Compensation of temperature dependent, quadrature induced zero rate bias for micro electro mechanical gyroscopes

Abstract

A sensor system is proposed, comprising: - an analog processing device, comprising: - a drive circuit configured for generating an analog drive signal for driving a vibrating element of a micro electro mechanical gyroscope; - a detection circuit coupled with the drive circuit and the vibrating element, wherein the detection circuit is configured such that it generates an analog rate of rotation signal and an analog quadrature signal from signals detected by the gyroscope; - one or more analog-to-digital converters coupled with the detection circuit and configured such that they convert the analog rate of rotation signal and the analog quadrature signal into a digital rate of rotation signal and a digital quadrature signal; - a compensation circuit configured in a measurement operating mode of the sensor system such that it compensates for a quadrature influence on the analog quadrature signal using at least one quadrature compensation value; - a digital processing device coupled with the analog processing device, wherein the digital processing device comprises a digital processing circuit, characterized in that the digital processing circuit is configured in a measurement operating mode of the sensor system such that it compensates for a temperature-dependent quadrature-induced zero rate offset ZRO of the digital rate of rotation signal using at least one ZRO compensation value and temperature information.

Description

Technical Field

[0001] The present invention is based on the sensor system according to the preamble of claim 1. Background Technology

[0002] Microelectromechanical systems (MEMS) are well-known and are used, for example, as gyroscopes for measuring rotational rates in a variety of applications. Therefore, MEMS gyroscopes are used in smartphones, tablets, portable electronic devices, vehicle systems, and many other applications.

[0003] One problem in operating MEMS gyroscopes is caused by orthogonal signals, which may be due to unwanted coupling and are 90° phase-shifted relative to the measurement signal (orthogonal phase). Here, orthogonal signals can significantly affect and spoof measurements.

[0004] Therefore, the orthogonal effect of compensation on measurement represents a decisive challenge for accurate and efficient rotational rate measurement in practice.

[0005] Various schemes for orthogonal compensation are known from the prior art. Known methods that can be used in open-loop gyroscopes include compensating for the orthogonal signal at the "sensing" input using a signal derived from the driving motion, such as those disclosed in US7290435 B2.

[0006] In addition, methods for reducing zero-rate offset (ZRO) or zero-rate drift are known, for example, from US9410806 B2.

[0007] US2019 / 0265036A1 describes a system with an analog processing unit having a compensation circuit coupled to a detection circuit and configured such that it zeroes an analog quadrature signal when using an analog drive signal and a compensation value. The system also includes a digital processing unit coupled to the analog processing unit and comprising digital processing circuitry configured to adaptively compensate for rate offsets in the quadrature induction of a temperature-varying digital rate signal when using a digital quadrature signal, a compensation value, and temperature data. Here, the compensation value from the analog processing unit is reused by the digital processing circuitry. A disadvantage of this system is that it does not account for the non-idealities of the compensation circuitry or the quadrature fine-tuning circuitry. However, the non-ideal behavior of the compensation circuitry in practice can cause the actual compensation signal fed into the input of the detection circuit to not correspond to or be precisely proportional to the compensation value used. Summary of the Invention

[0008] The objective of this invention is to provide a sensor system and a method for operating the sensor system, which enables improved and more accurate measurements, particularly improving compensation for errors or interference from orthogonal induction.

[0009] Compared to existing technologies, the sensor system according to claim 1 has the advantage of achieving advantageous compensation for the orthogonal effects on rotation rate measurement, thereby enabling cost-effective improvement in measurement accuracy. According to the invention, it is advantageously possible not to directly use the orthogonal compensation value for ZRO compensation, which is used to compensate for the orthogonal effects on analog orthogonal signals.

[0010] According to the present invention, precise compensation can be achieved by using quadrature compensation values ​​to compensate for the quadrature effects on analog quadrature signals and additionally using ZRO compensation values ​​to compensate for the temperature-dependent quadrature induction zero-rate offset of digital rotational rate signals. This precise compensation also takes into account the non-ideal behavior of the compensation circuit. In particular, it is possible to compensate for the zero-rate offset (or ZRO drift) independently of the non-ideal behavior of the compensation circuit when compensating for analog quadrature signals.

[0011] This advantage is achieved according to the present invention compared to systems that use the same compensation value to compensate for the zero-rate offset of the quadrature induction of both analog quadrature signals and digital rotation rate signals. In this case, the non-ideal behavior of the quadrature trimming circuit or the compensation circuit cannot be taken into account.

[0012] Therefore, according to the present invention, it is possible to achieve particularly efficient and accurate rotational rate measurement.

[0013] According to the present invention, it is conceivable that for each channel of a multi-axis rotational rate sensor, in particular, an orthogonal compensation value (of its own) and especially preferably a ZRO compensation value (of its own) can be used.

[0014] Advantageous configurations of the invention can be understood from the dependent claims.

[0015] According to one embodiment of the invention, the quadrature compensation value is set to be different from the ZRO compensation value. This enables precise and flexible compensation, and also allows for particularly advantageous consideration of non-ideal behavior of the compensation circuit. Accordingly, it is conceivable that the ZRO compensation value is a separate value from the quadrature compensation value.

[0016] According to one embodiment of the invention, it is conceivable that the orthogonal compensation value and the ZRO compensation value are obtained and / or calculated differently. According to one embodiment, it is particularly likely that the orthogonal compensation value and the ZRO compensation value are obtained and / or calculated using methods independent of each other.

[0017] According to one embodiment of the invention, it is conceivable that the sensor system is configured to perform orthogonal fine-tuning, wherein orthogonal compensation values ​​are obtained during orthogonal fine-tuning. It is possible that the orthogonal compensation values ​​obtained during orthogonal fine-tuning are then used in a measurement operation mode to compensate for orthogonal effects on the analog orthogonal signals. It is also possible that orthogonal fine-tuning for obtaining the orthogonal compensation values ​​is performed before determining the ZRO compensation values.

[0018] According to one embodiment of the present invention, the sensor system further includes:

[0019] a. A control device for switching between the measurement operation mode and the ZRO fine-tuning mode, wherein the compensation circuit is selectively deactivated and reactivated in the ZRO fine-tuning mode, and wherein the temperature-related quadrature induction offset of the digital rotation rate signal is not compensated in the ZRO fine-tuning mode.

[0020] b. Circuitry for determining the ZRO compensation value, wherein the ZRO compensation value is obtained based on a comparison between an uncompensated digital quadrature signal detected in the ZRO fine-tuning mode and a compensated digital quadrature signal detected in the ZRO fine-tuning mode. Therefore, the ZRO compensation value can be obtained particularly advantageously, enabling improved compensation during measurement operation. According to one embodiment, it is conceivable that the control device also manipulates the first stage of the detection circuit, particularly the C / V converter, to change and / or match the gain factor used for detecting the uncompensated or compensated digital quadrature signal.

[0021] According to one embodiment of the invention, the circuitry is configured such that the ZRO compensation value is obtained as a scaling difference between the uncompensated and compensated digital quadrature signals. It is conceivable that a scaling factor is used when obtaining the scaling difference. For example, it is conceivable that the scaling factor has a value of 1 or a value other than 1.

[0022] According to one embodiment of the invention, the sensor system includes a temperature sensor for detecting the current operating temperature, and the digital processing circuit is configured such that the ZRO compensation value is matched using one or more temperature coefficients, taking into account the current operating temperature of the sensor system. Therefore, compensation can be performed with particularly high accuracy at different temperatures.

[0023] According to one embodiment of the invention, the compensation circuit is coupled to the detection circuit, wherein the compensation circuit is configured such that it compensates for the analog quadrature signal when using the analog drive signal and the quadrature compensation value. Thus, compensation for the analog quadrature signal can be electrically implemented at the "sensing" input or in front of the detection circuit.

[0024] According to one embodiment of the invention, the compensation circuit is coupled to the vibrating element of the gyroscope, and the compensation circuit is configured such that orthogonal effects on the analog quadrature signal are compensated by applying a mechanical force to the vibrating element, wherein the strength of the force is selected according to the orthogonal compensation value. Thus, according to one embodiment of the invention, it is conceivable that compensation for orthogonal effects on the analog quadrature signal can be performed directly by mechanical force on the gyroscope.

[0025] Another subject of the invention is a method for operating a sensor system according to an embodiment of the invention in a measurement operation mode.

[0026] Its characteristic is that it compensates for the orthogonal influence on the analog orthogonal signal and the zero-rate offset ZRO of the temperature-related orthogonal induction of the digital rotation rate signal.

[0027] Specifically, the orthogonal effect on the simulated orthogonal signal is compensated using at least one orthogonal compensation value, and

[0028] Specifically, the zero-rate offset ZRO of the temperature-related quadrature induction of the digital rotation rate signal is compensated when using ZRO compensation values ​​and when using temperature information.

[0029] The configuration, advantages, and effects already described in conjunction with the sensor system according to the invention can be applied herein to the method for operating the sensor system according to an embodiment of the invention in a measurement operation mode.

[0030] According to one embodiment of the invention, the current operating temperature of the sensor system is detected, and the ZRO compensation value is matched using one or more temperature coefficients while taking into account the current operating temperature of the sensor system.

[0031] Another subject of the invention is a method for operating a sensor system according to an embodiment of the invention in ZRO fine-tuning mode, the method being used to determine at least one ZRO compensation value for compensating for the zero-rate offset ZRO of a temperature-dependent quadrature induction of a digital rotation rate signal.

[0032] Its features are,

[0033] The compensation circuit is disabled using the control device to detect and digitize uncompensated analog quadrature signals.

[0034] The compensation circuit is activated by the control device to compensate for the orthogonal effects on the analog quadrature signals.

[0035] Digitize this compensated orthogonal signal.

[0036] Then, using circuitry, the uncompensated and compensated digital quadrature signals are compared, and

[0037] The ZRO compensation value is determined based on this comparison.

[0038] The configuration, advantages, and effects described in conjunction with the sensor system according to the invention, especially in conjunction with the ZRO fine-tuning mode, can be applied to the method for operating the sensor system according to an embodiment of the invention in the ZRO fine-tuning mode.

[0039] Embodiments of the invention are shown in the accompanying drawings and described in more detail in the following description. Attached Figure Description

[0040] The attached diagram shows:

[0041] Figure 1 A schematic illustration of a sensor system according to an embodiment of the present invention.

[0042] Figure 2 A schematic illustration of a sensor system according to an embodiment of the present invention.

[0043] Figure 3 A schematic illustration of a sensor system according to an embodiment of the present invention.

[0044] Figure 4 A schematic illustration of a sensor system according to one embodiment of the present invention. Detailed Implementation

[0045] In different accompanying drawings, the same parts are given the same reference numerals and are therefore usually named or mentioned only once each.

[0046] exist Figure 1The diagram shows a schematic illustration of a sensor system according to an embodiment of the present invention. The sensor system includes an analog processing device having a drive circuit 10 configured to generate analog drive signals to drive one or more vibrating elements 2 of a microelectromechanical gyroscope 1. A drive shaft 4 receives the electrical drive signals thereon, thereby driving the vibrating element 2 to vibrate at a determinable frequency. The drive circuit 10 also includes a C / V converter 17, a phase-locked loop 16 (PLL), and an amplitude modulator 15 for adjusting the amplitude of the vibrating element 2.

[0047] The gyroscope 1 can detect the signal used for the detection axis 3. However, according to an embodiment of the invention, the gyroscope 1 can also be configured as a multi-axis gyroscope. Accordingly, for example, three detection axes 3', 3"', and 3"' can be provided, wherein each generates a signal corresponding to the motion of the vibrating element 2 and the corresponding rotation of the gyroscope 1 about its respective axis. Thus, signals for, for example, three channels can be generated using the gyroscope 1. The following description is basically limited to one of the channels. However, corresponding means and methods can be implemented for the other channels or detection axes 3', 3"', and 3"' respectively.

[0048] The sensor system includes a detection circuit 20 coupled to the drive circuit 10 and the vibration element 2. The detection circuit 20 is configured to generate an analog rotation rate signal and an analog quadrature signal from the signal detected by the right gyroscope 1. For example, signal detection can be achieved capacitively via the gyroscope 1 using appropriate electrode devices.

[0049] The sensor system includes one or more analog-to-digital converters 21, 21', which are coupled to the detection circuit 20. The one or more analog-to-digital converters 21, 21' are configured such that they convert analog rotation rate signals and analog quadrature signals into digital rotation rate signals 22 and digital quadrature signals 23. The digital rotation rate signals 22 and digital quadrature signals 23 are filtered using corresponding filters 50, 50'.

[0050] The sensor system also includes a compensation circuit 30, which is configured in the sensor system's measurement operation mode to compensate for the orthogonal effects on the analog orthogonal signals when using at least one orthogonal compensation value 31. In particular, it is conceivable that the orthogonal compensation value 31 is applied to each axis 3', 3", 3"' or each channel of the gyroscope 1. Figure 1In the embodiment shown, the compensation circuit 30 is coupled to the detection circuit 20. The compensation circuit 30 is configured such that it compensates for the analog quadrature signal when using an analog drive signal and a quadrature compensation value 31, the analog drive signal being provided, in particular, by means of the C / V converter 17 of the drive circuit 10. Thus, the compensation of the analog quadrature signal is performed electrically at the front or input of the detection circuit 20, particularly in front of the C / V converter 27.

[0051] The sensor system also includes a digital processing unit coupled to the analog processing unit. The digital processing unit includes a digital processing circuit 40. In the measurement operation mode of the sensor system, the digital processing circuit 40 is configured such that it compensates for the temperature-dependent quadrature induction zero-rate offset (ZRO) of the digital rotation rate signal 22 when using at least one ZRO compensation value 41 and when using temperature information. Here, the ZRO compensation value 41 is a separate value from the quadrature compensation value 31. Therefore, it is particularly likely that the ZRO compensation value 41 and the quadrature compensation value 31 are not the same value.

[0052] Temperature information is provided by a temperature sensor 60 and via an analog-to-digital converter 61, the temperature sensor being configured to measure the current operating temperature of the sensor system. A filter 50 can also be set to filter the provided data / information. The temperature information is combined with temperature coefficients C1 and C0 and used to compensate for the zero rate offset (ZRO) of the temperature-dependent quadrature induction of the digital rotation rate signal 22.

[0053] In addition to the aforementioned sensor system measurement operation modes, the sensor system is also configured to calculate the orthogonal compensation value 31 and the ZRO compensation value 41. This calculation can be performed at the factory level and / or during the use or application of the sensor system.

[0054] According to one embodiment, the sensor system can be configured for orthogonal fine-tuning, wherein an orthogonal compensation value 31 is obtained during orthogonal fine-tuning. Furthermore, particularly after orthogonal fine-tuning, the sensor system can be configured to perform zero-rate output fine-tuning, wherein a ZRO compensation value 41 is obtained in a fine-tuning separate from the orthogonal fine-tuning using zero-rate output fine-tuning. For example, it is conceivable that during zero-rate output fine-tuning, the analog orthogonal signal is compensated using the orthogonal compensation value 31, and a zero-rate output signal of the digital rotation rate signal is obtained, wherein the ZRO compensation value 41 is obtained based on the zero-rate output signal. The ZRO compensation value 41 can be stored in a memory 42.

[0055] exist Figure 2 A schematic diagram of a sensor system according to an embodiment of the present invention is shown. (Except in...) Figure 1 In addition to the embodiments shown, a control device 45 (PMU) is also shown.

[0056] according to Figure 2 The measurement operation mode of the sensor system is, in principle, corresponding to Figure 1 The measurement operation mode of the implementation shown in the figure. Figure 2 In one possible implementation, the sensor system may be configured to operate in a ZRO fine-tuning mode in addition to the measurement operation mode. Switching between the measurement operation mode and the ZRO fine-tuning mode is possible using the control device 45. In the ZRO fine-tuning mode, the compensation circuit 30 can be selectively deactivated and reactivated using the control device 45. In the ZRO fine-tuning mode, uncompensated digital quadrature signals (especially when the compensation circuit 30 is deactivated) and compensated digital quadrature signals (especially when the compensation circuit 30 is activated) can be obtained. In the ZRO fine-tuning mode, advantageously, the temperature-related quadrature induction offset of the digital rotation rate signal 22 is not compensated.

[0057] Therefore, it is possible, particularly advantageously, to tune the quadrature readout mode in the ZRO fine-tuning mode, in which uncompensated digital quadrature signals are obtained and / or read out, especially when the compensation circuit 30 is disabled or when compensation is not required by the compensation circuit 30.

[0058] Furthermore, the sensor system can be configured to perform orthogonal fine-tuning, wherein an orthogonal compensation value 31 is obtained during orthogonal fine-tuning. The orthogonal compensation value 31 can then be used by the compensation circuit 30 to obtain or read out the compensated digital orthogonal signal. For this purpose, the compensation circuit 30 is activated by means of a control device 45 to compensate for the orthogonal effects on the analog orthogonal signal. This compensated orthogonal signal is digitized and can be read out as a compensated digital orthogonal signal.

[0059] The control device 45 also manipulates the first stage of the detection circuit 20 or the readout circuit, especially the C / V converter 27, to change the gain factor used to detect uncompensated or compensated digital quadrature signals.

[0060] The ZRO compensation value 41 can be determined based on the obtained uncompensated digital quadrature signal and the obtained compensated digital quadrature signal. Circuit devices 42, 43, and 44 are provided for determining and storing the ZRO compensation value 41.

[0061] It is possible that circuit devices 42, 43, and 44 are configured such that the ZRO compensation value 41 is obtained as a scaling difference between the uncompensated and compensated digital quadrature signals. The scaling factor Cqc used for the scaling difference can here have a value other than 1. However, it is also conceivable that the scaling factor Cqc has a value of 1.

[0062] In the illustrated embodiment, circuit devices 42, 43, and 44 include a memory 43 for uncompensated digital quadrature signals and compensated digital quadrature signals (and / or for the difference between the uncompensated and compensated digital quadrature signals), a calculation device or calculator 44 for determining the difference, and a memory 42 for ZRO compensation value 41.

[0063] The determination of the orthogonal compensation value 31 and / or the ZRO compensation value 41 can be performed at the factory, especially during the manufacturing of the sensor system and / or during the use or application of the sensor system.

[0064] exist Figure 3 The diagram shows a schematic illustration of a sensor system according to one embodiment of the present invention. Figure 3 The implementation method is basically corresponding to Figure 2 The implementation shown in [the document / illustration]. However, compared with [the implementation / illustration]... Figure 2 Unlike the implementation shown, the ZRO compensation value 41 is matched using temperature coefficients C0qc and C1qc, taking into account the operating temperature of the sensor system. Matching via coefficients can be performed at first order, but also at higher orders. Therefore, it is conceivable to achieve particularly accurate determination and matching of the ZRO compensation value 41 at different temperatures.

[0065] exist Figure 4 The diagram shows a schematic illustration of a sensor system according to one embodiment of the present invention. Figure 4 The implementation method is basically corresponding to Figure 2 The implementation shown is as described above. (Compared to...) Figure 2 Unlike the embodiment shown, the orthogonal effect on the analog orthogonal signal is compensated by applying a mechanical force to the vibrating element 2, wherein the strength of the force is selected according to the orthogonal compensation value 31. Here, the compensation circuit 30 is coupled to the vibrating element 2 of the gyroscope 1 in such a way that a mechanical force can be applied to the vibrating element 2. Also in this case, not only the orthogonal compensation value 31, but also the ZRO compensation value 41 is used for the sensor system in the measurement operation mode.

Claims

1. A sensor system, comprising: - an analog processing device, comprising: --- a drive circuit (10) configured for generating an analog drive signal for driving a vibrating element (2) of a microelectromechanical gyroscope (1); --- a detection circuit (20) coupled with the drive circuit (10) and the vibrating element (2), wherein the detection circuit (20) is configured such that it generates an analog rate of rotation signal and an analog quadrature signal from signals detected by the gyroscope (1); --- one or more analog-to-digital converters (21, 21') coupled with the detection circuit (20) and configured such that they convert the analog rate of rotation signal and the analog quadrature signal into a digital rate of rotation signal (22) and a digital quadrature signal (23); --- a compensation circuit (30) configured in a measurement operating mode of the sensor system such that the analog-to-digital converters compensate for a quadrature influence on the analog quadrature signal using at least one quadrature compensation value (31); and - a digital processing device coupled with the analog processing device, wherein the digital processing device comprises a digital processing circuit (40), wherein the digital processing circuit (40) is configured in the measurement operating mode of the sensor system such that it compensates for a temperature-dependent quadrature-induced zero-rate offset ZRO of the digital rate of rotation signal (22) using at least one ZRO compensation value (41) and temperature information, characterized in that the sensor system further comprises: a. a control device (45) for switching between the measurement operating mode and a ZRO fine-tuning mode in which the compensation circuit (30) is selectively deactivated and activated again and in which the offset of the temperature-dependent quadrature-induced of the digital rate of rotation signal (22) is not compensated, and b. circuit means (42, 43, 44) for determining the ZRO compensation value (41), wherein the ZRO compensation value (41) is derived based on a comparison between an uncompensated digital quadrature signal detected in the ZRO fine-tuning mode and a compensated digital quadrature signal detected in the ZRO fine-tuning mode.

2. The sensor system of claim 1, wherein, The quadrature compensation value (31) is different from the ZRO compensation value (41).

3. The sensor system according to claim 1 or 2, characterized in that The circuit means (42, 43, 44) are configured such that the ZRO compensation value (41) is derived as a scaled difference between the uncompensated digital quadrature signal and the compensated digital quadrature signal.

2. The sensor system according to claim 1, wherein the circuit means (42, 43, 44) are configured such that the ZRO compensation value (41) is derived as a difference between the uncompensated digital quadrature signal and the compensated digital quadrature signal.

3. The sensor system according to claim 1 or 2, wherein the circuit means (42, 43, 44) are configured such that the ZRO compensation value (41) is derived as a difference between the uncompensated digital quadrature signal and the compensated digital quadrature signal, wherein the difference is scaled by a scaling factor.

4. The sensor system according to any one of claims 1 to 3, wherein the control device (45) is configured to switch from the measurement operating mode to the ZRO fine-tuning mode in response to a detection of a temperature change of the sensor system.

5. The sensor system according to any one of claims 1 to 4, wherein the control device (45) is configured to switch from the ZRO fine-tuning mode to the measurement operating mode in response to a detection of a temperature change of the sensor system.

6. The sensor system according to any one of claims 1 to 5, wherein the control device (45) is configured to switch from the measurement operating mode to the ZRO fine-tuning mode in response to a detection of a temperature change of the sensor system, wherein the temperature change is detected based on a comparison between a temperature-dependent quadrature-induced of the digital rate of rotation signal (22) and a temperature-dependent quadrature-induced of the digital quadrature signal (23).

7. The sensor system according to any one of claims 1 to 6, wherein the control device (45) is configured to switch from the ZRO fine-tuning mode to the measurement operating mode in response to a detection of a temperature change of the sensor system, wherein the temperature change is detected based on a comparison between a temperature-dependent quadrature-induced of the digital rate of rotation signal (22) and a temperature-dependent quadrature-induced of the digital quadrature signal (23).

8. The sensor system according to any one of claims 1 to 7, wherein the control device (45) is configured to switch from the measurement operating mode to the ZRO fine-tuning mode in response to a detection of a temperature change of the sensor system, wherein the temperature change is detected based on a comparison between a temperature-dependent quadrature-induced of the digital rate of rotation signal (22) and a temperature-dependent quadrature-induced of the digital quadrature signal (23), and wherein the control device (45) is configured to switch from the ZRO fine-tuning mode to the measurement operating mode in response to a detection of a temperature change of the sensor system, wherein the temperature change is detected based on a comparison between a temperature-dependent quadrature-induced of the digital rate of rotation signal (22) and a temperature-dependent quadrature-induced of the digital quadrature signal (23).

4. The sensor system according to claim 1 or 2, characterized in that The sensor system comprises a temperature sensor (60) for detecting a current operating temperature, and the digital processing circuit (40) is configured in such a way that the ZRO compensation value (41) is matched by means of one or more temperature coefficients (C1, C0, C0qc, C1qc) taking into account the current operating temperature of the sensor system.

5. The sensor system according to claim 1 or 2, characterized in that The compensation circuit (30) is coupled to the detection circuit (20), wherein the compensation circuit (30) is configured in such a way that the compensation circuit (30) compensates the quadrature influence on the analog quadrature signal using an analog drive signal and the quadrature compensation value (31).

6. The sensor system of claim 1 or 2, wherein The compensation circuit (30) is coupled to the vibrating element (2) of the gyroscope (1), and the compensation circuit (30) is configured in such a way that the quadrature influence on the analog quadrature signal is compensated by exerting a mechanical force on the vibrating element (2), wherein the strength of the force is selected in accordance with the quadrature compensation value (31).

7. A method for operating a sensor system according to any one of claims 1 to 6 in a measurement operating mode, characterized in that compensation of a quadrature influence on an analog quadrature signal and a temperature-dependent quadrature induction of a digital rotation rate signal (22) of a zero rate offset ZRO, wherein the quadrature influence on the analog quadrature signal is compensated using at least one quadrature compensation value (31), and wherein the temperature-dependent quadrature induction of the digital rotation rate signal (22) of a zero rate offset ZRO is compensated using a ZRO compensation value (41) and using temperature information.

8. The method of claim 7, wherein, A current operating temperature of the sensor system is detected, and the ZRO compensation value (41) is matched by means of one or more temperature coefficients (C1, C0, C0qc, C1qc) taking into account the current operating temperature of the sensor system.

9. A method for operating a sensor system according to any one of claims 1 to 6 in a ZRO trimming mode for determining at least one ZRO compensation value (41) for compensating a temperature-dependent quadrature induction of a digital rotation rate signal (22) of a zero rate offset ZRO, characterized in that deactivating the compensation circuit (30) by means of a control device (45) in order to detect and digitize the uncompensated analog quadrature signal, activating the compensation circuit (30) by means of the control device (45) in order to compensate the quadrature influence on the analog quadrature signal, digitizing the compensated quadrature signal, then comparing the uncompensated digital quadrature signal and the compensated digital quadrature signal with one another by means of circuit means (42, 43, 44), and determining the ZRO compensation value (41) on the basis of the comparison.

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