An auxiliary tooling for disassembling a vacuum pump and a vacuum pump disassembly process

By designing the vacuum pump disassembly auxiliary tooling, using screwing fixtures and liquid nitrogen cooling technology, the balanced disassembly of the vacuum pump rotor and upper bearings is achieved, solving the wear problem caused by hard contact during maintenance, and improving the disassembly accuracy and service life of the vacuum pump.

CN115609532BActive Publication Date: 2025-06-17DONGGUAN ZHONGTU SEMICON TECH CO LTD
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Patent Information

Application Number
CN202211327914.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-10-27
Publication Date
2025-06-17
Estimated Expiration
2042-10-27

AI Technical Summary

Technical Problem

During the maintenance and disassembly of the vacuum pump, the hard contact between the rotor and the swing bearing and the spindle is likely to cause wear, affecting the accuracy of the component and the service life of the vacuum pump.

Method used

A vacuum pump disassembly auxiliary tooling is designed, including screwing fixtures and cylinders. Through the use of liquid nitrogen cooling and clamping components, a balanced disassembly of the rotor and the upper bearing is achieved to avoid hard contact.

Benefits of technology

It effectively reduces damage to core components such as spindles, ensures balance and precision of the disassembly process, and extends the service life of the vacuum pump.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention belongs to the technical field of vacuum pump maintenance, and discloses a vacuum pump disassembly auxiliary tooling and a vacuum pump disassembly process. The vacuum pump disassembly auxiliary tooling includes a screwing fixture and a cylinder block. The screwing fixture includes a screwing screw rod and a locking member that are screwed together. The locking member is provided with a first connection hole corresponding to the screw hole on the vacuum pump rotor. The cylinder block is provided with a cooling accommodation cavity, an injection hole, a first through hole, a second connection hole and a second through hole. A clamping assembly is arranged in the cylinder block. The injection hole is used for injecting liquid nitrogen into the cooling accommodation cavity. The screwing screw rod can extend into the cooling accommodation cavity through the first through hole. The upper swing bearing of the vacuum pump can partially extend into the cooling accommodation cavity through the second through hole. The clamping assembly can clamp the upper swing bearing. The first connection hole and the second connection hole are connected by a connecting piece. The vacuum pump disassembly auxiliary tooling provided by the present invention can effectively avoid wear and damage of the rotor or the upper swing bearing during disassembly and removal from the main shaft when applied to the vacuum pump disassembly process.
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Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pump maintenance, and particularly relates to an auxiliary tooling for disassembling a vacuum pump and a vacuum pump disassembly process. Background Art

[0002] Under the existing technical conditions, limited by factors such as maintenance equipment and operation methods, the repair and disassembly of vacuum pumps are still relatively rough, which poses potential risks to the quality of vacuum pumps with high precision and high vacuum requirements. Specifically, during the maintenance process of a vacuum pump, the disassembly and replacement of components such as the vacuum pump rotor and the upper swing bearing are involved. When pulling out the rotor and the upper swing bearing from the main shaft, if the force is unevenly applied, it is easy to cause wear on the hard contact part between the rotor and the upper swing bearing and the main shaft during the pulling process, thereby damaging the main shaft rotor and the upper swing bearing, affecting the accuracy of core components such as the main shaft, and also affecting the maintenance effect and service life of the vacuum pump. Summary of the Invention

[0003] The purpose of the present invention is to provide an auxiliary tooling for disassembling a vacuum pump and a vacuum pump disassembly process, which can reduce damage to core components such as the main shaft during the disassembly process.

[0004] To achieve this purpose, the present invention adopts the following technical solutions:

[0005] An auxiliary tooling for disassembling a vacuum pump, which is used to assist in disassembling a vacuum pump. The auxiliary tooling for disassembling a vacuum pump includes:

[0006] A screwing fixture, including a screwing screw and a locking member. The locking member is provided with a threaded hole, and the locking member is sleeved on the screwing screw through the threaded hole and is threadedly connected to the screwing screw. The locking member is provided with a plurality of first connection holes corresponding one-to-one to a plurality of screw holes on the rotor of the vacuum pump.

[0007] A cylinder block, which is provided with a cooling accommodation cavity. The upper end surface of the cylinder block is provided with an injection hole, a first through hole, and a plurality of second connection holes. The lower end surface of the cylinder block is provided with a second through hole. A clamping assembly is arranged inside the cylinder block. Among them,

[0008] The injection hole is used to inject liquid nitrogen into the cooling accommodation cavity. The first through hole and the second through hole are coaxially arranged. The screwing screw can extend into the cooling accommodation cavity through the first through hole. The upper swing bearing of the vacuum pump can partially extend into the cooling accommodation cavity through the second through hole. The clamping assembly can clamp and fix the upper swing bearing extending into the cooling accommodation cavity. The second connection holes and the first connection holes are arranged in one-to-one correspondence, and the first connection hole and the corresponding second connection hole can be connected through a connecting member.

[0009] Optionally, a driving grip is provided at the upper end of the screwing screw, and an installation hole for installing an external handle is formed in the driving grip.

[0010] Optionally, a guiding bushing is vertically arranged in the cooling cavity of the cylinder block. The first end of the guiding bushing is coaxially communicated with the first through hole, the second end of the guiding bushing is communicated with the cooling cavity, and the screwing screw can extend into the guiding bushing through the first through hole.

[0011] Optionally, a first sealing ring is arranged on the inner peripheral wall of the guiding bushing.

[0012] Optionally, a second sealing ring is arranged on the inner peripheral wall of the second through hole.

[0013] Optionally, the second connection hole is arranged as a threaded hole, the connecting piece is arranged as a bolt, and the bolt passes through the first connection hole and is screwed with the second connection hole.

[0014] Optionally, the clamping assembly includes clamping rods and a clamping driving member; wherein, a plurality of the clamping rods are arranged, and the plurality of clamping rods are spaced apart along the axial direction of the second through hole, and the clamping driving member can drive the plurality of clamping rods to move in the cylinder block to jointly clamp the upper swing bearing.

[0015] Optionally, the clamping rod is provided with a sliding portion, and a plurality of slide rails corresponding to the clamping rods one by one are fixedly arranged in the cooling cavity of the cylinder block, and the sliding portion of each clamping rod is slidably connected to the corresponding slide rail.

[0016] Optionally, a buffer pad is arranged on the clamping end surface of the clamping rod.

[0017] A vacuum pump disassembly process uses the vacuum pump disassembly auxiliary tooling described in any one of the above. The vacuum pump disassembly process mainly includes the following steps:

[0018] S100. Remove the upper housing assembly of the vacuum pump to expose the rotor and the main shaft;

[0019] S200. Coaxially support the screwing screw on the main shaft, align the first connection hole with the corresponding threaded hole and fixedly connect them through a screwing member;

[0020] S300. Screw the screwing screw to make the locking member rise relative to the main shaft and drive the rotor to rise synchronously to disengage from the main shaft;

[0021] S400. Tightly sleeve the cylinder block on the upper swing bearing through the second through hole. The upper swing bearing partially extends into the cooling cavity, and the clamping assembly clamps and fixes the upper swing bearing;

[0022] S500. Inject liquid nitrogen into the cooling cavity through the injection hole, and keep it static after the injection is completed;

[0023] S600. When the static time reaches the target time, pass the screwing screw through the first through hole and coaxially support it on the main shaft, align the first connection hole with the corresponding second connection hole, and fixedly connect them through the connecting piece;

[0024] S700. Screw the screwing screw, so that the locking piece rises relative to the main shaft and drives the upper swing bearing to rise synchronously to disengage from the main shaft.

[0025] Beneficial effects:

[0026] When applying the vacuum pump disassembly auxiliary tooling provided by the present invention to the disassembly work of the vacuum pump, first remove the upper housing assembly of the vacuum pump to expose the rotor and the main shaft. Subsequently, use the screwing jig to coaxially support the screwing screw on the main shaft, align the first connection hole on the locking piece with the corresponding threaded hole on the rotor, and fix them through the screwing piece, so that the locking piece is fixed to the rotor. Then screw the screwing screw. The screwing screw and the locking piece together form a lead screw-nut structure. Therefore, when the screwing screw rotates, the locking piece can rise relative to the main shaft to drive the rotor fixed to the locking piece to rise together, so as to pull out the rotor upward and make it disengage from the main shaft. Next, use the cylinder block. The cylinder block is tightly sleeved on the upper swing bearing through the second through hole. The upper swing bearing partially extends into the cooling cavity. Subsequently, clamp the upper swing bearing through the clamping assembly to fix the cylinder block to the upper swing bearing. Then inject liquid nitrogen into the cooling cavity through the injection hole and keep it static for a period of time after the injection is completed. Under the cooling effect of the liquid nitrogen, the contact end faces of the upper swing bearing and the main shaft both contract inward relative to themselves, causing the fitting surface between the upper swing bearing and the main shaft to have a clearance disengagement. When the static time reaches the target time, use the screwing jig again, pass the screwing screw through the first through hole and coaxially support it on the main shaft, align the first connection hole on the locking piece with the corresponding second connection hole on the cylinder block, and fixedly connect them through the connecting piece, so that the locking piece is fixed to the cylinder block. Then screw the screwing screw again to drive the locking piece to rise relative to the main shaft, so that the upper swing bearing can be driven to rise together through the cylinder block, and then the upper swing bearing can be pulled out upward and made to disengage from the main shaft, thus completing the reliable disassembly of the rotor and the upper swing bearing. The above process can strictly pull out the rotor and the upper swing bearing of the vacuum pump along the axial direction of the main shaft, with balanced force application, so as to avoid wear and damage to the rotor or the upper swing bearing and the main shaft during the pulling-out process. In addition, the present invention utilizes the characteristics of liquid nitrogen and metal. Before the pulling-out operation of the upper swing bearing, the main shaft and the upper swing bearing are effectively cooled by liquid nitrogen, further reducing the pulling-out difficulty and ensuring the pulling-out effect. Description of the drawings

[0027] Figure 1 is an explosion schematic diagram of a vacuum pump in the prior art;

[0028] Figure 2 is a cross-sectional schematic diagram of a vacuum pump in the prior art;

[0029] Figure 3 is a schematic diagram of an auxiliary tool for disassembling the vacuum pump of the present invention;

[0030] Figure 4 is a structural schematic diagram of the screwing fixture of the present invention;

[0031] Figure 5 is a structural schematic diagram of the cylinder block of the present invention from one perspective;

[0032] Figure 6 is a structural schematic diagram of the cylinder block of the present invention from another perspective;

[0033] Figure 7 is a structural schematic diagram of the internal clamping assembly of the cylinder block of the present invention;

[0034] Figure 8 is a side cross-sectional view of the cylinder block of the present invention;

[0035] Figure 9 is a flow schematic diagram of the vacuum pump disassembly process of the present invention;

[0036] Figure 10 is an explosion schematic diagram of the connection between the screwing fixture and the vacuum pump rotor of the present invention;

[0037] Figure 11 is an explosion schematic diagram of the connection between the screwing fixture, the cylinder block and the vacuum pump after removing the rotor of the present invention;

[0038] Figure 12 is a side cross-sectional view of the connection between the screwing fixture, the cylinder block and the vacuum pump after removing the rotor of the present invention;

[0039] Figure 13 is a side cross-sectional view of removing the upper swing bearing after connecting the screwing fixture and the cylinder block of the present invention;

[0040] Figure 14 is a structural schematic diagram of the pushing tool of the present invention.

[0041] In the figure:

[0042] 100, screwing fixture; 110, screwing screw; 111, driving grip; 1111, mounting hole; 120, locking part; 121, threaded hole; 122, first connection hole;

[0043] 200. Cylinder block; 201. Cooling accommodation cavity; 2011. Slide rail; 202. Injection hole; 203. First perforation; 204. Second connection hole; 205. Second perforation; 210. Clamping assembly; 211. Clamping rod; 220. Guide bushing; 231. First sealing ring; 232. Second sealing ring; 233. Buffer pad;

[0044] 300. Vacuum pump; 310. Rotor; 311. Screw hole; 320. Main shaft; 330. Upper swing bearing; 340. Stator; 350. Lower swing bearing; 360. Upper housing assembly; 361. Intake end cover; 362. Upper housing cover; 370. Lower housing assembly;

[0045] 400. Pushing tool. Detailed implementation mode

[0046] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that for the convenience of description, only parts related to the present invention are shown in the drawings, rather than all structures.

[0047] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0048] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "above" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0049] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0050] This embodiment provides an auxiliary tooling for disassembling a vacuum pump, which is used for assisting in the disassembly of the vacuum pump 300. Refer to Figures 1 to 2 As shown, the vacuum pump 300 mainly includes a rotor 310, a main shaft 320, an upper swing bearing 330, a stator 340, a lower swing bearing 350, an upper housing assembly 360 and a lower housing assembly 370. Among them, the stator 340 is sleeved on the lower side of the main shaft 320, and the main shaft 320 is tightly sleeved with the upper swing bearing 330 and the lower swing bearing 350 at the upper and lower ends of the stator 340 respectively. The stator 340, the upper swing bearing 330 and the lower swing bearing 350 are all arranged in the lower housing assembly 370, and the upper swing bearing 330 extends out of the lower housing assembly 370; the rotor 310 is located above the lower housing assembly 370 and is tightly sleeved on the upper side of the main shaft 320. A plurality of screw holes 311 are provided on the rotor 310, and the upper housing assembly 360 is sleeved outside the rotor 310.

[0051] Refer to Figures 3 to 6 As shown, the auxiliary tooling for disassembling the vacuum pump includes a screwing fixture 100 and a cylinder block 200. Among them, the screwing fixture 100 includes a screwing screw 110 and a locking member 120. The locking member 120 is provided with a threaded hole 121. The locking member 120 is sleeved on the screwing screw 110 through the threaded hole 121 and is threadedly connected to the screwing screw 110. A plurality of first connection holes 122 corresponding to the plurality of screw holes 311 on the rotor 310 are provided on the locking member 120. The cylinder block 200 is provided with a cooling accommodation cavity 201. An injection hole 202, a first through hole 203 and a plurality of second connection holes 204 are provided on the upper end surface of the cylinder block 200. A second through hole 205 is provided on the lower end surface of the cylinder block 200. A clamping assembly 210 is arranged in the cylinder block 200. The injection hole 202 is used for injecting liquid nitrogen into the cooling accommodation cavity 201. The first through hole 203 and the second through hole 205 are coaxially arranged. The screwing screw 110 can extend into the cooling accommodation cavity 201 through the first through hole 203. The upper swing bearing 330 of the vacuum pump 300 can partially extend into the cooling accommodation cavity 201 through the second through hole 205. The clamping assembly 210 can clamp and fix the upper swing bearing 330 extending into the cooling accommodation cavity 201. The second connection holes 204 and the first connection holes 122 are arranged in one-to-one correspondence, and the first connection holes 122 and the corresponding second connection holes 204 can be connected through connecting members.

[0052] Corresponding to the disassembly auxiliary tooling for the vacuum pump, this embodiment also provides a disassembly and assembly process for the vacuum pump. The beneficial effects of the disassembly auxiliary tooling for the vacuum pump will be specifically described below in combination with the process steps.

[0053] Referring to Figure 9 as shown, the vacuum pump disassembly process mainly includes the following steps:

[0054] S100. Remove the upper housing assembly 360 of the vacuum pump 300 to expose the rotor 310 and the main shaft 320;

[0055] S200. Coaxially support the screwing screw 110 on the main shaft 320, align the first connection hole 122 with the corresponding screw hole 311 and fixedly connect them through a screw connector;

[0056] S300. Screw the screwing screw 110 to make the locking member 120 rise relative to the main shaft 320 and drive the rotor 310 to rise synchronously to disengage from the main shaft 320;

[0057] S400. Tightly sleeved the cylinder block 200 on the upper swing bearing 330 through the second through hole 205. The upper swing bearing 330 partially extends into the cooling accommodation cavity 201, and the clamping assembly 210 clamps and fixes the upper swing bearing 330;

[0058] S500. Inject liquid nitrogen into the cooling accommodation cavity 201 through the injection hole 202 and keep it static after the injection is completed;

[0059] S600. When the static time reaches the target time, pass the screwing screw 110 through the first through hole 203 and coaxially support it on the main shaft 320, align the first connection hole 122 with the corresponding second connection hole 204 and fixedly connect them through a connecting member;

[0060] S700. Screw the screwing screw 110 to make the locking member 120 rise relative to the main shaft 320 and drive the upper swing bearing 330 to rise synchronously to disengage from the main shaft 320.

[0061] In step S100, the upper housing assembly 360 mainly includes an air inlet end cover 361 and an upper housing cover 362. Remove the upper housing assembly 360 on the vacuum pump 300 to sequentially remove the air inlet end cover 361 and the upper housing cover 362 from the vacuum pump 300, thereby exposing the rotor 310 and the main shaft 320. The removal processes of the air inlet end cover 361 and the upper housing cover 362 are both prior arts and will not be elaborated here.

[0062] Further, when the removal of the air inlet end cover 361 and the upper housing cover 362 is completed, step S200 is carried out. This step will use the screwing jig 100. Specifically, referring to Figure 10As shown, the screwing screw 110 of the screwing fixture 100 is coaxially supported on the main shaft 320, and the first connection hole 122 on the locking member 120 is aligned with the corresponding screw hole 311 on the rotor 310 and fixed by a screw member (not shown), so that the locking member 120 and the rotor 310 are fixed together. Specifically, the screw member is set as a bolt, and after the bolt passes through the first connection hole 122, it is screwed with the corresponding screw hole 311, so that the bolt tightly presses the locking member 120 against the rotor 310.

[0063] After the screwing screw 110 is coaxially supported on the main shaft 320 and the locking member 120 is fixed to the rotor 310, step S300 is performed. Specifically, when the screwing screw 110 is rotated, since the screwing screw 110 and the locking member 120 together form a lead screw-nut structure, the rotation of the screwing screw 110 can cause the locking member 120 to rise relative to the main shaft 320, so as to drive the rotor 310 fixed to the locking member 120 to rise together, thereby pulling out the rotor 310 upward and separating it from the main shaft 320. During the process of using the screwing fixture 100 to pull out the rotor 310, since the screwing screw 110 is coaxially supported on the main shaft 320, the screwing screw 110 can strictly pull out the rotor 310 of the vacuum pump 300 in the axial direction of the main shaft 320, with balanced force application, thereby effectively avoiding wear and damage between the rotor 310 and the main shaft 320 due to the deviation of the pulling force application direction from the axis direction of the main shaft 320.

[0064] In this embodiment, the upper end of the main shaft 320 of the vacuum pump 300 is provided with a concave structure, and the lower end of the screwing screw 110 is correspondingly provided with a pointed convex structure. When the screwing screw 110 is supported on the main shaft 320 of the vacuum pump 300, the pointed convex structure of the screwing screw 110 correspondingly extends into and is supported in the concave structure of the main shaft 320, which can further ensure the reliability and effectiveness of the support for the screwing screw 110.

[0065] Optionally, referring to Figure 3 、 Figure 4 、 Figure 10 As shown, a driving grip 111 is provided at the upper end of the screwing screw 110, and an installation hole 1111 for installing an external handle is provided on the driving grip 111. An external driving handle can be connected to the driving grip 111 through the installation hole 1111, which can increase the force arm when controlling the rotation of the screwing screw 110 and make the screwing operation more labor-saving.

[0066] After the rotor 310 is removed, the screw member between the first connection hole 122 and the screw hole 311 is removed, and the screwing screw 110 is separated from the removed rotor 310 for continued use in the subsequent steps. Next, step S400 is performed, and the cylinder block 200 will be used in this step. Referring to Figures 11 to 12As shown in the figure, the cylinder block 200 is tightly sleeved on the upper swing bearing 330 through the second through hole 205, so that a part of the upper swing bearing 330 extends into the cooling cavity 201. Subsequently, the upper swing bearing 330 is clamped by the clamping assembly 210, so that the cylinder block 200 and the upper swing bearing 330 are fixed together. Specifically, the outer peripheral wall of the upper swing bearing 330 is in close fit with the inner peripheral wall of the second through hole 205. Combining with Figure 6 As shown in the figure, a second sealing ring 232 is arranged on the inner peripheral wall of the second through hole 205. The second sealing ring 232 can further seal the gap between the upper swing bearing 330 and the second through hole 205 to avoid leakage after subsequent liquid nitrogen injection.

[0067] Specifically, continuing to combine with Figures 7 to 8 As shown in the figure, the clamping assembly 210 includes clamping rods 211 and a clamping driving member (not shown). Among them, a plurality of clamping rods 211 are arranged. The plurality of clamping rods 211 are spaced along the axial direction of the second through hole 205. The clamping driving member can drive the plurality of clamping rods 211 to move in the cylinder block 200 to jointly clamp the upper swing bearing 330. Further, the clamping rod 211 is provided with a sliding portion (not shown). A plurality of slide rails 2011 corresponding to the clamping rods 211 one by one are fixedly arranged in the cooling cavity 201 of the cylinder block 200. The sliding portion of each clamping rod 211 is slidably connected to the corresponding slide rail 2011. By arranging the sliding portion and the slide rail 2011, the movement track of the clamping rod 211 in the cooling cavity 201 can be made more reliable and stable. Optionally, the clamping driving member can be a telescopic driving cylinder, an electric push rod, or an existing driving member such as a linear servo module, which is not limited too much here. Preferably, a buffer pad 233 is arranged on the clamping end surface of the clamping rod 211. The buffer pad 233 can provide contact buffering between the clamping rod 211 and the upper swing bearing 330 to avoid hard contact between the clamping end surface of the clamping rod 211 and the outer peripheral wall of the upper swing bearing 330 to damage the upper swing bearing 330.

[0068] After the above work is completed, step S500 is carried out. This step mainly cools the upper swing bearing 330 and the main shaft 320. Specifically, liquid nitrogen is injected into the cooling cavity 201 through the injection hole 202, and after the injection is completed, it is left standing for a period of time. Under the cooling action of the liquid nitrogen, the contact end faces of the upper swing bearing 330 and the main shaft 320 both contract inward relative to themselves, so that the fitting surface between the upper swing bearing 330 and the main shaft 320 undergoes clearance detachment, and further the upper swing bearing 330 and the main shaft 320 can change from the original tight fit state to a clearance fit state, which is convenient for subsequent disassembly work. Specifically, a plug (not shown) is arranged on the injection hole 202. When the liquid nitrogen injection is completed, the injection hole 202 is blocked by the plug to avoid premature volatilization of the liquid nitrogen. In this embodiment, the standing time is set to 5-10 minutes.

[0069] After standing still for the target time, step S600 is performed, and this step requires the re - use of the screwing fixture 100. It is worth mentioning that after standing still for the target time, the plugging head is removed from the injection hole 202, and the liquid nitrogen in the cooling cavity will volatilize on its own through the injection hole 202, without the need for special pouring of the liquid nitrogen.

[0070] Refer to Figure 4 、 Figure 5 、 Figures 12 to 13 As shown, the screwing screw 110 is passed through the first through - hole 203 and then coaxially supported on the main shaft 320 again, and the first connection hole 122 is aligned with the corresponding second connection hole 204 and fixedly connected through a connecting member (not shown), so that the locking member 120 is fixed to the cylinder block 200. Optionally, the second connection hole 204 is set as a threaded hole, the connecting member is set as a bolt, and the bolt passes through the first connection hole 122 and is threadedly connected to the second connection hole 204, so that the bolt tightly presses the locking member 120 against the upper end surface of the cylinder block 200.

[0071] Furthermore, a guide bushing 220 is vertically arranged in the cooling cavity 201 of the cylinder block 200. The first end of the guide bushing 220 is coaxially communicated with the first through - hole 203, and the second end of the guide bushing 220 is communicated with the cooling cavity 201. The screwing screw 110 can extend into the guide bushing 220 through the first through - hole 203. Specifically, since the first through - hole 203 and the second through - hole 205 are coaxially arranged, and the guide bushing 220 is coaxially communicated with the first through - hole 203, the first through - hole 203, the second through - hole 205 and the guide bushing 220 are coaxially arranged. After the cylinder block 200 is tightly sleeved on the upper swing bearing 330, the upper end of the main shaft 320 is correspondingly located in the cooling cavity 201 at the lower end of the guide bushing 220, and then the screwing screw 110 extends into the guide bushing 220 through the first through - hole 203, so that the screwing screw 110 can be efficiently and reliably guided to a position coaxial with the main shaft 320.

[0072] Furthermore, as shown in Figure 8 a first sealing ring 231 is arranged on the inner peripheral wall of the guide bushing 220. The first sealing ring 231 can further seal the gap between the main shaft 320 and the guide bushing 220, further avoiding leakage after the liquid nitrogen is injected in step S500.

[0073] Next, step S700 is carried out. Specifically, the screwing screw 110 is screwed again, so that the screwing screw 110 drives the locking member 120 to rise relative to the main shaft 320. The screwing screw 110 is fixedly connected to the cylinder block 200 through a connecting member, and the cylinder block 200 and the upper swing bearing 330 are clamped and fixed through the clamping assembly 210. Thus, the upper swing bearing 330 can be driven by the cylinder block 220 to rise together, and then the upper swing bearing 330 is pulled out upward and separated from the main shaft 320, thereby completing the reliable disassembly of the rotor 310 and the upper swing bearing 330. During the process of pulling out the upper swing bearing 330, the screwing screw 110 is coaxially supported on the main shaft 320, so that the screwing screw 110 can strictly pull out the upper swing bearing 330 in the axial direction of the main shaft 320, with balanced force application, and can also effectively avoid wear and damage between the upper swing bearing 330 and the main shaft 320 due to the deviation of the force application direction of pulling out from the axis direction of the main shaft 320.

[0074] After step S700 is completed, the upper swing bearing 330 is successfully removed. Subsequently, the lower swing bearing 330 tightly sleeved on the lower end of the main shaft 320 is removed by using a conventional method, so that the main shaft 320 can be successfully removed, and then the corresponding components such as the removed rotor 310, main shaft 320, upper swing bearing 330 and lower swing bearing 350 can be repaired or replaced subsequently.

[0075] Furthermore, after the corresponding components among the components such as the rotor 310, main shaft 320, upper swing bearing 330 and lower swing bearing 350 are repaired and replaced, the above components need to be reassembled again.

[0076] Specifically, the lower swing bearing 350 and the main shaft 320 are assembled back into the vacuum pump 300 by using a conventional method. Subsequently, the assembly of the upper swing bearing 330 is prepared, and the cylinder block 200 provided in this embodiment needs to be used again. Specifically, the upper swing bearing 330 is sleeved on the main shaft 200. At this time, the upper swing bearing 330 has not been installed in the target position. Subsequently, the cylinder block 200 is sleeved on the upper swing bearing 330 again through the second through hole 205. The upper swing shaft 330 is located in the cooling cavity 201. Subsequently, the gap between the second through hole 205 below the cylinder block 200 and the main shaft 320 is blocked, and liquid nitrogen is injected into the cooling cavity 201 again through the injection hole 202. Subsequently, it is left standing for a period of time again, so that the upper swing bearing 330 and the main shaft 320 at the sleeved part can be immersed in liquid nitrogen for sufficient cooling, and then the contact end faces of the upper swing bearing 330 and the main shaft 320 contract inward relative to themselves. This standing time is also preferably set to 5 - 10 minutes. After standing to the target time, select Figure 14The provided pushing tool 400 is inserted through the first perforation 203 and abuts against the upper swing bearing 330 via the guiding bushing 220. Subsequently, the pushing tool 400 is controlled to press the upper swing bearing 330 into the installation position on the main shaft 320 evenly and steadily along the axial direction of the main shaft 320 from top to bottom.

[0077] Subsequently, after the upper swing bearing 330 is installed in place, a height gauge is used to repeatedly confirm that its installation dimensions meet the actual requirements. Then, the rotor 310, the upper housing cover 362, and the intake end cover 361 are installed in sequence by conventional methods, and thus the vacuum pump 300 is reassembled. It is worth mentioning that during the installation of the upper housing cover 362, the rotor 310 needs to be rotated continuously to ensure that there is no friction between the rotor 310 and the inner wall of the diversion groove of the upper housing cover 361.

[0078] Furthermore, before the disassembly of the vacuum pump 300 and after the reassembly are completed, parameters such as the pump body current, vacuum degree, and vibration value during the operation of the vacuum pump 300 need to be detected, so as to visually compare the operating states of the vacuum pump 300 before and after maintenance. The specific detection processes are all prior arts and will not be elaborated here. Specifically, the no-load current requirement of the vacuum pump 300 is ≤5A; the operating noise requirement of the vacuum pump 300 is <60 decibels; the vertical dynamic balance of the vacuum pump 300 is controlled within 0.2mm / m - 0.5mm / m; the ultimate vacuum degree requirement of the vacuum pump 300 is <1×10 -2 Pa.

[0079] Applying the vacuum pump disassembly auxiliary tooling and the vacuum pump disassembly process provided in this embodiment, the rotor 310 and the upper swing bearing 330 of the vacuum pump 300 can be pulled out strictly along the axial direction of the main shaft 320 with balanced force application, thus avoiding wear and damage to the rotor 310 or the upper swing bearing 330 and the main shaft 320 during the pulling-out process. And this embodiment utilizes the characteristics of liquid nitrogen and metal. Before the pulling-out operation of the upper swing bearing 330, the main shaft 320 and the upper swing bearing 330 are effectively cooled by liquid nitrogen, further reducing the pulling-out difficulty, ensuring the pulling-out effect, enhancing the integrity of precision components during the disassembly of the vacuum pump 300, extending the service life of the vacuum pump 300, and also improving the disassembly and maintenance efficiency.

[0080] Obviously, the above-mentioned embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. An auxiliary tool for disassembling a vacuum pump, which is used to assist in pulling out the rotor (310) and the upper swing bearing (330) of the vacuum pump (300) from the main shaft (320), and is characterized in that, The auxiliary tool for disassembling the vacuum pump includes: A screwing fixture (100), which includes a screwing screw (110) and a locking member (120). The locking member (120) is provided with a threaded hole (121). The locking member (120) is sleeved on the screwing screw (110) through the threaded hole (121) and is threadedly connected to the screwing screw (110). A plurality of first connection holes (122) corresponding to a plurality of screw holes (311) on the rotor (310) are provided on the locking member (120); A cylinder block (200), which is provided with a cooling accommodation cavity (201). An injection hole (202), a first through hole (203) and a plurality of second connection holes (204) are provided on the upper end surface of the cylinder block (200). A second through hole (205) is provided on the lower end surface of the cylinder block (200). A clamping assembly (210) is arranged inside the cylinder block (200); wherein, The injection hole (202) is used to inject liquid nitrogen into the cooling accommodation cavity (201). The first through hole (203) and the second through hole (205) are coaxially arranged. The screwing screw (110) can extend into the cooling accommodation cavity (201) through the first through hole (203). The upper swing bearing (330) can partially extend into the cooling accommodation cavity (201) through the second through hole (205). The clamping assembly (210) can clamp and fix the upper swing bearing (330) extending into the cooling accommodation cavity (201). The second connection holes (204) and the first connection holes (122) are arranged in one-to-one correspondence. The first connection hole (122) and the corresponding second connection hole (204) can be connected through a connecting piece; A guide bushing (220) is vertically arranged inside the cylinder block (200) in the cooling accommodation cavity (201). The first end of the guide bushing (220) is coaxially communicated with the first through hole (203). The second end of the guide bushing (220) is communicated with the cooling accommodation cavity (201). The screwing screw (110) can extend into the guide bushing (220) through the first through hole (203).

2. The auxiliary tool for disassembling a vacuum pump according to claim 1, characterized in that, A driving grip (111) is arranged at the upper end of the screwing screw (110). An installation hole (1111) for installing an external handle is provided on the driving grip (111).

3. The auxiliary tool for disassembling a vacuum pump according to claim 1, characterized in that, A first sealing ring (231) is arranged on the inner peripheral wall of the guide bushing (220).

4. The auxiliary tool for disassembling a vacuum pump according to claim 1, characterized in that, A second sealing ring (232) is arranged on the inner peripheral wall of the second through hole (205).

5. The auxiliary tool for disassembling a vacuum pump according to claim 1, characterized in that, The second connection hole (204) is set as a threaded hole, and the connecting piece is set as a bolt. The bolt passes through the first connection hole (122) and is threadedly connected to the second connection hole (204).

6. The auxiliary tool for disassembling a vacuum pump according to claim 1, characterized in that, The clamping assembly (210) includes clamping rods (211) and a clamping driving member; wherein, a plurality of the clamping rods (211) are provided, and the plurality of clamping rods (211) are spaced apart along the axial direction of the second through hole (205), and the clamping driving member can drive the plurality of clamping rods (211) to move in the cylinder block (200) to jointly clamp the upper swing bearing (330).

7. The auxiliary tool for disassembling a vacuum pump according to claim 6, characterized in that, The clamping rods (211) are provided with sliding portions, and a plurality of slide rails (2011) corresponding to the clamping rods (211) one by one are fixedly arranged in the cooling accommodation cavity (201) of the cylinder block (200), and the sliding portions of each clamping rod (211) are slidably connected to the corresponding slide rails (2011).

8. The auxiliary tool for disassembling a vacuum pump according to claim 6, characterized in that, A buffer pad (233) is arranged on the clamping end surface of the clamping rod (211).

9. A vacuum pump disassembly process, which applies the auxiliary tool for disassembling a vacuum pump according to any one of claims 1-8, and is characterized in that, The vacuum pump disassembly process mainly includes the following steps: S100. Remove the upper housing assembly (360) of the vacuum pump (300) to expose the rotor (310) and the main shaft (320). S200. Coaxially support the screwing screw rod (110) on the main shaft (320), align the first connection hole (122) with the corresponding screw hole (311) and fixedly connect them through a screw connection member. S300. Screw the screwing screw rod (110) to make the locking member (120) rise relative to the main shaft (320) and drive the rotor (310) to rise synchronously to disengage from the main shaft (320). S400. Sleeved the cylinder block (200) tightly on the upper swing bearing (330) through the second through hole (205), a part of the upper swing bearing (330) extends into the cooling accommodation cavity (201), and the clamping assembly (210) clamps and fixes the upper swing bearing (330). S500. Inject liquid nitrogen into the cooling accommodation cavity (201) through the injection hole (202), and keep it static after the injection is completed. S600. When it is static for the target time, pass the screwing screw rod (110) through the first through hole (203) and coaxially support it on the main shaft (320), align the first connection hole (122) with the corresponding second connection hole (204) and fixedly connect them through the connecting member. S700. Screw the screwing screw rod (110) to make the locking member (120) rise relative to the main shaft (320) and drive the upper swing bearing (330) to rise synchronously to disengage from the main shaft (320).

Citation Information

Patent Citations

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