A six-degree-of-freedom high-precision macro-micro parallel adjustment platform

Abstract

The invention discloses a six-degree-of-freedom high-precision macro-micro parallel adjustment platform, which comprises a macro-motion platform A and a micro-motion platform B. The macro-motion platform A comprises a macro-motion platform and a macro-motion fixed platform arranged in parallel below the macro-motion platform, six macro-motion driving legs connected between the macro-motion platform and the macro-motion fixed platform, and the micro-motion platform B is arranged on the upper part of the macro-motion platform A; the micro-motion platform B comprises a micro-motion platform arranged in parallel above the macro-motion platform; a bearing platform parallel to the macro-motion platform is formed at the lower part of the macro-motion platform, six micro-motion driving legs are connected between the bearing platform and the micro-motion platform, so that the macro-motion platform forms the micro-motion fixed platform of the micro-motion platform B; the end of each micro-motion driving leg is connected to the micro-motion platform and the bearing platform through a flexible hinge. The invention adopts two modes of macro-motion and micro-motion to realize the precise pointing function of six degrees of freedom in space, and has the beneficial effects of large working space, strong bearing capacity, high precision and independent control.

Description

Technical Field

[0001] The present invention relates to the technical field of precision adjustment platforms, and in particular to a six-degree-of-freedom high-precision macro-micro parallel adjustment platform. Background Art

[0002] Parallel mechanisms are a type of mechanical structure commonly used in aerospace and industrial production. In the field of aerospace, with the development of science and technology and the improvement of aerospace requirements, spacecraft are also developing in the direction of complexity and precision. Therefore, for spacecraft that use parallel mechanisms, the adjustment accuracy of parallel mechanisms also needs to be higher and higher. Not only in the field of aerospace, but also in other fields such as industry, such as the sample scanning stage of scanning probe microscopes, micro-nano operations, and precision machining, six-degree-of-freedom parallel mechanisms with high adjustment accuracy will bring reliability and safety to the manufacturing of their products.

[0003] At present, the accuracy of the lead screw transmission in the parallel mechanism is limited to the micron level, which makes it difficult to complete some high-precision operation tasks. In order to achieve the nano-level adjustment capability of the platform while maintaining the goal of high resolution, it is necessary to design a parallel adjustment platform with higher accuracy. The six-degree-of-freedom parallel mechanism has the ability to move in six degrees of freedom in space, which can achieve large-range movement as well as small displacement and small-angle movement. It has the characteristics of high precision, high rigidity and high load-bearing capacity, and can achieve precise adjustment while resisting deformation caused by vibration, gravity and other factors. However, these alone are not enough to enable the platform to achieve nano-level adjustment, so it is necessary to consider a new fine-tuning mechanism, which is designed on the basis of the Gough-Stewart platform and adds a fine-tuning mechanism to improve the platform adjustment accuracy.

[0004] Although, for mechanisms with low precision requirements, some micro-vibrations with small vibration amplitudes will not have a significant impact, so their impact can be ignored. However, with the continuous improvement of requirements for equipment and various mechanisms, especially when the designed mechanism needs to be used to generate and measure tiny precision quantities, instruments with sensitive devices are also extremely sensitive to tiny vibrations. Even micro-vibrations with small amplitudes can seriously affect important performance indicators such as accuracy, stability and resolution of the equipment;

[0005] Therefore, based on the above problems, technical personnel in this field urgently need to design a six-degree-of-freedom high-precision macro-micro parallel adjustment platform to complete precision adjustment work and overcome the problem that high-precision driving or work is required in some occasions. Summary of the invention

[0006] The purpose of the present invention is to overcome the defects of the prior art and provide a six-degree-of-freedom high-precision macro-micro parallel adjustment platform.

[0007] In order to achieve the above object, the present invention provides the following technical solutions:

[0008] The present invention discloses a six-degree-of-freedom high-precision macro-micro parallel adjustment platform, comprising:

[0009] A macro-motion platform A, which comprises a macro-motion platform and a macro-motion fixed platform arranged in parallel below the macro-motion platform, and six macro-motion driving legs connected between the macro-motion platform and the macro-motion fixed platform;

[0010] It also includes a micro-motion platform B, which is arranged on the upper part of the macro-motion platform A;

[0011] The micro-motion platform B has a micro-motion platform arranged in parallel above the macro-motion platform;

[0012] Wherein, a bearing platform parallel to the macro-motion platform is formed at the lower part of the macro-motion platform, and six micro-motion driving legs are connected between the bearing platform and the micro-motion platform, so that the macro-motion platform forms a micro-motion fixed platform of the micro-motion platform B;

[0013] Wherein, each end of the micro-motion driving leg is connected to the micro-motion platform and the bearing platform through a flexible hinge.

[0014] Furthermore, the bearing platform is formed on the lower surface of the macro-motion platform, and the bearing platform extends toward the direction of the macro-motion fixed platform.

[0015] Furthermore, the macro-motion platform is constructed as a disc structure, and three bearing platforms are evenly distributed circumferentially on the lower surface thereof, and each bearing platform is connected to two of the micro-motion driving legs.

[0016] Furthermore, a notch is provided at the edge of the macro-motion platform for circumventing the micro-motion driving legs.

[0017] Furthermore, the micro-motion platform and the bearing platform are fixedly connected with fixing blocks at positions corresponding to the micro-motion driving legs, and are fixedly connected to the flexible hinges via the fixing blocks.

[0018] Furthermore, the micro-drive support leg includes a fixed support, a flexible support fixedly connected to one side of the fixed support, and a ball screw arranged inside the fixed support;

[0019] The flexible bracket is fixedly connected to the flexible hinge, and a flexible lever perpendicular to the ball screw is provided in the middle of the flexible bracket, a second screw nut screw-driven with the ball screw is fixedly connected at the lower part of the flexible lever, and the second screw nut is slidably connected to the fixed support through a guide rod;

[0020] A servo motor is also fixedly connected inside the fixed support, and the servo motor is connected to the ball screw through a planetary reducer.

[0021] Furthermore, the ratio of the displacement of the second lead screw nut to the deformation of the upper surface of the flexible lever is 100:1.

[0022] Furthermore, the flexible hinge has a sleeve portion in the middle, and the sleeve portion is cross-arranged with two groups of cutouts, each group of cutouts has two arc-shaped cutouts, and the two arc-shaped cutouts extend symmetrically and obliquely toward the central axis of the sleeve portion.

[0023] Furthermore, the macro-motion driving legs are retractable legs, and the ends of the macro-motion driving legs are connected to the macro-motion moving platform and the macro-motion fixed platform via offset hinges.

[0024] Further, the macro-dynamic driving leg comprises a body, an end cover mounted at one end of the body and connected to the offset hinge, and a movable leg sleeved outside the body;

[0025] A torque motor and a planetary ball screw, as well as a screw support bearing supporting the planetary ball screw, are installed inside the body, and a harmonic reducer is connected between the torque motor and the planetary ball screw;

[0026] The end cover is located inside the body and is fixedly connected with a multi-turn absolute encoder;

[0027] The movable leg is fixedly connected with a connecting leg inside the end away from the main body, and the connecting leg is spirally driven with the free end of the planetary ball screw through a first screw nut.

[0028] In the above technical solution, the present invention provides a six-degree-of-freedom high-precision macro-micro parallel adjustment platform, which has the following beneficial effects:

[0029] The six-degree-of-freedom high-precision macro-micro parallel adjustment platform is composed of a macro-motion platform and a micro-motion platform connected in series; the macro-motion platform includes a macro-motion platform, a macro-motion fixed platform, an offset hinge, and a macro-motion driving leg that uses a motor to drive a planetary roller screw to extend and retract, which can achieve spatial micron-level positioning; the micro-motion platform includes a flexible hinge, a micro-motion platform, a micro-motion driving leg, and a micro-motion fixed platform composed of the macro-motion platform, which can achieve spatial nanometer-level positioning; the micro-motion driving leg is driven by a servo motor to drive a roller screw so that the second screw nut pushes the flexible lever to deform flexibly to achieve nanometer-level positioning. The present invention adopts two modes of macro-motion and micro-motion to achieve the precise pointing function of six degrees of freedom in space, and has the advantages of large working space, strong carrying capacity, high precision and independent control.

[0030] Secondly, the micro-motion platform designed by the present invention has a servo motor in the micro-motion driving leg that rotates to drive the ball screw to move, and then the up and down spin of the screw nut drives the displacement of the beam connected between the screw nut and the flexible lever, so that the displacement of the screw nut and the deformation of the upper surface of the flexible lever are deformed by 100:1. There are symmetrical arc-shaped incisions on the flexible hinge, which are formed by the wire cutting slow wire processing technology, and the rotation is realized by the deformation of the elastic material itself, so that the up and down micro-motion of the platform of the whole machine produces a small deformation, thereby realizing the fine adjustment of the platform;

[0031] In addition, the macro-motion platform and the micro-motion platform move in series without affecting each other, and can achieve coarse and fine separation and independent control. The embedded design of the micro-motion platform makes the entire platform low in height and high in lateral stiffness. The elasticity of the flexible hinge and the flexible lever of the micro-motion platform can eliminate the gap and achieve the effect of fine-tuning. The six-degree-of-freedom high-precision macro-micro parallel adjustment platform provided by the present invention has high use value and broad application prospects, and can be applied to technical fields such as telescope posture correction, high-precision CNC machine tools, and optoelectronic packaging. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0033] Figure 1 It is an axonometric diagram of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0034] Figure 2 It is a front view of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0035] Figure 3 It is a main view of a macro-motion platform of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0036] Figure 4 It is an axonometric diagram of a macro-driven outrigger of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0037] Figure 5 It is a cross-sectional view of a macro-dynamic driving leg of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0038] Figure 6 It is a front view of a micro-motion platform of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0039] Figure 7It is an axonometric diagram of a micro-drive leg of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0040] Figure 8 It is a cross-sectional view of a micro-drive leg of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention;

[0041] Fig. 9 It is an axonometric diagram of a flexible hinge of a six-degree-of-freedom high-precision macro-micro parallel adjustment platform disclosed in the present invention.

[0042] Description of reference numerals:

[0043] Macromotion Platform A;

[0044] Micro motion platform B;

[0045] Micro-motion platform 1; macro-motion platform 2; offset hinge 3; macro-motion fixed platform 4; macro-motion drive leg 5; micro-motion drive leg 6; end cover 7; first support 8; multi-turn absolute encoder 9; torque motor 10; harmonic reducer 11; screw support bearing 12; planetary ball screw 13; moving leg 14; connecting leg 141; first screw nut 142; second support 15; bearing platform 16; connecting block 17; support block 18; flexible hinge 19; sleeve portion 191; arc-shaped cutout 192; first flexible hinge 19a; second flexible hinge 19b; flexible bracket 20; flexible lever 201; top plate 202; second screw nut 21; ball screw 22; fixed support 23; motor housing 231; guide rod 232; planetary reducer 24; servo motor 25; notch 26. DETAILED DESCRIPTION

[0046] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0047] See also Figure 1-3 As shown;

[0048] A six-degree-of-freedom high-precision macro-micro parallel adjustment platform is invented, comprising: a macro motion platform A and a micro motion platform B;

[0049] The macro-motion platform A comprises a macro-motion platform 2 and a macro-motion fixed platform 4 arranged in parallel below the macro-motion platform 2, and six macro-motion driving legs 5 connected between the macro-motion platform 2 and the macro-motion fixed platform 4. Specifically, both ends of the macro-motion driving legs 5 are connected with offset hinges 3, the top of the macro-motion driving legs 5 is connected to the macro-motion platform 2 through the offset hinge 3, and the bottom end is connected to the macro-motion fixed platform 4 through the offset hinge 3. The macro-motion fixed platform 4 is a fixed platform. In this structure, the macro-motion platform A realizes the spatial six-degree-of-freedom micron-level positioning function by controlling the six macro-motion driving legs 5;

[0050] The micro-motion platform B is arranged on the upper part of the macro-motion platform A. The micro-motion platform B has a micro-motion platform 1 which is arranged parallel to the macro-motion platform 2, wherein a bearing platform 16 parallel to the macro-motion platform 2 is formed at the lower part of the macro-motion platform 2, and six micro-motion driving legs 6 are connected between the bearing platform 16 and the micro-motion platform 1, so that the macro-motion platform 2 forms a micro-motion fixed platform of the micro-motion platform B. The micro-motion platform B realizes the spatial six-degree-of-freedom nano-positioning function by controlling the six micro-motion driving legs 6, and the movements of the macro-motion platform A and the micro-motion platform B can be controlled separately without affecting each other, so that coarse and fine separation can be realized and independent control can be achieved.

[0051] The ends of each micro-motion driving leg 6 are connected to the micro-motion platform 1 and the load-bearing platform 16 through a flexible hinge 19. Specifically, the flexible hinge 19 includes a first flexible hinge 19a and a second flexible hinge 19b. The top of the micro-motion driving leg 6 is connected to the micro-motion platform 1 through the first flexible hinge 19a, and the bottom is connected to the load-bearing platform 16 through the second flexible hinge 19b. The flexible hinge 19 is processed with an arc-shaped cut 192 by a wire cutting slow wire processing technology, and the rotation is realized by the deformation of the elastic material of the flexible hinge 19 itself;

[0052] See also Figure 1 , 6 As shown;

[0053] Preferably, a bearing platform 16 is formed on the lower surface of the macro-motion platform 2 , and the bearing platform 16 extends toward the macro-motion fixed platform 4 .

[0054] Specifically, a bearing platform 16 is integrally formed on the lower surface of the macro-motion platform 2, and the bearing platform 16 is arranged in parallel with the macro-motion platform 2 and extends toward the direction of the macro-motion fixed platform 4. The macro-motion platform 2 becomes the micro-motion fixed platform of the micro-motion platform B through the bearing platform 16. In this structure, by extending the bearing platform 16 toward the macro-motion fixed platform 4, it is beneficial to make the top of the macro-motion platform A and the bottom of the micro-motion platform B overlap, thereby ensuring the compactness of the structure;

[0055] See also Figure 1 , 6 As shown;

[0056] Preferably, the macro-motion platform 2 is constructed as a disc structure, and three supporting platforms 16 are evenly distributed circumferentially on its lower surface. Each supporting platform 16 is connected to two micro-motion driving legs 6, and the top ends of the two micro-motion driving legs 6 extend upward in an inclined manner in a manner away from each other.

[0057] See also Figure 1 , 3 As shown;

[0058] Preferably, a notch 26 for avoiding the micro-drive legs 6 is provided at the edge of the macro-motion platform 2, through which the micro-drive legs 6 can be embedded in the macro-motion platform 2, and the macro-motion platform A of the micro-motion platform B can be connected in series, further ensuring a compact structure and facilitating independent control;

[0059] See also Figure 6 As shown;

[0060] The micro-motion platform 1 and the carrying platform 16 are fixedly connected with a fixing block at the position corresponding to the micro-motion driving leg 6 , and are fixedly connected with the flexible hinge 19 through the fixing block.

[0061] Specifically, the fixing block includes a connecting block 17 and a supporting block 18;

[0062] The micro-motion platform 1 is fixedly connected with a connecting block 17 at the position corresponding to the micro-motion driving leg 6, and the carrying platform 16 is fixedly connected with a supporting block 18 at the position corresponding to the micro-motion driving leg 6. The micro-motion platform 1 is fixedly connected to the first flexible hinge 19a through the connecting block 17, and the carrying platform 16 is fixedly connected to the second flexible hinge 19b through the connecting block 17.

[0063] See also Figure 7-9 As shown;

[0064] Preferably, the micro-drive leg 6 includes a fixed support 23, a flexible bracket 20 fixedly connected to one side of the fixed support 23, and a ball screw 22 arranged inside the fixed support 23;

[0065] The flexible bracket 20 is fixedly connected to the flexible hinge 19, and a flexible lever 201 perpendicular to the ball screw 22 is provided in the middle of the flexible bracket 20, and a second screw nut 21 screw-driven with the ball screw 22 is fixedly connected at the lower part of the flexible lever 201, and the second screw nut 21 is slidably connected to the fixed support 23 through a guide rod 232;

[0066] A servo motor 25 is also fixedly connected inside the fixed support 23 , and the servo motor 25 is connected to the ball screw 22 via a planetary reducer 24 .

[0067] Specifically, in this structure, the micro-motion platform B is the key to achieve high-precision adjustment. The micro-motion platform B adopts a six-degree-of-freedom parallel mechanism. A bearing platform 16 is formed at the lower part of the macro-motion platform 2, and the bearing platform 16 and the macro-motion platform 2 are an integrated structure. Six micro-motion driving legs 6 are connected between the bearing platform 16 and the micro-motion platform 1 of the micro-motion platform B, so that the macro-motion platform 2 constitutes the micro-motion fixed platform of the micro-motion platform B;

[0068] See also Figure 8As shown, the micro-drive leg 6 includes a first flexible hinge 19a, a flexible bracket 20, a second screw nut 21, a ball screw 22, a fixed support 23, a planetary reducer 24, a servo motor 25, and a second flexible hinge 19b;

[0069] A motor housing 231 is fixedly connected to one side of the fixed support 23, and a flexible support 20 is fixedly connected to the other side. The first flexible hinge 19a is connected to the flexible support 20, and the second flexible hinge 19b is fixedly connected to the motor housing 231. A servo motor 25 is fixedly connected inside the motor housing 231. The servo motor 25 is connected to a ball screw 22 that penetrates the fixed support 23 through a planetary reducer 24.

[0070] See also Figure 7-8 As shown, the projection of the flexible bracket 20 on the plumb plane is an H-shaped structure, the horizontal section of the H-shaped structure is the flexible lever 201, and the two vertical sections of the H-shaped structure located above the flexible lever 201 extend obliquely upward, so that the flexible bracket 20 forms an H-shaped structure;

[0071] The top of the H-shaped structure is connected to the top plate 202, the length of the top plate 202 is less than the length of the flexible lever 201, and the top plate 202 forms an isosceles trapezoid at the top of the flexible bracket 20, thereby improving the overall structural strength of the flexible bracket 20. At the same time, when the flexible lever 201 is pushed by the second lead screw nut 21, it is convenient to transmit force. The top plate 202 is fixedly connected to the first flexible hinge 19a, and the side of the flexible lever 201 away from the top plate 202 is fixedly connected with the second lead screw nut 21 through a cross beam. The second lead screw nut 21 is spirally driven with the ball screw 22, and the two vertical sections of the H-shaped structure at the bottom end of the flexible bracket 20 are fixedly connected to the fixed support 23;

[0072] When fine-tuning the macro-micro parallel adjustment platform, the deformation movement between the flexible hinge 19 and the flexible lever 201 occurs, and the servo motor 25 rotates to drive the ball screw 22 to move and transmit with the second screw nut 21. After the ball screw 22 is fed, the flexible lever 201 of the flexible bracket 20 and the side wall connecting the top plate 202 and the flexible lever 201 are greatly deformed. The first flexible hinge 19a rotates by virtue of the deformation of the arc-shaped cutout 192. When it is subjected to lateral force or torque, it can realize two-degree-of-freedom rotation, so that the whole micro-motion platform 1 produces a small deformation when micro-moving up and down. By controlling the length of the micro-motion drive leg 6, the macro-micro parallel adjustment platform is fine-tuned.

[0073] When the flexible lever 201 is pushed by the second lead screw nut 21 , the ratio of the displacement of the second lead screw nut 21 to the deformation of the upper surface of the flexible lever 201 is as high as 100:1, so that the micro-drive leg has a nanometer-level resolution.

[0074] See also Figure 8 , 9As shown;

[0075] The flexible hinge 19 has a sleeve portion 191 in the middle, and the sleeve portion 191 is cross-arranged with two groups of cutouts, each of which has two arcuate cutouts 192 processed by wire cutting technology, and the two arcuate cutouts 192 extend symmetrically and obliquely toward the central axis of the sleeve.

[0076] For details, see Fig. 9 As shown, the flexible hinge 19 includes two connecting plates arranged in a cross shape, and is fixedly connected to the connecting block 17 and the flexible bracket 20, and the support block 18 and the motor housing 231 through the connecting plates. A shaft sleeve portion 191 is fixedly connected between the two connecting plates, and an arc-shaped cutout 192 extending obliquely toward the central axis of the shaft sleeve is processed at the end of the shaft sleeve portion 191 by a wire cutting process. The two arc-shaped cutouts 192 are symmetrically distributed on both sides of the central axis of the shaft sleeve portion 191 as a group, and the cross-shaped form of the two groups of cutouts is in the same direction as the cross-shaped form of the connecting plates;

[0077] When the flexible hinge 19 is transmitting, the flexible hinge 19 rotates by deforming its own elastic material, and there is no gap or friction in the rotation process (that is, the gap of the flexible hinge 19 itself through the arc-shaped cutout 192 ensures that it does not generate friction when rotating).

[0078] See also Figure 4 , 5 As shown;

[0079] Preferably, the macro-dynamic driving leg 5 is a retractable leg, and both ends of the macro-dynamic driving leg 5 are connected with an offset hinge 3, and are connected to the macro-dynamic moving platform 2 and the macro-dynamic fixed platform 4 through the offset hinge 3.

[0080] Preferably, the macro-dynamic driving leg 5 comprises a body, an end cover 7 mounted at one end of the body and connected to the offset hinge 3, and a movable leg 14 sleeved on the outside of the body;

[0081] The main body is provided with a torque motor 10 and a planetary ball screw 13, and a screw support bearing 12 supporting the planetary ball screw 13, and a harmonic reducer 11 is connected between the torque motor 10 and the planetary ball screw 13;

[0082] The end cover 7 is located inside the body and is fixedly connected to a multi-turn absolute encoder 9;

[0083] A connecting leg 141 is fixedly connected to the inside of the movable leg 14 away from the main body end. The connecting leg 141 is spirally driven with the free end of the planetary ball screw 13 with large load and small stroke through the first screw nut 142.

[0084] Specifically, in this structure, the macro-dynamic driving leg 5 is a large-load-bearing retractable leg. Under the closed-loop control of the multi-turn absolute encoder 9, the macro-dynamic driving leg 5 can have a high load capacity and micron-level resolution through the reduction transmission of the harmonic reducer 11.

[0085] When fine-tuning the macro-micro parallel adjustment platform, the torque motor 10 outputs the rotation speed through the harmonic reducer 11, the output shaft of the torque motor 10 is connected to the planetary ball screw 13 through the harmonic reducer 11, the driving end of the planetary ball screw 13 is supported by the screw support bearing 12, the free end of the planetary ball screw 13 is spirally transmitted with the first screw nut 142 of the connecting leg 141, and the connecting leg 141 is driven to move during the rotation of the planetary ball screw 13, so that the macro-dynamic driving leg 5 is extended and retracted.

[0086] In the above technical scheme, the present invention provides a six-degree-of-freedom high-precision macro-micro parallel adjustment platform. The present invention adopts two modes, macro-motion and micro-motion, to realize the precision pointing function of six degrees of freedom in space. It has the advantages of large working space, strong carrying capacity, high precision and independent control. Moreover, it has high use value and broad application prospects, and can be applied to the beneficial effects in the technical fields of telescope posture correction, high-precision CNC machine tools, optoelectronic packaging, etc.

[0087] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform, comprising: A macro-motion platform A, comprising a macro-motion platform (2), a macro-motion fixed platform (4) arranged in parallel below the macro-motion platform (2), and six macro-motion driving legs (5) connected between the macro-motion platform (2) and the macro-motion fixed platform (4), characterized in that: A micro-motion platform B, which is arranged on the upper part of the macro-motion platform A; The micro-motion platform B comprises a micro-motion platform (1) arranged in parallel above the macro-motion platform (2); Wherein, a bearing platform (16) parallel to the macro-motion platform (2) is formed at the lower part of the macro-motion platform (2), and six micro-motion driving legs (6) are connected between the bearing platform (16) and the micro-motion platform (1), so that the macro-motion platform (2) forms a micro-motion fixed platform of the micro-motion platform B; Wherein, the end of each of the micro-motion driving legs (6) is connected to the micro-motion platform (1) and the bearing platform (16) via a flexible hinge (19).

2. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 1, characterized in that; The bearing platform (16) is formed on the lower surface of the macro-motion platform (2), and the bearing platform (16) extends in the direction of the macro-motion fixed platform (4).

3. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 2, characterized in that; The macro-motion platform (2) is constructed as a disc structure, and three bearing platforms (16) are evenly distributed in the circumferential direction on the lower surface thereof, and each bearing platform (16) is connected to two micro-motion driving legs (6).

4. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 3, characterized in that; A notch (26) is provided at the edge of the macro-motion platform (2) for evading the micro-motion driving legs (6).

5. The six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 1, characterized in that ； The micro-motion platform (1) and the bearing platform (16) are fixedly connected with a fixing block at a position corresponding to the micro-motion driving leg (6), and the fixing block is fixedly connected to the flexible hinge (19).

6. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to any one of claims 1 to 5, characterized in that ； The micro-motion driving leg (6) comprises a fixed support (23), a flexible bracket (20) fixedly connected to one side of the fixed support (23), and a ball screw (22) arranged inside the fixed support (23); The flexible bracket (20) is fixedly connected to the flexible hinge (19), and a flexible lever (201) perpendicular to the ball screw (22) is provided in the middle of the flexible bracket (20), and a second screw nut (21) screw-driven with the ball screw (22) is fixedly connected to the lower part of the flexible lever (201), and the second screw nut (21) is slidably connected to the fixed support (23) via a guide rod (232); A servo motor (25) is also fixedly connected inside the fixed support (23), and the servo motor (25) is connected to the ball screw (22) via a planetary reducer (24).

7. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 6, It is characterized by: The ratio of the displacement of the second lead screw nut (21) to the deformation of the upper surface of the flexible lever (201) is 100:

1.

8. The six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 1, It is characterized by: The flexible hinge (19) has a shaft sleeve portion (191) in the middle, and the shaft sleeve portion (191) is provided with two groups of cutouts arranged in a cross shape, each group of cutouts has two arc-shaped cutouts (192), and the two arc-shaped cutouts (192) extend symmetrically and obliquely toward the central axis of the shaft sleeve portion (191).

9. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 1, It is characterized by: The macro-motion driving legs (5) are telescopic legs, and the ends of the macro-motion driving legs (5) are connected to the macro-motion moving platform (2) and the macro-motion fixed platform (4) via offset hinges (3).

10. A six-degree-of-freedom high-precision macro-micro parallel adjustment platform according to claim 9, It is characterized by: The macro-dynamic driving leg (5) comprises a body, an end cover (7) mounted at one end of the body and connected to the offset hinge (3), and a movable leg (14) sleeved on the outside of the body; A torque motor (10) and a planetary ball screw (13), as well as a screw support bearing (12) supporting the planetary ball screw (13) are installed inside the body, and a harmonic reducer (11) is connected between the torque motor (10) and the planetary ball screw (13); The end cover (7) is located inside the body and is fixedly connected to a multi-turn absolute encoder (9); The movable leg (14) is fixedly connected with a connecting leg (141) at the inner part away from the main body end, and the connecting leg (141) is screw-driven with the free end of the planetary ball screw (13) through a first screw nut (142).

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