Substrate transport assembly and method
By emitting light and capturing images in the substrate transfer assembly, and combining image analysis to control substrate transfer, the problem of collision hazards during substrate transfer is solved, achieving stable and reliable transfer control and avoiding collisions with objects in front.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SYSTEM ENGINEERING MEGA SOLUTION CO LTD
- Filing Date
- 2022-06-20
- Publication Date
- 2026-07-17
AI Technical Summary
In the existing technology, there is a risk of collision during the transfer of substrates that is difficult to prevent. In particular, when the learning data of the transfer robot is abnormal, the substrate is easily transferred to an abnormal position. Furthermore, the method of taking pictures with a camera or emitting light and receiving reflected light cannot fully identify obstacles in front, which increases the risk of collision and results in a slow response.
The system employs a substrate transport assembly, including a robotic arm body, a light emitting component, and an imaging component. By emitting light forward and capturing images, the control unit controls the substrate transport based on image analysis, divides areas to determine collision hazards, and captures images in real time or periodically to identify object positions and movement changes, ensuring stable and reliable transport.
It effectively prevents the substrate from colliding with objects in front, improving the stability and reliability of the transmission process. It can promptly identify and avoid collisions with obstacles in unreached areas, thus enhancing the speed and reliability of transmission.
Smart Images
Figure CN115706036B_ABST