Methods and systems for obtaining processing station capacity

Abstract

This application relates to a method and system for obtaining the capacity of a processing station. The processing station includes several processing positions. The method includes: grouping processing positions that run the same process menu steps into a processing set; obtaining the processing time corresponding to each processing set, where processing time refers to the equivalent process time obtained by equating each processing position in the processing set to a single processing position; using the ratio of the number of products that can be placed at each processing position in each processing set to the processing time as the set capacity, and taking the minimum set capacity as the capacity of the processing station; wherein, the number of products that can be placed at each processing position within the same processing set is the same. This method can effectively eliminate waiting time in product production and does not require manual stacking of products with the same steps and running the same process menu, making it simple to operate and highly accurate.

Description

Technical Field

[0001] This application relates to the field of integrated circuit technology, and in particular to a method and system for obtaining the capacity of a processing station. Background Technology

[0002] The typical method for obtaining the production capacity of semiconductor equipment includes: First, the semiconductor equipment runs the same process recipe and operates at full load and stably, obtaining the time interval between the completion of two consecutive batches of products, which is taken as the production takt time. Second, the number of products running the same process recipe simultaneously on the semiconductor equipment (run size) is obtained. Third, the production capacity of the semiconductor equipment is determined based on the ratio of the product quantity to the production takt time. To obtain the production takt time under the condition of full load and stable operation of the same process recipe, the production process needs to be manually controlled, accumulating products with the same steps and running the same process recipe to a certain quantity, and then producing them in batches. This operation is complex, and this method cannot effectively eliminate idle time in the production process, making it difficult to obtain an effective and accurate production takt time. Therefore, how to obtain the production capacity of semiconductor equipment through simple operation has become an urgent problem to be solved. Summary of the Invention

[0003] This application provides a method and system for obtaining the capacity of a processing station, which can optimize the way the capacity of a processing station is obtained and achieve the goal of quickly and accurately obtaining the capacity of a processing station.

[0004] This application provides a method for obtaining the production capacity of a processing station, wherein the processing station includes several processing locations, and the method for obtaining the production capacity of the processing station includes:

[0005] Processing locations that run the same process menu step are treated as a processing set;

[0006] Obtain the processing time corresponding to each processing set. The processing time refers to the equivalent process time obtained when each processing position in the processing set is equivalent to a single processing position.

[0007] The ratio of the number of products that can be placed at each processing location in each processing set to the processing time is taken as the set capacity corresponding to the processing set, and the minimum set capacity is taken as the capacity of the processing station.

[0008] In this case, the number of products that can be placed at each processing position in the same processing set is the same.

[0009] In one embodiment, processing locations that run the same process menu step are grouped together as a processing set, which then includes:

[0010] Get the number of processing positions in each processing set.

[0011] In one embodiment, the step of obtaining the processing time corresponding to each processing set includes:

[0012] Obtain the process time corresponding to any processing position in the processing set. The process time refers to the time interval from when the product is placed in the processing position to when it leaves the processing position when the process menu step is executed.

[0013] The processing time corresponding to the processing set is obtained by the ratio of the process time to the number of positions in the processing set.

[0014] In one embodiment, the method for obtaining the processing station's capacity further includes:

[0015] The processing set with the longest processing time is selected as the first processing set;

[0016] The processing set with the most positions and the shortest processing time is selected as the second processing set;

[0017] Increase the number of positions in the first processing set, and simultaneously decrease the number of positions in the second processing set;

[0018] The increase in the number of positions in the first processing set is equal to the decrease in the number of positions in the second processing set.

[0019] In one embodiment, the step of obtaining the processing time corresponding to each processing set includes:

[0020] The preset number of products obtained within a preset time when all processing positions in the processing set are run simultaneously and the corresponding process menu steps are executed.

[0021] Based on the preset time and preset product quantity, the required process time for the product quantity obtained through the processing set is obtained, and this time is used as the processing time corresponding to the processing set.

[0022] In one embodiment, the processing station includes one of etching equipment, photolithography equipment, cleaning equipment, deposition equipment, or testing equipment.

[0023] In one embodiment, the processing location includes a cleaning tank, and the number of products at each processing location in the processing station is 50.

[0024] A system for acquiring the capacity of a processing station, wherein the processing station includes several processing locations, and the system for acquiring the capacity of the processing station includes:

[0025] The settings module is used to set the processing locations that run the same process menu steps as a processing set;

[0026] The acquisition module is used to acquire the processing time corresponding to each processing set. The processing time refers to the equivalent process time obtained when each processing position in the processing set is equivalent to a single processing position.

[0027] The calculation module is used to calculate the capacity of each processing set based on the ratio of the number of products that can be placed at each processing position to the processing time, and to take the minimum capacity of the processing set as the capacity of the processing station.

[0028] In this case, the number of products that can be placed at each processing position in the same processing set is the same.

[0029] In one embodiment, the acquisition module is further configured to acquire the number of processing positions in each processing set.

[0030] In one embodiment, the acquisition module is further configured to acquire the process time corresponding to any processing position in the processing set. The process time refers to the time interval from when the product is placed in the processing position to when it leaves the processing position when the process menu step is executed.

[0031] The calculation module is also used to obtain the processing time corresponding to the processing set based on the ratio of processing time to the number of positions in the processing set.

[0032] In one embodiment, the system for obtaining the processing site's capacity further includes:

[0033] The control module is used to select the processing set with the longest processing time as the first processing set, and the processing set with the number of positions greater than 1 and the shortest processing time as the second processing set;

[0034] The control module is also used to control the number of positions added to the first processing set, and at the same time control the number of positions reduced in the second processing set;

[0035] The increase in the number of positions in the first processing set is equal to the decrease in the number of positions in the second processing set.

[0036] In one embodiment, the acquisition module is further configured to acquire the preset number of products obtained within a preset time when all processing positions in the processing set simultaneously run the corresponding process menu steps.

[0037] The calculation module is also used to obtain the process time required for the number of products obtained through the processing set based on the preset time and preset product quantity, and use it as the processing time of the processing set.

[0038] In one embodiment, the processing station includes one of etching equipment, photolithography equipment, cleaning equipment, deposition equipment, or testing equipment.

[0039] This application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method for obtaining the processing station capacity as described in any of the preceding claims.

[0040] This application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method for obtaining the processing station capacity as described in any of the preceding claims.

[0041] The method and system for obtaining the capacity of the aforementioned processing stations first group processing positions that run the same process menu steps into a processing set, and then obtains the processing time corresponding to each processing set. The processing time refers to the equivalent process time obtained by converting each processing position in the processing set into a single processing position. Next, the ratio of the number of products that can be placed at each processing position in each processing set to the processing time is taken as the set capacity, and the minimum set capacity is taken as the capacity of the processing station. This method effectively eliminates waiting time in product production and eliminates the need for manual stacking of products with the same steps and running the same process menu. It is simple to operate and highly accurate. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 This is a flowchart illustrating a method for obtaining the processing station's capacity in one embodiment;

[0044] Figure 2 This is a schematic block diagram of the processing location in a processing station in one embodiment;

[0045] Figure 3 This is a flowchart illustrating the process of obtaining the processing time corresponding to each processing set in one embodiment;

[0046] Figure 4 This is a flowchart illustrating the method for obtaining the processing station's capacity in another embodiment;

[0047] Figure 5 This is a flowchart illustrating the process of obtaining the processing time corresponding to each processing set in another embodiment;

[0048] Figure 6 This is a schematic block diagram of the processing location in a processing station according to another embodiment;

[0049] Figure 7 This is a flowchart illustrating the method for obtaining the processing station's capacity in another embodiment;

[0050] Figure 8 A schematic diagram illustrating the production capacity of different types of equipment operating the same process menu at the same processing station;

[0051] Figure 9 This is a schematic diagram of the structure of a system for obtaining the processing station's capacity in one embodiment;

[0052] Figure 10 This is a schematic diagram of the structure of the system for obtaining the processing station's capacity in another embodiment.

[0053] Explanation of reference numerals in the attached figures:

[0054] 102. Setting module; 104. Acquisition module; 106. Calculation module; 108. Control module. Detailed Implementation

[0055] To facilitate understanding of the embodiments of this application, a more comprehensive description of the embodiments of this application will be provided below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of the embodiments of this application. However, the embodiments of this application can be implemented in many different forms and are not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of the embodiments of this application more thorough and complete.

[0056] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which embodiments of this application belong. The terminology used herein in the description of embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of this application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0057] In the description of the embodiments of this application, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the method or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0058] It is understood that the terms "first," "second," etc., used in this application may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of this application, a first set of processing may be referred to as a second set of processing, and similarly, a second set of processing may be referred to as a first set of processing. Both the first set of processing and the second set of processing are sets of processing, but they are not the same set of processing.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. In the description of this application, "several" means at least one, such as one, two, etc., unless otherwise explicitly specified.

[0060] The semiconductor device manufacturing process consists of several process recipes arranged in a specific order. Each process recipe runs at a corresponding processing station (semiconductor equipment), ultimately forming the corresponding semiconductor device on the product wafer. Each process recipe includes multiple steps that perform different functions. Different processing steps are executed at processing positions within the processing station that perform that function. The number of processing positions corresponding to each step can be the same or different. When a product wafer runs a process recipe at a processing station, if the number of processing positions corresponding to the next step is greater than the number of processing positions corresponding to the current step, the product wafer can perform the same function step in the next step through different processing positions. Compared to a situation where the number of processing positions corresponding to the next step is equal to the number of processing positions corresponding to the current step, the processing station's production capacity (Wafer per hour, WPH) is improved.

[0061] The calculation method for processing station capacity is: WPH = Run size / Takt Time. Where, Run size refers to the number of products produced in each batch with the same task sequence number when workers are dispatched to the station at the same time. It can be understood as the number of products that can be placed at the processing position of the processing station, that is, the number of product wafers that can be processed at one processing position of the semiconductor equipment at the same time. For a certain equipment and a certain process menu, Run size is a constant. For example, for cleaning and wet etching equipment, the number of product wafers that can be produced simultaneously in the acid tank corresponding to each step of the process menu is fixed (such as 25 wafers, 50 wafers, etc.). Takt Time refers to the time interval between the completion of the production of two batches of product wafers when the semiconductor equipment is running at full load (equipment is normal and materials are sufficient) and continuously producing the same process menu (recipe).

[0062] To obtain continuous and identical production records, it is often necessary to manually control the production process. Products with the same steps and running the same process menu are piled up to a certain quantity (e.g., 8 batches) and then produced continuously in a concentrated manner. The end time of adjacent batches (lot to lot departure time) is then measured to obtain the production takt time. This method cannot effectively eliminate idle time in the production process, the accuracy of the obtained takt time is low, a large amount of data that does not meet the criteria is discarded, and the method of obtaining takt time is complicated.

[0063] Figure 1 This is a flowchart illustrating a method for obtaining the processing station's capacity in one embodiment. Figure 2 This is a schematic block diagram of the processing location in a processing station according to one embodiment. For example... Figure 1 , Figure 2 As shown, in this embodiment, a method for obtaining the production capacity of a processing station is provided, including:

[0064] S102, treats the processing locations that run the same process menu step as a processing set.

[0065] Specifically, processing station A includes several different processing positions. The process menu running in processing station A is recipe 1. Processing positions that execute the same step (e.g., step 1) in process menu recipe 1 are grouped into processing sets, meaning processing positions with the same function are grouped together. In this way, each processing position corresponding to process menu recipe 1 in processing station A is divided into processing sets that correspond one-to-one with the steps involved in those processing positions within process menu recipe 1. At this point, the number of processing sets is the same as the number of steps involved in those processing positions within process menu recipe 1. For example... Figure 2As shown, steps 1, 2, 5 and 6 in the process menu recipe 1 all involve processing positions. Based on the steps in the process menu corresponding to the processing position, the processing positions in processing station A are divided into processing set S1 corresponding to step 1, processing set S2 corresponding to step 2, processing set S3 corresponding to step 5 and processing set S4 corresponding to step 6.

[0066] S104, obtain the processing time corresponding to each processing set.

[0067] Each processing position in the processing set is equivalent to a single processing position, and the equivalent process time for each equivalent processing position is obtained. This equivalent process time is then used as the processing time for the processing set. The processing times for the remaining processing sets are obtained sequentially. For example, the processing set S1 corresponding to step 1 in process menu recipe 1 includes three processing positions. First, processing positions M1, M2, and M3 in processing set S1 are equivalent to a single processing position M0. The function and the number of products D that can be placed at processing position M0 are the same as any processing position Mn in processing set S1. The number of products that can be placed refers to the number of product wafers that can be processed simultaneously at that processing position. Then, the equivalent process time for processing position M0 is obtained, and this equivalent process time is used as the processing time Tm0 for processing set S1. The equivalent process time refers to the process time required to process D product wafers through processing position M0. Similarly, the processing times for processing sets S2, S3, and S4 corresponding to process menu recipe 1 are obtained.

[0068] S106, the capacity of the processing station is obtained based on the number of products that can be placed at the processing location in each processing set and the processing time.

[0069] The ratio of the number of products that can be placed at each processing position in each processing set to the processing time is taken as the set capacity corresponding to the processing set, and the minimum set capacity is taken as the capacity of the processing station; wherein, the number of products that can be placed at each processing position in the same processing set is the same. For example, the number of products that can be placed at processing positions M1, M2 and M3 in processing set S1 is D, and the set capacity of processing set S1 is Wm = D / Tm0; and so on, the set capacities of processing sets S2, S3 and S4 corresponding to process menu recipe 1 are obtained respectively. Then, the values ​​of the set capacities corresponding to processing sets S1, S2, S3 and S4 are compared, and the set capacity with the smallest value is taken as the capacity of the processing station.

[0070] The method for obtaining the capacity of the aforementioned processing station first groups processing positions that run the same process menu steps into a processing set, and then obtains the processing time corresponding to each processing set. The processing time refers to the equivalent process time obtained by converting each processing position in the processing set into a single processing position. Next, the ratio of the number of products that can be placed at each processing position in each processing set to the processing time is taken as the set capacity, and the minimum set capacity is taken as the capacity of the processing station. This method effectively eliminates waiting time in product production and eliminates the need for manual stacking of products with the same steps and running the same process menu. It is simple to operate and highly accurate.

[0071] In one embodiment, step S102 is followed by: obtaining the number of processing positions in each processing set.

[0072] In one embodiment, the number of products that can be placed at each processing position in the processing station is the same, that is, the number of products that can be placed at any processing position Mn in processing set S1, any processing position in processing set S2, any processing position in processing set S3, and any processing position in processing set S4 is the same.

[0073] Figure 3 This is a flowchart illustrating the process of obtaining the processing time corresponding to each processing set in one embodiment. For example... Figure 2 , Figure 3 As shown, in one embodiment, step S104 includes:

[0074] S202, obtain the process time corresponding to any processing position in the processing set.

[0075] Process time refers to the time interval from when a product is placed in a processing position to when it leaves the processing position when the process menu step is executed at the processing position. For example, when step 1 of process menu recipe 1 is executed in processing set S1, the time interval from when the product wafer is placed in any processing position Mn in processing set S1 to when it leaves the processing position Mn is obtained as the process time Tn of processing position Mn.

[0076] S204. Based on the ratio of process time to the number of positions in the processing set, obtain the processing time corresponding to the processing set.

[0077] Specifically, during the processing of the product wafer in step 1 of recipe 1 at processing position Mn, other processing positions in processing set S1 (other than processing position Mn) can be in the same processing state. The process time for each processing position in processing set S1 is Tn. The equivalent process time of processing position M0 obtained by the three processing positions in processing set S1 is the quotient of the process time Tn of processing position Mn divided by the number of positions 3 in processing set S1, i.e., the processing time Tm0 of processing set S1 = process time Tn / number of positions 3. Then, the processing times of processing sets S2 (number of positions is 2), S3 (number of positions is 3), and S4 (number of positions is 1) corresponding to process menu recipe 1 can be obtained in this way. The processing time Tm0 obtained in this application is not affected by the idle time between the production of adjacent batches of product wafers.

[0078] Figure 4 This is a flowchart illustrating a method for obtaining the processing station's capacity in another embodiment. For example... Figure 2 , Figure 4 As shown, in this embodiment, the method for obtaining the processing station's capacity further includes:

[0079] S302, obtain the processing set with the longest processing time as the first processing set.

[0080] Specifically, after obtaining the processing time of each processing set in processing station A, the length of each processing time is compared, and the processing set with the longest processing time is taken as the first processing set, wherein the number of processing positions in the first processing set is not less than 1.

[0081] S304, obtain the processing set with more than 1 positions and the shortest processing time as the second processing set.

[0082] Specifically, the processing times of each processing set in processing station A are compared, and the processing set with the most locations and the shortest processing time is selected as the second processing set.

[0083] S306, increase the number of positions in the first processing set, and at the same time decrease the number of positions in the second processing set.

[0084] With the total number of processing positions in processing station A remaining constant, increasing the number of processing positions in the first processing set while decreasing the number of processing positions in the second processing set, where the increase in the number of positions in the first processing set equals the decrease in the number of positions in the second processing set, results in the first processing set having the longest processing time in processing station A. Since the number of products that can be placed at each processing position in processing station A is the same, the combined capacity of the first processing set is the smallest, which is the capacity of processing station A. The processing time of a processing set = process time / number of positions, and the combined capacity of a processing set = number of products that can be placed at each processing position in the processing set / processing time. With the process time remaining constant, increasing the number of positions in the first processing set can reduce the processing time of the first processing set and increase its combined capacity (since the number of products that can be placed at each processing position in the first processing set remains constant), thereby increasing the overall capacity of the processing station.

[0085] Figure 5 This is a flowchart illustrating the process of obtaining the processing time corresponding to each processing set in another embodiment. For example... Figure 2 , Figure 5 As shown, in one embodiment, the step of obtaining the processing time corresponding to each processing set includes:

[0086] S402, when all processing positions in the processing set run the corresponding process menu steps simultaneously, obtain the preset number of products within a preset time.

[0087] Specifically, within a preset time period, the preset number of product wafers processed by the processing set is obtained after all processing positions in the processing set simultaneously run the steps corresponding to the processing positions in the corresponding recipe menu. For example, processing positions M1, M2, and M3 in processing set S1 simultaneously run step 1 in recipe 1, and the total number of product wafers processed by processing positions M1, M2, and M3 within the preset time T0 is obtained, which is the number of product wafers that can enter processing set S2 within the preset time T0, and is used as the preset number of products D0 of processing set S1 within the preset time T0.

[0088] S404: Based on the preset time and preset product quantity, obtain the time required to obtain the product quantity through the processing set, and use it as the processing time corresponding to the processing set.

[0089] Specifically, the process time for processing one product wafer is calculated by dividing the preset time by the preset product quantity. Then, the process time required to process that number of product wafers is obtained by multiplying the product quantity by the process time for processing one product wafer. This process time is then the processing time for that number of product wafers. This method allows obtaining the processing time for different processing sets. For example, the process time T0 for processing one product wafer in processing set S1 is calculated by dividing the preset time T0 by the preset product quantity D0. Then, the process time T01 for processing one product wafer in processing set S1 is obtained by multiplying the product quantity D by the process time T01. This process time is then the processing time Tm0 for processing set S1, which is the processing time for step 1 in recipe 1 of the processing set S1. This method allows directly obtaining the processing time for different processing sets through calculation, without needing to know the number of processing positions within each processing set.

[0090] In one embodiment, the processing station includes one of etching equipment, photolithography equipment, cleaning equipment, deposition equipment, or testing equipment. It is understood that etching equipment includes wet etching tanks and dry etching equipment; photolithography equipment includes exposure equipment, developing equipment, and microscopic inspection equipment; cleaning equipment includes wet cleaning equipment and dry cleaning equipment; deposition equipment includes plasma chemical deposition equipment, plasma physical deposition equipment, atmospheric pressure chemical deposition equipment, sputtering equipment, epitaxial equipment, etc.; testing equipment includes thickness testing equipment, step testing equipment, resistivity testing equipment, doping concentration testing equipment, etc.; and furnace equipment includes vertical furnace tubes and horizontal furnace tubes, etc.

[0091] In one embodiment, the processing location includes a cleaning tank, and the number of products at each processing location in the processing station is 50.

[0092] Figure 6 This is a schematic block diagram of the processing location in a processing station according to another embodiment. For example... Figure 6As shown, taking a wet cleaning equipment as an example, the method for obtaining the capacity of the aforementioned processing station is illustrated. This wet cleaning equipment includes four cleaning tanks (processing positions), each capable of cleaning 50 product wafers simultaneously. The process menu to be run by the cleaning equipment is recipe 2. Tank 1 runs step 1 of recipe 2, tanks 2-1 and 2-2 run step 2 of recipe 2, and tank 3 runs step 3 of recipe 2. The first step, based on the steps in recipe 2 run by tanks 1, 2-1, 2-2, and 3, designates tank 1 as processing set C1, tanks 2-1 and 2-2 as processing set C2, and tank 3 as processing set C3. The second step is to obtain the processing time TC1 of processing set C1, the processing time TC2 of processing set C2, and the processing time TC3 of processing set C3. Assume that the processing time for tank1 to run step1 once is 1 minute, the processing time for tank2-1 and tank2-2 to run step2 once is 3 minutes, and the processing time for tank3 to run step3 once is 1 minute. Processing sets C1 and C3 each contain one cleaning tank, while processing set C2 contains two cleaning tanks. Therefore, when tank1 is equivalent to one cleaning tank, the equivalent processing time is 1 / 1 = 1 minute. When tank2-1 and tank2-2 are equivalent to one cleaning tank, the equivalent processing time is 3 / 2 = 1.5 minutes. When tank3 is equivalent to one cleaning tank, the equivalent processing time is 1 / 1 = 1 minute. In other words, the processing time for processing set C1 is 1 minute, the processing time for processing set C2 is 1.5 minutes, and the processing time for processing set C3 is 1 minute. The third step is to take the ratio of the number of products that can be placed in the cleaning tank to the processing time of processing set C1, 50 / 1 = 50 pcs / min, as the combined capacity of processing set C1. The ratio of the number of products that can be placed in the cleaning tank to the processing time of processing set C2, 50 / 1.5 = 33.3 pcs / min, as the combined capacity of processing set C2. The ratio of the number of products that can be placed in the cleaning tank to the processing time of processing set C3, 50 / 1 = 50 pcs / min, as the combined capacity of processing set C3. Then, compare the combined capacity of processing sets C1, C2, and C3, and take the smallest combined capacity of 33.3 pcs / min as the capacity of the wet cleaning equipment.

[0093] Figure 7 This is a flowchart illustrating the method for obtaining the processing station's capacity in another embodiment. For example... Figure 7As shown, in this embodiment, the processing station includes several processing positions, and each processing position can hold X products. X product wafers are defined as a group of products. The method for obtaining the processing station's capacity includes:

[0094] S502, using a processing station to complete the preparation of several groups of products, and sequentially obtaining the time interval between the completion of processing between two adjacent groups of products.

[0095] S504, if the (i+1)th time interval is equal to the 1st time interval, and the 2ith time interval is equal to the ith time interval, then the average of the 1st time interval, the 2nd time interval, ..., the ith time interval is the processing time t of the processing station, where i is a positive integer not less than 1.

[0096] S506: Obtain the capacity of the processing station based on the number of products that can be placed at each processing location and the processing time.

[0097] Specifically, the first step is to place several groups of products into processing station B, and then run the process menu recipeB. Timing begins when the products are placed into processing station B. The time when the first group of products leaves processing station B is time 1, the time when the second group of products leaves is time 2, and so on. The time when the i-th group of products leaves processing station B is time i, the time when the (i+1)-th group of products leaves is time (i+1), and the time when the 2i-th group of products leaves is time 2i, where i is a positive integer greater than or equal to 1. Then, the difference between time 2 and time 1 is used as the first time interval, the difference between time 3 and time 2 is used as the second time interval, and so on. The difference between time (i+1) and time 1 is used as the i-th time interval, and the difference between time (2i+1) and time 2i is used as the 2i time interval. In other words, the interval between the (i+1)-th group of products and the i-th group leaving processing station B is the i-th time interval. The second step is to compare the obtained time intervals. If the (i+1)th time interval equals the 1st time interval, the (i+2)th time interval equals the 2nd time interval, the (i+3)th time interval equals the 3rd time interval, and so on, the 2ith time interval equals the 1st time interval, the 2nd time interval, and so on, the 1st time interval, and so on, the 1st time interval, are all equal to the processing time t of processing station B. The third step is to find the quotient X / t of the number of products X that can be placed at the processing location and the processing time t, which is the capacity of processing station B.

[0098] Continue to refer to Figure 6Taking a wet cleaning equipment at a processing station as an example, this paper illustrates the method for obtaining the capacity of the aforementioned processing station. The wet cleaning equipment includes four cleaning tanks (processing positions), each capable of cleaning 50 product wafers simultaneously. The process menu to be run by the cleaning equipment is recipe 2. Specifically, cleaning tank 1 runs step 1 of recipe 2, cleaning tanks 2-1 and 2-2 run step 2 of recipe 2, and cleaning tank 3 runs step 3 of recipe 2. Assuming tank 1 takes 1 minute to complete step 1, tanks 2-1 and 2-2 each take 3 minutes to complete step 2, and tank 3 takes 1 minute to complete step 3, the first step involves placing several groups of products into the starting position of the wet cleaning equipment. Each group consists of 50 product wafers. Then, the process menu recipe 2 is run while timing is active. The time taken for the first group of product wafers to complete step 3 in recipe 2 and leave the wet cleaning equipment is 5 minutes. The time taken for the second group of product wafers to complete step 3 in recipe 2 and leave the wet cleaning equipment is 6 minutes. The time taken for the third group of product wafers to complete step 3 in recipe 2 and leave the wet cleaning equipment is 8 minutes. The time taken for the fourth group of product wafers to complete step 3 in recipe 2 and leave the wet cleaning equipment is 9 minutes. The time taken for the fifth group of product wafers to complete step 3 in recipe 2 and leave the wet cleaning equipment is 11 minutes. The time taken for the sixth group of product wafers to complete step 3 in recipe 2 and leave the wet cleaning equipment is 11 minutes. In recipe 2, the time it takes for step 3 to leave the wet cleaning equipment is 12 minutes. The time it takes for the 7th batch of product wafers to leave the wet cleaning equipment is 14 minutes. The time it takes for the 8th batch of product wafers to leave the wet cleaning equipment is 15 minutes. Then, the difference between the 2nd and 1st times is calculated as 6-5=1 minute as the 1st time interval, the difference between the 3rd and 2nd times is 8-6=2 minutes as the 2nd time interval, the difference between the 4th and 3rd times is 9-8=1 minute as the 3rd time interval, the difference between the 5th and 4th times is 11-9=2 minutes as the 4th time interval, the difference between the 6th and 5th times is 12-11=1 minute as the 5th time interval, the difference between the 7th and 6th times is 14-12=2 minutes as the 6th time interval, and the difference between the 8th and 7th times is 15-14=1 minute as the 7th time interval.The second step is to compare the 1st, 2nd, 3rd, 4th, 5th, 6th, and 7th time intervals. The 7th time interval = the 5th time interval = the 3rd time interval = the 1st time interval = 1 min, and the 6th time interval = the 4th time interval = the 2nd time interval = 2 min, i.e., i = 2. At this point, (1st time interval + 2nd time interval) / 2 = (1 + 2) / 2 = 1.5 min, which is the processing time t of the wet cleaning equipment. The third step is to divide the number of products that can be placed in the cleaning tank by the processing time of the wet cleaning equipment. X / t = 50 / 1.5 = 33.3 pcs / min, which is the capacity of the wet cleaning equipment.

[0099] Figure 8 A diagram illustrating the production capacity of different types of equipment operating the same process menu at the same processing station. (Example) Figure 8 As shown in the figure, for equipment A and equipment B of the same type but different, the production capacity of the two equipment is similar when running the same process menu. That is, the production capacity data of the processing station obtained by the method of obtaining the production capacity of the processing station in this application is stable and complete, does not introduce the idle time of the processing station, and has high accuracy.

[0100] It should be understood that, although Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 7 The steps in the flowchart are shown sequentially as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order in which these steps are executed, and they can be performed in other orders. Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 7 At least some of the steps in the process may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least some of the sub-steps or stages of other steps.

[0101] Figure 9 This is a schematic diagram of the structure of a system for obtaining the processing station's capacity in one embodiment. For example... Figure 9As shown, in this embodiment, the processing station includes several processing positions, and the processing station capacity acquisition system includes: a setting module 102, an acquisition module 104, and a calculation module 106. The setting module 102 is used to set the processing positions that run the same process menu step as a processing set; the acquisition module 104 is used to acquire the processing time corresponding to each processing set, where the processing time refers to the equivalent process time obtained when each processing position in the processing set is equivalent to a single processing position; the calculation module 106 is used to obtain the set capacity corresponding to the processing set based on the ratio of the number of products that can be placed at each processing position in each processing set to the processing time, and to take the minimum set capacity as the capacity of the processing station; wherein, the number of products that can be placed at each processing position in the same processing set is the same.

[0102] Specifically, processing station A includes several different processing positions. The process menu running in processing station A is recipe 1. The setting module 102 groups the processing positions that run the same step (e.g., step 1) in process menu recipe 1 into a processing set, that is, processing positions with the same function are grouped into a processing set. In this way, each processing position corresponding to process menu recipe 1 in processing station A is divided into processing sets that correspond one-to-one with the steps involved in the processing positions in process menu recipe 1. At this time, the number of processing sets is the same as the number of steps involved in the processing positions in process menu recipe 1. For example... Figure 2As shown, steps 1, 2, 5, and 6 in the process menu recipe 1 all involve processing positions. The setting module 102, based on the steps in the process menu corresponding to each processing position, divides the processing positions in processing station A into processing set S1 corresponding to step 1, processing set S2 corresponding to step 2, processing set S3 corresponding to step 5, and processing set S4 corresponding to step 6. The acquisition module 104 equates each processing position in the processing set to a single processing position, obtains the equivalent process time for the equivalent processing position, and uses this equivalent process time as the processing time for that processing set. This process is repeated to obtain the processing times for the remaining processing sets. For example, the processing set S1 corresponding to step 1 in the process menu recipe 1 includes three processing positions. First, processing positions M1, M2, and M3 in processing set S1 are equivalent to one processing position M0. The function and the number of products D that can be placed at processing position M0 are the same as any processing position Mn in processing set S1. The number of products that can be placed refers to the number of product wafers that can be processed simultaneously at the processing position. Then, the equivalent process time of processing position M0 is obtained and used as the processing time Tm0 of processing set S1. The equivalent process time refers to the process time required to process D product wafers through processing position M0. Similarly, the processing times of processing sets S2, S3, and S4 corresponding to process menu recipe 1 are obtained respectively. The calculation module 106 obtains the ratio of the number of products that can be placed at each processing position in each processing set and the processing time as the set capacity corresponding to the processing set, and uses the minimum set capacity as the capacity of the processing station; wherein, the number of products that can be placed at each processing position in the same processing set is the same. For example, the number of products that can be placed at processing positions M1, M2, and M3 in processing set S1 is D, and the total capacity of processing set S1 is Wm = D / Tm0. Similarly, the total capacity of processing sets S2, S3, and S4 corresponding to process menu recipe 1 is obtained respectively. Then, the values ​​of the total capacity of processing sets S1, S2, S3, and S4 are compared, and the total capacity with the smallest value is taken as the capacity of the processing station.

[0103] For example, the setting module 102 includes a memory and a microcontroller. It sets processing positions that run the same process menu steps as a processing set by executing a computer program stored in the memory or microcontroller. The acquisition module 104 includes a timer, a sensor, a memory, a microcontroller, or a processor. It obtains the processing time corresponding to each processing set by executing a computer program stored in the timer, sensor, memory, microcontroller, or processor. The calculation module 106 includes a microcontroller, a comparator, a divider, or a processor. During the execution of the computer program stored in the microcontroller, comparator, divider, or processor, it obtains the set capacity corresponding to each processing set based on the ratio of the number of products that can be placed at each processing position to the processing time, and uses the minimum set capacity as the capacity of the processing station.

[0104] The aforementioned system for obtaining the capacity of processing stations treats processing positions that perform the same process menu steps as a processing set, then obtains the processing time corresponding to each processing set. The processing time refers to the equivalent process time obtained by converting each processing position in the processing set into a single processing position. The ratio of the number of products that can be placed at each processing position in each processing set to the processing time is then used as the set capacity, and the smallest set capacity is taken as the capacity of the processing station. This method for obtaining the capacity of processing stations effectively eliminates waiting time in product production and eliminates the need for manual stacking of products with the same steps and running the same process menu. It is simple to operate and provides high data accuracy.

[0105] In one embodiment, the acquisition module 104 is further configured to acquire the number of processing positions in each processing set. For example, the acquisition module 104 includes sensors and counters, and acquires the number of processing positions in each processing set by executing a computer program stored in the sensors and counters.

[0106] In one embodiment, the number of products that can be placed at each processing position in the processing station is the same, that is, the number of products that can be placed at any processing position Mn in processing set S1, any processing position in processing set S2, any processing position in processing set S3, and any processing position in processing set S4 is the same.

[0107] In one embodiment, the acquisition module 104 is further configured to acquire the process time corresponding to any processing position in the processing set. The process time refers to the time interval from when the product is placed in the processing position to when it leaves the processing position when the process menu step is executed at the processing position. For example, when the processing set S1 is running step 1 in the process menu recipe 1, the acquisition module 104 acquires the time interval from when the product wafer is placed in any processing position Mn in the processing set S1 to when it leaves the processing position Mn, as the process time Tn of the processing position Mn. The calculation module 106 is further configured to obtain the processing time corresponding to the processing set based on the ratio of the processing time to the number of positions in the processing set. Specifically, during the processing of the product wafer in step 1 of recipe 1 at processing position Mn, other processing positions in processing set S1 (other than processing position Mn) can be in the same processing state. The process time for each processing position in processing set S1 is Tn. The equivalent process time of processing position M0 obtained by the three processing positions in processing set S1 is the quotient of the process time Tn of processing position Mn divided by the number of positions 3 in processing set S1, i.e., the processing time Tm0 of processing set S1 = process time Tn / number of positions 3. Then, the processing times of processing sets S2 (number of positions is 2), S3 (number of positions is 3), and S4 (number of positions is 1) corresponding to process menu recipe 1 can be obtained in this way. The processing time Tm0 obtained in this application is not affected by the idle time between the production of adjacent batches of product wafers.

[0108] For example, the acquisition module 104 includes a timer and a sensor, and acquires the process time corresponding to any processing position in the processing set by executing a computer program stored in the timer and the sensor.

[0109] Figure 10 This is a schematic diagram of the structure of a system for obtaining the processing station's capacity, as shown in another embodiment. Figure 10 As shown, in this embodiment, the system for obtaining the processing station's capacity further includes:

[0110] Control module 108 is used to designate the processing set with the longest processing time as the first processing set, and the processing set with more than one position and the shortest processing time as the second processing set. Control module 108 is also used to control the increase in the number of positions in the first processing set and the decrease in the number of positions in the second processing set; wherein the increase in the number of positions in the first processing set is equal to the decrease in the number of positions in the second processing set. With the total number of processing positions in processing station A remaining constant, increasing the number of processing positions in the first processing set while decreasing the number of processing positions in the second processing set, where the increase in the number of positions in the first processing set is equal to the decrease in the number of positions in the second processing set. In processing station A, the first processing set has the longest processing time, and since the number of products that can be placed at each processing position in processing station A is the same, the combined capacity of the first processing set is the smallest, which is the capacity of processing station A. The processing time of a processing set = process time / number of positions. The processing capacity of a processing set = number of products that can be placed at the processing positions in the processing set / processing time. With the process time remaining unchanged, increasing the number of positions in the first processing set can reduce the processing time of the first processing set and increase the processing capacity of the first processing set (the number of products that can be placed at the processing positions in the first processing set remains unchanged), thereby achieving the goal of increasing the capacity of the processing station.

[0111] For example, the control module 108 includes a processor or a microcontroller, which executes a computer program stored in the memory or microcontroller to select the processing set with the longest processing time as the first processing set and the processing set with the number of positions greater than 1 and the shortest processing time as the second processing set; it also controls to increase the number of positions in the first processing set and simultaneously controls to decrease the number of positions in the second processing set.

[0112] In one embodiment, the acquisition module 104 is further configured to acquire the preset number of products obtained within a preset time when all processing positions in the processing set simultaneously run the corresponding process menu steps; the calculation module 106 is further configured to calculate the time required to obtain the product quantity through the processing set based on the preset time and the preset product quantity, and use it as the processing time of the processing set. This method allows for direct calculation to obtain the processing time of different processing sets without needing to know the number of processing positions within each processing set.

[0113] In one embodiment, the processing station includes one of etching equipment, photolithography equipment, cleaning equipment, deposition equipment, or testing equipment. It is understood that etching equipment includes wet etching tanks and dry etching equipment; photolithography equipment includes exposure equipment, developing equipment, and microscopic inspection equipment; cleaning equipment includes wet cleaning equipment and dry cleaning equipment; deposition equipment includes plasma chemical deposition equipment, plasma physical deposition equipment, atmospheric pressure chemical deposition equipment, sputtering equipment, epitaxial equipment, etc.; testing equipment includes thickness testing equipment, step testing equipment, resistivity testing equipment, doping concentration testing equipment, etc.; and furnace equipment includes vertical furnace tubes and horizontal furnace tubes, etc.

[0114] In one embodiment, the processing location includes a cleaning tank, and the number of products at each processing location in the processing station is 50.

[0115] This application also provides another embodiment of a system for obtaining the capacity of a processing station. In this embodiment, the system for obtaining the capacity of a processing station includes a processor, wherein the processor is configured to execute the following program modules stored in a memory:

[0116] The setting module 102 is used to set the processing positions that run the same process menu steps as a processing set; the acquisition module 104 is used to acquire the processing time corresponding to each processing set, where the processing time refers to the equivalent process time obtained when each processing position in the processing set is equivalent to a single processing position; the calculation module 106 is used to obtain the set capacity corresponding to the processing set based on the ratio of the number of products that can be placed at each processing position in each processing set to the processing time, and to take the minimum set capacity as the capacity of the processing station; wherein, the number of products that can be placed at each processing position in the same processing set is the same.

[0117] This application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method for obtaining the processing station capacity as described in any of the preceding claims.

[0118] This application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method for obtaining the processing station capacity as described in any of the preceding claims.

[0119] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0120] The above-described embodiments are merely illustrative of several implementation methods of the embodiments of this application, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the embodiments of this application, and these all fall within the protection scope of the embodiments of this application. Therefore, the protection scope of the patent for the embodiments of this application should be determined by the appended claims.

Claims

1. A method for obtaining the production capacity of a processing station, wherein the processing station includes several processing positions, characterized in that, include: Processing locations that run the same process menu step are treated as a processing set; Obtain the number of processing positions in each of the processing sets; Obtain the processing time corresponding to each of the processing sets, where the processing time refers to the equivalent process time obtained by equating each processing position in the processing set to a single processing position. The ratio of the number of products that can be placed at the processing position in each processing set to the processing time is taken as the set capacity corresponding to the processing set, and the minimum set capacity is taken as the capacity of the processing station. In this case, the number of products that can be placed at each processing position in the same processing set is the same; The processing set with the longest processing time is selected as the first processing set; The processing set with the most positions and the shortest processing time is selected as the second processing set; Increase the number of positions in the first processing set, and simultaneously decrease the number of positions in the second processing set; Wherein, the increase in the number of positions in the first processing set is equal to the decrease in the number of positions in the second processing set.

2. The acquisition method according to claim 1, characterized in that, The step of obtaining the processing time corresponding to each of the processing sets includes: Obtain the process time corresponding to any processing position in the processing set. The process time refers to the time interval from when the product is placed in the processing position to when it leaves the processing position when the process menu step is executed at the processing position. The processing time corresponding to the processing set is obtained based on the ratio of the process time to the number of positions in the processing set.

3. The acquisition method according to claim 1, characterized in that, The step of obtaining the processing time corresponding to each of the processing sets includes: The preset number of products obtained within a preset time when all processing positions in the processing set run the corresponding process menu steps simultaneously; Based on the preset time and the preset product quantity, the process time required for the product quantity obtained through the processing set is obtained, and this time is used as the processing time corresponding to the processing set.

4. The acquisition method according to claim 1, characterized in that, The processing station includes one of etching equipment, photolithography equipment, cleaning equipment, deposition equipment, or testing equipment.

5. The acquisition method according to claim 1, characterized in that, The processing location includes a cleaning tank, and the number of products at each processing location in the processing station is 50.

6. A system for acquiring the production capacity of a processing station, wherein the processing station comprises a plurality of processing locations, characterized in that, include: The settings module is used to set the processing locations that run the same process menu steps as a processing set; The acquisition module is used to acquire the processing time corresponding to each of the processing sets, wherein the processing time refers to the equivalent process time obtained by equating each processing position in the processing set to a single processing position; the acquisition module is also used to acquire the number of processing positions in each of the processing sets. The calculation module is used to obtain the set capacity corresponding to the processing set based on the ratio of the number of products that can be placed at the processing position in each processing set to the processing time, and to take the minimum set capacity as the capacity of the processing station. In this case, the number of products that can be placed at each processing position in the same processing set is the same; The control module is used to select the processing set with the longest processing time as the first processing set, and the processing set with the number of positions greater than 1 and the shortest processing time as the second processing set; The control module is also used to control the increase in the number of positions of the first processing set, and at the same time control the decrease in the number of positions of the second processing set; Wherein, the increase in the number of positions in the first processing set is equal to the decrease in the number of positions in the second processing set.

7. The acquisition system according to claim 6, characterized in that, The acquisition module is also used to acquire the process time corresponding to any processing position in the processing set. The process time refers to the time interval from when the product is placed in the processing position to when it leaves the processing position when the process menu step is executed at the processing position. The calculation module is also used to obtain the processing time corresponding to the processing set based on the ratio of the processing time to the number of positions in the processing set.

8. The acquisition system according to claim 6, characterized in that, The acquisition module is also used to acquire the preset number of products obtained within a preset time when all processing positions in the processing set simultaneously run the corresponding process menu steps; The calculation module is also used to obtain the process time required for the product quantity obtained by the processing set according to the preset time and the preset product quantity, and use it as the processing time of the processing set.

9. The acquisition system according to claim 6, characterized in that, The processing station includes one of etching equipment, photolithography equipment, cleaning equipment, deposition equipment, or testing equipment.

10. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method according to any one of claims 1 to 5.

11. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method according to any one of claims 1 to 5.

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