A micro-deformation detection device based on micro-nano waveguide

Abstract

The present invention provides a micro-deformation detection device based on micro-nano waveguides. The device comprises a deformable contact portion attached to the surface of an object to be detected and capable of deforming itself in response to deformation. A micro-nanostructured waveguide is horizontally distributed within the deformable contact portion and arranged parallel to the bottom surface of the deformable contact portion. The micro-nanostructured waveguide comprises a grating waveguide arranged in a linear array and capable of changing its waveguide period when the deformable contact portion deforms, and a straight waveguide arranged perpendicular to the grating waveguide. The grating waveguide has one end as an optical signal input port and the other as a reflection port. The straight waveguide is arranged vertically near a grating region near the optical signal input port of the grating waveguide, and the end of the straight waveguide remote from the grating waveguide serves as a signal output port. This device has the advantages of a simple structure and high detection sensitivity, and has promising application prospects in the field of micro-deformation detection.

Description

Technical Field

[0001] The present invention relates to the technical field of detection devices, and in particular to a micro-deformation detection device based on micro-nano waveguides. Background Art

[0002] Any change in shape caused by an external force is called deformation. A change in shape can also occur when the relative positions of particles of an object change due to external factors or internal defects.

[0003] In everyday life, deformation of most objects is harmful to human life. For example, in bridge construction, deformation of the steel supporting the bridge is undesirable. In the manufacture of ships and submarines, strong materials are used to prevent deformation, as these deformations pose a significant threat to human safety. However, deformation of large buildings and equipment is relatively obvious and easy to detect, making it easier for people to investigate and correct them. However, some micro-deformations are less visible and still pose a significant threat. For example, deformation of the surface of aircraft wings and high-speed rail tracks can also cause serious consequences.

[0004] The currently commonly used deformation detection technology is radar interferometry technology, which combines the imaging principle of synthetic aperture radar (SAR) and interferometry technology. It uses the geometric relationship between the sensor's system parameters, attitude parameters and orbits to accurately measure the three-dimensional spatial position of a point on the surface and its tiny changes.

[0005] However, this technology is mostly used for detection of highway slopes, cross-river bridges, reservoir dams, transmission towers, skyscrapers, etc. The detection accuracy is also at the millimeter level. The overall detection system is relatively large and complex, and is easily affected by the external environment, making it difficult to apply to some precision equipment. Summary of the Invention

[0006] The present invention provides a micro-deformation detection device based on micro-nano waveguides, which is used to solve the problem that the detection system used in the current deformation detection technology has a complex structure and is inconvenient to detect micro-deformations of objects.

[0007] The present invention provides a micro-deformation detection device based on micro-nano waveguides, comprising a deformable contact portion attached to the surface of an object to be measured and capable of deforming itself when the object to be measured deforms, wherein a micro-nanostructured waveguide is horizontally distributed within the deformable contact portion and arranged parallel to the bottom surface of the deformable contact portion;

[0008] The micro-nanostructure waveguide includes a grating waveguide distributed in a linear array and capable of changing the waveguide period when the deformable contact part is deformed, and a straight waveguide arranged perpendicular to the grating waveguide; one end of the grating waveguide is an optical signal input end, and the other end is a reflection end. The straight waveguide is vertically arranged near the grating area close to the optical signal input end of the grating waveguide, and the end of the straight waveguide away from the grating waveguide is a signal output end.

[0009] In an optional embodiment, the deformable contact portion includes an adhesive layer, a flexible layer and a protective layer distributed in sequence from bottom to top;

[0010] The adhesive layer is arranged on the lower side of the flexible layer and the two are tightly attached. The upper side of the flexible layer is paved with a micro-nanostructure waveguide and is encapsulated and covered by a protective layer. An end of the straight waveguide close to the grating waveguide retains a gap with the grating waveguide.

[0011] In an optional embodiment, the deformable contact portion further includes a piezoelectric material layer disposed on the upper side of the flexible layer and capable of generating charge when deformed and compressed, and the grating waveguide and the grating waveguide are both disposed on the upper surface of the piezoelectric material layer.

[0012] In an optional embodiment, the piezoelectric material layer is an organic piezoelectric material film.

[0013] In an optional embodiment, the organic piezoelectric material film used in the piezoelectric material layer is preferably a polyvinylidene fluoride piezoelectric film.

[0014] In an optional embodiment, the gap distance between the straight waveguide and the grating waveguide is less than 500 nanometers and greater than 20 nanometers, and the width of the reflection end of the grating waveguide is greater than the width of the grating waveguide.

[0015] In an optional embodiment, the gap distance between the straight waveguide and the grating waveguide is less than 200 nanometers and greater than 30 nanometers.

[0016] In an optional embodiment, the grating waveguide has a width of 220 nanometers, a height of 100 nanometers, a grid spacing of 200 nanometers, and a width of each grid of 200 nanometers; the straight waveguide has a width of 220 nanometers, a length of 2.5 microns, and a height of 100 nanometers; and the gap distance between the straight waveguide and the grating waveguide is 40 nanometers.

[0017] In an optional embodiment, the grating waveguide and the straight waveguide are both made of silicon material.

[0018] In an optional embodiment, the flexible layer is made of polyimide, and has a thickness of 1 micron; the protective layer is made of transparent polyimide, has a light transmittance greater than 80%, and has a thickness of 1 micron.

[0019] Beneficial effects of the present invention: The present invention provides a micro-deformation detection device based on micro-nano waveguides, including a deformable contact portion attached to the surface of an object to be measured and capable of deforming itself when the object to be measured is deformed, and a micro-nanostructure waveguide arranged parallel to the bottom surface of the deformable contact portion is horizontally distributed in the deformable contact portion; when the present invention is in use, by attaching the deformable contact portion of the detection device of the present invention to the object to be measured, when the object to be measured is deformed, the deformable contact portion will bend and deform along with the deformation, and during the detection process, the micro-nanostructure waveguide in the deformable contact portion can more sensitively capture the resulting tiny deformation, and then also deform and be compressed, thereby changing the period size of the grating waveguide, so under a certain optical signal input, the transmittance of the output signal of the port of the straight waveguide changes, thereby detecting the micro-deformation of the object. The present invention has the advantages of simple structure and high detection sensitivity, and has good application prospects in the field of micro-deformation detection.

[0020] The present invention will be described in further detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 1 is a schematic structural diagram of a micro-deformation detection device based on a micro-nano waveguide provided by an embodiment of the present invention;

[0023] Figure 2 1 is a comparison diagram of transmittance spectra of a gate waveguide structure before and after deformation provided by an embodiment of the present invention;

[0024] Figure 3 1 is a schematic structural diagram of a micro-deformation detection device based on a micro-nano waveguide provided by another embodiment of the present invention;

[0025] Figure 4 1 is a schematic structural diagram of a micro-deformation detection device based on a micro-nano waveguide provided by another embodiment of the present invention;

[0026] Figure 5 Schematic diagram of the structure of a micro-deformation detection device based on micro-nano waveguides provided in yet another embodiment of the present invention.

[0027] In the figure: 1. deformable contact part; 101. adhesion layer; 102. flexible layer; 103. protective layer; 104. piezoelectric material layer; 2. micro-nanostructure waveguide; 201. grating waveguide; 202. straight waveguide; 203. optical signal input end; 204. reflection end. DETAILED DESCRIPTION

[0028] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention are clearly and completely described below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts also fall within the scope of protection of the present invention.

[0029] Example 1

[0030] See also Figure 1 An embodiment of the present invention provides a micro-deformation detection device based on a micro-nano waveguide, including a deformable contact portion 1 attached to the surface of an object to be measured and capable of deforming itself when the object to be measured is deformed, and a micro-nanostructure waveguide 2 is horizontally distributed in the deformable contact portion 1 and arranged parallel to the bottom surface of the deformable contact portion 1 and capable of changing the waveguide period when it is deformed.

[0031] Among them, the micro-nanostructure waveguide 2 includes grating waveguides 201 distributed in a linear array and a straight waveguide 202 arranged perpendicular to the grating waveguide 201; one end of the grating waveguide 201 is an optical signal input end 203, and the other end is a reflection end 204. During detection, the optical signal enters the optical signal input end 203 of the grating waveguide 201, and the straight waveguide 202 is vertically arranged near the grating area near the optical signal input end 203 of the grating waveguide 201. The end of the straight waveguide 202 away from the grating waveguide 201 is a signal output end, and the transmittance of the optical signal is detected at this end.

[0032] When the micro-deformation detection device based on micro-nano waveguides provided by an embodiment of the present invention is used, the deformable contact portion 1 of the detection device of the present invention is attached to the object to be detected. When the object to be detected is deformed, the deformable contact portion 1 will bend and deform along with the deformation. During the detection process, the micro-nanostructure waveguide 2 in the deformable contact portion 1 can more sensitively capture the resulting tiny deformation, and then also deform and compress accordingly, thereby changing the period size of the grating waveguide 201. Therefore, under a certain optical signal input, the port output signal transmittance of the straight waveguide 202 changes, thereby detecting the micro-deformation of the object. The present invention has the advantages of simple structure and high detection sensitivity by setting a micro-nanostructure waveguide 2 composed of a grating waveguide 201 and a straight waveguide 202 inside the deformable contact portion 1, and has good application prospects in the field of micro-deformation detection.

[0033] As an optional embodiment of the present invention, the deformable contact portion 1 includes an adhesive layer 101 , a flexible layer 102 , and a protective layer 103 , which are sequentially distributed from bottom to top.

[0034] The adhesive layer 101 is arranged on the lower side of the flexible layer 102 and the two are tightly attached. The micro-nanostructure waveguide 2 is laid on the upper side of the flexible layer 102 and is encapsulated and covered by the protective layer 103. A gap is retained between the end of the straight waveguide 202 close to the grating waveguide 201 and the grating waveguide 201. By setting a reasonable gap, the end of the straight waveguide 202 close to the grating waveguide 201 does not contact the grating waveguide 201, which allows the grating waveguide 201 to bend and deform well. During the deformation process, the grating waveguide 201 and the straight waveguide 202 will not be damaged, so that the deformation effect of the grating waveguide 201 is not affected during detection. In addition, the grating waveguide 201 can well couple light into the straight waveguide 202, ensuring normal signal transmission and improving the detection effect of the device. Moreover, when the grating waveguide 201 is deformed and compressed, not only the grid spacing of the grating waveguide 201 can change in the horizontal direction, but also a certain change in the vertical direction. As a result, the change in the grid can result in a significant change in transmittance, making it more sensitive to the detection of micro-deformations.

[0035] In the embodiment of the present invention, the material of the adhesion layer 101 is not specifically limited. Those skilled in the art may select a material based on the specific conditions of the surface of the object to be tested, so as to ensure a more secure contact between the adhesion layer 101 and the surface of the object to be tested. In specific applications, a material that is easily adhered to the surface of the object to be tested may be selected based on the different properties of the surface of the object to be tested.

[0036] When the micro-nano waveguide-based micro-deformation detection device provided by an embodiment of the present invention is used to detect the deformation of an object, the adhesion layer 101 is tightly attached to the surface of the object to be measured, and the optical signal enters the waveguide structure through the optical signal input end 203 of the grating waveguide 201. When the optical signal is transmitted in the grating waveguide 201, a portion of the light will be coupled into the straight waveguide 202 perpendicular to the grating waveguide 201 for transmission, and another portion of the optical signal will be transmitted along the grating waveguide 201 to the reflection end 204 of the grating waveguide 201. The reflection end 204 will reflect this portion of light back to the grating waveguide 4. These lights will propagate in the opposite direction along the grating area and be coupled into the straight waveguide 202. The two optical signals reaching the straight waveguide 202 will be transmitted along the straight waveguide 202 to the output end in the transverse magnetic mode TM. This can enhance the coupling, so that the signal will change more strongly when it changes, and then the transmittance of the waveguide can be obtained by detecting the size of the optical signal at the output end. When the object to be measured deforms, the adhesive layer 101, the flexible layer 102, and the protective layer 103, which are in close contact with the object, will deform accordingly. This deformation will cause the grating period of the grating region of the grating waveguide 201 to change, changing the central wavelength of the grating region. This will cause the transmittance of the optical signal output by the straight waveguide 202 in the same wavelength band to change significantly. Therefore, the change in the transmittance of the optical signal can be used to reflect the micro-deformation of the object, providing a new means for detecting micro-deformation of the object. In application, the optical signal input end 203 and the output end of the straight waveguide 202 are connected to a light source or light detector through other waveguides. For example, the light source or light detector is connected through a near-field optical probe. By observing the change in transmittance, whether the object has deformed is detected, thereby achieving the purpose of detecting micro-deformation of the object.

[0037] In some embodiments of the present invention, Figure 3 As shown, the deformable contact portion 1 further includes a piezoelectric material layer 104 disposed on the upper side of the flexible layer 102 and capable of generating charge when deformed and compressed. The grating waveguide 201 and the grating waveguide 201 are both disposed on the upper surface of the piezoelectric material layer 104. In the present invention, the grating waveguide 201 and the grating waveguide 201 are disposed on the surface of the piezoelectric material layer 104. The piezoelectric material layer 104 has the characteristic of changing its dielectric constant when compressed. When the piezoelectric material layer 104 is deformed and compressed to generate charge, it affects the electromagnetic field distribution near the waveguide, significantly changing the transmittance of the waveguide, making the transmittance change more significant when deformed, and enhancing the detection performance.

[0038] Furthermore, the piezoelectric material layer 104 is an organic piezoelectric film. The organic piezoelectric film used in the piezoelectric material layer 104 is preferably a polyvinylidene fluoride piezoelectric film with a thickness of 50 to 100 nanometers. This material has properties such as flexibility, low density, low impedance, and a high voltage constant. It easily bends and deforms with the deformation of the object, meeting detection requirements while also making the waveguide transmittance change more pronounced, resulting in better detection results.

[0039] In some embodiments of the present invention, the gap distance between the straight waveguide 202 and the grating waveguide 201 is less than 500 nanometers and greater than 20 nanometers. As a preferred embodiment of the present invention, a new embodiment can be obtained by adjusting the width of the reflective end 204 of the grating waveguide 201 relative to the grating waveguide 201 based on the above-mentioned embodiments without adding the piezoelectric material layer 104 and adding the piezoelectric material layer 104, such as Figure 4 and Figure 5 As shown, the width of the reflection end 204 of the grating waveguide 201 is greater than the width of the grating waveguide 201. This design can improve the reflection ability of the reflection end 204 to the optical signal in the grating waveguide 201, so that more optical signals in the grating waveguide 201 are coupled into the straight waveguide 202, thereby improving the transmission coefficient from the optical signal input end 203 to the straight waveguide 204 and improving the detection effect.

[0040] Preferably, the gap distance between the straight waveguide 202 and the grating waveguide 201 is less than 200 nanometers and greater than 30 nanometers, so as to enhance the coupling between the grating waveguide and the straight waveguide, reduce light loss, increase the light transmission coefficient, and thus improve the detection effect of the device.

[0041] In some embodiments of the present invention, the grating waveguide 201 has a width of 220 nanometers, a height of 100 nanometers, a grid pitch of 200 nanometers, and a width of each grid of 200 nanometers; the straight waveguide 202 has a width of 220 nanometers, a length of 2.5 microns, and a height of 100 nanometers; and the gap distance between the straight waveguide 202 and the grating waveguide 201 is 40 nanometers.

[0042] In the present invention, the finite time-domain difference software is used to calculate the transmittance difference between the light transmission characteristics between the signal input end 31 and the signal output end of the straight waveguide 202 before and after deformation. Figure 2 shown.

[0043] exist Figure 2 Before the object is deformed, that is, when the grating period of the grating waveguide 4 does not change, there is a strong transmittance at a wavelength of about 1175 nanometers, reaching about 40%. However, the deformation causes the grating period of the grating waveguide 4 to change, which greatly reduces the transmittance. The significant change in transmittance proves that the detection device of this embodiment has a strong ability to detect micro-deformations.

[0044] In an embodiment of the present invention, both the grating waveguide 201 and the straight waveguide 202 are made of silicon. This reduces the coupling loss between the grating waveguide 201 and the straight waveguide 202, allows for better coupling of light into the straight waveguide 202, ensures the coupling strength of the optical signal entering the straight waveguide 202, increases the light transmittance, and thereby improves the detection effect of the device. Because the detection device of this embodiment is based on a silicon waveguide, it is suitable for traditional semiconductor processes and is easy to manufacture. The present invention has the advantages of a simple structure and high detection sensitivity, and has good application prospects in the field of micro-deformation detection.

[0045] In the embodiment of the present invention, the flexible layer 102 is made of polyimide (PI) with a thickness of 1 micron. The protective layer 103 is made of transparent polyimide with a light transmittance greater than 80% and a thickness of 1 micron.

[0046] The polyimide (PI) used in the flexible layer 102 of this embodiment has a very stable molecular structure and features such properties as high modulus, high strength, high and low temperature resistance, lightweight, and flame retardancy. This flexible layer not only effectively deforms to enhance detection effectiveness, but also facilitates the installation of the grating waveguide 201 and the straight waveguide 202. A flexible layer that is too thick will not facilitate structural deformation, while a layer that is too thin will result in a fragile structure that is easily damaged. In this embodiment, a flexible layer 102 with a thickness of 1 micron is used. This not only significantly reduces the thickness of the deformable contact portion 1, but also allows the flexible layer 102 to effectively deform and transfer deformation upward to the micro-nanostructure waveguide 2 during detection, thereby improving detection effectiveness. In addition, in the present invention, the transparent polyimide material used in the protective layer 103 is a transparent polyimide (PI) obtained through processing. It has the softness and high strength characteristics of PI, and the transmittance is required to be greater than 80%. The thickness can be 1 micron. Such a protective layer 103 is tightly attached to the flexible layer 102 to prevent deformation and falling off. This not only provides effective protection, but also bends and deforms with the waveguide without affecting detection or affecting the waveguide propagation of light signals.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions described in the above embodiments can still be modified, or some or all of the technical features therein can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A micro-deformation detection device based on micro-nano waveguide, characterized in that: It comprises a deformable contact portion (1) attached to the surface of the object to be measured and capable of deforming itself when the object to be measured is deformed, wherein a micro-nanostructure waveguide (2) is horizontally distributed in the deformable contact portion (1) and arranged parallel to the bottom surface of the deformable contact portion (1); The micro-nanostructure waveguide (2) comprises a grating waveguide (201) distributed in a linear array and capable of changing the waveguide period when the deformable contact portion (1) is deformed, and a straight waveguide (202) arranged perpendicular to the grating waveguide (201); one end of the grating waveguide (201) is a light signal input end (203), and the other end is a reflection end (204); the straight waveguide (202) is vertically arranged near a grating region close to the light signal input end (203) of the grating waveguide (201); and the end of the straight waveguide (202) away from the grating waveguide (201) is a signal output end; The deformable contact portion (1) comprises an adhesive layer (101), a flexible layer (102) and a protective layer (103) which are sequentially distributed from bottom to top; The adhesive layer (101) is arranged on the lower side of the flexible layer (102) and the two are tightly attached, the upper side of the flexible layer (102) is paved with a micro-nanostructure waveguide (2) and is encapsulated and covered by a protective layer (103), and an end of the straight waveguide (202) close to the grating waveguide (201) retains a gap with the grating waveguide (201); The deformable contact portion (1) further comprises a piezoelectric material layer (104) arranged on the upper side of the flexible layer (102) and capable of generating electric charge when deformed and compressed, and the grating waveguide (201) and the grating waveguide (201) are both arranged on the upper surface of the piezoelectric material layer (104).

2. The micro-deformation detection device based on micro-nano waveguide according to claim 1, characterized in that: The piezoelectric material layer (104) is an organic piezoelectric material film.

3. The micro-deformation detection device based on micro-nano waveguide according to claim 2, characterized in that: The organic piezoelectric material film used in the piezoelectric material layer (104) is a polyvinylidene fluoride piezoelectric film.

4. A micro-deformation detection device based on micro-nano waveguide according to any one of claims 1 to 3, characterized in that: The gap distance between the straight waveguide (202) and the grating waveguide (201) is less than 500 nanometers and greater than 20 nanometers, and the width of the reflection end (204) of the grating waveguide (201) is greater than the width of the grating waveguide (201).

5. The micro-deformation detection device based on micro-nano waveguide according to claim 4, characterized in that: The gap distance between the straight waveguide (202) and the grating waveguide (201) is less than 200 nanometers and greater than 30 nanometers.

6. The micro-deformation detection device based on micro-nano waveguide according to claim 5, characterized in that: The grating waveguide (201) has a width of 220 nanometers, a height of 100 nanometers, a grid spacing of 200 nanometers, and a width of each grid of 200 nanometers; the straight waveguide (202) has a width of 220 nanometers, a length of 2.5 micrometers, and a height of 100 nanometers; and the gap distance between the straight waveguide (202) and the grating waveguide (201) is 40 nanometers.

7. The micro-deformation detection device based on micro-nano waveguide according to claim 6, characterized in that: The grating waveguide (201) and the straight waveguide (202) are both made of silicon material.

8. The micro-deformation detection device based on micro-nano waveguide according to claim 7, characterized in that: The material of the flexible layer (102) is polyimide, and the thickness of the flexible layer (102) is 1 micron; the protective layer (103) is made of transparent polyimide material, has a light transmittance greater than 80%, and is 1 micron thick.

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