A high-pressure leak detection and compensation device for special gas supply

Abstract

The present invention discloses a high-pressure leak detection and compensation device for special gas supply, including a cylinder joint, a process gas outlet, a purge nitrogen, a high-pressure side leakage gas, a vacuum generator gas source, an exhaust port, an exhaust port, an expansion port and a serial port. Compared with the prior art, the advantages of the present invention are: after the special gas cylinder is replaced on-site at an outdoor silane station, a high-pressure pressure-maintaining test is required on the cylinder interface. The patented technology will no longer be affected by changes in outdoor ambient temperature, and the test result accuracy is higher. The misjudgment rate of on-site operations is reduced, and the technical requirements for safe production are improved.

Description

Technical Field

[0001] The invention relates to the field of special gas supply, and in particular to a high-pressure leakage detection and compensation device for special gas supply. Background Art

[0002] When performing high-pressure pressure maintenance testing on the cylinder interface of special gas supply equipment (gas cylinder cabinets, gas cylinder racks, bulk special gas supply systems) after replacing the cylinder, it is greatly affected by the ambient temperature. In particular, the ambient temperature changes in the bulk silane supply system in an open silane station often cause the high-pressure leak detection function to fail.

[0003] According to the investigation, the special gas supply equipment GCBSGS in the United States, France, Japan, South Korea and China do not have the high-pressure leakage detection compensation function. During the pressure test, the pressure data is directly read and a deviation value is set, without considering the influence of temperature on the pressure test.

[0004] The pressure test of the flammable, explosive, toxic and harmful special gas cylinder cabinet is greatly affected by temperature after each cylinder change, especially in summer and winter. Especially for natural silane gas, the silane station is an open building, and the pressure test of the bulk silane supply system is most affected by temperature. The pressure test results of the existing silane BSGS system after changing the cylinder often fail. The only way to do the pressure test on site is to rely on experience to re-do the pressure test or use other methods to detect whether the cylinder joint has leakage.

[0005] Therefore, a high-pressure leak detection and compensation device for special gas supply needs to be studied urgently. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a special gas supply high-pressure leak detection and compensation device for the above problems.

[0007] In order to solve the above technical problems, the technical solution provided by the present invention is: a special gas supply high-pressure leak detection and compensation equipment, including a cylinder joint, a process gas outlet, a purge nitrogen, a high-pressure side leakage gas, a vacuum generator gas source, an exhaust port, an exhaust port, an expansion port and a serial port, the cylinder joint is arranged on both sides, the cylinder joint is connected to a high-pressure three-way pneumatic valve, a pressure sensor is installed between the cylinder joint and the high-pressure three-way pneumatic valve, an overflow switch is connected in series on the high-pressure three-way pneumatic valve, the overflow switch is connected in parallel with high-pressure three-way pneumatic valve two and high-pressure three-way pneumatic valve three, high-pressure three-way pneumatic valve two is connected in series with a two-way manual valve and a one-way valve, high-pressure three-way pneumatic valve three is connected in series with a pressure regulating valve, a pressure sensor and a low-pressure two-way pneumatic valve, a low-pressure three-way pneumatic valve is connected in parallel with the high-pressure three-way pneumatic valve three pipelines between the one-way valve and the two-way manual valve, a filter and a two-way manual valve are connected in series on the low-pressure two-way pneumatic valve, and two cylinder joint pipelines are connected in parallel.

[0008] As an improvement, the process gas outlet is connected to one end of the parallel cylinder joint pipeline close to the two-way manual valve through a pressure sensor and a two-way manual valve.

[0009] As an improvement, the high-pressure side leakage gas is connected to one end of the parallel cylinder joint pipeline close to the high-pressure three-way pneumatic valve through a low-pressure two-way pneumatic valve, a one-way valve and a high-pressure two-way pneumatic valve.

[0010] As an improvement, the purge nitrogen is connected to the parallel cylinder joint pipeline close to one end of the high-pressure three-way pneumatic valve through a one-way valve and a high-pressure two-way pneumatic valve 2, and is connected in parallel with the high-pressure side leakage gas pipeline.

[0011] As an improvement, the vacuum generator gas source is connected to the cylinder joint pipeline after the one-way valve is branched and connected in parallel through a low-pressure two-way pneumatic valve connecting the one-way valve. A vacuum generator is provided at the connection point, and a two-way manual valve is provided between the vacuum generator and the cylinder joint pipeline. The vacuum generator is connected to the exhaust port through a pipeline.

[0012] As an improvement, the expansion port and the serial port are connected in parallel to a branch of the process gas outlet pipeline close to one end of the two-way manual valve through a pressure sensor and a two-way manual valve.

[0013] As an improvement, a shell is provided on the outside of the special gas supply high-pressure leak detection and compensation equipment, and an exhaust port is provided on the top of the shell.

[0014] As an improvement, a PLC is connected to a pressure sensor near the cylinder joint of a pipeline connecting the expansion port and the serial port, and the PLC is connected to a thermometer.

[0015] Compared with the prior art, the advantages of the present invention are: after replacing the special gas cylinder at the outdoor silane station, it is necessary to conduct a high pressure test on the cylinder interface. The patented technology will not be affected by the change of outdoor ambient temperature, and the test result is more accurate. It reduces the misjudgment rate of on-site operation and improves the technical requirements for safe production. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The schematic diagram is a structural diagram of a high-pressure leak detection and compensation device for special gas supply.

[0017] As shown in the figure: 1. Cylinder connector, 2. Process gas outlet, 3. Purge nitrogen, 4. High-pressure side leakage gas, 5. Vacuum generator gas source, 6. Exhaust port, 7. Exhaust port, 8. Expansion port, 9. Serial port, 10. High-pressure three-way pneumatic valve, 11. Pressure sensor, 12. Overflow switch, 13. High-pressure three-way pneumatic valve 2, 14. High-pressure three-way pneumatic valve 3, 15. Two-way manual valve, 16. Check valve, 17. Pressure regulating valve, 18. PLC, 19. Low-pressure two-way pneumatic valve, 20. Low-pressure three-way pneumatic valve, 21. Filter, 23. Low-pressure two-way pneumatic valve, 24. High-pressure two-way pneumatic valve, 25. High-pressure two-way pneumatic valve 2, 26. Low-pressure two-way pneumatic valve, 27. Vacuum generator, 28. Shell. DETAILED DESCRIPTION

[0018] The present invention is further described in detail below in conjunction with the accompanying drawings.

[0019] In the specific implementation of the present invention, a special gas supply high-pressure leak detection and compensation device includes a cylinder joint 1, a process gas outlet 2, a purge nitrogen 3, a high-pressure side leakage gas 4, a vacuum generator gas source 5, an exhaust port 6, an exhaust port 7, an expansion port 8 and a serial port 9. The cylinder joint 1 is arranged on both sides, the cylinder joint 1 is connected to a high-pressure three-way pneumatic valve 10, a pressure sensor 11 is installed between the cylinder joint 1 and the high-pressure three-way pneumatic valve 10, an over-flow switch 12 is connected in series on the high-pressure three-way pneumatic valve 10, and a two-way three-way pneumatic valve 10 is connected downstream of the over-flow switch 12. Valve (high-pressure three-way pneumatic valve two 13 and high-pressure three-way pneumatic valve three 14), the high-pressure three-way pneumatic valve two 13 is opened in three ways and is connected in series with a two-way manual valve 15 and a one-way valve 16 respectively, the high-pressure three-way pneumatic valve three 14 is connected in series with a pressure regulating valve 17 and a pressure sensor 11, and the three ways are opened and connected in series with a low-pressure three-way pneumatic valve 20 and a low-pressure two-way pneumatic valve 19 respectively, the one-way valve 16 and the two-way manual valve 15 are connected between the low-pressure three-way pneumatic valve 20, the low-pressure two-way pneumatic valve 19 is connected in series with a filter 21 and a two-way manual valve 15, and the two cylinder connectors 1 are connected in parallel.

[0020] As an improvement, the process gas outlet 2 of the cylinder is connected to one end of the cylinder joint 1 pipeline close to the two-way manual valve 15 after parallel connection through the pressure sensor 11 and the two-way manual valve 15.

[0021] As an improvement, the high-pressure side leakage gas 4 is connected to one end of the parallel cylinder joint 1 pipeline close to the high-pressure three-way pneumatic valve 10 through the low-pressure two-way pneumatic valve 23, the one-way valve 16 and the high-pressure two-way pneumatic valve 24.

[0022] As an improvement, the purge nitrogen 3 is connected to one end of the parallel cylinder joint 1 pipeline close to the high-pressure three-way pneumatic valve 10 through a one-way valve 16 and a high-pressure two-way pneumatic valve 25, and is connected in parallel with the high-pressure side leakage gas 4 pipeline.

[0023] As an improvement, the vacuum generator gas source 5 is connected to the one-way valve 16 through a low-pressure two-way pneumatic valve 26 and is connected to the pipeline after the one-way valve 16 of the cylinder connector 1 pipeline is branched and connected in parallel. A vacuum generator 27 is provided at the connection point, and a two-way manual valve 15 is provided between the vacuum generator 27 and the cylinder connector 1 pipeline. The vacuum generator 27 is connected to the exhaust port 6 through a pipeline.

[0024] As an improvement, the expansion port 8 and the serial port 9 are connected in parallel to a branch of the process gas outlet 2 pipeline close to one end of the two-way manual valve 15 through a pressure sensor 11 and a two-way manual valve 15 .

[0025] As an improvement, a shell 28 is provided on the outside of the special gas supply high-pressure leak detection and compensation equipment, and an exhaust port 7 is provided on the top of the shell 28.

[0026] As an improvement, a pressure sensor 11 near the cylinder connector 1 of the pipeline connecting the expansion port 8 and the serial port 9 is connected to a PLC 18, and the PLC 18 is connected to a thermometer.

[0027] Working principle of the present invention: This design designs a temperature sensor in the special gas supply equipment GC BSGS to monitor the temperature changes of important parts of the special gas equipment in real time. During the pressure test, the PLC program automatically synchronizes the temperature compensation. During each pressure test, the PLC records the pressure and temperature change curves. The PLC program automatically determines whether the pressure change at each time node is due to temperature influence or real leakage, and absolutely guarantees the accuracy of the pressure test results.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features, and in the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0029] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0031] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0032] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention without departing from the principles and purpose of the present invention.

Claims

1. A high-pressure leak detection and compensation device for special gas supply, comprising a cylinder joint (1), a process gas outlet (2), a purge nitrogen (3), a high-pressure side leakage gas (4), a vacuum generator gas source (5), an exhaust port (6), an exhaust port (7), an expansion port (8) and a serial port (9), characterized in that: The cylinder joint (1) is arranged on both sides, the cylinder joint (1) is connected to a high-pressure three-way pneumatic valve (10), a pressure sensor (11) is installed between the cylinder joint (1) and the high-pressure three-way pneumatic valve (10), an overflow switch (12) is connected in series to the high-pressure three-way pneumatic valve (10), the overflow switch (12) is connected in parallel to a high-pressure three-way pneumatic valve 2 (13) and a high-pressure three-way pneumatic valve 3 (14), the high-pressure three-way pneumatic valve 2 (13) is connected in series to a two-way manual valve (15) and a one-way valve (16), the high-pressure three-way pneumatic valve 3 (14) is connected in series to a pressure regulating valve (1 7), a pressure sensor (11) and a low-pressure two-way pneumatic valve (19), a one-way valve (16) and a two-way manual valve (15) are connected in parallel to a high-pressure three-way pneumatic valve three (14) pipeline through a low-pressure three-way pneumatic valve (20), a filter (21) and a two-way manual valve (15) are connected in series to the low-pressure two-way pneumatic valve (19), and two cylinder connector (1) pipelines are connected in parallel; a PLC (18) is connected to the pressure sensor (11) near the cylinder connector (1) of the pipeline connecting the expansion port (8) and the serial port (9), and the PLC (18) is connected to a thermometer.

2. A high-pressure leakage detection and compensation device for special gas supply according to claim 1, characterized in that: The process gas outlet (2) is connected to one end of the pipeline of the cylinder joint (1) connected in parallel close to the two-way manual valve (15) through a pressure sensor (11) and a two-way manual valve (15).

3. The high-pressure leakage detection and compensation equipment for special gas supply according to claim 1 is characterized in that: The high-pressure side leakage gas (4) is connected to one end of the parallel-connected cylinder joint (1) pipeline close to the high-pressure three-way pneumatic valve (10) through the low-pressure two-way pneumatic valve (23), the one-way valve (16) and the high-pressure two-way pneumatic valve (24).

4. The high-pressure leakage detection and compensation equipment for special gas supply according to claim 1 is characterized in that: The purge nitrogen (3) is connected to the parallel cylinder joint (1) pipeline close to one end of the high-pressure three-way pneumatic valve (10) through a one-way valve (16) and a high-pressure two-way pneumatic valve (25), and is connected in parallel with the high-pressure side leakage gas (4) pipeline.

5. The high-pressure leakage detection and compensation equipment for special gas supply according to claim 1 is characterized in that: The vacuum generator gas source (5) is connected to the one-way valve (16) through a low-pressure two-way pneumatic valve (26) and is connected to the pipeline after the one-way valve (16) of the cylinder joint (1) is branched and connected in parallel. A vacuum generator (27) is provided at the connection point. A two-way manual valve (15) is provided between the vacuum generator (27) and the cylinder joint (1) pipeline. The vacuum generator (27) is connected to the exhaust port (6) through a pipeline.

6. The high-pressure leakage detection and compensation equipment for special gas supply according to claim 1 is characterized in that: The expansion port (8) and the serial port (9) are connected in parallel to a branch of the process gas outlet (2) pipeline close to one end of the two-way manual valve (15) through a pressure sensor (11) and a two-way manual valve (15).

7. The high-pressure leakage detection and compensation equipment for special gas supply according to claim 1 is characterized in that: A shell (28) is provided on the outside of the special gas supply high-pressure leakage detection and compensation device, and an exhaust port (7) is provided on the top of the shell (28).

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