Diagnostic device

Abstract

The present application relates to a kind of diagnostic devices, for diagnosing the discharge performance of the carbon nanotube assembly to be measured, the carbon nanotube assembly to be measured is used for ionizing working gas, and the carbon nanotube assembly to be measured includes the region to be measured.Diagnostic device includes support mechanism and test mechanism, support mechanism is used to install the carbon nanotube assembly to be measured;Test mechanism is used to be installed in the ion emission direction of the carbon nanotube assembly to be measured, and test mechanism includes insulating shield plate, ion collection plate and the first electric signal acquisition card connected to ion collection plate, insulating shield plate is located between ion collection plate and support mechanism, and insulating shield plate is provided with the first opening region corresponding to the region to be measured, and the first opening region is used for the ionization ion of the region to be measured to pass, ion collection plate is used to collect the ion passing through the first opening region, and the first electric signal acquisition card is used to acquire the ion current on ion collection plate.

Description

Technical Field

[0001] This invention relates to the field of aerospace technology, and in particular to a diagnostic device. Background Technology

[0002] Ion thrusters, also known as ion propulsion systems or ion engines, work by first ionizing gas, then using an electric field to accelerate the charged ions before ejecting them, using their reaction force to propel the rocket. Among these, ionization thrusters using carbon nanotube components as high-voltage electrodes can generate extremely high field enhancement effects, resulting in superior thrust performance.

[0003] like Figure 1 As shown, the carbon nanotube assembly 100 includes a carbon nanotube high-voltage electrode 110 and a carbon nanotube array 120, with the array 120 disposed on a low-resistivity silicon substrate of the high-voltage electrode 110. A working gas, such as argon or xenon, is introduced into the vicinity of the carbon nanotube assembly 100. The carbon nanotube array 120 ionizes the working gas, converting it into positive ions and electrons, thereby generating thrust. The discharge performance of the carbon nanotube assembly 100 directly affects the thrust effect of the ion thruster; therefore, monitoring its discharge performance is crucial. However, currently, there is no matching diagnostic device to detect the discharge performance of certain regions of the carbon nanotube assembly 100. Summary of the Invention

[0004] Therefore, it is necessary to provide a diagnostic device to address the discharge performance issues of carbon nanotube components.

[0005] A diagnostic device for diagnosing the discharge performance of a carbon nanotube assembly under test, the carbon nanotube assembly being used to ionize a working gas, the carbon nanotube assembly including a test region, the diagnostic device comprising:

[0006] A support mechanism is used to mount the carbon nanotube assembly to be tested;

[0007] A testing mechanism is installed in the ion emission direction of the carbon nanotube assembly under test. The testing mechanism includes an insulating shielding plate, an ion collecting plate, and a first electrical signal acquisition card connected to the ion collecting plate. The insulating shielding plate is located between the ion collecting plate and the support mechanism. The insulating shielding plate is provided with a first opening area corresponding to the area under test. The first opening area is used to allow ions ionized by the area under test to pass through. The ion collecting plate is used to collect the ions passing through the first opening area. The first electrical signal acquisition card is used to acquire the ion current on the ion collecting plate.

[0008] In one embodiment, the testing mechanism further includes an insulating barrier sheet and a gate sheet, the gate sheet being sandwiched between the insulating barrier sheet and the insulating shielding plate. The gate sheet has a second opening region, and the insulating barrier sheet has a third opening region. The first opening region, the second opening region, and the third opening region are all sectors with the same vertex, and the center line of the first opening region, the center point of the second opening region, and the center line of the third opening region are collinear. The central angle of the first opening region is α, the central angle of the second opening region is β, and the central angle of the third opening region is γ, where γ > α > β.

[0009] Of the ions passing through the first opening region, some ions are attracted by the gate plate, and some ions pass through the second opening region and the third opening region in sequence and are attracted by the ion collecting plate.

[0010] In one embodiment, the testing mechanism further includes a second electrical signal acquisition card connected to the gate plate, the second electrical signal acquisition card being used to acquire the ion current of the gate plate.

[0011] In one embodiment, the testing mechanism further includes a first terminal and a second terminal, wherein the first electrical signal acquisition card is connected to the ion collection plate through the first terminal, and the second electrical signal acquisition card is connected to the gate plate through the second terminal.

[0012] In one embodiment, a lifting mechanism is further included, the lifting mechanism comprising a lifting motor and a first motor mounting bracket, the first motor mounting bracket being connected to the support mechanism, the lifting motor being mounted on the first motor mounting bracket, the lifting motor being connected to the test mechanism via a lead screw assembly, and the axial direction of the lead screw assembly being parallel to the axial direction of the test mechanism, the output end of the lifting motor being configured to rotate to adjust the distance between the test mechanism and the support mechanism.

[0013] In one embodiment, a rotating mechanism is further included, comprising a rotary motor and a second motor mounting bracket. The output end of the rotary motor is connected to the testing mechanism, and the axis of the rotary motor is collinear with the axis of the testing mechanism and the axis of the carbon nanotube assembly under test. The rotary motor is configured to rotate to drive the testing mechanism to rotate. The rotary motor is mounted on the second motor mounting bracket, which is connected to the lead screw sleeve of the lead screw assembly. The lead screw sleeve is movable along the axial direction to drive the rotating mechanism and the testing mechanism to move synchronously along the axial direction.

[0014] In one embodiment, a connecting assembly is further included, the connecting assembly comprising a motor shaft connector and an insulating adapter, the motor shaft connector being sleeved on the output end of the rotary motor, the insulating adapter being connected to the ion collecting plate, and the motor shaft connector being threadedly connected to the insulating adapter.

[0015] In one embodiment, the support mechanism includes:

[0016] An insulating support base has a receiving groove on its end face near the insulating shield plate, the receiving groove being used to install the carbon nanotube assembly to be tested;

[0017] A conductive sleeve is disposed within the insulating support base, and partially extends into the receiving groove. The conductive sleeve is used to fit against the carbon nanotube assembly under test to connect the high-voltage power supply and the carbon nanotube assembly under test.

[0018] In one embodiment, the insulating support base includes an insulating support plate and an insulating sleeve connected to the insulating support plate. The insulating support plate is located between the insulating sleeve and the testing mechanism. The receiving groove is formed on the end face of the insulating support plate. The conductive sleeve is located inside the insulating sleeve and partially extends into the receiving groove. The side wall of the insulating sleeve is provided with mounting holes for conductive wires to pass through.

[0019] In one embodiment, a vacuum chamber is further included, in which both the support mechanism and the testing mechanism are installed, and the vacuum chamber is provided with a working gas for ionization.

[0020] The beneficial effects of this invention are:

[0021] The aforementioned diagnostic device is used to diagnose the discharge performance of a carbon nanotube assembly under test. The diagnostic mechanism includes a support mechanism and a testing mechanism. The carbon nanotube assembly under test is mounted on the support mechanism to fix it in place for subsequent testing. The support mechanism is installed in the ion emission direction of the carbon nanotube assembly. The carbon nanotube assembly under test includes a test area. A first opening area is provided on an insulating shield plate corresponding to the test area. The insulating shield plate is then placed between the carbon nanotube assembly under test and an ion collecting plate, allowing only ions generated by ionization in the test area to pass through the first opening area and the insulating shield plate to reach the ion collecting plate. The ion current on the ion collecting plate is then detected by a first electrical signal acquisition card, thereby diagnosing the ion current in the test area. The magnitude of the ion current in the test area reflects the magnitude of the ionization current generated in the test area of ​​the carbon nanotube assembly, thus determining the discharge performance of the test area. An opening area is provided in the insulating shielding plate. The opening area corresponds to the test area of ​​the carbon nanotube component under test, so that only ions ionized in the test area can pass through, ensuring the accuracy of measuring the discharge performance of the test area. Ions generated by ionization in areas other than the test area of ​​the carbon nanotube component under test are shielded by the insulating shielding plate and cannot enter the ion collecting plate. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the carbon nanotube assembly mentioned in the background section;

[0023] Figure 2 This is a schematic diagram of the structure of the diagnostic device provided in an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the testing mechanism provided in an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the structure of the insulating shielding plate provided in an embodiment of the present invention;

[0026] Figure 5 This is a schematic diagram of the gate chip structure provided in an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram showing the positional relationship between the insulating shield plate and the gate plate provided in an embodiment of the present invention;

[0028] Figure 7 This is a schematic diagram of the support mechanism provided in an embodiment of the present invention.

[0029] In the picture:

[0030] 100. Carbon nanotube assembly; 110. Carbon nanotube high-voltage electrode sheet; 120. Carbon nanotube array;

[0031] 200, Support mechanism; 210, Insulating support base; 211, Insulating support plate; 212, Insulating sleeve; 2121, Mounting hole; 220, Conductive sleeve; 230, Conductive adhesive film; 240, Support frame;

[0032] 300. Testing mechanism; 310. Insulating shielding plate; 311. First opening area; 320. Ion collecting plate; 330. First electrical signal acquisition card; 340. Insulating barrier sheet; 350. Gate sheet; 351. Second opening area; 360. Second electrical signal acquisition card; 370. First terminal; 380. Second terminal;

[0033] 400. Lifting mechanism; 410. Lifting motor; 420. First motor mounting bracket; 430. Lifting motor driver; 440. Lifting motor controller; 450. Lifting motor power supply;

[0034] 500. Rotating mechanism; 510. Rotating motor; 520. Second motor mounting bracket; 530. Rotating motor driver; 540. Rotating motor controller; 550. Rotating motor power supply;

[0035] 600. Connecting assembly; 610. Motor shaft connector; 620. Insulating adapter;

[0036] 700. Vacuum chamber;

[0037] 800, High-voltage power supply. Detailed Implementation

[0038] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0039] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0041] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0043] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0044] like Figure 2 and Figure 3As shown, this embodiment of the invention provides a diagnostic device for diagnosing the discharge performance of a carbon nanotube assembly 100 under test. The carbon nanotube assembly 100 is used to ionize a working gas and includes a test area. The diagnostic device includes a support mechanism 200 and a testing mechanism 300. The support mechanism 200 is used to mount the carbon nanotube assembly 100 under test. The testing mechanism 300 is installed in the ion emission direction of the carbon nanotube assembly 100 under test. The testing mechanism 300 includes an insulating shielding plate 310, an ion collecting plate 320, and a first electrical signal acquisition card 330 connected to the ion collecting plate 320. The insulating shielding plate 310 is located between the ion collecting plate 320 and the support mechanism 200. The insulating shielding plate 310 is provided with a first opening area 311 corresponding to the test area. The first opening area 311 is used to allow ions ionized by the test area to pass through. The ion collecting plate 320 is used to collect ions passing through the first opening area 311. The first electrical signal acquisition card 330 is used to acquire the ion current on the ion collecting plate 320.

[0045] The aforementioned diagnostic device is used to diagnose the discharge performance of the carbon nanotube assembly 100 under test. The diagnostic mechanism includes a support mechanism 200 and a testing mechanism 300. The carbon nanotube assembly 100 under test is mounted on the support mechanism 200, thereby fixing the carbon nanotube assembly 100 under test and facilitating subsequent testing. The support mechanism 200 is installed in the ion emission direction of the carbon nanotube assembly 100. The carbon nanotube assembly 100 includes a test area. A first opening area 311 is provided on the insulating shield plate 310 corresponding to the test area. The insulating shield plate 310 is then placed between the carbon nanotube assembly 100 and the ion collecting plate 320. Only ions generated by ionization in the test area are allowed to pass through the first opening area 311, through the insulating shield plate 310, and move to the ion collecting plate 320. The ion current on the ion collecting plate 320 is then detected by the first electrical signal acquisition card 330, thereby diagnosing the ion current in the test area. The magnitude of the ion current in the test area reflects the magnitude of the current generated by ionization in the test area of ​​the carbon nanotube assembly 100, thus determining the discharge performance of the test area. An opening region 311 is provided in the insulating shielding plate 310. The opening region 311 corresponds to the test region of the carbon nanotube assembly 100 under test, so that only ions ionized in the test region can pass through, ensuring the accuracy of measuring the discharge performance of the test region. Ions generated by ionization in areas other than the test region of the carbon nanotube assembly 100 under test are shielded by the insulating shielding plate 310 and cannot enter the ion collecting plate 320.

[0046] In some embodiments, such as Figures 2 to 5As shown, the testing mechanism 300 also includes an insulating barrier sheet 340 and a gate sheet 350. The gate sheet 350 is sandwiched between the insulating barrier sheet 340 and the insulating shielding plate 310. The gate sheet 350 is provided with a second opening region 351, and the insulating barrier sheet 340 is provided with a third opening region. The first opening region 311, the second opening region 351, and the third opening region are all fan-shaped with the same vertex. The center line of the first opening region 311, the center point of the second opening region 351, and the center line of the third opening region are collinear. The central angle of the first opening region 311 is α, the central angle of the second opening region 351 is β, and the central angle of the third opening region is γ, where γ > α > β. Among the ions passing through the first opening region 311, some ions are attracted by the gate sheet 350, and some ions pass through the second opening region 351 and the third opening region in sequence and are attracted by the ion collecting plate 320. An insulating barrier plate 340 is used to block the grid plate 350 and the ion collecting plate 320, preventing them from conducting. A fan-shaped first opening region 311 is provided on the insulating shield plate 310 to facilitate the passage of ions ionized from the area to be tested. A fan-shaped second opening region 351 is provided on the grid plate 350. A high-voltage electric field is formed between a portion of the grid plate 350 and the area to be tested of the carbon nanotube assembly 100. A portion of the grid plate 350 can attract ions passing through the first opening region 311. A fan-shaped third opening region is provided on the insulating barrier plate 340. Some ions passing through the first opening region 311 can sequentially pass through the second opening region 351 and the third opening region and be attracted by the ion collecting plate 320. Then, the ion current on the ion collecting plate 320 is collected by the first electrical signal acquisition card 330, thereby obtaining the beam current value of the area to be tested of the carbon nanotube assembly 100, and thus obtaining the beam characteristics of the area to be tested.

[0047] like Figure 3 As shown, along the arrangement direction of the insulating shielding plate 310 and the ion collecting plate 320, from bottom to top, are the insulating shielding plate 310, the gate plate 350, the insulating barrier plate 340, and the ion collecting plate 320. Adjacent units of the insulating shielding plate 310, the gate plate 350, the insulating barrier plate 340, and the ion collecting plate 320 are bonded together with adhesive to form a single unit. More specifically, the insulating shielding plate 310, the gate plate 350, the insulating barrier plate 340, and the ion collecting plate 320 are all annular structures with the same radius. Furthermore, the radii of the insulating shielding plate 310, the gate plate 350, the insulating barrier plate 340, and the ion collecting plate 320 are the same as the radius of the carbon nanotube assembly 100 under test.

[0048] Specifically, such as Figure 3 and Figure 6As shown, the central angle of the first opening region 311 on the insulating shield plate 310 is α, the central angle of the second opening region 351 on the gate plate 350 is β, and the central angle of the third opening region on the insulating barrier plate 340 is γ, where γ > α > β. When viewed from bottom to top along the arrangement direction of the insulating shield plate 310 and the ion collecting plate 320, because the central angle α of the first opening region 311 is greater than the central angle β of the second opening region 351, that is, the sector area of ​​the first opening region 311 is larger, and the sector area of ​​the second opening region 351 is smaller. Because the center lines of the first opening region 311 and the second opening region 351 are collinear, a portion of the gate plate 350 will inevitably be exposed through the first opening region 311. At this point, some ions ionized by the test area of ​​the carbon nanotube assembly 100 will be attracted by the exposed portion of the gate plate 350, thus moving towards the gate plate 350. Some ions will then sequentially pass through the first opening region 311, the second opening region 351, and the third opening region, thus moving onto the ion collecting plate 320. Specifically, the angle range of β is 5°-25°, and the angle range of γ is 10°-30°.

[0049] Specifically, the thickness of the insulating barrier 340 is greater than the thickness of the insulating shield 310, and the thickness of the insulating barrier 340 is less than 100 μm.

[0050] In some embodiments, such as Figure 2 As shown, the testing mechanism 300 also includes a second electrical signal acquisition card 360, which is connected to the gate plate 350 and is used to acquire the ion current of the gate plate 350. By setting the second electrical signal acquisition card 360 to be connected to the gate plate 350, the ion current value on the gate plate 350 can be acquired.

[0051] It should be noted that when the ion collecting plate 320 and the insulating shielding plate 310 are working, the first electrical signal acquisition card 330 acquires the ion current value of the area under test. When the insulating shielding plate 310, the grid plate 350, the insulating barrier plate 340, and the ion collecting plate 320 are working together, the first electrical signal acquisition card 330 acquires the beam current value of the area under test, while the second electrical signal acquisition card 360 acquires the ion current value of the area under test.

[0052] In some embodiments, such as Figure 2 and Figure 3As shown, the testing mechanism 300 also includes a first terminal 370 and a second terminal 380. A first electrical signal acquisition card 330 is connected to the ion collection plate 320 via the first terminal 370, and a second electrical signal acquisition card 360 is connected to the gate plate 350 via the second terminal 380. The first terminal 370 facilitates electrical signal transmission between the first electrical signal acquisition card 330 and the ion collection plate 320, enabling the acquisition of the current value of the ion collection card. The second terminal 380 facilitates electrical signal transmission between the second electrical signal acquisition card 360 and the gate plate 350, enabling the acquisition of the current value on the gate plate 350.

[0053] Specifically, the first terminal 370 is welded to the ion collecting plate 320, and the second terminal 380 passes through the ion collecting plate 320 and is welded to the gate plate 350.

[0054] During diagnosis, the distance between the testing mechanism 300 and the carbon nanotube component 100 under test needs to be adjusted to ensure that a high-voltage electric field of ionized working gas can be formed between the carbon nanotube component 100 under test and the testing mechanism 300. To solve the above problem, such as... Figure 2 As shown, the diagnostic device provided in this embodiment also includes a lifting mechanism 400. The lifting mechanism 400 includes a lifting motor 410 and a first motor mounting bracket 420. The first motor mounting bracket 420 is connected to the support mechanism 200. The lifting motor 410 is mounted on the first motor mounting bracket 420. The lifting motor 410 is connected to the testing mechanism 300 through a lead screw assembly, and the axial direction of the lead screw assembly is parallel to the axial direction of the testing mechanism 300. The output end of the lifting motor 410 is configured to rotate to adjust the distance between the testing mechanism 300 and the support mechanism 200. By setting the lifting mechanism 400, the lifting motor 410 rotates, thereby adjusting the distance between the testing mechanism 300 and the support mechanism 200, and thus adjusting the distance between the testing mechanism 300 and the carbon nanotube assembly 100 to be tested. The first motor mounting bracket 420 of the lifting mechanism 400 is mounted on the support mechanism 200. Then, the axis of the lead screw assembly is made parallel to the axis of the test mechanism 300. That is, the axis of the output end of the lifting motor 410 needs to be parallel to the axis of the test mechanism 300 to ensure that the lifting motor 410 rotates and adjusts the distance between the test mechanism 300 and the support mechanism 200.

[0055] Specifically, the lead screw assembly includes a lead screw and a lead screw sleeve. The lead screw is connected to the output end of the lifting motor 410, and the lead screw sleeve is fitted on the lead screw and threadedly connected to the lead screw. When the output end of the lifting motor 410 rotates, it drives the lead screw to rotate, thereby realizing the movement of the lead screw sleeve along the axial direction.

[0056] Preferably, such as Figure 2As shown, the lifting mechanism 400 also includes a lifting motor driver 430, a lifting motor controller 440, and a lifting motor power supply 450. The lifting motor 410, the lifting motor driver 430, the lifting motor controller 440, and the lifting motor power supply 450 are connected by wires to control the operation of the lifting motor 410.

[0057] Specifically, the minimum unit movement distance of the lifting mechanism 400 is 0.2μm, and it can flexibly achieve automated operation under certain displacement speed, displacement direction, interval time, and total cycle distance through self-programming.

[0058] More specifically, the self-driving program of the lifting motor 410 can be set as follows: 1) forward rotation speed 4 pulses / second; 2) rotation angle 8 pulses; 3) interval 3 seconds; 4) cycle from step 1) to step 3) 10,000 times. Among them, the stepper lifting motor 410 requires 6,400 pulses to rotate one revolution, and the motor rises 1 mm per revolution.

[0059] like Figure 2 As shown, the diagnostic device also includes a rotating mechanism 500, which includes a rotating motor 510 and a second motor mounting bracket 520. The output end of the rotating motor 510 is connected to the test mechanism 300, and the axis of the rotating motor 510, the axis of the test mechanism 300, and the axis of the carbon nanotube assembly 100 under test are collinear. The rotating motor 510 is configured to rotate to drive the test mechanism 300 to rotate. The rotating motor 510 is mounted on the second motor mounting bracket 520, which is connected to the lead screw sleeve of the lead screw assembly. The lead screw sleeve can move along the axial direction to drive the rotating mechanism 500 and the test mechanism 300 to move synchronously along the axial direction. The axes of the rotary motor 510, the testing mechanism 300, and the carbon nanotube assembly 100 under test are collinear. The rotary motor 510 of the rotary mechanism 500 is connected to the testing mechanism 300. When the rotary motor 510 drives the testing mechanism 300 to rotate, the first opening region 311 rotates relative to the carbon nanotube assembly 100 under test, thus changing the test area of ​​the carbon nanotube assembly 100. After multiple rotations, the first electrical signal acquisition card collects multiple ion currents, allowing for the diagnosis of multiple regions of the carbon nanotube assembly 100 under test in stages. It can be understood that when the rotation angle of the testing mechanism 300 is 360°, the cross-section traversed by the first opening region 311 is the cross-section of the carbon nanotube assembly 100 under test.

[0060] The rotary motor 510 is mounted on the second motor mounting bracket 520, and the second motor mounting bracket 520 is mounted on the lead screw sleeve of the lead screw assembly. When the lead screw sleeve moves along the axial direction, it can drive the rotary mechanism 500 to move along the axial direction. Since the rotary motor 510 of the rotary mechanism 500 is connected to the test mechanism 300, it can synchronously drive the test mechanism 300 to move along the axial direction.

[0061] It should be noted that when the test area of ​​the carbon nanotube assembly 100 is changed by rotating mechanism 500, the first electrical signal acquisition card 330 and the second electrical signal acquisition card 360 can only collect ion current after the rotating motor 510 drives the test mechanism 300 to rotate completely to the next test area. This is to prevent the diagnostic results of the test area from being unreliable because the previous test area and the next test area overlap.

[0062] Specifically, the sampling frequency of the first electrical signal acquisition card 330 and / or the second electrical signal acquisition card 360 can be adjusted so that the running time consumed by the rotating insulating shield 310 to rotate through a first opening region 311 matches the sampling interval time, thereby achieving spatial resolution diagnosis in the horizontal direction. Specifically, if the sampling frequency is set to fHz, the central angle α of the first opening region 311 of the insulating shield 310 is given, and the horizontal rotation speed of the rotating motor 510 is v (pulses / s), and one rotation is 1600 pulses, the following relationship must be satisfied:

[0063] f·α·1600 / v=360°

[0064] For example, when rotary motor 510 selects Yamasha 42 stepper motor, if its pulse is set to 8 microsteps, rotary motor 510 (selecting this stepper motor) needs 1600 pulses to rotate one revolution (360°). The rotation speed n is also measured in pulses, so its unit is pulses / s.

[0065] To ensure that the spatial sampling data does not overlap, the central angle α of the first opening region 311 of the insulating shielding plate 310 requires the acquisition card to collect data n times during one full rotation (360°).

[0066] n = 360 / α

[0067] The rotary motor 510 has a speed of n (pulses / s), and it requires 1600 pulses to rotate 360°. Therefore, the time required to rotate 360° is:

[0068] t = 1600 / v

[0069] If the sampling frequency of the first electrical signal acquisition card 330 and / or the second electrical signal acquisition card 360 is set to fHz, it means that the signal is acquired f times per unit time (per second). Therefore, the number of signal acquisitions required for the rotary motor 510 to rotate 360° is:

[0070] M = t × f = 1600 / v × f

[0071] In conclusion, the goal can only be achieved if m = n.

[0072] 1600 / v×f=360 / α

[0073] therefore,

[0074] f·α·1600 / v=360°.

[0075] Preferably, such as Figure 2 As shown, the rotating mechanism 500 also includes a rotating motor driver 530, a rotating motor controller 540, and a rotating motor power supply 550. The rotating motor 510, the rotating motor driver 530, the rotating motor controller 540, and the rotating motor power supply 550 are connected by wires to control the operation of the rotating motor 510.

[0076] Specifically, the rotary motor 510 has a minimum rotation angle of 0.1° and can flexibly achieve automated operation under certain rotation speed, rotation angle, rotation direction, and interval time conditions through self-programming.

[0077] More specifically, the self-drive program of the rotary motor 510 can be set as follows: 1) forward rotation speed 1600 pulses / second; 2) forward rotation angle 1600 pulses; 3) interval 1 second; 4) reverse rotation speed 1600 pulses / second; 5) reverse rotation angle 1600 pulses; 6) interval 2 seconds; 7) infinite loop from 1) to 6). The 1600 pulses is the number of pulses required for one revolution of the motor, which can be set as needed.

[0078] In some embodiments, such as Figure 2 and Figure 3 As shown, the diagnostic component also includes a connection component 600, which includes a motor shaft connector 610 and an insulating adapter 620. The motor shaft connector 610 is sleeved on the output end of the rotary motor 510, and the insulating adapter 620 is connected to the ion collecting plate 320. The motor shaft connector 610 is threadedly connected to the insulating adapter 620. By setting the motor shaft connector 610 and the insulating adapter 620, the motor shaft connector 610 is sleeved on the output end of the rotary motor 510 with an interference fit, the insulating adapter 620 is connected to the ion collecting plate 320, and the motor shaft connector 610 is threadedly connected to the insulating adapter 620, thus achieving the connection between the rotating mechanism 500 and the testing mechanism 300. Specifically, the insulating adapter 620 is glued to the ion collecting plate 320.

[0079] In some embodiments, such as Figure 2 and Figure 7As shown, the support mechanism 200 includes an insulating support base 210 and a conductive sleeve 220. The insulating support base 210 has a receiving groove on its end face near the insulating shielding plate 310, which is used to install the carbon nanotube assembly 100 to be tested. The conductive sleeve 220 is disposed within the insulating support base 210, partially extending into the receiving groove. The conductive sleeve 220 is used to contact the carbon nanotube assembly 100 to connect the high-voltage power supply 800 and the carbon nanotube assembly 100. The insulating support base 210 has insulating properties. The receiving groove on the end face of the insulating support base 210 near the insulating shielding plate 310 facilitates the installation of the carbon nanotube assembly 100 to be tested. The conductive sleeve 220 is disposed within the insulating support base 210, and the conductive sleeve 220 can extend into the receiving groove to contact the carbon nanotube assembly 100 to be tested, thereby connecting the high-voltage power supply 800 and the carbon nanotube assembly 100, facilitating the detection of the discharge properties of the carbon nanotube assembly 100 to be tested.

[0080] Specifically, such as Figure 2 and Figure 7 As shown, the carbon nanotube assembly 100 under test includes a carbon nanotube high-voltage electrode sheet 110 and a carbon nanotube array 120. The carbon nanotube array 120 is disposed on a low-resistivity silicon substrate of the carbon nanotube high-voltage electrode sheet 110. The depth of the receiving groove is the same as the thickness of the carbon nanotube high-voltage electrode sheet 110. That is, when the carbon nanotube assembly 100 under test is installed in the receiving groove, the end face of the insulating support 210 is flush with the end face of the carbon nanotube high-voltage electrode sheet 110 near the carbon nanotube array 120, with a parallelism error angle of no more than 0.5°. This prevents part of the carbon nanotube array 120 from extending into the receiving groove, which would increase the distance between the carbon nanotube array 120 and the testing mechanism 300 and affect the accuracy of the diagnosis. When the carbon nanotube assembly 100 under test is installed in the receiving groove, the length of the carbon nanotube array 120 is 100-500 μm, while the flatness error of other areas on the surface of the insulating support 210 is less than 50 μm.

[0081] Specifically, such as Figure 2 and Figure 7As shown, the insulating support base 210 includes an insulating support plate 211 and an insulating sleeve 212 connected to the insulating support plate 211. The insulating support plate 211 is located between the insulating sleeve 212 and the testing mechanism 300. A receiving groove is formed on the end face of the insulating support plate 211. The conductive sleeve 220 is located inside the insulating sleeve 212 and partially extends into the receiving groove. An installation hole 2121 for the conductive wire to pass through is formed on the side wall of the insulating sleeve 212. The insulating support plate 211 is set above the insulating sleeve 212, and the conductive sleeve 220 is set inside the insulating sleeve 212. Both the insulating sleeve 212 and the insulating support plate 211 have insulating properties, preventing the conductive sleeve 220 from conducting electricity to the insulating support base 210 and accidentally injuring the measurement personnel. The installation hole 2121 is formed on the side wall of the insulating sleeve 212 to facilitate the passage of the wire connecting the conductive sleeve 220 and the high-voltage power supply 800.

[0082] Preferably, such as Figure 2 and Figure 7 As shown, the support mechanism 200 also includes a conductive adhesive film 230, which is disposed between the end face of the conductive sleeve 220 and the carbon nanotube high-voltage electrode sheet 110 to enhance the conductivity of the conductive sleeve 220.

[0083] Preferably, such as Figure 2 As shown, the support mechanism 200 also includes a support frame 240, and an insulating support seat 210 is mounted on the support frame 240 to facilitate the adjustment of the height of the insulating support seat 210, thereby adjusting the height of the carbon nanotube assembly 100 to be tested.

[0084] In some embodiments, an air inlet connector is provided on the side of the high-voltage sleeve away from the insulating support plate 211. The air inlet connector is used to connect the conductive sleeve 220 and the working gas source, so that the working gas can flow through the air inlet connector, the conductive sleeve 220, and the carbon nanotube high-voltage electrode sheet 110 to the vicinity of the carbon nanotube array 120.

[0085] In some embodiments, such as Figure 2 As shown, the diagnostic device also includes a vacuum chamber 700, in which the support mechanism 200 and the testing mechanism 300 are both installed. The vacuum chamber 700 contains a working gas for ionization. The vacuum chamber 700 is filled with this working gas for ionization. The support mechanism 200, the testing mechanism 300, the connecting assembly 600, and the carbon nanotube assembly 100 under test are all installed within the vacuum chamber 700, facilitating diagnostic testing of the carbon nanotube assembly 100.

[0086] The diagnostic apparatus provided in this embodiment of the invention has the following beneficial effects:

[0087] 1. Capable of high-precision continuous automatic measurement of vacuum discharge performance:

[0088] (1) The surface morphology of the carbon nanotube array 120 is complex, with both dense carbon nanotube regions where the electric fields mutually inhibit each other and sparse carbon nanotube regions, resulting in different discharge performance in different regions. By flexibly adjusting the testing mechanism 300 and combining the insulating shielding plate 310 with the ion collecting plate 320, the vacuum discharge performance of the test area of ​​the carbon nanotube array 120 can be continuously and automatically detected without opening the vacuum chamber 700.

[0089] (2) Based on the actual ion flux level generated by the carbon nanotube array 120, the central angle of the first opening region 311 of the insulating shield plate 310 can be flexibly adjusted to achieve quantitative plasma diagnosis of the fan-shaped region at a specific angle, thereby obtaining the overall discharge performance.

[0090] (3) According to actual needs, the sector-shaped discrete element measurement area can be further adjusted to the point-shaped discrete element measurement area to obtain higher measurement accuracy.

[0091] (4) The carbon nanotube high voltage electrode sheet 110 can be loaded with negative high voltage to realize the diagnosis of cathode electron emission characteristics, or it can be loaded with positive high voltage to realize the diagnosis of field ionization characteristics.

[0092] 2. Capable of performing segmented, high-precision continuous measurements of beam extraction characteristics:

[0093] (1) Based on the discharge performance measurement, further combine the ion collection plate 320, the insulating barrier plate 340, the gate plate 350, the insulating shield plate 310 and other parts to realize the continuous measurement of the beam ion flux, and then obtain the ion extraction efficiency.

[0094] (2) By flexibly adjusting the size of the central angle of the second opening region 351 of the gate plate 350 and the size of the central angle of the third opening region of the insulating shield plate 310, the beam extraction efficiency under different gate aperture conditions can be obtained.

[0095] (3) The thickness of the insulating barrier sheet 340 can be flexibly adjusted. Based on this, all ions passing through the hole of the grid 350 can be captured by the ion collection plate 320, thus achieving accurate beam extraction efficiency.

[0096] 3. Capable of achieving high-resolution continuous plasma diagnostics in three-dimensional space.

[0097] (1) It can not only achieve high-precision measurement of different discrete element regions in the horizontal plane, but also use the lifting motor 410 to achieve submicron scale discharge gap adjustment. Therefore, it can obtain the complete discharge law of carbon nanotube component 100, which plays a very important role in exploring the discharge mechanism of carbon nanotube component 100 and optimizing the performance of ion thruster.

[0098] (2) By combining the rotary motor 510 and the lifting motor 410, a single program can be used to achieve the cyclic operation of the two motors according to their specific movement patterns, avoiding repeated opening of the vacuum chamber 700, which helps to improve the repeatability of experimental data.

[0099] This embodiment also provides a diagnostic procedure, specifically including:

[0100] S1. First, fix the insulating support 210 on the support frame 240, then install the carbon nanotube assembly 100 to be tested in the receiving groove. Ensure that the flatness error of the upper surface of the insulating support 210 is no more than 50μm by means of laser ranging, and connect the high voltage power supply 800 and the carbon nanotube assembly 100 to be tested through the conductive sleeve 220.

[0101] S2. Adjust the rotating mechanism 500 and the lifting mechanism 400 so that the axis of the rotating motor 510 coincides with the axis of the testing mechanism 300 and the axis of the carbon nanotube to be tested, and the lowest limit of the vertical movement of the testing mechanism 300 coincides with the surface of the insulating support 210.

[0102] S3. The measurement process starts from the minimum discharge gap distance (approximately 100μm) and continuously increases the vertical motor height at intervals of 1μm-10μm to achieve high-resolution diagnosis in the vertical direction.

[0103] S4. At each horizontal plane height, set 1) forward rotation speed of 1600 pulses / second; 2) forward rotation angle of 1600 pulses; 3) interval of 1 second; 4) reverse rotation speed of 1600 pulses / second; 5) reverse rotation angle of 1600 pulses; 6) interval of 2 seconds; 7) infinitely loop from 1) to 6).

[0104] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0105] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A diagnostic device for diagnosing the discharge performance of a carbon nanotube assembly (100) under test, the carbon nanotube assembly (100) being used to ionize a working gas, the carbon nanotube assembly (100) including a test region, characterized in that, The diagnostic device includes: Support mechanism (200) for mounting the carbon nanotube assembly (100) to be tested. A testing mechanism (300) is installed in the ion emission direction of the carbon nanotube assembly (100) under test. The testing mechanism (300) includes an insulating shield plate (310), an ion collecting plate (320), and a first electrical signal acquisition card (330) connected to the ion collecting plate (320). The insulating shield plate (310) is located between the ion collecting plate (320) and the support mechanism (200). The insulating shield plate (310) is provided with a first opening area (311) that corresponds to the area under test. The first opening area (311) is used to allow ions ionized by the area under test to pass through. The ion collecting plate (320) is used to collect the ions passing through the first opening area (311). The first electrical signal acquisition card (330) is used to acquire the ion current on the ion collecting plate (320). The testing mechanism (300) further includes an insulating barrier sheet (340) and a gate sheet (350). The gate sheet (350) is sandwiched between the insulating barrier sheet (340) and the insulating shielding plate (310). The gate sheet (350) is provided with a second opening region (351), and the insulating barrier sheet (340) is provided with a third opening region. The first opening region (311), the second opening region (351), and the third opening region are all sectors with the same vertex. The center line of the first opening region (311), the center point of the second opening region (351), and the center line of the third opening region are collinear. The central angle of the first opening region (311) is α, the central angle of the second opening region (351) is β, and the central angle of the third opening region is γ, where γ > α > β. Of the ions passing through the first opening region (311), some of the ions are attracted by the gate plate (350), and some of the ions pass through the second opening region (351) and the third opening region in sequence and are attracted by the ion collecting plate (320).

2. The diagnostic device according to claim 1, characterized in that, The testing mechanism (300) further includes a second electrical signal acquisition card (360), which is connected to the gate plate (350) and is used to acquire the ion current of the gate plate (350).

3. The diagnostic device according to claim 2, characterized in that, The testing mechanism (300) further includes a first terminal (370) and a second terminal (380). The first electrical signal acquisition card (330) is connected to the ion collection plate (320) through the first terminal (370), and the second electrical signal acquisition card (360) is connected to the gate plate (350) through the second terminal (380).

4. The diagnostic device according to any one of claims 1-3, characterized in that, It also includes a lifting mechanism (400), which includes a lifting motor (410) and a first motor mounting bracket (420). The first motor mounting bracket (420) is connected to the support mechanism (200). The lifting motor (410) is mounted on the first motor mounting bracket (420). The lifting motor (410) is connected to the test mechanism (300) through a lead screw assembly, and the axial direction of the lead screw assembly is parallel to the axial direction of the test mechanism (300). The output end of the lifting motor (410) is configured to rotate to adjust the distance between the test mechanism (300) and the support mechanism (200).

5. The diagnostic device according to claim 4, characterized in that, It also includes a rotating mechanism (500), which includes a rotary motor (510) and a second motor mounting bracket (520). The output end of the rotary motor (510) is connected to the test mechanism (300), and the axis of the rotary motor (510), the axis of the test mechanism (300), and the axis of the carbon nanotube assembly (100) to be tested are collinear. The rotary motor (510) is configured to rotate to drive the test mechanism (300) to rotate. The rotary motor (510) is mounted on the second motor mounting bracket (520), which is connected to the lead screw sleeve of the lead screw assembly. The lead screw sleeve can move along the axial direction to drive the rotating mechanism (500) and the test mechanism (300) to move synchronously along the axial direction.

6. The diagnostic device according to claim 5, characterized in that, It also includes a connecting assembly (600), which includes a motor shaft connector (610) and an insulating adapter (620). The motor shaft connector (610) is sleeved on the output end of the rotary motor (510), and the insulating adapter (620) is connected to the ion collecting plate (320). The motor shaft connector (610) is threadedly connected to the insulating adapter (620).

7. The diagnostic device according to claim 1, characterized in that, The support mechanism (200) includes: An insulating support base (210) has a receiving groove on its end face near the insulating shield plate (310), the receiving groove being used to install the carbon nanotube assembly (100) to be tested. A conductive sleeve (220) is disposed inside the insulating support base (210) and partially extends into the receiving groove. The conductive sleeve (220) is used to fit against the carbon nanotube assembly (100) to connect the high voltage power supply (800) and the carbon nanotube assembly (100).

8. The diagnostic device according to claim 7, characterized in that, The insulating support base (210) includes an insulating support plate (211) and an insulating sleeve (212) connected to the insulating support plate (211). The insulating support plate (211) is located between the insulating sleeve (212) and the testing mechanism (300). The receiving groove is provided on the end face of the insulating support plate (211). The conductive sleeve (220) is located inside the insulating sleeve (212) and partially extends into the receiving groove. The side wall of the insulating sleeve (212) is provided with an installation hole (2121) for the conductive wire to pass through.

9. The diagnostic device according to claim 1, characterized in that, It also includes a vacuum chamber (700), in which the support mechanism (200) and the testing mechanism (300) are both installed, and the vacuum chamber (700) is provided with a working gas for ionization.

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