A metal ion pollution sampling and detecting device

Abstract

This invention discloses a metal ion pollution sampling and detection device, specifically relating to the technical field of detection devices. It includes multiple sampling tubes, a sampling pump, sampling bottles, and an anti-backflow bottle. The bottom ends of the sampling pump, sampling bottles, and anti-backflow bottle are flush. The sampling pump is connected to the sampling bottle via the sampling tube, and the sampling bottle is connected to the anti-backflow bottle via the sampling tube. A connecting cavity adapter is fixedly installed at the end of the sampling tube furthest from the sampling pump. The key technical feature is that a check valve is fixedly connected between the sampling tubes. A sliding guide plate is slidably installed inside the check valve, and multiple sets of vertical rods are installed inside the check valve to interlock with the sliding guide plate. When airflow passes through the check valve, it causes the position of the sliding guide plate to change, thereby changing the connection or sealing state inside the check valve, thus achieving the purpose of diversion and preventing gas backflow.

Description

Technical Field

[0001] This invention relates to the field of detection device technology, and more specifically, to a metal ion pollution sampling and detection device. Background Technology

[0002] When a wafer is removed from the equipment cavity, its surface becomes contaminated with metal ions due to the reactions within the cavity. A VPD (Vacuum-Drilling Processing) instrument is used to etch the wafer surface, collecting the etching liquid for metal ion analysis using an ICPMS (Inductively Coupled Plasma Analysis) system. This allows for the determination of metal ion contamination within the equipment cavity. However, current methods for collecting metal ions from wafers have limitations in detecting metal ion contamination. They cannot accurately reflect the contamination levels within the cavity. One method involves directly passing a nitric acid solution through the gas inside the equipment cavity before sampling. However, in practice, the nitric acid solution can backflow into the equipment cavity, causing contamination. Furthermore, when the gas flow is drawn out from inside the equipment cavity, some backflow can occur. Summary of the Invention

[0003] To overcome the aforementioned deficiencies of the prior art, embodiments of the present invention provide a metal ion pollution sampling and detection device. This device features a check valve fixedly connected between sampling tubes, a sliding guide plate slidably installed inside the check valve, and multiple sets of vertical rods that interlock with the sliding guide plate inside the check valve. When airflow passes through the check valve, it causes the position of the sliding guide plate to change, thereby altering the connection or sealing state inside the check valve. This achieves the purpose of guiding flow and preventing gas backflow, thus solving the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a metal ion pollution sampling and detection device, comprising multiple sets of sampling tubes, a sampling pump, a sampling bottle, and an anti-backflow bottle; the bottom ends of the sampling pump, the sampling bottle, and the anti-backflow bottle are flush; the sampling pump is connected to the sampling bottle through the sampling tube, and the sampling bottle is connected to the anti-backflow bottle through the sampling tube; an adapter for connecting a cavity is fixedly installed at the end of the sampling tube away from the sampling pump.

[0005] A check valve is inserted into the surface of the sampling tube. The check valve is a hollow cavity that runs vertically through the tube. A set of sliding drainage plates is slidably installed inside the check valve. Multiple sets of vertical rods are fixedly installed at the bottom of the inner wall of the check valve. The vertical rods are inserted into the sliding drainage plates. The surface of the sliding drainage plates has drainage holes with the same outer diameter as the vertical rods. The drainage holes are vertically aligned with the vertical rods.

[0006] Furthermore, a side wall baffle is fixedly installed inside the check valve, the side wall baffle and the sliding guide plate are arranged to abut against each other, and the vertical insertion rod is flush with the top of the sliding guide plate.

[0007] Furthermore, a circular fixing plate is fixedly installed on the inner wall of the anti-backflow bottle, and a sampling connection tank is mounted on the upper end of the circular fixing plate. The sampling connection tank is connected to the check valve through the sampling tube.

[0008] Furthermore, a vertical connecting rod is fixedly installed at the top of the circular fixing plate, and a second sampling connecting container is fixedly installed on the surface of the vertical connecting rod. The second sampling connecting container is connected to the sampling bottle through the sampling tube.

[0009] Furthermore, a connecting pipe is connected between the second sampling connection tank and the first sampling connection tank, and multiple sets of through holes are formed on the surface of the connecting pipe.

[0010] Furthermore, a second float is slidably installed inside the connecting pipe, and multiple sets of guide plates are fixedly installed between the connecting pipe and the vertical connecting rod. The inner cavity enclosed by the multiple sets of guide plates is the outer diameter of the second float, and a first hinged rotating rod is fixedly installed at the top of the second float.

[0011] Furthermore, the top of the vertical connecting rod has a central cavity with its opening facing upwards, a float is fitted into the central cavity, and a vertical abutment is fixedly installed on the top of the float.

[0012] Furthermore, a set of second hinged rotating rods is hinged to the top end of the vertical connecting rod. The first hinged rotating rod passes through one end of the vertical connecting rod and is rotatably installed inside the second hinged rotating rod. The vertical abutment rod and the float are arranged in abutting position.

[0013] The technical effects and advantages of this invention are as follows:

[0014] 1) The present invention has a check valve fixedly connected between sampling tubes, a sliding guide plate slidably installed inside the check valve, and multiple sets of vertical rods that interlock with the sliding guide plate inside the check valve. When the airflow flows through the inside of the check valve, it causes the position of the sliding guide plate to change, thereby changing the connection or sealing state inside the check valve, thereby achieving the purpose of guiding flow and preventing gas backflow.

[0015] 2) This invention installs sampling connection tank two and sampling connection tank one inside the anti-backflow bottle, and the sampling connection tank two and sampling connection tank one are connected by a connecting pipe. A float two is slidably installed inside the connecting pipe. The purpose of diverting and backflowing nitric acid solution is achieved by the different positions of the float two. At the same time, the position of the float two moves in conjunction with the hinged rotating rod to deflect. The backflow of nitric acid solution can be determined by observing the deflection of the hinged rotating rod. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the overall structure of a metal ion pollution sampling and detection device provided in an embodiment of the present invention.

[0018] Figure 2 This is a full sectional view of the overall structure of a metal ion pollution sampling and detection device provided in an embodiment of the present invention.

[0019] Figure 3 This is an enlarged view of part A in the overall structural schematic diagram of a metal ion pollution sampling and detection device provided in an embodiment of the present invention.

[0020] Figure 4 This is an enlarged view of part B in the overall cross-sectional view of the metal ion pollution sampling and detection device provided in an embodiment of the present invention.

[0021] The reference numerals in the attached figures are explained as follows:

[0022] 1. Connecting cavity adapter; 2. Sampling tube; 3. Check valve; 4. Anti-backflow bottle; 5. Float one; 6. Sampling bottle; 7. Vertical support rod; 8. Sampling pump; 9. Guide plate; 10. Float two; 11. Sampling connection tank two; 12. Sampling connection tank one; 13. Circular fixing plate; 14. Sliding drainage plate; 15. Side wall baffle; 16. Vertical insertion rod; 17. Vertical connecting rod; 18. First hinged rotating rod; 19. Connecting pipe; 20. Second hinged rotating rod. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0025] See Figure 1-4 One embodiment of the present invention provides a metal ion pollution sampling and detection device, including multiple sets of sampling tubes 2, a sampling pump 8, sampling bottles 6, and an anti-backflow bottle 4, as shown below. Figure 1 As shown, the bottoms of the sampling pump 8, sampling bottle 6, and anti-backflow bottle 4 are flush, and both sampling bottle 6 and anti-backflow bottle 4 are made of glass, allowing staff to easily observe the gas flow inside them. The sampling pump 8 is connected to the sampling bottle 6 via sampling tube 2, and the sampling bottle 6 is connected to the anti-backflow bottle 4 via sampling tube 2. A connecting chamber adapter 1 is fixedly installed at the end of the sampling tube 2 furthest from the sampling pump 8. Figure 4 As shown, a check valve 3 is inserted into the surface of the sampling tube 2. The check valve 3 is a hollow cavity that runs vertically through the tube. A set of sliding drainage plates 14 is slidably installed inside the check valve 3. Multiple sets of vertical rods 16 are fixedly installed at the bottom of the inner wall of the check valve 3. The vertical rods 16 are inserted into the sliding drainage plates 14. The surface of the sliding drainage plates 14 has drainage holes with the same outer diameter as the vertical rods 16. The positions of the drainage holes and the vertical rods 16 correspond vertically.

[0026] In practice, when gas containing metal ions enters the pipeline through the connecting chamber adapter 1, the float 5 causes the airflow to move in a directional direction. The sequence is: connecting chamber adapter 1 - sampling tube 2 - check valve 3 - sampling tube 2 - anti-backflow bottle 4 - sampling tube 2 - sampling bottle 6 - sampling pump 8. When the airflow passes through the inner cavity of the check valve 3, the airflow washes the surface of the sliding guide plate 14, causing the sliding guide plate 14 to rise. The vertical insertion rod 16 disengages from the sliding guide plate 14, and the airflow flows from the drainage hole to the interior of the sampling tube 2 connected to the check valve 3. In addition, when the airflow reverses or the internal pressure of the check valve 3 changes, the sliding guide plate 14 falls, and the vertical insertion rod 16 is re-inserted into the interior of the sliding guide plate 14 to prevent backflow. The sampling bottle 6 contains nitric acid solution. The gas containing metal ions entering the sampling bottle 6 mixes with the nitric acid solution, and the metal ion content in the solution is detected by an ICPMS instrument.

[0027] In this embodiment, as Figure 4 As shown, a side wall baffle 15 is fixedly installed inside the check valve 3. The side wall baffle 15 and the sliding guide plate 14 are arranged to abut against each other, and the vertical rod 16 is flush with the top of the sliding guide plate 14.

[0028] In this embodiment, a circular fixing plate 13 is fixedly installed on the inner wall of the anti-backflow bottle 4. A sampling connection container 12 is mounted on the upper end of the circular fixing plate 13. The sampling connection container 12 is connected to the check valve 3 via the sampling tube 2. Furthermore, as... Figure 2 As shown, a vertical connecting rod 17 is fixedly installed on the top of the circular fixing plate 13, and a sampling connecting can 2 11 is fixedly installed on the surface of the vertical connecting rod 17. The sampling connecting can 2 11 is connected to the sampling bottle 6 through the sampling tube 2.

[0029] In this embodiment, as Figure 3 As shown, a connecting pipe 19 connects sampling connecting tank 2 11 and sampling connecting tank 12. Multiple through holes are formed on the surface of the connecting pipe 19 to guide airflow from the interior of sampling connecting tank 12 into the interior of sampling connecting tank 2 11. Furthermore, a float 2 10 is slidably installed inside the connecting pipe 19. Multiple guide plates 9 are fixedly installed between the connecting pipe 19 and the vertical connecting rod 17. The inner cavity formed by the guide plates 9 is the same size as the outer diameter of the float 2 10. A hinged rotating rod 18 is fixedly installed at the top of the float 2 10. Additionally, a central cavity with its opening facing upwards is formed at the top of the vertical connecting rod 17. A float 1 5 is fitted into this central cavity, and a vertical abutment rod 7 is fixedly installed at the top of the float 1 5.

[0030] In this embodiment, as Figure 3As shown, a set of hinged rotating rods 20 are hinged to the top of the vertical connecting rod 17. The hinged rotating rod 18 passes through one end of the vertical connecting rod 17 and is rotatably installed inside the hinged rotating rod 20. The vertical abutment rod 7 and the hinged rotating rod 20 are arranged to abut against each other.

[0031] In practice, when the airflow is flowing normally, the airflow enters the interior of the second sampling connection tank 11 through the connecting pipe 19 from the first sampling connection tank 12. The airflow impacts the first hinged rotating rod 18 and moves it upward. At this time, the second hinged rotating rod 20 and the top of the vertical connecting rod 17 are at a certain angle. When the airflow reverses, the nitric acid solution contained in the sampling bottle 6 flows into the inner cavity of the second sampling connection tank 11. Due to gravity, it falls vertically into the central cavity of the vertical abutment rod 7. The float 5 floats upward, and the vertical abutment rod 7 at the top of the float 5 abuts against the second hinged rotating rod 20, causing the first hinged rotating rod 18 to slide down. The float 10 slides down and covers the through hole on the surface of the connecting pipe 19, forming a sealed cavity between the second sampling connection tank 11 and the sampling bottle 6 to prevent the nitric acid solution from flowing back. At the same time, the extension of the vertical abutment rod 7 from the inside of the vertical connecting rod 17 or the deflection of the second hinged rotating rod 20 can be used to determine whether the nitric acid solution is flowing back.

[0032] The advantages of this invention lie in the fixed connection of a check valve between the sampling tubes, the sliding installation of a sliding guide plate inside the check valve, and the multiple sets of vertical rods that interlock with the sliding guide plate inside the check valve. When the gas flows through the check valve, it causes the position of the sliding guide plate to change, thereby changing the connection or sealing state inside the check valve, thus achieving the purpose of drainage and preventing gas backflow. Furthermore, this invention installs sampling connection tank two and sampling connection tank one inside the anti-backflow bottle, and the two are connected by a connecting pipe. A float two is slidably installed inside the connecting pipe. The different positions of the float two achieve the purpose of drainage and preventing nitric acid solution backflow. Simultaneously, the movement of the float two is linked to the deflection of a hinged rotating rod, and the deflection of the hinged rotating rod can be used to determine whether nitric acid solution backflow has occurred.

[0033] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of the present invention.

Claims

1. A metal ion pollution sampling and detection device, characterized in that, It includes multiple sets of sampling tubes, a sampling pump, sampling bottles, and an anti-backflow bottle; the bottom ends of the sampling pump, the sampling bottle, and the anti-backflow bottle are flush; the sampling pump is connected to the sampling bottle through the sampling tube; the sampling bottle is connected to the anti-backflow bottle through the sampling tube; and an adapter for connecting the cavity is fixedly installed at the end of the sampling tube away from the sampling pump. The sampling tube is fitted with a check valve, which is a hollow cavity extending vertically. A set of sliding guide plates is slidably installed inside the check valve. Multiple sets of vertical rods are fixedly installed at the bottom of the inner wall of the check valve. The vertical rods are inserted into the sliding guide plates, and the surface of the sliding guide plates has guide holes with the same outer diameter as the vertical rods. The positions of the guide holes and the vertical rods correspond vertically. A circular fixing plate is fixedly installed on the inner wall of the anti-backflow bottle. A sampling connection canister one is mounted on the upper end of the circular fixing plate. The sampling connection canister one is connected to the check valve through the sampling tube. A vertical connecting rod is fixedly installed on the top of the circular fixing plate. A sampling connection canister two is fixedly installed on the surface of the vertical connecting rod. The sampling connection canister two is connected to the sampling bottle through the sampling tube. A connecting pipe connects the sampling connection canister two and the sampling connection canister one. Multiple sets of through holes are opened on the surface of the connecting pipe. A float two is slidably installed inside the connecting pipe. A first hinged rotating rod is fixedly installed on the top of the float two. Multiple sets of guide plates are fixedly installed between the connecting pipe and the vertical connecting rod. The inner cavity enclosed by the multiple sets of guide plates is the outer diameter of the float two. The float two slides down to cover the through holes.

2. The metal ion pollution sampling and detection device according to claim 1, characterized in that, The check valve has a side wall baffle fixedly installed inside, and the side wall baffle is abutted against the sliding guide plate, and the vertical rod is flush with the top of the sliding guide plate.

3. The metal ion pollution sampling and detection device according to claim 1, characterized in that, The top of the vertical connecting rod has a central cavity with its opening facing upwards. A float is fitted into the central cavity, and a vertical abutment is fixedly installed at the top of the float.

4. The metal ion pollution sampling and detection device according to claim 3, characterized in that, The top end of the vertical connecting rod is hinged to a set of second hinged rotating rods. The first hinged rotating rod passes through one end of the vertical connecting rod and is rotatably installed inside the second hinged rotating rod. The vertical abutment rod and the float are arranged to abut against each other.

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