Test probe station for laser chips

Abstract

The application discloses a kind of test probe station for laser chip, including body, support plate located below body, probe for being contacted with chip to be tested and moving point contact probe support plate is installed in the area between moving point contact probe and adapter seat, a lifting rod is located in the guide channel of body, the second elastic member two ends are connected to the lifting rod and lifting rod lower end respectively, a rotating rod lower end is connected with the upper end of lifting rod, for driving lifting rod moves in vertical direction, the surface of guide channel and lifting rod contact is provided with two pairs of positioning pins and positioning line groove for positioning pin embedding, and 2 positioning pins between, 2 positioning line grooves between symmetrically, the positioning pin is located on the side surface of lifting rod, and the positioning line groove is located on the inner wall of guide channel.The application solves the problem of unstable and inconsistent test data during long-term use due to fatigue of probe station.

Description

Technical Field

[0001] This invention relates to a test probe station for laser chips, belonging to the field of chip testing technology. Background Technology

[0002] In the production and testing phase of lasers in the optical communication industry, before the COC aging process, it is necessary to perform optoelectronic performance testing on individual laser chips (LDs). During the testing of individual laser chips (LDs) in optical communication, the stability of the probe plays a crucial role. Due to the very small size of a single chip (typically within the 300μm range), the test probe will inevitably push the chip's position or angle to some extent during contact. Once the chip's position and angle change, it will directly affect the stability and efficiency of subsequent test indicators. Moreover, the pressure stability of the test probe will also directly reflect the stability of the test values. For mass production testing, a single probe needs to test a large number of chips, and the same chip needs to be tested multiple times. The stability and durability of the power-on probe assembly will directly affect the consistency and reproducibility of the test data. Therefore, the long-term stability of the test probe station for laser chips is subject to very stringent requirements during the testing process. Summary of the Invention

[0003] The inventors discovered that changes in pressure applied by the probe to the chip cause variations in contact resistance, thus affecting the consistency of test data. During prolonged testing, excessive pressure changes can make it impossible to distinguish whether the changes in test results are due to the chip itself or the testing equipment, leading to a loss of comparability. Based on these findings, the purpose of this invention is to provide a test probe station for laser chips that solves the problem of unstable and inconsistent test data during long-term use due to probe station fatigue.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a test probe station for laser chips, comprising a body, a support plate located below the body, a probe for contacting the chip to be tested, and a moving contact probe. The probe and the moving contact probe are respectively installed at both ends of the support plate. The middle part of the support plate is connected to the body through a vertically arranged second elastic element. A stationary contact probe is provided on one side of the lower end face of the body, located above the moving contact probe and corresponding to the moving contact probe.

[0005] A first pin, perpendicular to the length of the support plate, is mounted on the area between the probe and the second elastic element above the support plate via an adapter. A second pin and a third pin, parallel to the first pin, are provided on a lower protrusion on the other side of the lower end face of the main body. The second and third pins are located above and on both sides of the first pin, and both ends of the second and third pins extend from the front and rear sides of the lower protrusion. A first bearing and a second bearing are installed at both ends of the second pin, and a third bearing and a fourth bearing are installed at both ends of the third pin. The first and third bearings located on the front side of the lower protrusion are in contact with the outer circumferential surface of one end of the first pin, and the second and fourth bearings located on the rear side of the lower protrusion are in contact with the outer circumferential surface of the other end of the first pin. The lower end of a first elastic element in a stretched state is connected to the first pin, and the upper end of the first elastic element is connected to the fourth pin inside the main body and above the second and third pins, so that the moving rings of the first, second, third, and fourth bearings maintain press-fit contact with the outer circumferential surface of the first pin.

[0006] A hanging rod is installed on the support plate in the area between the moving contact probe and the adapter. A lifting rod is located in the guide channel of the main body. The two ends of the second elastic element are respectively connected to the upper end of the hanging rod and the lower end of the lifting rod. The lower end of a rotating rod is connected to the upper end of the lifting rod to drive the lifting rod to move in the vertical direction. The surface of the guide channel that contacts the lifting rod is provided with two pairs of positioning pins and positioning line grooves for the positioning pins to be embedded. The two positioning pins and the two positioning line grooves are symmetrically arranged. The positioning pins are located on the side surface of the lifting rod, and the positioning line grooves are located on the inner wall of the guide channel.

[0007] The following are further improvements to the above technical solution:

[0008] 1. In the above scheme, the adapter seat installed on the upper surface of the support plate has a front baffle and a rear baffle arranged in front and behind, and a first through hole is opened on both the front baffle and the rear baffle. The two ends of the first pin are respectively located in the first through hole of the front baffle and the rear baffle.

[0009] 2. In the above scheme, both the front baffle and the rear baffle have two guide grooves located on both sides of the first through hole, and the two ends of the second pin and the third pin are embedded in the corresponding guide grooves.

[0010] 3. In the above scheme, the first bearing and the third bearing are located between the lower protrusion and the front baffle, and the second bearing and the fourth bearing are located between the lower protrusion and the rear baffle, respectively.

[0011] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0012] 1. The present invention relates to a test probe station for laser chips. A first pin, perpendicular to the length of the support plate, is mounted on a rotatable support plate on which the probe is installed. Second and third pins, fixed to the main body, are located on both sides above the first pin. Four bearings, in contact with the first pin, are installed at both ends of the second and third pins. Finally, a first elastic element tightens the first pin on the support plate and the fourth pin inside the main body, ensuring that the outer rings of the four bearings maintain pressure contact with the outer circumference of the first pin and can rotate relative to it. This eliminates the fatigue problem present in the prior art, facilitates accurate setting of horizontal and vertical position parameters, and maintains the stability of the initial pressure setting value even after long-term, high-frequency use. This improves the stability, repeatability, comparability, and consistency of the test data. It also overcomes the defect of slight vertical vibration of the probe when it detaches from the chip, thus shortening the time between adjacent tests, improving test efficiency, and avoiding unnecessary damage to the chip. Furthermore, it eliminates slight horizontal rotational offset of the probe, ensuring the accuracy of the test data and further improving the stability, repeatability, comparability, and consistency of the test data.

[0013] 2. The laser chip test probe station of the present invention has a support plate with a hanging rod installed in the area between the moving contact probe and the adapter. A lifting rod is located in the guide channel of the main body. The two ends of the second elastic element are respectively connected to the upper end of the hanging rod and the lower end of the lifting rod. The lower end of the rotating rod is connected to the upper end of the lifting rod to drive the lifting rod to move in the vertical direction, which facilitates the adjustment of the probe pressure. This greatly expands the application scope and realizes the accuracy of the probe pressure on the chip when testing different chips, with a wide range of adaptability. Furthermore, the surface of the guide channel that contacts the lifting rod is provided with at least a pair of positioning pins and positioning line grooves for the positioning pins to be embedded. This can effectively prevent the lifting rod from rotating when adjusted by rotating the rod, ensuring the accuracy and stability of the adjustment. Attached Figure Description

[0014] Appendix Figure 1 This is a front view of the structure of the test probe station for laser chips according to the present invention;

[0015] Appendix Figure 2 This is a partial structural schematic diagram of the test probe station for laser chips according to the present invention;

[0016] Appendix Figure 3 for Figure 2 A schematic diagram of the exploded structure;

[0017] Appendix Figure 4 This is a partial cross-sectional view of the test probe station for the laser chip of the present invention in one direction;

[0018] Appendix Figure 5This is a partial cross-sectional view of the test probe station for the laser chip of the present invention from another direction;

[0019] Appendix Figure 6 This is a partial top view of the test probe station for laser chips according to the present invention;

[0020] Appendix Figure 7 This is a schematic diagram of the structure of one end of the support plate in the test probe station for laser chips of the present invention;

[0021] Appendix Figure 8 This is a partial structural cross-sectional view of the test probe station for laser chips in Embodiment 2 of the present invention.

[0022] In the attached diagrams: 1. Body; 2. Support plate; 31. Moving contact probe; 32. Stationary contact probe; 4. Cantilever; 41. Vertical plate; 42. Horizontal plate; 5. Probe holder; 51. Probe; 6. Adapter; 61. Front baffle; 62. Rear baffle; 7. First through hole; 8. Guide groove; 9. First pin; 10. Lower protrusion; 11. Second pin; 12. Third pin; 13. First bearing; 14. Second bearing; 15. Third bearing; 16. Fourth bearing; 17. Vertical through hole; 18. First elastic element; 19. Fourth pin; 20. Hanging rod; 21. Lifting rod; 211. Hanging hole; 22. Guide channel; 23. Second elastic element; 24. Rotating rod; 251. Positioning pin; 252. Positioning line groove. Detailed Implementation

[0023] In the description of this patent, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this patent based on the specific circumstances.

[0024] Example 1: A test probe station for laser chips includes a body 1, a support plate 2 located below the body 1, a probe 51 for contacting the chip under test, and a moving contact probe 31. The probe 51 and the moving contact probe 31 are respectively installed at both ends of the support plate 2. The middle part of the support plate 2 is connected to the body 1 by a vertically arranged second elastic member 23. A stationary contact probe 32 located above the moving contact probe 31 and corresponding to the moving contact probe 31 is provided on one side of the lower end face of the body 1.

[0025] A first pin 9, perpendicular to the length of the support plate 2, is mounted on the area between the probe 51 and the second elastic element 23 above the support plate 2 via an adapter 6. A second pin 11 and a third pin 12, parallel to the first pin 9, are provided on a lower protrusion 10 on the other side of the lower end face of the body 1. These second pins 11 and 12 are located above and on either side of the first pin 9, with both ends extending from the front and rear sides of the lower protrusion 10. A first bearing 13 and a second bearing 14 are mounted on both ends of the second pin 11, and a third bearing 15 is mounted on both ends of the third pin 12. The fourth bearing 16, the first bearing 13 and the third bearing 15 located on the front side of the lower protrusion 10 are in contact with the outer circumferential surface of one end of the first pin 9, the second bearing 14 and the fourth bearing 16 located on the rear side of the lower protrusion 10 are in contact with the outer circumferential surface of the other end of the first pin 9, the lower end of the first elastic member 18 in a stretched state is connected to the first pin 9, and the upper end of the first elastic member 18 is connected to the fourth pin 19 inside the body 1 and above the second pin 11 and the third pin 12, so that the moving rings of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are in pressurized contact with the outer circumferential surface of the first pin 9.

[0026] A hanging rod 20 is installed on the support plate 2 in the area between the moving contact probe 31 and the adapter 6. A hanging hole 211 is provided on the main body 1. The two ends of the second elastic member 23 are respectively connected to the hanging rod 20 and the hanging hole 211. The hanging rod 20 is provided in the through hole of the support plate 2. The first elastic member 18 and the second elastic member 23 are both springs.

[0027] A cantilever 4 is installed at the end of the support plate 2 away from the moving contact probe 31. The probe 51 is installed at the end of the cantilever 4 away from the support plate 2 via a probe seat 5. The cantilever 4 further includes a vertical plate 41 and a horizontal plate 42 connected to the upper end of the vertical plate 41. The lower end of the vertical plate 41 is connected to the support plate 2. The probe seat 5 is installed at the end of the horizontal plate 42 away from the vertical plate 41.

[0028] Example 2: A test probe station for laser chips includes a body 1, a support plate 2 located below the body 1, a probe 51 for contacting the chip under test, and a moving contact probe 31. The probe 51 and the moving contact probe 31 are respectively installed at both ends of the support plate 2. The middle part of the support plate 2 is connected to the body 1 by a vertically arranged second elastic element 23. A stationary contact probe 32 is provided on one side of the lower end face of the body 1, located above the moving contact probe 31 and corresponding to the moving contact probe 31. When the probe contacts the chip under test, the moving contact probe rotates away from the stationary contact probe with the support plate. The moving and stationary contact probes change from an initial state of mutual contact to a state of mutual separation. After receiving the signal that the moving and stationary contact probes are separated, the chip test control system performs a power-on operation to make the probe and the chip electrically connected, and then performs various parameter tests on the chip.

[0029] A first pin 9, perpendicular to the length of the support plate 2, is mounted on the area between the probe 51 and the second elastic element 23 above the support plate 2 via an adapter 6. A second pin 11 and a third pin 12, parallel to the first pin 9, are provided on a lower protrusion 10 on the other side of the lower end face of the body 1. These second pins 11 and 12 are located above and on either side of the first pin 9, with both ends extending from the front and rear sides of the lower protrusion 10. A first bearing 13 and a second bearing 14 are mounted on both ends of the second pin 11, and a third bearing 15 is mounted on both ends of the third pin 12. The fourth bearing 16, the first bearing 13 and the third bearing 15 located on the front side of the lower protrusion 10 are in contact with the outer circumferential surface of one end of the first pin 9, the second bearing 14 and the fourth bearing 16 located on the rear side of the lower protrusion 10 are in contact with the outer circumferential surface of the other end of the first pin 9, the lower end of the first elastic member 18 in a stretched state is connected to the first pin 9, and the upper end of the first elastic member 18 is connected to the fourth pin 19 inside the body 1 and above the second pin 11 and the third pin 12, so that the moving rings of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are in pressurized contact with the outer circumferential surface of the first pin 9.

[0030] A hanging rod 20 is installed on the support plate 2 in the area between the moving contact probe 31 and the adapter 6. A lifting rod 21 is located in the guide channel 22 of the body 1. The two ends of the second elastic member 23 are respectively connected to the hanging rod 20 and the lower end of the lifting rod 21. The lower end of a rotating rod 24 is connected to the upper end of the lifting rod 21 and is used to drive the lifting rod 21 to move in the vertical direction.

[0031] The surface of the guide channel 22 that contacts the lifting rod 21 is provided with two pairs of positioning pins 251 and positioning line grooves 252 for the positioning pins 251 to be inserted, and the two positioning pins 251 and the two positioning line grooves 252 are symmetrically arranged.

[0032] The aforementioned positioning pin 251 is located on the side surface of the lifting rod 21, and the aforementioned positioning line groove 252 is located on the inner wall of the guide channel 22;

[0033] The adapter 6, which is mounted on the upper surface of the support plate 2, has a front baffle 61 and a rear baffle 62 arranged in front and rear. A first through hole 7 is opened on both the front baffle 61 and the rear baffle 62. The two ends of the first pin 9 are respectively located in the first through hole 7 of the front baffle 61 and the rear baffle 62.

[0034] The front baffle 61 and the rear baffle 62 are each provided with two guide grooves 8 located on both sides of the first through hole 7. The two ends of the second pin 11 and the third pin 12 are each embedded in the corresponding guide grooves 8.

[0035] The first bearing 13 and the third bearing 15 are located between the lower protrusion 10 and the front baffle 61, and the second bearing 14 and the fourth bearing 16 are located between the lower protrusion 10 and the rear baffle 62, respectively.

[0036] The upper end of the first elastic member 18 located in the vertical through hole 17 of the lower protrusion 10 is connected to the first pin 9 in the middle area between the front baffle 61 and the rear baffle 62.

[0037] When using the aforementioned laser chip test probe station, the probe station is generally mounted on a drive mechanism (such as a three-axis motion platform). Moving the probe station causes the probe to contact the chip under test. The probe applies downward pressure to the chip while receiving an upward reaction force from the chip, causing the support plate to rotate. The moving contact probe mounted on the support plate moves downward, changing from the initial state of contact with the stationary contact probe to the state of separation from the stationary contact probe. This indicates that the probe has applied appropriate pressure to the chip. At this time, the chip test control system performs a power-on operation to make the probe and chip electrically connected and test various parameters of the chip. After the test is completed, the support plate rotates in the opposite direction under the action of the second elastic element, returning to the initial horizontal position. At the same time, the moving contact probe contacts the stationary contact probe.

[0038] During long-term testing of a large number of chips and the reciprocating rotation of the support plate, the first elastic element ensures that the first pin mounted on the support plate is in contact with the four bearings on its two sides and two ends, which are mounted on the main body. This ensures that the support plate can rotate smoothly around the first pin as a fulcrum, while also achieving precise limiting of the first pin, so that the support plate can only rotate and will not deviate in other directions. This eliminates the fatigue problem existing in the technology using spring sheets, which is conducive to accurately setting the horizontal and vertical position parameters. Even after long-term, high-frequency use, the initial pressure setting value can still be kept stable, thereby improving the stability, repeatability, comparability, and consistency of the test data. It also overcomes the defect of slight vertical vibration of the probe when it is separated from the chip, which helps to shorten the time between adjacent tests, thereby improving the test efficiency and avoiding unnecessary damage to the chip.

[0039] Furthermore, it also eliminates the slight rotational offset of the probe in the horizontal direction, ensuring the accuracy of the detection data and further improving the stability, repeatability, comparability and consistency of the detection data.

[0040] Furthermore, it facilitates the adjustment of the probe pressure, thereby greatly expanding the application scope and achieving accurate probe pressure on the chip when testing different chips, with a wide range of adaptability; furthermore, the surface of its guide channel that contacts the lifting rod is provided with at least a pair of positioning pins and positioning line grooves for the positioning pins to be embedded, which can effectively prevent the lifting rod from rotating when adjusting by rotating the rod, ensuring the accuracy and stability of the adjustment.

[0041] The laser chip test probe station of this invention can be extended to other industries for semiconductor chip testing. Its application is not limited to the optical communication industry. All industries that need to use laser chip test probe stations can simultaneously expand their use, making it widely applicable.

[0042] The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A test probe station for laser chips, comprising a body (1), a support plate (2) located below the body (1), a probe (51) for contacting the chip under test, and a moving contact probe (31), characterized in that: The probe (51) and the moving point contact probe (31) are respectively installed at both ends of the support plate (2). The middle part of the support plate (2) is connected to the body (1) through a vertically arranged second elastic element (23). A stationary point contact probe (32) is provided on one side of the lower end face of the body (1) above the moving point contact probe (31) and corresponding to the moving point contact probe (31). A first pin (9) perpendicular to the length of the support plate (2) is mounted on the area between the probe (51) and the second elastic element (23) above the support plate (2) via an adapter (6). A second pin (11) and a third pin (12) parallel to the first pin (9) are provided on the lower protrusion (10) on the other side of the lower end face of the body (1). The second pin (11) and the third pin (12) are located above the first pin (9) and on both sides of it. Both ends of the second pin (11) and the third pin (12) extend from the front and rear sides of the lower protrusion (10). The second pin (11) is equipped with a first bearing (13) and a second bearing (14) at both ends. The third pin (12) is equipped with a third bearing (15) at both ends. The first bearing (13) and the third bearing (15) located on the front side of the lower protrusion (10) are in contact with the outer circumferential surface of one end of the first pin (9), and the second bearing (14) and the fourth bearing (16) located on the rear side of the lower protrusion (10) are in contact with the outer circumferential surface of the other end of the first pin (9). The lower end of a first elastic element (18) in a stretched state is connected to the first pin (9), and the upper end of the first elastic element (18) is connected to the fourth pin (19) located inside the body (1) and above the second pin (11) and the third pin (12), so that the moving rings of the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) respectively maintain a pressing contact with the outer circumferential surface of the first pin (9); The support plate (2) is located in the area between the moving contact probe (31) and the adapter (6) and a hanging rod (20) is installed. A lifting rod (21) is located in the guide channel (22) of the body (1). The two ends of the second elastic element (23) are respectively connected to the hanging rod (20) and the lower end of the lifting rod (21). The lower end of a rotating rod (24) is connected to the upper end of the lifting rod (21) and is used to drive the lifting rod (21) to move in the vertical direction. The surface of the guide channel (22) that contacts the lifting rod (21) is provided with two pairs of positioning pins (251) and positioning line grooves (252) for the positioning pins (251) to be embedded. The two positioning pins (251) and the two positioning line grooves (252) are symmetrically arranged. The positioning pins (251) are located on the side surface of the lifting rod (21), and the positioning line grooves (252) are located on the inner wall of the guide channel (22).

2. The test probe station for laser chips according to claim 1, characterized in that: The adapter (6) mounted on the upper surface of the support plate (2) has a front baffle (61) and a rear baffle (62) arranged in front and rear. A first through hole (7) is opened on both the front baffle (61) and the rear baffle (62). The two ends of the first pin (9) are respectively located in the first through hole (7) of the front baffle (61) and the rear baffle (62).

3. The test probe station for laser chips according to claim 2, characterized in that: The front baffle (61) and the rear baffle (62) each have two guide grooves (8) located on both sides of the first through hole (7), and the two ends of the second pin (11) and the third pin (12) are embedded in the corresponding guide grooves (8).

4. The test probe station for laser chips according to claim 2, characterized in that: The first bearing (13) and the third bearing (15) are located between the lower protrusion (10) and the front baffle (61), and the second bearing (14) and the fourth bearing (16) are located between the lower protrusion (10) and the rear baffle (62), respectively.

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