Marble precision workbench air floating jacking mechanism

Abstract

The application discloses a marble precision workbench air floating lifting mechanism, which comprises a cylinder body, the upper end of the cylinder body is fixedly connected with a top cover, the side wall of the top cover is fixedly connected with a first connecting port, the first connecting port is located in the inside of the top cover, the lower surface of the top cover is provided with a first air outlet, the first air outlet is in communication with the first connecting port, a piston is arranged, the piston and the top cover form a first air chamber, the piston and the cylinder body form a second air chamber, the first air chamber is in communication with the first air outlet, a second connecting port is arranged on the side wall of the cylinder body, the upper surface of the cylinder body is fixedly connected with a second air outlet, and the second air outlet is in communication with the second connecting port and the second air chamber. Through the above components, the first air chamber and the second air chamber make the marble platform ascend, the first air outlet and the second air outlet make the ascending of each place consistent, and the ascending speed is relatively stable through the stable structure, and vibration is not generated.

Description

Technical Field

[0001] This invention relates to the field of lifting mechanism technology, and in particular to an air-floating lifting mechanism for a marble precision worktable. Background Technology

[0002] The stage is the core component of a lithography machine. It carries silicon wafers or glass substrates, moving synchronously with the mask stage under the objective lens to perform precise exposure. The stability of the stage's movement significantly impacts the positioning accuracy of the optical components, precision sensors, and other parts mounted on it. Therefore, developing a precision lifting and air-bearing mechanism to ensure contactless and vibration-free stage movement during maintenance is fundamental to the development of high-precision lithography machines.

[0003] Existing work platforms used in lithography machines, while capable of moving horizontally, lack a lifting platform. This means that during maintenance and testing, the accuracy of the work platform cannot be guaranteed to be maintained. Summary of the Invention

[0004] The purpose of this invention is to at least solve one of the technical problems existing in the prior art, and to provide an air-floating lifting mechanism for a marble precision worktable. The first air chamber and the second air chamber enable the marble platform to rise, while the first air outlet and the second air outlet ensure that the rising is consistent in all places. Furthermore, the stable structure makes the rising speed relatively stable and does not produce vibration.

[0005] The present invention also provides an air-floating lifting mechanism for a marble precision worktable, comprising: a cylinder, a top cover fixedly connected to the upper end of the cylinder, a first connection port fixedly connected to the side wall of the top cover, the first connection port being located inside the top cover, a first air outlet being provided on the lower surface of the top cover, the first air outlet being connected to the first connection port; a piston, the piston and the top cover forming a first air chamber, the piston and the cylinder forming a second air chamber, the first air chamber being connected to the first air outlet; a second connection port, the second connection port being located on the side wall of the cylinder, a second air outlet fixedly connected to the upper surface of the cylinder, the second air outlet being connected to both the second connection port and the second air chamber; and a stabilizing structure, the stabilizing structure comprising a pulley, a friction wheel, and a pull belt, the pull belt being fixedly connected to the surface of the pulley, the end of the pull belt away from the pulley being fixedly connected to the cylinder, and a movable block being rotatably connected to the side surface of the friction wheel. Through the above components, the first and second air chambers raise the marble platform, while the first and second air outlets ensure that the rise is consistent across all parts. Furthermore, the stable structure ensures a relatively smooth rising speed without vibration.

[0006] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, an air-floating pad is fixedly connected below the piston, and the stabilizing structure is located inside the air-floating pad. Through these components, a corresponding friction structure can be formed between the stabilizing structure and the air-floating pad, thereby hindering movement.

[0007] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, a first sealing ring and a second sealing ring are sequentially fixedly connected to the inner wall of the cylinder. The first sealing ring contacts the lower side wall of the piston, and the second sealing ring contacts the middle side wall of the piston. These components can seal the sliding parts, enabling pneumatic support.

[0008] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, a third sealing ring is fixedly connected to the upper side wall of the piston, and the third sealing ring contacts the inner wall of the top cover. Through these components, the piston connection can be sealed, thereby completing the separation of the two air chambers.

[0009] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, the piston is a three-stage stepped cylinder, and the first air outlet and the second air outlet are both arranged vertically. Through these components, the first air outlet and the second air outlet generate downward force, and during the lifting process, fine adjustments are made to maintain a stable ascent.

[0010] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, the top cover is internally fixedly connected with three support rings. These components allow the marble platform to be raised in position via the support rings.

[0011] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, the edge of the top cover is provided with a first through hole at an equal angle, and a first bolt is provided at the first through hole. The top cover is fixedly connected to the marble platform by the first bolt. Through the above components, the marble platform is connected to the top cover, and the position of the marble platform is fixed.

[0012] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, a second through hole is provided at an equal angle on the edge of the top cover, and the second through hole extends downwards. A second bolt is provided at the second through hole, and the top cover is fixedly connected to the cylinder body by the second bolt. Through the above components, the cylinder body and the top cover are fixedly connected, thereby fixing their position.

[0013] According to the marble precision worktable air-floating lifting mechanism provided by the present invention, a third bolt is provided at the lower end of the air-floating pad, and the air-floating pad is fixedly connected to the piston by the third bolt. These components fix the position of the piston, thereby facilitating the movement of the cylinder.

[0014] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0016] Figure 1 This is an overall structural diagram of the air-floating lifting mechanism for the marble precision worktable of the present invention;

[0017] Figure 2 This is a front view of the air-floating lifting mechanism for the marble precision worktable of the present invention;

[0018] Figure 3 This is a cross-sectional view of the air-floating lifting mechanism for the marble precision worktable of the present invention.

[0019] Figure 4 The present invention relates to an air-floating lifting mechanism for a marble precision worktable. Figure 3 Structural diagram at point A;

[0020] Figure 5 This is a top view of the air-floating lifting mechanism for the marble precision worktable of the present invention.

[0021] Legend:

[0022] 1. Cylinder body; 2. Top cover; 3. First connection port; 4. First air outlet; 5. Piston; 6. First air chamber; 7. Second air chamber; 8. Second connection port; 9. Second air outlet; 10. Stable structure; 11. First sealing ring; 12. Second sealing ring; 13. Third sealing ring; 14. Air float; 15. Support ring; 16. First through hole; 17. First bolt; 18. Marble platform; 19. Second through hole; 20. Second bolt; 21. Third bolt;

[0023] 101. Pulley; 102. Friction wheel; 103. Belt; 104. Moving block. Detailed Implementation

[0024] This section will describe in detail specific embodiments of the present invention. Preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and overall technical solution of the present invention, but they should not be construed as limiting the scope of protection of the present invention.

[0025] Throughout the piston's movement, the pressure within the two chambers on either side of the piston and the piston's speed both change. This is because the chambers are releasing gas, but the volume is decreasing, thus lowering the pressure. The downward trend slows down. If gas release is obstructed, the pressure may even rise. The changing pressure difference between the two chambers also affects the effective output force and the piston's speed. If the external load and friction are also unstable, the changes in pressure and piston speed in the two chambers of the cylinder become even more complex, easily leading to vibration.

[0026] Reference Figure 1-5 The present invention discloses an air-floating lifting mechanism for a precision marble worktable, comprising: a cylinder 1, which is cylindrical, with a top cover 2 fixedly connected to the upper end of the cylinder 1. The top cover 2 has a circular cross-section, and a first connection port 3 is fixedly connected to the side wall of the top cover 2. The first connection port 3 is located inside the top cover 2, and a first air outlet 4 is provided on the lower surface of the top cover 2, which communicates with the first connection port 3; a piston 5, which forms a first air chamber 6 with the top cover 2, and a second air chamber 7 between the piston 5 and the cylinder 1. The first air chamber 6 communicates with the first air outlet 4. While gas is pumped into the second connection port 8, the first connection port 3 is open, and gas in the first air chamber 6 is discharged. Simultaneously, when gas is pumped into the first connection port 3, the corresponding second connection port 8 is open, and gas in the second air chamber 7 is discharged. The air pressure in the air chamber 6 increases, pushing the piston 5 downward and causing it to slide, thus pushing out the air float 14 and adjusting the support height of the marble platform 14. The second connection port 8 is located on the side wall of the cylinder 1. The upper surface of the cylinder 1 is fixedly connected to the second air outlet 9, which is connected to both the second connection port 8 and the second air chamber 7. Gas is pumped into the second connection port 8, increasing the internal air pressure of the second air chamber 7 and pushing the piston 5 upward, thus enabling the piston 12 to move quickly. The stabilizing structure 10 ensures the stability of the marble platform 14. The stabilizing structure 10 includes a pulley 101, a friction wheel 102, and a pull belt 103. The pull belt 103 is fixedly connected to the surface of the pulley 101, and the end of the pull belt 103 away from the pulley 101 is fixedly connected to the cylinder 1. The side surface of the friction wheel 102 is rotatably connected to a movable block 104. The first air chamber 6 and the second air chamber 7 cause the marble platform to rise, while the first air outlet 4 and the second air outlet 9 ensure that the rise is consistent throughout, and the stabilizing structure 10 makes the rising speed relatively stable and prevents vibration.

[0027] An air float 14 is fixedly connected to the lower part of the piston 5. The lower end face of the air float 14 is in contact with the supporting component, and the stabilizing structure 10 is located inside the air float 14.

[0028] The inner wall of cylinder 1 is sequentially fixedly connected with a first sealing ring 11 and a second sealing ring 12. The first sealing ring 11 contacts the lower side wall of piston 5, the second sealing ring 12 contacts the middle side wall of piston 5, and a third sealing ring 13 is fixedly connected to the upper side wall of piston 5. The third sealing ring 13 contacts the inner wall of top cover 2. During the sliding process of piston 5, the first sealing ring 11, the second sealing ring 12 and the third sealing ring 13 provide sealing treatment for piston 5 and are made of rubber or silicone. When gas is pumped into the second connection port 8, the first sealing ring 11 and the second sealing ring 12 seal the second air chamber 7, and the third sealing ring 13 provides sealing for the first air chamber 6.

[0029] Piston 5 is a three-stage stepped cylinder with a hollow interior, which reduces the overall weight of piston 5 and facilitates transportation and use. The first air outlet 4 and the second air outlet 9 are both arranged vertically.

[0030] The top cover 2 is internally fixedly connected with three support rings 15, which provide support for the top cover 2 and the components above it.

[0031] The top cover 2 has a first through hole 16 at an equal angle on its edge. A first bolt 17 is provided at the first through hole 16. The top cover 2 is fixedly connected to a marble platform 18 by the first bolt 17. For ease of display, the marble platform 18 here is a cylinder. In actual use, the air-floating lifting mechanism of the present invention can be installed on marble platforms 18 of different shapes, and the number of installations can be set according to actual needs.

[0032] The top cover 2 has a second through hole 19 at an equal angle along its edge, and the second through hole 19 extends downwards. A second bolt 20 is installed at the second through hole 19, and the top cover 2 is fixedly connected to the cylinder 1 by the second bolt 20. A third bolt 21 is installed at the lower end of the air float 14, and the air float 14 is fixedly connected to the piston 5 by the third bolt 21. The first bolt 4, the second bolt 5, and the third bolt 11 are all hexagon socket head cap screws. During installation, the top cover 2 is fixedly connected to the marble platform 6 first, or the piston 12 is placed inside the cylinder 1 and then fixedly connected to the air float 3. Finally, the second bolt 5 is used to fix the top cover 2 to the cylinder 1.

[0033] Working principle: During use, air is pumped into the second air outlet 9 through the second connection port 8, and then enters the second air chamber 7 through the second air outlet 9, causing the top cover 2 to be lifted, thereby raising the marble platform 18. During the rising process, the rise of the cylinder 1 pulls the belt 103, causing the friction wheel 102 to rotate. The movable block 104 inside the friction wheel 102 extends as the friction wheel 102 rotates. The greater the speed, the greater the friction, thereby reducing the speed and maintaining a stable speed to prevent overspeeding. During the descent, gas is pumped into the first connection port 3 and filled into the first air chamber 6 through the first air outlet 4, thereby causing the top cover 2 to descend slowly, completing the height adjustment.

[0034] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A marble precision worktable air-floating lifting mechanism, characterized in that, include: The cylinder body (1) has a top cover (2) fixedly connected to its upper end. The top cover (2) has a first connection port (3) fixedly connected to its side wall. The first connection port (3) is located inside the top cover (2). The bottom surface of the top cover (2) is provided with a first air outlet (4). The first air outlet (4) is connected to the first connection port (3). Piston (5), the piston (5) and top cover (2) form a first air chamber (6), the piston (5) and cylinder (1) form a second air chamber (7), the first air chamber (6) is connected to the first air outlet (4); The second connection port (8) is located on the side wall of the cylinder body (1). The upper surface of the cylinder body (1) is fixedly connected to the second air outlet (9). The second air outlet (9) is connected to the second connection port (8) and the second air chamber (7). The smoothing structure (10) includes a pulley (101), a friction wheel (102), and a belt (103). The belt (103) is fixedly connected to the surface of the pulley (101). One end of the belt (103) away from the pulley (101) is fixedly connected to the cylinder (1). A movable block (104) is rotatably connected to the side surface of the friction wheel (102).

2. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, An air float (14) is fixedly connected below the piston (5), and the stabilizing structure (10) is located inside the air float (14).

3. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, The inner wall of the cylinder (1) is fixedly connected with a first sealing ring (11) and a second sealing ring (12) in sequence. The first sealing ring (11) contacts the lower side wall of the piston (5), and the second sealing ring (12) contacts the middle side wall of the piston (5).

4. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, The upper side wall of the piston (5) is fixedly connected to a third sealing ring (13), and the third sealing ring (13) is in contact with the inner wall of the top cover (2).

5. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, The piston (5) is a three-stage stepped cylinder, and the first air outlet (4) and the second air outlet (9) are both arranged vertically.

6. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, The top cover (2) is fixedly connected to a support ring (15), and there are three support rings (15).

7. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, The top cover (2) has a first through hole (16) at an equal angle on its edge. A first bolt (17) is provided at the first through hole (16). The top cover (2) is fixedly connected to a marble platform (18) by the first bolt (17).

8. The air-floating lifting mechanism for a marble precision worktable according to claim 1, characterized in that, The top cover (2) has a second through hole (19) at an equal angle on its edge, and the second through hole (19) extends downward. A second bolt (20) is provided at the second through hole (19), and the top cover (2) is fixedly connected to the cylinder (1) by the second bolt (20).

9. The air-floating lifting mechanism for a marble precision worktable according to claim 2, characterized in that, The lower end of the air cushion (14) is provided with a third bolt (21), and the air cushion (14) is fixedly connected to the piston (5) by the third bolt (21).

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