Plasma etching hanger and plasma etching device

Abstract

The present application relates to a kind of plasma etching hanger and plasma etching device.The plasma etching hanger is used to load product to be coated, comprising main body and heat absorption structure, the main body has abutment surface, product to be coated has coating surface and installation surface away from coating surface, and abutment surface is attached with installation surface.Heat absorption structure is arranged in main body, and heat absorption structure is used to dissipate heat to main body.In plasma etching coating of product to be coated, product to be coated is installed to main body, and installation surface of product to be coated is attached with abutment surface.By setting heat absorption structure on main body, the heat absorbed by main body and product to be coated is absorbed, so as to cool main body and product to be coated.Product temperature reduction can make plasma deposit on coating surface faster, so as to form more stable film layer, improve film layer quality.Especially in the scene of forming high-temperature coating film by plasma, the plasma etching hanger and plasma etching device can be used to protect product to be coated.

Description

Technical Field

[0001] This invention relates to the technical field of vacuum plasma coating, and in particular to a plasma etching plate and a plasma etching apparatus. Background Technology

[0002] Currently, plasma etching and chemical etching are among the methods used to coat products (such as glass). Plasma etching generates less hazardous waste during the coating process, making it more environmentally friendly.

[0003] The plasma etching apparatus includes a plasma etching machine and a plasma etching rack, which can be transported into the plasma etching machine. When performing plasma etching on a product to be coated, the product is first mounted on the plasma etching rack, and then the plasma etching rack containing the product is fed into the plasma etching machine for plasma etching.

[0004] However, the plasma etching effect is not good when the product to be coated is currently subjected to plasma etching. Summary of the Invention

[0005] Therefore, it is necessary to provide a plasma etching plate and a plasma etching device to address the problem of poor etching effect when plasma etching devices etch products to be coated.

[0006] A plasma etching rack for mounting products to be coated, the plasma etching rack comprising:

[0007] The main body has a contact surface, and the product to be coated has a coating surface and a mounting surface facing away from the coating surface, wherein the contact surface is in contact with the mounting surface;

[0008] A heat-absorbing structure is disposed on the main body and is used to dissipate heat from the main body.

[0009] In one embodiment, the heat-absorbing structure includes a tube and a sealing member. The tube contains a heat-absorbing substance and has an opening for the heat-absorbing substance to be introduced or discharged. The sealing member blocks the opening and is detachably connected to the tube.

[0010] In one embodiment, the tube has a first end and a second end away from the first end, at least one of the first end and the second end having the opening, the tube extends in an annular shape, and there is a receiving gap between the first end and the second end, the sealing member being located in the receiving gap.

[0011] In one embodiment, both the first end and the second end correspond to the edges of the body.

[0012] In one embodiment, the specific heat capacity of the heat-absorbing structure is greater than that of the main body.

[0013] In one embodiment, the main body includes a bent section and a straight section connected to the bent section, and at least the straight section is provided with the heat-absorbing structure.

[0014] In one embodiment, a receiving groove is provided on the side of the main body away from the contact surface, and the heat-absorbing structure is disposed in the receiving groove.

[0015] In one embodiment, a portion of the heat-absorbing structure protrudes from the receiving groove.

[0016] In one embodiment, at least one of the following schemes is also included:

[0017] The main body is provided with multiple through holes, which are spaced apart in the middle of the main body and spaced apart from the heat-absorbing structure;

[0018] The plasma etching fixture includes a first connector, which is disposed on the main body and is detachably connected to the product so that the mounting surface of the product is in close contact with the contact surface; the first connector is located in the edge region of the main body, and the heat absorption structure is disposed on the side of the first connector near the middle region of the main body;

[0019] The main body includes a replacement part and a connecting part, the replacement part and the connecting part are detachably connected, the replacement part has the abutting surface, and the heat-absorbing structure is disposed on the replacement part;

[0020] The plasma-etched mounting plate also includes a protective layer that is disposed on and covers the contact surface.

[0021] A plasma etching apparatus, comprising the aforementioned plasma etching mounting plate.

[0022] When performing plasma etching coating on a product, the product is mounted onto the substrate, with the mounting surface and contact surface of the product in contact. The substrate provides good support for the product, effectively reducing the risk of breakage during coating due to insufficient support. A heat-absorbing structure on the substrate absorbs the heat collected from both the substrate and the product, thus cooling them. Lower product temperature allows plasma to deposit more quickly on the coating surface, forming a more stable film and improving film quality. Especially in special cases, such as when the mounting surface of the product has a special coating (with slightly lower high-temperature resistance), or when the coating surface has a special coating (i.e., coating on a special coating surface), or when the product contains components with slightly lower high-temperature resistance, a gas source material with a higher plasma temperature can be selected. This increases the selectivity of the coating material while ensuring the quality of the coated product. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a plasma etching mounting plate provided in an embodiment of the present invention.

[0024] Figure 2 for Figure 1 Exploded view.

[0025] Figure 3 This is a schematic diagram of a plasma etching mounting plate provided for another embodiment of the present invention.

[0026] Figure 4 This is a schematic diagram of the structure of a plasma etching mounting plate provided as an embodiment of the present invention from another perspective.

[0027] Figure 5 This is a partial cross-sectional schematic diagram of a plasma-etched mounting plate for mounting 3D glass, provided in an embodiment of the present invention.

[0028] Figure label:

[0029] 100. Main body; 101. Through hole; 102. Connecting through hole; 110. Replacement part; 111. Abutting surface; 112. Reverse surface; 113. Bending section; 114. Straight section; 120. Connecting part; 121. First positioning structure; 130. Receiving groove; 200. Heat absorption structure; 210. Tube body; 211. Opening; 220. End sealing part; 300. First connecting part; 301. Adhesive layer; 310. First connecting part; 320. Second connecting part; 400. Second connecting part; 401. Second positioning structure; 500. Protective layer; 600. Product to be coated. Detailed Implementation

[0030] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0031] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0033] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0036] This application protects a plasma etching apparatus. The plasma etching apparatus includes a plasma etching machine and a plasma etching mounting plate. The plasma etching mounting plate is movable relative to the plasma etching machine. The plasma etching mounting plate is used to mount a product 600 to be coated, such as glass. The product 600 has a coating surface and a mounting surface facing away from the coating surface. After the product 600 is mounted on the plasma etching mounting plate, the surface of the product 600 facing away from the plasma etching mounting plate is the coating surface, and the surface facing the plasma etching mounting plate is the mounting surface. After the plasma etching mounting plate with the product 600 is transported to the plasma etching machine, the plasma etching machine is turned on, and the plasma etching machine can etch and coat the coating surface of the glass. For example, the plasma etching machine can etch an AG film (anti-glare film) onto the coating surface of the glass.

[0037] It should be noted that the glass mentioned above can be 2D glass, i.e., flat glass, or 2.5D glass, i.e., flat glass with concave edges forming an arc, or 3D glass, i.e., curved glass.

[0038] In some embodiments, the plasma etching machine includes a cavity and a carrier. Plasma can be generated within the cavity to facilitate coating of a product 600 to be coated within the cavity. The carrier is movable relative to the cavity. At least one plasma etching mounting plate can be mounted on the carrier. The carrier's arrangement facilitates the mounting of plasma etching fixtures and their transport into the cavity. For example, in some embodiments, only one plasma etching mounting plate is mounted on a single carrier. In other embodiments, multiple plasma etching mounting plates can be mounted on a single carrier. When multiple plasma etching fixtures are mounted on the carrier simultaneously, the products 600 to be coated mounted on the multiple plasma etching mounting plates all face the same direction to facilitate etching and coating. Multiple plasma etching mounting plates can be arranged side-by-side or in an array, but are not limited to the above arrangements and can be adjusted according to actual conditions.

[0039] The plasma etching machine can be a box-shaped plasma etching machine, meaning that during plasma coating, the carrier translates relative to the cavity, so that the plasma etching plate, after being installed on the carrier, can translate with the carrier relative to the cavity, thereby facilitating plasma coating at various locations on the coating surface of the product 600 to be coated. In other embodiments, the plasma etching machine can also be a cylindrical plasma etching machine, meaning that during plasma coating, the carrier rotates relative to the cavity, so that the plasma etching plate, after being installed on the carrier, can rotate with the carrier relative to the cavity, thereby facilitating plasma coating at various locations on the coating surface of the product 600 to be coated.

[0040] This application protects a plasma-etched mounting plate. For example... Figures 1-5 As shown, the plasma etching mounting plate includes a main body 100 and a heat-absorbing structure 200. The main body 100 has an abutment surface 111, which is in contact with the mounting surface of the product 600 to be coated. Specifically, when the product 600 is 2D glass, the abutment surface 111 is flat and in contact with the mounting surface of the 2D glass. When the product 600 is 3D glass, the abutment surface 111 is curved and in contact with the mounting surface of the 3D glass. The heat-absorbing structure 200 is disposed on the main body 100. The heat-absorbing structure 200 can absorb heat from the main body 100 and dissipate heat from both the main body 100 and the product 600 to be coated. This allows the temperature of the coating surface of the product 600 to remain relatively low during the coating process, thus improving the coating quality of the product 600.

[0041] When coating the product 600, the product 600 is mounted onto the main body 100 with the mounting surface and the contact surface 111 in close contact. This ensures that the main body 100 provides good support for the product 600, effectively reducing the possibility of breakage due to insufficient support. By incorporating a heat-absorbing structure 200 on the main body 100 to absorb heat from both the main body 100 and the product 600, the heat concentrated on the product 600 is reduced. The lower temperature of the product 600 promotes improved coating quality, resulting in a product 600 with a higher coating quality.

[0042] During the coating process, generating plasma requires a relatively high ambient temperature, and different gas source materials require different ambient temperatures to form plasma. Therefore, the temperature inside the cavity is relatively high during vacuum coating. Lowering the ambient temperature inside the cavity will reduce the plasma concentration or even prevent plasma generation.

[0043] The applicant discovered that when using the aforementioned plasma etching mounting plate for vacuum coating, the temperature of the product 600 to be coated can be relatively low. A lower temperature of the product 600 allows plasma to deposit more quickly on the coating surface, resulting in a more stable film and improved film quality. Furthermore, in certain special cases, such as when the mounting surface of the product 600 has a special coating (with slightly lower high-temperature resistance), or when the coating surface of the product 600 has a special coating (i.e., coating is performed on a surface with a special coating), or when the product 600 contains components with slightly lower high-temperature resistance, the existing technology cannot select gas source materials with higher plasma formation temperatures. However, when using the aforementioned plasma etching mounting plate to mount the product 600 for plasma coating, a wider variety of gas source materials can be selected, i.e., gas source materials with higher plasma formation temperatures can be chosen, increasing the selectivity of the coating material and thus allowing for more possibilities in the film layer. Moreover, this process can reduce damage to the original product 600 caused by excessively high ambient temperatures, thereby obtaining a film layer of better quality.

[0044] like Figure 1 and Figure 2 As shown, in some embodiments, the heat-absorbing structure 200 includes a tube 210 and a sealing member 220. The tube 210 contains a heat-absorbing material and has an opening 211 for the material to be introduced or discharged. The sealing member 220 seals the opening 211 and is detachably connected to the tube 210. It is understood that the heat-absorbing material can be filled into the tube 210 through the opening 211, and then the sealing member 220 confines the material within the tube 210 to prevent it from escaping. Furthermore, since the sealing member 220 is detachably connected to the tube 210, the heat-absorbing material can be filled or replaced in the tube 210 after the sealing member 220 is removed. The heat-absorbing material can absorb heat from the main body 100 and the product 600 to be coated, thereby reducing the temperature of the product 600.

[0045] "The interior of the tube 210 contains a heat-absorbing substance" means that the tube 210 can be filled with or pass through a heat-absorbing substance. In the aforementioned context, "filling" means that the interior of the tube 210 can be filled with a heat-absorbing substance, which remains inside the heat-absorbing structure 200; "passing through" means that the heat-absorbing substance can circulate within the heat-absorbing structure 200, thereby carrying away heat through circulation.

[0046] In some embodiments, one end of the tube 210 is defined as the first end and the other end as the second end, then at least one opening 211 is provided at the first end and the second end. The tube 210 extends in an annular shape, and there is a receiving gap between the first end and the second end, with the end cap 220 located in the receiving gap. Figures 1-3As shown, each of the first and second ends may have an opening 211, and each opening 211 may be equipped with a sealing member 220. Both sealing members 220 are located within the receiving gap. Alternatively, a single sealing member 220 may simultaneously seal both openings 211, in which case the sealing member 220 is also located within the receiving gap. In other embodiments, one of the first and second ends may have an opening 211, while the other end may be closed. In this case, only one sealing member 220 is needed to seal the opening 211 and be located within the receiving gap. The receiving gap provides installation space for the sealing member 220. Furthermore, after the sealing member 220 is placed within the receiving gap, it can cooperate with the tube body 210 to form a ring structure, facilitating heat dissipation over a larger area.

[0047] It is understood that in some other embodiments, the tube 210 has two openings 211, and at least two plasma etching mounts are mounted in a carrier. Two tubes 210 can communicate with each other in two adjacent plasma etching mounts. That is, one opening 211 of one tube 210 communicates with any opening 211 of the other tube 210, and the other opening 211 of the aforementioned tube 210 can be connected to the end cap 220 or communicate with the tubes 210 of other plasma etching mounts.

[0048] In addition, in other embodiments, the tube 210 can be changed according to the shape of the main body 100, such as being straight, corridor-shaped, spiral-shaped, etc.

[0049] In some embodiments, both the first end and the second end correspond to the edges of the body 100. This arrangement allows a larger portion of the tube 210 to be closer to the center of the product 600 to be coated, facilitating heat dissipation from the center of the product 600. Because there is a gap between the first and second ends, heat-absorbing material cannot be contained in this gap. Since less heat accumulates at the edge of the body 100, its heat dissipation capacity is better than in the center of the body 100. Therefore, this arrangement reduces the impact of poor localized heat dissipation caused by the inability to contain heat-absorbing material in the gap. Furthermore, this arrangement makes it easier to replace or circulate the heat-absorbing material.

[0050] In some embodiments, the specific heat capacity of the heat-absorbing structure 200 is greater than that of the main body 100, so the heat-absorbing structure 200 can absorb more heat from the main body 100, thereby effectively reducing heat dissipation to the main body 100 and the product 600 to be coated.

[0051] In some embodiments, the specific heat capacity of the tube 210 is greater than that of the body 100, thus allowing the tube 210 to absorb more heat from the body 100 for transfer to the heat-absorbing material. In some embodiments, the specific heat capacity of the heat-absorbing material is greater than that of the body 100, allowing the heat-absorbing material to absorb more heat from the body 100 for transfer to the heat-absorbing material. It is understood that the specific heat capacity of the heat-absorbing material is greater than that of the tube 210, allowing the heat-absorbing material to absorb more heat from the inner wall of the tube 210. In some other embodiments, the tube 210 and the body 100 are made of the same material, i.e., their specific heat capacities can be the same. The specific heat capacity of the heat-absorbing material is greater than that of the body 100 to facilitate heat transfer to the heat-absorbing material. In some embodiments, the heat-absorbing material can be blue ice, liquid nitrogen, etc. The material of the tube 210 can be a metal such as copper. The material of the body 100 can be stainless steel, alloy, etc.

[0052] In some embodiments, a receiving groove 130 is provided on the side of the main body 100 away from the abutment surface 111, and the heat-absorbing structure 200 is disposed within the receiving groove 130. By providing the receiving groove 130 on the side of the main body 100 away from the abutment surface 111, the installation of the heat-absorbing structure 200 can be facilitated, as well as its maintenance or replacement. Especially in embodiments where the heat-absorbing material is filled into the tube body 210, this arrangement also facilitates the user to separate the tube body 210 from the main body 100 and replace the heat-absorbing material inside the tube body 210. The tube body 210 can be connected to the main body 100 at the receiving groove 130 by means of snap-fit, plug-in, or welding, or the tube body 210 can be connected to the groove wall of the receiving groove 130 by a connector.

[0053] like Figure 1 and Figure 2 As shown, in some embodiments, a portion of the heat-absorbing structure 200 protrudes from the receiving groove 130. The aforementioned protrusion refers to the portion of the heat-absorbing structure 200 protruding from the opening 211 of the receiving groove 130. This arrangement reduces the limitation imposed by the size of the receiving groove 130 on the volume of the heat-absorbing structure 200, allowing the heat-absorbing structure 200 to have a larger volume and thus accommodate more heat-absorbing material.

[0054] In addition, in some other embodiments, the main body 100 may also have a hollow interlayer (not shown in the figure). The hollow interlayer can accommodate the aforementioned tube 210. The tube 210 can be disposed in the hollow interlayer by means of detachable connection such as snap-fit ​​or plug-in.

[0055] In some embodiments, the main body 100 may further include an independently disposed heat-absorbing interlayer (not shown in the figure). The heat-absorbing interlayer is located in the middle of the main body 100 along the thickness direction of the main body 100. A heat-absorbing material may be disposed within the heat-absorbing interlayer. The heat-absorbing material can absorb heat from the main body 100, thereby reducing the temperature of the main body 100. The heat-absorbing material in the heat-absorbing interlayer can cooperate with the heat-absorbing structure 200 to improve the heat dissipation effect of the main body 100. The heat-absorbing interlayer may be partially disposed in areas of greater thickness of the main body 100 to dissipate heat accumulated in areas of greater thickness of the main body 100. The heat-absorbing material may be the same as or different from the heat-absorbing material in the heat-absorbing structure 200. That is, in the above embodiments, a heat-absorbing interlayer is disposed in the middle of the main body 100, and a tube 210 may be disposed on the surface of the main body 100 facing away from the contact surface 111.

[0056] In some embodiments, the main body 100 may also be provided with a plurality of through holes 101. The through holes 101 are spaced apart in the middle of the main body 100. The through holes 101 are spaced apart from the heat-absorbing structure 200. The arrangement of the through holes can reduce the weight of the main body 100 while allowing the main body 100 to accumulate less heat. Combined with the heat-absorbing structure 200, the heat dissipation effect of the main body 100 can be improved. In addition, the arrangement of the through holes 101 can also reduce the weight of the main body 100 and reduce the cost of the main body 100.

[0057] Multiple through holes 101 can be configured in a regular manner, such as array configuration or spiral configuration, or they can be configured irregularly.

[0058] In some embodiments, the heat-absorbing structure 200 can extend in a ring shape along the periphery of the structure formed by all the through holes 101. This arrangement effectively dissipates heat from the central region of the main body 100, where heat tends to accumulate, through the through holes 101, thereby reducing the volume of the heat-absorbing structure 200 and lowering costs. Furthermore, this arrangement allows the through holes 101 to effectively reduce the weight of the main body 100 while maintaining its structural stability and minimizing deformation under stress. In addition, this arrangement reduces the shape complexity of the heat-absorbing structure 200, facilitating its production and reducing costs.

[0059] In some embodiments, the volume occupied by the through hole 101 can be less than or equal to 20% of the volume of the main body 100. This arrangement can effectively reduce the weight of the main body 100 while ensuring the strength of the main body 100, and reduce the problem of easy deformation of the main body 100 due to too many through holes 101.

[0060] like Figure 1 and Figure 2As shown, in some embodiments, for example, when the 3D glass or 2.5D glass is the product 600 to be coated, it includes a curved portion and a flat portion. The main body 100 of the plasma etching fixture may include a bent segment 113 and a straight segment 114 connected to the bent segment 113. The straight segment 114 may cooperate with the portion of the product 600 to be coated having a planar structure. The bent segment 113 may cooperate with the portion of the product 600 to be coated having a curved surface structure. At least the straight segment 114 is provided with a heat absorption structure 200. Since the structure of the straight segment 114 is simpler than that of the bent segment 113, it is convenient to install the heat absorption structure 200 on the straight segment 114 to dissipate heat from the main body 100 and improve the quality of the coating.

[0061] It can be understood that in some embodiments, the heat absorption structure 200 may be provided only on the straight segment 114. In some other embodiments, part of the heat absorption structure 200 may be provided on the straight segment 114, and the remaining heat absorption structure 200 may be provided on the bent segment 113, so as to dissipate heat from the main body 100 and improve the quality of the coating.

[0062] As Figure 3 shown, in some other embodiments, for example, when the 2D glass is the product 600 to be coated, the main body 100 of the plasma etching fixture may only have a straight segment 114.

[0063] In some embodiments, at least the bent segment 113 is provided with a heat absorption structure 200. Especially when the proportion of the bent segment 113 in the main body 100 is relatively large, the above method can better absorb heat from the product 600 to be coated. For example, in some embodiments, the heat absorption structure 200 may be provided only on the bent segment 113.

[0064] The heat absorption structure 200 may be arranged along the circumferential direction of the main body 100, that is, similar to a "square" shape. The heat absorption structure 200 may also be bent and folded on the main body 100, that is, similar to a wave shape. The heat absorption structure 200 may also be arranged in a spiral shape on the main body 100. As Figures 1-5 , in some embodiments, the plasma etching fixture further includes a first connecting member 300. The first connecting member 300 is provided on the main body 100, and the first connecting member 300 is detachably connected to the product 600 to be coated, so that the mounting surface of the product 600 to be coated closely adheres to the abutting surface 111. The first connecting member 300 is located in the edge area of the main body 100, and the heat absorption structure 200 is provided on the side of the first connecting member 300 close to the middle area of the main body 100.

[0065] The above configuration allows the first connector 300 to fix the edge area of ​​the product 600 to be coated to the main body 100, reducing the possibility of the product 600 detaching. Less heat accumulates on the side of the first connector 300 facing the edge of the main body 100, while more heat accumulates on the side facing the center of the main body 100. The heat-absorbing structure 200, located near the center of the first connector 300, minimizes the temperature difference between the two sides of the first connector 300, resulting in a more stable connection between the product 600 and the main body 100. Furthermore, the heat-absorbing structure 200, located near the center of the product 600, cools and dissipates heat from the central part of the product 600 where heat tends to accumulate, thus lowering the temperature of the product 600 and improving the coating quality.

[0066] Furthermore, in some embodiments, such as Figures 1-3 As shown, the main body 100 is provided with a connecting through hole 102. The first connector 300 includes a first connecting portion 310 and a second connecting portion 320 connected to the first connecting portion 310. The first connecting portion 310 is adhered to the side of the main body 100 facing away from the contact surface 111 (i.e., the facing surface 112). The second connecting portion 320 is bent relative to the first connecting portion 310 to extend into the connecting through hole 102 and is capable of adhering to the product 600 to be coated. A heat-absorbing structure 200 is provided on the side of the connecting through hole 102 near the middle of the main body 100.

[0067] By using the first connecting part 310 and the second connecting part 320, the surface of the product 600 to be coated, away from the coating surface, is bonded to the main body 100, thus enabling the product 600 to be detached. This arrangement ensures that the first connecting part 300 will not damage the surface of the product 600 during assembly and disassembly, thereby ensuring the quality of the product 600 after coating. The heat-absorbing structure 200 has a connecting through hole 102 on the side close to the main body 100, which facilitates heat dissipation from areas of the main body 100 that are difficult to dissipate heat. Furthermore, the connecting through hole 102 not only facilitates the connection between the first connecting part 300 and the product 600 but also provides a certain degree of heat dissipation. Combined with the heat-absorbing structure 200, relatively uniform heat dissipation can be achieved on the main body 100.

[0068] Specifically, in some embodiments, an adhesive layer 301 is provided on the side of the first connector 300 facing the main body 100. The adhesive layer 301 is used to connect with the main body 100 or the product 600 to be coated. When the product 600 to be coated is mounted to the plasma etching mounting plate, the product 600 to be coated can be connected to the main body 100 through the adhesive layer 301. The adhesive layer 301 can be an adhesive layer.

[0069] It is understood that in some other embodiments, at least a portion of the first connector 300 is located within the connecting through hole 102, and the first connector 300 located within the connecting through hole 102 can be connected to the product 600 to be coated by adsorption. The vacuum degree between the first connector 300 and the product 600 to be coated is greater than the vacuum degree inside the cavity, to ensure that the first connector 300 remains connected to the product 600 to be coated during the coating process.

[0070] In some embodiments, there are multiple connecting through holes 102. There are multiple second connecting portions 320. Each of the multiple second connecting portions 320 corresponds one-to-one with a multiple connecting through holes 102. This arrangement can achieve multiple connections on the product to be coated 600, avoiding the situation where the product to be coated 600 directly detaches due to insufficient strength of a single connection point.

[0071] Furthermore, multiple connecting through holes 102 are arranged sequentially along a preset direction. The first connector 300 extends in an elongated shape along the preset direction. There are multiple first connecting portions 310. Multiple first connecting portions 310 and multiple second connecting portions 320 are alternately arranged along the preset direction. This arrangement allows the product 600 to be coated to better adhere to the contact surface 111, improving connection stability.

[0072] It should be noted that the aforementioned preset direction refers to any direction perpendicular to the contact surface 111 to the opposing surface 112, and this preset direction is not limited to a straight line. The preset direction can be the direction extending along a curve or irregular line. For example, the preset direction can be consistent with the circumferential direction of the edge of the main body 100. Another example is that the preset direction can be consistent with the extension direction of any straight line within the range of the main body 100. Yet another example is that the preset direction can be consistent with the extension direction of a spiral within the range of the main body 100.

[0073] It is understood that in some other embodiments, the multiple connection through holes 102 can be arbitrarily arranged. The outer contour of the first connector 300 can cover all the connection through holes 102.

[0074] In some embodiments, a plurality of connecting through holes 102 are arranged sequentially along a preset direction, and all connecting through holes 102 extend along the preset direction and have equal lengths. The distance between any two adjacent connecting through holes 102 is less than the length of the connecting through hole 102. Since the length of the main body 100 in the preset direction has a maximum value, the above arrangement can increase the proportion of the main body 100 occupied by the connecting through holes 102, thereby allowing more of the product 600 to be coated to be connected to the first connector 300, thereby improving the connection tightness of the product 600 to be coated and reducing the possibility of the product 600 to be coated detaching from the main body 100.

[0075] In some embodiments, the plurality of connecting through holes 102 correspond to the edges of the product 600 to be coated. This arrangement ensures that the product 600 to be coated is connected to the body 100 while allowing the middle part of the body 100 to be in good contact with the product 600 to be coated, facilitating heat dissipation in the middle of the body 100 and thus ensuring coating quality. Furthermore, this arrangement also allows for other structures to be provided in the middle of the body 100 to meet different requirements.

[0076] In such Figure 3 In the illustrated embodiment, there are two sets of connecting through holes 102, which are respectively disposed on the two side edges of the main body 100. Each connecting through hole 102 in each set is spaced apart along the corresponding edge of the main body 100. The heat-absorbing structure 200 is disposed between the two sets of connecting through holes 102. That is, the receiving groove 130 is disposed between the two sets of connecting through holes 102, and the tube body 210 is disposed in the receiving groove 130. The above arrangement allows the first connector 300 to connect to the edge portion of the product 600 to be coated, making the connection between the product 600 to be coated and the main body 100 more stable, and also allowing the middle part of the main body 100 to have a better heat dissipation effect, thereby improving the coating quality.

[0077] In some embodiments, when the curvature of the portion of the main body 100 where the connecting through hole 102 is located is large, the length of the connecting through hole 102 can be reduced. This arrangement ensures that the main body 100 has good mechanical strength in areas with large curvature.

[0078] In some embodiments, the area of ​​the portion of the first connector 300 that adheres to the product 600 to be coated is larger than the area of ​​the portion of the first connector 300 that is not adhered to the product 600 to be coated. This arrangement allows more of the first connector 300 to be connected to the product 600 to be coated, given the same length, thereby improving the installation stability of the product 600 to be coated and reducing the possibility of the product 600 to be coated detaching from the main body 100. Furthermore, this arrangement also increases the heat dissipation effect at the edges of the product 600 to be coated, allowing heat from the edges of the product 600 to be coated to be dissipated through the connecting through-hole 102 and the first connector 300.

[0079] like Figure 5As shown, in some embodiments, the opening 211 of the connecting through hole 102 gradually increases in size along the direction from the abutting surface 111 to the opposing surface 112 of the body 100. This arrangement allows the first connector 300 to connect with more groove walls of the connecting through hole 102 when passing through it, thereby increasing the connection strength between the first connector 300 and the body 100. Furthermore, this arrangement makes it easier for the groove walls of the connecting through hole 102 to be exposed to the outside, facilitating heat exchange and improving the heat dissipation effect on the product 600 to be coated.

[0080] It is understood that in some other embodiments, the size of the opening 211 of the connecting through hole 102 remains unchanged along the direction from the abutting surface 111 to the opposing surface 112 of the body 100. This arrangement makes it easier to open the connecting through hole 102 during the processing of the body 100.

[0081] In some embodiments, the connecting through hole 102 can be a rectangular connecting through hole 102, a trapezoidal connecting through hole 102, a dovetail-shaped connecting through hole 102, an arc-shaped connecting through hole 102, an irregular connecting through hole 102, etc. The shape of the connecting through hole 102 can be selected according to the actual situation. For example... Figure 5 As shown, in some embodiments, the connecting through hole 102 can be a trapezoidal connecting through hole 102. The first connector 300 can be connected to the trapezoidal inclined groove wall of the trapezoidal connecting through hole 102, thereby improving the connection strength between the first connector 300 and the main body 100.

[0082] In some embodiments, the width of the connecting through hole 102 can be greater than or equal to the width of the first connector 300. The width of the connecting through hole 102 refers to the distance between two opposite groove walls of the connecting through hole 102 perpendicular to a preset direction. This arrangement allows the first connector 300 to more easily connect with the groove wall of the connecting through hole 102, the product 600 to be coated, and the surface of the main body 100 between adjacent connecting through holes 102 during installation. Furthermore, this arrangement ensures that part of the groove wall of the connecting through hole 102 does not abut against the first connector 300, facilitating heat dissipation through the groove wall of the connecting through hole 102.

[0083] like Figure 5 As shown, in some embodiments, the thickness of the portion of the main body 100 located between adjacent connecting through holes 102 (i.e., the distance between the side facing away from the surface 112 and the side facing the abutment surface 111) is smaller than that of the portion of the main body 100 away from the connecting through holes 102. This arrangement can reduce the depth of the connecting through holes 102, thereby reducing the length of the first connector 300 and lowering costs. Moreover, the above arrangement can reduce the occurrence of situations where the connecting through holes 102 are too deep, resulting in thick sidewalls, excessive heat accumulation, and poor heat dissipation.

[0084] The aforementioned first connector 300 ensures a strong connection between the product 600 to be coated and the main body 100, while minimizing damage to the surface of the product 600, thereby improving the yield rate of the product 600. The first connector 300, in conjunction with the heat-absorbing structure 200, effectively dissipates heat from the product 600, thus improving the coating quality of the product 600.

[0085] In some embodiments, the main body 100 can be a one-piece main body 100 or a multi-segment detachable main body 100. When the main body 100 is a multi-segment detachable main body 100, parts of the main body 100 can be replaced according to the actual situation, thereby reducing the manufacturing cost of the main body 100.

[0086] For example, such as Figures 1-4 In some embodiments, the main body 100 includes a replacement part 110 and a connecting part 120. The replacement part 110 and the connecting part 120 are detachably connected. They can be connected by bolts, snap-fit, threaded connections, or other methods. The replacement part 110 has the aforementioned abutment surface 111. A heat-absorbing structure 200 is disposed on the replacement part 110. The replacement part 110 can be customized according to the shape of the actual product 600 to be coated. When vacuum coating is performed on products 600 of different sizes, models, and curvatures, the corresponding replacement part 110 can be replaced. This arrangement can reduce the cost of replacing the main body 100.

[0087] In some embodiments, the plasma etching mounting plate further includes a second connector 400. The second connector 400 can be detachably connected to the connector 120. The second connector 400 can connect the connector 120 to a carrier, thereby enabling the main body 100 to be mounted onto the carrier. This arrangement allows the connector 120 and the second connector 400 to be universal components, reducing the cost of the plasma etching mounting plate.

[0088] In some embodiments, there are two connecting portions 120. The two connecting portions 120 are respectively connected to both ends of the replacement portion 110. The number of second connecting members 400 is the same as the number of connecting portions 120, and they are detachably connected in a one-to-one correspondence. This arrangement allows both sides of the replacement portion 110 to be connected to the second connecting members 400 via the connecting portions 120. Compared to connecting only one side of the replacement portion 110 to the second connecting member 400, this arrangement provides better connection stability by connecting both sides of the replacement portion 110 via corresponding second connecting members 400. Especially during the movement of the plasma etching mounting plate relative to the cavity with the carrier, this arrangement makes the movement of the main body 100 more stable, thereby making the movement of the product to be coated 600 more stable and greatly reducing the possibility of the product to be coated 600 falling off due to movement disturbances.

[0089] In some embodiments, such as Figure 1 , Figure 2 and Figure 4 As shown, the connecting portion 120 may be provided with a first positioning structure 121. The second connecting member 400 is provided with a second positioning structure 401. The first positioning structure 121 can cooperate with the second positioning structure 401 to position the connecting portion 120 and the second connecting member 400, thereby reducing the difficulty of connecting the two. For example, in some embodiments, the first positioning structure 121 may be a first step structure. The second positioning structure 401 may be a second step structure, with the first step structure corresponding to the second step structure. When the first step structure and the second step structure cooperate, the protruding portion of the first step structure abuts against the concave portion of the second step structure, and the concave portion of the first step structure abuts against the protruding portion of the second step structure.

[0090] In some embodiments, replay Figure 2 The plasma etching mounting plate may also include a protective layer 500. The protective layer 500 is disposed on and covers the abutment surface 111. When the product 600 to be coated is mounted onto the plasma etching mounting plate, the product 600 can completely abut against the protective layer 500. The protective layer 500 can protect the product 600 from scratches caused by movement of the product 600 relative to the main body 100.

[0091] The aforementioned plasma etching mounting plate absorbs heat from the main body 100 and the product 600 mounted on the main body 100 through the heat absorption structure 200, thereby reducing the heat of the product 600 and resulting in better coating quality during the coating process. By providing through holes 101 and connecting through holes 102 that cooperate with the first connector 300, the weight of the main body 100 is reduced, facilitating the connection between the product 600 and the main body 100, while simultaneously increasing the heat dissipation effect of the main body 100. This, combined with the heat absorption device, cools the product 600 and improves the coating effect. Furthermore, by configuring the main body 100 as a detachable replacement part 110 and a connecting part 120, the cost of replacing the entire main body 100 is reduced when coating products 600 of different shapes and sizes.

[0092] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0093] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A plasma etching mounting plate for mounting products to be coated, characterized in that, The plasma etching mounting plate includes: The main body has a contact surface, and the product to be coated has a coating surface and a mounting surface facing away from the coating surface, wherein the contact surface is in contact with the mounting surface; A heat-absorbing structure is disposed on the main body, and the heat-absorbing structure is used to dissipate heat from the main body; A first connector is disposed on the main body and is detachably connected to the product so that the mounting surface of the product is in close contact with the contact surface; the first connector is located in the edge region of the main body, and the heat-absorbing structure is disposed on the side of the first connector near the middle region of the main body; The main body is provided with a connecting through hole. The first connector includes a first connecting part and a second connecting part connected to the first connecting part. The first connecting part is adhered to the side of the main body away from the contact surface. The second connecting part is bent relative to the first connecting part to extend into the connecting through hole and can adhere to or adsorb the product to be coated. The heat-absorbing structure is provided on the side of the connecting through hole near the middle of the main body.

2. The plasma etching mounting plate according to claim 1, characterized in that, The heat-absorbing structure includes a tube body and a sealing member. The tube body contains a heat-absorbing substance and has an opening for the heat-absorbing substance to be introduced or discharged. The sealing member blocks the opening and is detachably connected to the tube body.

3. The plasma etching mounting plate according to claim 2, characterized in that, The tube has a first end and a second end away from the first end, at least one of the first end and the second end has the opening, the tube extends in an annular shape, and there is a receiving gap between the first end and the second end, the sealing member is located in the receiving gap.

4. The plasma etching mounting plate according to claim 3, characterized in that, Both the first end and the second end correspond to the edges of the main body.

5. The plasma etching mounting plate according to claim 1, characterized in that, The specific heat capacity of the heat-absorbing structure is greater than that of the main body.

6. The plasma etching mounting plate according to claim 1, characterized in that, The main body includes a bent section and a straight section connected to the bent section, and at least the straight section is provided with the heat-absorbing structure.

7. The plasma etching mounting plate according to claim 1, characterized in that, The main body has a receiving groove on the side away from the contact surface, and the heat-absorbing structure is disposed in the receiving groove.

8. The plasma etching mounting plate according to claim 7, characterized in that, Part of the heat-absorbing structure protrudes from the receiving groove.

9. The plasma etching mounting plate according to claim 1, characterized in that, It also includes at least one of the following schemes: The main body is provided with multiple through holes, which are spaced apart in the middle of the main body and spaced apart from the heat-absorbing structure; The main body includes a replacement part and a connecting part, the replacement part and the connecting part are detachably connected, the replacement part has the abutting surface, and the heat-absorbing structure is disposed on the replacement part; The plasma-etched mounting plate also includes a protective layer that is disposed on and covers the contact surface.

10. A plasma etching apparatus, characterized in that, Includes the plasma etching mounting plate as described in any one of claims 1-9.

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