Substrate flipping and conveying device and substrate processing device

Abstract

This invention provides a substrate flipping and conveying device comprising a clamping mechanism, a moving mechanism, and a reversing mechanism. The clamping mechanism is used to clamp the substrate. The moving mechanism drives the clamping mechanism to move back and forth between a contact position with the substrate and a retraction position away from the substrate. The reversing mechanism includes a rotating shaft and a rotating connecting mechanism. One end of the rotating connecting mechanism is connected to the clamping mechanism, and the other end is connected to the rotating shaft. The rotating connecting mechanism drives the clamping mechanism to rotate around the rotating shaft, thereby reversing the substrate and moving the central axis of the substrate from a first position to a second position. This integrates substrate reversal and substrate conveying, allowing the substrate to be eccentrically reversed while also being transported with a certain displacement, which helps to form a transition connection and facilitates smooth cooperation with other processing devices to complete subsequent processes. This invention also provides a substrate processing device.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a substrate flipping and conveying device and a substrate processing device. Background Technology

[0002] In the manufacturing process of semiconductor substrates (hereinafter referred to as "substrate"), various processes are performed on the substrate. For example, the surface and back of the substrate are processed. In this substrate processing apparatus, the substrate with its surface facing up is moved from the carrier into the reversing path, reversed in the reversing path, and then conveyed to the processing unit. The substrate that has undergone back-side processing in the processing unit is moved back into the reversing path for reversal and then conveyed to the carrier.

[0003] Chinese Patent Publication No. CN109560031A discloses a substrate reversing device, a substrate processing device, and a substrate clamping device. In the substrate reversing device, multiple lower guide members, with their downwardly inclined surfaces extending inwards along the width direction of the substrate, contact the peripheral portion of the horizontally positioned substrate and support it from below. Multiple upper guide members, with their upwardly inclined surfaces extending inwards along the width direction, contact the peripheral portion of the substrate and clamp the substrate between themselves and the multiple lower guide members. The reversing mechanism reverses the substrate held by the multiple lower and upper guide members by rotating them around a horizontally oriented rotation axis. However, the substrate reversing device in this patent can only reverse the substrate by rotating it around a horizontally oriented rotation axis. That is, the substrate remains in the same position before and after reversal, without any positional change or movement. An additional substrate conveying unit is required to achieve substrate conveying and movement. Separating substrate reversal and substrate conveying not only leads to a complex structure but also cumbersome operation and high investment costs.

[0004] Therefore, it is necessary to provide a novel substrate flipping and conveying device and substrate processing device to solve the above-mentioned problems existing in the prior art. Summary of the Invention

[0005] The purpose of this invention is to provide a substrate flipping and conveying device and a substrate processing device, so as to integrate substrate flipping and substrate handling into one unit, so that the substrate can be eccentrically flipped while also being transported with a certain displacement, which helps to form a transition connection and facilitates cooperation with other processing devices to smoothly complete subsequent processes.

[0006] To achieve the above objectives, the substrate flipping and conveying device of the present invention includes:

[0007] Clamping mechanism, used to clamp the substrate;

[0008] A moving mechanism drives the clamping mechanism to move forward and backward between a contact position in contact with the substrate and a retraction position away from the substrate;

[0009] The reversing mechanism includes a rotating shaft and a rotating connecting mechanism. One end of the rotating connecting mechanism is connected to the clamping mechanism, and the other end of the rotating connecting mechanism is connected to the rotating shaft. The rotating connecting mechanism drives the clamping mechanism to rotate around the rotating shaft, so as to reverse the substrate and move the central axis of the substrate from a first position to a second position.

[0010] The beneficial effects of the substrate flipping and conveying device of the present invention are as follows: the flipping mechanism includes a rotating shaft and a rotating connecting mechanism. One end of the rotating connecting mechanism is connected to the clamping mechanism, and the other end of the rotating connecting mechanism is connected to the rotating shaft. The rotating connecting mechanism drives the clamping mechanism to rotate around the rotating shaft, so that the substrate is flipped and the central axis of the substrate moves from the first position to the second position. This allows the substrate to achieve eccentric flipping while also transferring a certain displacement, which helps to form a transition connection and facilitates smooth completion of subsequent processes in cooperation with other processing devices. The flipping mechanism of the present invention integrates substrate flipping and substrate conveying, which is not only simple in structure, but also eliminates the need to perform flipping and conveying in two steps, making operation convenient and greatly reducing investment costs.

[0011] Preferably, the rotary connecting mechanism includes a connecting arm and a telescopic component, the connecting arm and the telescopic component being connected. The length of the connecting arm is adjusted via the telescopic component to transport the substrate to a preset position. Its advantages are: by adjusting the length of the connecting arm via the telescopic component, the distance between the clamping mechanism and the rotating shaft can be adjusted, thereby making the distance between the first position and the second position adjustable. This allows for adjustment of the substrate transport distance and autonomous control, facilitating smooth integration with other processing devices to complete subsequent processes.

[0012] Preferably, the reversing mechanism further includes a driving mechanism that drives at least one of the rotary connecting mechanism and the rotary shaft to rotate, so that the rotary connecting mechanism drives the clamping mechanism to rotate around the rotary shaft.

[0013] Preferably, the clamping mechanism includes a first clamping component and a second clamping component, which clamp the substrate at its periphery. The rotary connecting mechanism includes a first rotary connecting component and a second rotary connecting component. One end of the rotating shaft is movably connected to the first rotary connecting component located on the same side as the first end, and the other end of the rotating shaft is movably connected to the second rotary connecting component located on the same side as the first end. The first rotary connecting component is connected to the first clamping component, and the second rotary connecting component is connected to the second clamping component. The first rotary connecting component and the second rotary connecting component respectively drive the first clamping component and the second clamping component to rotate synchronously around the rotating shaft. Its advantage is that it enables more stable clamping of the substrate for reversing and transporting.

[0014] Preferably, both the first clamping assembly and the second clamping assembly include a fixing component. The fixing component includes a lower guide fixing component, an upper guide fixing component, and a fixing support component. The lower guide fixing component and the upper guide fixing component are movably connected to the fixing support component. The fixing support component of the first clamping assembly is fixedly connected to the first rotary connecting assembly, and the fixing support component of the second clamping assembly is fixedly connected to the second rotary connecting assembly. The advantage of this is that it facilitates the rotary connecting mechanism in driving the clamping mechanism to rotate.

[0015] Preferably, both the first clamping assembly and the second clamping assembly include a plurality of lower guide members and a plurality of upper guide members. The plurality of lower guide members contact the periphery of the substrate and support the substrate from below. The plurality of lower guide members are fixedly disposed on the lower guide member fixing assembly. The plurality of upper guide members contact the periphery of the substrate and clamp the substrate with the lower guide members. The plurality of upper guide members are fixedly disposed on the upper guide member fixing assembly. The advantages are: to achieve more stable clamping of the substrate; and because the plurality of lower guide members are fixedly disposed on the lower guide member fixing assembly and the plurality of upper guide members are fixedly disposed on the upper guide member fixing assembly, it is easier and more convenient to adjust the lower and upper guide members uniformly.

[0016] Preferably, the moving mechanism includes a first gripper assembly, a second gripper assembly, a third gripper assembly, and a fourth gripper assembly; the first gripper assembly is connected to the lower guide fixing assembly in the first clamping assembly to control the lower guide in the first clamping assembly to move forward and backward between the contact position and the retraction position; the second gripper assembly is connected to the upper guide fixing assembly in the first clamping assembly to control the upper guide in the first clamping assembly to move forward and backward between the contact position and the retraction position; the third gripper assembly is connected to the lower guide fixing assembly in the second clamping assembly to control the lower guide in the second clamping assembly to move forward and backward between the contact position and the retraction position; the fourth gripper assembly is connected to the upper guide fixing assembly in the second clamping assembly to control the upper guide in the second clamping assembly to move forward and backward between the contact position and the retraction position. Its beneficial effect is that it enables the lower guide member in the first clamping assembly, the upper guide member in the first clamping assembly, the lower guide member in the second clamping assembly, and the upper guide member in the second clamping assembly to move forward and backward between the contact position and the retraction position, thereby preventing damage to the substrate due to misoperation.

[0017] Preferably, the clamping mechanism further includes a switching mechanism connected to at least one of the lower guide fixing assembly and the upper guide fixing assembly, allowing the lower guide fixing assembly and the upper guide fixing assembly to slide relative to each other to change the contact state between the lower guide and the upper guide and the substrate. The lower guide includes a first lower contact area and a second lower contact area that selectively contact the substrate by switching via the switching mechanism. The upper guide includes a first upper contact area and a second upper contact area that selectively contact the substrate by switching via the switching mechanism. The advantages are that it allows the substrate before and after cleaning to be clamped through the different contact areas of the lower and upper guides, thereby preventing dirt and dust from the untreated substrate from adhering to the treated substrate through the contact areas of the upper and lower guides. Furthermore, the connection of the switching mechanism to at least one of the lower and upper guide fixing assemblies allows the lower and upper guide fixing assemblies to slide relative to each other, making it simpler and more convenient to change the contact state between the lower and upper guides and the substrate.

[0018] Preferably, the contact surface between the lower guide member and the substrate and the contact surface between the upper guide member and the substrate both include a first end face and a second end face, wherein the second end face protrudes outward relative to the first end face. This has the advantage of achieving a more stable clamping of the substrate.

[0019] Preferably, the upper guide member is positioned differently from the lower guide member in a top view. This has the advantage of providing a more stable clamping effect on the substrate.

[0020] Preferably, the clamping mechanism further includes a fixed bracket, with the fixed support members of the first clamping assembly and the second clamping assembly respectively fixedly connected to its two ends. This improves the stability of the clamping mechanism and prevents damage to the substrate during substrate reversal and transport.

[0021] Preferably, a substrate processing apparatus is also provided, comprising:

[0022] The aforementioned substrate flipping and conveying device;

[0023] A back-side cleaning unit that cleans the back side of the substrate that has been reversed by the substrate flipping and conveying device; and

[0024] A substrate conveying unit that transports the substrate between the substrate flipping and conveying device and the back cleaning unit.

[0025] The beneficial effects of the substrate processing apparatus of the present invention are as follows: The substrate flipping and conveying device enables the substrate to undergo eccentric reversal while simultaneously transferring a certain displacement, facilitating the formation of a transitional connection and enabling smooth coordination with other processing devices to complete subsequent processes. The reversal mechanism in this invention integrates substrate reversal and substrate handling, resulting in a simple structure and eliminating the need for separate reversal and handling steps, thus simplifying operation and significantly reducing investment costs. The back-side cleaning unit cleans the back side of the substrate flipped by the substrate flipping and conveying device, and the substrate conveying unit transports the substrate between the substrate flipping and conveying device and the back-side cleaning unit, enabling continuous operation between processing stations and facilitating faster and smoother completion of each processing step. Attached Figure Description

[0026] Figure 1 This is a top view of the substrate flipping and conveying device according to an embodiment of the present invention;

[0027] Figure 2 for Figure 1 A schematic diagram showing the reverse conveying effect of the substrate flipping and conveying device.

[0028] Figure 3 This is a schematic diagram of the assembly of the clamping mechanism and the substrate in the substrate flipping and conveying device according to an embodiment of the present invention.

[0029] Figure 4 for Figure 3 Enlarged structural diagram at point A;

[0030] Figure 5 for Figure 3 Enlarged schematic diagram of the structure at point B. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0032] To overcome the problems existing in the prior art, embodiments of the present invention provide a substrate flipping and conveying device, including a clamping mechanism, a moving mechanism, and a reversing mechanism. The clamping mechanism is used to clamp the substrate; the moving mechanism drives the clamping mechanism to move back and forth between a contact position in contact with the substrate and a retraction position away from the substrate; the reversing mechanism includes a rotating shaft and a rotating connecting mechanism. One end of the rotating connecting mechanism is connected to the clamping mechanism, and the other end of the rotating connecting mechanism is connected to the rotating shaft. The rotating connecting mechanism drives the clamping mechanism to rotate around the rotating shaft, so that the substrate is reversed and the central axis of the substrate moves from a first position to a second position.

[0033] In some embodiments of the present invention, the rotary connection mechanism includes a connecting arm and a telescopic component. The connecting arm and the telescopic component are connected. The length of the connecting arm is adjusted by the telescopic component to transport the substrate to a preset position. That is, the distance between the clamping mechanism and the rotating shaft is adjusted by adjusting the length of the connecting arm by the telescopic component, thereby making the distance between the first position and the second position adjustable. In other words, the distance of substrate transport can be adjusted and can be autonomously controlled, which is beneficial for cooperating with other processing devices to smoothly complete subsequent processes.

[0034] In some specific embodiments of the present invention, the connecting arm in the rotary connecting mechanism includes a telescopic rod body, which includes an outer telescopic rod and an inner telescopic rod. The telescopic assembly includes a lead screw and a stepper motor. Both the outer and inner telescopic rods are hollow. The outer diameter of the inner telescopic rod is smaller than the inner diameter of the outer telescopic rod. The bottom of the outer telescopic rod is closed and connected to the rotating shaft, while the top of the outer telescopic rod is open. The inner telescopic rod is disposed inside the outer telescopic rod, and its top extends through the top opening of the outer telescopic rod and away from the top opening, connecting to the clamping mechanism. The bottom end of the inner telescopic rod is threadedly connected to the lead screw via a mounting part. The stepper motor is disposed at the bottom of the outer telescopic rod. The output shaft at the upper end of the stepper motor is fixedly connected to the bottom of the lead screw via a coupling. The lead screw rotates and extends or shortens under the drive of the stepper motor, thereby causing the inner telescopic rod to extend longer away from the top opening or retract shorter towards the top opening. The rotary connecting mechanism in this embodiment has the characteristics of simple structure, high telescopic accuracy, and safety and reliability. The driving component in the telescopic assembly can also be a rotary cylinder, etc.

[0035] In other specific embodiments of the present invention, the connecting arm in the rotary connecting mechanism is inserted into the lower end of the telescopic assembly and reciprocates in the up-down direction. The telescopic assembly includes a protective shell, a motor, a worm gear, a worm, and a bearing. The protective shell has a cavity, and the motor is fixedly connected to the inner wall of the cavity. The motor is connected to a power circuit, and a rotating shaft is provided on the motor. The worm gear is inserted into the rotating shaft and rotates with it. The lower end of the protective shell has an insertion groove communicating with the cavity. The bearing is fixedly installed on the upper end of the inner wall of the cavity, and the bearing's axis reciprocates in the up-down direction. The worm gear is oriented in a specific direction. The upper end of the worm passes through a slot and is fixedly connected to the inner wall of the bearing. The teeth on the outer wall of the worm gear mesh with the teeth on the outer wall of the worm wheel to form a transmission engagement. The connecting arm is inserted into the slot and reciprocates in the up-down direction. The connecting arm includes an outer telescopic rod and an inner telescopic rod. The inner telescopic rod is sleeved on the lower end of the worm, and the inner wall of the inner telescopic rod is screwed tightly onto the teeth on the outer wall of the worm. The outer telescopic rod is sleeved on the lower end of the inner telescopic rod, and its upper end is inserted into the slot for engagement. The outer wall of the outer telescopic rod has a groove for... A limiting base is provided along its length and is fixedly connected to an outer telescopic rod. The length of the limiting base is equal to the length of the outer telescopic rod. The upper end of the limiting base and the outer telescopic rod are inserted into a locking groove for engagement. A first sliding groove is provided on the side of the limiting base facing the outer telescopic rod. The length of the first sliding groove is the same as the length of the limiting base. The first sliding groove passes through the outer wall of the outer telescopic rod and communicates with its interior. A limiting strip is provided within the first sliding groove, reciprocating along its length. The limiting strip is fixedly connected to the outer wall of the inner telescopic rod. A magnet is provided on the side of the limiting base facing the limiting strip. The magnet is embedded in the limiting strip. A first Hall sensor is embedded on the upper end of the first sliding groove facing the limiting strip. A second sliding groove is provided on the outer wall of the limiting base facing away from the limiting strip. The second sliding groove is connected to the first sliding groove. A sliding block is provided on the sliding groove and slides with it. A second Hall sensor is fixedly connected to the sliding block in the first sliding groove. The second Hall sensor and the first Hall sensor are spaced apart. The first Hall sensor and the second Hall sensor are electrically connected to the motor.The motor has a built-in chip that sends a signal to stop the motor. In use, starting the motor causes the rotating shaft to rotate, which in turn drives the worm gear. The worm gear drives the worm to rotate in a "worm gear and worm" manner. Because the inner telescopic rod is tightly fitted to the worm and engages with the first sliding groove on the limiting base via a limiting strip, the inner telescopic rod moves downwards along the worm gear axis, preventing it from rotating. When the magnet on the limiting strip passes the second Hall sensor, the magnet generates electricity, and the second Hall sensor sends a signal to the chip on the motor. The chip then sends a command to the motor to stop it. At this time, the sliding block moves the second Hall sensor, controlling the extension and retraction of the inner telescopic rod. In this embodiment, the rotary connecting mechanism enables the connecting arm to have an adjustable stroke. When the adjustable connecting arm reaches its maximum extension and retraction, it not only automatically stops the extension and retraction operation but also allows for adjustment of the extension and retraction amount.

[0036] In some specific embodiments of the present invention, the connecting arm in the rotary connecting mechanism has the same length before and after the substrate is reversed, so that the rotary connecting mechanism drives the clamping mechanism to rotate around the rotary axis, thereby reversing the substrate and moving the central axis of the substrate from the first position to the second position.

[0037] In some embodiments of the present invention, the reversing mechanism further includes a driving mechanism that drives at least one of the rotary connecting mechanism and the rotary shaft to rotate, so that the rotary connecting mechanism drives the clamping mechanism to rotate around the rotary shaft. After the substrate is reversed and the corresponding operation is completed and transferred to another process station, the clamping mechanism releases its clamping grip on the substrate, and the driving mechanism drives at least one of the rotary connecting mechanism and the rotary shaft to rotate, so that the rotary connecting mechanism drives the clamping mechanism to rotate in the opposite direction around the rotary shaft, causing the clamping mechanism to move from the second position back to the first position, so that it can be reused repeatedly.

[0038] In some embodiments of the present invention, the driving mechanism is connected to the rotating shaft so that the driving mechanism drives the rotating shaft to rotate, thereby causing the rotating connecting mechanism to rotate around the rotating shaft, so that the clamping mechanism rotates accordingly. Specifically, the driving mechanism is an engine, which is built into the housing of the rotating shaft, and the rotating shaft is driven by the driving part of the engine; the driving mechanism can also be a rotary cylinder, etc.

[0039] In other embodiments of the present invention, the driving mechanism is connected to the rotary connecting mechanism so that the driving mechanism drives the rotary connecting mechanism to rotate, thereby causing the clamping mechanism to rotate accordingly. Specifically, the driving mechanism only needs to be able to rotate the rotary connecting mechanism by 180°, and can be a rotary cylinder or a motor and a reduction gear.

[0040] Figure 1 This is a top view of the substrate flipping and conveying device according to an embodiment of the present invention; Figure 2 for Figure 1 The diagram shows the reverse conveying effect of the substrate flipping and conveying device.

[0041] In some embodiments of the present invention, reference is made to Figure 1 The clamping mechanism (not shown in the figure) includes a first clamping component 11 and a second clamping component 12, which clamp the substrate 2 at its periphery. The rotating connection mechanism (not shown in the figure) includes a first rotating connection component 31 and a second rotating connection component 32. One end of the rotating shaft 4 is movably connected to the first rotating connection component 31, which is located on the same side as the first end, and the other end of the rotating shaft 4 is movably connected to the second rotating connection component 32, which is located on the same side as the second end. The first rotating connection component 31 is connected to the first clamping component 11, and the second rotating connection component 32 is connected to the second clamping component 12. The first rotating connection component 31 and the second rotating connection component 32 drive the first clamping component 11 and the second clamping component 12 to rotate synchronously around the rotating shaft 4, so that the substrate 2 is reversed and the central axis of the substrate 2 moves from a first position to a second position. The state of the substrate flipping and conveying device and the substrate before and after the reversal is as follows. Figure 2 As shown.

[0042] In some embodiments of the present invention, both the first clamping assembly and the second clamping assembly include a fixing assembly. The fixing assembly includes a lower guide fixing assembly, an upper guide fixing assembly, and a fixing support. The lower guide fixing assembly and the upper guide fixing assembly are respectively movably connected to the fixing support. The fixing support of the first clamping assembly is fixedly connected to the first rotary connecting assembly, and the fixing support of the second clamping assembly is fixedly connected to the second rotary connecting assembly, so as to facilitate the rotary connecting mechanism to drive the clamping mechanism to rotate.

[0043] In some embodiments of the present invention, both the first clamping assembly and the second clamping assembly include a plurality of lower guide members and a plurality of upper guide members. The plurality of lower guide members contact the periphery of the substrate and support the substrate from below. The plurality of lower guide members are fixedly disposed on the lower guide member fixing assembly. The plurality of upper guide members contact the periphery of the substrate and clamp the substrate with the lower guide members. The plurality of upper guide members are fixedly disposed on the upper guide member fixing assembly to achieve more stable clamping of the substrate. By fixing the plurality of lower guide members on the lower guide member fixing assembly and the plurality of upper guide members on the upper guide member fixing assembly, it is easier to adjust the lower guide members and the upper guide members in a unified manner.

[0044] In some embodiments of the present invention, the moving mechanism includes a first gripper assembly, a second gripper assembly, a third gripper assembly, and a fourth gripper assembly; the first gripper assembly is connected to the lower guide fixing assembly in the first clamping assembly to control the lower guide in the first clamping assembly to move forward and backward between the contact position and the retraction position; the second gripper assembly is connected to the upper guide fixing assembly in the first clamping assembly to control the upper guide in the first clamping assembly to move forward and backward between the contact position and the retraction position; the third gripper assembly is connected to the lower guide fixing assembly in the second clamping assembly. The lower guide member in the second clamping assembly is controlled to move forward and backward between the contact position and the retraction position; the fourth gripper assembly is connected to the upper guide member fixing assembly in the second clamping assembly to control the upper guide member in the second clamping assembly to move forward and backward between the contact position and the retraction position, so as to realize the forward and backward movement of the lower guide member in the first clamping assembly, the upper guide member in the first clamping assembly, the lower guide member in the second clamping assembly, and the upper guide member in the second clamping assembly between the contact position and the retraction position, thereby preventing damage to the substrate due to misoperation.

[0045] In some specific embodiments of the present invention, the first gripper assembly, the second gripper assembly, the third gripper assembly, and the fourth gripper assembly each include a first gripper, a second gripper, a driving assembly, and a traction assembly. The first gripper and the second gripper are arranged opposite to each other. One end of the traction assembly is connected to the first gripper and the second gripper, and the other end of the traction assembly is connected to the lower guide fixing assembly or the upper guide fixing assembly. The driving assembly drives the first gripper and the second gripper to clamp or open. When the driving assembly drives the first gripper and the second gripper to clamp, it causes the traction assembly to contract, thereby driving the lower guide fixing assembly or the upper guide fixing assembly to move, so that the lower guide or the upper guide moves from the contact position to the retraction position. When the driving assembly drives the first gripper and the second gripper to open, it causes the traction assembly to relax, thereby driving the lower guide fixing assembly or the upper guide fixing assembly to move, so that the lower guide or the upper guide moves from the retraction position to the contact position.

[0046] Figure 3 This is a schematic diagram of the assembly of the clamping mechanism and the substrate in the substrate flipping and conveying device according to an embodiment of the present invention. Figure 4 for Figure 3 Enlarged structural diagram at point A; Figure 5 for Figure 3 Enlarged schematic diagram of the structure at point B.

[0047] In some specific embodiments of the present invention, reference is made to Figure 1 , Figures 3-5The first clamping assembly 11 includes a first lower guide fixing assembly 111, a first upper guide fixing assembly 112, and a first fixing support 115. A plurality of first lower guides 113 are fixedly disposed on one end face of the first lower guide fixing assembly 111, and a plurality of first upper guides 114 are fixedly disposed on one end face of the first upper guide fixing assembly 112. Both the first lower guide fixing assembly 111 and the first upper guide fixing assembly 112 have a U-shaped structure with their open ends facing each other. The first lower guide fixing assembly 111 and the first upper guide fixing assembly 112 are movably connected to the first fixing support 115, and the first upper guide fixing assembly 112 is connected to the first... The lower guide fixing assembly 111 is relatively slidably arranged, so that the distance between the first lower guide 113 and the first upper guide 114 can be adjusted by adjusting the relative position between the first upper guide fixing assembly 112 and the first lower guide fixing assembly 111. This allows the substrate flipping and conveying device to clamp substrates 2 of different thicknesses, and the substrate 2 can be clamped more tightly and stably by adjusting the distance between the first lower guide 113 and the first upper guide 114. The first fixing support 115 is provided with a first mounting hole structure 116, and the first fixing support 115 is connected and fixed to the first rotary connection assembly 31 through the first mounting hole structure 116.

[0048] The second clamping assembly 12 includes a second lower guide fixing assembly 121, a second upper guide fixing assembly 122, and a second fixing support 125. A plurality of second lower guides 123 are fixedly disposed on one end face of the second lower guide fixing assembly 121, and a plurality of second upper guides 124 are fixedly disposed on one end face of the second upper guide fixing assembly 122. Both the second lower guide fixing assembly 121 and the second upper guide fixing assembly 122 have a U-shaped structure with their open ends facing each other. The second lower guide fixing assembly 121 and the second upper guide fixing assembly 122 are movably connected to the second fixing support 125, and the second upper guide fixing assembly 122 is connected to the second lower guide... The fixing components 121 are relatively slidably arranged, so that the distance between the second lower guide 123 and the second upper guide 124 can be adjusted by adjusting the relative position between the second upper guide fixing component 122 and the second lower guide fixing component 121. This allows the substrate flipping and conveying device to clamp substrates 2 of different thicknesses, and the substrate 2 can be clamped more tightly and stably by adjusting the distance between the second lower guide 123 and the second upper guide 124. The second fixing support 125 is provided with a second mounting hole structure (not shown in the figure), and the second fixing support 125 is connected and fixed to the second rotary connection component 32 through the second mounting hole structure (not shown in the figure).

[0049] In some specific embodiments of the present invention, reference is made to Figure 1 , Figure 3 and Figure 4 The other end face of the first lower guide fixing assembly 111, the first upper guide fixing assembly 112, the second lower guide fixing assembly 121, and the second upper guide fixing assembly 122 are all provided with mounting groove structures 13. The mounting groove structures 13 are adapted to the traction assembly (not shown in the figure), so that the first lower guide fixing assembly 111 can be connected and fixed to the first gripper assembly 51, the first upper guide fixing assembly 112 can be connected and fixed to the second gripper assembly 52, the second lower guide fixing assembly 121 can be connected and fixed to the third gripper assembly 53, and the second upper guide fixing assembly 122 can be connected and fixed to the fourth gripper assembly 54.

[0050] In some specific embodiments of the present invention, the first lower guide fixing assembly and the first upper guide fixing assembly are each provided with a locking structure for fixing to the first fixed support, and the second lower guide fixing assembly and the second upper guide fixing assembly are each provided with a locking structure for fixing to the second fixed support. This allows the first lower guide fixing assembly, the first upper guide fixing assembly, the second lower guide fixing assembly, and the second upper guide fixing assembly to be locked and fixed to the corresponding fixed support through the locking structure after adjustment. This ensures that the substrate is clamped and fixed by the plurality of lower guides and the plurality of upper guides and will not loosen, thereby ensuring the stable reverse transfer of the substrate.

[0051] In some specific embodiments of the present invention, reference is made to Figure 1 The first gripper assembly 51, the second gripper assembly 52, the third gripper assembly 53 and the fourth gripper assembly 54 are disposed inside the housing of the rotating shaft 4, which makes it more aesthetically pleasing and avoids accidental contact during operation that would affect its use.

[0052] In some embodiments of the present invention, the clamping mechanism further includes a switching mechanism, which is connected to at least one of the lower guide fixing assembly and the upper guide fixing assembly, allowing the lower guide fixing assembly and the upper guide fixing assembly to slide relative to each other to change the contact state between the lower guide and the upper guide and the substrate. The lower guide includes a first lower contact area and a second lower contact area that selectively contact the substrate by switching through the switching mechanism. The upper guide includes a first upper contact area and a second upper contact area that selectively contact the substrate by switching through the switching mechanism, enabling the substrate before cleaning and the substrate after cleaning to be clamped through the different contact areas of the lower and upper guides. This prevents dirt, dust, etc., from the untreated substrate from adhering to the treated substrate through the contact areas of the upper and lower guides with the substrate. Moreover, the connection of the switching mechanism to at least one of the lower guide fixing assembly and the upper guide fixing assembly allows the lower guide fixing assembly and the upper guide fixing assembly to slide relative to each other, making it simpler and more convenient to change the contact state between the lower guide and the upper guide and the substrate.

[0053] In some embodiments of the present invention, the contact surface between the lower guide member and the substrate and the contact surface between the upper guide member and the substrate both include a first end face and a second end face, wherein the second end face protrudes outward relative to the first end face to achieve a more stable clamping of the substrate.

[0054] For details, please refer to Figure 5 Taking the second upper guide member 124 as an example, the contact surface between the second upper guide member 124 and the substrate 2 includes a first end face 15 and a second end face 16, and the second end face 16 protrudes outward relative to the first end face 15.

[0055] In some specific embodiments of the present invention, the first lower contact area and the second lower contact area of ​​the lower guide both include a first end face and a second end face, and the first upper contact area and the second upper contact area of ​​the upper guide both include a first end face and a second end face. Before substrate cleaning, the first lower contact area of ​​the lower guide and the first upper contact area of ​​the upper guide are arranged opposite to each other to clamp the substrate. After substrate cleaning, the switching mechanism causes the lower guide fixing component and the upper guide fixing component to slide relative to each other to drive the lower guide and the upper guide to slide relative to each other, thereby making the second lower contact area of ​​the lower guide and the second upper contact area of ​​the upper guide arranged opposite to each other to clamp the substrate. This allows the different contact areas of the lower guide and the upper guide to clamp the substrate before cleaning and the substrate after cleaning, thereby effectively preventing dirt, dust, etc. of the untreated substrate from adhering to the treated substrate through the contact areas of the upper guide and the lower guide with the substrate.

[0056] In some embodiments of the present invention, the upper guide member is positioned at a different location from the lower guide member in a top view to achieve a more stable clamping of the substrate.

[0057] In some embodiments of the present invention, the clamping mechanism further includes a fixed bracket, the two ends of which are respectively fixedly connected to the fixed support of the first clamping component and the fixed support of the second clamping component, thereby improving the stability of the clamping mechanism and preventing damage to the substrate during substrate reversal and transport.

[0058] For details, please refer to Figure 3 The first fixed support 115 and the second fixed support 125 are respectively connected and fixed to both ends of the fixed bracket 14.

[0059] In some embodiments of the present invention, a substrate processing apparatus is also provided, comprising:

[0060] The aforementioned substrate flipping and conveying device;

[0061] A back-side cleaning unit that cleans the back side of the substrate that has been reversed by the substrate flipping and conveying device; and

[0062] A substrate conveying unit that transports the substrate between the substrate flipping and conveying device and the back cleaning unit.

[0063] In some embodiments of the present invention, the substrate processing apparatus further includes:

[0064] A cleaning processing module equipped with the backside cleaning section and the substrate conveying section; and

[0065] An indexing module, which is equipped with other substrate conveying units, receives processed substrates from the cleaning processing module while delivering unprocessed substrates to the cleaning processing module.

[0066] The substrate flipping and conveying device is disposed at the connection between the cleaning module and the indexing module;

[0067] When one of the substrate conveying units and the other substrate conveying units has moved a substrate into the substrate reversing device, and the other substrate conveying unit has moved a substrate that has been reversed by the substrate reversing device out of the substrate reversing device, and the other substrate conveying unit has moved the substrate that has been reversed by the substrate flipping conveying device out of the substrate reversing device.

[0068] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A substrate flipping and conveying apparatus characterized by comprising: The utility model relates to a substrate reverse device, including: Clamping mechanism for clamping substrate, the clamping mechanism includes first clamping component and second clamping component, and the first clamping component and the second clamping component are opposite and clamped to the peripheral part of substrate; Moving mechanism drives the clamping mechanism to advance and retreat between the contact position of contact with substrate and the retreat position of leave substrate; Reverse mechanism includes rotating shaft and rotating connection mechanism, one end of rotating connection mechanism is connected with clamping mechanism, the other end of rotating connection mechanism is connected with rotating shaft, and clamping mechanism is driven around rotating shaft through rotating connection mechanism to make substrate reverse and make the central axis of substrate move from first position to second position; The rotating connection mechanism includes first rotating connection component and second rotating connection component, and one end of rotating shaft is movably connected with first rotating connection component which is arranged on the same side of the end, and the other end of rotating shaft is movably connected with second rotating connection component which is arranged on the same side of the end, first rotating connection component is connected with first clamping component, second rotating connection component is connected with second clamping component, and first rotating connection component and second rotating connection component drive first clamping component and second clamping component to rotate synchronously around rotating shaft respectively.

2. The substrate flipper conveyor of claim 1, wherein The rotating connection mechanism includes connecting arm and telescopic component, and connecting arm and telescopic component are connected, the length of connecting arm is adjusted through telescopic component to make substrate carry to preset position.

3. The substrate flipper conveyor of claim 1, wherein The reverse mechanism further includes driving mechanism, and the driving mechanism drives at least one of rotating connection mechanism and rotating shaft to rotate to make rotating connection mechanism drive clamping mechanism to rotate around rotating shaft.

4. The substrate flipper conveyor of claim 1, wherein The first clamping component and the second clamping component both include fixed component, and the fixed component includes lower guide piece fixed component, upper guide piece fixed component and fixed support, and the lower guide piece fixed component and the upper guide piece fixed component are movably connected with the fixed support respectively, and the fixed support of the first clamping component is fixedly connected with the first rotating connection component, and the fixed support of the second clamping component is fixedly connected with the second rotating connection component.

5. The substrate flipper conveyor of claim 4, wherein The first clamping component and the second clamping component both include: A plurality of lower guide pieces are in contact with the peripheral part of substrate and support substrate from below, and the plurality of lower guide pieces are fixedly arranged in the lower guide piece fixed component; A plurality of upper guide pieces are in contact with the peripheral part of substrate and clamp substrate with the lower guide pieces, and the plurality of upper guide pieces are fixedly arranged in the upper guide piece fixed component.

6. The substrate flipper conveyor of claim 5, wherein The moving mechanism includes first clamping jaw component, second clamping jaw component, third clamping jaw component and fourth clamping jaw component; The first clamping jaw component is connected with the lower guide piece fixed component in the first clamping component to control the lower guide piece in the first clamping component to advance and retreat between the contact position and the retreat position; The second clamping jaw assembly is connected with the upper guide fixed assembly in the first clamping assembly to control the upper guide in the first clamping assembly to move between the contact position and the retreat position; The third clamping jaw assembly is connected with the lower guide fixed assembly in the second clamping assembly to control the lower guide in the second clamping assembly to move between the contact position and the retreat position; The fourth clamping jaw assembly is connected with the upper guide fixed assembly in the second clamping assembly to control the upper guide in the second clamping assembly to move between the contact position and the retreat position.

7. The substrate flipper conveyor of claim 5, wherein: The clamping mechanism further comprises a switching mechanism connected with at least one of the lower guide fixed assembly and the upper guide fixed assembly to make the lower guide fixed assembly and the upper guide fixed assembly slide relative to each other to change the contact state of the lower guide and the upper guide with the substrate; The lower guide comprises a first lower contact area and a second lower contact area selectively in contact with the substrate through switching of the switching mechanism; The upper guide comprises a first upper contact area and a second upper contact area selectively in contact with the substrate through switching of the switching mechanism.

8. The substrate turn-over transfer device according to claim 5 or 7, wherein The contact surface of the lower guide with the substrate and the contact surface of the upper guide with the substrate each comprise a first end surface and a second end surface, the second end surface being convex relative to the first end surface.

9. The substrate flipper conveyor of claim 5, wherein: The upper guide is configured at a different position from the lower guide in a top view.

10. The substrate flipper conveyor of claim 4, wherein: The clamping mechanism further comprises a fixed support, both ends of the fixed support being fixedly connected with the fixed support member of the first clamping assembly and the fixed support member of the second clamping assembly respectively.

11. A substrate processing apparatus, characterized by comprising: Comprise: The substrate turnover conveying device according to any one of claims 1 to 10; A back surface cleaning unit for cleaning the back surface of the substrate reversed by the substrate turnover conveying device; And A substrate conveying unit for conveying the substrate between the substrate turnover conveying device and the back surface cleaning unit.

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