Target ball adsorption and micro force detection device based on capacitive sensor

Abstract

The application discloses a target ball adsorption and micro-force detection device based on a capacitive sensor, which comprises a first fixing mechanism, a gas cylinder, an adsorption mechanism, a cylinder mechanism and a sensing mechanism. The first fixing mechanism comprises a fixing seat, a base and an adapter seat. The gas cylinder is arranged in the fixing seat and can rotate one-dimensionally relative to the fixing seat. The adsorption mechanism comprises a gas pipe, an adsorption pipe and an adsorption needle. The gas pipe is arranged in the base. One end of the adsorption pipe extends into the gas cylinder, and the other end of the adsorption pipe is connected with one end of the gas pipe. One end of the adsorption needle is inserted into the gas cylinder and is close to one end of the adsorption pipe. The cylinder mechanism is arranged on the fixing seat. The sensing mechanism comprises a counterweight, a second fixing mechanism, a capacitive sensor, two fiber hairs and two piezoelectric ceramic sheets. One end of the counterweight is connected with the gas cylinder. The capacitive sensor is arranged above the other end of the counterweight. The two piezoelectric ceramic sheets are arranged opposite to the two fiber hairs. The two fiber hairs and the two piezoelectric ceramic sheets are respectively in contact with the upper and lower surfaces of the other end of the counterweight. The application has simple structure, super-high precision and stability.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of micro-assembly technology, and particularly relates to a target ball adsorption and micro-force detection device based on a capacitive sensor. BACKGROUND

[0002] With the increasing perfection of microelectronic and micromachining technology, IC manufacturing technology is introduced into precision machinery manufacturing, and micromachining, micro-sensor, micro-actuator and other micromachining technologies appear. Among them, the micro-mechanical and its control processing circuit are integrated together to form a micro-electro-mechanical system-MEMS technology. The micro-electro-mechanical system has the advantages of small size, light weight, low power consumption, high reliability, powerful function, easy batch production and the like. Through micro-device assembly technology, MEMS devices of different materials and different processings can be combined into a micro-system capable of completing a specific function, so the micro-assembly technology has become the core basic technology of current MEMS research, and the micro-assembly robot is an effective tool for replacing manual implementation of precision micro-device assembly. Micro-assembly robot technology makes it possible to perform batch automatic assembly of MEMS devices on a micro scale, greatly promoting the development and application of micro-nano science.

[0003] The core of micro-assembly is to study suitable micro-driving and micro-gripping technology for micro-scale effects to overcome various micro factors such as adhesion, so as to realize precise positioning and effective gripping and releasing of micro devices. The micro-gripper is an important part of the micro-assembly robot system, and as the end effector of the micro-assembly robot, its main function is to realize picking up, transporting and releasing operations on micro objects (parts), and complete certain assembly actions.

[0004] As a small-sized structural part, the target ball has the characteristics of small geometric size and low rigidity, so it is particularly important to non-damage adsorb and non-damage move the target ball after adsorption. The general assembly process of the target ball is as follows: a target ball is adsorbed by an adsorption needle and then stretched into a small hole in the side wall of a diagnostic ring, two horizontal microscopic visual light paths of vision are basically orthogonal, and are used to observe the front view and the right view of the target ball, through visual guidance, the target ball is basically fixed by a clamping film, the adsorption needle is withdrawn, and the target ball assembly task is completed. However, the non-damage adsorption and non-damage movement of the target ball adsorber often depend on the feedback of the sensor, and the force of micro-operation is usually micro-newton level, and airflow often causes great disturbance to force detection.

[0005] Conventional target ball adsorption devices cannot simultaneously adsorb and assemble target balls, coarsely position the target ball at the target location, or detect micro-Newton forces. Because the pinholes of conventional target ball adsorbers are only on the order of micrometers, it is impossible to add additional sensors at the end of the pin for detection within the confined assembly space after the target ball is adsorbed, thus lacking force detection capabilities. Furthermore, since the ends of the adsorption pins in conventional target ball adsorbers are directly connected to the air tube, the weight and elasticity of the air tube itself can interfere with the detection. Target balls are easily damaged, requiring very high assembly forces, and the resolution for precise detection and control of assembly forces is insufficient. Summary of the Invention

[0006] To address the shortcomings of existing technologies, the present invention aims to provide a target ball adsorption and micro-force detection device based on a capacitive sensor.

[0007] To achieve the above objectives, an embodiment of the present invention provides the following technical solution:

[0008] A target ball adsorption and micro-force detection device based on a capacitive sensor, comprising:

[0009] The first fixing mechanism includes a fixing seat, a base and an adapter seat respectively connected to both ends of the fixing seat;

[0010] An air pump is disposed within the fixed base and is capable of rotating one dimension relative to the fixed base;

[0011] An adsorption mechanism is provided, comprising a gas tube, an adsorption tube, and an adsorption needle. The gas tube is disposed within the base. One end of the adsorption tube extends into the gas cylinder, and the other end is connected to one end of the gas tube. One end of the adsorption needle is inserted into the gas cylinder and is close to one end of the adsorption tube.

[0012] A cylinder mechanism is provided on the fixed base, and the cylinder mechanism can limit the rotation of the air cylinder;

[0013] The sensing mechanism includes a counterweight, a second fixing mechanism, a capacitive sensor connected to the second fixing mechanism, two fiber hairs, and two piezoelectric ceramic plates. One end of the counterweight is connected to the air cylinder, the capacitive sensor is located above the other end of the counterweight, the two piezoelectric ceramic plates are arranged opposite to the two fiber hairs, and the two fiber hairs and the two piezoelectric ceramic plates are respectively in contact with the upper and lower surfaces of the other end of the counterweight.

[0014] As a further improvement of the present invention, the second fixing mechanism includes a first fixing support, a second fixing support, and a fixing frame connecting the first fixing support and the second fixing support, wherein both piezoelectric ceramic sheets are connected to the first fixing support, both fiber hairs are connected to the second fixing support, and the capacitive sensor is connected to the fixing frame.

[0015] As a further improvement of the present invention, the fixing frame includes a top plate and a side plate connected to each other, and the top plate and the side plate are respectively connected to the first fixing support and the second fixing support.

[0016] As a further improvement of the present invention, a base plate is connected between the lower end of the first fixed support and the lower end of the second fixed support.

[0017] As a further improvement of the present invention, a support frame is also provided, wherein the fixed frame and the base plate are both connected to the support frame, and the base and the adapter are respectively connected to both ends of the support frame.

[0018] As a further improvement of the present invention, the side plate is fixed with a connector.

[0019] As a further improvement of the present invention, the adsorption needle is arranged opposite to the counterweight.

[0020] As a further improvement of the present invention, the air cylinder portion extends into the base, and the base is provided with an air guide hole mechanism, which is connected to the air cylinder.

[0021] As a further improvement of the present invention, the air guide hole mechanism includes two first air guide holes arranged opposite each other in the vertical direction and two second air guide holes arranged opposite each other in the horizontal direction.

[0022] As a further improvement of the present invention, one end of the air cylinder is interference-fitted with a support shaft, and a first bearing and a second bearing are respectively provided in the two ends of the fixed seat. The free end of the first support shaft is fitted in the first bearing, and the other end of the air cylinder passes through the second bearing.

[0023] The beneficial effects of this invention are:

[0024] (1) The present invention has a simple structure and strong practicality. It can be applied to the simultaneous adsorption and assembly of the target ball, the coarse positioning of the target ball to the target position, and the detection of micro Newton force.

[0025] (2) A capacitive sensor is used to detect the external force when the target ball adsorbed at the end of the adsorption needle encounters the target object. Force detection is achieved indirectly by measuring displacement changes, and the resolution can reach 10 micronewtons.

[0026] (3) The measurement between the capacitive sensor and the counterweight is non-contact and wear-free. By providing the capacitive sensor with a continuous and stable AC current, the change in current and voltage amplitude is proportional to the distance between the capacitive sensor and the counterweight. After demodulation, the AC current can be output in the form of an analog signal to obtain the position change of the counterweight. It also has ultra-high precision and stability, and its high bandwidth can be applied to high-speed measurement.

[0027] (4) The adsorption needle does not directly contact the trachea, which can effectively prevent interference from the force detection due to the gravity and elasticity of the trachea itself.

[0028] (5) The target ball is adsorbed and assembled without damage by negative pressure adsorption.

[0029] (6) The degree of bending is controlled by controlling the input voltage of the piezoelectric ceramic sheet, thereby controlling the degree of deflection of the counterweight. By setting the limit deflection displacement of the end of the piezoelectric ceramic sheet after energization, the displacement correction after the counterweight swings is realized, ensuring that the adsorption needle is in a horizontal position for easy operation next time. At the same time, the degree of bending is controlled by controlling the input voltage of the piezoelectric ceramic sheet, thereby controlling the degree of deflection of the adsorption needle.

[0030] (7) The base has an air guide hole mechanism, which can effectively prevent the friction of the high-speed airflow at the first and second bearings on the bearing balls, so that the air cylinder can achieve one degree of freedom of deflection without contact friction, and ensure the accurate transmission of deflection force. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is an assembly drawing of a preferred embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the sensing mechanism according to a preferred embodiment of the present invention;

[0034] Figure 3 This is a cross-sectional view of the first fixing mechanism and the air cylinder according to a preferred embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the structure of the fixed base with an air cylinder in a preferred embodiment of the present invention;

[0036] Figure 5 This is a schematic diagram of the cylinder mechanism according to a preferred embodiment of the present invention;

[0037] Figure 6 This is a schematic diagram of the structure of the counterweight and adsorption needle connected to the air cylinder in a preferred embodiment of the present invention;

[0038] Figure 7 This is a schematic diagram illustrating the force detection principle of the adsorption needle adsorbing the target ball according to a preferred embodiment of the present invention.

[0039] In the diagram: 1. First fixing mechanism; 11. Fixing seat; 111. First bearing; 112. Second bearing; 12. Base; 121. Cavity; 122. First air guide hole; 123. Second air guide hole; 13. Adapter seat; 2. Air cylinder; 21. Support shaft; 22. First positioning hole; 23. Second positioning hole; 3. Adsorption mechanism; 31. Air pipe; 32. Adsorption tube; 33. Adsorption needle; 4. Cylinder mechanism; 41. Cylinder; 42. Cylinder head; 4 3. Push rod; 431. Piston; 432. Push rod body; 44. Protruding post; 45. Spring; 5. Sensing mechanism; 51. Counterweight; 52. Second fixing mechanism; 521. First fixing support; 522. Second fixing support; 523. Fixing frame; 524. Top plate; 525. Side plate; 526. Bottom plate; 527. Bearing frame; 528. Connector; 53. Capacitive sensor; 54. Fiber; 55. Piezoelectric ceramic sheet; 6. Target ball. Detailed Implementation

[0040] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0041] Please see Figures 1-5This application discloses a target ball adsorption and micro-force detection device based on a capacitive sensor, comprising: a first fixing mechanism 1, which includes a fixing base 11, a base 12 and an adapter 13 respectively connected to both ends of the fixing base 11; an air cylinder 2, disposed within the fixing base 11 and capable of rotating one-dimensionally relative to the fixing base 11; and an adsorption mechanism 3, which includes an air tube 31, an adsorption tube 32 and an adsorption needle 33. The air tube 31 is disposed within the base 12, one end of the adsorption tube 32 extends into the air cylinder 2, and the other end is connected to one end of the air tube 31. One end of the adsorption needle 33 is inserted into the air cylinder 2 and close to the adsorption tube 33. One end of the auxiliary tube 32; a cylinder mechanism 4, mounted on the fixed base 11, which restricts the rotation of the air cylinder 2; a sensing mechanism 5, which includes a counterweight 51, a second fixing mechanism 52, and a capacitive sensor 53, two fiber hairs 54, and two piezoelectric ceramic plates 55 connected to the second fixing mechanism 52. One end of the counterweight 51 is connected to the air cylinder 2, the capacitive sensor 53 is located above the other end of the counterweight 51, and the two piezoelectric ceramic plates 55 are arranged opposite to the two fiber hairs 54. The two fiber hairs 54 and the two piezoelectric ceramic plates 55 are in contact with the upper and lower surfaces of the other end of the counterweight 51, respectively. The air path starts from the adsorption needle 33, passes through the adsorption tube 32 in the air cylinder 2, and then through the air tube 31 in the base 12, and is connected to the vacuum generator to provide negative pressure for the adsorption needle 33.

[0042] Specifically, the two ends of the fixed seat 11 are threadedly connected to the base 12 and the adapter seat 13, respectively.

[0043] To prevent the weight of the long rubber tube connected to the vacuum generator from damaging the fit between the air tube 31 and the base 12, it is preferable that the adapter 13 has an inverted L-shaped through hole 131. The other end of the air tube 31 in the base 12 is connected to the inverted L-shaped through hole 131 through a rubber tube, and then connected to the vacuum generator through the inverted L-shaped through hole 131. In this way, only a very short rubber tube is needed to connect the air tube 31 to the adapter 13, which can reduce the weight of the rubber tube on the air tube 31.

[0044] One end of the air cylinder 2 is interference-fitted with a support shaft 21. A first bearing 111 and a second bearing 112 are respectively installed at both ends of the fixed base 11. The free end of the support shaft 21 fits into the first bearing 111, and the other end of the air cylinder 2 passes through the second bearing 112. The support shaft 21 achieves a seal at one end of the air cylinder 2. Simultaneously, the support shaft 21 fits into the first bearing 111, and the other end of the air cylinder 2 fits into the second bearing 112. This confines the air cylinder 2 within the fixed base 11, restricting five degrees of freedom while retaining one rotational degree of freedom, allowing it to rotate around the axes of the first bearing 111 and the second bearing 112. This enables non-destructive adsorption of the target ball and allows for one-dimensional undamped rotation. The adsorption tube 32 is horizontally located inside the air cylinder 2, without contacting it. Therefore, rotation of the air cylinder 2 will not affect the adsorption tube 32 or the air pipe 31. To ensure the supply of negative pressure, it is preferable that the air pipe 31 is interference-fitted with the base 12. To facilitate the ventilation of the trachea 31, it is preferable that a cavity 121 is provided in the end of the base 12 away from the fixed base 11, and the free end of the trachea 31 is located in the cavity 121.

[0045] In this embodiment, the air cylinder 2 extends into the base 12, and the base 12 is provided with an air guide hole mechanism that is connected to the air cylinder 2 to form an airflow passage. Specifically, the air guide hole mechanism includes two first air guide holes 122 arranged opposite each other in the vertical direction and two second air guide holes 123 arranged opposite each other in the horizontal direction. When adsorbing the target ball, most of the negative pressure acts directly on the adsorption needle 33, and a small portion of the negative pressure causes a rapid airflow to form inside the air cylinder 2, which overflows from the two first air guide holes 122 and the two second air guide holes 123 at the base 12. The external airflow flows at high speed in the passage, which can effectively prevent the air pressure inside the air cylinder 2 from being too high and damaging the device. At the same time, it prevents the formation of a high-speed airflow, avoiding the frictional force that the high-speed airflow would create on the balls of the first bearing 111 and the second bearing 112, thus preventing them from rotating and ensuring the smooth rotation of the first bearing 111 and the second bearing 112.

[0046] like Figure 5As shown, the cylinder mechanism 4 includes a cylinder 41, a cylinder head 42, and a push rod 43. The cylinder head 42 is located at the top of the cylinder 41. The push rod 43 includes a piston 431 and a push rod body 432. The piston 431 is located inside the cylinder 41. One end of the push rod body 432 is connected to the piston 431, and the other end extends out of the bottom of the cylinder 41. Two protrusions 44 are provided on the inner bottom wall of the cylinder 41. Each protrusion 44 is fitted with a spring 45. The two ends of the spring 45 are connected to the inner bottom wall of the cylinder 41 and the lower surface of the piston 431, respectively. The protrusions 44 limit the position of the spring 45 and also serve as a safety device. If the pressure difference between the upper and lower surfaces of the piston 431 in the cylinder 41 is too large, it can prevent serious damage to other components. The pressure difference in the cylinder 41 can be achieved by an air compressor. The push rod 43 in the cylinder 41 is controlled by the pressure difference between the spring 45 and the upper and lower surfaces of the piston 431. When the target ball adsorption operation is performed, the air pressure difference in the cylinder 41 increases, thereby causing the push rod 43 to overcome the spring force and do work. This causes the push rod body 432 of the push rod 43 to come into contact with the outer surface of the air cylinder 2, restricting the rotational freedom of the air cylinder 2, thereby fixing the air cylinder 2 and thus fixing the adsorption needle 33.

[0047] like Figure 6 As shown, the adsorption needle 33 is connected to the inside of the air cylinder 2, and the adsorption needle 33 is positioned opposite to the counterweight 51, enabling the force on the target ball to be quickly and accurately transferred to the counterweight 51. Specifically, the air cylinder 2 is provided with a first positioning hole 22 and a second positioning hole 23, which are positioned opposite to each other and are both connected to the inside of the air cylinder 2. One end of the adsorption needle 33 is inserted into the first positioning hole 22, and one end of the counterweight 51 is inserted into the second positioning hole 23. The air path starts from the adsorption needle 33 and ends at the vacuum generator, forming a complete passage. When the air cylinder 2 is fixed, the vacuum generator is activated, creating a negative pressure inside the air cylinder 2, which adsorbs the target ball through the adsorption needle 33. When the push rod 43 of the cylinder mechanism 4 disengages from the air cylinder 2, giving the air cylinder 2 a degree of rotational freedom, it can be used for detecting micro-force levels and assembling the target ball.

[0048] In this embodiment, the second fixing mechanism 52 includes a first fixing support 521 and a second fixing support 522 disposed opposite to each other, and a fixing frame 523 connecting the first fixing support 521 and the second fixing support 522. Two piezoelectric ceramic sheets 55 are both connected to the first fixing support 521, two fiber hairs 54 are both connected to the second fixing support 522, and a capacitive sensor 53 is connected to the fixing frame 523.

[0049] The first fixed support 521 is fixed to the two piezoelectric ceramic plates 55 with screws. The piezoelectric ceramic plates 55 are connected to an external circuit by wires. By controlling the input voltage of the piezoelectric ceramic plates 55, the degree of bending is controlled, thereby controlling the degree of deflection of the counterweight 51. The limit deflection displacement of the free end of the piezoelectric ceramic plate 55 after being energized is 420 micrometers, thus realizing the displacement correction after the counterweight 51 deflects. By resetting the counterweight 51, the adsorption needle 33 can be kept in a horizontal position for the next use.

[0050] Preferably, the fixing frame 523 includes a top plate 524 and a side plate 525 connected to each other, and the top plate 524 and the side plate 525 are respectively connected to the first fixing support 521 and the second fixing support 522.

[0051] To improve the stability of the second fixing mechanism 52, it is preferable that a base plate 526 is connected between the lower end of the first fixing support 521 and the lower end of the second fixing support 522.

[0052] It is also equipped with a support frame 527, a fixed frame 523 and a base plate 526, which are all connected to the support frame 527. The base 12 and the adapter 13 are respectively connected to the two ends of the support frame 527, which improves the stability of the base 12 and the adapter 13, and at the same time can connect the adsorption mechanism 3 and the sensing mechanism 5 into one unit.

[0053] Specifically, a connector 528 is fixed to the side plate 525 to facilitate connection with external equipment such as a robotic arm. Specifically, the connector 528 is threadedly connected to the side plate 525. Specifically, the capacitive sensor 53 is interference-fitted with the top plate 524.

[0054] Figure 7 The principle diagram of adsorption detection is shown. Equation 1 can be easily obtained through the lever principle:

[0055] F1*L1=F3+F2*L2

[0056]

[0057] Wherein: F1 is the force on the target ball, F2 is the detection force (which can be detected by the capacitive sensor 53), L1 is the length of the adsorption needle 33, L2 is the length of the counterweight 51, and F3 is the frictional force of the first bearing 111 and the second bearing 112 (which can be measured experimentally).

[0058] If the target ball 6 adsorbed on the adsorption needle 33 comes into contact with the target micro-gripper or other target object, it will be subjected to a tiny external force at the micro-Newton level. This force is transmitted through the lever structure, causing the counterweight 51 on the other side to deflect. The deflection of the counterweight 51 causes the fiber hair 54 to bend. The deflection displacement of the counterweight 51 is detected by the capacitive sensor 53, and the degree of bending of the fiber hair 54 is obtained through the displacement. By calibrating the relationship between the degree of bending of the fiber hair 54 and the force, force information is obtained. After calibration, the displacement change detected by the capacitive sensor 53 can be matched one-to-one with the micro-force at the other end of the counterweight 51, thus obtaining the detected force F2. Substituting into Equation 1, the force F1 on the target ball 6 can be obtained. In this way, when the left and right clamping membranes may not be able to maintain a synchronous state during the process of approaching each other due to the precision problem of the robotic arm, by applying a force to the target ball 6 in the opposite direction of the force, the position of the target ball 6 can be autonomously adjusted during the assembly process to meet the assembly requirements. At the same time, the micro-force detection prevents the target ball 6 from puncturing the clamping membrane.

[0059] In use, the push rod 43 in cylinder 41 is controlled by the pressure difference between the upper and lower surfaces of spring 45 and piston 431. When adsorbing the target ball, the pressure in cylinder 41 increases, causing push rod 43 to overcome the spring force and do work, making push rod 43 contact the outer surface of cylinder 2, thus restricting the rotational freedom of cylinder 2. At this time, cylinder 2 is fixed, thereby fixing the adsorption needle 33. Then, a vacuum generator provides negative pressure inside cylinder 2 to adsorb the target ball 6. When detecting a micro-force, the pressure difference in cylinder 41 decreases, causing push rod 43 to move upward under the action of elastic force. Push rod 43 is no longer in contact with cylinder 2, restoring the rotational freedom of cylinder 2. When the adsorption needle 33 is subjected to a micro-Newton level micro-force, the counterweight 51 swings, thus completing the detection of the micro-force. Before assembling the target ball 6 on the adsorption needle 33, the target ball 6 is clamped and assembled using two clamping membranes. At this time, the air cylinder 6 has one degree of rotational freedom, and the adsorption needle 33 adsorbs the target ball 6 through negative pressure. Due to the presence of the two first air guide holes 122 and two second air guide holes 123 in the base 12, the airflow friction generated by the high-speed airflow due to negative pressure has almost no effect on the rotation of the first bearing 111 and the second bearing 112, thus allowing the air cylinder 2 to rotate freely, achieving an adsorption method with undamped rotation. When assembling the target ball 6, if the operation precision of the clamping membranes is not high during the clamping process, the target ball 6 will deflect when it comes into contact with the target ball 6 and exerts a force on it. This prevents the force between the target ball 6 and the clamping membranes from becoming too large, effectively preventing damage to the target ball 6 and the clamping membranes. Furthermore, since the adsorption and detection of the target ball 6 employs a combination of microscopic visual inspection and force detection, visual inspection offers the advantage of non-contact detection. Force detection can sense the minute mutual forces between micro-parts. However, visual inspection suffers from a small field of view and the inability to determine the degree of contact after parts have come into contact. Therefore, by combining visual inspection with a capacitive sensor 53 to detect the assembly force, the assembly of the target ball 6 is ensured to be completed without damage. During this stage, the capacitive sensor 53 detects the relative position between the target ball 6 and the clamping membrane. After the clamping membrane contacts the target ball 6, it gradually and slowly approaches the target ball 6. Since the clamping membranes on both sides of the target ball 6 approach simultaneously, if one side experiences a larger force, the target ball 6 may deviate from its ideal position. At this point, the capacitive sensor 53 detects the force in that direction and feeds it back to the rear-end moving platform. The target ball adsorption and micro-force detection device is mounted on the rear-end moving platform, causing the platform to move the target ball 6, which is adsorbed by the adsorption and micro-force detection device, in the opposite direction, restoring the deflection force on the target ball 6 and eliminating this sudden force change. Finally, the target ball 6 is fixed between the two clamping membranes by the vision mechanism, and then the adsorption needle 33 is pulled out to complete the assembly of the target ball 6.

[0060] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0061] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A target ball adsorption and micro-force detection device based on a capacitive sensor, characterized in that, include: The first fixing mechanism includes a fixing seat, a base and an adapter seat respectively connected to both ends of the fixing seat; An air pump is disposed within the fixed base and is capable of rotating one dimension relative to the fixed base; An adsorption mechanism is provided, comprising a gas tube, an adsorption tube, and an adsorption needle. The gas tube is disposed within the base. One end of the adsorption tube extends into the gas cylinder, and the other end is connected to one end of the gas tube. One end of the adsorption needle is inserted into the gas cylinder and is close to one end of the adsorption tube. A cylinder mechanism is provided on the fixed base, and the cylinder mechanism can limit the rotation of the air cylinder; The sensing mechanism includes a counterweight, a second fixing mechanism, and a capacitive sensor, two fiber hairs, and two piezoelectric ceramic plates connected to the second fixing mechanism. One end of the counterweight is connected to the air cylinder, the capacitive sensor is located above the other end of the counterweight, the two piezoelectric ceramic plates and the two fiber hairs are arranged opposite to each other, and the two fiber hairs and the two piezoelectric ceramic plates are respectively in contact with the upper and lower surfaces of the other end of the counterweight. The second fixing mechanism includes a first fixing support, a second fixing support, and a fixing frame connecting the first fixing support and the second fixing support. The two piezoelectric ceramic plates are all connected to the first fixing support, the two fiber hairs are all connected to the second fixing support, and the capacitive sensor is connected to the fixing frame. By controlling the input voltage of the piezoelectric ceramic sheet to control the degree of bending, the deflection degree of the counterweight can be controlled, thereby achieving displacement correction after the counterweight deflects.

2. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 1, characterized in that, The fixing frame includes a top plate and a side plate connected to each other, and the top plate and the side plate are respectively connected to the first fixing support and the second fixing support.

3. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 1, characterized in that, A base plate is connected between the lower end of the first fixed support and the lower end of the second fixed support.

4. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 3, characterized in that, It is also equipped with a support frame, and the fixed frame and the base plate are connected to the support frame. The base and the adapter are respectively connected to both ends of the support frame.

5. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 2, characterized in that, The side plate is fixed with a connector.

6. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 1, characterized in that, The adsorption needle is positioned opposite to the counterweight.

7. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 1, characterized in that, The air cylinder extends into the base, and the base is provided with an air guide hole mechanism, which is connected to the air cylinder.

8. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 7, characterized in that, The air guide hole mechanism includes two first air guide holes arranged opposite each other in the vertical direction and two second air guide holes arranged opposite each other in the horizontal direction.

9. The target ball adsorption and micro-force detection device based on a capacitive sensor according to claim 1, characterized in that, One end of the air cylinder is interference-fitted with a support shaft, and a first bearing and a second bearing are respectively installed in the two ends of the fixed base. The free end of the support shaft is fitted in the first bearing, and the other end of the air cylinder passes through the second bearing.

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