A method for controlling bench-to-bench variation in a miniature spectrometer

Abstract

The application relates to a micro-spectrometer inter-bench difference control method, which comprises the following steps: respectively leading out and numbering elements to be measured from a warehouse; loading a first element to be measured into a control instrument; opening a test software in a computer, opening a wavelength calibration light source, and performing wavelength calibration; closing the wavelength calibration light source, connecting a second light source, and setting a fixed integration time; inputting the number of the first element to be measured; the test software automatically saves the peak wavelength and intensity; the first element to be measured which has completed the test is disassembled, a second element to be measured is installed, and the test is performed until the test of all numbered elements to be measured is completed; data analysis of the peak wavelength and intensity of all elements to be measured is completed by the software, the deviation of the peak wavelength and intensity of the second light source of all elements to be measured is calculated; the deviation size is determined, the deviation is input in the software, a test report is output by the software, and the elements to be measured are marked; and all elements to be measured are classified and stored in the warehouse according to the test report. The inspection precision and consistency are improved.

Description

Technical Field

[0001] The present application relates to the field of spectrometers, and in particular to a method for controlling differences between micro-spectrometers. Background Art

[0002] Micro-spectrometers, with their array detectors and all-solid-state design, offer advantages such as small size, light weight, high measurement accuracy, high resolution, and excellent sensitivity. They are ideally suited for applications in agricultural production, industrial process monitoring, ecological and environmental monitoring, biomedical research, scientific experiments, aerospace, and military technology. They provide an essential tool for precision monitoring and analytical measurement in modern science, industry, defense, and agriculture. The large-scale application of micro-spectrometers in these fields also places higher demands on their consistency (i.e., inter-instrument variability). Excessive inter-instrument variability can create significant challenges, even insurmountable obstacles, for spectrometer measurement algorithms and calibration. This can make it impossible to replace or repair instruments on production lines or in experiments, and can lead to inconsistent measurement results. Therefore, in the mass production of micro-spectrometers, strict control of inter-instrument variability is required to ensure that spectrometer consistency remains within a reasonable range.

[0003] Differences between spectrometers are unavoidable, mainly due to the production process of detectors, gratings and reflectors that constitute the core of the spectrometer's optical system:

[0004] Micro-spectrometers typically use array detectors such as CCDs or CMOS in the UV-visible band and InGaAs in the near-infrared band. These array detectors typically consist of hundreds or even just a few pixels. Each pixel is equivalent to a photodiode, generating an electrical signal when illuminated by light. The strength of the electrical signal is proportional to the light intensity, wavelength, and exposure time. Consequently, the production process for these detectors is extremely complex, making it difficult to achieve a completely consistent quantum efficiency curve for each pixel in each detector.

[0005] Grating: The grating commonly used in micro-spectrometers is a planar ruled grating. In the UV-visible band, it is generally coated with aluminum film or UV-enhanced aluminum film, and in the near-infrared band, it is generally coated with gold film. The batch production of gratings generally adopts photocopying technology. However, due to the coating and replication process, it is difficult to ensure that each batch of gratings, as well as different gratings in the same production batch, have completely consistent diffraction efficiency curves.

[0006] Reflector: During the processing, it is impossible to guarantee that the surface shape of each reflector in each batch is exactly the same, and it is also impossible to guarantee that the reflectivity curve of the reflective film of each reflector in each batch is exactly the same.

[0007] Because of the inevitable differences of these core devices, each micro spectrometer has a bench difference, but we need to control the bench difference of the spectrometer within a reasonable range according to the requirements of different customers to ensure the consistency of the spectrometer to meet the corresponding production and scientific research needs. SUMMARY

[0008] To solve the above problems, according to the requirements of the consistency control of the spectrometer, a set of micro spectrometer detector, grating, collimating mirror and focusing mirror consistency screening method is designed.

[0009] The control instrument body is a spectrometer, and the detector, grating, collimating mirror and focusing mirror of the control instrument can be flexibly installed and removed according to the requirements of the test screening.

[0010] A micro spectrometer bench difference control method, the micro spectrometer comprises: a to-be-tested element, a wavelength calibration light source, an optical fiber, a control instrument, a second light source and a computer, the to-be-tested element is installed into the control instrument; the control method comprises the following steps:

[0011] (1) respectively taking the to-be-tested elements out of the warehouse and numbering;

[0012] (2) loading the first to-be-tested element into the control instrument;

[0013] (3) opening the test software in the computer, opening the wavelength calibration light source, and performing wavelength calibration;

[0014] (4) closing the wavelength calibration light source, connecting the second light source, setting the fixed integration time; inputting the first to-be-tested element number, and the test software automatically saving the peak wavelength and intensity;

[0015] If it is specifically related to the detector, the wavelength calibration lamp can be closed, the optical fiber is connected to the tungsten lamp light source (which can also be a deuterium tungsten lamp and the like continuous spectrum light source), and the fixed integration time is set. Measure and save the peak wavelength and peak intensity of the tungsten lamp light source spectrum. It should be noted that when measuring, a fixed integration time should be set, that is, the integration time of each detector should be the same, and the integration time should be set to make the peak intensity of the spectrum between 50%-80% of the saturation value (determined by the number of bits of the AD chip). The saved data should correspond to the number of the detector. Input the detector number, and the software automatically saves the peak wavelength and intensity. Through the above selection, the device consistency requirement can be effectively set. Of course, similar methods can also be set for other to-be-tested elements.

[0016] (5) dismounting the first to-be-tested element which has completed the test, installing the second to-be-tested element, and repeating the test of steps (2)-(4) until the test of all numbered to-be-tested elements is completed;

[0017] (6) The software performs data analysis of the peak wavelength and intensity of all components under test, and calculates the deviation of the peak wavelength and intensity of the second light source spectrum of all components under test;

[0018] (7) Determine the deviation size, enter the deviation into the software, the software outputs a test report, and marks the components to be tested; according to the test report, all components to be tested are classified and stored.

[0019] Furthermore, the deviation size is determined in step (7) based on customer needs.

[0020] Furthermore, the components to be tested are detectors, gratings, collimating reflectors or focusing reflectors, and the same type of layouts of all numbered detectors, gratings, collimating reflectors or focusing reflectors are screened by the above method respectively; that is, each type of component to be tested is screened by steps (2) to (7); all numbered detectors are screened by steps (2) to (7), and all gratings are screened by steps (2) to (7); all collimating reflectors are screened by steps (2) to (7); and all focusing reflectors are screened by steps (2) to (7).

[0021] Furthermore, the wavelength calibration light source in step (3) is selected from a mercury lamp, a xenon lamp or a neon lamp; the second light source in step (4) is selected from a continuous spectrum light source such as a tungsten lamp or a deuterium tungsten lamp; the two light sources are different, which is conducive to avoiding interference and errors caused by the same light source.

[0022] Furthermore, the step (3) also includes connecting the optical fiber to the tester, the wavelength calibration light source, and the computer; the connection is via a USB data cable or wireless connection to the computer.

[0023] Furthermore, the step (3) specifically includes: ① opening the test software, the test software automatically sets the integration time and the average number according to the spectral line intensity, such as the integration time is automatically set, each time increasing by 100μs so that the intensity value of the strongest spectral line is between 50% and 80% of the saturation value (determined by the number of bits of the AD chip, 16-bit A / S, the saturation value is 216=65536), and the average number is set, each time increasing by 1, so that the spectral line intensity fluctuation is within ±10%; automatically saving the pixel sequence number of the spectral line and the input wavelength calibration light source standard wavelength, the input wavelength number is at least 4 or more. ② According to actual experience, the sequence number of the spectrometer detector pixel and the wavelength corresponding to the pixel satisfy the cubic fitting equation:: λ n =C0+C1n+C2n 2 +C3n 3 , where n is the pixel number, λ nFor the wavelength corresponding to the nth pixel, C0, C1, C2, C3 are the coefficients of the fitting equation, the calibration coefficients are automatically calculated and written into the test instrument lower computer EEPROM, and the wavelength calibration is completed.

[0024] Further, the step ② is specifically obtained from the equation coefficients by the following formula:

[0025] λ p =C0+C1p+C2p 2 +C3p 3 (1)

[0026] λ q =C0+C1q+C2q 2 +C3q 3 (2)

[0027] λ r =C0+C1r+C2r 2 +C3r 3 (3)

[0028] λ t =C0+C1t+C2t 2 +C3t 3 (4)

[0029] The equation coefficients C0, C1, C2, C3 can be obtained from the above equation set, wherein λp is the standard wavelength corresponding to the pth pixel, λq is the standard wavelength corresponding to the qth pixel, λr is the standard wavelength corresponding to the rth pixel, and λt is the standard wavelength corresponding to the tth pixel, wherein p, q, r, t are the numbers of the same type of components.

[0030] Further, the fixed integration time is set in the step (4), that is, the integration time of each piece of the to-be-measured element should be the same, the integration time should be set to make the peak intensity of the spectrum between 50%-80% of the saturation value, and the saved data should correspond to the number of the to-be-measured element, so that the to-be-measured element number is input, and the software automatically saves the peak wavelength and intensity.

[0031] As specifically related to the detector, the wavelength calibration lamp can be turned off, the optical fiber is connected to the tungsten lamp light source (which can also be a deuterium tungsten lamp and the like continuous spectrum light source), and the fixed integration time is set. The peak wavelength and peak intensity of the tungsten lamp light source spectrum are measured and saved. It should be noted that the fixed integration time should be set when measuring, that is, the integration time of each detector should be the same, the integration time should be set to make the peak intensity of the spectrum between 50%-80% of the saturation value (determined by the number of bits of the AD chip), and the saved data should correspond to the number of the detector. The detector number is input, and the software automatically saves the peak wavelength and intensity. Of course, similar methods can also be set for other to-be-measured elements.

[0032] Furthermore, the step of calculating the deviation of the second light source spectrum peak wavelength and intensity of all the components to be tested in step (6) includes: calculating the deviation of the second light source spectrum peak wavelength and the relative deviation of the intensity of each component to be tested according to the following formula based on the stored data of the second light source spectrum peak wavelength and peak intensity of the components to be tested; λm is the number of the corresponding components to be tested of the same type;

[0033] Average peak wavelength:

[0034] Deviation of peak wavelength:

[0035] Peak intensity average:

[0036] Relative deviation of peak intensity:

[0037] When it comes to detectors, the deviation of the peak wavelength and relative deviation of the intensity of the tungsten lamp spectrum of each detector can be calculated based on the stored data of the peak wavelength and peak intensity of the detector's tungsten lamp spectrum. Of course, similar calculation methods can be used for other components under test.

[0038] Furthermore, the marking classification in step (7) is as follows: the components to be tested that meet the requirements are marked as "PASS", and those that do not meet the requirements are marked as "NG".

[0039] The DUT is removably mounted within the controller via a mounting fixture, allowing for easy removal and replacement of each DUT for testing while preventing external interference with internal components. This facilitates easy removal, replacement, and screening, and with the aid of specialized mounting fixtures, the detector, grating, collimating mirror, or focusing mirror are stably mounted within the controller, preventing movement of the DUT, reducing errors, and improving inspection accuracy and consistency.

[0040] The method of the present application ensures the same spectrometer by a simple method, only changing one component, such as only changing the detector, grating, collimating reflector or focusing reflector, to achieve calibration test and screening of each type of component of the spectrometer, and then obtain the deviation, and determine the deviation size according to the needs of the customer to meet the consistency requirements. Then avoid the differences between the same type or different types of core components, and then avoid the differences between each miniature spectrometer. It is also necessary to control the differences between the spectrometers within a reasonable range according to different customer requirements, and ensure the consistency of the spectrometer to meet the corresponding production and scientific research needs. The component to be tested is detachably mounted in the controller by a mounting and fixing portion of a specific structure, which is convenient for disassembly, replacement and screening, and with the help of specific mounting and fixing components, the detector, grating, collimating reflector or focusing reflector is stably mounted in the controller to avoid shaking of the corresponding component to be tested, reduce errors, and improve inspection accuracy and consistency. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 The figure is a flow chart of a method for controlling the differences between micro-spectrometers.

[0042] Figure 2 Flowchart of the calibration method used in this application.

[0043] Figure 3 A three-dimensional diagram of the controller used in this application.

[0044] Figure 4 This is a three-dimensional diagram of the detector installation of the controller used in this application.

[0045] Figure 5 A three-dimensional diagram of the grating installation of the controller used in this application.

[0046] Figure 6 This is a three-dimensional diagram of the installation of the collimating reflector of the controller used in this application.

[0047] Figure 7 This is a three-dimensional diagram of the installation of the focusing reflector of the controller used in this application. DETAILED DESCRIPTION

[0048] The present invention will be further described below with reference to specific embodiments, but the present invention is not limited thereto.

[0049] like Figure 1-7 As shown, a method for controlling the difference between micro-spectrometers includes: a device to be measured and a controller, wherein the device to be measured is installed in the controller; the control method includes:

[0050] (1) Take out the components to be tested and number them respectively;

[0051] (2) Installing the first component to be tested into the controller;

[0052] (3) Open the test software in the computer, turn on the wavelength calibration light source, and perform wavelength calibration;

[0053] (4) Turn off the wavelength calibration light source, connect the second light source, set a fixed integration time; enter the first component number to be tested, and the test software automatically saves the peak wavelength and intensity;

[0054] If the detector is involved, you can turn off the wavelength calibration lamp, connect the optical fiber to the tungsten light source (it can also be a continuous spectrum light source such as a deuterium tungsten lamp), and set a fixed integration time. Measure and save the peak wavelength and peak intensity of the tungsten light source spectrum. Note that when measuring, a fixed integration time should be set, that is, the integration time of each detector should be the same, and the integration time should be set so that the peak intensity of the spectrum is between 50% and 80% of the saturation value (determined by the number of bits of the AD chip). The saved data should correspond to the detector number. Enter the detector number, and the software will automatically save the peak wavelength and intensity. Of course, similar methods can be used to set other components to be measured.

[0055] (5) dismantling the first component under test that has completed the test, installing the second component under test, and repeating the test of steps (2) to (4) until the test of all numbered components under test is completed;

[0056] (6) The software performs data analysis of the peak wavelength and intensity of all components under test, and calculates the deviation of the peak wavelength and intensity of the second light source spectrum of all components under test;

[0057] (7) Determine the deviation size, enter the deviation into the software, the software outputs a test report, and marks the components to be tested; according to the test report, all components to be tested are classified and stored.

[0058] Preferably, the deviation size is determined in step (7) based on customer needs.

[0059] The components to be tested are detectors, gratings, collimating reflectors or focusing reflectors, and the same type of layouts of all numbered detectors, gratings, collimating reflectors or focusing reflectors are screened by the above method respectively; that is, each type of component to be tested is screened by steps (2) to (7); all numbered detectors are screened by steps (2) to (7), and all gratings are screened by steps (2) to (7); all collimating reflectors are screened by steps (2) to (7); and all focusing reflectors are screened by steps (2) to (7).

[0060] Preferably, the wavelength calibration light source in step (2) is a mercury lamp, a xenon lamp or a neon lamp; and the second light source in step (5) is a continuous spectrum light source such as a tungsten lamp or a deuterium tungsten lamp.

[0061] The step (2) further includes connecting the optical fiber to the tester, the wavelength calibration light source, and the computer; the connection is via a USB data cable or wireless connection to the computer.

[0062] The step (3) specifically includes: ① opening the test software, and the test software automatically sets the integration time and the average number according to the spectral line intensity, such as automatically setting the integration time, each time increasing by 100 μs so that the intensity value of the strongest spectral line is between 50% and 80% of the saturation value (determined by the number of bits of the AD chip, 16-bit A / S, the saturation value is 216=65536), and setting the average number, each time increasing by 1, so that the spectral line intensity fluctuation is within ±10%; automatically saving the pixel sequence number of the spectral line and the input wavelength calibration light source standard wavelength, the input wavelength number is at least 4 or more; ② According to actual experience, the sequence number of the spectrometer detector pixel and the wavelength corresponding to the pixel satisfy the cubic fitting equation: n =C0+C1n+C2n 2 +C3n 3 , where n is the pixel number, λ n is the wavelength corresponding to the nth pixel, C0, C1, C2, C3 are the coefficients of the fitting equation, the calibration coefficients are automatically calculated and written into the EEPROM of the tester's lower computer to complete the wavelength calibration.

[0063] In step ②, the coefficients of the equation are obtained by the following formula:

[0064] λ p =C0+C1p+C2p 2 +C3p 3 (1)

[0065] λ q =C0+C1q+C2q 2 +C3q 3 (2)

[0066] λ r =C0+C1r+C2r 2 +C3r 3 (3)

[0067] λ t =C0+C1t+C2t 2 +C3t 3 (4)

[0068] The coefficients C0, C1, C2, and C3 of the equations can be obtained from the above equations, where λp corresponds to the standard wavelength of pixel p, λq corresponds to the standard wavelength of pixel q, λr corresponds to the standard wavelength of pixel r, and λt corresponds to the standard wavelength of pixel t, where p, q, r, and t are the numbers of components of the same type.

[0069] In step (4), a fixed integration time is set, that is, the integration time of each component to be tested should be the same, and the integration time should be set so that the peak intensity of the spectrum is between 50% and 80% of the saturation value. The saved data should correspond to the number of the component to be tested, so that when the number of the component to be tested is entered, the software automatically saves the peak wavelength and intensity.

[0070] If the detector is involved, you can turn off the wavelength calibration lamp, connect the optical fiber to the tungsten light source (it can also be a continuous spectrum light source such as a deuterium tungsten lamp), and set a fixed integration time. Measure and save the peak wavelength and peak intensity of the tungsten light source spectrum. Note that when measuring, a fixed integration time should be set, that is, the integration time of each detector should be the same, and the integration time should be set so that the peak intensity of the spectrum is between 50% and 80% of the saturation value (determined by the number of bits of the AD chip). The saved data should correspond to the detector number. Enter the detector number, and the software will automatically save the peak wavelength and intensity. Of course, similar methods can be used to set other components to be measured.

[0071] The step of calculating the deviation of the second light source spectrum peak wavelength and intensity of all the components to be tested in step (6) includes: calculating the deviation of the second light source spectrum peak wavelength and the relative deviation of the intensity of each component to be tested according to the following formula based on the stored data of the second light source spectrum peak wavelength and peak intensity of the components to be tested; λm is the number of components to be tested of the same type;

[0072] Average peak wavelength:

[0073] Deviation of peak wavelength:

[0074] Peak intensity average:

[0075] Relative deviation of peak intensity:

[0076] When it comes to detectors, the deviation of the peak wavelength and relative deviation of the intensity of the tungsten lamp spectrum of each detector can be calculated based on the stored data of the peak wavelength and peak intensity of the detector's tungsten lamp spectrum. Of course, similar calculation methods can be used for other components under test.

[0077] The marking classification in step (7) is as follows: the components to be tested that meet the requirements are marked as "PASS", and those that do not meet the requirements are marked as "NG".

[0078] The DUT is removably mounted within the controller via a mounting fixture, allowing for easy removal and replacement of each DUT for testing while preventing external interference with internal components. This facilitates easy removal, replacement, and screening, and with the aid of specialized mounting fixtures, the detector, grating, collimating mirror, or focusing mirror are stably mounted within the controller, preventing movement of the DUT, reducing errors, and improving inspection accuracy and consistency.

[0079] The method of the present application ensures that the same spectrometer only changes one component, such as only changing the detector, grating, collimating reflector or focusing reflector, so as to realize calibration test and screening of each type of component of the spectrometer, and then obtain the deviation, and determine the deviation size according to the needs of the customer to meet the consistency requirements. Then avoid the differences between the same type or different types of core components, and then avoid the differences between each miniature spectrometer. It is also necessary to control the differences between the spectrometers within a reasonable range according to different customer requirements, and ensure the consistency of the spectrometer to meet the corresponding production and scientific research needs. The component to be tested is detachably mounted in the controller by a mounting and fixing portion, which is convenient for disassembly, replacement and screening, and with the help of specific mounting and fixing components, the detector, grating, collimating reflector or focusing reflector is stably mounted in the controller to avoid shaking of the corresponding component to be tested, reduce errors, and improve inspection accuracy and consistency.

[0080] Example

[0081] According to the requirements of spectrometer consistency control, we designed a method and corresponding controller for consistency screening of micro-spectrometer detectors, gratings, collimating mirrors and focusing mirrors.

[0082] like Figure 1-7 As shown, the main body of the controller is a spectrometer, and the detector, grating, collimating reflector and focusing reflector of the controller can be flexibly installed and disassembled according to the requirements of test screening. Figure 1 As shown, the detector, grating, collimating reflector and focusing reflector of the controller are taken out of the warehouse separately, and after wavelength calibration, testing and data storage, all components are tested, analyzed and reported, and finally classified and stored, thereby completing the consistency screening. Figure 2 This is a flow chart of the calibration method used in this application, specifically opening the test software, setting the integration time and average number, saving the spectrum line pixel number, calculating the calibration coefficient and writing it to the EEPROM to complete the wavelength calibration. Figure 3The controller 5 shown includes a detector 1, a grating 2, a collimating mirror 3, and a focusing mirror 4. The controller includes an internal chamber surrounded by an outer wall. The detector 1 and grating 2 are positioned near one end of the internal chamber, while the collimating mirror 3 and focusing mirror 4 are positioned near the other end. The detector 1 and grating 2 are staggered, and the collimating mirror 3 and focusing mirror 4 are staggered. The controller 5 includes a first chamber 5-1 and a second chamber 5-2. The detector 1 and grating 2 are positioned between the first chamber 5-1 and the second chamber 5-2. The second chamber 5-2 is larger than the first chamber 5-1. The collimating mirror 3 and focusing mirror 4 are positioned at the end of the second chamber 5-2 away from the first chamber 5-1. The controller also includes a light source entrance. A spacer 5-4 is positioned between the collimating mirror 3 and the focusing mirror 4 to prevent mutual interference. One end of the spacer 5-4 is pointed.

[0083] like Figure 4 As shown, the detector 1 is installed in the controller 5 through the detector mounting component. The detector mounting component includes a screw 1-1 and a mounting base 1-3. The mounting base is provided with a mounting hole 1-2. The screw can be an M2 plastic tight top screw to prevent the metal screw from damaging the detector 1. The mounting base includes an upper and lower fixing bar. The mounting holes are provided on both sides of the upper fixing bar. The screw 1-1 passes through the mounting hole to fix the detector 1 in the mounting base 1-3. The mounting base also includes a narrow horizontal opening in the middle to facilitate the detector 1 to receive the signal spectrum.

[0084] like Figure 5 As shown, the grating 2 is installed in the controller 5 via the grating mounting assembly. The grating mounting assembly includes a set screw 2-1, screw 2-2, a limit pressure piece 2-3, and a grating seat 2-4. Set screws 2-1 are provided on both sides of the top of the limit pressure piece to tighten and secure the grating 2 from above. The grating seat 2-4 includes vertical fixing posts 2-5 on both sides of the edge. Screws 2-2 secure the limit pressure piece 2-3 to the top of the vertical fixing posts 2-5. Set screws 2-1 pass through the top of the limit pressure piece 2-3 to secure the grating to the grating seat 2-4. The provision of vertical fixing posts 2-5 prevents grating shaking, improves test accuracy, and facilitates grating replacement. M2 plastic tight top screws can be used as screws to prevent metal screws from damaging components.

[0085] like Figure 6 As shown, the collimating reflector 3 is mounted to the controller 5 via the collimating reflector mounting assembly. The collimating reflector mounting assembly includes a tightening block 3-1. The controller 5 is provided with a positioning hole 3-2 and a slot 3-3. The collimating reflector 3 is mounted in the slot 3-3, and the tightening block 3-1 is mounted in the positioning hole 3-2 to tighten the collimating reflector 3 in the slot. M2 plastic tightening screws can be used to prevent metal screws from damaging the components.

[0086] like Figure 7 As shown, the focusing reflector 4 is mounted to the controller 5 via a focusing reflector mounting assembly. The focusing reflector mounting assembly includes screws 4-1 and a focusing reflector mounting base 4-2. The focusing reflector is mounted within the focusing reflector mounting base 4-2. A retaining plate extends from the top of the focusing reflector mounting base 4-2. The retaining plate has a screw hole for screws 4-2 to pass through, thereby securing the focusing reflector 4 within the focusing reflector mounting base. M2 plastic locking screws can be used as the screws to prevent metal screws from damaging the components.

[0087] Testing process:

[0088] (1) As follows Figure 1-2 As shown, the detectors, gratings, collimating reflectors and focusing reflectors to be tested are taken out of the warehouse and numbered.

[0089] (2) Disassemble the detector from the tester, install the detector to be tested into the tester, and Figure 3-4 The fixture shown secures the detector under test. To ensure measurement accuracy, the tester requires wavelength calibration every time a detector or other component is replaced. Connect the optical fiber to the tester and a wavelength calibration light source (which can be an atomic emission light source such as a mercury lamp, xenon lamp, or neon lamp). Then, connect the device to the computer and test software via a USB cable.

[0090] (3) Open the test software in the computer and perform wavelength calibration: ① Open the test software, the software automatically sets the integration time and average times according to the spectral line intensity, automatically saves the pixel sequence of the spectral line and loads the standard spectrum line of the light source.

[0091] ② According to the cubic fitting equation: λ n =C0+C1n+C2n 2 +C3n 3 , where n is the pixel number, λn is the wavelength corresponding to the nth pixel, and the calibration coefficient is automatically calculated and written into the EEPROM of the tester's lower computer to complete the wavelength calibration.

[0092] The specific calibration process is:

[0093] ① Open the test software; the software automatically sets the integration time and averaging times based on the spectral line intensity. If the integration time is set automatically, increase it by 100μs each time until the intensity of the strongest spectral line is between 50% and 80% of the saturation value (determined by the number of bits in the AD chip; for a 16-bit A / S, the saturation value is 216 = 65536). Set the averaging times by 1 each time until the spectral line intensity fluctuation is within ±10%.

[0094] The pixel sequence of the spectrum line is automatically saved. At this time, enter the standard wavelength corresponding to the wavelength calibration lamp. The number of wavelengths entered must be at least 4.

[0095] ② According to practical experience, the serial number of the spectrometer detector pixel and the wavelength corresponding to the pixel satisfy the cubic fitting equation: λ n ×C0+C1n+C2n 2 +C3n 3 , where n is the pixel number, λn is the wavelength corresponding to the nth pixel, and C0, C1, C2, and C3 are the coefficients of the fitting equation. For example, the standard wavelength λp corresponds to the pth pixel, the standard wavelength λq corresponds to the qth pixel, the standard wavelength λr corresponds to the rth pixel, and the standard wavelength λt corresponds to the tth pixel, then:

[0096] λ p =C0+C1p+C2p 2 +C3p 3 (1)

[0097] λ q =C0+C1q+C2q 2 +C3q 3 (2)

[0098] λ r =C0+C1r+C2r 2 +C3r 3 (3)

[0099] λ t =C0+C1t+C2t 2 +C3t 63 (4)

[0100] The coefficients C0, C1, C2, and C3 of the equations can be calculated from the equation group, and the coefficients can be written into the EEPROM of the tester's lower computer to complete the wavelength calibration.

[0101] (4) Turn off the wavelength calibration lamp, connect the optical fiber to the tungsten light source (or a continuous spectrum light source such as a deuterium tungsten lamp), and set a fixed integration time. Measure and save the peak wavelength and peak intensity of the tungsten light source spectrum. Note that when measuring, a fixed integration time should be set, that is, the integration time of each detector should be the same. The integration time should be set so that the peak intensity of the spectrum is between 50% and 80% of the saturation value (determined by the number of bits of the AD chip). The saved data should correspond to the detector number.

[0102] Enter the detector number and the software will automatically save the peak wavelength and intensity.

[0103] (5) Remove the detector that has been tested, install a new detector to be tested, and complete the tests in steps (2) to (4) until all detectors are tested.

[0104] (6) The software automatically performs data analysis of the peak wavelength and intensity of all detectors and calculates the deviation of the peak wavelength and intensity of the tungsten lamp spectrum of all detectors.

[0105] According to the stored data of the peak wavelength and peak intensity of the detector tungsten lamp spectrum, the deviation of the peak wavelength and the relative deviation of the intensity of the tungsten lamp spectrum of each detector are calculated.

[0106] Average peak wavelength:

[0107] Deviation of peak wavelength:

[0108] Peak intensity average:

[0109] Relative deviation of peak intensity:

[0110] (7) Based on the customer's needs, the peak wavelength deviation and the relative deviation of the peak intensity are used to determine whether the detector meets the consistency requirements. The values ​​of the peak wavelength deviation and the relative deviation of the peak intensity are input into the software, and the software outputs a test report. Detectors that meet the requirements are marked as "PASS" and those that do not meet the requirements are marked as "NG". Detectors are classified and stored according to the test report.

[0111] (8) The grating, collimating mirror, and focusing mirror are screened for consistency according to steps (2)-(7). Each type of component to be tested is securely fixed in the tester using a fixing member with a specific structure as described in this application, thereby avoiding inconsistencies caused by component installation errors and improving accuracy.

[0112] Installation and removal of detectors: Figure 3-4 To ensure each detector is installed in the same position, place the detector glass window against the detector base during installation. Once installed, secure the detector with the M2 plastic locking screws to maintain consistent positioning. To remove a detector, simply loosen the two locking screws and remove the detector.

[0113] Installation and removal of the grating: Figure 3 、 5As shown, to ensure that each grating is installed in the same position, during installation, the grating is installed into the grating base's retaining groove. The grating retaining plate is then pressed against the grating base. The retaining plate is locked with two M1 screws, and the grating is secured with two M2 plastic jacking screws to ensure consistent positioning. To remove the grating, simply loosen the two M2 jacking screws and two M1 screws, remove the grating retaining plate, and then remove the grating.

[0114] Installation and removal of the collimating reflector: As shown in 3 and 6, you only need to install the collimating reflector into the collimating reflector limit slot of the detector, and then tighten the collimating reflector top block to ensure that the collimating reflector position remains consistent. If you want to remove the collimating reflector, you only need to loosen the top block to remove the collimating reflector.

[0115] Installation and removal of focusing mirror: Figure 3 、 7 As shown, simply rotate the focusing reflector mount 90° counterclockwise so that the focusing reflector mount faces upward. Install the focusing reflector into the retaining groove of the mount and tighten the two plastic locking screws to ensure that the focusing reflector remains in the same position. Rotate the focusing reflector mount 90° clockwise so that the reflective surface of the reflector is perpendicular to the horizontal plane. To remove the focusing reflector, simply rotate it 90° counterclockwise so that the reflective surface is parallel to the horizontal plane, loosen the locking screws, and remove the focusing reflector.

[0116] The embodiments described above provide a detailed description of the technical solutions and beneficial effects of the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications and improvements made within the scope of the principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for controlling inter-unit differences in a micro-spectrometer, the micro-spectrometer comprising: A device under test, a wavelength calibration light source, an optical fiber, a controller, a second light source, and a computer, wherein the device under test is installed in the controller; It is characterized in that it includes the following steps: (1) Take out the components to be tested and number them respectively; (2) Installing the first component to be tested into the controller; (3) Open the test software in the computer, turn on the wavelength calibration light source, and perform wavelength calibration; (4) Turn off the wavelength calibration light source, connect the second light source, set a fixed integration time; enter the first component number to be tested, and the test software automatically saves the peak wavelength and intensity; (5) dismantling the first component under test that has completed the test, installing the second component under test, and repeating the test of steps (2) to (4) until the test of all numbered components under test is completed; (6) The software performs data analysis of the peak wavelength and intensity of all components under test, and calculates the deviation of the peak wavelength and intensity of the second light source spectrum of all components under test; (7) Determine the deviation size, enter the deviation into the software, the software outputs a test report, and marks the components to be tested; according to the test report, all components to be tested are classified and stored.

2. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The deviation size is determined in step (7) based on the customer's needs.

3. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The components to be tested are detectors, gratings, collimating reflectors or focusing reflectors, and the same type of layouts of all numbered detectors, gratings, collimating reflectors or focusing reflectors are screened by the above method respectively; that is, each type of component to be tested is screened by steps (2) to (7); all numbered detectors are screened by steps (2) to (7), and all gratings are screened by steps (2) to (7); all collimating reflectors are screened by steps (2) to (7); and all focusing reflectors are screened by steps (2) to (7).

4. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The wavelength calibration light source in step (3) is selected from a mercury lamp, a xenon lamp or a neon lamp; the second light source in step (4) is selected from a tungsten lamp or a deuterium tungsten lamp.

5. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The step (3) further includes connecting the optical fiber to the tester, the wavelength calibration light source, and the computer respectively; the connection is via a USB data cable or wireless connection to the computer.

6. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The step (3) specifically includes: ① opening the test software, the test software automatically sets the integration time and the average number according to the spectral line intensity, and automatically saves the pixel sequence number of the spectral line and the input wavelength calibration light source standard wavelength; ② according to the cubic fitting equation: λ n =C0+C1n+C2n 2 +C3n 3 , where n is the pixel number, λ n is the wavelength corresponding to the nth pixel, C0, C1, C2, and C3 are the coefficients of the fitting equation. The calibration coefficients are automatically calculated and written into the EEPROM of the tester's lower computer to complete the wavelength calibration.

7. The method for controlling the difference between micro-spectrometers according to claim 6, characterized in that: In step ②, the coefficients of the equation are obtained by the following formula: λ p =C0+C1p+C2p 2 +C3p 3 (1) λ q C0+C1q+C2q 2 +C3q 3 (2) l r =C0+C1r+C2r 2 +C3r 3 (3) λ t =C0+C1t+C2t 2 +C3t 3 (4) The coefficients C0, C1, C2, and C3 of the equations can be obtained from the above equations, where λ p is the standard wavelength of pixel p, λ q is the standard wavelength of pixel q, r corresponds to the standard wavelength of pixel r, λ t The corresponding standard wavelength is pixel t, where p, q, r, and t are the numbers of components of the same type.

8. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: In step (4), a fixed integration time is set, that is, the integration time of each component to be tested should be the same, and the integration time should be set so that the peak intensity of the spectrum is between 50% and 80% of the saturation value. The saved data should correspond to the number of the component to be tested, so that when the number of the component to be tested is entered, the software automatically saves the peak wavelength and intensity.

9. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The step of calculating the deviation of the second light source spectrum peak wavelength and intensity of all the components to be tested in step (6) includes: calculating the deviation of the second light source spectrum peak wavelength and the relative deviation of the intensity of each component to be tested according to the following formula based on the stored data of the second light source spectrum peak wavelength and peak intensity of the components to be tested; λm is the number of components to be tested of the same type; Average peak wavelength: Deviation of peak wavelength: Peak intensity average: Relative deviation of peak intensity:

10. The method for controlling the difference between micro-spectrometers according to claim 1, characterized in that: The marking classification in step (7) is as follows: the components to be tested that meet the requirements are marked as "PASS", and those that do not meet the requirements are marked as "NG".

Images