Automatic xenon dispensing device and method

Abstract

The present application provides a kind of automatic filling device of xenon, including filling pipeline, heat exchange pipeline, raw gas pneumatic valve, regulating valve front pressure sensor, regulating valve, regulating valve rear pressure sensor, flowmeter, replacement gas cylinder, electronic balance, vacuum pump, heating device, heat preservation device, refrigeration device, temperature sensor and heat preservation room etc.The present application also provides a method for automatic filling of xenon using the above filling device, raw gas is filled into several xenon product gas cylinders through pipeline, the product cylinders are pretreated using replacement gas and vacuum pump, the filling process is controlled using flowmeter and electronic balance, when the flow is small, raw gas cylinder is heated using heating device, product cylinder is cooled using refrigeration device, and the heat discharged by heat exchange of refrigeration device is used as heat preservation device to preserve raw gas.The present application has the advantages of high automation, high efficiency, simple structure, safety, good economic benefit, etc.

Description

TECHNICAL FIELD

[0001] The present application relates to the chemical technology field, and in particular to an automatic dispensing device and method for xenon gas. BACKGROUND

[0002] Xenon is a colorless, odorless, tasteless, inert gas, cannot burn, xenon in the air content of only 0.09*10 -6 , expensive. Can emit strong white light when electrified, so xenon is widely used in electronics, electric light industry; xenon-filled bulbs with the same power compared with the argon-filled bulbs, has high luminous efficiency, small volume, long life, power saving and other advantages. Because of its fog ability is particularly strong, often used as a fog navigation light, widely used in airports, stations, ports; xenon lamp concave spotlight can generate 2500 DEG C high temperature can be used for welding or cutting refractory metals such as titanium, molybdenum, etc.; xenon itself is non-toxic, human inhalation after the original form of discharge, but in high concentration, has the effect of suffocation, in medicine, xenon is a kind of no side effects of deep anesthetic X-ray contrast agent. In the electronic chip manufacturing industry, xenon as a kind of plasma etching gas, is used for the production of super chip, became the modern integrated circuit necessities. Xenon is also applied to flat panel television, space satellite and other fields.

[0003] Xenon as a kind of high pressure inert gas, generally in a larger steel cylinder, and the price is expensive, when the need for xenon directly with the xenon in the steel cylinder to use, not very convenient, and there are security risks, in order to solve this problem, people often use to split the gas device, xenon split to small bottle use; the existing gas dispensing device can not meet the split of xenon, and raw material waste, low precision, split xenon effect is not good, and the split efficiency is low, often have more raw material gas residue, poor efficiency.

[0004] Therefore, design a kind of automatic dispensing device and method for xenon gas to solve the above problems. SUMMARY

[0005] The technical problem to be solved by the present application is to provide an automatic dispensing device and method for preparing xenon gas, which uses an electronic balance and a flow meter to control the dispensing process of xenon gas, thereby solving the stability of the quality of the dispensed gas; when the raw material gas is insufficient and the dispensing rate decreases, heating the raw material gas and cooling the product gas are used respectively, thereby solving the problem of residual raw material gas, and improving the dispensing rate and economic benefit.

[0006] To solve the above technical problems, the technical scheme adopted by the present application is: an automatic dispensing device for xenon gas, comprising at least one raw gas cylinder, at least one first product gas cylinder, a second product gas cylinder, a displacement gas cylinder, a dispensing pipeline and a heat preservation room, the raw gas cylinder is connected with one end of the dispensing pipeline through a raw gas pipeline, a raw gas pneumatic valve is arranged on the raw gas pipeline, the other end of the dispensing pipeline is connected with a dispensing branch;

[0007] The displacement gas cylinder, the first product gas cylinder and the second product gas cylinder are connected with the dispensing branch; an adjusting valve, a dispensing pneumatic valve and a pre-adjusting valve pressure sensor are arranged on the dispensing pipeline in sequence; an adjusting valve post pressure sensor and a safety valve are arranged on the dispensing branch; a vacuum pipeline is connected with the dispensing pipeline between the pre-adjusting valve pressure sensor and the adjusting valve, one end of the vacuum pipeline is connected with a vacuum pump;

[0008] One side of the raw gas cylinder is provided with a heat preservation device, one side of the displacement gas cylinder is provided with a refrigeration device, the heat preservation device is connected with the refrigeration device through a heat exchange pipeline; the heat preservation room is divided into a raw material area and a product area, a heating device is arranged at the bottom of the raw gas cylinder.

[0009] Preferably, the displacement gas cylinder is connected with the dispensing branch through a displacement gas branch, a displacement gas pneumatic valve is arranged on the displacement gas branch; a vacuum pneumatic valve is arranged on the vacuum pipeline.

[0010] Preferably, the first product gas cylinder is connected with the dispensing branch through a first product gas pipeline.

[0011] Preferably, an electronic balance is arranged at the bottom of the second product gas cylinder, the second product gas cylinder is connected with the dispensing branch through a second product gas pipeline, a flow meter is arranged on the second product gas pipeline.

[0012] Preferably, temperature sensors are arranged in the raw material area and the product area, the raw gas cylinder, the heating device, the heat preservation device and the raw gas pneumatic valve are located in the raw material area, the refrigeration device, the displacement gas cylinder, the first product gas cylinder, the second product gas cylinder, the dispensing pneumatic valve, the adjusting valve post pressure sensor, the flow meter, the safety valve, the displacement gas pneumatic valve and the electronic balance are located in the product area.

[0013] Preferably, the raw gas pneumatic valve, the dispensing pneumatic valve, the displacement gas pneumatic valve and the vacuum pneumatic valve are all stainless steel pneumatic diaphragm valves, and the flow meter is a mass flow meter.

[0014] The present application also provides an automatic dispensing method for xenon gas using the above dispensing device, which comprises the following steps:

[0015] S1, pretreating the first product gas cylinder and the second product gas cylinder;

[0016] S2, after the pretreatment in S1, pressurizing and leak detecting the filling device;

[0017] S3, after the pressurizing and leak detecting in S2, reading the weight of the second product gas cylinder on the electronic balance;

[0018] S4, opening the raw gas pneumatic valve and the filling pneumatic valve, filling the xenon gas in the raw gas cylinder into the first product gas cylinder and the second product gas cylinder through the filling pipeline, and controlling the opening degree of the regulating valve to be maximum, when the filling amount of the xenon gas reaches a certain weight in the product gas cylinder, determining the opening degree of the regulating valve according to the filling amount of the xenon gas, accurately controlling the filling xenon gas flow to reach the set flow of the flowmeter, and slowly filling the xenon gas into the first product gas cylinder to improve the control precision of the filled xenon gas quality;

[0019] The method for determining the opening degree of the regulating valve according to the filling amount of the xenon gas is as follows: when the filling amount of the xenon gas reaches 80% of the weight of the second product gas cylinder, and the remaining 20% of the weight of the second product gas cylinder is greater than 500g, setting the flow of the flowmeter to be 20g / s; when the filling amount of the xenon gas reaches 90% of the weight of the second product gas cylinder, setting the flow of the flowmeter to be 10g / s; when the remaining filling amount of the xenon gas is less than or equal to 500g, setting the flow of the flowmeter to be 10g / s;

[0020] S5, when the filling rate decreases due to the insufficient xenon gas in the raw gas cylinder, reading the flow of the flowmeter, and opening the heating device, the heat preservation device and the refrigeration device to improve the filling rate; when the temperature sensors in the raw material area and the product area reach the respective set temperatures, closing the heating device, the heat preservation device and the refrigeration device;

[0021] The set temperature of the temperature sensor in the raw material area is 40-60℃, and the set temperature of the temperature sensor in the product area is -20-0℃.

[0022] Preferably, the method for the pretreatment in S1 is as follows: closing the raw gas pneumatic valve, opening the displacement gas pneumatic valve to displace the filling device with the displacement gas, and then opening the vacuum pneumatic valve to remove residual gas by vacuumizing the filling pipeline with the vacuum pump.

[0023] Preferably, the pressure maintaining leak detection in S2 adopts positive and negative pressure maintaining method, and the method of the pressure maintaining leak detection is as follows: the dispensing pipeline is vacuumized by the vacuum pump to a pressure of ≤50 Pa, whether the dispensing pipeline appears a leakage condition is judged by the pre-regulating valve pressure sensor and the post-regulating valve pressure sensor, then the displacement gas pneumatic valve is opened, displacement gas is introduced into the dispensing pipeline, the pressure of the dispensing pipeline is ≥10 MPa, whether the dispensing pipeline appears a leakage condition is judged by the pre-regulating valve pressure sensor and the post-regulating valve pressure sensor, and the leak detection is completed.

[0024] Preferably, the displacement gas is 6N nitrogen.

[0025] Compared with the prior art, the present application has the following advantages:

[0026] The present application uses an electronic balance and a flow meter to control the dispensing process of xenon gas, solves the stability of the quality of the dispensed gas, when the raw material gas is insufficient and the dispensing rate is reduced, respectively uses the methods of heating the raw material gas and cooling the product gas, solves the problem of residual raw material bottom gas, and thus improves the dispensing rate and economic benefits.

[0027] The present application will be further described in detail below in combination with the drawings and examples. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a structural schematic view of the dispensing device of the present application.

[0029] EXPLANATION OF REFERENCE NUMERALS:

[0030] 1 - dispensing pipeline; 2 - heat exchange pipeline; 3 - raw material gas pneumatic valve; 4 - pre-regulating valve pressure sensor; 5 - regulating valve; 6 - dispensing pneumatic valve; 7 - post-regulating valve pressure sensor; 8 - flow meter; 9 - safety valve; 10 - displacement gas pneumatic valve; 11 - displacement gas cylinder; 12 - electronic balance; 13 - vacuum pneumatic valve; 14 - vacuum pump; 15 - heating device; 16 - heat preservation device; 17 - refrigeration device; 18 - temperature sensor; 19 - heat preservation room; 20 - raw material gas cylinder; 21 - first product gas cylinder; 22 - second product gas cylinder. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application.

[0032] Example 1

[0033] As Figure 1As shown, the automatic dispensing device for xenon gas of the embodiment comprises two raw gas cylinders 20, four first product gas cylinders 21, one second product gas cylinder 22, a displacement gas cylinder 11, a dispensing pipeline 1 and a heat preservation room 19. Both of the raw gas cylinders 20 are connected with one end of the dispensing pipeline 1 through a raw gas pipeline, and a raw gas pneumatic valve 3 is arranged on the raw gas pipeline. The other end of the dispensing pipeline 1 is connected with a dispensing branch. The displacement gas cylinder 11, the four first product gas cylinders 21 and the second product gas cylinder 22 are connected with the dispensing branch. A pre-adjusting valve pressure sensor 4, an adjusting valve 5 and a dispensing pneumatic valve 6 are arranged on the dispensing pipeline 1 in sequence, and the dispensing pneumatic valve 6 is close to the other end of the dispensing pipeline 1. An adjusting valve post-pressure sensor 7 and a safety valve 9 are arranged on the dispensing branch. A vacuum pipeline is connected with the dispensing pipeline 1 between the pre-adjusting valve pressure sensor 4 and the adjusting valve 5, and one end of the vacuum pipeline is connected with a vacuum pump 14. The four first product gas cylinders 21 and the second product gas cylinder 22 are completely consistent in specification.

[0034] Heating devices 15 are arranged at the bottom of the two raw gas cylinders 20, a heat preservation device 16 is arranged on one side of one of the raw gas cylinders 20, and a refrigeration device 17 is arranged on one side of the displacement gas cylinder 11. The heat preservation device 16 is connected with the refrigeration device 17 through a heat exchange pipeline 2.

[0035] The displacement gas cylinder 11 is connected with one end of the dispensing branch through a displacement gas branch, and a displacement gas pneumatic valve 10 is arranged on the displacement gas branch. The first product gas cylinder 21 is connected with the dispensing branch through a first product gas pipeline. An electronic balance 12 is arranged at the bottom of the second product gas cylinder 22, and the second product gas cylinder 22 is connected with the other end of the dispensing branch through a second product gas pipeline. A flow meter 8 is arranged on the second product gas pipeline. The adjusting valve post-pressure sensor 7 is close to one end of the dispensing branch, and the safety valve 9 is close to the other end of the dispensing branch.

[0036] Temperature sensors 18 are arranged in the raw material area and the product area. The raw gas cylinder 20, the heating device 15, the heat preservation device 16 and the raw gas pneumatic valve 3 are located in the raw material area, and the refrigeration device 17, the displacement gas cylinder 11, the first product gas cylinder 21, the second product gas cylinder 22, the dispensing pneumatic valve 6, the adjusting valve post-pressure sensor 7, the flow meter 8, the safety valve 9, the displacement gas pneumatic valve 10 and the electronic balance 12 are located in the product area. The temperature sensor 18 in the raw material area is interlocked with the heating device 15 and the refrigeration device 17. Both of the temperature sensors 18 have DCS remote transmission and temperature interlocking.

[0037] In the embodiment, the raw gas pneumatic valve 3, the dispensing pneumatic valve 6, the displacement gas pneumatic valve 10 and the vacuum pneumatic valve 13 are all stainless steel pneumatic diaphragm valves, and the flow meter 8 is a mass flow meter.

[0038] In the embodiment, the electronic balance 12 is an ultra-high precision electronic scale; the vacuum pump 14 is a two-stage vacuum pump with a high vacuum degree of 1x10 -5 Pa, the pre-regulator pressure sensor 4 and the post-regulator pressure sensor 7 are both high-precision vacuum pressure sensors with a range of -0.1-40 MPa and an accuracy of ±0.075%, and are respectively connected with the DCS system.

[0039] In the embodiment, the dispensing pipeline 1 and the vacuum pipeline are both stainless steel 316L electrolytic polishing pipelines with a size of 1 / 2 inch or 1 / 8 inch; the vacuum control valve 13 and the vacuum pump 14 are connected by a DN50 corrugated pipe valve; the pipeline between the displacement gas pneumatic valve 10 and the first product gas cylinder 21 and the second product gas cylinder 22 is a 1 / 8 inch pipeline.

[0040] In the embodiment, the raw gas pneumatic valve 3, the pre-regulator pressure sensor 4, the dispensing pneumatic valve 6, the post-regulator pressure sensor 7, the flow meter 8, the displacement gas pneumatic valve 10, the electronic balance 12, the vacuum pneumatic valve 13, the vacuum pump 14, the heating device 15, the heat preservation device 16, the refrigeration device 17 and the temperature sensor 18 are all remotely and automatically controlled by the DCS.

[0041] Embodiment 2

[0042] The embodiment adopts the dispensing device in Embodiment 1 to perform an automatic dispensing method of xenon gas, which comprises the following steps:

[0043] S1, pretreating the first product gas cylinder 21 and the second product gas cylinder 22;

[0044] The pretreating method is: closing the displacement gas pneumatic valve 10 and the raw gas pneumatic valve 3, opening the vacuum pneumatic valve 13, and using the vacuum pump 14 to pump the dispensing pipeline 1 to vacuum to remove residual gas; the displacement gas is 6N nitrogen;

[0045] S2, after the pretreating in S1 is completed, using the DCS to control the raw gas pneumatic valve 3, the dispensing pneumatic valve 6, the displacement gas pneumatic valve 10 and the vacuum pneumatic valve 13, etc., to perform pressure maintaining and leak detection on the dispensing device.

[0046] The pressure maintaining leak detection adopts positive and negative pressure maintaining method, the method of the pressure maintaining leak detection is that the vacuum pump 14 is used to vacuumize the sub-packaging pipeline 1 to a pressure of ≤50 Pa, whether the sub-packaging pipeline 1 appears a leakage condition is judged through the regulating valve front pressure sensor 4 and the regulating valve rear pressure sensor 7, then the displacement gas pneumatic valve 10 is opened, displacement gas is introduced into the sub-packaging pipeline 1, the pressure of the sub-packaging pipeline 1 is ≥10 MPa, whether the sub-packaging pipeline 1 appears a leakage condition is judged through the regulating valve front pressure sensor 4 and the regulating valve rear pressure sensor 7, and the leak detection is completed;

[0047] S3, after the pressure maintaining leak detection in S2 is completed, the weight of the second finished gas cylinder 22 on the electronic balance 12 is read by the DCS;

[0048] S4, the raw material gas pneumatic valve 3 and the sub-packaging pneumatic valve 6 are opened, xenon gas in the raw material gas cylinder 20 is sub-packaged into the first finished gas cylinder 21 and the second finished gas cylinder 22 through the sub-packaging pipeline 1, meanwhile, the opening degree of the regulating valve 5 is controlled to be maximum by the DCS, the opening degree of the regulating valve 5 is determined according to the introduction amount of the xenon gas, the xenon gas flow is accurately controlled to reach the set flow of the flowmeter 8, the xenon gas slowly enters the first finished gas cylinder 21, and the control precision of the xenon gas quality is improved;

[0049] The method of determining the opening degree of the regulating valve 5 according to the introduction amount of the xenon gas is that when the introduction amount of the xenon gas reaches 80% of the weight of the second finished gas cylinder 22, and the remaining 20% of the weight of the second finished gas cylinder 22 is >500 g, the flow of the flowmeter 8 is set to be 20 g / s; when the introduction amount of the xenon gas reaches 90% of the weight of the second finished gas cylinder 22, the flow of the flowmeter 8 is set to be 10 g / s; when the remaining introduction amount of the xenon gas is ≤500 g, the flow of the flowmeter 8 is set to be 10 g / s;

[0050] S5, when the xenon gas in the raw material gas cylinder 20 is insufficient and the sub-packaging rate decreases, the sub-packaging rate is increased by reading the gas flow of the flowmeter 8 and automatically controlling the opening of the heating device 15, the heat preservation device 16 and the refrigeration device 17 by the DCS, when the temperature of the temperature sensor 18 in the raw material area is 50℃ and the temperature of the temperature sensor 18 in the finished product area is -10℃, the heating device 15, the heat preservation device 16 and the refrigeration device 17 are closed by using temperature DCS remote transmission and interlocking, the raw material gas pneumatic valve 3 is opened, and the sub-packaging is continued.

[0051] In this embodiment, the temperature sensor 18 in the raw material area can also have a temperature of 40℃, 60℃, 45℃, 55℃, or 44℃, etc.; the temperature sensor 18 in the finished product area can also have a temperature of 0℃, -20℃, -15℃, -5℃, or -9℃, etc.

[0052] The above is only a preferred embodiment of the present application, and does not limit the present application. Any simple modification, change, and equivalent change of the above embodiment according to the technical essence of the present application are still within the protection scope of the technical solution of the present application.

Claims

1. An automatic xenon gas dispensing device, characterized in that, The system includes at least one raw material gas cylinder (20), at least one first finished product gas cylinder (21), a second finished product gas cylinder (22), a replacement gas cylinder (11), a dispensing pipeline (1), and an insulation room (19). The raw material gas cylinder (20) is connected to one end of the dispensing pipeline (1) through the raw material gas pipeline. A raw material gas pneumatic valve (3) is provided on the raw material gas pipeline. The other end of the dispensing pipeline (1) is connected to a dispensing branch. A pressure sensor (4) before the regulating valve, a regulating valve (5), and a dispensing pneumatic valve (6) are sequentially provided on the dispensing pipeline (1). A vacuum pipeline is connected to the dispensing pipeline (1) located between the pressure sensor (4) before the regulating valve and the regulating valve (5). A vacuum pump (14) is connected to one end of the vacuum pipeline. The displacement gas cylinder (11), the first finished gas cylinder (21), and the second finished gas cylinder (22) are all connected to the dispensing branch; the dispensing branch is equipped with a pressure sensor (7) after the regulating valve and a safety valve (9); a heat preservation device (16) is provided on one side of the raw material gas cylinder (20), and a refrigeration device (17) is provided on one side of the displacement gas cylinder (11). The heat preservation device (16) is connected to the refrigeration device (17) through a heat exchange pipe (2); the heat preservation room (19) is divided into a raw material area and a finished product area, and a heating device (15) is provided at the bottom of the raw material gas cylinder (20). The displacement gas cylinder (11) is connected to the dispensing branch through the displacement gas branch, and a displacement gas pneumatic valve (10) is provided on the displacement gas branch; a vacuum pneumatic valve (13) is provided on the vacuum pipeline. The first finished gas cylinder (21) is connected to the dispensing branch through the first finished gas pipeline; An electronic balance (12) is provided at the bottom of the second finished gas cylinder (22). The second finished gas cylinder (22) is connected to the dispensing branch through the second product gas pipeline. A flow meter (8) is provided on the second product gas pipeline. Temperature sensors (18) are installed in both the raw material area and the finished product area. The raw material gas cylinder (20), heating device (15), heat preservation device (16) and raw material gas pneumatic valve (3) are located in the raw material area. The refrigeration device (17), displacement gas cylinder (11), first finished product gas cylinder (21), second finished product gas cylinder (22), dispensing pneumatic valve (6), regulating valve downstream pressure sensor (7), flow meter (8), safety valve (9), displacement gas pneumatic valve (10) and electronic balance (12) are located in the finished product area. The temperature sensor (18) in the raw material area is interlocked with the heating device (15) and the cooling device (17); both temperature sensors (18) have DCS remote transmission and temperature interlock. The raw material gas pneumatic valve (3), the pressure sensor before the regulating valve (4), the dispensing pneumatic valve (6), the pressure sensor after the regulating valve (7), the flow meter (8), the replacement gas pneumatic valve (10), the electronic balance (12), the vacuum pneumatic valve (13), the vacuum pump (14), the heating device (15), the heat preservation device (16), the refrigeration device (17), and the temperature sensor (18) are all remotely and automatically controlled by DCS.

2. The automatic xenon dispensing device according to claim 1, characterized in that, The raw material gas pneumatic valve (3), the dispensing pneumatic valve (6), the replacement gas pneumatic valve (10) and the vacuum pneumatic valve (13) are all stainless steel pneumatic diaphragm valves, and the flow meter (8) is a mass flow meter.

3. An automatic method for dispensing xenon gas using a dispensing device as described in any one of claims 1-2, characterized in that, The method includes the following steps: S1. Pre-process the first finished gas cylinder (21) and the second finished gas cylinder (22); After the pretreatment in S2 and S1 is completed, the dispensing device is subjected to pressure holding and leak detection. After the pressure test and leak detection in S3 and S2 are completed, the weight of the second finished gas cylinder (22) on the electronic balance (12) is read. S4. Open the raw material gas pneumatic valve (3) and the dispensing pneumatic valve (6) to dispense the xenon gas in the raw material gas cylinder (20) into the first finished gas cylinder (21) and the second finished gas cylinder (22) through the dispensing pipeline (1). At the same time, control the opening of the regulating valve (5) to the maximum. When the xenon gas flow reaches a certain weight in the first finished gas cylinder (21), determine the opening of the regulating valve (5) to accurately control the dispensing xenon gas flow rate to reach the set flow rate of the flow meter (8), so that the xenon gas slowly enters the first finished gas cylinder (21) and improves the control accuracy of the filling xenon gas quality. The method for determining the opening degree of the regulating valve (5) based on the xenon gas flow rate is as follows: when the xenon gas flow rate reaches 80% of the weight of the second finished gas cylinder (22) and the remaining 20% ​​weight of the second finished gas cylinder (22) is >500g, the flow rate of the flow meter (8) is set to 20g / s; when the xenon gas flow rate reaches 90% of the weight of the second finished gas cylinder (22), the flow rate of the flow meter (8) is set to 10g / s; when the remaining xenon gas flow rate is ≤500g, the flow rate of the flow meter (8) is set to 10g / s. S5. When the xenon gas in the raw material gas cylinder (20) is insufficient and the dispensing rate decreases, the heating device (15), the heat preservation device (16) and the cooling device (17) are turned on by reading the flow rate of the flow meter (8) to increase the dispensing rate; when the temperature sensor (18) in the raw material area and the temperature sensor (18) in the finished product area reach their respective set temperatures, the heating device (15), the heat preservation device (16) and the cooling device (17) are turned off.

4. The automatic xenon gas dispensing method according to claim 3, characterized in that, The pretreatment method described in S1 is as follows: close the raw material gas pneumatic valve (3), open the replacement gas pneumatic valve (10) to replace the dispensing device with the replacement gas, then open the vacuum pneumatic valve (13) and use the vacuum pump (14) to evacuate the dispensing pipeline (1) to a vacuum to remove residual gas.

5. The automatic xenon gas dispensing method according to claim 4, characterized in that, The pressure holding and leak detection method described in S2 adopts the positive and negative pressure holding method. The pressure holding and leak detection method is as follows: the vacuum pump (14) is used to evacuate the dispensing pipeline (1) to a pressure ≤50Pa. The pressure sensor (4) before the regulating valve and the pressure sensor (7) after the regulating valve are used to determine whether there is a leak in the dispensing pipeline (1). Then, the pneumatic valve (10) for displacement gas is opened to introduce displacement gas into the dispensing pipeline (1) so that the pressure of the dispensing pipeline (1) is ≥10MPa. The pressure sensor (4) before the regulating valve and the pressure sensor (7) after the regulating valve are used to determine whether there is a leak in the dispensing pipeline (1) and the leak detection is completed.

6. The automatic xenon gas dispensing method according to claim 5, characterized in that, The replacement gas is 6N nitrogen.

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