Vertical probe head

Abstract

The present invention relates to a vertical probe head, comprising upper and lower guide plate units provided with upper and lower through holes and a plurality of probes, each probe comprising a needle body located between the upper and lower guide plate units, a needle tail mounting portion and a needle head mounting portion respectively accommodated in the upper and lower through holes, and a needle head contact portion for electrically contacting an object to be tested, the probe comprising a pair of first and second signal probes, at least one of which is a special needle, the needle body width of the special needle is smaller than the needle head mounting portion width and the needle body center line deviates from the center line of its own needle head mounting portion in the direction of the paired probes, the center spacing between the needle head contact portions of the first and second signal probes is larger than the center spacing between the needle bodies, so that they can correspond to a high-speed differential pair with a larger center spacing of the object to be tested, and the impedance matching effect is good, and the contact force of each probe can be maintained consistent and elastic instability during actuation can be avoided.

Description

Technical Field

[0001] The present invention relates to a probe head of a probe card, and in particular to a vertical probe head. Background Art

[0002] See also Figure 1 The conventional vertical probe head 10 includes an upper guide plate unit 11 (including at least one upper guide plate), a lower guide plate unit 12 (including at least one lower guide plate) disposed below the upper guide plate unit 11, and a plurality of probes 13 passing through the upper and lower guide plate units 11 and 12. Each probe 13 can define a needle tail 132 partially located in the upper guide plate unit 11 and partially protruding upward from the top surface of the upper guide plate unit 11, a needle head 134 partially located in the lower guide plate unit 12 and partially protruding downward from the bottom surface of the lower guide plate unit 12, and a needle body 136 located between the upper and lower guide plate units 11 and 12. After the probe 13 is disposed in the upper and lower guide plate units 11 and 12, the upper and lower guide plate units 11 and 12 will move relative to each other along the X-axis direction (lateral direction) and be displaced with each other ( Figure 1 The needle body 136 of each probe 13 is bent, that is, the needle body 136 of each probe 13 is pre-bent in a desired direction. Therefore, when the needle body 136 of each probe 13 is elastically deformed during testing, the contact force of each probe 13 can be controlled and the gap between the needle bodies 136 of each probe 13 can be ensured to avoid short circuit caused by contact. Each probe 13 receives a signal provided by a test machine (not shown) from the top of its needle tail 132 (generally, the probe 13 is electrically connected to the test machine through the circuit board of the probe card), and the bottom of the needle head 134 of each probe 13 is used to touch a conductive contact of a test object (not shown) to transmit the signal provided by the test machine to the test object or transmit the signal generated by the test object to the test machine.

[0003] In the case where the conductive contacts of the object to be tested include a high-speed differential pair, the high-speed differential pair usually has a larger center pitch. For example, the center pitch of a general conductive contact is 80μm, and the center pitch of a high-speed differential pair is 120μm to 160μm. In this case, the vertical probe head 10 used to touch the probes 13 of the high-speed differential pair of the object to be tested also needs to have a correspondingly larger center pitch. It is conceivable that if the probes corresponding to the high-speed differential pair and the probes corresponding to the non-high-speed differential pair use the same standard needle-type probes, for example Figure 1 The probe 13 shown corresponds to a non-high-speed differential pair. Figure 2 The probe 13 shown corresponds to a high-speed differential pair. Figure 1 and Figure 2The probe 13 in the same shape, but Figure 1 The center spacing P of the probes 13 is less than Figure 2 The center spacing P of the probes 13 in the image is such that Figure 2 The probes 13 corresponding to the high-speed differential pair shown have a poor impedance matching effect because the gap G between them is large.

[0004] In order to match the high-speed differential pair with a large center spacing of the object to be tested, and to solve the problem of poor impedance matching due to the large gap between the probes, the conventional technology is to change the probe corresponding to the high-speed differential pair to a larger needle type than the standard needle type (such as Figure 1 ) Wider probes, e.g. Figure 3 The probe 13' shown has a width W greater than Figure 1 and Figure 2 The width W of the probe 13 is shown. Figure 3 Probe 13' in Figure 2 The probe 13 in the embodiment also has a large center spacing P, which can be used to touch a high-speed differential pair with a large center spacing of the object to be tested, and Figure 3 The width W of the probe 13' is increased, so that the gap G between the probes 13' is smaller. Figure 2 The gap G in the circuit is small, which can solve the problem of poor impedance matching.

[0005] However, when the width W of the probe is widened, in order to avoid excessive contact force on the object to be tested or inconsistent contact force with other probes, the thickness of the needle body 136 of the widened probe (defined in the Z-axis direction) needs to be correspondingly reduced to be very thin. Such a needle body 136 is prone to twisting in an unexpected direction during actuation due to its uneven geometric shape (wide and flat), resulting in elastic instability. Summary of the invention

[0006] In view of the above-mentioned deficiencies, the main purpose of the present invention is to provide a vertical probe head, whose probes can correspond to high-speed differential pairs with larger center spacing of the object to be tested, and have good impedance matching effect, and can maintain the consistency of the contact force of each probe and avoid the problem of elastic instability during actuation.

[0007] To achieve the above-mentioned purpose, the vertical probe head provided by the present invention includes a probe base and a plurality of probes. The probe base includes an upper guide plate unit and a lower guide plate unit, the upper guide plate unit includes at least one upper guide plate and a plurality of upper through holes penetrating the at least one upper guide plate, the lower guide plate unit includes at least one lower guide plate and a plurality of lower through holes penetrating the at least one lower guide plate, the upper guide plate unit and the lower guide plate unit respectively have an upper surface and a lower surface, and the lower surface of the upper guide plate unit faces the upper surface of the lower guide plate unit. Each probe passes through an upper through hole and a lower through hole, and each probe includes a needle tail, a needle head, and a needle body located between the needle tail and the needle head. The needle tail includes a needle tail contact portion for electrically contacting a circuit board (main circuit board or space converter) of a probe card, and a needle tail mounting portion located between the needle tail contact portion and the needle body and at least partially accommodated in the upper through hole. The needle head includes a needle head mounting portion at least partially accommodated in the lower through hole, and a needle head contact portion located below the lower surface of the lower guide plate unit and used to electrically contact an object to be tested. The needle body is located between the lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit. The needle body can define a needle body centerline, the needle head contact portion can define a needle head contact portion centerline, and the needle head mounting portion can define a needle head mounting portion centerline. The multiple probes include at least one pair of signal probes, and the at least one pair of signal probes includes a first signal probe and a second signal probe that are adjacent to each other. At least one of the first signal probe and the second signal probe is a special needle, and the width of the needle body of the special needle is smaller than the width of the needle head mounting portion of the special needle, and the center line of the needle body of the special needle deviates from the center line of the needle head mounting portion of the special needle itself toward the direction of the probe paired with the special needle, and the shortest distance between the center line of the needle head contact portion of the first signal probe and the center line of the needle head contact portion of the second signal probe (hereinafter also referred to as the needle head contact portion center distance) is greater than the shortest distance between the center line of the needle body of the first signal probe and the center line of the needle body of the second signal probe (hereinafter also referred to as the needle body center distance).

[0008] Therefore, the first and second signal probes of the vertical probe head of the present invention can be a combination of a standard needle and a special needle, or a combination of a special needle and a special needle, wherein the width of the needle body of the special needle is smaller than the width of the needle mounting portion, and the center line of the needle body deviates from the center line of the needle mounting portion, and its deviation direction is toward the direction of the other probe of the same pair, so that the needle bodies of the first and second signal probes can be close to each other to ensure an appropriate distance to achieve the desired impedance matching effect, and at the same time, the width of the needle body of the special needle can be avoided to be too large. Therefore, the thickness of the needle body of the special needle does not need to be reduced to a very thin thickness, and it can still have the same small area moment of inertia as the standard needle, so that an appropriate and consistent contact force can be applied to the object to be tested, and the problem of elastic instability during actuation can be avoided. In addition, the width of the needle mounting portion of the special needle is larger than the width of the needle body, and the needle contact portion can be designed in a manner that the center line of the needle contact portion deviates from the center line of the needle body, so that the center distance between the first and second signal probes at the needle contact portion is greater than the center distance between the needle body. In other words, the center distance between the first and second signal probes at the needle contact portion is larger, while the center distance between the first and second signal probes at the needle contact portion is smaller. Therefore, the center distance between the first and second signal probes at the needle contact portion can be configured in a manner corresponding to the center spacing of the conductive contacts of the object to be tested, without being restricted by the need to have a smaller center distance of the needle body to produce good impedance matching. Therefore, the needle contact portions of the first and second signal probes can be used to touch a high-speed differential pair with a larger center spacing of the object to be tested. At the same time, the needle body usually occupies a larger proportion of the probe length. Therefore, a good impedance matching effect can be achieved by increasing the coupling capacitance with a smaller center distance of the needle body.

[0009] Preferably, the width of the needle contact portion of the special needle may be greater than the width of the needle body of the special needle, so as to achieve the structural feature that the center spacing between the needle contact portions of the first and second signal probes is greater than the center spacing between the needle bodies. Alternatively, the center line of the needle contact portion of the special needle may deviate from the center line of its corresponding needle mounting portion, so as to achieve the structural feature that the center spacing between the needle contact portions of the first and second signal probes is greater than the center spacing between the needle bodies, and can further make the shortest distance between the needle contact portions of the first and second signal probes greater than the shortest distance between the needle bodies of the first and second signal probes. Such a probe can meet the needs of high-speed differential pairs with large center spacing for conductive contacts, provide more accurate contacting of the conductive contacts of the object to be tested, and at the same time can maintain a small center distance between the needle bodies to increase the coupling capacitance, so as to achieve a good impedance matching effect.

[0010] Preferably, the needle tail contact portion of each probe can define a needle tail contact portion center line, and the width of the needle tail contact portion of the special needle can be greater than the width of the needle body of the special needle, so as to achieve the structural feature that the shortest distance between the center lines of the needle tail contact portions of the first and second signal probes (hereinafter also referred to as the needle tail contact portion center distance) is greater than the needle body center distance. Alternatively, the needle tail contact portion center line of the special needle can deviate from the center line of its corresponding needle tail mounting portion, so as to achieve the structural feature that the needle tail contact portion center distance between the first and second signal probes is greater than the needle body center distance, and can further make the shortest distance between the needle tail contact portions of the first and second signal probes greater than the shortest distance between the needle bodies of the first and second signal probes. Such a probe can maintain a smaller center distance between the needle bodies to increase the coupling capacitance, so as to achieve a good impedance matching effect and more accurately abut the conductive contacts of the circuit board of the probe card.

[0011] Preferably, the needle tail contact portion of each probe can define a needle tail contact portion centerline, and the needle tail mounting portion of each probe can define a needle tail mounting portion centerline; the upper and lower guide plate units are used to stagger each other along a horizontal axis so that each probe is transformed from a straight state to a bent state. When the first and second signal probes are in a straight state, the needle body centerline, the needle head contact portion centerline and the needle tail contact portion centerline of the first signal probe overlap each other, and the needle body centerline of the second signal probe deviates from the needle head mounting portion centerline and the needle tail mounting portion centerline of the second signal probe. That is, in the paired first and second signal probes, only the second signal probe is a special needle, and the first signal probe is a standard needle. In this way, the structural characteristics that the center spacing of the needle head contact portion of the first and second signal probes is greater than the center spacing of the needle body, and the structural characteristics that the center spacing of the needle tail contact portion is greater than the center spacing of the needle body can be achieved. Such a probe can meet the needs of high-speed differential pairs with larger center spacing for conductive contacts, providing more accurate contacting of the conductive contacts of the object under test, while also maintaining a smaller center distance between the needle bodies to increase coupling capacitance, thereby achieving a good impedance matching effect.

[0012] Preferably, the vertical probe head can define a first horizontal axis and a second horizontal axis that are perpendicular to each other, and the upper and lower guide plate units are used to stagger along the first horizontal axis so that each probe can be transformed from a straight state to a bent state, and the first and second signal probes are both special needles and are symmetrically arranged relative to an imaginary reference plane (which can be perpendicular to the first horizontal axis, perpendicular to the second horizontal axis, or inclined relative to the first and second horizontal axes) in the straight state. Therefore, under the premise of achieving the required needle body center spacing to obtain the required impedance matching effect, the degree of deviation between the center line of the needle contact portion of the special needle and the center line of the needle body does not need to be very large to achieve the required needle contact portion center spacing.

[0013] The detailed structure, features, assembly or use of the vertical probe head provided by the present invention will be described in the detailed description of the implementation method in the following. However, those with ordinary knowledge in the field of the present invention should understand that each detailed description and the specific embodiments listed for implementing the present invention are only used to illustrate the present invention and are not used to limit the scope of the patent application of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figures 1 to 3 It is a partial cross-sectional schematic diagram of a conventional vertical probe head.

[0015] Figure 4 A partial cross-sectional schematic diagram of a vertical probe head provided in a first preferred embodiment of the present invention.

[0016] Figure 5 Similar to Figure 4 , but the probe of the vertical probe head is shown to be in a buckled state.

[0017] Figures 6 to 11 Partial cross-sectional schematic diagrams of vertical probe heads provided in the second to seventh preferred embodiments of the present invention are shown respectively. DETAILED DESCRIPTION

[0018] The applicant first explains that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for illustration purposes only and are not drawn according to the actual proportions and quantities, and if it is possible in practice, the features of different embodiments can be applied interchangeably. Secondly, when it is mentioned that an element is disposed on another element, it means that the aforementioned element is directly disposed on the other element, or the aforementioned element is indirectly disposed on the other element, that is, one or more other elements are disposed between the two elements. When it is mentioned that an element is "directly" disposed on another element, it means that no other elements are disposed between the two elements.

[0019] Please read first Figure 4 The vertical probe head 21 provided in a first preferred embodiment of the present invention includes a probe seat 30 and a plurality of probes. In fact, the vertical probe head usually includes thousands to tens of thousands of probes. In order to simplify the drawings and facilitate the description, only three probes 40A-C are shown in each drawing of the present invention, which are also referred to as the first signal probe 40A, the second signal probe 40B and the third signal probe 40C in the present invention. The first and second signal probes 40A and 40B are adjacent and paired signal probes, which can be (but not limited to) high-speed differential pair probes used to point-test a DUT (not shown in the figure), and the third signal probe 40C is used to represent the standard needle of other general conductive contacts in the vertical probe head used to point-test the DUT, such as a grounding probe.

[0020] The probe base 30 includes an upper guide plate unit 32 and a lower guide plate unit 34. The upper guide plate unit 32 includes at least one upper guide plate 322 and a plurality of upper through holes 323, 324 (described in detail below) penetrating the at least one upper guide plate 322. The lower guide plate unit 34 includes at least one lower guide plate 342 and a plurality of lower through holes 343, 344 (described in detail below) penetrating the at least one lower guide plate 342. The number of the upper through holes 323, 324 and the number of the lower through holes 343, 344 both correspond to the number of probes. Only three upper through holes 323, 324 and three lower through holes 343, 344 corresponding to the probes 40A~C are shown in each of the figures of the present invention. The upper and lower guide plate units 32 and 34 of this embodiment only include an upper guide plate 322 and a lower guide plate 342, respectively. However, when the upper guide plate unit 32 needs to be thicker, in order to avoid the problem that the upper through holes 323 and 324 need to penetrate a single thick guide plate and cause the drilling process to be difficult, the upper guide plate unit 32 can also be composed of a plurality of stacked upper guide plates 322, so that the same upper through holes 323 and 324 can be drilled in sections on the plurality of upper guide plates 322. Similarly, the lower guide plate unit 34 can also be composed of a plurality of stacked lower guide plates 342, so as to avoid the difficulty in drilling the lower through holes 343 and 344. The upper guide plate unit 32 has an upper surface 326 and a lower surface 327, and the lower guide plate unit 34 has an upper surface 346 and a lower surface 347. The lower surface 327 of the upper guide plate unit 32 faces the upper surface 346 of the lower guide plate unit 34. In other words, the upper guide plate unit 32 is generally arranged above the lower guide plate unit 34 in parallel with the lower guide plate unit 34. The outer peripheries (not shown) of the upper and lower guide plate units 32 and 34 may have portions protruding toward each other and are directly fixed to each other, or the outer peripheries of the upper and lower guide plate units 32 and 34 may be indirectly fixed to each other through a hollow middle guide plate (not shown). This part is not related to the technical features of the present invention and is not shown in the drawings.

[0021] The initial state of each probe 40A-C is as follows Figure 4The linear state S1 shown in the figure, and in this state passes through an upper through hole 323 or 324 and a lower through hole 343 or 344, at this time, each probe 40A~C can define a needle tail 41, a needle head 42, and a needle body 43 located between the needle tail 41 and the needle head 42, and the needle body 43 is located between the lower surface 327 of the upper guide plate unit 32 and the upper surface 346 of the lower guide plate unit 34, and the needle tail 41 includes a needle body 43 connected to the needle body 43 and accommodated in the upper through hole 323 The needle 42 includes a needle tail mounting portion 411 in the upper through hole 343 or 344, an upper stopper 412 connected to the needle tail mounting portion 411 and located above the upper through hole 323 or 324, and a needle tail contact portion 413 connected to the upper stopper 412 and located at the top of the probe, the needle 42 includes a needle mounting portion 421 connected to the needle body 43 and accommodated in the lower through hole 343 or 344, and a needle contact portion 423 located below the lower surface 347 of the lower guide plate unit 34. The needle tail contact portion 413 protrudes from the upper surface 326 of the upper guide plate unit 32. The needle contact portion 423 protrudes from the lower surface 347 of the lower guide plate unit 34. The width of the upper stopper 412 of each probe 40A to 40C is greater than the width of its corresponding upper through hole 323 or 324, for example Figure 4 The width W1 of the upper stopper 412 of the middle probe 40B is greater than the width D1 of the corresponding upper through hole 323, so that the upper stopper 412 of each probe 40A-C can abut against the upper surface 326 of the upper guide plate unit 32, so that the probes 40A-C are positioned on the probe seat 30 and will not fall down. In this embodiment, the cross-sectional shape of the upper through hole 323 or 324 and the lower through hole 343 or 344 is square or rectangular for description. However, the upper through hole 323 or 324 and the lower through hole 343 or 344 can also be circular. In the case of being circular, the width of the upper through hole 323 or 324 and the lower through hole 343 or 344 is equal to the diameter of the through hole.

[0022] After the probes are all inserted into the probe holder 30, the upper and lower guide plate units 32 and 34 are mutually staggered along a first horizontal axis (X axis) so that each probe 40A-C is transformed from a straight state S1 to a buckled state S2 (such as Figure 5As shown), the upper and lower guide plate units 32 and 34 will then be directly or indirectly fixed to each other in this state and in the manner described above. In this way, the vertical probe head 21 is assembled, and the needle head contact portion 423 of each probe 40A~C is used to electrically contact the conductive contacts of the object to be tested, and the needle tail contact portion 413 of each probe 40A~C is used to electrically contact a circuit board of a probe card (not shown in the figure). The circuit board may be a main circuit board of the probe card, in which case the vertical probe head 21 and the main circuit board constitute a probe card; or, the circuit board may be a space converter of the probe card, which is disposed between the main circuit board and the vertical probe head 21, in which case the vertical probe head 21, the space converter and the main circuit board constitute a probe card. When the vertical probe head 21 is assembled and contacts the circuit board as described above, the probes 40A~C are slightly stressed, and their upper stop portions 412 may be as shown. Figure 5 As shown, it is still against the upper surface 326 of the upper guide plate unit 32, and may also move slightly upward from the upper surface 326 of the upper guide plate unit 32. Therefore, the needle tail mounting portion 411 and the needle head mounting portion 421 may respectively protrude slightly from the upper surfaces 326 and 346 of the upper and lower guide plate units 32 and 34 and be partially located outside the upper and lower through holes 323, 324, 343, and 344.

[0023] The detailed structural features of the vertical probe head of the present invention will be further described below. It should be noted here that the probes in all embodiments of the present invention (especially the special needles described below) mainly refer to probes made of plates by laser cutting, etching or other processing methods, or probes formed by micro-electromechanical systems (MEMS) processes, and their cross-sectional shapes are mostly rectangular, so the width and thickness of the probe can be defined in the direction in which it is made. In the various figures of the present invention, the width of each part of the probe is in the X-axis (first horizontal axis), and the thickness is in the Z-axis (second horizontal axis). In addition, the X-axis in the various figures of the present invention is also the dislocation axis when the upper and lower guide plate units 32 and 34 are staggered to make the probe change from the straight state S1 to the buckled state S2. However, the width of each part of the probe in the present invention is mainly defined by the arrangement direction of the paired first and second signal probes 40A and 40B, and the thickness is defined in the direction perpendicular to the arrangement direction. In other words, the first and second signal probes 40A and 40B face each other with their sides defining the thickness. In the various figures of the present invention, the arrangement direction of the first and second signal probes 40A, 40B is on the X-axis, that is, the aforementioned offset axis, but the arrangement direction of the first and second signal probes 40A, 40B can also be on the Z-axis, or inclined relative to the X-axis and the Z-axis. In addition, the probe of the present invention is not limited to a rectangular cross-sectional shape, and can also be a circular or polygonal cross-sectional shape. In particular, the standard needle can be a probe made of the aforementioned sheet material or formed by the MEMS process, and can also be a probe directly cut from a round wire or formed by stamping. In the case where the cross-sectional shape of the probe is circular, the width and thickness of the probe are equal to the diameter of the probe. In the case where the cross-sectional shape of the probe is polygonal (for example: trapezoidal), the comparison of the width of the probe is based on the comparison of the width of the probe at the same longitudinal section position.

[0024] like Figure 4 As shown, the needle contact portion 423, needle mounting portion 421, needle body 43, needle tail mounting portion 411 and needle tail contact portion 413 of each probe 40A-C can respectively define a needle contact portion center line C1, a needle mounting portion center line C2, a needle body center line C3, a needle tail mounting portion center line C4 and a needle tail contact portion center line C5, each upper through hole 323, 324 can define an upper through hole center line C6 (in this embodiment, C4, C5 and C6 overlap each other, that is, collinear), and each lower through hole 343, 344 can define a lower through hole center line C7 (in this embodiment, C1, C2, C7 are collinear). Figure 5 As shown, when each probe 40A-C is in the buckled state S2, the center line C3 of the probe body is a curve. It can be seen that the center line of each part referred to in the present invention is not limited to a straight line.

[0025] In the present embodiment, the third signal probe 40C is a standard needle, and the first and second signal probes 40A and 40B are symmetrical in shape and are respectively special needles. The standard needle 40C has almost the same width as a whole, and only the width of the upper stopper 412 is larger. The width of the needle body 43 of the special needles 40A and 40B is roughly the same as the width of the needle body 43 of the standard needle 40C, and the rest of the parts are wider than the standard needle 40C. Therefore, for the special needles 40A and 40B of the present embodiment, the width W2 of the needle body 43 is smaller than the width W3 of the needle head mounting portion 421, the width W4 of the needle tail mounting portion 411, the width W5 of the needle head contact portion 423, and / or the width W6 of the needle tail contact portion 413. The center line C3 of the needle body deviates from the center line C2 of the needle head mounting portion. The center line C3 of the needle body deviates from the center line C4 of the needle tail mounting portion. Specifically, the aforementioned "deviation" is as follows: Figure 4 As shown, when the first and second signal probes 40A and 40B are in the straight state S1, the center line C3 of the needle body is misaligned with the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part in the X-axis (first horizontal axial) direction. More specifically, the center line C3 of the needle body and the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part are misaligned in the X-axis (first horizontal axial) direction at the intersection of the needle body 43 and the needle 42 and / or the needle tail 41. The center line C3 of the needle body is not connected to the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part. More specifically, the center line C3 of the needle body and the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part are not connected at the intersection of the needle body 43 and the needle 42 and / or the needle tail 41. The extension line of the center line C3 of the needle body will not overlap with the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part. In addition, if Figure 5As shown, when the first and second signal probes 40A and 40B are in the buckled state S2, the center line C3 of the needle body is misaligned with the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part in the X-axis (first horizontal axial) direction. More specifically, the center line C3 of the needle body and the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part are misaligned in the X-axis (first horizontal axial) direction at the intersection of the needle body 43 and the needle 42 and / or the needle tail 41. The center line C3 of the needle body is not connected to the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part. More specifically, the center line C3 of the needle body and the center line C2 of the needle mounting part and / or the center line C4 of the needle tail mounting part are not connected at the intersection of the needle body 43 and the needle 42 and / or the needle tail 41. In addition, the first and second signal probes 40A and 40B of the present embodiment are symmetrically arranged relative to an imaginary reference plane R perpendicular to the X-axis in the straight state S1, and the needle body center line C3 of the first signal probe 40A deviates from the needle head mounting part center line C2 and / or the needle tail mounting part center line C4 of the first signal probe 40A itself in the direction of the second signal probe 40B (that is, in the positive direction of the X-axis), and the needle body center line C3 of the second signal probe 40B deviates from the needle head mounting part center line C2 and the needle tail mounting part center line C4 of the second signal probe 40B itself in the direction of the first signal probe 40A (that is, in the negative direction of the X-axis). Moreover, C1 and C2 of the same probe are collinear and C4 and C5 are collinear, so the shortest distance between the center line C1 of the needle contact portion of the first signal probe 40A and the center line C1 of the needle contact portion of the second signal probe 40B (i.e., the distance between the centers of the needle contact portions d1) is greater than the shortest distance between the center line C3 of the needle shaft of the first signal probe 40A and the center line C3 of the needle shaft of the second signal probe 40B (i.e., the distance between the centers of the needle shaft d2). In addition, the shortest distance between the center line C5 of the needle tail contact portion of the first signal probe 40A and the center line C5 of the needle tail contact portion of the second signal probe 40B (i.e., the distance between the centers of the needle tail contact portions d3) is greater than the shortest distance between the center line C3 of the needle shaft of the first signal probe 40A and the center line C3 of the needle shaft of the second signal probe 40B (i.e., the distance between the centers of the needle shaft d2).

[0026] It is worth mentioning that in the present embodiment, the sizes of the upper and lower through holes 323, 324, 343, 344 of the probe seat 30 are matched with the sizes of the needle tail mounting portion 411 and the needle head mounting portion 421 of the corresponding probes 40A~C. In order to enable the needle tail mounting portion 411 and the needle head mounting portion 421 to be stably positioned in the upper and lower through holes 323, 324, 343, 344, the needle tail mounting portion 411 and its corresponding upper through hole 323, 324 can selectively be approximately equal in size on the X-axis or the Z-axis, and the needle head mounting portion 421 and its corresponding lower through hole 343, 344 can selectively be approximately equal in size on the X-axis or the Z-axis. The “approximately equal in size” means a size that can just be installed and positioned.

[0027] In detail, Figure 5 As shown, the upper through hole of the upper guide plate unit 32 includes a special upper through hole 323 for the special needles 40A and 40B to pass through, and a standard upper through hole 324 for the standard needle 40C to pass through, and the lower through hole of the lower guide plate unit 34 includes a special lower through hole 343 for the special needles 40A and 40B to pass through, and a standard lower through hole 344 for the standard needle 40C to pass through. The needle tail mounting portion 411 and the needle head mounting portion 421 of the standard needle 40C have the same size, so the width D2 of the standard upper through hole 324 of this embodiment is equal to the width D3 of the standard lower through hole 344; the needle tail mounting portion 411 and the needle head mounting portion 421 of the standard needle 40C are smaller than the needle tail mounting portion 411 and the needle head mounting portion 421 of the special needles 40A and 40B, so the width D2 of the standard upper through hole 324 is smaller than the width D1 of the special upper through hole 323 (as shown in FIG. 1 ). Figure 4 As shown in FIG. 1 , the width D3 of the standard lower through hole 344 is smaller than the width D4 of the special lower through hole 343. However, the present invention is not limited to this size relationship, and can be adjusted according to the size and installation requirements of the probes of different embodiments. For example, D2 can be greater than D3, D2 can be equal to D1, or D3 can be equal to D4, as long as the width of the upper stopper 412 of each probe 40A-C is greater than the width of the corresponding upper through hole 323, 324, so that the probe 40A-C can be positioned on the probe seat 30.

[0028] Through the structural features of the needle body 43 and the needle head 42 of the aforementioned special needles 40A, 40B, the needle bodies 43 of the first and second signal probes 40A, 40B can be close to each other to ensure an appropriate distance to increase the coupling capacitance and achieve the desired impedance matching effect. At the same time, the width W2 of the needle body 43 of the special needles 40A, 40B can be avoided from being too large. Therefore, the thickness (Z-axis direction) of the needle body 43 of the special needles 40A, 40B does not need to be reduced to a very thin thickness, and can still have the same small area moment of inertia as the standard needle 40C, so that an appropriate and consistent contact force can be applied to the object to be tested, and the problem of elastic instability during actuation can be avoided. In addition, the center spacing d1 of the needle contact parts of the first and second signal probes 40A and 40B is greater than the center spacing d2 of the needle body. Therefore, the center spacing d1 of the needle contact parts of the first and second signal probes 40A and 40B can be configured in a manner corresponding to the center spacing of the conductive contacts of the object to be tested, without being restricted by the need for the center spacing d2 of the needle body to be smaller to produce good impedance matching. Therefore, the needle contact parts 423 of the first and second signal probes 40A and 40B can be used to touch the high-speed differential pairs with a larger center spacing of the object to be tested.

[0029] Furthermore, the needle body 43 usually occupies a larger proportion of the probe length (for example, more than about 60%), so the first and second signal probes 40A and 40B increase the coupling capacitance by the characteristic of the smaller needle body center distance d2, so as to achieve a good impedance matching effect. Moreover, the needle body 43 is more likely to affect the contact force of the probe on the object to be tested than other parts. The aforementioned design avoids the width W2 of the needle body 43 from being too large. In the case where the vertical probe head 21 includes multiple pairs of signal probes arranged in different directions, only the width and thickness of the probes arranged in different directions need to be slightly changed to make the probes exert appropriate and consistent contact force on the object to be tested. For example, in this embodiment, the offset axis is the X axis and a pair of signal probes are arranged along the X axis. If another pair of signal probes are arranged along the Z axis, when the center spacing d1 of the needle contact portion is 160um and the center spacing d2 of the needle body is 80um, the width and thickness of the probes arranged along the X axis are 35um and 42um respectively, and the width and thickness of the probes arranged along the Z axis are 42um and 35um respectively, and appropriate and consistent contact force can be applied to the object to be tested. In addition, as the first and second signal probes 40A and 40B are both special needles and are symmetrically arranged relative to the imaginary reference plane R in the straight state S1, the difference between the center spacing d1 of the needle contact portion and the center spacing d2 of the needle body can be larger. On the premise of achieving the required center spacing d2 of the needle body to obtain the required impedance matching effect, the degree of deviation between the center line C2 of the needle contact portion and the center line C3 of the needle body does not need to be large to achieve the required center spacing d1 of the needle contact portion. The imaginary reference plane R of the present embodiment is perpendicular to the misaligned axial direction (X-axis), but as mentioned above, the first and second signal probes 40A and 40B are not necessarily arranged along the misaligned axial direction, for example, they can also be arranged along the Z-axis perpendicular to the misaligned axial direction (X-axis). In this case, the first and second signal probes 40A and 40B are symmetrically arranged relative to an imaginary reference plane perpendicular to the Z-axis in the straight state S1, and the aforementioned effect can also be achieved.

[0030] In the present embodiment, the center spacing d3 of the needle tail contact portions of the first and second signal probes 40A and 40B is also greater than the center spacing d2 of the needle body. This feature is to match the center spacing of the conductive contacts of the main circuit board of the corresponding probe card, so that the needle tail contact portions 413 of the first and second signal probes 40A and 40B can abut against the conductive contacts of the main circuit board of the corresponding probe card. However, as mentioned above, a space converter can be provided between the vertical probe head 21 and the main circuit board, and the upper and lower contacts of the space converter can be configured to match the conductive contacts and probes of the main circuit board, respectively. Therefore, the center spacing d3 of the needle tail contact portions of the first and second signal probes 40A and 40B can also be equal to the center spacing d2 of the needle body (such as Fig. 9 and Fig.10As described in detail below), as long as the center spacing of the lower contacts of the space transformer for the first and second signal probes 40A and 40B to abut are configured correspondingly. In other words, the width W6 of the needle tail contact portion 413 of the first and second signal probes 40A and 40B of this embodiment can also be equal to the width W2 of the needle body 43.

[0031] See also Figure 6 The vertical probe head 22 provided in a second preferred embodiment of the present invention is similar to the vertical probe head 21 (eg Figure 4 ), but the difference lies in the needle contact portion 423 of the first and second signal probes (special needles) 40A and 40B. Figure 6 In the vertical probe head 22 shown, the needle contact portion 423 of the special needles 40A and 40B is approximately equal in width to the needle contact portion 423 of the standard needle 40C. The width W5 of the needle contact portion 423 of the special needles 40A and 40B is less than the width W3 of the needle mounting portion 421. The width W5 of the needle contact portion 423 of the special needles 40A and 40B is approximately equal to the width W2 of the needle body 43. The center line C1 of the needle contact portion of the special needles 40A and 40B deviates from the center line C7 of the corresponding lower through hole. The center line C1 of the needle contact portion of the special needles 40A and 40B deviates from the center line C2 of the needle mounting portion.

[0032] Therefore, the shortest distance between the center lines C1 of the first and second signal probes 40A and 40B (i.e., the center distance d1 of the needle contact parts) is greater than the shortest distance between the center lines C3 of the first and second signal probes 40A and 40B (i.e., the center distance d2 of the needle body). In other words, the vertical probe head 21 (e.g., Figure 4 ) is designed that the width W5 of the needle contact portion 423 is greater than the width W2 of the needle body 43 (hereinafter also referred to as the needle thickening design) to achieve the structural feature that the center distance d1 of the needle contact portion is greater than the center distance d2 of the needle body, while the special needles 40A and 40B of this embodiment are designed that the center line C1 of the needle contact portion deviates from the corresponding center line C2 of the needle mounting portion (hereinafter also referred to as the needle offset design) to achieve the structural feature that the center distance d1 of the needle contact portion is greater than the center distance d2 of the needle body. The structure of this embodiment, except for the aforementioned differences, and the effects achieved are the same as those of the aforementioned first preferred embodiment, and will not be repeated here.

[0033] See also Figure 7 The vertical probe head 23 provided in a third preferred embodiment of the present invention is similar to the vertical probe head 21 (eg Figure 4 ), the difference lies in the needle tail contact portion 413 of the first and second signal probes (special needles) 40A and 40B. Figure 7In the vertical probe head 23 shown, the needle tail contact portion 413 of the special needles 40A and 40B is approximately equal to the needle tail contact portion 413 of the standard needle 40C in width. The width W6 of the needle tail contact portion 413 of the special needles 40A and 40B is less than the width W4 of the needle tail mounting portion 411. The width W6 of the needle tail contact portion 413 of the special needles 40A and 40B is approximately equal to the width W2 of the needle body 43. The center line C5 of the needle tail contact portion of the special needles 40A and 40B deviates from the center line C6 of the corresponding upper through hole. The center line C5 of the needle tail contact portion of the special needles 40A and 40B deviates from the center line C4 of the needle tail mounting portion.

[0034] Therefore, the shortest distance between the center lines C5 of the first and second signal probes 40A and 40B (i.e., the center distance d3 of the contact parts of the tails) is greater than the shortest distance between the center lines C3 of the first and second signal probes 40A and 40B (i.e., the center distance d2 of the probe bodies). In other words, the vertical probe head 21 (e.g., Figure 4 ) is designed that the width W6 of the needle tail contact portion 413 is greater than the width W2 of the needle body 43 (hereinafter also referred to as the needle tail thickening design) to achieve the structural feature that the center spacing d3 of the needle tail contact portion is greater than the center spacing d2 of the needle body, while the special needles 40A and 40B of this embodiment are designed that the center line C5 of the needle tail contact portion deviates from the center line C4 of the needle tail mounting portion (hereinafter also referred to as the needle tail offset design) to achieve the structural feature that the center spacing d3 of the needle tail contact portion is greater than the center spacing d2 of the needle body. Except for the above-mentioned differences, the structure of this embodiment and the effects achieved are the same as those of the first preferred embodiment, and will not be repeated here.

[0035] See also Figure 8 The vertical probe head 24 provided in the fourth preferred embodiment of the present invention is similar to the vertical probe head 21 (eg Figure 4 The difference lies in the needle head contact portion 423 and the needle tail contact portion 413 of the first and second signal probes (special needles) 40A and 40B. The needle head contact portion 423 of the special needles 40A and 40B of this embodiment is Figure 6 The needle tip offset design shown in the figure, the needle tail contact portion 413 of the special needles 40A and 40B of this embodiment is adopted Figure 7 The needle tail offset design shown is as described in the second and third preferred embodiments, and the other parts of this embodiment and the effects achieved are the same as those of the first preferred embodiment described above, and will not be repeated here.

[0036] It is worth mentioning that the aforementioned needle offset design (such as Figure 6) not only makes the center distance d1 of the needle contact portion larger than the center distance d2 of the needle body, but also makes the shortest distance d4 between the needle contact portions 423 of the first and second signal probes 40A and 40B larger than the shortest distance d5 between the needle bodies 43 of the first and second signal probes 40A and 40B. Such a probe can more accurately touch the conductive contact of the object to be tested. Similarly, the aforementioned needle tail offset design (such as Figure 7 ) not only makes the center spacing d3 of the needle tail contact portion larger than the center spacing d2 of the needle body, but also makes the shortest distance d6 between the needle tail contact portions 413 of the first and second signal probes 40A, 40B larger than the shortest distance d5 between the needle bodies 43 of the first and second signal probes 40A, 40B. Such probes can more accurately abut the conductive contacts of the circuit board of the probe card.

[0037] See also Fig. 9 and Fig.10 The fifth and sixth preferred embodiments of the present invention provide vertical probe heads 25 and 26 that are similar to the aforementioned vertical probe heads 21 and 22 (such as Figure 4 and Figure 6 ), but the difference between the vertical probe heads 25 and 26 and the vertical probe heads 21 and 22 lies in the needle tail contact portion 413 of the first and second signal probes (special needles) 40A and 40B. Fig. 9 and Fig.10 In the vertical probe heads 25 and 26 shown, the center line C5 of the needle tail contact portion of the special needle 40A and 40B deviates from the center line C6 of the corresponding upper through hole (that is, deviates from the center line C4 of the needle tail mounting portion) and corresponds coaxially with the center line C3 of the needle body, that is, like the standard needle 40C, the needle tail contact portion 413 is not offset relative to the needle body 43. In addition, the needle tail contact portion 413 of the special needle 40A and 40B is roughly equal to the width of the needle tail contact portion 413 of the standard needle 40C. The width W6 of the needle tail contact portion 413 of the special needle 40A and 40B is smaller than the width W4 of the needle tail mounting portion 411. The width W6 of the needle tail contact portion 413 of the special needle 40A and 40B is roughly equal to the width W2 of the needle body 43.

[0038] As mentioned above, the center distance d3 between the contact parts of the first and second signal probes 40A and 40B can be equal to the center distance d2 between the probe bodies. Fig. 9 and Fig.10 The design of the needle tail contact portion 413 in the embodiment is achieved. The design of the needle head contact portion 423 still needs to make the needle head contact portion center distance d1 greater than the needle body center distance d2. Fig. 9 In the figure, the vertical probe head 21 (such as Figure 4 The needle tip is thickened to achieve this. Fig.10 The needle tip of the vertical probe head 22 is designed as a deviation (such as Figure 6The structures and effects achieved by these two embodiments, except for the aforementioned differences, are the same as those of the aforementioned first preferred embodiment, and will not be repeated here.

[0039] See also Fig.11 The main difference between the vertical probe head 27 provided in the seventh preferred embodiment of the present invention and the aforementioned embodiments is that, among the paired first and second signal probes 40A and 40B, only the second signal probe 40B is a special needle, while the first signal probe 40A is a standard needle that is the same as the third signal probe 40C. In other words, the paired first and second signal probes 40A and 40B described in the present invention can be a combination of special needles and special needles as in the first to sixth preferred embodiments, or a combination of special needles and standard needles as in this embodiment, wherein the special needle can adopt any of the special needle designs provided in the first to sixth preferred embodiments, or the special needle design provided in this embodiment, as described in detail below.

[0040] For the standard needle 40C of the aforementioned embodiments and the standard needles 40A and 40C of the present embodiment, the center line C3 of the needle body, the center line C1 of the needle head contact portion and the center line C5 of the needle tail contact portion in the straight state S1 overlap with each other, and the width D2 of the upper through hole 324 through which the standard needles 40A and 40C pass is greater than or equal to the width D3 of the lower through hole 344 through which the standard needles 40A and 40C pass. For the special needles 40A, 40B of the aforementioned embodiments and the special needle 40B of the present embodiment, the center line C3 of the needle body in the straight state S1 deviates from the center line C2 of the needle head mounting portion and the center line C4 of the needle tail mounting portion, and the special needle 40B can adopt the aforementioned needle tail offset design or needle tail widening design, combined with the needle head offset design or needle head widening design, that is, provided in the first to fourth preferred embodiments, or the special needle 40B can adopt the aforementioned needle tail without widening or offset design, combined with the needle head offset design or needle head widening design, that is, provided in the fifth and sixth preferred embodiments. In addition, for the second signal probe (special needle) 40B of the present embodiment, the width W4 of the needle tail mounting portion 411 is equal to or slightly larger than the width W3 of the needle head mounting portion 421, so the width D1 of the upper through hole 323 through which the second signal probe 40B passes is equal to or slightly larger than the width D4 of the lower through hole 343 through which the second signal probe 40B passes. It is worth mentioning that, whether it is a special needle or a standard needle, when the width of the upper through hole through which the same probe passes is greater than the width of the lower through hole, when performing the needle implantation operation, the lower through hole can be seen through the upper through hole, so it is easier to pass the probe from top to bottom through the upper and lower through holes. In other words, the feature that the width of the upper through hole is greater than the width of the lower through hole is conducive to the needle implantation operation, but the present invention is not limited to this. As mentioned above, the needle tail mounting part and the needle head mounting part and their corresponding upper and lower through holes can be approximately equal in width, so that the needle tail mounting part and the needle head mounting part are more stably positioned in the upper and lower through holes. Therefore, when the width of the upper through hole is greater than the width of the lower through hole, the width of the needle tail mounting part can be greater than the width of the needle head mounting part, but it is not limited to this.

[0041] In the case where only one of the first and second signal probes 40A and 40B is a special needle, the structural feature that the center spacing d1 of the needle contact part is greater than the center spacing d2 of the needle body can still be achieved by virtue of the width W2 of the needle body 43 of the special needle being smaller than the width W3 of the needle mounting portion 421, the center line C3 of the needle body of the special needle deviating from the center line C2 of its own needle mounting portion in the direction of the same pair of probes, and the aforementioned needle widening design or needle offset design. The structural feature that the center spacing d3 of the needle tail contact part is greater than the center spacing d2 of the needle body can also be achieved by virtue of the aforementioned needle tail widening design or needle tail offset design. The effects achieved by these structural features are the same as those of the aforementioned first preferred embodiment and will not be repeated here.

[0042] Finally, it must be stated again that the constituent elements disclosed in the aforementioned embodiments of the present invention are merely illustrative and are not intended to limit the scope of patent protection of this case. Replacements or changes of other equivalent elements should also be covered by the scope of the claims of this case.

Claims

1. A vertical probe head, characterized in that Contains: A probe seat, comprising an upper guide plate unit and a lower guide plate unit, wherein the upper guide plate unit comprises at least one upper guide plate and a plurality of upper through holes penetrating the at least one upper guide plate, and the lower guide plate unit comprises at least one lower guide plate and a plurality of lower through holes penetrating the at least one lower guide plate, wherein the upper guide plate unit and the lower guide plate unit respectively have an upper surface and a lower surface, and the lower surface of the upper guide plate unit faces the upper surface of the lower guide plate unit; A plurality of probes, each of which passes through an upper through hole and a lower through hole, each of which comprises a needle tail, a needle head, and a needle body located between the needle tail and the needle head, the needle tail comprising a needle tail contact portion for electrically contacting a circuit board of a probe card, and a needle tail mounting portion located between the needle tail contact portion and the needle body and at least partially accommodated in the upper through hole, the needle head comprising a needle head mounting portion at least partially accommodated in the lower through hole, and a needle head contact portion located below the lower surface of the lower guide plate unit and for electrically contacting an object to be tested, the needle body being located between the lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit, the needle body being able to define a needle body centerline, the needle head contact portion being able to define a needle head contact portion centerline, and the needle head mounting portion being able to define a needle head mounting portion centerline; Among them, the multiple probes include at least one pair of signal probes, and the at least one pair of signal probes includes a first signal probe and a second signal probe that are adjacent to each other. At least one of the first signal probe and the second signal probe is a special needle, and the width of the needle body of the special needle is smaller than the width of the needle head mounting part of the special needle, and the center line of the needle body of the special needle deviates from the center line of the needle head mounting part of the special needle itself toward the direction of the probe paired with the special needle, and the shortest distance between the center line of the needle head contact part of the first signal probe and the center line of the needle head contact part of the second signal probe is greater than the shortest distance between the center line of the needle body of the first signal probe and the center line of the needle body of the second signal probe.

2. The vertical probe head according to claim 1, characterized in that: The center line of the needle contact portion of the special needle deviates from the center line of its corresponding needle mounting portion.

3. The vertical probe head according to claim 1, characterized in that: The width of the needle head contact portion of the special needle is greater than the width of the needle body of the special needle.

4. The vertical probe head according to claim 3, characterized in that: The needle tail contact portion of each of the probes can define a needle tail contact portion center line, and the needle tail mounting portion of each of the probes can define a needle tail mounting portion center line. The needle tail contact portion center line of the special needle deviates from the corresponding needle tail mounting portion center line.

5. The vertical probe head according to claim 3, characterized in that: The width of the needle tail contact portion of the special needle is greater than the width of the needle body of the special needle.

6. The vertical probe head according to claim 3, characterized in that: The needle tail contact portion of each probe can define a needle tail contact portion center line, and the needle tail mounting portion of each probe can define a needle tail mounting portion center line. The needle tail contact portion center line of the special needle deviates from its corresponding needle tail mounting portion center line and corresponds coaxially to the needle body center line.

7. The vertical probe head according to claim 2, characterized in that: The needle tail contact portion of each of the probes can define a needle tail contact portion center line, and the needle tail mounting portion of each of the probes can define a needle tail mounting portion center line. The needle tail contact portion center line of the special needle deviates from the corresponding needle tail mounting portion center line.

8. The vertical probe head according to claim 2, characterized in that: The width of the needle tail contact portion of the special needle is greater than the width of the needle body of the special needle.

9. The vertical probe head according to claim 2, characterized in that: The needle tail contact portion of each probe can define a needle tail contact portion center line, and the needle tail mounting portion of each probe can define a needle tail mounting portion center line. The needle tail contact portion center line of the special needle deviates from its corresponding needle tail mounting portion center line and corresponds coaxially to the needle body center line.

10. The vertical probe head according to claim 1, characterized in that: The needle tail contact portion of each of the probes can define a needle tail contact portion center line, and the needle tail mounting portion of each of the probes can define a needle tail mounting portion center line; the upper guide plate unit and the lower guide plate unit are used to stagger each other along a horizontal axis so that each of the probes can be transformed from a straight line state to a bent state. When the first signal probe and the second signal probe are in the straight line state, the needle body center line, the needle head contact portion center line and the needle tail contact portion center line of the first signal probe overlap with each other, and the needle body center line of the second signal probe deviates from the needle head mounting portion center line and the needle tail mounting portion center line of the second signal probe; the width of the upper through hole through which the first signal probe passes is greater than or equal to the width of the lower through hole through which the first signal probe passes, and the width of the upper through hole through which the second signal probe passes is greater than or equal to the width of the lower through hole through which the second signal probe passes.

11. The vertical probe head according to claim 10, characterized in that: The center line of the needle contact portion of the second signal probe deviates from the center line of its corresponding needle mounting portion.

12. The vertical probe head according to claim 10, characterized in that: The width of the needle contact portion of the second signal probe is greater than the width of the needle body thereof.

13. The vertical probe head according to claim 12, characterized in that: The center line of the needle tail contact portion of the second signal probe deviates from the center line of its corresponding needle tail mounting portion.

14. The vertical probe head according to claim 12, wherein: The width of the needle tail contact portion of the second signal probe is greater than the width of the needle body thereof.

15. The vertical probe head according to claim 11, characterized in that: The center line of the needle tail contact portion of the second signal probe deviates from the center line of its corresponding needle tail mounting portion.

16. The vertical probe head according to claim 11, characterized in that: The width of the needle tail contact portion of the second signal probe is greater than the width of the needle body thereof.

17. The vertical probe head according to claim 1, characterized in that: The tail contact portion of each probe can define a tail contact portion center line, and the shortest distance between the tail contact portion center line of the first signal probe and the tail contact portion center line of the second signal probe is greater than the shortest distance between the needle body center line of the first signal probe and the needle body center line of the second signal probe.

18. The vertical probe head according to claim 1, characterized in that: The shortest distance between the needle tail contact portion of the first signal probe and the needle tail contact portion of the second signal probe is greater than the shortest distance between the needle body of the first signal probe and the needle body of the second signal probe.

19. The vertical probe head according to claim 1, characterized in that: The upper through holes of the upper guide plate unit include at least one special upper through hole for the special needle to pass through, and at least one standard upper through hole; the lower through holes of the lower guide plate unit include at least one special lower through hole for the special needle to pass through, and at least one standard lower through hole; the width of the standard upper through hole is greater than or equal to the width of the standard lower through hole, the width of the standard upper through hole is less than or equal to the width of the special upper through hole, and the width of the standard lower through hole is less than or equal to the width of the special lower through hole; the multiple probes further include at least one third signal probe, and the third signal probe passes through the standard upper through hole and the standard lower through hole.

20. The vertical probe head according to claim 1, characterized in that: The vertical probe head can define a first horizontal axis and a second horizontal axis that are perpendicular to each other. The upper guide plate unit and the lower guide plate unit are used to stagger each other along the first horizontal axis so that each of the probes can be transformed from a straight line state to a bent state. The first signal probe and the second signal probe are both special needles, and the first signal probe and the second signal probe are symmetrically arranged relative to an imaginary reference plane perpendicular to one of the first horizontal axis and the second horizontal axis in the straight line state.

21. The vertical probe head according to claim 1, characterized in that: The first signal probe and the second signal probe each further include an upper stopper located above the upper through hole, wherein the width of the upper stopper is greater than the width of the upper through hole; the upper stopper is disposed between the needle tail mounting portion and the needle tail contact portion.

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