A cryopumping apparatus and method of operation thereof

Abstract

The application discloses a kind of cryogenic pump equipment and its operating method, including GM refrigerator, shell, control component, compressor unit, connecting pipeline, the connecting pipeline includes with shell communication purge pipeline and evacuation pipeline, control valve is equipped on the purge pipeline and evacuation pipeline, the GM refrigerator is located in shell, and GM refrigerator includes primary cooling station, secondary cooling station and driving motor.In the application, the speed of driving motor of cryogenic pump is adjusted by control component according to the temperature feedback by temperature sensor, and the set temperature target value is controlled according to the adjustment of speed.Control component carries out automatic regeneration during the regeneration process of cryogenic pump, and the operating pressure difference of compressor is increased in the temperature rising stage by information interaction between compressor control unit and cryogenic pump control component to obtain the regeneration state of cryogenic pump, which improves the adiabatic compression efficiency of cryogenic pump and speeds up the speed in the regeneration temperature rising stage.

Description

Technical Field

[0001] This invention relates to the field of cryogenic vacuum technology, and more specifically to a cryogenic pump device and its operation method. Background Technology

[0002] A cryogenic pump is a gas trapping vacuum pump that uses extremely low temperatures to capture gases. When the gas capture capacity of a cryogenic pump reaches saturation, its performance will degrade and it will lose its pumping ability. Therefore, cryogenic pumps need to be regenerated periodically by heating up to expel the pumped gas and restore their pumping ability. The regeneration of a cryogenic pump includes three stages: heating up, venting, and cooling down.

[0003] Cryogenic pumps are widely used in the semiconductor field due to their clean, oil-free operation and excellent H2 extraction performance, making them the preferred ultra-high vacuum pump for ion implantation equipment. During operation, the temperature of the primary and secondary cold plates needs to be controlled according to process requirements. 90% of the gas released during ion implantation is H2, and a large amount of H2 is captured by the cryogenic pump. When gas capture reaches saturation, the cryogenic pump needs regeneration. During regeneration, the pump temperature returns to above room temperature, releasing the captured gas. Then, a chiller continues to cool the pump to the required process temperature. The cryogenic pump cannot remove gas during regeneration; therefore, the regeneration time directly determines the equipment's production efficiency. Existing regeneration methods use heating and purging to bring the pump temperature back above room temperature. Since the gas in the ion implantation process is H2, it is adsorbed by the adsorbent material in the cryogenic pump. It typically takes several hours of purging to completely remove the H2 from the adsorbent material. This process severely impacts the regeneration time of the cryogenic pump and the equipment's production efficiency.

[0004] Existing patent publication CN114382677A discloses a cryogenic pump comprising: a temperature sensor for measuring the temperature of a cryogenic plate; a pressure sensor for measuring the internal pressure of the cryogenic pump container; a pressure rise rate comparison unit that compares the pressure rise rate of the cryogenic pump container with a first pressure rise rate threshold when the measured temperature is in a first temperature zone and the measured pressure is in a first pressure region; and a refrigerator controller that controls the refrigerator to cool the cryogenic plate from the first temperature zone to a second temperature zone if the pressure rise rate is lower than the first pressure rise rate threshold. The pressure rise rate comparison unit compares the pressure rise rate of the cryogenic pump container with a second pressure rise rate threshold when the measured temperature is in a second temperature zone and the measured pressure is in a second pressure region. The second pressure region is lower than the first pressure region, and the second pressure rise rate threshold is smaller than the first pressure rise rate threshold.

[0005] See Figure 2The regeneration process is divided into three stages: heating, evacuation, and cooling. The normal process involves purging during heating, followed by evacuation, and then a pressure rise rate test. Once the pressure rise rate test meets the requirements, cooling begins. This patent application uses pre-cooling during the evacuation stage. By setting two pressure rise rate test values, the cryogenic pump can reach the first pressure rise rate test value in a shorter time. The cryogenic pump then begins pre-cooling, while evacuation continues during this process. After evacuating to the second pressure rise rate test value, formal cooling begins. This operation achieves cooling within the time frame of the first and second pressure rise rate test values, thus shortening the regeneration time. Therefore, this patent application shortens the time during the cooling stage, whereas a long purging process is required to completely remove H2 from the adsorbent material. Summary of the Invention

[0006] The technical problem to be solved by this invention is how to shorten the regeneration time of a cryogenic pump.

[0007] This invention solves the above-mentioned technical problems through the following technical means: a cryogenic pump device, including a GM refrigerator, a housing, a control component, a compressor unit, and connecting pipelines. The connecting pipelines include a purge pipeline and an evacuation pipeline connected to the housing. Both the purge pipeline and the evacuation pipeline are equipped with control valves. The GM refrigerator is located inside the housing and includes a primary cooling platform, a secondary cooling platform, and a drive motor. Both the primary and secondary cooling platforms are equipped with temperature sensors. The temperature sensors, the drive motor, and the control valves are all electrically connected to the control component, and the speed of the drive motor is adjusted according to the temperature feedback from the temperature sensors. The compressor unit is used to adjust the operating pressure difference of the compressor and provide sufficient helium gas to the cryogenic pump.

[0008] The control unit adjusts the speed of the cryogenic pump's drive motor based on temperature feedback from the temperature sensor, thereby achieving the set temperature target value. During the cryogenic pump regeneration process, the control unit performs automatic regeneration. The compressor obtains the cryogenic pump's regeneration status through information exchange between its own control unit and the cryogenic pump control unit. During the heating phase, increasing the compressor's operating pressure differential improves the cryogenic pump's adiabatic compression efficiency and accelerates the regeneration heating phase.

[0009] As a preferred technical solution, the compressor unit includes a compressor, a compressor control unit, and a refrigerant pipeline. The compressor control unit is electrically connected to the compressor, and the refrigerant pipeline is connected to the inlet and outlet ports of the housing.

[0010] As a preferred technical solution, the GM refrigerator further includes a primary cylinder and a secondary cylinder. A primary cooling platform is fixedly connected to the bottom of the primary cylinder, and a secondary cooling platform is fixedly connected to the bottom of the secondary cylinder. The primary and secondary cooling platforms transfer the cooling capacity of the refrigerator to the low-temperature pump components. The temperature sensors include a first temperature sensor and a second temperature sensor respectively installed on the primary and secondary cooling platforms.

[0011] As a preferred technical solution, the housing includes a pump port flange, a cylinder, and an interface. The cold end of the GM refrigeration unit is fixedly located inside the housing. One end of the cylinder is provided with a pump port flange, and the top of the cylinder is provided with an interface, which is connected to a connecting pipeline. A pressure detector and a temperature acquisition device are also provided inside the cylinder.

[0012] As a preferred technical solution, the connecting pipeline further includes a pressure relief pipeline, which is equipped with a pressure relief valve, and the pressure relief valve is electrically connected to the control component.

[0013] As a preferred technical solution, the control valve includes a venting valve and a coarse extraction valve. The venting valve and the coarse extraction valve are respectively located on the purge pipeline and the evacuation pipeline. The cylinder is connected to the coarse extraction pump through the evacuation pipeline. The purge pipeline is connected to the cylinder and is used to input high-purity gas to the cryogenic pump during the regeneration process.

[0014] As a preferred technical solution, the cylinder body is further provided with a first low-temperature plate and a second low-temperature plate. The second low-temperature plate is fixedly disposed at the center of the cylinder body, and the first low-temperature plate is disposed on the outside of the second low-temperature plate and mechanically connected to the primary cooling platform.

[0015] As a preferred technical solution, the first low-temperature plate includes a radiation-proof cold shield and a baffle. The baffle is mechanically connected to the primary cooling platform via a flange, and the radiation-proof cold shield is fixedly installed inside the cylinder.

[0016] As a preferred technical solution, the second low-temperature plate includes a heat transfer plate, an L-shaped low-temperature plate, and an adsorption material. The heat transfer plate is fixedly installed inside the GM refrigerator, and multiple L-shaped low-temperature plates are fixedly installed on the heat transfer plate, with adsorption material adhered to each L-shaped low-temperature plate.

[0017] A method for operating a cryogenic pump includes the following steps:

[0018] S1: The control component controls the drive motor of the cryogenic pump to reverse and increase the temperature, and the compressor control unit adjusts the compressor operating frequency through the frequency converter according to the regeneration status of the cryogenic pump to increase the operating pressure difference of the compressor.

[0019] S2: During the evacuation phase of the regeneration process, the inside of the cryogenic pump is purged and evacuated, and the pressure rise rate is tested after one purging and evacuation step.

[0020] S3: After judging the test results of the pressure rise rate, if they are qualified, repeat the steps in S2 multiple times to fully release the hydrogen adsorbed by the adsorbent material.

[0021] S4: After the hydrogen is completely discharged, the drive motor of the cryogenic pump is controlled by the control components to rotate forward to cool down.

[0022] By performing multiple purging and evacuation cycles during the evacuation phase of the regeneration process, the H2 adsorbed in the pump body can be quickly removed. This allows for the complete removal of H2 adsorbed in the cryogenic pump in a shorter time, replacing the purging process that requires several hours.

[0023] The advantages of this invention are:

[0024] (1) In this invention, the speed of the drive motor of the cryogenic pump is adjusted by the control component according to the temperature feedback from the temperature sensor, and the set temperature target value is achieved by adjusting the speed. The control component performs automatic regeneration during the regeneration process of the cryogenic pump. The compressor obtains the regeneration status of the cryogenic pump through information interaction between its own control unit and the cryogenic pump control component. During the heating stage, the operating pressure difference of the compressor is increased, which improves the adiabatic compression efficiency of the cryogenic pump and accelerates the speed of the regeneration heating stage.

[0025] (2) In this invention, by repeatedly purging and evacuating during the evacuation phase of the regeneration process, the H2 adsorbed in the pump body can be quickly removed. This can completely remove the H2 adsorbed in the cryogenic pump in a short time, replacing the purging process that requires several hours. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a cryogenic pump device provided in an embodiment of the present invention;

[0027] Figure 2 A schematic diagram of the operation method of a cryogenic pump device is provided for the background art of this invention;

[0028] Figure 3 This is a schematic diagram of the operation method of a cryogenic pump device provided in an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the regeneration pressure curve of a cryogenic pump device provided in an embodiment of the present invention;

[0030] Reference numerals: 1. GM refrigeration unit; 11. Primary cooling platform; 12. Primary cylinder; 13. Secondary cooling platform; 14. Secondary cylinder; 2. Shell; 21. Pump port flange; 22. Cylinder; 23. Interface; 231. Vent valve; 232. Coarse extraction valve; 233. Pressure relief valve; 234. Pressure detector; 235. Temperature acquisition device; 3. First low-temperature plate; 31. Radiation shield; 32. Baffle; 4. Second low-temperature plate; 41. Heat transfer plate; 42. L-shaped low-temperature plate; 43. Adsorption material; 5. First temperature sensor; 6. Second temperature sensor; 7. Control components; 8. Compressor unit; 81. Compressor; 82. Compressor control unit; 83. Refrigerant medium pipeline. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] See Figure 1 A cryogenic pump device includes a GM refrigerator 1, a housing 2, a first temperature sensor 5, a second temperature sensor 6, a control unit 7, a compressor unit 8, and connecting pipelines. The GM refrigerator 1 is located inside the housing 2, the compressor unit 8 is connected to the GM refrigerator 1, and the control unit 7 is located outside the housing 2. The GM refrigerator 1 is a bipolar refrigerator. The GM refrigerator 1 has a primary cooling platform 11 with a first cooling temperature and a secondary cooling platform 13 with a second cooling temperature, as well as a drive motor for the refrigerator. The primary cooling platform typically cools to 65-100K, and the secondary cooling platform 13 cools to 10-15K. The first temperature sensor 5 and... The second temperature sensor 6 is respectively installed on the primary cooling platform 11 and the secondary cooling platform 13 of the GM refrigerator 1, and is used to monitor the temperature of the primary cooling platform 11 and the secondary cooling platform 13, respectively. Their operating temperature ranges are 30-350K and 4-350K, respectively. The control unit 7 is a control unit used to control the operation of the cryogenic pump. The compressor unit 8 is used to provide the cryogenic pump with sufficient high-purity and high-pressure helium. The first temperature sensor 5 and the second temperature sensor 6 are both electrically connected to the control unit 7. The connecting pipelines include a pressure relief pipeline, a purging pipeline and an evacuation pipeline. Each connecting pipeline is equipped with a control valve, and the control valves are all electrically connected to the control unit 7.

[0033] The compressor unit 8 improves the adiabatic compression efficiency of the cryogenic pump by controlling the operating pressure difference of the compressor through frequency conversion, thereby accelerating the regeneration and heating stage. The control component 7 monitors the temperature of the primary cooling platform 11 and the secondary cooling platform 13 through the first temperature sensor 5 and the second temperature sensor 6. The control component 7 adjusts the speed of the drive motor of the cryogenic pump according to the temperature feedback from the first temperature sensor 5 and the second temperature sensor 6. The speed adjustment achieves the set temperature target value. Cooling can be performed by controlling the drive motor to rotate forward, and heating can be performed by controlling the drive motor to rotate in reverse. In this embodiment, the control component 7 can be a controller.

[0034] See Figure 1 The GM refrigerator 1 is a two-stage refrigerator. The GM refrigerator 1 also includes a first-stage cylinder 12 and a second-stage cylinder 14. The bottom end of the first-stage cylinder 12 is fixedly connected to a first-stage cooling platform 11. The bottom of the first-stage cooling platform 11 is fixedly connected to the second-stage cylinder 14. The bottom of the second-stage cylinder 14 is fixedly connected to a second-stage cooling platform 13. The shell 2 includes a pump port flange 21, a cylinder 22, and an interface 23. The left end of the cylinder 22 is connected to the pump port flange 21, and the top is provided with an interface 23. The interface 23 is connected to the connecting pipeline. The purging pipeline, the evacuation pipeline, and the pressure relief pipeline are respectively provided with a vent valve 231, a roughing valve 232, and a pressure relief valve 233. The cylinder 22 is also provided with a pressure detector 234 and a temperature collector 235. The vent valve 231, the roughing valve 232, the pressure relief valve 233, the pressure detector 234, and the temperature collector 235 are all electrically connected to the control component 7.

[0035] Vent valve 231 is used to introduce high-purity gas into the cryogenic pump during the regeneration process, which accelerates the heating of the cryogenic pump and blows out the gas adsorbed by the cryogenic pump adsorption material 43.

[0036] The coarse extraction valve 232 is connected to the coarse extraction pump. The opening and closing of the valve realizes the connection and disconnection between the inside of the cryogenic pump and the coarse extraction pump. During the regeneration process, the inside of the cryogenic pump is evacuated when the coarse extraction valve 232 is open, which meets the start-up and operation conditions of the cryogenic pump.

[0037] The pressure relief valve 233 is a safety device for the cryogenic pump. It automatically opens when the internal pressure of the cryogenic pump exceeds the limit to ensure the safe operation of the cryogenic pump. During the regeneration process, the high-purity gas entering through the vent valve 231 and the gas captured during the operation of the cryogenic pump are discharged through the pressure relief valve 233. When the pressure relief valve 233 is used to discharge dangerous gases, it needs to be connected to an exhaust device to discharge the gas to a safe position.

[0038] Pressure detector 234 is used to test the internal pressure state of the cryogenic pump. During the regeneration process, the pressure data is fed back to the control component 7, and the control component 7 adjusts the regeneration process according to the feedback pressure value.

[0039] Temperature acquisition unit 235 is used to test the temperature values ​​of the first temperature sensor 5 and the second temperature sensor 6, and feeds the temperature values ​​back to the control unit 7. The control unit 7 adjusts the regeneration process according to the feedback values ​​(controlling the forward and reverse rotation of the drive motor to control the heating or cooling).

[0040] See Figure 1 The cylinder 22 is also equipped with a first low-temperature plate 3 and a second low-temperature plate 4. The first low-temperature plate 3 includes a radiation shield 31 and a baffle 32. The baffle 32 is mechanically connected to the first-stage cooling platform 11 through a flange. The first low-temperature plate 3 is used to surround the second low-temperature plate 4 to achieve light shielding of the second low-temperature plate 4 and reduce the direct heat radiation of the external gas to the second low-temperature plate 4. At the same time, it is used to remove the first type of gas. The second low-temperature plate 4 is fixedly located at the center of the cylinder 22. It is required that the second low-temperature plate 4 cannot be seen when viewed directly from the pump port of the low-temperature pump. The second low-temperature plate 4 includes a heat transfer plate 41, an L-shaped low-temperature plate 42, and an adsorption material 43. The heat transfer plate 41 is vertically arranged and fixedly connected with multiple L-shaped low-temperature plates 42. The adsorption material 43 is bonded and fixed on the multiple L-shaped low-temperature plates 42. In this embodiment, the adsorption material 43 is activated carbon, which is bonded to the surface of the L-shaped low-temperature plate 42 through a low-temperature colloid. The main function of the activated carbon is to capture non-condensable gases (such as hydrogen).

[0041] Compressor unit 8 is used to regulate (increase or decrease) the operating pressure difference of compressor 81. Compressor unit 8 includes compressor 81, compressor control unit 82, and refrigerant pipeline 83. Compressor control unit 82 is electrically connected to compressor 81. Compressor control unit 82 controls compressor 81 to operate at low frequency during cryogenic pump operation and at high frequency during regeneration to increase the high-low pressure difference, improve the efficiency of adiabatic compression, and reduce the heating time. Refrigerant pipeline 83 is connected to the inlet and outlet ports of cryogenic pump (cylinder 22) to provide high-purity, high-pressure helium gas to cryogenic pump. The inlet and outlet ports are the inlet and outlet ports, respectively. During cryogenic pump operation at low temperature, compressor control unit 82 adjusts the operating frequency of compressor 81 through frequency converter according to the load of cryogenic pump to ensure that compressor 81 meets the operating requirements of cryogenic pump at low frequency, thereby achieving energy saving. During cryogenic pump regeneration, compressor control unit 82 increases the operating frequency of compressor 81, increases the operating pressure difference of compressor 81, improves the adiabatic compression efficiency of cryogenic pump, and accelerates the regeneration heating stage.

[0042] See Figure 3 , Figure 4 The usage method includes the following steps:

[0043] S1: The drive motor of the cryogenic pump is controlled to reverse and heat up by the control component 7, and the compressor operating frequency is adjusted by the frequency converter by the compressor control unit 82 according to the regeneration status of the cryogenic pump to increase the operating pressure difference of the compressor.

[0044] S2: During the evacuation stage of the regeneration process, purging and evacuation are performed, and a pressure rise rate test is conducted after each purging and evacuation step. Purging is achieved by opening the vent valve 231 through the control component 7 and introducing high-purity gas into the cryogenic pump to accelerate the heating of the cryogenic pump and blow out the gas adsorbed by the cryogenic pump adsorbent material 43. Evacuation is achieved by the control component 7 controlling the opening and closing of the coarse extraction valve 232 to connect and disconnect the cryogenic pump from the coarse extraction pump. During the regeneration process, the cryogenic pump is evacuated when the coarse extraction valve 232 is open.

[0045] S3: After judging the pressure rise rate test results, if qualified, repeat the steps in S2 multiple times to fully release the hydrogen adsorbed by the adsorbent material 43. By repeatedly purging and evacuating during the evacuation phase of the regeneration process, the H2 adsorbed in the pump body can be quickly removed. The H2 adsorbed in the cryogenic pump can be completely removed in a short time, replacing the purging process that requires several hours.

[0046] S4: After the hydrogen is completely discharged, the drive motor of the cryogenic pump is controlled to rotate forward to cool down via the control component 7.

[0047] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cryogenic pump device for use in a regeneration process, characterized in that, The system includes a GM refrigerator (1), a housing (2), a control unit (7), a compressor unit (8), and connecting pipes. The connecting pipes include a purge pipe and an evacuation pipe connected to the housing (2). Both the purge pipe and the evacuation pipe are equipped with control valves. The GM refrigerator (1) is located inside the housing (2). The GM refrigerator (1) includes a primary cooling platform (11), a secondary cooling platform (13), and a drive motor. Both the primary cooling platform (11) and the secondary cooling platform (13) are equipped with temperature sensors. The temperature sensors, the drive motor, and the control valves are all electrically connected to the control unit (7). The drive motor speed is adjusted according to the temperature feedback from the temperature sensors. The compressor unit (8) is used to adjust the operating pressure difference of the compressor and provide sufficient helium to the cryogenic pump to accelerate the regeneration heating stage. The connecting pipeline also includes a pressure relief pipeline, on which a pressure relief valve (233) is provided, and the pressure relief valve (233) is electrically connected to the control component (7); The housing (2) includes a pump port flange (21), a cylinder (22), and an interface (23). The GM refrigerator (1) is fixedly installed inside the housing. The cylinder (22) has a pump port flange (21) at one end and an interface (23) at the top of the cylinder (22), which is connected to the connecting pipeline. The cylinder (22) also has a pressure detector (234) and a temperature collector (235). The pressure detector (234) is used to test the pressure state inside the cryogenic pump. During the regeneration process, the pressure data is fed back to the control unit (7), and the control unit (7) adjusts the regeneration process according to the feedback pressure value. The temperature acquisition unit (235) is used to test the temperature value of the temperature sensor and feed the temperature value back to the control unit (7). The control unit (7) adjusts the regeneration process according to the feedback value. The regeneration process includes controlling the forward and reverse rotation of the drive motor to control the heating or cooling.

2. The cryogenic pump device according to claim 1, characterized in that, The compressor unit (8) includes a compressor (81), a compressor control unit (82), and a refrigerant pipeline (83). The compressor control unit (82) is electrically connected to the compressor (81), and the refrigerant pipeline (83) is connected to the inlet and outlet ports of the housing (2).

3. The cryogenic pump device according to claim 1, characterized in that, The GM refrigeration unit (1) also includes a primary cylinder (12) and a secondary cylinder (14). The primary cylinder (12) is fixedly connected to a primary cooling platform (11) at its bottom, and the secondary cylinder (14) is fixedly connected to a secondary cooling platform (13) at its bottom. The temperature sensor includes a first temperature sensor (5) and a second temperature sensor (6) respectively installed on the primary cooling platform (11) and the secondary cooling platform (13).

4. The cryogenic pump device according to claim 1, characterized in that, The control valves include a vent valve (231) and a coarse extraction valve (232). The vent valve (231) and the coarse extraction valve (232) are respectively located on the purge pipeline and the evacuation pipeline. The cylinder (22) is connected to the coarse extraction pump through the evacuation pipeline. The purge pipeline is connected to the cylinder (22) and is used to input high-purity gas to the cryogenic pump during the regeneration process.

5. A cryogenic pump device according to claim 1, characterized in that, The cylinder (22) is also provided with a first low temperature plate (3) and a second low temperature plate (4). The second low temperature plate (4) is fixedly located at the center of the cylinder (22). The first low temperature plate (3) is wrapped around the outside of the second low temperature plate (4) and is mechanically connected to the first-stage cooling platform (11).

6. A cryogenic pump device according to claim 5, characterized in that, The first low-temperature plate (3) includes a radiation-proof cold screen (31) and a baffle (32). The baffle (32) is mechanically connected to the primary cooling platform (11) via a flange. The radiation-proof cold screen (31) is fixedly installed inside the cylinder (22).

7. A cryogenic pump device according to claim 6, characterized in that, The second low-temperature plate (4) includes a heat transfer plate (41), an L-shaped low-temperature plate (42), and an adsorption material (43). The heat transfer plate (41) is fixedly installed inside the GM refrigerator (1). Multiple L-shaped low-temperature plates (42) are fixedly installed on the heat transfer plate (41), and each L-shaped low-temperature plate (42) is adhered with an adsorption material (43).

8. A method for operating the regeneration process of a cryogenic pump device as described in any one of claims 1-7, characterized in that, Includes the following steps: S1: The drive motor of the cryogenic pump is controlled to reverse and heat up by the control component (7). The compressor control unit of the compressor unit adjusts the compressor operating frequency through the frequency converter according to the regeneration state of the cryogenic pump, thereby increasing the operating pressure difference of the compressor. S2: During the evacuation phase of the regeneration process, the inside of the cryogenic pump is purged and evacuated, and the pressure rise rate is tested after one purging and evacuation step. S3: After judging the test results of the pressure rise rate, if they are qualified, repeat the steps in S2 multiple times to fully release the hydrogen adsorbed by the adsorbent material. S4: After the hydrogen is completely discharged, the drive motor of the cryogenic pump is controlled by the control components to rotate forward to cool down.

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