A method for automatically controlling vacuum pressure and its control system

Abstract

The present invention belongs to the field of vacuum technology and specifically discloses a method for automatically controlling vacuum pressure and its control system. The system includes a vacuum pump, a molecular pump, and a high vacuum chamber connected in sequence. The high vacuum chamber is provided with a test port for externally connecting to a vacuum instrument under test. The system also includes a vacuum pressure detection component and a pressure adjustment component. The vacuum pressure detection component is used to detect and feedback the vacuum value within the high vacuum chamber, and the pressure adjustment component is used to dynamically adjust the pressure value within the high vacuum chamber. The system is used to detect the vacuum degree of the vacuum instrument under test, and then, based on the comparison result of the current vacuum value detected and the target vacuum value, the opening of the corresponding valves is adjusted in sequence according to a preset sequence. The vacuum of the vacuum instrument under test can be accurately and stably controlled at the target vacuum value.

Description

Technical Field

[0001] The present invention belongs to the field of vacuum technology, and in particular relates to a method for automatically controlling vacuum pressure and a control system thereof. Background Art

[0002] Pressure is a critical parameter in industrial production. Exceeding the rated value is unsafe and must be measured and controlled. In certain industrial processes, pressure also directly affects product quality and production efficiency.

[0003] Therefore, vacuum pressure instruments are essential precision instruments in industrial production, and the instrument's detection accuracy will directly affect the relevant process production. This requires the vacuum pressure instrument to be tested and calibrated. However, the current detection and control methods for the instrument's vacuum pressure are all manual control. Although it can achieve detection and calibration of the instrument under test, there are still the following problems: (1) The operator must open (close) the mechanical pump, molecular pump, and valve in a certain order, otherwise the equipment will be damaged. (2) The operator must open (close) the valve leading to the vacuum gauge in a certain order, otherwise the vacuum gauge zero point drift will be large, which will affect the measurement data. (3) It is impossible to control the target vacuum value, and can only control the vacuum value near the target vacuum value. (4) Due to certain leakage in the system and manual control being static control, it is impossible to stably control the target vacuum value for a long time. Summary of the Invention

[0004] In order to solve the problems existing in manual control of the vacuum pressure of the instrument, such as the large human influence factors of the operator and the inability to dynamically control the vacuum value of the instrument, the present application provides a method for automatically controlling the vacuum pressure and a control system thereof.

[0005] This application provides the following technical solutions:

[0006] On the one hand, the present application provides a control system for automatically controlling vacuum pressure, comprising a vacuum pump, a molecular pump and a high vacuum chamber connected in sequence, wherein the high vacuum chamber is provided with a test port for an externally connected vacuum instrument to be tested, and further comprising: a vacuum pressure detection component for detecting and feeding back the vacuum value in the high vacuum chamber, wherein the vacuum pressure detection component is connected to the high vacuum chamber; a pressure adjustment component for dynamically adjusting the pressure value in the high vacuum chamber to realize vacuum value testing and automatic control of the vacuum value of the vacuum instrument to be tested, wherein the pressure adjustment component is connected to the atmospheric pressure source and the high vacuum chamber.

[0007] By adopting the above technical solution, the vacuum value in the high vacuum chamber can be dynamically detected, and the detected value can be compared with the target vacuum value of the vacuum instrument being tested. Then, different valve circuits of the pressure adjustment component can be switched to adjust and control to achieve the target vacuum value of the vacuum instrument being tested.

[0008] Optionally, the vacuum pressure detection component includes a hot cathode vacuum gauge, a vacuum gauge 1 for measuring high vacuum, a vacuum gauge 2 for measuring medium vacuum and a vacuum gauge 3 for measuring low vacuum, and the hot cathode vacuum gauge, vacuum gauge 1, vacuum gauge 2 and vacuum gauge 3 are respectively connected to the high vacuum chamber; and also includes angle valve 1, angle valve 2, angle valve 3 and angle valve 4, the angle valve 1 is connected to the circuit between the high vacuum chamber and vacuum gauge 1, the angle valve 2 is connected to the circuit between the high vacuum chamber and vacuum gauge 2, the angle valve 3 is connected to the circuit between the high vacuum chamber and vacuum gauge 3, and the angle valve 4 is connected to the circuit between the high vacuum chamber and the test port.

[0009] By adopting the above technical solution, different vacuum gauges are used to detect and feedback vacuum values ​​in different ranges, and the angle valve constitutes a sealing switch for the corresponding vacuum gauge or test port, thereby realizing the switching of different pressure detection circuits during the automatic control process.

[0010] Optionally, the pressure adjustment component includes angle valve five, angle valve six, angle valve seven, angle valve eight, regulating valve one, regulating valve two, plug-in valve one and plug-in valve two; the plug-in valve one and plug-in valve two are arranged in series on the connection circuit between the molecular pump and the high vacuum chamber, one end of the plug-in valve one is connected to the high vacuum chamber, and one end of the plug-in valve two is connected to the molecular pump; the regulating valve one, angle valve five, angle valve six, regulating valve two, angle valve eight and angle valve seven are connected in series in sequence, the regulating valve one is connected to the atmospheric pressure source, and the angle valve seven is connected to the output end of the vacuum pump; and the angle valve seven is connected in parallel to the two ends of the series circuit of the molecular pump and the plug-in valve two.

[0011] By adopting the above technical solution and using different combinations of angle valves, plug-in valves and regulating valves, it is possible to adjust and switch different vacuum pressure control circuits such as calibration of vacuum gauge zero point, ultra-high vacuum test, high vacuum test, medium vacuum test and low vacuum test.

[0012] Optionally, the angle valve one, angle valve two, angle valve three, angle valve four, angle valve five, angle valve six, angle valve seven, angle valve eight, plug-in valve one and plug-in valve two are respectively connected to an external driving pressure source one to one; the regulating valve one and regulating valve two are electrically driven and controlled.

[0013] By adopting the above technical solution, the opening and closing of the corresponding valve is controlled by the driving pressure source, thereby realizing the switching of different control circuits.

[0014] By connecting the control ends of the driving pressure source (air generator), vacuum pump, molecular pump and each valve to a mature PLC control system, fully automatic control of each actuator can be achieved.

[0015] In another aspect, the present application provides a method for automatically controlling vacuum pressure, comprising the following steps:

[0016] S1. Connect the vacuum instrument to be tested to the test port of the control system that automatically controls the vacuum pressure, and turn on the main power supply of the control system as well as the power supply of the vacuum pump and the driving pressure source;

[0017] S2. Calibrate the zero point of vacuum gauge 1, vacuum gauge 2 and vacuum gauge 3;

[0018] S3, ultra-high vacuum test;

[0019] S4, high vacuum test;

[0020] S5, medium vacuum test;

[0021] S6, low vacuum test;

[0022] S7. When the low vacuum test reaches the preset low vacuum range of the vacuum instrument under test, turn off the vacuum pump, the molecular pump, the driving pressure source power supply and the main power supply, and the test ends.

[0023] Optionally, the process of calibrating the “zero point” of the vacuum gauge in step S2 includes:

[0024] 1) Close angle valve 1, angle valve 2, angle valve 4, angle valve 5, angle valve 6, angle valve 7, angle valve 8, regulating valve 1 and regulating valve 2;

[0025] 2) Open angle valve 3, gate valve 1 and gate valve 2;

[0026] 3) When the measured system vacuum is close to the lower limit of the range of vacuum gauge 3, turn on the molecular pump, open angle valve 2, and test the system vacuum through vacuum gauge 2; when the measured system vacuum is close to the lower limit of the range of vacuum gauge 2, open angle valve 1 and test the system vacuum through vacuum gauge 1;

[0027] 4) When the measured system vacuum is close to the lower limit of the range of vacuum gauge 1, turn on the hot cathode vacuum gauge to test the system vacuum;

[0028] 5) When the system vacuum reaches the lower limit of the measuring range of the vacuum instrument being tested or the set zero point calibration value, calibrate the "zero point" of vacuum gauge 1, vacuum gauge 2 and vacuum gauge 3.

[0029] Here, the term "close to the lower limit of the vacuum gauge" means a vacuum value slightly higher than the lower limit. In this way, the vacuum gauge in this range can still display. When the vacuum reaches the lower limit of the vacuum gauge, the other vacuum gauge will be switched to display. Therefore, the angle valve must be opened before switching.

[0030] Optionally, the process of the ultra-high vacuum test in step S3 includes:

[0031] 1) After the "zero point" calibration, close angle valve 1, angle valve 2, angle valve 3, angle valve 6, angle valve 7 and angle valve 8;

[0032] 2) Open angle valve 4, angle valve 5, gate valve 1 and gate valve 2;

[0033] 3) Open and adjust regulating valve 1 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1;

[0034] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the hot cathode vacuum gauge, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 1. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling the regulating valve 1.

[0035] Optionally, the high vacuum test process in step S4 includes:

[0036] 1) Close angle valve 2, angle valve 3, angle valve 6, angle valve 7 and angle valve 8;

[0037] 2) Open angle valve 1, angle valve 4, angle valve 5, gate valve 1 and gate valve 2;

[0038] 3) Open and adjust regulating valve 1 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1;

[0039] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the vacuum gauge for high vacuum detection, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling the regulating valve.

[0040] Optionally, the vacuum test process in step S5 includes:

[0041] 1) Close angle valve 1, angle valve 3, angle valve 6, angle valve 8 and gate valve 1;

[0042] 2) Open angle valve 2, angle valve 4, angle valve 5, angle valve 7 and gate valve 1;

[0043] 3) Open and adjust regulating valve 1 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1;

[0044] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by vacuum gauge 2 for detecting the medium vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of regulating valve 1. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling regulating valve 1.

[0045] Preferably, the process of the low vacuum test in step S6 includes:

[0046] 1) Close angle valve 1, angle valve 2, gate valve 1 and gate valve 2;

[0047] 2) Open angle valve 3, angle valve 4, angle valve 5, angle valve 6, angle valve 7, angle valve 8 and regulating valve 2;

[0048] 3) Open and adjust regulating valve 1 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1;

[0049] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by vacuum gauge 3 for detecting low vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of regulating valve 1. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling regulating valve 1.

[0050] In summary, this application includes at least one of the following beneficial technical effects:

[0051] 1. Simple operation and error-free. After setting the vacuum test point, the operator can adjust the opening of the corresponding valve in a preset order by comparing the current vacuum value with the target vacuum value, thereby controlling the vacuum degree of the vacuum instrument under test to the target vacuum value;

[0052] 2. Can accurately control the target vacuum value. The method of this application can accurately control the vacuum of the vacuum instrument under inspection at the target vacuum value through dynamic control.

[0053] 3. Ability to stably control the vacuum value at the target value. The method of the present application can stably control the vacuum of the vacuum instrument under inspection at the target vacuum value through dynamic control. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 A schematic diagram of an embodiment of a vacuum pressure automatic control system of the present invention;

[0055] In the figure: 1. Angle valve one; 2. Angle valve two; 3. Angle valve three; 4. Angle valve four; 5. Angle valve five; 6. Angle valve six; 7. Angle valve seven; 8. Angle valve eight; 9. Control valve one; 10. Control valve two; 11. Plug valve one; 12. Plug valve two; 13. Molecular pump; 14. Vacuum pump; 15. Hot cathode vacuum gauge (ultra-high pressure vacuum gauge); 16. Vacuum gauge one; 17. Vacuum gauge two; 18. Vacuum gauge three; 19. High vacuum chamber; 20. Driving pressure source. DETAILED DESCRIPTION

[0056] The specific implementation of this application is further described below with reference to the accompanying drawings.

[0057] like Figure 1The vacuum pressure automatic control system shown includes a main circuit consisting of a vacuum pump 14, a molecular pump 13, and a high vacuum chamber 19 connected in sequence. The high vacuum chamber 19 is connected to a vacuum pressure detection assembly and a pressure adjustment assembly. The vacuum pressure detection assembly dynamically detects the vacuum value within the high vacuum chamber 19, compares the detected value with the target vacuum value of the vacuum instrument being tested, and then adjusts and controls the pressure to achieve the target vacuum value of the vacuum instrument being tested by switching different valve paths of the pressure adjustment assembly.

[0058] The vacuum pressure detection component includes angle valve 1, angle valve 3, angle valve 2 and angle valve 4, hot cathode vacuum gauge 15, vacuum gauge 16, vacuum gauge 2 17 and vacuum gauge 3 18. The angle valve 1 is connected to the circuit between the high vacuum chamber 19 and vacuum gauge 1 16, the angle valve 2 is connected to the circuit between the high vacuum chamber 19 and vacuum gauge 2 17, the angle valve 3 is connected to the circuit between the high vacuum chamber 19 and vacuum gauge 3 18, and the angle valve 4 is connected to the circuit between the high vacuum chamber 19 and the test port.

[0059] Angle valve one 1, angle valve two 2, angle valve three 3 and angle valve four 4 constitute a sealing switch of the corresponding vacuum gauge or test port, realizing the vacuum gauge selection detection of different pressure circuits in the automatic control process.

[0060] The pressure adjustment assembly includes angle valve 5, angle valve 6, angle valve 7, angle valve 8, regulating valve 1, regulating valve 2, 10, gate valve 1, and gate valve 2. Gate valve 1, 11, and gate valve 2 are arranged in series on the connection circuit between the molecular pump 13 and the high vacuum chamber 19. One end of gate valve 11 is connected to the high vacuum chamber 19, and one end of gate valve 2, 12, is connected to the molecular pump 13. The regulating valve 1, 5, 6, 10, 8, and 7 are connected in series in sequence. The regulating valve 1 is connected to the atmospheric pressure source, and the angle valve 7 is connected to the output end of the vacuum pump 14. The angle valve 7 is connected in parallel to both ends of the series circuit between the molecular pump 13 and the gate valve 2, 12.

[0061] The vacuum pump 14, the molecular pump 13, the second gate valve 12 and the first gate valve 11 constitute an ultra-high vacuum pressure regulating circuit, in which the vacuum pump 14 directly pumps the required ultra-high pressure to the high vacuum chamber 19 through the molecular pump 13.

[0062] The control branch 1 composed of the external atmospheric pressure source, the regulating valve 1 9 and the angle valve 5 5 connected in series is connected in parallel with the above-mentioned ultra-high vacuum pressure regulating circuit to form a high vacuum pressure regulating circuit, which is jointly controlled by the external atmospheric pressure source and the vacuum pump 14 to pump the required high pressure into the high vacuum chamber 19.

[0063] The external atmospheric pressure source, regulating valve 1 9 and angle valve 5 are connected in series to form control branch 1, the vacuum pump 14, angle valve 7 and gate valve 11 are connected in series to form control branch 2, and control branch 1 and control branch 2 are connected in parallel to form a medium vacuum pressure regulating circuit.

[0064] The external atmospheric pressure source, regulating valve 1 9 and angle valve 5 are connected in series to form control branch 1, the vacuum pump 14, angle valve 7, angle valve 6, regulating valve 2 10 and angle valve 8 are connected in series to form control branch 3, and control branch 1 and control branch 3 are connected in parallel to form a low vacuum pressure regulating circuit.

[0065] Since the output pressure of the vacuum pump 14 is constant, the air pressure flow of the output circuit of the vacuum pump 14 can be adjusted by regulating valve 10; regulating valve 19 is used to adjust the input flow of the external atmospheric pressure source. By simultaneously regulating valve 19 and regulating valve 2 10, the input pressure of the high vacuum chamber 19 can be controlled.

[0066] Each angle valve and plug valve plays the role of controlling the on-off of the circuit. At the same time, since the regulating valve itself cannot ensure absolute sealing, the angle valve 5 5 and the angle valve 6 in front of the regulating valve 1 9 and the regulating valve 2 10 also play a sealing role to ensure the sealing of the input circuit of the high vacuum chamber 19.

[0067] Each angle valve and gate valve is connected to an external driving pressure source 20 one by one. The driving pressure source can be a 6kg air generator, and the opening and closing of each angle valve and gate valve is controlled by starting and stopping the air generator.

[0068] An electromagnetic differential pressure valve is provided on the connection circuit between the molecular pump 13 and the vacuum pump 14 . The electromagnetic differential pressure valve is used to prevent the molecular pump 13 from reversing.

[0069] based on Figure 1 The process of automatically controlling the vacuum pressure of the control system shown is: starting the system - calibrating the zero point of the vacuum gauge - ultra-high vacuum test - high vacuum test - medium vacuum test - low vacuum test - end of test.

[0070] The first step is to start the system:

[0071] The vacuum instrument to be tested Figure 1 The test port of the high vacuum chamber 19 of the control system is connected, and the main power of the control system and the power of the vacuum pump 14 and the driving pressure source 20 are turned on.

[0072] The second step is to calibrate the vacuum gauge zero point:

[0073] 1) Close angle valve 1, angle valve 2, angle valve 4, angle valve 5, angle valve 6, angle valve 7, angle valve 8, regulating valve 1, and regulating valve 2.

[0074] 2) Open angle valve three 3, gate valve one 11 and gate valve two 12;

[0075] 3) When the vacuum value of the vacuum system is 1333 Pa, open the molecular pump 13, open the angle valve 2, and test the system vacuum degree through the vacuum gauge 17; when the measured system vacuum degree is close to the lower limit of the range of the vacuum gauge 17, open the angle valve 1 and test the system vacuum degree through the vacuum gauge 16;

[0076] 4) When the measured system vacuum is 0.133 Pa, turn on the hot cathode vacuum gauge 15 to test the system vacuum;

[0077] 5) When the system vacuum degree reaches the lower limit of the measuring range of the vacuum instrument being tested or the set zero point calibration value, calibrate the "zero point" of vacuum gauge 16, vacuum gauge 2 17 and vacuum gauge 3 18.

[0078] The third step is ultra-high vacuum test:

[0079] 1. After the vacuum gauge is calibrated to "zero point", close angle valve one (1), angle valve three (3), angle valve two (2), angle valve six (6), angle valve seven (7) and angle valve eight (8);

[0080] 2) Open angle valve 4, angle valve 5, gate valve 1, and gate valve 2; connect the high vacuum chamber 19 to the vacuum instrument under inspection;

[0081] 3) Open and adjust the regulating valve 9, and open the high vacuum chamber 19 to the atmosphere, so that the external atmospheric pressure source enters the vacuum system through the regulating valve 9;

[0082] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the hot cathode vacuum gauge 15, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 9. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling the regulating valve 9.

[0083] Step 4: High vacuum test:

[0084] 1) Close angle valve 2 (2), angle valve 3 (3), angle valve 6 (6), angle valve 7 (7) and angle valve 8 (8);

[0085] 2) Open angle valve 1, angle valve 4, angle valve 5, gate valve 1, and gate valve 2.

[0086] 3) Open and adjust regulating valve 9 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 9;

[0087] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the vacuum gauge 16 for detecting high vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 9. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling the regulating valve 9.

[0088] Step 5: Medium vacuum test:

[0089] 1) Close angle valve 1, angle valve 3, angle valve 6, angle valve 8, and gate valve 11;

[0090] 2) Open angle valve 2, angle valve 4, angle valve 5, angle valve 7, and gate valve 11;

[0091] 3) Open and adjust regulating valve 9 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 9;

[0092] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the vacuum gauge 17 for detecting the medium vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 9. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling the regulating valve 9.

[0093] Step 6: Low vacuum test:

[0094] 1) Close angle valve 1, angle valve 2, gate valve 1, and gate valve 2;

[0095] 2) Open angle valve three (3), angle valve four (4), angle valve five (5), angle valve six (6), angle valve seven (7), angle valve eight (8) and regulating valve two (10);

[0096] 3) Open and adjust regulating valve 9 to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 9;

[0097] 4) After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the vacuum gauge 318 for detecting low vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 19. When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, stop controlling the regulating valve 19.

[0098] Step 7. Turn off the device:

[0099] When the low vacuum test reaches the preset low vacuum range of the vacuum instrument being tested, the vacuum pump 14 is turned off. When the speed of the molecular pump 13 is lower than 6000 rpm, the molecular pump 13, the power supply of the driving pressure source 20 and the main power supply are turned off, and the test ends.

[0100] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A control system for automatically controlling vacuum pressure, comprising a vacuum pump (14), a molecular pump (13) and a high vacuum chamber (19) connected in sequence, wherein the high vacuum chamber (19) is provided with a test port for externally connecting to a vacuum instrument to be tested, characterized in that: Also includes: A vacuum pressure detection component is used to detect and feedback the vacuum value in the high vacuum cavity (19), and the vacuum pressure detection component is connected to the high vacuum cavity (19); A pressure adjustment component is used to dynamically adjust the pressure value in the high vacuum chamber (19) to achieve vacuum value testing and automatic vacuum value control of the vacuum instrument under test, and the pressure adjustment component is connected to the atmospheric pressure source and the high vacuum chamber (19); The vacuum pressure detection assembly includes a hot cathode vacuum gauge (15), a vacuum gauge 1 (16) for measuring high vacuum, a vacuum gauge 2 (17) for measuring medium vacuum, and a vacuum gauge 3 (18) for measuring low vacuum, wherein the hot cathode vacuum gauge (15), the vacuum gauge 1 (16), the vacuum gauge 2 (17), and the vacuum gauge 3 (18) are respectively connected to the high vacuum chamber (19); The pressure adjustment component includes angle valve five (5), angle valve six (6), angle valve seven (7), angle valve eight (8), regulating valve one (9), regulating valve two (10), plug-in valve one (11) and plug-in valve two (12); the plug-in valve one (11) and the plug-in valve two (12) are arranged in series on the connection circuit of the molecular pump (13) and the high vacuum chamber (19), one end of the plug-in valve one (11) is connected to the high vacuum chamber (19), and one end of the plug-in valve two (12) is connected to the molecular pump (13); the regulating valve one (9), angle valve five (5), angle valve six (6), regulating valve two (10), angle valve eight (8) and angle valve seven (7) are connected in series in sequence, the regulating valve one (9) is connected to the atmospheric pressure source, and the angle valve seven (7) is connected to the output end of the vacuum pump (14); and the angle valve seven (7) is connected in parallel to the two ends of the series circuit of the molecular pump (13) and the plug-in valve two (12).

2. According to the control system for automatically controlling vacuum pressure according to claim 1, the vacuum pressure detection component further comprises angle valve one (1), angle valve two (2), angle valve three (3) and angle valve four (4), the angle valve one (1) is connected to the circuit between the high vacuum chamber (19) and vacuum gauge one (16), the angle valve two (2) is connected to the circuit between the high vacuum chamber (19) and vacuum gauge two (17), the angle valve three (3) is connected to the circuit between the high vacuum chamber (19) and vacuum gauge three (18), and the angle valve four (4) is connected to the circuit between the high vacuum chamber (19) and the test port.

3. The control system for automatically controlling vacuum pressure according to claim 2, wherein the angle valve 1 (1), angle valve 2 (2), angle valve 3 (3), angle valve 4 (4), angle valve 5 (5), angle valve 6 (6), angle valve 7 (7), angle valve 8 (8), gate valve 1 (11) and gate valve 2 (12) are respectively connected to an external driving pressure source (20) in a one-to-one manner.

4. A method for automatically controlling vacuum pressure using the control system according to claim 3, characterized in that: The steps include: S1, connect the vacuum instrument to be tested to the test port of the control system for automatically controlling the vacuum pressure, and turn on the main power supply of the control system as well as the power supply of the vacuum pump (14) and the driving pressure source (20); S2, calibrate the "zero point" of vacuum gauge 1 (16), vacuum gauge 2 (17) and vacuum gauge 3 (18); S3, ultra-high vacuum test; S4, high vacuum test; S5, medium vacuum test; S6, low vacuum test; S7. When the low vacuum test reaches the preset low vacuum range of the vacuum instrument under test, the vacuum pump (14) is turned off, and the molecular pump (13), the power supply of the driving pressure source (20) and the main power supply are turned off, and the test ends.

5. The method for automatically controlling vacuum pressure according to claim 4, characterized in that: The process of calibrating the vacuum gauge "zero point" in step S2 includes: Close angle valve 1 (1), angle valve 2 (2), angle valve 4 (4), angle valve 5 (5), angle valve 6 (6), angle valve 7 (7), angle valve 8 (8), regulating valve 1 (9) and regulating valve 2 (10); Open angle valve three (3), gate valve one (11) and gate valve two (12); When the measured system vacuum is close to the lower limit of the range of vacuum gauge 3 (18), open the molecular pump (13), open the angle valve 2 (2), and test the system vacuum through vacuum gauge 2 (17); when the measured system vacuum is close to the lower limit of the range of vacuum gauge 2 (17), open the angle valve 1 (1), and test the system vacuum through vacuum gauge 1 (16); When the measured system vacuum is close to the lower limit of the range of vacuum gauge 1 (16), the hot cathode vacuum gauge (15) is turned on to test the system vacuum; When the system vacuum reaches the lower limit of the measuring range of the vacuum instrument being tested or the set zero point calibration value, calibrate the "zero point" of vacuum gauge 1 (16), vacuum gauge 2 (17) and vacuum gauge 3 (18).

6. The method for automatically controlling vacuum pressure according to claim 5, characterized in that: The process of the ultra-high vacuum test in step S3 includes: After the "zero point" calibration, close angle valve one (1), angle valve two (2), angle valve three (3), angle valve six (6), angle valve seven (7) and angle valve eight (8); Open angle valve four (4), angle valve five (5), flapper valve one (11) and flapper valve two (12); Open and adjust regulating valve 1 (9) to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1 (9); After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the hot cathode vacuum gauge (15), the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 1 (9). When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, the control of the regulating valve 1 (9) is stopped.

7. The method for automatically controlling vacuum pressure according to claim 6, characterized in that: The high vacuum test process in step S4 includes: Close angle valve two (2), angle valve three (3), angle valve six (6), angle valve seven (7) and angle valve eight (8); Open angle valve 1 (1), angle valve 4 (4), angle valve 5 (5), gate valve 1 (11) and gate valve 2 (12); Open and adjust regulating valve 1 (9) to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1 (9); After comparing the set target vacuum value of the vacuum instrument to be tested with the vacuum value fed back by the vacuum gauge 1 (16) for detecting high vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 1 (9). When the vacuum system reaches the target vacuum value of the vacuum instrument to be tested and stabilizes, the control of the regulating valve 1 (9) is stopped.

8. The method for automatically controlling vacuum pressure according to claim 7, characterized in that: The process of the vacuum test in step S5 includes: Close angle valve one (1), angle valve three (3), angle valve six (6), angle valve eight (8) and gate valve one (11); Open angle valve two (2), angle valve four (4), angle valve five (5), angle valve seven (7) and gate valve one (11); Open and adjust regulating valve 1 (9) to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1 (9); After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by the vacuum gauge 2 (17) during the test, the pressure value entering the vacuum system is controlled by adjusting the opening size of the regulating valve 1 (9). When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, the control of the regulating valve 1 (9) is stopped.

9. The method for automatically controlling vacuum pressure according to claim 8, characterized in that: The process of the low vacuum test in step S6 includes: Close angle valve 1 (1), angle valve 2 (2), gate valve 1 (11) and gate valve 2 (12); Open angle valve three (3), angle valve four (4), angle valve five (5), angle valve six (6), angle valve seven (7), angle valve eight (8) and regulating valve two (10); Open and adjust regulating valve 1 (9) to allow the external atmospheric pressure source to enter the vacuum system through regulating valve 1 (9); After comparing the set target vacuum value of the vacuum instrument under test with the vacuum value fed back by vacuum gauge three (18) for detecting low vacuum, the pressure value entering the vacuum system is controlled by adjusting the opening size of regulating valve one (9). When the vacuum system reaches the target vacuum value of the vacuum instrument under test and stabilizes, control of regulating valve one (9) is stopped.

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