Light-emitting element array

Abstract

[Object] Provided is a light-emitting element array having a wiring structure that enables an increase in the density of light-emitting elements. [Solution] According to the present technology, a light-emitting element array includes: a light-emitting element group, a first wiring, and a second wiring. The light-emitting element group includes a plurality of first light-emitting elements and a plurality of second light-emitting elements arranged in a planar manner to form a light-emitting element surface. The first wiring extends in a direction parallel to the light-emitting element surface, and when viewed from a direction perpendicular to the light-emitting element surface, has an area overlapping with the plurality of first light-emitting elements and an area overlapping with the plurality of second light-emitting elements, is electrically connected to the plurality of first light-emitting elements, and is not electrically connected to the plurality of second light-emitting elements. The second wiring extends in a direction parallel to the light-emitting element surface, and when viewed from a direction perpendicular to the light-emitting element surface, has an area overlapping with the plurality of first light-emitting elements and an area overlapping with the plurality of second light-emitting elements, is electrically connected to the plurality of second light-emitting elements, and is not electrically connected to the plurality of first light-emitting elements.

Description

Technical Field

[0001] The present technology relates to a light emitting element array in which a plurality of light emitting elements are arranged. Background Art

[0002] Light emitting elements such as vertical cavity surface emitting laser (VCSEL) elements are generally used as light emitting element arrays in which a plurality of light emitting elements are arranged. Here, in the light emitting element array, wiring of each light emitting element causes problems depending on the number and density of light emitting elements constituting the array.

[0003] For example, Patent Document 1 discloses an image forming device in which a large number of light-emitting elements arranged in a matrix are connected to anode wiring and cathode wiring, respectively. The anode wiring and cathode wiring are arranged so as to extend in directions orthogonal to each other and intersect with each other, and are configured so that the size of the light-emitting unit can be reduced while the size of the individual light-emitting elements can be increased.

[0004] Furthermore, Patent Document 2 discloses an image forming device in which first and second wirings are connected to each of a large number of light-emitting elements arranged in an n×m matrix. By providing n or more first wirings and n or more second wirings intersecting the first wirings, the wiring resistance and electrostatic capacitance of each wiring can be suppressed.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2001-063139

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 1998-107386. Summary of the Invention

[0009] Technical issues

[0010] However, in the structure described in Patent Document 1, as the spacing between light-emitting elements decreases, the wiring space becomes more limited, making wiring difficult to form. Furthermore, the configuration described in Patent Document 2 suffers from the problem of increased operational delay as the density of light-emitting elements increases. As described above, from the perspective of wiring structure, existing technologies have not yet adequately addressed the increase in light-emitting element density.

[0011] In view of the above circumstances, an object of the present technology is to provide a light emitting element array having a wiring structure that enables an increase in the density of light emitting elements.

[0012] Solution to the problem

[0013] In order to achieve the above-mentioned object, a light emitting element array according to an embodiment of the present technology includes: a light emitting element group; a first wiring; and a second wiring.

[0014] The light emitting element group includes a plurality of first light emitting elements and a plurality of second light emitting elements arranged in a planar manner to form a light emitting element plane.

[0015] The first wiring extends in a direction parallel to the surface of the light-emitting element, and has an area overlapping with the plurality of first light-emitting elements and an area overlapping with the plurality of second light-emitting elements when viewed from a direction perpendicular to the surface of the light-emitting element. The first wiring is electrically connected to the plurality of first light-emitting elements, and is not electrically connected to the plurality of second light-emitting elements.

[0016] The second wiring extends in a direction parallel to the surface of the light-emitting element, and has an area overlapping with the above-mentioned multiple first light-emitting elements and an area overlapping with the above-mentioned multiple second light-emitting elements when viewed from a direction perpendicular to the surface of the light-emitting element. The second wiring is electrically connected to the above-mentioned multiple second light-emitting elements and is not electrically connected to the above-mentioned multiple first light-emitting elements.

[0017] According to this structure, since the first wiring and the second wiring respectively have areas overlapping with the first light-emitting element and the second light-emitting element, and the first wiring is electrically connected only to the first light-emitting element, and the second wiring is electrically connected only to the second light-emitting element, it is possible to increase the density of the first wiring and the second wiring while making the first wiring and the second wiring emit light independently.

[0018] The light emitting element group may include a first light emitting element column in which a plurality of first light emitting elements are arranged and a second light emitting element column in which a plurality of second light emitting elements are arranged.

[0019] The center of the first wiring is separated from the center of the first light emitting element column in a direction parallel to the light emitting element surface, and

[0020] The center of the second wiring may be separated from the center of the second light emitting element column in a direction parallel to the light emitting element surface.

[0021] Alternatively, the light emitting element group may further include a third light emitting element column arranged on the opposite side of the second light emitting element column from the first light emitting element column.

[0022] The first wiring is provided between the center of the first light emitting element column and the center of the second light emitting element column when viewed in a direction perpendicular to the light emitting element surface, and

[0023] The second wiring may be provided between the center of the second light emitting element column and the center of the third light emitting element column when viewed in a direction perpendicular to the light emitting element surface.

[0024] The first light emitting element column, the second light emitting element column, the third light emitting element column, the first wiring, and the second wiring each extend in a first direction parallel to the light emitting element surface and are separated from each other in a second direction parallel to the light emitting element surface and orthogonal to the first direction.

[0025] The width of the first wiring in the second direction may be greater than the interval between the first light emitting element column and the second light emitting element column in the second direction, and

[0026] The width of the second wiring in the second direction may be greater than the interval between the second light emitting element column and the third light emitting element column in the second direction.

[0027] The first wiring and the second wiring may be formed in the same layer.

[0028] The first wiring may be stacked on the plurality of first light-emitting elements and the plurality of second light-emitting elements via an insulating layer, electrically connected to the plurality of first light-emitting elements via a first through hole provided in the insulating layer on the plurality of first light-emitting elements, and insulated from the plurality of second light-emitting elements by the insulating layer on the plurality of second light-emitting elements, and

[0029] Alternatively, the second wiring is stacked on the multiple first light-emitting elements and the above-mentioned multiple second light-emitting elements via an insulating layer, is electrically connected to the multiple second light-emitting elements via a second through hole provided in the insulating layer on the multiple second light-emitting elements, and is insulated from the multiple first light-emitting elements by the insulating layer on the multiple first light-emitting elements.

[0030] The plurality of first light emitting elements may all be vertical cavity surface emitting laser elements including a first light emitting surface and a first electrode arranged around the first light emitting surface.

[0031] Each of the plurality of second light emitting elements may be a vertical cavity surface emitting laser element and include a second light exit surface and a second electrode disposed around the second light exit surface,

[0032] The first wiring may be adjacent to the first electrode via the first through hole in the plurality of first light emitting elements, and

[0033] The second wiring may be adjacent to the second electrode via the second through hole in the plurality of second light emitting elements.

[0034] The plurality of first light emitting elements and the plurality of second light emitting elements may each have a mesa structure surrounded by a recess;

[0035] The light emitting element group may include: a first groove portion connecting the recesses between the plurality of first light emitting elements; and a second groove portion connecting the recesses between the plurality of second light emitting elements.

[0036] The first wiring has a portion formed in the first groove portion, and

[0037] The second wiring may have a portion formed in the second groove portion.

[0038] The light-emitting elements constituting the light-emitting element group may include a plurality of third light-emitting elements and a plurality of fourth light-emitting elements, each of the plurality of third light-emitting elements and the plurality of fourth light-emitting elements having a mesa structure surrounded by a recessed portion, the recessed portion being separated from a light-emitting element surface and having a bottom surface parallel to the light-emitting element surface, and an element separation groove being provided in the bottom surface for electrically separating the plurality of third light-emitting elements and the plurality of fourth light-emitting elements from each other;

[0039] The light emitting element array may further include:

[0040] a third wiring extending in a direction parallel to the bottom surface, having a region on the bottom surface between the element separation trench and the third light-emitting element and a region on the bottom surface between the element separation trench and the fourth light-emitting element as viewed in a direction perpendicular to the bottom surface, overlapping the element separation trench, electrically connected to the third light-emitting element, and not electrically connected to the fourth light-emitting element; and

[0041] The fourth wiring extends in a direction parallel to the bottom surface, and when viewed from a direction perpendicular to the bottom surface, has an area on the bottom surface located between the element separation groove and the third light-emitting element, and an area on the bottom surface located between the element separation groove and the fourth light-emitting element, overlaps with the element separation groove, is electrically connected to the fourth light-emitting element, and is not electrically connected to the third light-emitting element.

[0042] The light emitting element group may include a first light emitting element column including a plurality of first light emitting elements, a second light emitting element column including a plurality of second light emitting elements, a third light emitting element column including a plurality of third light emitting elements, and a fourth light emitting element column including a plurality of fourth light emitting elements.

[0043] The first light emitting element column, the second light emitting element column, the first wiring, and the second wiring each extend in a first direction parallel to the light emitting element surface, and

[0044] The third light emitting element column, the fourth light emitting element column, the third wiring, and the fourth wiring each extend in a second direction parallel to the light emitting element surface and orthogonal to the first direction.

[0045] The first light emitting element column, the second light emitting element column, the first wiring, and the second wiring each extend in a first direction parallel to the light emitting element surface, and

[0046] The third light emitting element column, the fourth light emitting element column, the third wiring, and the fourth wiring each extend in the first direction.

[0047] The third wiring may be stacked on the bottom surface and the element separation groove via an insulating layer, and electrically connected to the plurality of third light-emitting elements via a first opening provided in the insulating layer in a region between the element separation groove and the third light-emitting element in the bottom surface, and insulated from the plurality of fourth light-emitting elements via the insulating layer in a region between the element separation groove and the fourth light-emitting element in the bottom surface, and

[0048] Alternatively, the fourth wiring is stacked on the bottom surface and the element separation groove via an insulating layer, and is electrically connected to the plurality of fourth light-emitting elements via a second opening provided in the insulating layer in an area on the bottom surface between the element separation groove and the above-mentioned fourth light-emitting element, and is insulated from the plurality of third light-emitting elements by the insulating layer in an area on the bottom surface between the element separation groove and the third light-emitting element.

[0049] The width of the third wiring from the element separation groove to the side surface of the third light-emitting element may be greater than the width from the element separation groove to the side surface of the fourth light-emitting element, and

[0050] The width of the fourth wiring from the element isolation trench to the side surface of the fourth light-emitting element may be greater than the width from the element isolation trench to the side surface of the third light-emitting element.

[0051] In order to achieve the above-mentioned object, a light emitting element array according to an embodiment of the present technology includes: a light emitting element group; a first wiring; and a second wiring.

[0052] The light-emitting element group is a light-emitting element group in which a plurality of first light-emitting elements and a plurality of second light-emitting elements are arranged in a planar manner to form a light-emitting element surface. The plurality of first light-emitting elements and the plurality of second light-emitting elements have a mesa structure surrounded by a recessed portion, the recessed portion is separated from the light-emitting element surface and has a bottom surface parallel to the light-emitting element surface. An element isolation groove is provided on the bottom surface for electrically isolating the plurality of first light-emitting elements and the plurality of second light-emitting elements from each other.

[0053] The first wiring extends in a direction parallel to the above-mentioned bottom surface, and has an area in the bottom surface between the element separation groove and the above-mentioned first light-emitting element and an area in the bottom surface between the element separation groove and the second light-emitting element when viewed from a direction perpendicular to the bottom surface. It overlaps with the element separation groove, is electrically connected to the first light-emitting element, and is not electrically connected to the above-mentioned second light-emitting element.

[0054] The second wiring extends in a direction parallel to the bottom surface, and when viewed from a direction perpendicular to the bottom surface, has an area on the bottom surface between the element separation groove and the first light-emitting element and an area on the bottom surface between the element separation groove and the second light-emitting element, overlaps with the above-mentioned element separation groove, is electrically connected to the second light-emitting element, and is not electrically connected to the first light-emitting element. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 It is a plan view of a light emitting element array according to an embodiment of the present technology.

[0056] Figure 2 It is an enlarged plan view of the light emitting element array.

[0057] Figure 3 is a cross-sectional view of a light emitting element array.

[0058] Figure 4 is a cross-sectional view of a light emitting element array.

[0059] Figure 5 It is a plan view of a partial configuration of a light emitting element array.

[0060] Figure 6 It is a cross-sectional view showing a partial configuration of a light emitting element array.

[0061] Figure 7 It is a plan view of light-emitting elements constituting the light-emitting element array.

[0062] Figure 8 is a cross-sectional view of a light-emitting element constituting a light-emitting element array.

[0063] Figure 9 is a cross-sectional view showing an insulating layer included in a light emitting element array.

[0064] Figure 10 is a plan view showing an insulating layer included in a light emitting element array.

[0065] Figure 11 is a cross-sectional view showing an insulating layer included in a light emitting element array.

[0066] Figure 12 is a plan view showing an insulating layer included in a light emitting element array.

[0067] Figure 13 1 is a cross-sectional view illustrating a connection relationship between a first light emitting element, a first wiring, and a second wiring in a light emitting element array.

[0068] Figure 14 2 is a cross-sectional view illustrating a connection relationship among a second light emitting element, a first wiring, and a second wiring in a light emitting element array.

[0069] Figure 15 is a plan view showing a light emitting element column in a light emitting element array.

[0070] Figure 16 It is a plan view showing the positional relationship among the light emitting element columns, the first wiring, and the second wiring in the light emitting element array.

[0071] Figure 17It is a plan view showing the positional relationship among the first to third light emitting element columns, the first wiring, and the second wiring in the light emitting element array.

[0072] Figure 18 It is a plan view showing the widths of the first wiring and the second wiring in the light emitting element array.

[0073] Figure 19 is a plan view of a light emitting element array according to a comparative example.

[0074] Figure 20 is a cross-sectional view of a light emitting element array according to a comparative example.

[0075] Figure 21 It is a plan view of a light emitting element array provided with a groove portion according to an embodiment of the present technology.

[0076] Figure 22 It is an enlarged plan view of the light emitting element array.

[0077] Figure 23 is a cross-sectional view of a light emitting element array.

[0078] Figure 24 It is a plan view of a partial configuration of a light emitting element array.

[0079] Figure 25 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0080] Figure 26 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0081] Figure 27 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0082] Figure 28 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0083] Figure 29 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0084] Figure 30 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0085] Figure 31 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0086] Figure 32 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0087] Figure 33 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0088] Figure 34 This is a plan view of light-emitting elements constituting a light-emitting element array according to a modification of the present technology.

[0089] Figure 35 This is a cross-sectional view of a light emitting element array according to a modified example of the present technology.

[0090] Figure 36 It is a plan view of a light emitting element array according to a modification example of the present technology.

[0091] Figure 37 is a plan view of a light emitting element array according to a modified example of the present technology.

[0092] Figure 38 is a plan view of a light emitting element array including a third light emitting element and a fourth light emitting element according to an embodiment of the present technology.

[0093] Figure 39 Schematic diagram showing light emitting element columns of a light emitting element array.

[0094] Figure 40 1 is a plan view of a light emitting element array showing third and fourth wirings.

[0095] Figure 41 is an enlarged plan view of the light emitting element array showing the third wiring and the fourth wiring.

[0096] Figure 42 : is a cross-sectional view of a light emitting element array showing a third wiring and a fourth wiring.

[0097] Figure 43 1 is a plan view of a light emitting element array showing third and fourth wirings.

[0098] Figure 44 is an enlarged plan view of the light emitting element array showing the third wiring and the fourth wiring.

[0099] Figure 45 : is a cross-sectional view of a light emitting element array showing a third wiring and a fourth wiring.

[0100] Figure 46 It is a plan view of the light emitting element array showing the bottom surface of the recess.

[0101] Figure 47 It is a cross-sectional view of the light emitting element array showing the bottom surface of the recess.

[0102] Figure 481 is a plan view of a light emitting element array showing openings in an insulating layer.

[0103] Figure 49 1 is a cross-sectional view of a light emitting element array showing an opening in an insulating layer.

[0104] Figure 50 1 is a plan view of a light emitting element array showing third and fourth wirings.

[0105] Figure 51 is an enlarged plan view of the light emitting element array showing the third wiring and the fourth wiring.

[0106] Figure 52 is an enlarged plan view of the light emitting element array showing the third wiring and the fourth wiring.

[0107] Figure 53 Schematic diagram showing light emitting element columns of a light emitting element array. DETAILED DESCRIPTION

[0108] A light emitting element array according to an embodiment of the present technology will be described.

[0109] [Structure of Light Emitting Element Array]

[0110] Figure 1 is a plan view of a light emitting element array 100 according to this embodiment. Figure 2 yes Figure 1 Magnified image of . Figure 3 and Figure 4 Each is a cross-sectional view of the light emitting element array 100 . Figure 3 It is along Figure 2 A cross-sectional view taken along line AA in FIG. Figure 4 It is along Figure 2 As shown in the figure, the light emitting element array 100 includes a first light emitting element 121 , a second light emitting element 122 , a first wiring 131 , and a second wiring 132 .

[0111] Figure 5 1 is a plan view of the light emitting element array 100 , in which illustration of the first wiring 131 and the second wiring 132 is omitted. Figure 6 is a cross-sectional view of the light emitting element array 100 and is taken along Figure 5 Cross-sectional view taken along line CC in FIG.

[0112] like Figure 5 As shown, the light emitting element array 100 includes a light emitting element group configured by arranging a plurality of first light emitting elements 121 and a plurality of second light emitting elements 122 in a planar manner. Figure 6As shown, the surface on which the first light-emitting element 121 and the second light-emitting element 122 are arranged is referred to as the light-emitting element surface 120. The direction parallel to the light-emitting element surface 120 is referred to as the X-direction, and the direction parallel to the light-emitting element surface 120 and perpendicular to the X-direction is referred to as the Y-direction. In other words, the light-emitting element surface 120 is parallel to the XY plane. Furthermore, the direction perpendicular to the light-emitting element surface 120 is referred to as the Z-direction. The number of first light-emitting elements 121 and second light-emitting elements 122 is not particularly limited and can range from tens to thousands, for example.

[0113] The first light emitting element 121 and the second light emitting element 122 may be light emitting elements having the same configuration. Figure 7 is a plan view of a light-emitting element 150 that can constitute the first light-emitting element 121 and the second light-emitting element 122. Figure 8 is a cross-sectional view of the light emitting element 150 .

[0114] The light emitting element 150 is a vertical cavity surface emitting laser (VCSEL) element. Figure 7 and Figure 8 As shown, the light emitting element 150 has a mesa structure in which a mesa (terrace shape) 153 is formed by being surrounded by an annular recess 152 provided on a substrate 151 .

[0115] like Figure 8 As shown, the light emitting element 150 includes an n-type DBR layer 154, an active layer 155, a current confinement layer 156, a p-type DBR layer 157, a p-electrode 158, and an n-electrode 159. The n-type DBR layer 154, the active layer 155, the current confinement layer 156, and the p-type DBR layer 157 are stacked in this order on the substrate 151.

[0116] The n-type DBR layer 154 is formed of an n-type semiconductor material and functions as a distributed Bragg reflector (DBR), reflecting light having a specific wavelength (hereinafter, wavelength λ). The n-type DBR layer 154, together with the p-type DBR layer 157, constitutes an optical resonator for laser oscillation. The active layer 155 is disposed between the n-type DBR layer 154 and the p-type DBR layer 157 and emits and amplifies spontaneously emitted light. The active layer 155 may include a plurality of layers formed by alternating stacks of quantum well layers and barrier layers.

[0117] The current confinement layer 156 is provided near the active layer 155 and exerts a current confinement effect. The current confinement layer 156 includes a non-oxidized region 156a and an oxidized region 156b. The non-oxidized region 156a is provided in the center of the current confinement layer 156, and the oxidized region 156b is provided around the non-oxidized region 156a. The oxidized region 156b can be formed by performing an oxidation process from the outer peripheral side of the mesa 153 through the recess 152.

[0118] The p-type DBR layer 157 is formed of a p-type semiconductor material, functions as a DBR, and reflects light having a wavelength λ. The p-type DBR layer 157 constitutes an optical resonator for laser oscillation together with the n-type DBR layer 154. The p-electrode 158 is provided on the surface of the mesa 153 and is electrically connected to the p-type DBR layer 157. Figure 7 As shown, the p-electrode 158 is annular. The n-electrode 159 is provided on the surface of the substrate 151 opposite to the light emitting element 150 and is electrically connected to the n-type DBR layer 154 via the substrate 151 .

[0119] The light emitting element 150 has the above-described structure. In the light emitting element 150, when a voltage is applied between the p-electrode 158 and the n-electrode 159, current flows between the p-electrode 158 and the n-electrode 159. The current is confined by the current confinement layer 156 and is injected into the active layer 155 near the non-oxidized region 156a.

[0120] This injected current causes spontaneous emission light in the active layer 155, and the spontaneous emission light is reflected by the n-type DBR layer 154 and the p-type DBR layer 157. In the spontaneous emission light, a component of the oscillation wavelength λ forms a standing wave between the n-type DBR layer 154 and the p-type DBR layer 157, and is amplified by the active layer 155. When the injected current exceeds a threshold value, the light forming the standing wave undergoes laser oscillation, and the laser beam passes through the p-type DBR layer 157 and is emitted. Figure 7 and Figure 8 , the surface from which the laser beam is emitted is shown as a light emitting surface S. The P electrode 158 is provided around the light emitting surface S.

[0121] Note that the configuration of the light-emitting element 150 is not limited to the configuration shown here. For example, the n-type and p-type in the light-emitting element 150 may be reversed. In addition, although the above configuration shows the configuration of a surface-emitting VCSEL element, the light-emitting element 150 may be a back-emitting VCSEL. In addition, the light-emitting element 150 is not limited to a VCSEL and may be a light-emitting element formed of a semiconductor such as an LED (light-emitting diode).

[0122] like Figure 5 As shown, the light emitting element array 100 may be a light emitting element array in which first light emitting elements 121 and second light emitting elements 122 each having a configuration of a light emitting element 150 are arranged. Figure 5 As shown, in the first light emitting element 121 and the second light emitting element 122 , the sizes of the mesas 153 may be different or the same.

[0123] The first light emitting element 121 and the second light emitting element 122 have the configuration as described above. Here, the first light emitting element 121 and the second light emitting element 122 are configured to be able to emit light independently of each other. Specifically, as Figure 8 As shown, the n-electrode 159 is uniformly formed on the back surface of the substrate 151 and is a common electrode between the first light emitting element 121 and the second light emitting element 122 .

[0124] At the same time, the p-electrode 158 is provided on each mesa 153 and is an independent electrode for each of the first light-emitting element 121 and the second light-emitting element 122. Therefore, by applying a voltage between the p-electrode 158 and the n-electrode 159 provided on the first light-emitting element 121, the first light-emitting element 121 can emit light. By applying a voltage between the p-electrode 158 and the n-electrode 159 provided on the second light-emitting element 122, the second light-emitting element 122 can emit light. Figure 8 In other figures, the layer structure of the light-emitting element 150 is omitted, and only the p-electrode 158 is shown.

[0125] Furthermore, in the light emitting element array 100 , the insulating layer 161 is provided on the light emitting element surface 120 . Figure 9 is a cross-sectional view showing the insulating layer 161 on the first light emitting element 121, and Figure 10 1 and 2 are plan views of the insulating layer 161 on the first light-emitting element 121. As shown in these figures, a first through hole 161a is provided in the insulating layer 161 on the first light-emitting element 121. The first through hole 161a penetrates the insulating layer 161 to expose a portion of the p-electrode 158 of the first light-emitting element 121.

[0126] Figure 11 is a cross-sectional view showing the insulating layer 161 on the second light emitting element 122, and Figure 12 This is a plan view of the insulating layer 161 on the second light emitting element 122. As shown in the figure, a second through hole 161b is opened in the insulating layer 161 on the second light emitting element 122. The second through hole 161b penetrates the insulating layer 161, exposing a portion of the P electrode 158 of the second light emitting element 122. Figure 1 、 Figure 2 and Figure 5 In the figure, the insulating layer 161 is omitted.

[0127] like Figure 3 and Figure 4 As shown, the first wiring 131 and the second wiring 132 are both formed of a conductive material such as Au and are formed in the same layer. Figures 1 to 4As shown, the first wiring 131 and the second wiring 132 extend parallel to the light-emitting element surface (XY plane) 120 and are separated from each other. When viewed in a direction perpendicular to the light-emitting element surface 120 (Z direction), the first wiring 131 and the second wiring 132 have regions that overlap with the first light-emitting element 121 and the second light-emitting element 122.

[0128] exist Figures 2 to 4 In the figure, the region where the first wiring 131 and the second wiring 132 overlap with the first light-emitting element 121 is represented as region R1, and the region where the first wiring 131 and the second wiring 132 overlap with the second light-emitting element 122 is represented as region R2. As shown in these figures, both the first wiring 131 and the second wiring 132 have regions R1 and R2. Regions R1 and R2 are formed on the outer periphery of the p-electrode 158 so as not to shield the light emitting surface S (see FIG. 1 ). Figure 8 ). Alternatively, the regions R1 and R2 may be formed closer to the inner circumference than the p-electrode 158 as long as they do not block the light exit surface S. Furthermore, when increasing the width of the first wiring 131 and the second wiring 132 is prioritized, the regions R1 and R2 may be formed so as to partially block the light exit surface S.

[0129] The first wiring 131 is electrically connected to the first light-emitting element 121 , and the second wiring 132 is electrically connected to the second light-emitting element 122 . Figure 13 16 is a cross-sectional view showing the connection relationship between the first light-emitting element 121 and the first and second wirings 131 and 132. As shown in the figure, the first wiring 131 is in contact with the p-electrode 158 of the first light-emitting element 121 via the first through-hole 161a and is electrically connected to the p-electrode 158 of the first light-emitting element 121.

[0130] On the other hand, the second wiring 132 is insulated from the p-electrode 158 of the first light-emitting element 121 by the insulating layer 161 provided between the second wiring 132 and the p-electrode 158 of the first light-emitting element 121. Similarly, the other first light-emitting elements 121 constituting the light-emitting element array 100 are also electrically connected to the first wiring 131 and insulated from the second wiring 132.

[0131] Figure 14This is a cross-sectional view illustrating the connection relationship between the second light-emitting element 122, the first wiring 131, and the second wiring 132. As shown in this figure, the second wiring 132 contacts the p-electrode 158 of the second light-emitting element 122 via the second through-hole 161b and is electrically connected to the p-electrode 158 of the second light-emitting element 122. Meanwhile, the first wiring 131 is insulated from the p-electrode 158 of the second light-emitting element 122 by the insulating layer 161 provided between the first wiring 131 and the p-electrode 158 of the second light-emitting element 122. Similarly, the other second light-emitting elements 122 constituting the light-emitting element array 100 are also electrically connected to the second wiring 132 and insulated from the first wiring 131.

[0132] [Regarding the Arrangement of the Light-Emitting Element Array and Wiring]

[0133] An array of the first light emitting elements 121 and the second light emitting elements 122 in the light emitting element array 100 will be described. Figure 15 1 is a schematic diagram showing an array of first light emitting elements 121 and second light emitting elements 122 .

[0134] As shown in the figure, first light-emitting elements 121 are arranged along a direction (the Y direction) on light-emitting element surface 120 to form a plurality of light-emitting element columns L1. Furthermore, second light-emitting elements 122 are arranged along a direction (the Y direction) parallel to light-emitting element columns L1 on light-emitting element surface 120 to form a plurality of light-emitting element columns L2. Light-emitting element columns L1 and light-emitting element columns L2 are arranged alternately and separated from each other in a direction (the X direction) perpendicular to the extending direction (the Y direction). A line connecting the centers of the first light-emitting elements 121 is denoted as center C1 of light-emitting element column L1, and a line connecting the centers of the second light-emitting elements 122 is denoted as center C2 of light-emitting element column L2.

[0135] Figure 16 and Figure 17 Each is a schematic diagram showing the arrangement of the first wiring 131 and the second wiring 132. Figure 16 As shown, when viewed from a direction perpendicular to the light-emitting element surface 120 (Z direction), the first wiring 131 and the second wiring 132 are alternately arranged between the center C1 of the light-emitting element column L1 and the center C2 of the light-emitting element column L2, extending along the extension direction (Y direction) of the light-emitting element column L1 and the light-emitting element column L2, and are separated from each other in a direction orthogonal to the extension direction (X direction).

[0136] More specifically, if Figure 17As shown, one of the light-emitting element columns L1 is defined as a first light-emitting element column L1a, and the light-emitting element column L2 adjacent to the first light-emitting element column L1a is defined as a second light-emitting element column L2b. Furthermore, the light-emitting element column L1 located on the opposite side of the first light-emitting element column L1a relative to the second light-emitting element column L2b is defined as a third light-emitting element column L1c.

[0137] In this case, the first wiring 131 is provided between the center C1 of the first light-emitting element column L1a and the center C2 of the second light-emitting element column L2b when viewed in the Z direction, and the second wiring 132 is provided between the center C2 of the second light-emitting element column L2b and the center C1 of the third light-emitting element column L1c when viewed in the Z direction. Furthermore, the other first wirings 131 and the other second wirings 132 are arranged in a similar positional relationship with respect to the light-emitting element columns L1 and L2.

[0138] In addition, if Figure 16 As shown, the center of the first wiring 131 is defined as center P1, and the center of the second wiring 132 is defined as center P2. Center P1 is offset in the X direction relative to center C1 and separated from center C1 as indicated by arrow A1. Center P2 is offset in the X direction relative to center C2 and separated from center C2 as indicated by arrow A2.

[0139] By arranging the first wiring 131 and the second wiring 132 in this manner, the widths of the first wiring 131 and the second wiring 132 can be increased. Figure 18 13 is a schematic diagram showing the widths of the first wiring 131 and the second wiring 132. As shown in the figure, the minimum width of the first wiring 131 in the X direction is defined as width W1, and the minimum width of the second wiring 132 in the X direction is defined as width W2.

[0140] Furthermore, the interval in the X direction between the first light-emitting element column L1a and the second light-emitting element column L2b is set to D1, and the interval in the X direction between the second light-emitting element column L2b and the third light-emitting element column L1c is set to D2. In this case, the width W1 can be larger than the interval D1, and the width W2 can be larger than the interval D2. This can be achieved by overlapping the first wiring 131 and the second wiring 132 with the first light-emitting element 121 and the second light-emitting element 122 (that is, by forming the region R1 and the region R2 (see FIG. Figure 2 )) to achieve it.

[0141] [Effects of the Light-Emitting Element Array]

[0142] Effects of the light emitting element array 100 will be described in comparison with the comparative example. Figure 19 is a plan view of a light emitting element array 300 according to a comparative example, and Figure 20is a cross-sectional view of the light emitting element array 300 . Figure 20 It is along Figure 19 A cross-sectional view taken along line DD in FIG.

[0143] As shown in these figures, the light-emitting element array 300 includes a first light-emitting element 321, a second light-emitting element 322, a first wiring 331, and a second wiring 332. The first light-emitting elements 321 and the second light-emitting elements 322 are arranged in a planar manner to form a light-emitting element plane 320. The first light-emitting elements 321 and the second light-emitting elements 322 are each arranged along one direction (the Y direction) on the light-emitting element plane 320 to form a plurality of light-emitting element columns.

[0144] like Figure 20 As shown, the first wiring 331 and the second wiring 332 are formed on the light emitting element surface 320 via the insulating layer 361. Figure 19 As shown, the first wiring 331 extends on the column of the first light emitting element 321 and is electrically connected to the p-electrode 358 of the first light emitting element 321, as shown in FIG. Figure 20 Therefore, the first light emitting element 321 emits light by the driving current supplied from the first wiring 331. The first wiring 331 is provided on the periphery of the first light emitting element 321 so as not to shield the light emitting surface S on the first light emitting element 321.

[0145] like Figure 19 As shown, similar to the first wiring 331, the second wiring 332 extends over the column of the second light-emitting elements 322 and is electrically connected to the p-electrode 358 of the second light-emitting element 322. Thus, the second light-emitting element 322 emits light by the drive current supplied from the second wiring 332. The second wiring 332 is provided around the second light-emitting element 322 so as not to shield the light emitting surface S of the second light-emitting element 322.

[0146] In this structure of the light-emitting element array 300, since the first and second wirings 331 and 332 do not block the light-emitting surface S and the spacing between adjacent wirings must be maintained to prevent short circuits, increasing the wiring width is difficult. Consequently, as the number of light-emitting elements in the array increases or the density of light-emitting elements increases, the influence of wiring resistance increases, leading to a decrease in light emission on the downstream side of the wiring. Furthermore, increasing the wiring thickness is also difficult from a production process perspective.

[0147] By providing a multilayer structure of the first wiring 331 and the second wiring 332 via an insulating layer, rather than forming these layers in the same layer, the width of the wiring can be increased, but the manufacturing process is complicated. In addition, when providing a multilayer structure, there is a problem of changes in light-emitting performance due to the increase in the thickness of the insulating layer on the light-emitting element.

[0148] Meanwhile, in the light emitting element array 100, the first wiring 131 and the second wiring 132 are arranged to overlap with the first light emitting element 121 and the second light emitting element 122 (see FIG. Figure 2 As a result, the first wiring 131 and the second wiring 132 can be formed in the same layer while increasing the width of the wiring, thereby reducing the wiring resistance of the first wiring 131 and the second wiring 132.

[0149] Furthermore, by making the widths of the first wiring 131 and the second wiring 132 the same as those in the comparative example, the light-emitting element and the wiring can be brought closer together and their density can be improved. Furthermore, since the first wiring 131 and the second wiring 132 are in the same layer, the manufacturing process is not complicated and the influence on the light-emitting characteristics can be suppressed.

[0150] [About slot structure]

[0151] In addition to the above configuration, the light emitting element array 100 may include groove portions for the first wiring 131 and the second wiring 132 . Figure 21 is a plan view of the light emitting element array 100 including the groove portion, Figure 22 yes Figure 21 Magnified image of . Figure 23 is a cross-sectional view of the light emitting element array 100, taken along Figure 22 A cross-sectional view taken along line E1 to E4 in FIG.

[0152] Figure 24 1 is a plan view of the light emitting element array 100, wherein the first wiring 131 and the second wiring 132 are omitted. As shown in the figure, a recess 152 (see FIG. 152 ) for connecting the first light emitting element 121 is provided in the substrate 151. Figure 8 ) between the first groove portion 171 and the concave portion 152 connecting the second light emitting element 122 (see Figure 8 ) between the second groove portion 172. Figure 24 As shown, the first groove portion 171 may also be connected to the recess 152 of the second light emitting element 122 and does not necessarily need to be connected to the first groove portion 171. In addition, the second groove portion 172 may be connected to the recess 152 of the first light emitting element 121 and does not necessarily need to be connected to the recess 152 of the first light emitting element 121.

[0153] like Figure 23 As shown, the first wiring 131 is formed continuously from the concave portion 152 of the first light-emitting element 121 in the first groove portion 171 and is continuous with the concave portion 152 of the adjacent first light-emitting element. Similarly, the second wiring 132 is also formed continuously from the concave portion 152 of the second light-emitting element 122 in the second groove portion 172 and is continuous with the concave portion 152 of the adjacent second light-emitting element.

[0154] As a result, the thickness of each of the first wiring 131 and the second wiring 132 increases compared to the case where the first groove portion 171 and the second groove portion 172 are not provided, and wiring resistance can be further suppressed and the density of light emitting elements and wiring can be increased.

[0155] [Modification]

[0156] As described above, the p-electrode 158 is annular (see Figure 7 ), but can also be other shapes. Figures 25 to 31 Schematic diagram showing other shapes of the p-electrode 158. Figure 25 As shown, when viewed from a direction perpendicular to the light emitting element surface 120 (Z direction), the p-electrode 158 may have a rectangular ring shape, or may have a rectangular ring shape. Figure 26 As shown in FIG, the p-electrode 158 may have a hexagonal ring shape when viewed from the Z direction. Alternatively, the p-electrode 158 may have a polygonal shape or other ring shape when viewed from the Z direction.

[0157] In addition, if Figure 27 As shown in FIG. 1 , the p-electrode 158 may have a C-shape or various annular shapes with a portion thereof missing when viewed from a direction (Z direction) perpendicular to the light emitting element surface 120. Figure 28 As shown, the p-electrode 158 may have a pair of arc shapes facing each other when viewed from the Z direction, or as shown in FIG. Figure 29 As shown, it may have a pair of straight line shapes facing each other when viewed from the Z direction.

[0158] In addition, if Figure 30 As shown, the p-electrode 158 may also be in the shape of an arc when viewed from the Z direction, or may be in the shape of a circle. Figure 31 As shown in the figure, it is a straight line when viewed from the Z direction. Figure 30 and Figure 31 In the case of the shape shown in FIG. 1 , the p-electrode 158 is provided so as to be aligned with the first wiring 131 or the second wiring 132 to be connected when viewed from the Z direction (see FIG. 1 ). Figure 3 and Figure 4 ) overlap. In addition, the p-electrode 158 can also have various shapes.

[0159] Furthermore, although it has been described that the light emitting element 150 includes the mesa 153 having a cylindrical shape (see FIG. Figure 7 ), but the shape of the mesa 153 is not limited to the cylindrical shape. Figures 32 to 34 They are schematic diagrams showing other shapes of the table 153 .

[0160] The table 153 may have Figure 32 The hexagonal shape shown, or may have a shape as Figure 33 In addition, the table 153 may have an octagonal prism shape as shown. Figure 34 Furthermore, the mesa 153 may have a polygonal prism shape including a pentagonal prism shape and a heptagonal prism shape, or other columnar shapes.

[0161] Furthermore, although it has been described that the first wiring 131 and the second wiring 132 are formed in the concave portion 152 together with the insulating layer 161 (see FIG. Figure 13 ), but the present technology is not limited thereto. Figure 35 152 is a schematic diagram illustrating another configuration in recess 152. As shown in the figure, embedding material 162 can be embedded in recess 152 and covered with insulating film 163. First wiring 131 and second wiring 132 can be formed on insulating film 163. Furthermore, when embedding material 162 is formed of an insulating material, insulating film 163 is not required.

[0162] In addition, when the embedded material 162 is formed of a metal material, the embedded material 162 can be used as the first wiring 131 or the second wiring 132 without providing the insulating film 163. However, in this case, the embedded material 162 can be used as only one of the first wiring 131 and the second wiring 132, and the other wiring needs to be provided on the insulating film 163.

[0163] Furthermore, although the first wirings 131 and the second wirings 132 have been described as being arranged alternately (see Figure 1 ), but the present technology is not limited thereto. Figure 36 and Figure 37 Each is a schematic diagram showing another configuration of the first wiring 131 and the second wiring 132. The first wiring 131 and the second wiring 132 can be arranged as shown in these figures. Figure 36 and Figure 37 As shown, when multiple first wirings 131 are adjacent to each other, the adjacent multiple first wirings 131 can be used as one first wiring 131. Similarly, when multiple second wirings 132 are adjacent to each other, the adjacent multiple second wirings 132 can be used as one second wiring 132.

[0164] Furthermore, although the light emitting element columns L1 and L2 have been described as linear columns extending in the Y direction, the present technology is not limited thereto. The light emitting element columns L1 and L2 may extend in a curved shape, a spiral shape, a comb-tooth shape, or the like. Furthermore, in this case, the first wiring 131 and the second wiring 132 each have regions R1 and R2 overlapping with the first light emitting element 121 and the second light emitting element 122 (see FIG. 1 ). Figure 2 ) and enables an increase in the density of light-emitting elements and wiring.

[0165] [Examples of Use of Light-Emitting Element Arrays]

[0166] The light emitting element array 100 can be used for a distance measuring light source device or the like capable of emitting short-distance light and long-distance light, because the first light emitting element 121 and the second light emitting element 122 can be caused to emit light independently as described above.

[0167] [Regarding the Third Light-Emitting Element and the Fourth Light-Emitting Element]

[0168] As described above, the light emitting element group constituting the light emitting element array 100 includes the first light emitting element 121 and the second light emitting element 122. In addition, the light emitting element group constituting the light emitting element array 100 may include the third light emitting element 123 and the fourth light emitting element 124. Figure 38 12 is a plan view of the light emitting element array 100 including the third light emitting element 123 and the fourth light emitting element 124 .

[0169] As shown in the figure, the third light-emitting elements 123 are arranged along one direction on the light-emitting element surface 120 to form a plurality of light-emitting element columns L3. Furthermore, the fourth light-emitting elements 124 are arranged along a direction parallel to the light-emitting element columns L3 on the light-emitting element surface 120 to form a plurality of light-emitting element columns L4. The light-emitting element columns L3 and the light-emitting element columns L4 are arranged alternately and are separated from each other in a direction orthogonal to the extension direction.

[0170] Figure 39 Schematic diagram showing the relationship between the light emitting element column L1 and the light emitting element column L2, and between the light emitting element column L3 and the light emitting element column L4. Figure 39 As shown, light-emitting element columns L3 and L4 extend in a direction (X direction) perpendicular to the direction (Y direction) in which light-emitting element columns L1 and L2 extend. Therefore, third light-emitting element 123 includes a portion of first light-emitting element 121 and a portion of second light-emitting element 122, and fourth light-emitting element 124 includes another portion of first light-emitting element 121 and another portion of second light-emitting element 122.

[0171] The first light emitting element 121 and the second light emitting element 122 are connected to the p-side of each light emitting element 150 as described above (see FIG. Figure 8 ) is defined by whether the wiring connected to the n-side of the light-emitting element 150 is the first wiring 131 or the second wiring 132. On the other hand, as described later, the third light-emitting element 123 and the fourth light-emitting element 124 are defined by the wiring connected to the n-side of the light-emitting element 150. The wiring structure on the n-side will be described below.

[0172] [Wiring structure 1 on the n-side]

[0173] In the above description, an n-electrode 159 is provided on the surface of the substrate 151 opposite to the light emitting element 150 (see FIG. Figure 8), the n-side of the light-emitting element 150 is electrically connected through the n-electrode 159 of the light-emitting element array 100, but the electrical connection on the n-side can be performed as follows.

[0174] Figure 40 is a plan view showing a wiring structure on the n-side of the light emitting element array 100, and Figure 41 yes Figure 40 Magnified image of . Figure 42 is a cross-sectional view of the light emitting element array 100 and is taken along Figure 41 As shown in the figure, the light emitting element array 100 includes a third wiring 133 and a fourth wiring 134 as n-side wiring. Note that Figures 40 to 42 In FIG. 1 , illustration of a portion of the configuration such as the p-electrode 158 , the first wiring 131 , and the second wiring 132 is omitted.

[0175] like Figure 41 and Figure 42 As shown, the third light emitting element 123 and the fourth light emitting element 124 each have a mesa structure, wherein the mesa (platform shape) 153 is formed by being surrounded by a recess 152 provided in the substrate 151. The recess 152 has a separation from the light emitting element surface 120 (see FIG. Figure 6 ) and a bottom surface 125 parallel to the light emitting element surface 120.

[0176] like Figure 42 As shown, the bottom surface 125 is formed by the n-type contact layer 164. The n-type contact layer 164 is made of an n-type semiconductor material and is provided adjacent to the n-type DBR layer 154 on the substrate 151 side. An element separation groove 165 is provided on the bottom surface 125. Figure 40 As shown, element isolation trench 165 is provided between light-emitting element column L3 and light-emitting element column L4 and extends along the extending direction of light-emitting element column L3 and light-emitting element column L4. Element isolation trench 165 has a depth at least sufficient to isolate n-contact layer 164, and by isolating n-contact layer 164, third light-emitting element 123 is electrically isolated from fourth light-emitting element 124.

[0177] The third wiring 133 and the fourth wiring 134 are both made of a conductive material such as Au and are formed on the bottom surface 125. Specifically, when viewed in a direction perpendicular to the bottom surface 125 (the Z direction), the third wiring 133 is provided between the element separation grooves 165, around the third light-emitting element 123, and extends along the extending direction (the X direction) of the light-emitting element column L3. Furthermore, when viewed in a direction perpendicular to the bottom surface 125 (the Z direction), the fourth wiring 134 is provided between the element separation grooves 165, around the fourth light-emitting element 124, and extends along the extending direction (the X direction) of the light-emitting element column L4.

[0178] By making the third wiring 133 and the fourth wiring 134 have the above-mentioned structure, it is possible to switch the light-emitting element 150 to emit light. Specifically, by applying a voltage between the first wiring 131 and the third wiring 133, the light-emitting elements 150 (see FIG. 1 ) included in both the light-emitting element column L1 and the light-emitting element column L3 can be switched. Figure 39 ) glows.

[0179] Furthermore, by applying a voltage between the first wiring 131 and the fourth wiring 134, the light-emitting elements 150 included in both the light-emitting element column L1 and the light-emitting element column L4 can be caused to emit light. Similarly, by applying a voltage between the second wiring 132 and the third wiring 133, the light-emitting elements 150 included in both the light-emitting element column L2 and the light-emitting element column L3 can be caused to emit light. Furthermore, by applying a voltage between the second wiring 132 and the fourth wiring 134, the light-emitting elements 150 included in both the light-emitting element column L2 and the light-emitting element column L4 can be caused to emit light.

[0180] Here, the widths of the third wiring 133 and the fourth wiring 134 will be checked. Figure 41 As shown, the minimum width of the third wiring 133 in the Y direction is defined as width W3, and the minimum width of the fourth wiring 134 in the Y direction is defined as width W4. By making widths W3 and W4 wider, the wiring resistance of the third wiring 133 and the fourth wiring 134 can be reduced. At the same time, when widths W3 and W4 are increased, the density of the light-emitting elements decreases, and the luminous intensity of the light-emitting element array 100 decreases. Below, a configuration in which widths W3 and W4 are increased while maintaining the density of the light-emitting elements will be described.

[0181] Note that the above structure can be formed by etching the mesa 153 to the n-contact layer 164 by RIE (reactive ion etching). Thereafter, the mesa 153 is covered with the insulating layer 161, and the insulating layer 161 around the mesa 153 is further opened by RIE. As a result, the bottom surface 125 is exposed, so that the third wiring 133 and the fourth wiring 134 can be formed on the bottom surface 125.

[0182] [Wiring structure 2 on the n-side]

[0183] Another example of the wiring structure on the n-side of the light emitting element array 100 will be described. Figure 43 is a plan view showing the wiring structure, and Figure 44 yes Figure 43 Magnified image of . Figure 45 is a cross-sectional view of the light emitting element array 100, and is taken along Figure 44 The cross-sectional view is taken along line FF in FIG. Note that Figures 43 to 45In the figure, illustration of a part of the configuration such as the p-electrode 158, the first wiring 131, and the second wiring 132 is omitted. Figure 43 and Figure 44 As shown in FIG. 1 , the third wiring 133 and the fourth wiring 134 are respectively arranged between the light emitting element column L3 and the light emitting element column L4. Figure 45 As shown, the third wiring 133 and the fourth wiring 134 are provided on the bottom surface 125 and the element separation groove 165 .

[0184] Figure 46 is a plan view showing the bottom surface 125, Figure 47 It is along Figure 46 16. A cross-sectional view taken along line GG in FIG. As shown in this figure, the region between the element separation groove 165 in the bottom surface 125 and the third light-emitting element 123 is defined as region R3. Furthermore, the region between the element separation groove 165 in the bottom surface 125 and the fourth light-emitting element 124 is defined as region R4.

[0185] like Figure 45 As shown, the insulating layer 161 is provided in the element separation groove 165 and on the bottom surface 125 . Figure 48 is a plan view showing the insulating layer 161, and Figure 49 It is along Figure 48 The cross-sectional view is taken along the line HH in FIG. Figure 48 and Figure 49 As shown, the first opening 161c as the opening of the insulating layer 161 is provided in a region R3 on both sides of the third light emitting element 123 (see FIG. Figure 47 ). In addition, Figure 48 and Figure 49 As shown, the second opening 161d as the opening of the insulating layer 161 is provided in a region R4 on both sides of the fourth light emitting element 124 (see FIG. Figure 47 )superior.

[0186] like Figure 44 and Figure 45 As shown, third wiring 133 is provided on insulating layer 161 provided on bottom surface 125 and in element separation groove 165, and overlaps region R3, region R4, and element separation groove 165 when viewed in a direction perpendicular to bottom surface 125 (Z direction). Third wiring 133 contacts n-contact layer 164 of third light-emitting element 123 via first opening 161 c provided in region R3, thereby being electrically connected to n-contact layer 164 of third light-emitting element 123. Furthermore, third wiring 133 is insulated from n-contact layer 164 of fourth light-emitting element 124 by insulating layer 161 provided on region R4.

[0187] In addition, if Figure 44 and Figure 45As shown, fourth wiring 134 is provided on insulating layer 161 provided on bottom surface 125 and in element separation groove 165, and overlaps region R3, region R4, and element separation groove 165 when viewed in a direction perpendicular to bottom surface 125 (Z direction). Fourth wiring 134 contacts n-contact layer 164 of fourth light-emitting element 124 through second opening 161 d provided in region R4, and is electrically connected to n-contact layer 164 of fourth light-emitting element 124. In addition, fourth wiring 134 is insulated from n-contact layer 164 of third light-emitting element 123 by insulating layer 161 provided on region R3.

[0188] In this structure, if Figure 44 As shown, the minimum width W3 of the third wiring 133 in the Y direction and the minimum width W4 of the fourth wiring 134 in the Y direction can be widened while maintaining the density of the light emitting elements. Therefore, the wiring resistance of the third wiring 133 and the fourth wiring 134 can be reduced.

[0189] Note that the above structure can be formed by etching mesa 153 down to n-contact layer 164 by RIE. Thereafter, mesa 153 is covered with insulating layer 161, and first opening 161c and second opening 161d are formed by RIE. Thus, third wiring 133 can be formed over first opening 161c and insulating layer 161, and fourth wiring 134 can be formed over second opening 161d and insulating layer 161.

[0190] [Wiring structure 3 on the n side]

[0191] Another example of the wiring structure on the n-side of the light emitting element array 100 will be described. Figure 50 is a plan view showing the wiring structure, Figure 51 yes Figure 50 The II line cross-sectional view of the light emitting element array 100 is the same as Figure 45 Same. Note that Figure 50 and Figure 51 In the drawings, illustration of a portion of the configuration such as the P electrode 158, the first wiring 131, and the second wiring 132 is omitted. As shown in these drawings, the third wiring 133 and the fourth wiring 134 are different from the third wiring 133 and the fourth wiring 134 shown in the wiring structure 2 in the separation position of the wiring (see FIG. Figure 43 ).

[0192] Figure 52This is a plan view showing the shapes of second wiring 133 and fourth wiring 134. As shown in the figure, when the width of third wiring 133 in the Y direction from element isolation trench 165 to the third light-emitting element 123 side is defined as width K1, and the width of third wiring 133 in the Y direction from element isolation trench 165 to the fourth light-emitting element 124 side is defined as width K2, width K1 is greater than width K2. Furthermore, when the width of fourth wiring 134 in the Y direction from element isolation trench 165 to the fourth light-emitting element 124 is defined as width K3, and the width of fourth wiring 134 in the Y direction from element isolation trench 165 to the third light-emitting element 123 side is defined as width K4, width K3 is greater than width K4.

[0193] By forming the third wiring 133 and the fourth wiring 134 in such a shape, the opening areas of the first opening 161c and the second opening 161d can be as large as Figure 51 As shown, the minimum width W3 of the third wiring 133 and the minimum width W4 of the fourth wiring 134 are the same as those in wiring structure 2. As a result, the contact resistance between the third wiring 133 and the n-contact layer 164 of the third light-emitting element 123, which are in contact with each other via the first opening 161 c, can be reduced. In addition, the contact resistance between the fourth wiring 134 and the n-contact layer 164 of the fourth light-emitting element 124, which are in contact with each other via the second opening 161 d, can be reduced.

[0194] [Modification]

[0195] Although in the above description, the light emitting element columns L3 and L4 extend in the direction (X direction) orthogonal to the extending direction (Y direction) of the light emitting element columns L1 and L2 (see Figure 39 ), but the extending directions of the light emitting element columns L3 and L4 are not limited thereto. Figure 53 is a schematic diagram illustrating another extension direction of light-emitting element columns L3 and L4. As shown in the figure, light-emitting element columns L3 and L4 may extend in the same Y direction as light-emitting element columns L1 and L2. In this case, third light-emitting element 123 is aligned with first light-emitting element 121, and fourth light-emitting element 124 is aligned with second light-emitting element 122.

[0196] By configuring the third wiring 133 and the fourth wiring 134 as described above, the light-emitting elements 150 included in the light-emitting element column L1 (similar to the light-emitting element column L3) can be caused to emit light by applying a voltage between the first wiring 131 and the third wiring 133. The light-emitting elements 150 included in the light-emitting element column L2 (similar to the light-emitting element column L4) can be caused to emit light by applying a voltage between the second wiring 132 and the fourth wiring 134. Furthermore, the extending direction of the light-emitting element columns L3 and L4 can be any direction parallel to the XY plane.

[0197] Furthermore, in the above-described light emitting element array 100, the first wiring 131 and the second wiring 132 as p-side wirings have the configuration according to the present technology (see FIG. Figure 2 ), and the third wiring 133 and the fourth wiring 134 as the n-side wiring also have the configuration according to the present technology (see Figure 45 ). Here, in the light-emitting element array 100, the wiring on the p-side and n-side does not necessarily need to have the configuration according to the present technology. That is, in the light-emitting element array 100, only the p-side wiring may have the configuration according to the present technology, and the n-side wiring may have a common wiring structure in the light-emitting element array. In addition, in the light-emitting element array 100, only the n-side wiring may have the configuration according to the present technology, and the p-side wiring may have a common wiring structure in the light-emitting element array.

[0198] In the above description, first wiring 131 and second wiring 132 are p-side wiring, and third wiring 133 and fourth wiring 134 are n-side wiring. However, the n-type and p-type of light-emitting element 150 may be reversed. In this case, first wiring 131 and second wiring 132 are n-side wiring, and second wiring 133 and fourth wiring 134 are p-side wiring.

[0199] [About this disclosure]

[0200] The effects described in this disclosure are merely examples and are not limiting, and additional effects may be applied. The description of multiple effects does not necessarily mean that these effects work simultaneously. This means that at least one of the effects described above can be achieved, and there is the possibility of exerting effects not described in this disclosure. In addition, at least two of the characteristic parts described in this disclosure may be arbitrarily combined with each other.

[0201] It should be noted that the present technology can also take the following configurations.

[0202] (1) A light emitting element array comprising:

[0203] a light emitting element group including a plurality of first light emitting elements and a plurality of second light emitting elements arranged in a planar manner to form a light emitting element plane;

[0204] a first wiring extending in a direction parallel to the light-emitting element surface, having a region overlapping with the plurality of first light-emitting elements and a region overlapping with the plurality of second light-emitting elements when viewed from a direction perpendicular to the light-emitting element surface, electrically connected to the plurality of first light-emitting elements, and not electrically connected to the plurality of second light-emitting elements; and

[0205] The second wiring extends in a direction parallel to the light-emitting element surface, has an area overlapping with the multiple first light-emitting elements and an area overlapping with the multiple second light-emitting elements when viewed from a direction perpendicular to the light-emitting element surface, is electrically connected to the multiple second light-emitting elements, and is not electrically connected to the multiple first light-emitting elements.

[0206] (2) The light emitting element array according to (1) above, wherein:

[0207] The light emitting element group includes a first light emitting element column in which the plurality of first light emitting elements are arranged and a second light emitting element column in which the plurality of second light emitting elements are arranged.

[0208] The center of the first wiring is separated from the center of the first light emitting element column in a direction parallel to the light emitting element surface, and

[0209] The center of the second wiring may be separated from the center of the second light emitting element column in a direction parallel to the light emitting element surface.

[0210] (3) The light emitting element array according to (2) above, wherein

[0211] The light emitting element group further includes a third light emitting element column in which the plurality of first light emitting elements are arranged, the third light emitting element column being arranged on the opposite side of the first light emitting element column relative to the second light emitting element column.

[0212] The first wiring is provided between the center of the first light emitting element column and the center of the second light emitting element column when viewed in a direction perpendicular to the light emitting element surface, and

[0213] The second wiring is provided between the center of the second light emitting element column and the center of the third light emitting element column when viewed in a direction perpendicular to the light emitting element surface.

[0214] (4) The light emitting element array according to (3) above, wherein

[0215] The first light emitting element column, the second light emitting element column, the third light emitting element column, the first wiring, and the second wiring extend in a first direction parallel to the light emitting element surface and are separated from each other in a second direction parallel to the light emitting element surface and orthogonal to the first direction.

[0216] The width of the first wiring in the second direction is greater than the distance between the first light emitting element column and the second light emitting element column in the second direction, and

[0217] A width of the second wiring in the second direction is greater than a distance between the second light emitting element column and the third light emitting element column in the second direction.

[0218] (5) The light emitting element array according to any one of (1) to (4) above, wherein

[0219] The first wiring and the second wiring are formed in the same layer.

[0220] (6) The light emitting element array according to (5) above, wherein

[0221] The first wiring is stacked on the plurality of first light-emitting elements and the plurality of second light-emitting elements via an insulating layer, the first wiring is provided in a first through hole via the insulating layer on the plurality of first light-emitting elements and is electrically connected to the plurality of first light-emitting elements, and the first wiring is insulated from the plurality of second light-emitting elements by the insulating layer on the plurality of second light-emitting elements, and

[0222] The second wiring is stacked on multiple first light-emitting elements and multiple second light-emitting elements via an insulating layer, is electrically connected to the multiple second light-emitting elements via a second through hole set in the insulating layer on the multiple second light-emitting elements, and is insulated from the multiple first light-emitting elements by the insulating layer on the above-mentioned multiple first light-emitting elements.

[0223] (7) The light emitting element array according to (6) above, wherein

[0224] Each of the plurality of first light emitting elements is a vertical cavity surface emitting laser element and includes a first light emitting surface and a first electrode disposed around the first light emitting surface.

[0225] Each of the plurality of second light emitting elements is a vertical cavity surface emitting laser element, comprising a second light emitting surface and a second electrode arranged around the second light emitting surface,

[0226] The first wiring is adjacent to the first electrode via a first through hole in the plurality of first light emitting elements, and

[0227] The second wiring is adjacent to the second electrode via the second through-hole in the plurality of second light-emitting elements.

[0228] (8) The light emitting element array according to any one of (1) to (7) above, wherein

[0229] Each of the plurality of first light emitting elements and the plurality of second light emitting elements has a mesa structure surrounded by a recessed portion,

[0230] The light emitting element group includes: a first groove portion connecting the recesses between the plurality of first light emitting elements; and a second groove portion connecting the recesses between the plurality of second light emitting elements.

[0231] The first wiring has a portion formed in the first groove portion, and

[0232] The second wiring has a portion formed in the second groove portion.

[0233] (9) The light emitting element array according to any one of (1) to (8) above, wherein

[0234] The light-emitting elements constituting the light-emitting element group include: a plurality of third light-emitting elements and a plurality of fourth light-emitting elements, each of the plurality of third light-emitting elements and the plurality of fourth light-emitting elements having a mesa structure surrounded by a recessed portion, the recessed portion being separated from the light-emitting element surface and having a bottom surface parallel to the light-emitting element surface, and an element isolation trench being provided on the bottom surface for electrically isolating the plurality of third light-emitting elements from the plurality of fourth light-emitting elements;

[0235] The light emitting element array further comprises:

[0236] a third wiring extending in a direction parallel to the bottom surface, having a region on the bottom surface between the element separation trench and the third light-emitting element and a region on the bottom surface between the element separation trench and the fourth light-emitting element as viewed in a direction perpendicular to the bottom surface, overlapping the element separation trench, electrically connected to the third light-emitting element, and not electrically connected to the fourth light-emitting element; and

[0237] The fourth wiring extends in a direction parallel to the bottom surface, and when viewed from a direction perpendicular to the bottom surface, has an area on the bottom surface between the element separation groove and the third light-emitting element and an area on the bottom surface between the element separation groove and the fourth light-emitting element, overlaps with the element separation groove, is electrically connected to the fourth light-emitting element, and is not electrically connected to the third light-emitting element.

[0238] (10) The light emitting element array according to (9) above, wherein:

[0239] The light emitting element group includes a first light emitting element column including a plurality of first light emitting elements, a second light emitting element column including a plurality of second light emitting elements, a third light emitting element column including a plurality of third light emitting elements, and a fourth light emitting element column including a plurality of fourth light emitting elements.

[0240] (11) The light emitting element array according to (10) above, wherein:

[0241] The first light emitting element array, the second light emitting element array, the first wiring, and the second wiring each extend in a first direction parallel to the light emitting element surface, and

[0242] The third light emitting element column, the fourth light emitting element column, the third wiring, and the fourth wiring all extend in a second direction that is parallel to the light emitting element surface and orthogonal to the first direction.

[0243] (12) The light emitting element array according to (10) above, wherein:

[0244] The first light emitting element column, the second light emitting element column, the first wiring, and the second wiring all extend in a first direction parallel to the light emitting element surface, and

[0245] The third light emitting element column, the fourth light emitting element column, the third wiring, and the fourth wiring all extend in the first direction.

[0246] (13) The light emitting element array according to any one of (9) to (12) above, wherein

[0247] The third wiring is stacked on the bottom surface and the element separation groove via an insulating layer, and in a region of the bottom surface between the element separation groove and the third light-emitting element, only the first opening provided in the insulating layer is electrically connected to the plurality of third light-emitting elements, and in a region of the bottom surface between the element separation groove and the fourth light-emitting element, the third wiring is insulated from the plurality of fourth light-emitting elements by the insulating layer, and

[0248] The fourth wiring is stacked on the bottom surface and the element separation groove via the insulating layer, and is electrically connected to the plurality of fourth light-emitting elements via a second opening provided in the insulating layer in an area between the element separation groove and the fourth light-emitting element in the bottom surface, and is insulated from the plurality of third light-emitting elements by the insulating layer in an area between the element separation groove and the third light-emitting element in the bottom surface.

[0249] (14) The light emitting element array according to any one of (9) to (13) above, wherein

[0250] The width of the third wiring from the element separation groove to the side surface of the third light emitting element is greater than the width from the element separation groove to the side surface of the fourth light emitting element, and

[0251] The width of the fourth wiring from the element isolation trench to the side surface of the fourth light-emitting element is greater than the width from the element isolation trench to the side surface of the third light-emitting element.

[0252] (15) A light emitting element array comprising:

[0253] A light-emitting element group, wherein a plurality of light-emitting elements and a plurality of second light-emitting elements are arranged in a planar manner to form a light-emitting element surface, the plurality of first light-emitting elements and the plurality of second light-emitting elements each having a mesa structure surrounded by a recessed portion, the recess being separated from the light-emitting element surface and having a bottom surface parallel to the light-emitting element surface, and an element separation groove being provided in the bottom surface for electrically separating the plurality of first light-emitting elements and the plurality of second light-emitting elements from each other.

[0254] a first wiring extending in a direction parallel to the bottom surface, having a region on the bottom surface between the element separation trench and the first light-emitting element and a region on the bottom surface between the element separation trench and the second light-emitting element as viewed in a direction perpendicular to the bottom surface, overlapping the element separation trench, electrically connected to the first light-emitting element, and not electrically connected to the second light-emitting element; and

[0255] The second wiring extends in a direction parallel to the bottom surface, and when viewed from a direction perpendicular to the bottom surface, has an area on the bottom surface located between the element separation groove and the first light-emitting element, and an area on the bottom surface located between the element separation groove and the second light-emitting element, overlaps with the element separation groove, and is electrically connected to the second light-emitting element, but not electrically connected to the first light-emitting element.

[0256] Explanation of symbols

[0257] 100 light-emitting element array

[0258] 120 light emitting element surface

[0259] 121 first light-emitting element

[0260] 122 second light emitting element

[0261] 123 third light-emitting element

[0262] 124 fourth light emitting element

[0263] 125 bottom

[0264] 131 First Wiring

[0265] 132 Second wiring

[0266] 133 Third Wiring

[0267] 134 Fourth Wiring

[0268] 150 light-emitting elements

[0269] 151 substrate

[0270] 152 recess

[0271] 153 countertops

[0272] 154n type DBR layer

[0273] 155 active layer

[0274] 156 current limiting layer

[0275] 157p type DBR layer

[0276] 158P type electrode

[0277] 159n type electrode

[0278] 161 insulation layer

[0279] 161a first through hole

[0280] 161b second through hole

[0281] 161c first opening

[0282] 161d second opening

[0283] 164n contact layer

[0284] 165 component separation slot

[0285] 171 first groove

[0286] 172 second groove portion.

Claims

1. A light emitting element array, comprising: a light emitting element group including a plurality of first light emitting elements and a plurality of second light emitting elements arranged in a planar manner to form a light emitting element plane; a first wiring extending in a direction parallel to the light-emitting element surface, having a region overlapping with the plurality of first light-emitting elements and a region overlapping with the plurality of second light-emitting elements when viewed in a direction perpendicular to the light-emitting element surface, electrically connected to the plurality of first light-emitting elements, and not electrically connected to the plurality of second light-emitting elements; as well as The second wiring extends in a direction parallel to the light-emitting element surface, has an area overlapping with the multiple first light-emitting elements and an area overlapping with the multiple second light-emitting elements when viewed from a direction perpendicular to the light-emitting element surface, is electrically connected to the multiple second light-emitting elements, and is not electrically connected to the multiple first light-emitting elements.

2. The light emitting element array according to claim 1, wherein The light emitting element group includes a first light emitting element column in which the plurality of first light emitting elements are arranged and a second light emitting element column in which the plurality of second light emitting elements are arranged. The center of the first wiring is separated from the center of the first light emitting element column in a direction parallel to the light emitting element surface, and The center of the second wiring is separated from the center of the second light emitting element column in a direction parallel to the light emitting element surface.

3. The light emitting element array according to claim 2, wherein: The light emitting element group further includes a third light emitting element column in which the plurality of first light emitting elements are arranged, the third light emitting element column being arranged on the opposite side of the first light emitting element column relative to the second light emitting element column. The first wiring is arranged between the center of the first light-emitting element column and the center of the second light-emitting element column when viewed from a direction perpendicular to the light-emitting element surface, and the second wiring is arranged between the center of the second light-emitting element column and the center of the third light-emitting element column when viewed from a direction perpendicular to the light-emitting element surface.

4. The light emitting element array according to claim 3, wherein The first light emitting element column, the second light emitting element column, the third light emitting element column, the first wiring, and the second wiring extend in a first direction parallel to the light emitting element surface and are separated from each other in a second direction parallel to the light emitting element surface and orthogonal to the first direction. The width of the first wiring in the second direction is greater than the distance between the first light emitting element column and the second light emitting element column in the second direction, and A width of the second wiring in the second direction is greater than a distance between the second light emitting element column and the third light emitting element column in the second direction.

5. The light emitting element array according to claim 1, wherein The first wiring and the second wiring are formed in the same layer.

6. The light emitting element array according to claim 5, wherein The first wiring is stacked on the plurality of first light-emitting elements and the plurality of second light-emitting elements via an insulating layer, the first wiring is electrically connected to the plurality of first light-emitting elements via a first through hole provided in the insulating layer on the plurality of first light-emitting elements, and the first wiring is insulated from the plurality of second light-emitting elements by the insulating layer on the plurality of second light-emitting elements, and The second wiring is stacked on the multiple first light-emitting elements and the multiple second light-emitting elements via the insulating layer, the second wiring is electrically connected to the multiple second light-emitting elements via second through holes provided in the insulating layer over the multiple second light-emitting elements, and the second wiring is insulated from the multiple first light-emitting elements by the insulating layer over the multiple first light-emitting elements.

7. The light emitting element array according to claim 6, wherein The plurality of first light emitting elements are all vertical cavity surface emitting laser elements, including a first light emitting surface and a first electrode arranged around the first light emitting surface, The plurality of second light emitting elements are all vertical cavity surface emitting laser elements, including a second light emitting surface and a second electrode arranged around the second light emitting surface, The first wiring is adjacent to the first electrode via the first through hole in the plurality of first light emitting elements, and The second wiring is adjacent to the second electrode via the second through-hole in the plurality of second light-emitting elements.

8. The light emitting element array according to claim 1, wherein The plurality of first light emitting elements and the plurality of second light emitting elements each have a mesa structure surrounded by a concave portion, The light emitting element group includes: a first groove portion connecting the recesses between the plurality of first light emitting elements; and a second groove portion connecting the recesses between the plurality of second light emitting elements. The first wiring has a portion formed in the first groove portion, and The second wiring has a portion formed in the second groove portion.

9. The light emitting element array according to claim 1, wherein The light-emitting elements constituting the light-emitting element group include: a plurality of third light-emitting elements and a plurality of fourth light-emitting elements, each of the plurality of third light-emitting elements and the plurality of fourth light-emitting elements having a mesa structure surrounded by a recessed portion, the recessed portion being separated from the light-emitting element surface and having a bottom surface parallel to the light-emitting element surface, and an element isolation groove being provided in the bottom surface for electrically isolating the plurality of third light-emitting elements from the plurality of fourth light-emitting elements; The light emitting element array further comprises: a third wiring extending in a direction parallel to the bottom surface, having a region on the bottom surface between the element separation trench and the third light-emitting element and a region on the bottom surface between the element separation trench and the fourth light-emitting element as viewed in a direction perpendicular to the bottom surface, overlapping the element separation trench, electrically connected to the third light-emitting element, and not electrically connected to the fourth light-emitting element; and The fourth wiring extends in a direction parallel to the bottom surface, and when viewed from a direction perpendicular to the bottom surface, has an area on the bottom surface between the element separation groove and the third light-emitting element and an area on the bottom surface between the element separation groove and the fourth light-emitting element. The fourth wiring overlaps with the element separation groove, is electrically connected to the fourth light-emitting element, and is not electrically connected to the third light-emitting element.

10. The light emitting element array according to claim 9, wherein The light emitting element group includes a first light emitting element column including a plurality of first light emitting elements, a second light emitting element column including a plurality of second light emitting elements, a third light emitting element column including a plurality of third light emitting elements, and a fourth light emitting element column including a plurality of fourth light emitting elements.

11. The light emitting element array according to claim 10, wherein The first light emitting element column, the second light emitting element column, the first wiring, and the second wiring all extend in a first direction parallel to the light emitting element surface, and The third light emitting element column, the fourth light emitting element column, the third wiring, and the fourth wiring all extend in a second direction that is parallel to the light emitting element surface and orthogonal to the first direction.

12. The light emitting element array according to claim 10, wherein: The first light emitting element column, the second light emitting element column, the first wiring, and the second wiring all extend in a first direction parallel to the light emitting element surface, and The third light emitting element column, the fourth light emitting element column, the third wiring, and the fourth wiring all extend in the first direction.

13. The light emitting element array according to claim 9, wherein The third wiring is stacked on the bottom surface and the element separation groove via an insulating layer, is electrically connected to the plurality of third light-emitting elements via a first opening provided in the insulating layer in a region of the bottom surface between the element separation groove and the third light-emitting element, and is insulated from the plurality of fourth light-emitting elements by the insulating layer in a region of the bottom surface between the element separation groove and the fourth light-emitting element. The fourth wiring is stacked on the bottom surface and the element separation groove via the insulating layer, and is electrically connected to the plurality of fourth light-emitting elements via a second opening provided in the insulating layer in an area on the bottom surface between the element separation groove and the fourth light-emitting element, and is insulated from the plurality of third light-emitting elements by the insulating layer in an area on the bottom surface between the element separation groove and the third light-emitting element.

14. The light emitting element array according to claim 9, wherein The width of the third wiring from the element separation groove to the side surface of the third light emitting element is greater than the width from the element separation groove to the side surface of the fourth light emitting element, and The width of the fourth wiring from the element isolation trench to the side surface of the fourth light-emitting element is greater than the width from the element isolation trench to the side surface of the third light-emitting element.

15. A light emitting element array comprising: a light-emitting element group, wherein a plurality of first light-emitting elements and a plurality of second light-emitting elements are arranged in a planar manner to form a light-emitting element surface, the plurality of first light-emitting elements and the plurality of second light-emitting elements each having a mesa structure surrounded by a recessed portion, the recessed portion being separated from the light-emitting element surface and having a bottom surface parallel to the light-emitting element surface, and an element separation groove being provided in the bottom surface for electrically separating the plurality of first light-emitting elements and the plurality of second light-emitting elements from each other; a first wiring extending in a direction parallel to the bottom surface, having a region located between the element separation trench and the first light-emitting element and a region located between the element separation trench and the second light-emitting element in the bottom surface as viewed in a direction perpendicular to the bottom surface, overlapping the element separation trench, electrically connected to the first light-emitting element, and not electrically connected to the second light-emitting element; as well as The second wiring extends in a direction parallel to the bottom surface, and when viewed from a direction perpendicular to the bottom surface, has an area on the bottom surface between the element separation groove and the first light-emitting element and an area on the bottom surface between the element separation groove and the second light-emitting element, overlaps with the element separation groove, is electrically connected to the second light-emitting element, and is not electrically connected to the first light-emitting element.

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