light beam can be collected by the same objective lens 150. In other embodiments, the first positioning signal light beam and the second positioning signal light beam may be collected by different objective lenses.

[0082] The detection device further includes a first beam splitter 120 for splitting the first positioning signal light and the second positioning signal light, such that at least part of the first positioning signal light reaches the first imaging unit along a first path, and at least part of the second positioning signal light reaches the first imaging unit along a second path. The first beam splitter 120 is configured to split the first positioning signal light and the second positioning signal collected by the objective lens 150.

[0083] Specifically, in this embodiment, the exit angle of the first positioning signal light is zero degree, and the exit angle of the second positioning signal light is zero degree. The exit angle is the angle between the exit direction of the light beam from the surface of the object to be measured and the normal of the surface of the object to be measured.

[0084] In this embodiment, the magnification factors of the first imaging unit and the second imaging unit are different. The first imaging unit is further configured to detect the second positioning signal light; the second imaging unit is further configured to detect the first positioning signal light. In other embodiments, the magnification factors of the first imaging unit and the second imaging unit are the same.

[0085] Since the magnification factors of the first imaging unit and the second imaging unit are different, and the first imaging unit is further configured to detect the second positioning signal light, and the second imaging unit is further configured to detect the first positioning signal light, images of different magnification factors of the object to be measured covered with different film layers or the bare object to be measured can be obtained through the first imaging unit and the second imaging unit, so that high-magnification images of small objects to be measured with different film layers can be formed, and then the small objects to be measured can be accurately positioned; and images of large detection objects can be obtained through a large field of view, so as to detect different objects to be measured while ensuring the positioning accuracy and speed.

[0086] In this embodiment, the first beam splitter 120 is a semi-transmissive and semi-reflective mirror.

[0087] Since the magnification factors of the first imaging unit and the second imaging unit are different, and the first beam splitter 120 is a semi-transmissive and semi-reflective mirror, the first positioning signal light can be simultaneously obtained through the first imaging unit and the second imaging unit, so as to simultaneously form images of different magnification factors of the first object to be measured. Similarly, the second positioning signal light can be simultaneously obtained through the first imaging unit and the second imaging unit, so as to simultaneously form images of different magnification factors of the second object to be measured. Furthermore, the detection speed can be increased and the structure of the detection device can be simplified.

[0088] In other embodiments, the first beam splitter is a movable mirror for entering and exiting the optical path. When the first beam splitter enters the optical path, the light beam is reflected into the first imaging unit, and when the first beam splitter exits the optical path, the light beam enters the second imaging unit; or when the first beam splitter enters the optical path, the light beam is reflected into the second imaging unit, and when the first beam splitter exits the optical path, the light beam enters the first imaging unit.

[0089] The first imaging unit includes: a first tube lens 122 and a first image collector 121, with a first distance between the first tube lens 122 and the first image collector 121; the second imaging unit includes: a second tube lens 132 and a second image collector 131, with a second distance between the second tube lens 132 and the second image collector 131; the focal lengths of the first tube lens 122 and the second tube lens 132 are different, and / or the first distance and the second distance are different.

[0090] The first distance is the focal length of the first tube lens 122, and the second distance is the focal length of the second tube lens 132.

[0091] The first image collector 121 is located at the focal plane of the first tube lens 122, and the second image collector 131 is located at the focal plane of the second tube lens 132. When the target to be measured is located at the focal plane of the objective lens 150, the first tube lens 122 can make the first positioning signal light collected by the objective lens 150 form parallel light and converge to the first image collector 121; the second tube lens 132 can make the second positioning signal light collected by the objective lens 150 form parallel light and converge to the second image collector 131, so as to clearly image the target to be measured; the focal lengths of the first tube lens 122 and the second tube lens 132 are different, and the first positioning signal light and the second positioning signal light are collected by the same objective lens 150, which can ensure that the first imaging unit and the second imaging unit form images of different magnification ratios for the target to be measured.

[0092] The first image collector 121 and the second image collector 131 are CCD or CMOS image sensors.

[0093] In this embodiment, the first imaging unit further includes a first shutter 123, located in the optical path of the first positioning signal light after the first beam splitter 120, for controlling the opening and closing of the first positioning signal light; the second imaging unit further includes a second shutter 133, located in the optical path of the second positioning signal light after the first beam splitter 120, for controlling the opening and closing of the second positioning signal light.

[0094] In another embodiment, the first imaging unit further includes a first filter for filtering the first positioning signal to filter out light of the second wavelength; the second imaging unit further includes the second filter for filtering the second positioning signal to filter out light of the first wavelength.

[0095] When the first light source and the second light source simultaneously emit the first positioning light and the second positioning light, so that the first filter can filter, and the first filter can filter out the light of the second wavelength, the influence of the light of the second wavelength on the first positioning signal light returned by the first target to be measured can be prevented; similarly, the second filter can filter out the light of the first wavelength, and the influence of the light of the first wavelength on the second positioning signal light returned by the second target to be measured can be prevented. Furthermore, the first target to be measured and the second target to be measured can be detected simultaneously by the first positioning signal light and the second positioning signal light without affecting the detection accuracy.

[0096] The detection module 2 includes: a detection light source 141 for emitting a detection light beam to the object to be measured, and the detection light beam forms a detection signal light after passing through the object to be measured; a detection component 151 for receiving the detection signal light and detecting the object to be measured according to the detection signal light.

[0097] In this embodiment, the incident angle of the detection light beam is the same as the incident angle of the first positioning light beam and the same as the incident angle of the second positioning light beam. That is, the incident angle of the detection light beam is zero.

[0098] In other embodiments, the incident angles of the first positioning light beam or the second positioning light beam are different, and the incident angle of the detection light beam is the same as the incident angle of the first positioning light beam or the second positioning light beam; or, the incident angle of the detection light beam is different from the incident angles of both the first positioning light beam and the second positioning light beam.

[0099] The spot of the detection light beam and the spot of the first positioning light beam at least partially overlap, and the spot of the detection light beam and the spot of the second positioning light beam at least partially overlap. Specifically, the center of the spot of the detection light beam coincides with the spot of the first positioning light beam, and the spot of the detection light beam coincides with the spot of the second positioning light beam.

[0100] In this embodiment, the incident direction of the detection light beam and the exit direction of the detection signal light beam are symmetric about the normal of the object to be measured. Specifically, the detection signal light is formed by the detection light beam reflected by the object to be measured; the exit angle of the detection signal light is zero. In other embodiments, the detection signal light may be formed by the detection light beam scattered by the object to be measured, the exit angle of the detection signal light is not equal to the incident angle of the detection light beam, or the incident direction of the detection light beam and the exit direction of the detection signal light beam are not symmetric about the normal of the object to be measured.

[0101] The detection device further includes: a third beam splitter 153, configured to split the detection signal light from the first positioning signal light and split the detection signal light from the second positioning signal light.

[0102] Specifically, in this embodiment, the first positioning light and the second positioning light share the same optical path after passing through the beam combiner 110. The third beam splitter 153 is located in the common optical path of the first positioning light and the second positioning light. The third beam splitter 153 is further configured to reflect or transmit the first positioning light beam and the second positioning light beam, so that the first positioning light beam and the second positioning light beam are incident on the surface of the object to be measured. Specifically, the incident angles of the first positioning light and the second positioning light are zero, and the outgoing directions of the first positioning signal light and the second positioning signal light are also zero. The light beams of the first positioning signal light, the second positioning signal light, the first positioning light beam, and the second positioning light beam propagate along a common path between the second beam splitter 130 and the object to be measured, and the propagation directions are opposite. The third beam splitter 153 is located on the common path.

[0103] The third beam splitter 153 is a semi-transparent and semi-reflective mirror or a movable mirror.

[0104] The detection device further includes: a fourth beam splitter 140, configured to reflect the detection light beam to the object to be measured and transmit the detection signal light to the detection component 151; or configured to transmit the detection light beam to the object to be measured and reflect the detection signal light to the detection component 151. The fourth beam splitter 140 is a semi-transparent and semi-reflective mirror.

[0105] In this embodiment, the fourth beam splitter 140 is located on the common path and is further configured to reflect or transmit the first positioning light beam, the second positioning light beam, the first positioning signal light, and the second positioning signal light and then make them incident on the surface of the object to be measured.

[0106] In other embodiments, the fourth beam splitter 140 may not be located on the common path. That is, the positions of the third beam splitter and the fourth beam splitter can be interchanged.

[0107] In this embodiment, the objective lens 150 is further configured to receive the detection light beam, converge the detection light beam to the object to be measured, and collect the detection signal light. The detection component 151 detects the detection signal light collected by the objective lens 150.

[0108] If the incident direction and the outgoing direction of the detection module 2 are the same as those of the positioning module 1, the detection module 2 and the positioning module 1 can share the same objective lens 150, thereby simplifying the optical path structure. In other embodiments, the detection module and the positioning module may use different objective lenses.

[0109] The detection module 2 is a spectral reflectometer, and the detection module 2 is used to detect the thickness of the thin film on the surface of the object to be measured. The detection light source 141 is a broadband light source, and the detection component 151 is a spectrometer.

[0110] The detection light beam includes at least light of a first wavelength and a second wavelength.

[0111] The number of the first objects to be measured is multiple, and the number of the second objects to be measured is multiple.

[0112] Detecting the first object to be measured according to the first position information and detecting the second object to be measured according to the second position information includes: the detection module 2 plans paths for the first object to be measured and the second object to be measured according to the first position information and the second position information, and obtains a detection path; the detection module 2 sequentially detects the first object to be measured and the second object to be measured according to the detection path.

[0113] The first object to be measured is located on the surface of the object to be measured, and the surface of the second object to be measured is covered with a thin film; the first positioning light beam is visible light, and the second positioning light beam is infrared light.

[0114] Infrared light has strong penetration ability for the thin film, so that the second object to be measured can be imaged. The penetration ability of visible light is poor. By imaging the exposed first object to be measured with visible light, the influence of the background pattern at the bottom of the object to be measured on the formed image can be reduced.

[0115] The detection module 2 further includes a detection tube lens 152 for converging the detection signal light to the detection component 151, and the detection component 151 is located at the focal plane of the detection tube lens 152.

[0116] The processing system is further configured to perform a third path planning on the detection order of the first object to be measured and the second object to be measured according to the first position information and the second position information, obtain a third detection path, where the third path planning makes the length of the third detection path less than a preset value or makes the third detection path the shortest; control the detection module 2 to sequentially detect the objects to be measured according to the third detection path.

[0117] Figure 2 It is a schematic structural diagram of another embodiment of the detection device provided by the technical solution of the present invention.

[0118] Please refer to Figure 2 , the same parts of this embodiment and the Figure 1 shown embodiment will not be elaborated here, and the differences include:

[0119] The number of the first tube lenses 122 is multiple, and the focal lengths of the multiple first tube lenses 122 are different;

[0120] The detection device further includes one or a combination of two of a first switching component 222, a second switching component 232, and a third switching component;

[0121] The first switching component 222 includes: a first switcher for switching the first endoscope 122 so that different first endoscopes 122 are in the optical path; a first driver for driving the first switcher or the first image sensor 121 to move along the optical axis of the first positioning signal light;

[0122] The second switching component 232 includes: a second switcher for switching the first endoscope 122 so that different first endoscopes 122 are in the optical path; a second driver for driving the second switcher or the second image sensor 131 to move along the optical axis of the second positioning signal light;

[0123] The third switching component includes: a third switcher for fixing the first endoscope 122 and the second endoscope 132, and the third switcher is used to exchange the first endoscope 122 and the second endoscope 132; a third driver for driving the first image sensor and the second image sensor to move along the optical axis.

[0124] In other embodiments, the third driver can also be used to drive the third switcher to move along the optical axis of the first positioning signal light or the second positioning signal light.

[0125] It should be noted that in the above embodiments, different magnification factors of the imaging unit are achieved through endoscopes. Achieving different magnification factors of the imaging unit through endoscopes can reasonably arrange the space of optical elements.

[0126] In other embodiments, the number of objective lenses 150 is multiple, and the focal lengths of different objective lenses 150 are different. The detection device further includes an objective lens switching component for switching the objective lenses 150 so that different objective lenses 150 are in the optical path. Specifically, among the multiple objective lenses 150, there are a first objective lens 150 and a second objective lens 150, and the focal length of the second objective lens 150 is greater than that of the first objective lens 150.

[0127] Switching the objective lenses 150 through the objective lens switching component can enable the first imaging unit and the second imaging unit to respectively form images with different magnification factors, and can enable the detection unit to form detection signals with different signal-to-noise ratios for the target to be detected.

[0128] Specifically, when the size of the target to be measured is greater than the preset threshold, the objective lens 150 with a larger focal length is used to detect the target to be measured, thereby reducing the positioning difficulty and improving the detection speed. When the size of the target to be measured is less than the preset threshold, the objective lens 150 with a smaller focal length is used to detect the object to be measured, thereby being able to increase the magnification of the image, increase the signal-to-noise ratio, and improve the detection accuracy.

[0129] Figure 3 It is a schematic structural diagram of the third embodiment of the detection device provided by the technical solution of the present invention.

[0130] Please refer to Figure 3 This embodiment and Figure 1 The same parts of the illustrated embodiment will not be elaborated, and the differences include:

[0131] The exit angle of one or both of the first positioning signal light and the second positioning signal light is an acute angle. At least one of the first imaging unit and the second imaging unit performs dark-field imaging on the target to be measured.

[0132] Specifically, the second imaging unit is used to perform dark-field imaging on the target to be measured. The second positioning signal light does not pass through the objective lens 150. The second imaging unit includes: an imaging lens group 250 and the second image collector 200. The imaging lens group 250 is used to collect the second positioning signal light and image the second target to be measured onto the second image collector 200 according to the first positioning signal.

[0133] In this embodiment, the incident angles of the first positioning light beam and the second positioning light beam are zero, the exit angle of the first positioning signal light is zero, and the exit angle of the second positioning signal light is an acute angle.

[0134] In other embodiments, it is also possible to make the first imaging unit perform dark-field imaging on the target to be measured.

[0135] The magnification of the imaging lens group 250 is different from the magnification of the first imaging unit.

[0136] Different imaging methods have different sensitivities to different types of targets to be measured. For example, bright-field imaging is more sensitive to depressions, while dark-field imaging is more sensitive to protrusions. If one of the first imaging unit and the second imaging unit performs dark-field imaging on the target to be measured and the other performs bright-field imaging on the target to be measured, and the first imaging unit and the second imaging unit collect the positioning signal light of the same wavelength, then it is possible to perform bright-field and dark-field imaging on the target to be measured using the same wavelength, thereby being able to clearly image different types of targets to be measured.

[0137] The first positioning light beam includes visible light, and the second positioning light beam includes infrared light. Alternatively, the second positioning light beam includes visible light, and the first positioning light beam includes infrared light.

[0138] Figure 4 It is a schematic structural diagram of the fourth embodiment of the detection device provided by the technical solution of the present invention.

[0139] Please refer to Figure 4 , and the same parts of this embodiment and the Figure 1 illustrated embodiment will not be elaborated. The differences include:

[0140] The incident angle of one or both of the first positioning light beam and the second positioning light beam is an acute angle. The first imaging unit and the second imaging unit perform dark field imaging on the positioning light beam with an acute incident angle of light.

[0141] Specifically, in this embodiment, the incident angle of the second positioning light beam is an acute angle.

[0142] The light source assembly includes: a second light source 300 for generating the second positioning light; a converging assembly 350 for tilting the second positioning light to the surface of the object to be measured.

[0143] The first positioning light beam includes visible light, and the second positioning light beam includes infrared light. Alternatively, the second positioning light beam includes visible light, and the first positioning light beam includes infrared light.

[0144] Figure 5 It is a schematic structural diagram of the fifth embodiment of the detection device provided by the technical solution of the present invention.

[0145] Please refer to Figure 5 , and the same parts of this embodiment and the Figure 1 illustrated embodiment will not be elaborated here. The differences include:

[0146] The incident angle of one or both of the first positioning light beam and the second positioning light beam is an acute angle; the exit angle of one or both of the first positioning signal light beam and the second positioning signal light beam is an acute angle.

[0147] Specifically, the second light source 400 obliquely irradiates the second positioning light to the surface of the object to be measured through the converging assembly; the exit angle of the second positioning signal light beam is an acute angle. The second imaging unit includes: an imaging assembly 410 and a second image sensor 410.

[0148] The first positioning light beam includes visible light, and the second positioning light beam includes infrared light. Alternatively, the second positioning light beam includes visible light, and the first positioning light beam includes infrared light.

[0149] The incident direction of the second positioning light beam is symmetric with respect to the normal of the surface of the object to be measured to the outgoing direction of the second positioning signal light; or, the incident direction of the second positioning light beam is asymmetric with respect to the normal of the surface of the object to be measured to the outgoing direction of the second positioning signal light.

[0150] It should be noted that in the above embodiments, the detection device includes: two positioning light sources and two imaging units. In other embodiments, the detection device includes three or more positioning light sources, and / or three or more imaging units.

[0151] In other embodiments, the detection device may further include two or more detection modules 2, and the two or more detection modules 2 may share an objective lens 150, or have different objective lenses 150.

[0152] Figure 6 It is a flowchart of each step of an embodiment of the detection method provided by the technical solution of the present invention.

[0153] Please refer to Figure 6 , the detection method includes:

[0154] S1, perform a first detection process on the object to be measured, and / or perform a second detection process on the object to be measured;

[0155] S2, the steps of the first detection process include: generating a first positioning light beam through a positioning light source assembly, and after passing through the object to be measured, the first positioning light beam forms a first positioning signal light; forming a first positioning image through an imaging unit according to the first positioning signal light; obtaining first position information of a first object to be measured in the object to be measured according to the first positioning image; detecting the first object to be measured through a detection module according to the first position information;

[0156] S3, the steps of the second detection process include: generating a second positioning light beam through a positioning light source assembly, and after passing through the object to be measured, the second positioning light beam forms a second positioning signal light, and the wavelength of the second positioning light beam is different from that of the first positioning light beam; forming a second positioning image through an imaging assembly according to the second positioning signal light; obtaining second position information of a second object to be measured in the object to be measured according to the second positioning image; detecting the second object to be measured through a detection module according to the second position information.

[0157] In the first embodiment, the object to be measured only includes a first object to be measured, and the detection method includes: performing a first detection process on the object to be measured; there are more than two first objects to be measured, and the step of detecting the first object to be measured by the detection module 2 according to the first position information includes: performing path planning on the detection order of the first object to be measured according to the first position information to obtain a first detection path, where the first path planning makes the length of the first detection path less than a preset value, or makes the first detection path the shortest; and sequentially detecting the first object to be measured by the detection module 2 according to the first detection path.

[0158] In the second embodiment, the object to be measured only includes a second object to be measured, and the detection method includes: performing a second detection process on the object to be measured; there are more than two second objects to be measured, and the step of detecting the second object to be measured by the detection module 2 according to the second position information includes: performing second path planning on the detection order of the second object to be measured according to the second position information to obtain a second detection path, where the second path planning makes the length of the second detection path less than a preset value or makes the second detection path the shortest; and sequentially detecting the second object to be measured by the detection module 2 according to the second detection path.

[0159] In the third embodiment, the object to be measured includes a first object to be measured and a second object to be measured, and the detection method includes performing a first detection process on the object to be measured and performing a second detection process on the object to be measured.

[0160] Among them, the detection light source is a broadband light source, and the detection component is a spectrometer; the first detection light beam has a first wavelength, and the second detection light beam has a second wavelength; the detection light beam includes at least light of the first wavelength and the second wavelength. The step of detecting the first object to be measured by the detection module 2 according to the first position information and detecting the second object to be measured by the detection module 2 according to the second position information includes: performing third path planning on the detection order of the first object to be measured and the second object to be measured according to the first position information and the second position information to obtain a third detection path; the third path planning makes the length of the third detection path less than a preset value or makes the third detection path the shortest; and sequentially detecting the object to be measured by the detection module 2 according to the third detection path. The number of the first object to be measured and the second object to be measured can each be one or more.

[0161] The imaging component includes: a first imaging unit for detecting a first positioning signal light and forming a first positioning image according to the first positioning signal light; a second imaging unit for detecting a second positioning signal light and forming a second positioning image according to the second positioning signal light; the magnification of the first imaging unit is greater than the magnification of the second imaging unit;

[0162] Forming a first positioning image by the imaging component according to the first positioning signal light includes: when the size of the target to be measured is less than or equal to the first preset size, detecting the first positioning signal light by the first imaging unit and forming a first positioning image according to the first positioning signal light of the first target to be measured; when the size of the target to be measured is greater than the first preset size, detecting the first positioning signal light by the second imaging unit and forming a first positioning image according to the first positioning signal light of the first target to be measured;

[0163] Forming a second positioning image by the imaging component according to the second positioning signal light includes: when the size of the target to be measured is less than or equal to the second preset size, forming a second positioning image by the first imaging unit according to the second positioning signal light of the second target to be measured; when the size of the second target to be measured is greater than the second preset size, forming a second positioning image by the second imaging unit according to the second positioning signal light of the second target to be measured.

[0164] When the type of the target to be measured in the object to be measured is not known in advance, the detection method includes performing a first detection process on the object to be measured and performing a second detection process on the object to be measured.

[0165] The step of obtaining the first position information of the first target to be measured in the object to be measured according to the first positioning image includes: identifying the first positioning image and obtaining the first target to be measured in the first positioning image and the first position information of the first target to be measured;

[0166] The step of obtaining the second position information of the second target to be measured in the object to be measured according to the second positioning image includes: identifying the second positioning image and obtaining the second target to be measured in the second positioning image and the second position information of the second target to be measured.

[0167] In another embodiment, the size of the target to be measured in the object to be measured is not known in advance before the first detection process and the second detection process. The step of forming a first positioning image by the imaging component according to the first positioning signal light includes: forming a first preliminary inspection image by the second imaging unit according to the first positioning signal light of the target to be measured; taking the first target to be measured whose first preliminary inspection image meets the first preset condition as the first re-inspection target;

[0168] Forming a first re-inspection image by the first imaging unit according to the first positioning signal light of the first re-inspection target, and taking the first re-inspection image as the first positioning image of the first re-inspection target, and taking the first preliminary inspection image of the first target to be measured that does not meet the first preset condition as the first positioning image of the corresponding first target to be measured.

[0169] Regarding the first target to be re-inspected whose first initial image meets the first preset condition, it includes: obtaining the first detection size of each first target to be inspected according to the first preliminary inspection image, and taking the first target to be inspected whose first detection size is less than or equal to the first preset size as the first target to be re-inspected; or, taking the first target to be inspected whose sharpness or contrast of the first initial image is less than or equal to the first preset value as the first target to be re-inspected.

[0170] The first preset condition includes: the first detection size of the first target to be inspected is less than or equal to the first preset size; or, the sharpness or contrast of the first initial image is less than or equal to the first preset value.

[0171] The step of forming the second positioning image by the imaging component according to the second positioning signal light includes: forming a second preliminary inspection image by the second imaging unit according to the second positioning signal light of the second target to be inspected; taking the second target to be inspected whose second initial image meets the second preset condition as the second target to be re-inspected; forming a second re-inspection image by the first imaging unit according to the second positioning signal light of the second target to be re-inspected, and taking the second re-inspection image as the second positioning image of the second target to be re-inspected, and taking the second preliminary inspection image of the second target to be inspected that does not meet the second preset condition as the second positioning image of the corresponding second target to be inspected.

[0172] Regarding taking the second target to be inspected whose second initial image meets the second preset condition as the second target to be re-inspected, it includes: obtaining the second detection size of each second target to be inspected according to the second preliminary inspection image, and taking the second target to be inspected whose second detection size is less than or equal to the second preset size as the second target to be re-inspected; or, taking the second target to be inspected whose sharpness or contrast of the second initial image is greater than the second preset value as the second target to be re-inspected.

[0173] In other embodiments, forming the first positioning image by the imaging component according to the first positioning signal light includes: detecting the first positioning signal light by the first imaging unit, and forming the first positioning image according to the first positioning signal light of the first target to be inspected; detecting the first positioning signal light by the second imaging unit, and forming the first positioning image according to the first positioning signal light of the first target to be inspected;

[0174] Forming the second positioning image by the imaging component according to the second positioning signal light includes: detecting the second positioning signal light by the first imaging unit, and forming the second positioning image according to the second positioning signal light of the second target to be inspected; detecting the second positioning signal light by the second imaging unit, and forming the second positioning image according to the second positioning signal light of the second target to be inspected.

[0175] Obtaining the first position information of the first object to be measured according to the first positioning image includes: obtaining the first position information of the first object to be measured according to the first positioning image that meets the third preset condition in the first positioning images obtained by the first imaging unit and the second imaging unit;

[0176] The third preset condition includes: the clarity or contrast of the first positioning image is greater than or equal to a third preset value.

[0177] Obtaining the second position information of the second object to be measured according to the second positioning image includes: obtaining the second position information of the second object to be measured according to the second positioning image that meets the fourth preset condition in the second positioning images obtained by the first imaging unit and the second imaging unit.

[0178] The fourth preset condition includes: the clarity or contrast of the second positioning image is greater than or equal to a fourth preset value.

[0179] The detection device further includes a first beam splitter 120 for splitting the first positioning signal light and the second positioning signal light, so that at least part of the first positioning signal light reaches the first imaging unit along a first path, and at least part of the second positioning signal light reaches the first imaging unit along a second path; the first beam splitter 120 is a semi-transparent and semi-reflective mirror;

[0180] Detecting the first positioning signal light through the first imaging unit is parallel to detecting the first positioning signal light through the second imaging unit.

[0181] In other embodiments, the first positioning light beam has a first wavelength, and the second positioning light beam has a second wavelength; the first imaging unit includes a first filter for filtering the first positioning signal to filter out the light of the second wavelength; a second filter for filtering the second positioning signal to filter out the light of the first wavelength; the detection method includes: the first detection process is parallel to the second detection process.

[0182] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims

1. A detection device, characterized in that, Comprising: A positioning module, the positioning module comprising: a positioning light source assembly that generates a first positioning light beam and a second positioning light beam, the first positioning light beam and the second positioning light beam having different wavelengths, the first positioning light beam having a first wavelength and the second positioning light beam having a second wavelength; the first positioning light beam forms a first positioning signal light after passing through a first measurement target of the object to be measured, and the second positioning light beam forms a second positioning signal light after passing through a second measurement target of the object to be measured; an imaging assembly for forming a first positioning image based on the first positioning signal light and forming a second positioning image based on the second positioning signal light, the imaging assembly comprising a first imaging unit and a second imaging unit, the first imaging unit being configured to detect the first positioning signal light and form a first positioning image based on the first positioning signal light, the first imaging unit comprising a first filter for filtering the first positioning signal light to filter out light of the second wavelength, the second imaging unit being configured to detect the second positioning signal light and form a second positioning image based on the second positioning signal light, the second imaging unit comprising a second filter for filtering the second positioning signal light to filter out light of the first wavelength; wherein, the first measurement target is located on the surface of the object to be measured, and the surface of the second measurement target is covered with a film; the first positioning light beam is visible light, and the second positioning light beam is infrared light; A processing module for obtaining first position information of the first measurement target based on the first positioning image and obtaining second position information of the second measurement target based on the second positioning image; A detection module for detecting the first measurement target based on the first position information and detecting the second measurement target based on the second position information; Wherein, the detection module comprises: a detection light source for emitting a detection light beam towards the object to be measured, the detection light beam forming a detection signal light after passing through the object to be measured; a detection assembly for receiving the detection signal light and detecting the object to be measured based on the detection signal light.

2. The detection device according to claim 1, wherein The first positioning signal light and the second positioning signal light emitted from the object to be measured propagate along the same path, The detection device further comprises a first beam splitter for splitting the first positioning signal light and the second positioning signal light, such that at least part of the first positioning signal light reaches the first imaging unit along a first path and at least part of the second positioning signal light reaches the second imaging unit along a second path.

3. The detection device according to claim 2, characterized in that, The magnification factors of the first imaging unit and the second imaging unit are different; the first beam splitter is further configured to enable at least part of the first positioning signal light to reach the second imaging unit along the second path and part of the second positioning signal light to reach the first imaging unit along the first path; The first imaging unit is further configured to detect the second positioning signal light; the second imaging unit is further configured to detect the first positioning signal light.

4. The detection device according to claim 3, wherein, The first imaging unit includes: a first endoscope and a first image collector, with a first distance between the first endoscope and the first image collector; the second imaging unit includes: a second endoscope and a second image collector, with a second distance between the second endoscope and the second image collector.

5. The detection device according to claim 4, wherein The first imaging unit and the second imaging unit further include an objective lens for collecting the first positioning signal light and the second positioning signal light, and a first beam splitter for splitting the first positioning signal light and the second positioning signal collected by the objective lens; the focal lengths of the first endoscope and the second endoscope are different; and / or, the first distance and the second distance are different.

6. The detection device according to claim 5, wherein The first distance is the focal length of the first endoscope, and the second distance is the focal length of the second endoscope.

7. The detection device according to claim 5, characterized in that, The objective lens is further configured to receive the first positioning light beam to converge the first positioning light beam onto the object to be measured, and receive the second positioning light beam to converge the second positioning light beam onto the object to be measured.

8. The detection device according to claim 4, characterized in that The number of the first endoscopes is multiple, and the focal lengths of the multiple first endoscopes are different; The detection device further includes one or a combination of more of: a first switching component, a second switching component, and a third switching component; The first switching component includes: a first switcher for switching the first endoscope to place different first endoscopes in the optical path; a first driver for driving the first switcher or the first image sensor to move along the optical axis of the first positioning signal light. The second switching component includes: a second switcher for switching the first endoscope to place different first endoscopes in the optical path; a second driver for driving the second switcher or the second image sensor to move along the optical axis of the second positioning signal light. The third switching component includes: a third switcher for fixing the first endoscope and the second endoscope, and the third switcher is configured to exchange the first endoscope and the second endoscope; a third driver for driving the first image sensor and the second image sensor to move along the optical axis.

9. The detection device according to claim 1, characterized in that The detection device further includes: a beam combiner for combining the first positioning light beam and the second positioning light beam, and the combined first positioning light beam and second positioning light beam propagate along the same path to the object to be measured.

10. The detection device according to claim 9, wherein, Further included: A second beam splitter for reflecting the first positioning light beam and the second positioning light beam combined by the beam combiner to reach the object to be measured, and transmitting the first positioning signal light and the second positioning signal light to reach the imaging component; or, transmitting the first positioning light beam and the second positioning light beam combined by the beam combiner to reach the object to be measured, and reflecting the first positioning signal light and the second positioning signal light to reach the imaging component.

11. The detection device according to any one of claims 1 to 5, characterized in that The detection device further includes: a third beam splitter for splitting the detection signal light from the first positioning signal light, and splitting the detection signal light from the second positioning signal light; A fourth beam splitter for reflecting the detection light beam to the object to be measured, and transmitting the detection signal light to the detection component; or, for transmitting the detection light beam to the object to be measured, and reflecting the detection signal light to the detection component.

12. The detection device according to claim 11, wherein, When the detection device further includes an objective lens, the objective lens is further configured to receive the detection light beam, converge the detection light beam onto the object to be measured, and collect the detection signal light, and the detection component is configured to detect the detection signal light collected by the objective lens.

13. The detection device according to claim 1, characterized in that, The detection light source is a broadband light source, and the detection component is a spectrometer; The detection light beam includes at least light of a first wavelength and a second wavelength.

14. The detection device according to claim 1, wherein, The processing module is further configured to perform a third path planning on the detection sequences of the first object to be measured and the second object to be measured according to the first position information and the second position information, to obtain a third detection path, where the third path planning makes the length of the third detection path less than a preset value or makes the third detection path the shortest; Control the detection module to sequentially detect the object to be measured according to the third detection path.

15. A detection method for a detection device, characterized in that, The detection device is as described in any one of claims 1 to 14, and the detection method includes: Performing a first detection process on the object to be measured, and / or performing a second detection process on the object to be measured; The steps of the first detection process include: generating a first positioning light beam by a positioning light source component, and the first positioning light beam forms a first positioning signal light after passing through the object to be measured; Forming a first positioning image by an imaging component according to the first positioning signal light; obtaining first position information of a first object to be measured in the object to be measured according to the first positioning image; detecting the first object to be measured by a detection module according to the first position information; The steps of the second detection process include: generating a second positioning light beam by a positioning light source component, and the second positioning light beam forms a second positioning signal light after passing through the object to be measured, and the wavelength of the second positioning light beam is different from that of the first positioning light beam; forming a second positioning image by an imaging component according to the second positioning signal light; obtaining second position information of a second object to be measured in the object to be measured according to the second positioning image; detecting the second object to be measured by a detection module according to the second position information; Wherein, the imaging component includes a first imaging unit and a second imaging unit, the first imaging unit is configured to detect the first positioning signal light and form a first positioning image according to the first positioning signal light, the first imaging unit includes a first filter for filtering the first positioning signal light to filter out light of the second wavelength; the second imaging unit is configured to detect the second positioning signal light and form a second positioning image according to the second positioning signal light, the second imaging unit includes a second filter for filtering the second positioning signal light to filter out light of the first wavelength.

16. The detection method according to claim 15, wherein The magnification of the first imaging unit is greater than that of the second imaging unit; Forming a first positioning image by an imaging component according to the first positioning signal light includes: when the size of the target to be measured is less than or equal to a first preset size, detecting the first positioning signal light by the first imaging unit and forming a first positioning image according to the first positioning signal light of the first target to be measured; when the size of the target to be measured is greater than the first preset size, detecting the first positioning signal light by the second imaging unit and forming a first positioning image according to the first positioning signal light of the first target to be measured; Forming a second positioning image by an imaging component according to the second positioning signal light includes: when the size of the target to be measured is less than or equal to a second preset size, detecting the second positioning signal light by the first imaging unit and forming a second positioning image according to the second positioning signal light of the second target to be measured; when the size of the second target to be measured is greater than the second preset size, detecting the second positioning signal light by the second imaging unit and forming a second positioning image according to the second positioning signal light of the second target to be measured.

17. The detection method according to claim 16, characterized in that, The detection device further includes a first beam splitter for splitting the first positioning signal light and the second positioning signal light, so that at least part of the first positioning signal light reaches the first imaging unit along a first path, and at least part of the first positioning signal light reaches the second imaging unit along a second path; at least part of the second positioning signal light reaches the first imaging unit along the second path, and at least part of the second positioning signal light reaches the second imaging unit along the first path; Detecting the first positioning signal light by the first imaging unit is parallel to detecting the first positioning signal light by the second imaging unit; Detecting the second positioning signal light by the first imaging unit is parallel to detecting the second positioning signal light by the second imaging unit.

18. The detection method according to claim 15, wherein The detection method includes: the first detection process is parallel to the second detection process.

19. The detection method according to claim 15, wherein When there are more than two first targets to be measured, the steps of detecting the first targets to be measured by a detection module according to the first position information include: performing a first path planning on the detection order of the first targets to be measured according to the first position information to obtain a first detection path, where the first path planning makes the length of the first detection path less than a preset value or makes the first detection path the shortest; sequentially detecting the first targets to be measured by the detection module according to the first detection path; or, When there are more than two second targets to be measured, the steps of detecting the second targets to be measured by a detection module according to the second position information include: performing a second path planning on the detection order of the second targets to be measured according to the second position information to obtain a second detection path, where the second path planning makes the length of the second detection path less than a preset value or makes the second detection path the shortest; sequentially detecting the second targets to be measured by the detection module according to the second detection path; or, The steps of detecting the first target to be detected by the detection module according to the first position information and detecting the second target to be detected by the detection module according to the second position information include: performing a third path planning on the detection order of the first target to be detected and the second target to be detected according to the first position information and the second position information, obtaining a third detection path, where the third path planning makes the length of the third detection path less than a preset value or makes the third detection path the shortest; and sequentially detecting the targets to be detected by the detection module according to the third detection path.

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