Liquid lens with buffer structure and preparation method and application thereof

Abstract

The application provides a liquid lens with a buffer structure and a preparation method and application thereof, the liquid lens comprises an upper electrode, an assembly hole is arranged in the upper electrode, a first light-transmitting plate and a buffer structure are arranged in the assembly hole; a lower electrode, a through hole is arranged in the lower electrode, a second light-transmitting plate is arranged in the through hole; a sealing ring is arranged between the upper electrode and the lower electrode and is used for sealing liquid; by arranging the buffer structure in the assembly hole of the upper electrode, the buffer structure can play a buffering role when the liquid is expanded due to temperature influence, the structural stability and service life of the lens are greatly enhanced, meanwhile, the preparation process and structure of the liquid lens are very simple, the production cost of the liquid lens can be effectively reduced, the manufacturing precision is increased, consistency is improved, and the liquid lens is more suitable for industrialized batch production.

Description

Technical Field

[0001] This invention belongs to the field of liquid lens technology, specifically relating to a liquid lens with a buffer structure, its preparation method, and its application. Background Technology

[0002] Liquid lenses use a liquid as a lens, changing the focal length by altering the curvature of the liquid. Currently, the most mature liquid lenses are variable-focus lenses utilizing the principle of electrowetting on a dielectric (EWOD). These lenses can change the shape of a liquid droplet by applying an external voltage, thereby changing its focal length. This allows camera phones to achieve autofocus and zoom without the need for mechanical components. The principle of electrowetting involves two immiscible, transparent liquids of equal density. Changing the voltage alters the contact angle at the interface between the two liquids, thus changing the curvature of the liquid surface. Due to the difference in refractive index, focusing or zooming is achieved. Compared to traditional voice coil motor (VAC) focusing or zoom systems, liquid lenses offer advantages such as smaller size, faster response speed, and a wider zoom range, enabling true optical zoom in handheld electronic devices. Using liquid lenses allows for smooth, continuous optical zoom, significantly reducing the size of handheld electronic devices and achieving true optical zoom imaging, thus improving the camera experience in the handheld electronic device industry.

[0003] Currently, there are many studies and reports on liquid lenses. CN214067421U discloses a liquid lens, including: a first electrode plate, a second electrode plate, and a conductive liquid and a non-conductive liquid disposed between the first electrode plate and the second electrode plate. It also includes a first heating electrode electrically connected to the conductive liquid. The liquid lens of this invention, by setting a heating electrode within the liquid lens, can apply electricity to the liquid through a lead-out electrical circuit to heat it, achieving temperature compensation and effective temperature regulation. This liquid lens does not increase the volume of the liquid lens and achieves temperature compensation faster with less energy consumption.

[0004] CN112596231A discloses a liquid lens and its fabrication method, as well as an optical system. The liquid lens includes at least: a housing having an assembly hole, in which a first light-transmitting plate is disposed; a mounting ring, which is mounted in the assembly hole of the housing; an electrode, which is mounted in an annular hole of the mounting ring for applying voltage; a through hole in the electrode, in which a second light-transmitting plate is mounted; and a portion of the surface of the housing, a portion of the surface of the mounting ring, a portion of the surface of the electrode, the first light-transmitting plate, and the second light-transmitting plate constitute the cavity wall of a closed cavity in the liquid lens for storing optical liquid. The liquid lens provided by this invention can seal the gap between the electrode and the housing using the mounting ring, thereby preventing leakage of the liquid in the liquid lens in harsh environments.

[0005] However, existing liquid lenses, including the two patents mentioned above, suffer from performance issues due to thermal expansion and contraction of the liquid. To ensure the reliability of liquid lenses, complex configurations are often used to avoid these problems. However, this not only increases the manufacturing difficulty of liquid lenses but also increases product costs, reduces accuracy, worsens product consistency, and lowers image quality. In addition, existing liquid lens products are relatively thick, making them difficult to apply in the consumer electronics field.

[0006] Therefore, developing a liquid lens that is highly reliable, has a long lifespan, a simple structure, and low manufacturing cost is a technical problem that urgently needs to be solved by those in this field. Summary of the Invention

[0007] To address the shortcomings of existing technologies, the present invention aims to provide a liquid lens with a buffer structure, its preparation method, and its application. The liquid lens, by incorporating a buffer structure in the assembly hole, can buffer the expansion of the optical liquid within the lens, greatly enhancing its reliability. Furthermore, the liquid lens with the buffer structure has a simple overall structure, a simple manufacturing process, low cost, and excellent sealing effect, making it suitable for industrial mass production.

[0008] To achieve this objective, the present invention employs the following technical solution:

[0009] In a first aspect, the present invention provides a liquid lens having a buffer structure, the liquid lens comprising:

[0010] The upper electrode has an assembly hole, and the assembly hole has a first light-transmitting plate and a buffer structure.

[0011] The lower electrode has a through hole, and a second light-transmitting plate is disposed in the through hole;

[0012] A sealing ring is disposed between the upper electrode and the lower electrode to seal the liquid.

[0013] A portion of the surface of the upper electrode, a portion of the surface of the sealing ring, a portion of the surface of the lower electrode, the first light-transmitting plate, and the second light-transmitting plate constitute the cavity wall of the closed cavity in the liquid lens for storing optical liquid; the light beam incident into the closed cavity passes through the first light-transmitting plate and the second light-transmitting plate respectively.

[0014] The liquid lens provided by this invention includes an upper electrode. The upper electrode has a simple, vertical structure and is formed by stamping, thus exhibiting high compressive strength and being less prone to damage such as cracks or openings. An assembly hole is provided in the upper electrode, and a first light-transmitting plate and a buffer structure are disposed within the assembly hole. By providing the buffer structure in the assembly hole, the buffer structure can buffer the expansion of the liquid inside the lens due to temperature changes, greatly enhancing the stability and service life of the lens structure. Furthermore, the manufacturing process of providing the buffer structure in the assembly hole is very simple, resulting in a simpler liquid lens structure. This effectively reduces the production cost of the liquid lens, increases its manufacturing precision and consistency, and makes it more suitable for industrial mass production.

[0015] The liquid lens provided by the present invention further includes a lower electrode and a sealing ring. The lower electrode is provided with a through hole, and a second light-transmitting plate is disposed in the through hole. The sealing ring is located between the upper electrode and the lower electrode and serves to seal the liquid. A portion of the surface of the upper electrode, a portion of the surface of the sealing ring, a portion of the surface of the lower electrode, the first light-transmitting plate, and the second light-transmitting plate constitute the cavity wall of the closed cavity in the liquid lens for storing optical liquid. The light beam incident into the closed cavity passes through the first light-transmitting plate and the second light-transmitting plate respectively.

[0016] Preferably, the material of the upper electrode includes any one of iron, iron alloy, copper, copper alloy, zinc, zinc alloy, aluminum or aluminum alloy, and the upper electrode can be processed by CNC machine tool, sheet metal or mold forming.

[0017] Preferably, the material of the lower electrode includes a metallic material.

[0018] Preferably, the metallic material includes any one of zinc, copper, chromium, or aluminum.

[0019] Preferably, a metal oxide, such as Al2O3 or Ta2O5, can be deposited on the surface of the metal material as an adhesive layer. This can increase the adhesion between the hydrophobic coating and the substrate, and also serve as an insulating layer to improve the breakdown voltage of the liquid lens. The adhesive layer can be prepared by physical vapor deposition or vacuum magnetron sputtering deposition.

[0020] Preferably, the material of the sealing ring includes any one or a combination of at least two of polytetrafluoroethylene, poly(p-xylene), or perfluorocyclic polymers.

[0021] Preferably, the first and second light-transmitting plates each independently comprise a glass plate or a polymethyl methacrylate plate, and the first and second light-transmitting plates are capable of transmitting visible light.

[0022] Preferably, the material of the buffer structure is an elastic material.

[0023] Preferably, the elastic material includes a photoresist material (ps, photo spacer).

[0024] Preferably, the buffer structure is disposed between the upper electrode and the first light-transmitting plate, or at both ends of the side of the first light-transmitting plate that contacts the optical liquid.

[0025] In this invention, the buffer structure is preferably located between the upper electrode and the first light-transmitting plate, or at both ends of the side of the first light-transmitting plate that contacts the optical liquid. This can more effectively play a buffering role and further improve the reliability of the liquid lens. It should be noted that the location of the buffer structure should not block the incident light beam.

[0026] In actual production, the cushioning material can be coated on the target location and then cured to form a cushioning structure.

[0027] Preferably, the buffer structure is continuously distributed in a ring on the same plane or is discontinuously and uniformly distributed in a ring.

[0028] In this invention, the buffer structure is preferably continuously distributed in a ring or discontinuously and uniformly distributed in a ring within the same plane. The inner diameter, outer diameter, and thickness of the continuously distributed ring are not specifically limited, and the inner diameter, outer diameter, distribution density, shape, and size of each discontinuous point of the discontinuously and uniformly distributed ring are not specifically limited. However, the position of the buffer structure should not block the incident light beam.

[0029] Preferably, the buffer structure is continuously distributed in a ring on the same plane, which makes the resulting liquid lens more stable.

[0030] Preferably, the contact surface between the lower electrode and the optical liquid is an inclined plane.

[0031] Preferably, the angle between the inclined surface and the second light-transmitting plate is less than 90° and greater than 0°, such as 10°, 20°, 30°, 40°, 50°, 60°, 70° or 80°.

[0032] Preferably, a dielectric film and a hydrophobic film are sequentially disposed on the contact surface between the lower electrode and the optical liquid. The hydrophobic film covers the dielectric film, and the dielectric film can prevent the lower electrode from being electrically broken down. The hydrophobic film is used to obtain a larger initial contact angle so that the hysteresis of the liquid lens is smaller.

[0033] Preferably, the dielectric film is made of any one or a combination of at least two of parylene, tantalum pentoxide, aluminum oxide, or silicon nitride.

[0034] Preferably, the material of the hydrophobic membrane includes fluorides.

[0035] Preferably, the optical liquid includes a conductive liquid and a non-conductive liquid, both of which are in contact with the surface of the lower electrode; the upper and lower electrodes are connected by voltage to establish a connection; when the power supply is not connected, the liquid interface between the conductive and non-conductive liquids forms a concave liquid surface, resulting in a negative optical power; as the power supply is connected and the voltage increases, the liquid interface forms a convex liquid surface, resulting in a positive optical power.

[0036] Preferably, a liquid interface is formed between the conductive liquid and the non-conductive liquid, the conductive liquid is in contact with the second light-transmitting plate, and the non-conductive liquid is in contact with the first light-transmitting plate.

[0037] Preferably, the conductive liquid comprises any one or a combination of at least two of alcohol, water, or salt solution.

[0038] Preferably, the non-conductive liquid comprises silicone oil and / or chlorobenzene.

[0039] In a second aspect, the present invention provides a method for preparing a liquid lens as described in the first aspect, the method comprising the following steps:

[0040] (1) Install the first light-transmitting plate in the mounting hole of the upper electrode, coat or nano-imprint buffer material at the target position, expose and develop, and dry to form a buffer structure; install the second light-transmitting plate in the through hole of the lower electrode;

[0041] (2) Connect the upper electrode, the lower electrode and the sealing ring, and fill with optical liquid to obtain the liquid lens.

[0042] Thirdly, the present invention provides an optical system comprising a liquid lens as described in the first aspect.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] This invention provides a liquid lens with a buffer structure. By setting a buffer structure in the assembly hole, the buffer structure can buffer the expansion of the liquid inside the lens due to temperature, greatly enhancing the stability and service life of the lens structure. At the same time, the manufacturing process of setting the buffer structure in the assembly hole is very simple, and the structure of the resulting liquid lens is also simpler, thereby effectively reducing the production cost of the liquid lens, increasing the manufacturing precision and consistency of the liquid lens, and making it more suitable for industrial mass production. Attached Figure Description

[0045] Figure 1 A schematic diagram of the overall structure of the liquid lens in the first specific embodiment of the present invention;

[0046] Figure 2 In accordance with Figure 1 A schematic diagram of the cross-sectional structure of the liquid lens obtained by cross-sectioning along the arrow.

[0047] Figure 3 A schematic diagram of the structure of the lower electrode and the optical liquid contact surface of the liquid lens provided by the present invention;

[0048] Figure 4 A schematic diagram of the overall structure of the liquid lens in the second specific embodiment of the present invention;

[0049] Figure 5 In accordance with Figure 4 A schematic diagram of the cross-sectional structure of the liquid lens obtained by cross-sectioning along the arrow.

[0050] Figure 6 A schematic diagram of the overall structure of the liquid lens in the third specific embodiment of the present invention;

[0051] Figure 7 In accordance with Figure 6 A schematic diagram of the cross-sectional structure of the liquid lens obtained by cross-sectioning along the arrow.

[0052] Figure 8 A schematic diagram of the overall structure of the liquid lens in the fourth specific embodiment of the present invention;

[0053] Figure 9 In accordance with Figure 8 A schematic diagram of the cross-sectional structure of the liquid lens obtained by cross-sectioning along the arrow.

[0054] Among them, 001-upper electrode, 002-buffer structure, 003-first light-transmitting plate, 004-sealing ring, 005-lower electrode, 051-dielectric film, 052-hydrophobic film, 006-second light-transmitting plate, 007-conductive liquid, and 008-non-conductive liquid. Detailed Implementation

[0055] The technical solution of the present invention will be further illustrated below through specific embodiments. Those skilled in the art should understand that the embodiments described are merely illustrative of the present invention and should not be construed as limiting the invention in any way.

[0056] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Although the illustrations only show components related to the present invention and are not drawn according to the actual number, shape and size of the components, the shape, quantity and proportion of each component can be arbitrarily changed in actual implementation, and the layout of the components may also be more complex.

[0057] In a first specific embodiment, the present invention provides a liquid lens with a buffer structure, such as... Figure 1 and Figure 2 As shown, where, Figure 1 This is a schematic diagram of the overall structure of a liquid lens. Figure 2 In accordance with Figure 1 A schematic diagram of the cross-sectional structure of the liquid lens obtained by cross-sectioning along the arrow; from Figure 1 and Figure 2 As can be seen, the liquid lens provided in this specific embodiment includes an upper electrode 001, a lower electrode 005, and a sealing ring 004;

[0058] In this specific embodiment, the upper electrode 001 is provided with an assembly hole, in which a first light-transmitting plate 003 and a buffer structure 002 are provided. The buffer structure 002 is provided on both sides of the first light-transmitting plate 003 and is continuously arranged in a ring structure. The lower electrode 005 is provided with a through hole, in which a second light-transmitting plate 006 is provided. The sealing ring 004 is provided between the upper electrode 001 and the lower electrode 005 for sealing the liquid. Partial surfaces of the upper electrode 001, partial surfaces of the sealing ring 004, partial surfaces of the lower electrode 005, the first light-transmitting plate 003, and the second light-transmitting plate 006 constitute the cavity wall of the closed cavity in the liquid lens for storing optical liquid. At the same time, the buffer structure 002 located on the surface of the first light-transmitting plate 003 is also in contact with the optical liquid, and the light beam incident into the closed cavity passes through the first light-transmitting plate 003 and the second light-transmitting plate 006 respectively.

[0059] For example, the material of the upper electrode 001 includes any one of iron, iron alloy, copper, copper alloy, zinc, zinc alloy, aluminum, or aluminum alloy; the material of the lower electrode 005 includes a metallic material, such as any one of zinc, copper, chromium, or aluminum; the material of the sealing ring 004 includes any one of polytetrafluoroethylene, parylene, or perfluorocyclic polymer; the first light-transmitting plate 003 and the second light-transmitting plate 006 each independently include a glass plate or a polymethyl methacrylate plate; and the material of the buffer structure 002 is an elastic material, such as PS material.

[0060] In a preferred embodiment, the contact surface between the lower electrode 005 and the optical liquid is an inclined plane, and the angle between the inclined plane and the second light-transmitting plate 006 is less than 90° and greater than 0°, and as shown... Figure 3 As shown, a dielectric film 051 and a hydrophobic film 052 are sequentially disposed on the contact surface between the lower electrode 005 and the optical liquid; exemplarily, the material of the dielectric film 051 includes any one or a combination of at least two of parylene, tantalum pentoxide, alumina or silicon nitride, and the material of the hydrophobic film 052 includes fluorides.

[0061] In a preferred embodiment, the optical liquid includes a conductive liquid 007 and a non-conductive liquid 008, both of which are in contact with the lower electrode 005. For example, the conductive liquid includes any one or a combination of at least two of alcohol, water, or salt solution, and the non-conductive liquid includes silicone oil and / or chlorobenzene.

[0062] When the optical liquid in the closed cavity of the liquid lens provided in this specific embodiment undergoes thermal expansion and contraction, compressing the cavity wall, the buffer structure 002 can play a buffering role, consuming the compressive force generated by the expansion of the optical liquid, thereby enhancing the structural reliability and service life of the liquid lens. Moreover, during the production process, it is only necessary to coat the surface of the first light-transmitting plate 003 with buffer material and then cure it, making the manufacturing process very simple. The resulting liquid lens structure is also very simple, greatly reducing the manufacturing difficulty and production cost of the liquid lens, while improving manufacturing precision and consistency, making it suitable for mass industrial production.

[0063] In a second specific embodiment, the present invention provides a liquid lens with a buffer structure, such as... Figure 4 and Figure 5 As shown, the only difference from the first specific embodiment is that the buffer structure 002 is disposed on the upper electrode 001 and is located between the upper electrode 001 and the first light-transmitting plate 003. Other structures, material selections and preparation processes are the same as those in the first specific embodiment.

[0064] In a third specific embodiment, the present invention provides a liquid lens with a buffer structure, such as... Figure 6 and Figure 7 As shown, the only difference from the first specific embodiment is that the buffer structure 002 is not discontinuously arranged on the first light-transmitting plate 001, but is a dot array structure. The other structures, material selections and preparation processes are the same as those in the first specific embodiment.

[0065] In a fourth specific embodiment, the present invention provides a liquid lens with a buffer structure, such as... Figure 8 and Figure 9 As shown, the only difference from the first specific embodiment is that the buffer structure 002 is disposed on the upper electrode 001 and is located between the upper electrode 001 and the first light-transmitting plate 003. The arrangement is discontinuous and presents a dot array structure. Other structures, material selections and preparation processes are the same as those in the first specific embodiment.

[0066] The beneficial effects of the liquid lens provided by the present invention will be further illustrated below with reference to specific embodiments.

[0067] Example 1

[0068] A liquid lens with a buffer structure, the overall structure of which is shown in the schematic diagram below. Figure 1 As shown, Figure 2 In accordance with Figure 1 A schematic diagram of the cross-sectional structure obtained by cutting along the arrow. Figure 3 This is a schematic diagram of the structure of the lower electrode and the optical liquid contact surface of the liquid lens;

[0069] The liquid lens provided in this embodiment includes an upper electrode 001, a lower electrode 005, and a sealing ring 004;

[0070] The upper electrode 001 is made of stainless steel and has an assembly hole. The assembly hole contains a first light-transmitting plate 003 and a buffer structure 002. The first light-transmitting plate 003 is a glass plate, and the buffer structure 002 is made of PS photoresist material. The buffer structure 002 is located on both sides of the first light-transmitting plate 003 and is continuously arranged in a ring structure.

[0071] The lower electrode 005 is made of copper (nickel plated on the surface). A through hole is provided in the lower electrode 005, and a second light-transmitting plate 006 is provided in the through hole. The second light-transmitting plate 006 is a glass plate.

[0072] The sealing ring 004 is disposed between the upper electrode 001 and the lower electrode 005 to seal the optical liquid, which includes a conductive liquid 007 and a non-conductive liquid 008. The conductive liquid 007 is ethylene glycol, and the non-conductive liquid 008 is oil. Both the conductive liquid 007 and the non-conductive liquid 008 are in contact with the lower electrode 005. The contact surface is an inclined plane, and the angle between the inclined plane and the second light-transmitting plate 006 is 45°. A dielectric film 051 and a hydrophobic film 052 are sequentially disposed on the contact surface. The dielectric film 051 is made of Parylene, and the hydrophobic film 052 is made of Teflon. A liquid interface is formed between the conductive liquid 007 and the non-conductive liquid 008.

[0073] A portion of the surface of the upper electrode 001, a portion of the surface of the sealing ring 004, a portion of the surface of the lower electrode 005, the first light-transmitting plate 003, and the second light-transmitting plate 006 constitute the cavity wall of the closed cavity in the liquid lens for storing optical liquid. The light beam incident into the closed cavity passes through the first light-transmitting plate 003 and the second light-transmitting plate 006 respectively, while the buffer structure 002 located on the surface of the first light-transmitting plate 003 also comes into contact with the optical liquid.

[0074] The method for preparing a liquid lens provided in this embodiment includes the following steps:

[0075] (1) Install the first light-transmitting plate in the mounting hole of the upper electrode, continuously coat both sides of the first light-transmitting plate with PS material, expose and develop, and cure to form a buffer structure; install the second light-transmitting plate in the through hole of the lower electrode;

[0076] (2) Connect the upper electrode, the lower electrode and the sealing ring, and fill with optical liquid to obtain the liquid lens.

[0077] Example 2

[0078] A liquid lens with a buffer structure, the overall structure of which is shown in the schematic diagram below. Figure 6 As shown, Figure 7 In accordance with Figure 6 The cross-sectional structure diagram obtained by the arrow is different from that of Embodiment 1 only in that the buffer structure 002 is not continuously arranged on the first light-transmitting plate 001, but is a dot array structure with a density of 12 dot structures / ring. Other structures, material selection and preparation process are the same as those in the first specific embodiment.

[0079] Comparative Example 1

[0080] A liquid lens, which differs from Example 1 only in that it does not have a buffer structure, while the other structures, material selections and manufacturing processes are the same as the first specific embodiment.

[0081] Performance testing:

[0082] (1) Stability: Test the optical power change curve of the liquid lens at 0-70V at a working temperature of 70℃. If the curve coincides with the optical power curve at 0-70V tested at 25℃, it indicates stability. If they do not coincide, it indicates instability.

[0083] (2) Reliability: After the liquid lens is cycled 42 times from -40℃ to 120℃, its optical power change curve from 0 to 70V is measured. If the curve coincides with the optical power curve from 0 to 70V tested at 25℃, it is considered reliable. If they do not coincide, it is considered unreliable.

[0084] The liquid lenses provided in Examples 1-2 and Comparative Example 1 were tested according to the above test methods, and the test results are shown in Table 1:

[0085] Table 1

[0086] stability reliability Example 1 Stablize reliable Example 2 Stablize reliable Comparative Example 1 Unstable Unreliable

[0087] According to the data in Table 1:

[0088] This invention effectively improves the stability and reliability of liquid lenses by setting up a buffer structure.

[0089] The applicant declares that this invention illustrates a liquid lens with a buffer structure, its preparation method, and its application through the above embodiments. However, this invention is not limited to the specific embodiments described above, meaning that this invention does not necessarily depend on the specific embodiments described above for implementation. Those skilled in the art should understand that any improvements to this invention, equivalent substitutions of the raw materials used in this invention, additions of auxiliary components, and selection of specific methods all fall within the protection and disclosure scope of this invention.

Claims

1. A liquid lens with a buffer structure, characterized in that, The liquid lens includes: The upper electrode has an assembly hole, and the assembly hole has a first light-transmitting plate and a buffer structure. The lower electrode has a through hole, and a second light-transmitting plate is disposed in the through hole; A sealing ring is disposed between the upper electrode and the lower electrode to seal the liquid. A portion of the surface of the upper electrode, a portion of the surface of the sealing ring, a portion of the surface of the lower electrode, the first light-transmitting plate, and the second light-transmitting plate constitute the cavity wall of the closed cavity in the liquid lens for storing optical liquid; the light beam incident into the closed cavity passes through the first light-transmitting plate and the second light-transmitting plate respectively; The buffer structure is disposed between the upper electrode and the first light-transmitting plate, or at both ends of the first light-transmitting plate on the side that contacts the optical liquid. The buffer structure is either continuously distributed or discontinuously and uniformly distributed in a ring structure on the same plane; The contact surface between the lower electrode and the optical liquid is an inclined plane; The angle between the inclined plane and the second light-transmitting plate is less than 90° and greater than 0°.

2. The liquid lens according to claim 1, characterized in that, The material of the upper electrode includes any one of iron, iron alloy, copper, copper alloy, zinc, zinc alloy, aluminum, or aluminum alloy.

3. The liquid lens according to claim 1, characterized in that, The material of the lower electrode includes metallic materials.

4. The liquid lens according to claim 3, characterized in that, The metallic material includes any one of zinc, copper, chromium, or aluminum.

5. The liquid lens according to claim 1, characterized in that, The sealing ring is made of any one or a combination of at least two of polytetrafluoroethylene, poly(p-xylene), or perfluorocyclic polymers.

6. The liquid lens according to claim 1, characterized in that, The first and second light-transmitting plates each independently comprise a glass plate or a polymethyl methacrylate plate.

7. The liquid lens according to claim 1, characterized in that, The material of the buffer structure is an elastic material.

8. The liquid lens according to claim 7, characterized in that, The elastic material includes a photoresist material.

9. The liquid lens according to claim 1, characterized in that, A dielectric film and a hydrophobic film are sequentially disposed on the contact surface between the lower electrode and the optical liquid.

10. The liquid lens according to claim 9, characterized in that, The dielectric film is made of any one or a combination of at least two of the following: parylene, tantalum pentoxide, alumina, or silicon nitride.

11. The liquid lens according to claim 9, characterized in that, The hydrophobic membrane is made of fluoride.

12. The liquid lens according to claim 1, characterized in that, The optical liquid includes conductive liquids and non-conductive liquids.

13. The liquid lens according to claim 12, characterized in that, A liquid interface is formed between the conductive liquid and the non-conductive liquid. The conductive liquid is in contact with the second light-transmitting plate, and the non-conductive liquid is in contact with the first light-transmitting plate.

14. The liquid lens according to claim 12, characterized in that, The conductive liquid includes any one or a combination of at least two of alcohol, water, or salt solutions.

15. The liquid lens according to claim 12, characterized in that, The non-conductive liquid includes silicone oil and / or chlorobenzene.

16. A method for preparing a liquid lens as described in any one of claims 1 to 15, characterized in that, The preparation method includes the following steps: (1) Install the first light-transmitting plate in the mounting hole of the upper electrode, coat or nanoimprint buffer material at the target position, expose and develop, and dry to form a buffer structure; install the second light-transmitting plate in the through hole of the lower electrode; (2) Connect the upper electrode, the lower electrode and the sealing ring, and fill with optical liquid to obtain the liquid lens.

17. An optical system, characterized in that, The optical system includes a liquid lens as described in any one of claims 1 to 15.

Images