Inertial sensors and electronic devices

Abstract

This application provides an inertial sensor and an electronic device. The inertial sensor's mass block for detecting the Y-axis is driven to have a displacement component in the X-axis direction. When the inertial sensor is subjected to an angular velocity component about the Z-axis, the mass block detecting the Y-axis can pull the mass block detecting the Z-axis, so that the mass block detecting the Z-axis can have a displacement component in the Y-axis direction. The inertial sensor provided by this application can achieve a fundamental decoupling between Y-axis and Z-axis detection, which is beneficial for balancing the size and detection accuracy of the inertial sensor.

Description

Technical Field

[0001] This application relates to the fields of inertial sensing and electronic devices, and more specifically, to inertial sensors and electronic devices. Background Technology

[0002] Electronic devices can use inertial sensors (also known as inertial measurement units, IMUs) to detect their motion states, such as tilt angles. Inertial sensors play an important role in applications such as image stabilization, navigation, game orientation, and screen rotation.

[0003] Inertial sensors can be used to detect the angular velocity of electronic devices relative to multiple rotationally symmetric beams. If the motion of the inertial sensor relative to rotationally symmetric beam A affects the detection of the angular velocity about rotationally symmetric beam B, the sensor's results may be inaccurate. If the components detecting the angular velocity about rotationally symmetric beam A and those detecting the angular velocity about rotationally symmetric beam B are independently configured and do not interfere with each other, the overall size of the inertial sensor may increase. Therefore, balancing the size and detection accuracy of the inertial sensor is a problem that needs to be solved. Summary of the Invention

[0004] This application provides an inertial sensor and an electronic device, with the aim of providing an inertial sensor with a relatively small structure and relatively high detection accuracy, which is beneficial to improving the application performance of the inertial sensor in electronic devices.

[0005] Firstly, an inertial sensor is provided, comprising:

[0006] A first mass block and a first detection electrode, wherein the first mass block is movable relative to the first detection electrode, the first mass block and the first detection electrode are arranged along a first direction to form a first capacitor, the first capacitor being used to detect angular velocity about a second direction;

[0007] A second mass block and a second detection electrode, the second mass block being movable relative to the second detection electrode, the second mass block and the second detection electrode being arranged along the second direction to form a second capacitor, the second capacitor being used to detect angular velocity about the first direction;

[0008] A first connector is connected between a first end of the first mass block and a first end of the second mass block;

[0009] The first mass block is driven to have a displacement component in a third direction, wherein the first direction, the second direction, and the third direction are orthogonal to each other;

[0010] When the first mass block has an angular velocity component about the first direction, the first mass block has a displacement component along the second direction. The first mass block is used to pull the second mass block to move along the second direction through the first connector. The displacement component of the second mass block along the second direction corresponds to the capacitance change of the second capacitor.

[0011] When the first mass block has an angular velocity component about the second direction, the first mass block has a displacement component along the first direction, and the displacement component of the first mass block along the first direction corresponds to the change in capacitance of the first capacitor.

[0012] This application achieves the detection of the angular velocity of the second mass block relative to the first direction by having a first mass block pull a second mass block along a second direction. When the first mass block detects the angular velocity in the second direction, it has displacement components in both the first and third directions, and can be considered stationary in the second direction. When the second mass block detects the angular velocity in the first direction, it has a displacement component in the second direction. According to the detection principle, when the first mass block only has an angular velocity component around the second direction, it may not have a displacement component along the second direction. Therefore, the detection of the angular velocity in the second direction by the first mass block has virtually no impact on the detection of the angular velocity in the first direction by the second mass block, which helps reduce the application of differential decoupling in inertial sensors and improves the detection accuracy of inertial sensors. Furthermore, the inertial sensor provided by this application can provide power to both the first and second mass blocks through a single driving source, which helps reduce the detection accuracy of the inertial sensor.

[0013] When the second mass block has only an angular velocity component about the second direction, the smaller the displacement component of the first mass block in the second direction, the smaller the traction force of the first mass block on the second mass block in the second direction. Therefore, it is more beneficial to reduce the coupling degree between the first mass block and the second mass block and reduce the mutual influence between the first mass block and the second mass block.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the first connector includes a first elastic connector for providing buffer space for the first mass block in the first direction and the third direction, such that the displacement component of the first end of the second mass block in the first direction is less than the displacement component of the first end of the first mass block in the first direction, and the displacement component of the first end of the second mass block in the third direction is less than the displacement component of the first end of the first mass block in the third direction.

[0015] The first elastic connector acts as a buffer between the first and second mass blocks. When the first mass block detects an angular velocity in the second direction, its displacement in the first direction may be relatively large. The first elastic connector helps reduce the displacement of the second mass block in the first direction after being pulled by the first mass block. When the first mass block reciprocates along a third direction, its displacement in that direction may be relatively large. The first elastic connector helps reduce the displacement of the second mass block in the third direction after being pulled by the first mass block. The first elastic connector can help reduce the influence of the displacement components of the first mass block in the second and third directions on the second mass block.

[0016] The stiffness of the first elastic connector in the second direction may, for example, be less than the stiffness of the first elastic connector in the first direction. The stiffness of the first elastic connector in the third direction may, for example, be less than the stiffness of the first elastic connector in the first direction.

[0017] In conjunction with the first aspect, in some implementations of the first aspect, the first connector further includes:

[0018] A first support beam is connected between the first elastic connector and the second mass block.

[0019] Since the first support beam is connected between the first elastic connector and the second mass block, it is beneficial to further absorb the displacement components that the first elastic connector cannot absorb, and to reduce the displacement of the second mass block in the first direction and / or third direction after it is pulled by the first mass block.

[0020] In conjunction with the first aspect, in some implementations of the first aspect, the first connector further includes:

[0021] A first transmission beam extends along the third direction, with one end of the first transmission beam connected between the first elastic connector and the second mass block. When the first mass block has an angular velocity component about the first direction, the first transmission beam can rotate about the first direction.

[0022] In other words, when the first mass block has an angular velocity component about the first direction, the first transmission beam can have a rotation angle about the first direction.

[0023] A portion of the first transmission beam is relatively fixed in position, and its deformability is relatively small. When the first mass block is displaced in the first direction, it tends to pull the second mass block along the first direction. The second mass block can be pulled in the opposite direction by the second portion of the first transmission beam, which helps to further reduce the displacement of the second mass block in the first direction after being pulled by the first mass block.

[0024] In conjunction with the first aspect, in some implementations of the first aspect, when the first mass block has an angular velocity component about the second direction, the rotation angle of the first transmission beam about the second direction is smaller than the rotation angle of the first mass block about the second direction.

[0025] The first transmission beam connects the first mass block and the second mass block. The rotation angle of the first transmission beam about the second direction is relatively small, which helps to reduce the deformation of the second mass block.

[0026] In one embodiment, the length of the first transmission beam can be relatively long. For example, half the length of the first transmission beam in the third direction can be greater than the length of the second mass block in the third direction.

[0027] In conjunction with the first aspect, in some implementations of the first aspect, the first mass block extends from a first end of the second mass block to a second end of the second mass block, and the inertial sensor further includes:

[0028] A second connector is connected between the second end of the first mass block and the second end of the second mass block, and the second connector is symmetrical to the first connector with respect to the second mass block.

[0029] The first mass block can pull the second mass block from both ends, and the connecting parts at both ends of the second mass block are also symmetrical, which helps to improve the symmetry of the displacement of the second mass block in the first direction, and thus helps to improve the detection accuracy of the inertial sensor.

[0030] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor further includes:

[0031] A driving electrode and a driving block, wherein the capacitor formed by the driving electrode and the driving block is used to drive the driving block to reciprocate relative to the driving electrode along the third direction;

[0032] A second support beam is connected between the drive block and the first mass block. The drive block is used to drive the first mass block through the second support beam so that the first mass block has a displacement component in the third direction.

[0033] The driving block can drive the first mass block from the side away from the second mass block, which helps to reduce the influence of the driving block on the movement of the second mass block when the driving block pulls the first mass block, and thus helps to improve the detection accuracy of the inertial sensor.

[0034] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor further includes:

[0035] A third mass block and a third detection electrode, the third mass block being movable relative to the third detection electrode, the third mass block and the third detection electrode being arranged along the first direction to form a third capacitor, the third capacitor being used to detect angular velocity about the third third direction, the third mass block being driven to have a displacement component in the second direction, when the third mass block has an angular velocity component about the third third direction, the third mass block has a displacement component along the first direction, the displacement component of the third mass block along the first direction corresponding to the change in capacitance of the third capacitor.

[0036] Since the third mass block moves back and forth along the second direction, and the third mass block and the third detection electrode are arranged along the first direction, the movement and detection of the third mass block have a relatively small impact on the first and second mass blocks, which is beneficial for the inertial sensor to have relatively high accuracy while being able to detect triaxial angular velocities.

[0037] In conjunction with the first aspect, in some implementations of the first aspect, the first mass block is driven by a drive block configured to reciprocate along the third direction, and a steering beam is connected between the third mass block and the drive block. One end of the steering beam near the drive block is used for reciprocating along the third direction, and the other end of the steering beam near the third mass block is used for reciprocating along the second direction, so that the third mass block has a displacement component along the second direction.

[0038] The first and third mass blocks are driven by the same drive block, which helps to reduce the number of devices in the inertial sensor, improve the coupling between the first, second and third mass blocks, and improve the detection accuracy of the inertial sensor.

[0039] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor further includes:

[0040] A second elastic connector is connected between the drive block and the first mass block to provide a buffer space for the third mass block in the first direction.

[0041] When the third mass block detects the angular velocity in the third direction, it can be displaced in the first direction. The second elastic connecting member can help absorb the displacement component in the first direction, thereby reducing the impact of the third mass block on the drive block.

[0042] The stiffness of the second elastic connector in the second direction may, for example, be greater than the stiffness of the second elastic connector in the first direction. The stiffness of the second elastic connector in the third direction may, for example, be greater than the stiffness of the second elastic connector in the first direction.

[0043] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor further includes:

[0044] The second transmission beam is connected between the second elastic connector and the drive block. The second transmission beam is rotatable about the third direction. When the third mass block rotates about the third direction, the rotation angle of the second transmission beam about the third direction is smaller than the rotation angle of the third mass block about the third direction.

[0045] The second transmission beam can be connected between the third mass block and its symmetrical mass block. The deformation of the second transmission beam is relatively small. When the third mass block and its symmetrical mass block undergo opposite displacements in the first direction, the second transmission beam can exert reverse traction on both the third mass block and its symmetrical mass block, which helps to improve the symmetry of the displacement of the third mass block and its symmetrical mass block in the first direction.

[0046] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor further includes:

[0047] A third elastic connector is connected to the third mass block. The third elastic connector is used to provide the third mass block with a supporting force in the first direction and also to provide the third mass block with a buffer space in the second direction.

[0048] The third elastic connector can provide torsional force and support force to the third mass block, which is conducive to making the third mass block move in a preset manner.

[0049] The stiffness of the third elastic connector in the second direction may, for example, be less than the stiffness of the third elastic connector in the first direction. The stiffness of the third elastic connector in the third direction may, for example, be less than the stiffness of the third elastic connector in the first direction. The stiffness of the third elastic connector in the second direction may, for example, be less than the stiffness of the third elastic connector in the third direction.

[0050] In conjunction with the first aspect, in some implementations of the first aspect, the third elastic connector is located on the side of the third mass block away from the second mass block.

[0051] This application's embodiments adjust the natural frequency modes of the inertial sensor through, for example, stiffness design and decoupling mode design, so that the effective modes of the inertial sensor are as far away as possible from the interfering modes of the inertial sensor, thereby improving the filtering effect of the inertial sensor and reducing its noise level. Furthermore, by adjusting the detection frequency and driving frequency of the inertial sensor, the sensitivity of the inertial sensor can be improved.

[0052] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor includes a mechanical structure layer, a cover layer, and a substrate layer, the mechanical structure layer being located between the cover layer and the substrate layer, the first mass block and the second mass block being disposed in the mechanical structure layer, the first detection electrode being disposed in the substrate layer, and the second detection electrode being disposed in the substrate layer or the mechanical structure layer.

[0053] In one embodiment, the third mass block can be disposed in the mechanical structure layer, and the third detection electrode can be disposed in the substrate layer.

[0054] The solution provided in this application can be applied to microelectromechanical systems (MEMS) scenarios, which is beneficial for compatibility with other devices in electronic devices.

[0055] In conjunction with the first aspect, in some implementations of the first aspect, the inertial sensor is symmetrical with respect to the second direction and the inertial sensor is symmetrical with respect to the third direction.

[0056] To suppress the effects of material strain, processing deviations, and other factors, the mechanical structure layer is symmetrical. This symmetry facilitates the application of differential principles to eliminate common-mode noise caused by material strain, processing deviations, etc., and improves the performance of inertial sensors, such as temperature drift and zero drift performance.

[0057] In a second aspect, an electronic device is provided, including an inertial sensor as described in any of the implementations of the first aspect above. Attached Figure Description

[0058] Figure 1 This is a schematic structural diagram of an electronic device provided in an embodiment of this application.

[0059] Figure 2 This is a schematic structural diagram of an inertial sensor provided in an embodiment of this application.

[0060] Figure 3A This is a schematic structural diagram of an inertial sensor provided in an embodiment of this application.

[0061] Figure 3B This is a motion diagram of an inertial sensor provided in an embodiment of this application.

[0062] Figure 4 This is a schematic diagram of an inertial sensor for detecting angular velocity around the X-axis, provided in an embodiment of this application.

[0063] Figure 5 This is a schematic diagram of an inertial sensor for detecting angular velocity around the Y-axis, provided in an embodiment of this application.

[0064] Figure 6 This is a schematic diagram of an inertial sensor for detecting angular velocity around the Z-axis, provided in an embodiment of this application.

[0065] Figure 7A This is a perspective view of another inertial sensor provided in an embodiment of this application.

[0066] Figure 7B This is a schematic structural diagram of another inertial sensor provided in an embodiment of this application.

[0067] Figure 7C This is a motion diagram of another inertial sensor provided in an embodiment of this application.

[0068] Figure 8A This is a perspective view of another inertial sensor provided in this application embodiment detecting angular velocity around the X-axis.

[0069] Figure 8B This is a schematic structural diagram of another inertial sensor provided in this application embodiment for detecting angular velocity around the X-axis.

[0070] Figure 9A This is a three-dimensional view of another inertial sensor provided in this application embodiment detecting angular velocity around the Y-axis.

[0071] Figure 9B This is a schematic structural diagram of another inertial sensor provided in this application embodiment for detecting angular velocity around the Y-axis.

[0072] Figure 10A This is a three-dimensional view of another inertial sensor provided in this application embodiment detecting angular velocity around the Z-axis.

[0073] Figure 10B This is a schematic structural diagram of another inertial sensor provided in this application embodiment for detecting angular velocity around the Z-axis. Detailed Implementation

[0074] The technical solutions in this application will now be described with reference to the accompanying drawings.

[0075] Figure 1 This is a schematic structural diagram of an electronic device 100 provided in an embodiment of this application. The electronic device 100 may be, for example, a terminal consumer product or a 3C electronic product (computer, communication, consumer electronic product), such as a mobile phone, a laptop, a tablet computer, an e-reader, a laptop computer, a digital camera, a wearable device, headphones, a watch, a stylus, etc. Figure 1 The illustrated embodiment uses a mobile phone as an example of an electronic device 100.

[0076] Electronic device 100 may include a housing 11, a display screen 12, and a circuit board assembly 13. Specifically, the housing 11 may include a bezel and a back cover. The bezel may be located between the display screen 12 and the back cover. The bezel may surround the outer periphery of the display screen 12 and the outer periphery of the back cover. The cavity formed between the display screen 12, the bezel, and the back cover may be used to house the circuit board assembly 13. The circuit board assembly 13 may include a circuit board and an inertial sensor 20 disposed on the circuit board. The circuit board may be, for example, a motherboard, a small board, etc.

[0077] Figure 2 Two embodiments of the inertial sensor 20 are shown. Figure 2 In the illustrated embodiment, the inertial sensor 20 can be a gyroscope, or it can integrate an accelerometer and a gyroscope. In the embodiment where the inertial sensor 20 integrates an accelerometer and a gyroscope, the inertial sensor 20 can be a sensor that can perform both the functions of an accelerometer and a gyroscope.

[0078] A gyroscope sensor can be used to determine the motion attitude of an electronic device 100. In some embodiments, the gyroscope sensor can determine the angular velocity of the electronic device 100 around three axes (i.e., the X, Y, and Z axes). The gyroscope sensor can be used for image stabilization. For example, when the shutter is pressed, the gyroscope sensor detects the angle of the electronic device 100's movement, calculates the distance the lens module needs to compensate based on the angle, and allows the lens to counteract the movement of the electronic device 100, thus achieving image stabilization. The gyroscope sensor can also be used in navigation and motion-sensing gaming scenarios.

[0079] An accelerometer can detect the magnitude of acceleration of an electronic device 100 in various directions (typically three axes). When the electronic device 100 is stationary, it can detect the magnitude and direction of gravity. It can also be used to identify the posture of the electronic device 100, and can be applied to applications such as screen orientation switching and pedometers.

[0080] like Figure 2 As shown, the inertial sensor 20 may include a chip 21 and one or more detection components 22. Part or all of the detection component 22 may be referred to as a microelectromechanical system (MEMS). The chip 21 may be electrically connected to the detection component 22. Figure 2 In the illustrated embodiment, the inertial sensor 20 may include a single detection element 22. The chip 21 can acquire signals related to acceleration and / or angular velocity through this detection element 22. In another embodiment, the inertial sensor 20 may include two detection elements 22. The chip 21 can acquire signals related to acceleration through one detection element 22 and signals related to angular velocity through the other detection element 22.

[0081] The following is combined Figure 1 , Figure 2 This paper explains the principle of acquiring the motion state of electronic device 100 through inertial sensor 20.

[0082] The detection component 22 may include a substrate layer, a mechanical structure layer, and a capping layer. The mechanical structure layer may be hermetically connected between the mechanical structure layer and the capping layer. The mechanical structure layer may also be referred to as a MEMS layer. The mechanical structure layer may be a key component of the detection component 22 for realizing angular velocity detection.

[0083] The mechanical structure layer may include a mover and a stator. The stator may be fixed within the inertial sensor 20. The stator may, for example, be fixed to a substrate layer. A gap exists between the stator and the mover, allowing them to form a capacitor. The capacitor formed by the stator and the mover can be used to drive the mover to move relative to the stator. The mover may, for example, levitate on the substrate layer and be able to move relative to it. In one embodiment, the mover and stator may, for example, include a comb-like structure. The comb-like mover may have movable comb teeth. The comb-like stator may have fixed comb teeth.

[0084] The inertial sensor 20 may also include detection electrodes. The detection electrodes may be fixed within the inertial sensor 20. A capacitance may be formed between the mover and the detection electrodes. The capacitance formed by the mover and the detection electrodes can be used to detect the motion state of the electronic device 100. Figure 2 In the illustrated embodiment, the detection electrode may, for example, be fixed on the substrate layer.

[0085] Now assume the existence of an XYZ coordinate system, where the X, Y, and Z axes are orthogonal to each other. Figure 2 In the illustrated embodiment, the detection electrode and the mover can be arranged along the Z-axis, and both can be parallel to the XY plane. The chip 21 can send an AC signal to the detection component 22 to drive the mover of the detection component 22 to reciprocate along the X-axis relative to the stator at a preset frequency in a translational manner. This movement does not substantially change the distance between the detection electrode and the mover on the Z-axis. The distance between the detection electrode and the mover along the Z-axis corresponds to the capacitance value formed by the detection electrode and the mover; therefore, the capacitance value formed by the detection electrode and the mover can remain substantially unchanged.

[0086] When the electronic device 100 does not undergo any movement (including translation, rotation, etc.), the capacitance value of the capacitor formed by the detection electrode and the mover can remain essentially unchanged.

[0087] When the electronic device 100 moves, for example, when the electronic device has an angular velocity component rotating around the Y-axis under the action of an external force, that is, when the rotation direction of the electronic device is in the Y-axis direction, the mover also tends to rotate around the Y-axis and is subjected to an additional force. This force can be called the Coriolis force. The direction of this force (e.g., the Z-axis direction) can be orthogonal to both the rotation direction (e.g., the Y-axis direction) and the movement direction (e.g., the X-axis direction) of the mover. Therefore, this force can change the distance between the detection electrode and the mover, thereby changing the capacitance value formed by the detection electrode and the mover. The chip 21 can obtain the angular velocity ω of the electronic device 100 rotating around the Y-axis by acquiring the change in capacitance value formed by the detection electrode and the mover.

[0088] The change in capacitance ΔC can be used to determine the change in distance y between the detection electrode and the mover. The changes in capacitance ΔC and distance y can satisfy, for example, the following formula:

[0089]

[0090] The Coriolis force F borne by the mover can be determined based on the mover's stiffness k and the pitch change y. The Coriolis force F, stiffness k, and pitch change y can satisfy, for example, the following formula:

[0091] F = k·y.

[0092] The angular velocity ω of the mover can be determined from the Coriolis force F, the mover mass m, and the reciprocating speed v of the mover. The Coriolis force F, the mover mass m, the reciprocating speed v, and the angular velocity ω can satisfy, for example, the following formula:

[0093]

[0094] When the electronic device 100 is actually moving, it can rotate around the X-axis, Y-axis, and Z-axis. The inertial sensor can obtain the angular velocity around the X-axis, Y-axis, and Z-axis respectively, based on the above principle.

[0095] In one example, an inertial sensor may include three independent detection systems, each capable of being driven independently and used to detect angular velocities about the X, Y, and Z axes, respectively. However, this results in a relatively large footprint for the inertial sensor.

[0096] In another example, the inertial sensor may include a detection system A. Through structural design, detection system A can be used to detect the angular velocity in direction A and also in direction B, to achieve detection coupling between directions A and B. However, if the motion of detection system A affects the detection of the angular velocity in direction B when it is detecting the angular velocity about direction A, it may lead to poor detection accuracy of the inertial sensor.

[0097] To ensure the detection accuracy of inertial sensors, the manufacturing accuracy of inertial sensors is also relatively high.

[0098] This application provides a series of technical solutions to address the aforementioned problems, aiming to enable inertial sensors to meet various requirements and improve their performance in electronic devices. For example, the inertial sensors provided in this application can have characteristics such as small size, excellent detection accuracy, and low manufacturing difficulty.

[0099] Figure 3A This is a schematic structural diagram of a mechanical structure layer 300 provided in an embodiment of this application. Figure 3B yes Figure 3A The diagram shows the motion of the moving part of the mechanical structure layer 300 when it is not rotating. For ease of description, as shown... Figure 3A , Figure 3B As shown, assume there exists an XYZ coordinate system, and the XY plane is parallel to... Figure 3A , Figure 3B The paper surface, the Z-axis is perpendicular to Figure 3A , Figure 3B The paper surface. The X, Y, and Z axes are orthogonal to each other. The mechanical structure layer 300 can be set parallel to the XY plane.

[0100] The mechanical structure layer 300 may include mass block 311, mass block 312, and mass block 313. Mass block 311 is used to detect the angular velocity about the X-axis. Mass block 312 is used to detect the angular velocity about the Y-axis. Mass block 313 is used to detect the angular velocity about the Z-axis.

[0101] The mechanical structure layer 300 also includes a support beam 3201. The support beam 3201 is driven to have a displacement component in the X-axis direction. When the inertial sensor is not subjected to external force, the support beam 3201 can reciprocate along the X-axis. For example, the mechanical structure layer 300 also includes a drive block ( Figure 3A , Figure 3B (Not shown), the drive block is connected to the support beam 3201, so that the drive block can be used to drive the support beam 3201 to reciprocate along the X-axis.

[0102] In this application, a component may have displacement components in the X-axis, Y-axis, and Z-axis directions. The displacement component along the X-axis can be the projection of the component's displacement onto the X-axis. The displacement component along the Y-axis can be the projection of the component's displacement onto the Y-axis. The displacement component along the Z-axis can be the projection of the component's displacement onto the Z-axis. The displacement of the component can be the vector sum of its displacement components in the X-axis, Y-axis, and Z-axis directions. When the component has a displacement component only in the X-axis, the component can move along the X-axis. When the component has a displacement component only in the Y-axis, the component can move along the Y-axis. When the component has a displacement component only in the Z-axis, the component can move along the Z-axis.

[0103] In one embodiment, the drive block may include drive element 1 and drive element 2. Drive element 1 may be part of the stator. Drive element 1 and drive element 2 may form a capacitor. By configuring AC signals on drive element 1 and drive element 2, drive element 2 can reciprocate relative to drive element 1 along the X-axis. Support beam 3201 may be connected to drive element 2, and support beam 3201 can reciprocate under the drive of drive element 2. In other embodiments, support beam 3201 can be driven to reciprocate in other ways.

[0104] One end of the support beam 3201 can be positioned close to the mass block 311. The displacement component of the support beam 3201 in the X-axis direction can be used to drive the mass block 311 to move along the Y-axis. The mechanical structure layer 300 also includes a steering beam 351. The steering beam 351 can transmit translational driving force between the support beam 3201 and the mass block 311, so that the mass block 311 reciprocates under the drive of the support beam 3201. Furthermore, the steering beam 351 is also used to convert the translational driving force along the X-axis from the support beam 3201 into a translational driving force along the Y-axis, so that the mass block 311 has a displacement component in the Y-axis direction under the action of the steering beam 351. When the inertial sensor is not subjected to external force, the mass block 311 can reciprocate along the Y-axis. The steering beam 351 can, for example, be connected between the support beam 3201 and the mass block 311. In one embodiment, the angle between the steering beam 351 and the X-axis can be approximately 45°, and the angle between the steering beam 351 and the Y-axis can be approximately 45°.

[0105] The mechanical structure layer 300 may also include an anchor zone 341 and an elastic connector 3301. The elastic connector 3301 may be connected between the anchor zone 341 and the mass block 311.

[0106] In this application, the anchor region can be part of the stator. The anchor region can, for example, be fixed to... Figure 2 On the substrate layer shown. In this application, the stiffness of the elastic connector can be relatively small compared to the support beam.

[0107] The elastic connector 3301 can be used to support the mass block 311 so that the mass block 311 is suspended in the air. Figure 2 The substrate layer and the capping layer are shown. The elastic connector 3301 can be used to provide levitation support for the mass 311 along the Z-axis, so that the mass 311 is suspended in... Figure 2 The substrate layer and the capping layer are shown. That is, the elastic connector 3301 can have relatively high stiffness in the Z-axis direction. The elastic connector 3301 can also be used to provide a buffer space in the Y-axis direction between the mass block 311 and the anchor area 34. That is, the elastic connector 3301 can have relatively low stiffness in the Y-axis direction, or the elastic connector 3301 can be elastic in the Y-axis direction.

[0108] Figure 3B A schematic structural diagram is shown showing the movement of mass block 311 along the Y-axis under the action of support beam 3201. Figure 3B The dashed line indicates the position of mass block 311 before it moved. Figure 3B The solid line in the middle shows the position of mass block 311 after it has been moved.

[0109] To facilitate the movement of the mass block 311, the mechanical structure layer 300 may further include an elastic connector 3302. The elastic connector 3302 may have relatively low stiffness or be elastic in the X-axis and Y-axis directions to facilitate relative movement between the support beam 3201 and the mass block 311 in a predetermined direction. For example, the elastic connector 3302 can be used to absorb X-axis displacement, reducing the displacement component of the mass block 311 in the X-axis direction, thus facilitating the movement of the mass block 311 along the Y-axis. Similarly, the elastic connector 3302 can be used to absorb Y-axis displacement, reducing the displacement component of the support beam 3201 in the Y-axis direction, thus facilitating the movement of the support beam 3201 along the X-axis.

[0110] The mechanical structure layer 300 may further include a support beam 3202. The support beam 3202 is driven to have a displacement component in the X-axis direction. When the inertial sensor is not subjected to external force, the support beam 3202 can reciprocate along the X-axis. An embodiment for driving the reciprocating movement of the support beam 3202 can refer to the embodiment described above for driving the reciprocating movement of the support beam 3201. Figure 3A In the illustrated embodiment, support beam 3202 can be connected to support beam 3201. Since the direction of the force driving support beams 3201 and 3202 to reciprocate can be along the X-axis and in the same direction, support beams 3201 and 3202 can be driven by the same drive block.

[0111] The support beam 3202 can also be connected to the mass block 312. The reciprocating movement of the support beam 3202 can be used to drive the mass block 312 to move along the X-axis. Figure 3BA schematic structural diagram is shown showing the movement of mass block 312 along the X-axis under the action of support beam 3202. Figure 3B The dashed line indicates the position of mass block 312 before it moved. Figure 3B The solid line in the middle shows the position of mass block 312 after it has been moved.

[0112] The mechanical structure layer 300 also includes a support beam 3203 and an anchorage 342. The support beam 3203 connects the anchorage 342 and the mass block 313. The support beam 3203 supports the mass block 313 so that the mass block 313 is suspended. Figure 2 The substrate layer and the cover layer are shown. The support beam 3203 can be used to provide levitation support for the mass block 313.

[0113] The mechanical structure layer 300 may also include an elastic connector 3303. The elastic connector 3303 can connect between mass block 312 and mass block 313. For example... Figure 3A , 3B As shown, mass blocks 312 and 313 can be connected to the support beam 3203 via elastic connector 3303.

[0114] The elastic connector 3303 can be used to provide a buffer space along the X-axis for the mass block 312. That is, the elastic connector 3303 can have low stiffness or elasticity along the X-axis. As described above, the mass block 312 can have a displacement component along the X-axis under the action of the support beam 3202. When the inertial sensor is not subjected to external force, the mass block 312 can reciprocate along the X-axis. The elastic connector 3303 can be used to absorb the displacement along the X-axis, reducing the displacement component of the mass block 313 along the X-axis under the traction of the mass block 312, such as... Figure 3B As shown.

[0115] To suppress the effects of material strain, processing deviations, and other factors, the mechanical structure layer 300 is symmetrical. This symmetry facilitates the application of differential principles to remove common-mode noise caused by material strain, processing deviations, etc., and improves the inertial sensor's performance in areas such as temperature drift and zero drift.

[0116] The mechanical structure layer 300 can be symmetrical with respect to the axis of symmetry x, which can be parallel to the X-axis or the Y-axis. In this application, the movement directions of two structures that are symmetrical with respect to the axis of symmetry x or the axis of symmetry y can be symmetrical or opposite.

[0117] exist Figure 3A and Figure 3BIn the illustrated embodiment, support beams 3202 and 3203 may correspond to the axis of symmetry x of the mechanical structure layer 300. The mechanical structure layer may also include symmetrical beams 371 and 372. Symmetrical beams 371 and 372 are located on both sides of the anchor area 342, and both symmetrical beams 371 and 372 are connected to the anchor area 342. Symmetrical beams 371 and 372 may correspond to the axis of symmetry y of the mechanical structure layer 300. The anchor area 342 may be located at the intersection of the axes of symmetry x and y.

[0118] Mass block 1 is symmetrical about the y-axis. Mass block 2 is symmetrical about the x-axis. Mass block 3 is symmetrical about the x-axis. The mechanical structure layer 300 may also include mass blocks 314, 315, and 316. Mass block 314 is used to detect the angular velocity along the X-axis. Mass block 315 is used to detect the angular velocity along the Y-axis. Mass block 316 is used to detect the angular velocity along the Z-axis. Mass block 4 is symmetrical about the y-axis. Mass block 5 is symmetrical about the x-axis. Mass block 6 is symmetrical about the x-axis. Mass blocks 314 and 311 may be symmetrically arranged about the x-axis. Mass blocks 315 and 312 are symmetrically arranged about the y-axis. Mass blocks 316 and 313 are symmetrically arranged about the y-axis.

[0119] The mechanical structure layer 300 may further include support beams 3204, 3205, and 3206. Support beams 3204, 3205, and 3206 are driven to have a displacement component along the X-axis. When the inertial sensor is not subjected to external force, support beams 3204, 3205, and 3206 can reciprocate along the X-axis. In one embodiment, support beams 3204 and 3201 may be symmetrically arranged with respect to the y-axis; support beams 3205 and 3201 may be symmetrically arranged with respect to the x-axis; and support beams 3206 and 3205 may be symmetrically arranged with respect to the y-axis.

[0120] exist Figure 3A In the illustrated embodiment, support beams 3201 and 3205 can be connected via transmission beam 361. Transmission beam 361 itself can be symmetrical about the axis of symmetry x. Support beams 3204 and 3206 can be connected via transmission beam 362. Transmission beam 362 itself can be symmetrical about the axis of symmetry x. Transmission beams 361 and 362 can be symmetrical about the axis of symmetry y.

[0121] Support beams 3201 and 3204 can be connected to the two ends of mass block 311, respectively. The reciprocating movement of support beam 3201 can drive one end of mass block 311 to move along the Y-axis, and the reciprocating movement of support beam 3204 can drive the other end of mass block 311 to move along the Y-axis, thus mass block 311 can have a displacement component along the Y-axis under the action of support beams 3201 and 3204. The movement directions of support beams 3201 and 3204 in the X-axis direction can be opposite. Support beams 3201 and 3204 can be driven by different drive blocks. Therefore, mass block 311 can be driven by two different drive blocks. In one embodiment, the drive block for driving support beam 3201 and the drive block for driving support beam 3204 can be symmetrical about the symmetry axis y.

[0122] The mechanical structure layer 300 may further include a steering beam 352. In one embodiment, steering beams 352 and 351 may be symmetrical about the axis of symmetry y. Steering beam 351 can transmit translational driving force between one end of support beam 3201 and mass block 311, and steering beam 352 can transmit translational driving force between the other end of support beam 3204 and mass block 311, so that mass block 311 reciprocates under the drive of support beams 3201 and 3204. Furthermore, steering beam 352 is also used to convert the translational driving force along the X-axis from support beam 3204 into a translational driving force along the Y-axis, so that mass block 311 has a displacement component along the Y-axis under the action of steering beams 351 and 352. Related embodiments of steering beam 352 can be referred to related embodiments of steering beam 351.

[0123] Support beams 3205 and 3206 can connect to the two ends of the mass block 314, respectively. The reciprocating movement of support beam 3205 can drive one end of the mass block 314 to move along the Y-axis, and the reciprocating movement of support beam 3206 can drive the other end of the mass block 314 to move along the Y-axis. Thus, the mass block 314 can have a displacement component along the Y-axis under the action of support beams 3205 and 3206.

[0124] The support beams 3205 and 3206 can move in opposite directions along the X-axis. Support beams 3205 and 3206 can be driven by different drive blocks. Mass block 314 can be driven by two different drive blocks. The two drive blocks used to drive mass block 314 can also be used to drive mass block 311.

[0125] Due to symmetry, support beams 3205 and 3201 can move in the same direction; support beams 3205 and 3201 can be driven by the same drive block. Support beams 3206 and 3204 can move in the same direction; support beams 3206 and 3204 can be driven by the same drive block.

[0126] Mass blocks 314 and 311 move in opposite directions along the Y-axis. Mass blocks 314 and 311 can move closer to or further away from each other along the Y-axis.

[0127] Figure 3B A schematic structural diagram showing the movement of mass block 314 along the Y-axis is shown. Figure 3B The dashed line indicates the position of mass block 314 before it moved. Figure 3B The solid line in the middle shows the position of mass block 314 after it has been moved.

[0128] The mechanical structure layer 300 may further include a steering beam 353 and a steering beam 354. In one embodiment, the steering beams 353 and 354 may be symmetrical about the axis of symmetry y. The steering beam 353 may transmit a translational driving force between one end of the support beam 3205 and the mass block 314, and the steering beam 354 may transmit a translational driving force between the support beam 3206 and the other end of the mass block 314, so that the mass block 314 has a displacement component along the Y-axis under the drive of the support beams 3205 and 3206. Furthermore, the steering beam 353 is also used to convert the translational driving force along the X-axis from the support beam 3205 into a translational driving force along the Y-axis, and the steering beam 354 is also used to convert the translational driving force along the X-axis from the support beam 3206 into a translational driving force along the Y-axis, so that the mass block 314 has a displacement component along the Y-axis under the action of the steering beams 353 and 354. For related embodiments of steering beam 353 and steering beam 354, please refer to the related embodiments of steering beam 351 and steering beam 352.

[0129] The mechanical structure layer 300 also includes anchor zones 343 and elastic connectors 3304. Anchor zones 343 and 341 may be symmetrical with respect to the x-axis. Elastic connectors 3304 and 3301 may also be symmetrical with respect to the x-axis. Elastic connector 3304 may connect between anchor zones 343 and mass block 314. Elastic connector 3304 may be used to provide suspension support for mass block 314 along the Z-axis. Elastic connector 3304 may also be used to provide a buffer space on the Y-axis between mass block 314 and anchor zones 341.

[0130] The mechanical structure layer 300 may further include elastic connectors 3305, 3306, and 3307. In one embodiment, elastic connectors 3305 and 3302 may be symmetrical about the y-axis. Elastic connectors 3306 and 3302 may be symmetrical about the x-axis. Elastic connectors 3307 and 3305 may be symmetrical about the x-axis.

[0131] Elastic connector 3305 may have relatively low stiffness or be elastic in both the X-axis and Y-axis directions to facilitate the movement of support beam 3204 along the X-axis and the movement of mass block 311 along the Y-axis. Elastic connector 3306 may have relatively low stiffness or be elastic in both the X-axis and Y-axis directions to facilitate the movement of support beam 3205 along the X-axis and the movement of mass block 314 along the Y-axis. Elastic connector 3307 may have relatively low stiffness or be elastic in both the X-axis and Y-axis directions to facilitate the movement of support beam 3206 along the X-axis and the movement of mass block 314 along the Y-axis.

[0132] The mechanical structure layer 300 may further include a support beam 3207. The support beam 3207 is driven to have a displacement component in the X-axis direction. When the inertial sensor is not subjected to external force, the support beam 3207 can reciprocate along the X-axis. The movement directions of the support beam 3207 and support beam 3202 in the X-axis direction may be opposite. In one embodiment, the support beam 3207 may be symmetrical with respect to the support beam 3202 about the axis of symmetry y. Figure 3A In the illustrated embodiment, the support beam 3207 can be connected to the transmission beam 362. The reciprocating movement of the support beam 3207 can be used to drive the mass block 315 so that the drive mass block 315 has a displacement component along the X-axis direction.

[0133] Mass blocks 315 and 312 can move in opposite directions along the X-axis. Mass blocks 315 and 312 can move closer to or further away from each other along the X-axis. Mass blocks 315 and 312 can be driven by different drive blocks. In one embodiment, the two drive blocks used to drive mass block 315 and mass block 312 can also be used to drive mass block 311.

[0134] Figure 3B A schematic structural diagram showing the movement of mass block 315 along the X-axis is shown. Figure 3B The dashed line indicates the position of mass block 315 before it moved. Figure 3B The solid line in the middle shows the position of mass block 315 after it has been moved.

[0135] The mechanical structure layer 300 may further include support beams 3208, 3209, and 3210. In one embodiment, support beams 3208 and 3203 may be symmetrical about the x-axis. Support beams 3209 and 3203 may be symmetrical about the y-axis. Support beams 3210 and 3208 may be symmetrical about the y-axis.

[0136] Support beam 3203 can be connected to the first end of mass block 313. Support beam 3208 can be connected between anchor area 342 and the second end of mass block 313. Support beams 3208 and 3203 are used to support mass block 313 so that mass block 313 is suspended. Figure 2 The substrate and capping layers are shown. Support beams 3208 and 3203 can work together to provide suspension support for the mass block 313 along the Z-axis.

[0137] Support beam 3209 can be connected between anchor zone 342 and the first end of mass block 316. Support beam 3210 can be connected between anchor zone 342 and the second end of mass block 316. Support beams 3209 and 3210 can work together to provide suspension support for mass block 316 along the Z-axis.

[0138] The mechanical structure layer 300 may further include transmission beams 363 and 364. Transmission beam 363 may be symmetrical about the y-axis. Transmission beam 364 may also be symmetrical about the y-axis. Transmission beams 363 and 364 may be symmetrical about the x-axis. Transmission beam 363 may be connected between support beams 3203 and 3208. Transmission beam 363 may also be connected between support beams 3208 and 3210. Transmission beam 363 may provide suspension support along the Z-axis for support beams 3203 and 3209. Transmission beam 364 may provide suspension support along the Z-axis for support beams 3208 and 3210.

[0139] The mechanical structure layer 300 may further include symmetrical beams 371 and 372. Symmetrical beams 371 and 372 may be fixedly connected to both ends of the anchor area 342, respectively. Symmetrical beam 371 may connect between the transmission beam 363 and the anchor area 342. Symmetrical beam 372 may connect between the transmission beam 364 and the anchor area 342. Symmetrical beam 371 may be symmetrical about the axis of symmetry y. Symmetrical beam 372 may be symmetrical about the axis of symmetry y. Symmetrical beams 371 and 372 may be symmetrical about the axis of symmetry x.

[0140] The mechanical structure layer 300 also includes elastic connectors 3308, 3309, and 3310. In one embodiment, elastic connectors 3308 and 3303 may be symmetrical about the axis of symmetry x. Elastic connectors 3309 and 3303 may be symmetrical about the axis of symmetry y. Elastic connectors 3310 and 3308 may be symmetrical about the axis of symmetry y.

[0141] Mass block 312 can extend from the first end of mass block 313 to the second end of mass block 313. A resilient connector 3303 can be connected between the first end of mass block 312 and the first end of mass block 313. A resilient connector 3308 can be connected between the second end of mass block 312 and the second end of mass block 313. (As...) Figure 3A , 3B As shown, the first end of mass block 312 and the first end of mass block 313 can be connected to the support beam 3203 via elastic connector 3303. The second end of mass block 312 and the second end of mass block 313 can be connected to the support beam 3208 via elastic connector 3308.

[0142] The elastic connector 3303 may have relatively low stiffness or be elastic in the X-axis direction to provide a buffer space along the X-axis between the first end of the mass block 312 and the first end of the mass block 313. The elastic connector 3308 may also have relatively low stiffness or be elastic in the X-axis direction to provide a buffer space along the X-axis between the second end of the mass block 312 and the second end of the mass block 313. This facilitates reducing the displacement of the mass block 313 in the X-axis direction.

[0143] Mass block 315 can extend from the first end of mass block 316 to the second end of mass block 316. Resilient connector 3309 can be connected between the first end of mass block 315 and the first end of mass block 316. Resilient connector 3310 can be connected between the second end of mass block 315 and the second end of mass block 316. (As...) Figure 3A , 3B As shown, the first end of mass block 315 and the first end of mass block 316 can be connected to the support beam 3209 via elastic connector 3309. The second end of mass block 315 and the second end of mass block 316 can be connected to the support beam 3210 via elastic connector 3310.

[0144] A specific embodiment of the elastic connector 3309 can be found in the specific embodiment of the elastic connector 3303. A specific embodiment of the elastic connector 3310 can be found in the specific embodiment of the elastic connector 3308.

[0145] Mass block 312 can pull mass block 313 via elastic connector 3303 and support beam 3203, so that mass block 313 has a displacement component along the Y-axis. Compared with the embodiment where mass blocks 312 and 313 are connected only by elastic connector 3303, connecting mass blocks 312 and 313 via elastic connector 3303 and support beam 3203 helps to reduce the impact of unstable deformation of elastic connector 3303 on the asymmetry of mechanical structure layer 300, and thus helps to reduce the processing requirements of mechanical structure layer 300. Compared with elastic connector 3303, the width of support beam 3203 along the Y-axis can be relatively larger.

[0146] Observe along the X+ direction Figure 3B The mechanical structure layer 300 shown can be obtained Figure 4 The schematic structural diagram is shown below. (Followed by...) Figure 3B , Figure 4 This paper explains the principle of detecting the angular velocity around the X-axis using mass blocks 311 and 314.

[0147] The inertial sensor may include detection electrode 231 and detection electrode 234. Detection electrode 231 and detection electrode 234 may, for example, be disposed in... Figure 2 On the substrate layer shown.

[0148] Detection electrode 231 can be positioned opposite to mass block 311, and detection electrode 234 can be positioned opposite to mass block 314. Detection electrode 231 and mass block 311 can be arranged along the Z-axis. Detection electrode 231 and mass block 311 can be arranged parallel to the XY plane, thereby forming capacitor 1. Detection electrode 234 and mass block 314 can be arranged along the Z-axis. Detection electrode 234 and mass block 314 can be arranged parallel to the XY plane, thereby forming capacitor 4.

[0149] Mass blocks 311 and 314 can have displacement components along the Y-axis. When the inertial sensor as a whole has an angular velocity component rotating around the X-axis under the action of an external force, mass blocks 311 and 314 can be subjected to a Coriolis force along the Z-axis. Mass blocks 311 and 314 can also have displacement components along the Z-axis. Therefore, the distance between mass block 311 and detection electrode 231 can vary, and the capacitance value of capacitor 1 formed by mass block 311 and detection electrode 231 can vary; the distance between mass block 314 and detection electrode 234 can vary, and the capacitance value of capacitor 4 formed by mass block 314 and detection electrode 234 can vary. The change in capacitance value of capacitor 1 formed by mass block 311 and detection electrode 231 can correspond to the displacement component of mass block 311 in the Z-axis direction. The change in capacitance value of capacitor 4 formed by mass block 314 and detection electrode 234 can correspond to the displacement component of mass block 314 in the Z-axis direction.

[0150] In this application, the inertial sensor rotates under the action of an external force. The inertial sensor can have angular velocity components around the X-axis, Y-axis, and Z-axis. The projection of the inertial sensor's angular velocity direction onto the X-axis can be the angular velocity component of the inertial sensor around the X-axis. The projection of the inertial sensor's angular velocity direction onto the Y-axis can be the angular velocity component of the inertial sensor around the Y-axis. The projection of the inertial sensor's angular velocity direction onto the Z-axis can be the angular velocity component of the inertial sensor around the Z-axis. The vector sum of the angular velocity components of the inertial sensor around the X-axis, Y-axis, and Z-axis can be the angular velocity direction of the inertial sensor.

[0151] Combination Figure 3B and Figure 4 Assume the driving direction of mass block 311 is Y+ and the driving direction of mass block 314 is Y-. Under the action of external force, mass block 311 can rotate around anchor area 341 with an angular velocity component about the X-axis, and mass block 314 can rotate around anchor area 343 with an angular velocity component about the X-axis. Therefore, mass block 311 can have a displacement component along the Z+ direction, and mass block 314 can have a displacement component along the Z- direction. Mass block 311 tends to move away from detection electrode 231, and mass block 314 tends to move closer to detection electrode 234.

[0152] Since the detection results of both detection electrode 231 and detection electrode 234 include common-mode noise, combining the detection results output by detection electrode 231 and detection electrode 234 can relatively effectively remove common-mode noise, which is beneficial to improving the inertial sensor's performance in areas such as temperature drift and zero drift.

[0153] like Figure 4 As shown, a transmission beam 361 is connected between the elastic connector 3302 and the elastic connector 3306. (This is in conjunction with...) Figure 3BThe transmission beam 361 can be connected between the support beams 3201 and 3205. Since the displacement components of mass blocks 311 and 312 in the Z-axis direction are opposite, the transmission beam 361 is used to rotate about the axis of symmetry x relative to the anchor area 342. Because the elastic connectors 3302 and 3306 have a buffering effect, the inclination degree of the transmission beam 361 can be relatively small; for example, the inclination angle of the transmission beam 361 relative to the Y-axis can be smaller than the inclination angle of the elastic connector 3302 relative to the Y-axis.

[0154] Combination Figure 3B The drive block may further include a transmission beam 362. Transmission beams 362 and 361 are symmetrical about the axis of symmetry y. Transmission beam 362 can be connected between elastic connectors 3305 and 3307. Transmission beam 362 can be used to rotate about the axis of symmetry x relative to the anchor area 342. The rotation directions of transmission beams 361 and 362 about the x-axis can be opposite. Specific embodiments of transmission beam 362 can be found with reference to specific embodiments of transmission beam 361.

[0155] Observe along the Y+ direction Figure 3B The mechanical structure layer 300 shown can be obtained Figure 5 The schematic structural diagram is shown below. (Followed by...) Figure 3B , Figure 5 This paper explains the principle of detecting the angular velocity around the Y-axis using mass blocks 312 and 315.

[0156] The inertial sensor may include detection electrode 232 and detection electrode 235. Detection electrode 232 and detection electrode 235 may, for example, be disposed in... Figure 2 On the substrate layer shown.

[0157] Detection electrode 232 can be positioned opposite to mass block 312, and detection electrode 235 can be positioned opposite to mass block 315. Detection electrode 232 and mass block 312 can be arranged along the Z-axis. Detection electrode 232 and mass block 312 can be arranged parallel to the XY plane, thereby forming capacitor 2. Detection electrode 235 and mass block 315 can be arranged along the Z-axis. Detection electrode 235 and mass block 315 can be arranged parallel to the XY plane, thereby forming capacitor 5.

[0158] Mass blocks 312 and 315 can have displacement components along the X-axis. When the inertial sensor as a whole has an angular velocity component rotating around the Y-axis under the action of an external force, mass blocks 312 and 315 can be subjected to a Coriolis force along the Z-axis. Mass blocks 312 and 315 have displacement components along the Z-axis. Therefore, the distance between mass block 312 and detection electrode 232 can change, and the capacitance value of capacitor 2 formed by mass block 312 and detection electrode 232 can change; the distance between mass block 315 and detection electrode 235 can change, and the capacitance value of capacitor 5 formed by mass block 315 and detection electrode 235 can change. The change in capacitance value of capacitor 2 formed by mass block 312 and detection electrode 232 can correspond to the displacement component of mass block 312 in the Z-axis direction. The change in capacitance value of capacitor 5 formed by mass block 315 and detection electrode 235 can correspond to the displacement component of mass block 315 in the Z-axis direction.

[0159] Combination Figure 3B and Figure 5 Assume the driving direction of mass block 312 is X- and the driving direction of mass block 315 is X+. Under the action of external force, mass block 312 can rotate around anchor area 342 with an angular velocity component about the Y-axis, and mass block 315 can also rotate around anchor area 342 with an angular velocity component about the Y-axis. Therefore, mass block 312 can have a displacement component along the Z- direction, and mass block 315 can have a displacement component along the Z+ direction. Mass block 312 tends to move closer to detection electrode 232, and mass block 315 tends to move away from detection electrode 235.

[0160] Since the detection results of both detection electrode 232 and detection electrode 235 include common-mode noise, combining the detection results output by detection electrode 232 and detection electrode 235 can relatively effectively remove common-mode noise, which is beneficial to improving the inertial sensor's performance in areas such as temperature drift and zero drift.

[0161] like Figure 5 As shown, a transmission beam 364 is connected between the elastic connector 3308 and the elastic connector 3310. (This is in conjunction with...) Figure 3BThe transmission beam 364 can be connected to the anchor area 342. Since the displacement components of mass blocks 312 and 315 along the Z-axis are in opposite directions, the transmission beam 364 tends to rotate relative to the anchor area 342 around the axis of symmetry y. Because the elastic connectors 3308 and 3310 have a buffering effect, and the transmission beam 364 is fixedly connected to the anchor area 342, the inclination of the transmission beam 364 can be relatively small. That is, the elastic connectors 3308 and 3310 can help reduce the inclination of the transmission beam 364 relative to the X-axis, and the stiffness of the transmission beam 364 itself can further help reduce the inclination of the transmission beam 364 relative to the X-axis, thereby helping to reduce the rotation of mass block 313 around the Y-axis.

[0162] When the displacement components of elastic connectors 3308 and 3310 in the X-axis direction are opposite, the transmission beam 364 can also provide the deformation reaction force of elastic connectors 3308 and 3310 along the X-axis, which helps to reduce the displacement components of mass blocks 313 and 316 along the X-axis direction.

[0163] Combination Figure 3B The drive block may further include a transmission beam 364. Transmission beams 364 and 363 are symmetrical about the axis of symmetry x. Transmission beam 364 can be connected between elastic connectors 3303 and 3309. Specific embodiments of transmission beam 364 can be found in specific embodiments of transmission beam 363.

[0164] Observe along the Z-direction Figure 3B A portion of the mechanical structure layer 300 shown can be obtained Figure 6 The schematic structural diagram is shown below. (Followed by...) Figure 3B , Figure 6 This paper explains the principle of detecting the angular velocity around the Z-axis using mass blocks 312, 313, 315, and 316.

[0165] The inertial sensor may include detection electrode 233 and detection electrode 236. Detection electrode 233 and detection electrode 236 may be disposed on the substrate layer shown in FIG. 3 or on the mechanical structure layer 300. When detection electrode 233 and detection electrode 236 are disposed on the mechanical structure layer 300, detection electrode 233 and detection electrode 236 may belong to the stator of the mechanical structure layer 300.

[0166] Detection electrode 233 can be positioned opposite to mass block 313, and detection electrode 236 can be positioned opposite to mass block 316. Detection electrode 233 and mass block 313 can be arranged along the Y-axis. Detection electrode 233 and mass block 313 can be arranged parallel to the XZ plane, thereby forming capacitor 3. Detection electrode 236 and mass block 316 can be arranged along the Y-axis. Detection electrode 236 and mass block 316 can be arranged parallel to the XZ plane, thereby forming capacitor 6.

[0167] Mass blocks 312 and 315 can be driven to have a displacement component along the X-axis. When the inertial sensor as a whole has an angular velocity component rotating around the Z-axis under the action of an external force, mass blocks 312 and 315 can be subjected to a Coriolis force along the Y-axis. Mass blocks 312 and 315 have a tendency to move along the Y-axis. Since mass blocks 312 and 313 are connected by support beams 3203 and 3208, mass block 313 can have a displacement component along the Y-axis under the traction of mass block 312. Therefore, the distance between mass block 313 and detection electrode 233 can change, and the capacitance value of the capacitor 3 formed by mass block 313 and detection electrode 233 can change. The amount of change in the capacitance value of the capacitor 3 formed by mass block 313 and detection electrode 233 can correspond to the displacement component of mass block 313 in the Y-axis direction. Since mass blocks 315 and 316 are connected by support beams 3209 and 3210, mass block 316 can have a displacement component along the Y-axis under the traction of mass block 315. Therefore, the distance between mass block 316 and detection electrode 236 can vary, and the capacitance value of the capacitor 6 formed by mass block 316 and detection electrode 236 can vary. The amount of change in the capacitance value of the capacitor 6 formed by mass block 316 and detection electrode 236 can correspond to the displacement component of mass block 316 in the Y-axis direction.

[0168] Combination Figure 3B and Figure 6 Assume that the driving direction of mass block 312 is X- and the driving direction of mass block 315 is X+. Under the action of external force, mass blocks 312 and 313 can have angular velocity components about the Z-axis around the anchor area 342, and mass blocks 315 and 316 can also have angular velocity components about the Z-axis around the anchor area 342. Therefore, mass blocks 312 and 313 can have displacement components along the Z- direction, and mass blocks 315 and 316 can have displacement components along the Z+ direction. Mass block 313, for example, may tend to move closer to the detection electrode 233, and mass block 316, for example, may tend to move away from the detection electrode 236.

[0169] One end of mass block 313 and one end of mass block 316 can be connected by a transmission beam 363. The transmission beam 363 can provide balancing forces in the X direction to help reduce the displacement of mass blocks 313 and 316 in the X direction. The transmission beam 363 can also provide torsional support for mass blocks 312 and 313 rotating about the Z-axis. Similarly, the other ends of mass blocks 313 and 316 can be connected by a transmission beam 364. The transmission beam 364 can provide balancing forces in the X direction and torsional support for mass blocks 313 and 316 rotating about the Z-axis.

[0170] Since the detection results of both detection electrode 233 and detection electrode 236 include common-mode noise, combining the detection results output by detection electrode 233 and detection electrode 236 can relatively effectively remove common-mode noise, which is beneficial to improving the inertial sensor's performance in areas such as temperature drift and zero drift.

[0171] To facilitate the explanation of the beneficial effects of the solutions provided in the embodiments of this application, three types of decoupling are first described: mechanical decoupling, principle decoupling, and differential decoupling.

[0172] Mechanical decoupling can refer to the independent layout of component A and component B, where the movement of component A (which can include movement driven by the chip and rotation under the action of external force) does not affect the movement of component A.

[0173] In principle, decoupling means that components A and B are not independently arranged. Component A detects capacitance changes along axis a, while component B does not move along axis a, or the amount of movement of component B along axis a is negligible. In other words, the resonance of component B will not affect the detection of component A. Principle-based structures avoid or reduce the interaction between the two components from the perspective of the detection principle.

[0174] Differential decoupling refers to a situation where component A and component B are symmetrical, and their motion modes are differential. Differential motion through symmetrical structures can help eliminate common-mode effects, thus reducing the influence between components A and B. Differential decoupling strongly relies on symmetry, placing relatively high demands on the fabrication of inertial sensors.

[0175] The following section, in conjunction with the above definitions, describes the decoupling mode between the various components of the mechanical structure layer 300 provided in the embodiments of this application.

[0176] Mass block 311 can have a displacement component along the Y-axis under the action of the driving block, while the detection direction is the Z-axis. Therefore, the decoupling mode between mass block 311 and the driving block can be a principle-based decoupling. Mass block 312 can have a displacement component along the X-axis under the action of the driving block, while the detection direction is the Z-axis. Therefore, the decoupling mode between mass block 312 and the driving block can be a principle-based decoupling. Mass block 313 and the driving block can be considered independently set, that is, mass block 313 can be approximately considered not to move under the action of the driving block. Therefore, the decoupling mode between mass block 313 and the driving block can be a mechanical decoupling.

[0177] The motions of mass block 311 and mass block 312 do not interfere with each other; therefore, the decoupling mode for mass blocks 311 and 312 can be mechanical decoupling. Similarly, the motions of mass block 311 and mass block 313 do not interfere with each other; therefore, the decoupling mode for mass blocks 311 and 313 can be mechanical decoupling.

[0178] When detecting the Y-axis angular velocity via mass block 312, the detection direction of mass block 312 is the Z-axis direction. Mass block 313 can remain stationary in the Z-axis direction. Therefore, from this perspective, the decoupling mode between mass blocks 312 and 313 can be considered mechanical decoupling. When detecting the Z-axis angular velocity via mass block 313, the detection direction of mass block 313 is the Y-axis. Mass block 312 can have a displacement component along the Y-axis direction, while its detection direction is the Z-axis direction. Therefore, from this perspective, the decoupling mode between mass blocks 313 and 312 can be considered principle-based decoupling.

[0179] Table 1 shows Figure 3A The decoupling mode of the mechanical structure layer 300 shown.

[0180] Table 1

[0181] Decoupling mode drive block Mass block 311 Mass block 312 Mass block 313 Mass block 311 Decoupling in principle / Mechanical decoupling Mechanical decoupling Mass block 312 Decoupling in principle Mechanical decoupling / Decoupling in principle Mass block 313 Mechanical decoupling Mechanical decoupling Mechanical decoupling /

[0182] The mechanical structure layer provided in this application embodiment can reduce the application of differential decoupling mode, which is beneficial for reducing the processing accuracy requirements of inertial sensors and improving the detection accuracy of inertial sensors. Since the inertial sensor can be coaxially driven, it is beneficial for reducing the number of drive blocks within the inertial sensor, improving the integration of the inertial sensor, and thus helping to reduce the size of the inertial sensor.

[0183] Figure 7A This is a perspective view of another mechanical structure layer 300 provided in an embodiment of this application. Along Figure 7A The mechanical structure layer 300, as shown in the Z-direction view, can be obtained Figure 7B The floor plan shown. Figure 7C yes Figure 7BThe diagram shows the motion of the moving part of the mechanical structure layer 300 when it is not rotating. For ease of description, as shown... Figure 7A , Figure 7B , Figure 7C As shown, assuming an XYZ coordinate system exists, with the X, Y, and Z axes orthogonal to each other, the mechanical structure layer 300 can be set parallel to the XY plane.

[0184] and Figures 3A to 6 The illustrated embodiments are similar, in Figures 7A to 7C In the illustrated embodiment, the mechanical structure layer 300 may include: anchor areas 341, 342, and 343; mass blocks 311, 312, 313, 314, 315, and 316; support beams 3201, 3202, 3203, 3204, 3205, 3206, 3207, 3208, 3209, and 3210; elastic connectors 3301, 3302, 3303, 3304, 3305, 3306, 3307, 3308, 3309, and 3310; and transmission beams 361, 362, 363, and 364. The mass blocks 311, 312, 313, 314, 315, and 316 of the mechanical structure layer 300 can form capacitors 1, 2, 3, 4, 5, and 6 with the detection electrodes 231, 232, 233, 234, 235, and 236 of the inertial sensor, respectively. The angular velocity around the X-axis is detected by capacitors 1 and 4, the angular velocity around the Y-axis is detected by capacitors 2 and 5, and the angular velocity around the Z-axis is detected by capacitors 3 and 6.

[0185] The mechanical structure layer 300 may further include an anchor area 344 and a drive block 381. The anchor area 344 may be a stator of the mechanical structure layer 300. The drive block 381 may be a mover of the mechanical structure layer 300. The drive block 381 is movable relative to the anchor area 344 along the X-axis.

[0186] In one embodiment, the mechanical structure layer 300 may further include fixed comb teeth 39291 and movable comb teeth 396. Fixed comb teeth 39291 may be fixed to the anchor area 344. Movable comb teeth may be fixed to the drive block 381. Fixed comb teeth 39291 and movable comb teeth 396 may be arranged at alternating intervals.

[0187] In this application, the fixed comb teeth can belong to the stator of the mechanical structure layer 300, and the movable comb teeth can belong to the mover of the mechanical structure layer 300. The fixed comb teeth can include multiple fixed teeth, and the movable comb teeth can include multiple movable teeth. The staggered arrangement of the fixed and movable comb teeth can mean that there is one movable tooth between two adjacent fixed teeth, one fixed tooth between two adjacent movable teeth, and the adjacent fixed teeth and movable teeth are spaced apart.

[0188] By applying alternating current to the drive block 381 and the anchor area 344, the interaction force between the movable comb tooth 396 and the fixed comb tooth 39291 can drive the movable comb tooth 396 to move relative to the fixed comb tooth 39291 along the X-axis, thereby causing the drive block 381 to move relative to the anchor area 344 along the X-axis. The displacement of the drive block 381 in the Y-axis and Z-axis directions can be relatively small or even negligible. For example, the drive block 381 can be attached to the substrate or the anchor area 34 and confined to movement along the X-axis.

[0189] The mechanical structure layer 300 may further include anchor areas 345 and drive blocks 382. Anchor areas 345 and 344 may be symmetrical with respect to symmetrical beams 371 or 372. Drive blocks 381 and 382 may be symmetrical with respect to symmetrical beams 371 or 372. Drive block 382 may move relative to anchor area 345 along the X-axis. The direction of movement of drive block 382 may be opposite to the direction of movement of drive block 381. Specific embodiments of drive block 382 can refer to drive block 381, and specific embodiments of anchor area 345 can refer to anchor area 344.

[0190] The mechanical structure layer 300 may also include a symmetrical beam 373. The symmetrical beam 373 itself can be relative to... Figure 3A The axis of symmetry shown is x-symmetric. Symmetric beam 373 can be connected to the side of drive block 381 furthest from drive block 382. Symmetric beam 373 can extend along the x-axis. Drive block 381 itself can be symmetrical with respect to symmetric beam 373. Anchor area 344 itself can be symmetrical with respect to symmetric beam 373.

[0191] The end of the symmetrical beam 373 furthest from the drive block 381 can be connected to the transmission beam 361. The transmission beam 361 can extend along the Y-axis. Thus, the drive block 381 can drive the transmission beam 361 through the symmetrical beam 373, so that the transmission beam 361 has a displacement component along the X-axis. Support beams 3201 and 3205 are respectively connected to both ends of the transmission beam 361. The support beams 3201 and 3205 have displacement components along the X-axis under the action of the transmission beam 361.

[0192] The end of the support beam 3201 away from the transmission beam 361 is connected to the first end of the mass block 311 via a steering beam and an elastic connector 3302. The first end of the mass block 311 can be driven to have a displacement component along the Y-axis.

[0193] An anchor area 341 and an elastic connector 3301 are provided on the side of mass block 311 away from mass block 314 and near the first end of mass block 311. The elastic connector 3301 connects the first end of mass block 311 and the anchor area 341. The elastic connector 3301 provides buffer space for mass block 311 in the Y-axis direction. Additionally, the elastic connector 3301 also provides support for mass block 311 in the Z-axis direction. That is, the stiffness of the elastic connector 3301 along the Z-axis can be relatively large, and the stiffness along the Y-axis can be relatively small.

[0194] In one embodiment, such as Figure 7B As shown in the partial schematic diagram, the elastic connector 3301 can also provide a buffer space in the X-axis direction for the mass block 311. The traction force of the displacement component of the mass block 311 in the X-axis direction on the anchor area 341 can be relatively small, which is beneficial to reduce the stress effect of the displacement component of the mass block 311 in the X-axis direction on the substrate.

[0195] According to the simulation results, the anchor area 341 is set at one end of the mass block 311 and is softly connected to the mass block 311 in at least one direction (i.e., the elastic connector 3301 is elastic in at least one direction). This can help adjust the interference mode of the mechanical structure layer 300 so that the effective mode of the mechanical structure layer 300 can be far away from the interference mode of the mechanical structure layer 300.

[0196] The mechanical structure layer 300 may further include an anchor zone 346 and an elastic connector 3311. Anchor zones 346 and 341 may be symmetrical with respect to the symmetrical beam 371. Elastic connectors 3311 and 3301 may also be symmetrical with respect to the symmetrical beam 371. Anchor zones 346 and 3301 are located on the side of mass block 311 away from mass block 314 and near the second end of mass block 311. Elastic connector 3311 connects the second end of mass block 314 and anchor zone 346. Specific embodiments of elastic connector 3311 can be found with reference to elastic connector 3301. Specific embodiments of anchor zone 346 can be found with reference to anchor zone 341.

[0197] The end of the support beam 3205 away from the transmission beam 361 is connected to the first end of the mass block 314 via a steering beam and an elastic connector 3306. The first end of the mass block 314 can be driven to have a displacement component along the Y-axis. The displacement component of the first end of the mass block 311 can be opposite in direction to the displacement component of the first end of the mass block 314.

[0198] An anchor area 343 and an elastic connector 3304 are provided on the side of mass block 314 away from mass block 311 and near the first end of mass block 314. The elastic connector 3304 connects the first end of mass block 314 and anchor area 343. A specific embodiment of elastic connector 3304 can be referred to in the specific embodiment of elastic connector 3301.

[0199] The mechanical structure layer 300 may also include a symmetrical beam 374. The symmetrical beam 374 itself can be relative to... Figure 3A The axis of symmetry shown is symmetrical. Symmetrical beams 374 and 373 can be symmetrical with respect to symmetrical beam 371 or symmetrical beam 372. Symmetrical beam 374 can be connected to the side of drive block 382 away from drive block 381. A specific embodiment of symmetrical beam 374 can be referred to symmetrical beam 371.

[0200] Anchor zone 345 can be symmetrical with respect to symmetrical beam 374. Drive block 382 can also be symmetrical with respect to symmetrical beam 374. The end of symmetrical beam 374 furthest from drive block 382 can be connected to transmission beam 362. Thus, drive block 382 can drive transmission beam 362 through symmetrical beam 374, causing drive beam 362 to have a displacement component along the X-axis. The displacement component of transmission beam 362 can be opposite in direction to the displacement component of transmission beam 361. Support beams 3204 and 3206 are connected to both ends of transmission beam 362, respectively. Support beams 3204 and 3206 can have a displacement component along the X-axis under the action of transmission beam 362. A specific embodiment of transmission beam 362 can be found with reference to transmission beam 361.

[0201] The end of the support beam 3204 away from the transmission beam 362 is connected to the second end of the mass block 311 via a steering beam and an elastic connector 3305. The second end of the mass block 311 can be driven to have a displacement component along the Y-axis.

[0202] The end of the support beam 3206 away from the transmission beam 362 is connected to the second end of the mass block 314 via a steering beam and an elastic connector 3307. The second end of the mass block 314 can be driven to have a displacement component along the Y-axis. The direction of the displacement component of the second end of the mass block 311 can be opposite to the direction of the displacement component of the second end of the mass block 314.

[0203] The mechanical structure layer 300 may further include anchor zones 347 and elastic connectors 3312. Anchor zones 347 and 343 may be symmetrical with respect to the symmetrical beam 372. Elastic connectors 3312 and 3304 may be symmetrical with respect to the symmetrical beam 372. Anchor zones 347 and 346 may be symmetrical with respect to the symmetrical beam 374. Elastic connectors 3312 and 3311 may be symmetrical with respect to the symmetrical beam 374. Anchor zones 347 and 3312 are disposed on the side of the mass block 314 away from the mass block 311 and near the second end of the mass block 314. Elastic connector 3312 connects the second end of the mass block 314 and the anchor zone 347. Specific embodiments of elastic connector 3312 may refer to elastic connector 3311 or elastic connector 3304. Specific embodiments of anchor zone 347 may refer to anchor zone 346 or anchor zone 343.

[0204] Figure 7C A schematic structural diagram showing mass blocks 311 and 314 moving along the Y-axis and in opposite directions is shown. Figure 7C The dashed line indicates the positions of mass blocks 311 and 314 before they were moved. Figure 7C The solid line in the middle shows the positions of mass blocks 311 and 314 after they have been moved.

[0205] The mechanical structure layer 300 may include multiple support beams 3202. The multiple support beams 3202 may be symmetrical with respect to the symmetrical beam 373.

[0206] The side of drive block 381 closest to drive block 382 can be connected to support beam 3202. One support beam 3202 can be connected to the end of drive block 381 closest to mass block 311, and the other support beam 3202 can be connected to the end of drive block 381 closest to mass block 314. The end of one support beam 3202 furthest from drive block 381 can be connected to the end of mass block 312 furthest from mass block 311. The end of the other support beam 3202 furthest from drive block 381 can be connected to the end of mass block 312 furthest from mass block 314. Drive block 381 can be used to drive mass block 312 via support beam 3202, so that mass block 312 has a displacement component along the X-axis.

[0207] The mechanical structure layer 300 may include multiple support beams 3207. The multiple support beams 3207 may be symmetrical with respect to the symmetrical beam 374. The multiple support beams 3202 and the multiple support beams 3207 may be symmetrical with respect to the symmetrical beam 372.

[0208] The side of the drive block 382 closest to the drive block 381 can be connected to the support beam 3207. The side of the support beam 3207 furthest from the drive block 382 can be connected to the mass block 315. The drive block 382 can be used to move the mass block 315 via the support beam 3207, so that the mass block 315 has a displacement component along the X-axis. The displacement component of the mass block 315 along the X-axis can be opposite in direction to the displacement component of the mass block 312 along the X-axis. The displacement component of the support beam 3207 along the X-axis can be opposite in direction to the displacement component of the support beam 3202 along the X-axis. Specific embodiments of the support beam 3207 can be found in specific embodiments of the support beam 3202.

[0209] Figure 7C A schematic structural diagram showing mass blocks 312 and 315 moving along the X-axis and in opposite directions is shown. Figure 7C The dashed line indicates the positions of mass blocks 312 and 315 before they were moved. Figure 7C The solid line shows the positions of mass blocks 312 and 315 after they have been moved.

[0210] The mechanical structure layer 300 may further include an anchor region 348. The anchor region 348 may be symmetrical with respect to the symmetrical beam 373. Fixed comb teeth 392 are fixed to the anchor region 348. Movable comb teeth 397 are fixed to the mass block 313. The fixed comb teeth 392 and the movable comb teeth 397 may be symmetrical with respect to the symmetrical beam 373. The fixed comb teeth 392 and the movable comb teeth 397 are arranged at alternating intervals. A detection electrode is provided on the fixed comb teeth 392. The movable comb teeth 397 and the detection electrode can form a capacitor. By detecting the change in capacitance formed by the movable comb teeth 397 and the detection electrode, the angular velocity component of the mass block 313 about the Z-axis can be determined.

[0211] The mechanical structure layer 300 may further include an anchor region 349. Anchor region 349 may be symmetrical with respect to the symmetrical beam 374. Anchor regions 348 and 349 may be symmetrical with respect to either the symmetrical beam 371 or the symmetrical beam 372. Detection electrodes on the mass block 316 and anchor region 349 may form a capacitor; by detecting the change in capacitance, the angular velocity component of the mass block 316 about the Z-axis can be determined. Specific embodiments of anchor region 349 can refer to anchor region 348, and specific embodiments of mass block 316 can refer to mass block 313.

[0212] Figure 8A A schematic structural diagram of the mechanical structure layer 300 detecting the angular velocity about the X-axis is shown. Viewed along the X+ direction. Figure 8A The mechanical structure layer 300 shown can be obtained Figure 8B The schematic structural diagram is shown below. (Followed by...) Figure 8A , Figure 8BThis paper explains the principle of detecting the angular velocity around the X-axis using mass blocks 311 and 314.

[0213] As mentioned earlier, when the inertial sensor has an angular velocity component rotating about the X-axis, mass blocks 311 and 314 have displacement components along the Z-axis, and the displacement components of mass blocks 311 and 314 along the Z-axis are in opposite directions. Assume that mass block 311 can have a displacement component along the Z+ direction, and mass block 314 can have a displacement component along the Z- direction. Mass block 311 tends to move away from detection electrode 231, and mass block 314 tends to move closer to detection electrode 234.

[0214] Since mass block 311 can be connected to anchor area 341 via elastic connector 3301, and the other end of mass block 311 can be connected to anchor area 346 via elastic connector 3311, the displacement of the side of mass block 311 closer to anchor areas 341 and 346 in the Z-axis direction is relatively small, while the displacement of the side of mass block 311 farther from anchor areas 341 and 346 in the Z-axis direction is relatively large. Mass block 311 can be tilted relative to the Y-axis in a first direction. Similarly, mass block 314 can be tilted relative to the Y-axis in a second direction, with the first and second directions being opposite. That is, mass blocks 311 and 314 can have an angular velocity component rotating about the X-axis, and the directions of the angular velocity components of mass blocks 311 and 314 rotating about the X-axis can be opposite. Elastic connectors 3301 and 3311 can provide torsional support for the rotation of mass block 311 about the Y-axis. The elastic connectors 3304 and 3312 can provide torsional support for the mass block 314 to rotate about the Y-axis.

[0215] Under the traction of mass blocks 311 and 314, the transmission beam 361 tends to rotate around the symmetrical beam 371. An elastic connector 3302 can be connected between the transmission beam 361 and the mass blocks 311. Since the stiffness of the transmission beam 361 can be greater than that of the elastic connector 3302, the elastic connector 3302 can have relatively greater elasticity in the Z-axis direction, providing a buffer space for the mass blocks 311 in the Z-axis direction. The tilt angle of the elastic connector 3302 relative to the Y-axis can be greater than the tilt angle of the transmission beam 361 relative to the Y-axis. In one embodiment, the tilt angle of the mass block 311 relative to the Y-axis can be greater than the tilt angle of the transmission beam 361 relative to the Y-axis. That is, the rotation angle of the transmission beam 361 about the X-axis is smaller than the rotation angle of the mass block 311 about the X-axis.

[0216] The width of the elastic connector 3302 in the Y-axis direction can be smaller than the width of the mass block 311 in the Y-axis direction. The tilt angle of the elastic connectors 3302 and 3306 relative to the Y-axis can be greater than the tilt angle of the mass block 311 relative to the Y-axis.

[0217] Similarly, the tilt angle of the elastic connector 3306 relative to the Y-axis can be greater than the tilt angle of the transmission beam 361 relative to the Y-axis. Specific embodiments of the elastic connector 3306 can be found with reference to the elastic connector 3302. Specific embodiments of the transmission beam 362 and the elastic connector connected to it can be found with reference to the transmission beam 361 and the elastic connector connected to it.

[0218] Figure 9A A schematic structural diagram of the mechanical structure layer 300 for detecting angular velocity about the Y-axis is shown. Viewed along the Y+ direction. Figure 9A The mechanical structure layer 300 shown can be obtained Figure 9B The schematic structural diagram is shown below. (Followed by...) Figure 9A , Figure 9B This paper explains the principle of detecting the angular velocity around the Y-axis using mass blocks 312 and 315.

[0219] As mentioned earlier, when the inertial sensor has an angular velocity component rotating about the Y-axis, mass blocks 312 and 315 have displacement components along the Z-axis, and the displacement components of mass blocks 312 and 315 along the Z-axis are in opposite directions. Assume that mass block 312 can have a displacement component along the Z+ direction, and mass block 315 can have a displacement component along the Z- direction. Mass block 312 tends to move away from detection electrode 232, and mass block 315 tends to move closer to detection electrode 235.

[0220] Since mass block 312 can be connected to drive block 381 via support beam 3202, drive block 381 can remain stationary in the Z-axis direction. The side of mass block 312 closer to drive block 381 has a relatively small displacement in the Z-axis direction, while the side of mass block 312 farther from drive block 381 has a relatively large displacement in the Z-axis direction. Mass block 312 can be tilted relative to the X-axis in a first direction. Similarly, mass block 315 can be tilted relative to the X-axis in a second direction, with the first and second directions being opposite. That is, mass blocks 312 and 315 can have angular velocity components rotating around the Y-axis. The directions of the angular velocity components of mass blocks 312 and 315 rotating around the Y-axis can be opposite.

[0221] An elastic connector 3303 can connect the transmission beam 363 and the mass block 312. The elastic connector 3303 can extend and retract in the Z-axis direction to reduce the displacement component of the transmission beam 363 along the Z-axis, providing the mass block 312 with buffer space in the Z-axis direction and torsional stiffness about the Y-axis, thus reducing the impact of the mass blocks 312 and 315 on the transmission beam 363. The transmission beam 363 can further absorb part of the torque rotating about the Y-axis, reducing the displacement of the mass blocks 313 and 316 along the Z-axis. The stiffness of the transmission beam 363 can be greater than that of the elastic connector 3303, and the tilt angle of the elastic connector 3303 relative to the X-axis can be greater than the tilt angle of the transmission beam 363 relative to the X-axis. In one embodiment, the tilt angle of the mass block 312 relative to the X-axis can be greater than the tilt angle of the transmission beam 363 relative to the X-axis. That is, the rotation angle of the transmission beam 363 about the Y-axis is smaller than the rotation angle of the mass block 312 about the Y-axis.

[0222] The width of the elastic connector 3303 in the X-axis direction can be smaller than the width of the mass block 312 in the X-axis direction. The tilt angle of the elastic connector 3303 relative to the X-axis can be greater than the tilt angle of the mass block 312 relative to the X-axis.

[0223] Similarly, the tilt angle of the elastic connector 3309 relative to the X-axis can be greater than the tilt angle of the transmission beam 363 relative to the X-axis. Specific embodiments of the elastic connector 3309 can be found with reference to the elastic connector 3303. Specific embodiments of the transmission beam 364 and the elastic connector connected to it can be found with reference to the transmission beam 363 and the elastic connector connected to it.

[0224] Figure 10A A schematic structural diagram of the mechanical structure layer 300 for detecting angular velocity about the Y-axis is shown. Viewed along the Y+ direction. Figure 10A The mechanical structure layer 300 shown can be obtained Figure 10B The schematic structural diagram is shown below. Figure 10A , Figure 10B This paper explains the principle of detecting the angular velocity around the Z-axis using mass blocks 313 and 316.

[0225] As mentioned earlier, when the inertial sensor has an angular velocity component rotating around the Z-axis, mass blocks 312 and 315 have displacement components along the Y-axis. The displacement components of mass blocks 312 and 315 along the Y-axis are in opposite directions, thus causing mass blocks 313 and 316 to have displacement components along the Y-axis, and the displacement components of mass blocks 313 and 316 along the Y-axis are also in opposite directions. Assume that mass block 313 can have a displacement component along the Y+ direction, and mass block 316 can have a displacement component along the Y- direction. Mass block 313 tends to move away from the detection electrode, while mass block 316 tends to move closer to the detection electrode.

[0226] Since mass block 312 can be connected to drive block 381 via support beam 3202, drive block 381 can remain stationary in the Y-axis direction. The side of mass block 312 closer to drive block 381 has a relatively small displacement in the Y-axis direction, while the side of mass block 312 farther from drive block 381 has a relatively large displacement in the Y-axis direction. Mass block 312 can be tilted relative to the X-axis in a first direction. Similarly, mass block 315 can be tilted relative to the X-axis in a second direction, with the first and second directions being opposite. That is, mass blocks 312 and 315 can have angular velocity components rotating about the Z-axis, and the directions of these angular velocity components can be opposite. Transmission beam 363 can provide torsional support for mass blocks 313 and 316 rotating about the Z-axis.

[0227] Mass block 312 extends from one end of mass block 313 to the other end of mass block 313. A flexible connector 3303 can be connected between one end of mass block 312 and one end of mass block 313. A flexible connector 3308 can be connected between the other end of mass block 312 and the other end of mass block 313.

[0228] Elastic connectors 3303 and 3308 can extend and retract in the Y-axis direction. The elastic forces of elastic connectors 3303 and 3308 can cancel each other out, allowing mass block 313 to follow mass block 312 with a displacement component along the Y-axis and towards the first direction. Elastic connectors 3303 and 3308 can be elastic in the Y-axis direction to reduce the displacement component of mass block 313 along the Y-axis, providing a buffer space for mass block 312 in the Y-axis direction. The displacement component of mass block 312 along the Y-axis can be greater than that of mass block 313 along the Y-axis. Similarly, the displacement component of mass block 315 along the Y-axis can be greater than that of mass block 316 along the Y-axis.

[0229] In one embodiment, the width of the support beam 3203 in the X-axis direction may be smaller than the width of the mass block 312 in the X-axis direction. The tilt angle of the support beam 3202 relative to the X-axis may be greater than the tilt angle of the mass block 312 relative to the X-axis.

[0230] In another embodiment, the width of the support beam 3202 in the X-axis direction may be less than half the width of the transmission beam 363 in the X-axis direction. The tilt angle of the support beam 3202 relative to the X-axis may be greater than the tilt angle of the transmission beam 363 relative to the X-axis.

[0231] For specific embodiments of other support beams symmetrically arranged with support beam 3202, please refer to the specific embodiments of support beam 3202.

[0232] This application's embodiments adjust the natural frequency modes of the inertial sensor through, for example, stiffness design and decoupling mode design, so that the effective modes of the inertial sensor are as far away as possible from the interfering modes of the inertial sensor, thereby improving the filtering effect of the inertial sensor and reducing its noise level. Furthermore, by adjusting the detection frequency and driving frequency of the inertial sensor, the sensitivity of the inertial sensor can be improved.

[0233] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An inertial sensor, characterized in that, include: A first mass block and a first detection electrode, wherein the first mass block is movable relative to the first detection electrode, the first mass block and the first detection electrode are arranged along a first direction to form a first capacitor, the first capacitor being used to detect angular velocity about a second direction; A second mass block and a second detection electrode, the second mass block being movable relative to the second detection electrode, the second mass block and the second detection electrode being arranged along the second direction to form a second capacitor, the second capacitor being used to detect angular velocity about the first direction; A first connector is connected between a first end of the first mass block and a first end of the second mass block; The first mass block is driven to have a displacement component in a third direction, wherein the first direction, the second direction, and the third direction are orthogonal to each other; When the first mass block has an angular velocity component about the first direction, the first mass block has a displacement component along the second direction. The first mass block is used to pull the second mass block to move along the second direction through the first connector. The displacement component of the second mass block along the second direction corresponds to the capacitance change of the second capacitor. When the first mass block has an angular velocity component about the second direction, the first mass block has a displacement component along the first direction, and the displacement component of the first mass block along the first direction corresponds to the change in capacitance of the first capacitor. The first connector includes a first elastic connector, which provides buffer space for the first mass block in the first direction and the third direction, such that the displacement component of the first end of the second mass block in the first direction is less than the displacement component of the first end of the first mass block in the first direction, and the displacement component of the first end of the second mass block in the third direction is less than the displacement component of the first end of the first mass block in the third direction.

2. The inertial sensor according to claim 1, characterized in that, The first connector further includes: A first support beam is connected between the first elastic connector and the second mass block.

3. The inertial sensor according to claim 1, characterized in that, The first connector further includes: A first transmission beam extends along the third direction, with one end of the first transmission beam connected between the first elastic connector and the second mass block. When the first mass block has an angular velocity component about the first direction, the first transmission beam rotates about the first direction.

4. The inertial sensor according to claim 3, characterized in that, When the first mass has an angular velocity component about the second direction, the rotation angle of the first transmission beam about the second direction is smaller than the rotation angle of the first mass about the second direction.

5. The inertial sensor according to any one of claims 1 to 4, characterized in that, The first mass block extends from a first end of the second mass block to a second end of the second mass block, and the inertial sensor further includes: A second connector is connected between the second end of the first mass block and the second end of the second mass block, and the second connector is symmetrical to the first connector with respect to the second mass block.

6. The inertial sensor according to any one of claims 1 to 4, characterized in that, The inertial sensor also includes: A driving electrode and a driving block, wherein the capacitor formed by the driving electrode and the driving block is used to drive the driving block to reciprocate relative to the driving electrode along the third direction; A second support beam is connected between the drive block and the first mass block. The drive block is used to drive the first mass block through the second support beam so that the first mass block has a displacement component in the third direction.

7. The inertial sensor according to any one of claims 1 to 4, characterized in that, The inertial sensor also includes: A third mass block and a third detection electrode, the third mass block being movable relative to the third detection electrode, the third mass block and the third detection electrode being arranged along the first direction to form a third capacitor, the third capacitor being used to detect angular velocity about the third third direction, the third mass block being driven to have a displacement component in the second direction, when the third mass block has an angular velocity component about the third third direction, the third mass block has a displacement component along the first direction, the displacement component of the third mass block along the first direction corresponding to the change in capacitance of the third capacitor.

8. The inertial sensor according to claim 7, characterized in that, The first mass block is driven by a drive block configured to reciprocate along the third direction. A steering beam is connected between the third mass block and the drive block. One end of the steering beam near the drive block is used for reciprocating along the third direction, and the other end of the steering beam near the third mass block is used for reciprocating along the second direction, so that the third mass block has a displacement component along the second direction.

9. The inertial sensor according to claim 8, characterized in that, The inertial sensor also includes: A second elastic connector is connected between the drive block and the first mass block to provide a buffer space for the third mass block in the first direction.

10. The inertial sensor according to claim 9, characterized in that, The inertial sensor also includes: The second transmission beam is connected between the second elastic connector and the drive block. The second transmission beam is rotatable about the third direction. When the third mass block rotates about the third direction, the rotation angle of the second transmission beam about the third direction is smaller than the rotation angle of the third mass block about the third direction.

11. The inertial sensor according to any one of claims 8 to 10, characterized in that, The inertial sensor also includes: A third elastic connector is connected to the third mass block. The third elastic connector is used to provide the third mass block with a supporting force in the first direction and also to provide the third mass block with a buffer space in the second direction.

12. The inertial sensor according to claim 11, characterized in that, The third elastic connector is located on the side of the third mass block away from the second mass block.

13. The inertial sensor according to any one of claims 8 to 10, characterized in that, The inertial sensor includes a mechanical structure layer, a cover layer, and a substrate layer. The mechanical structure layer is located between the cover layer and the substrate layer. The first mass block and the second mass block are disposed in the mechanical structure layer. The first detection electrode is disposed in the substrate layer, and the second detection electrode is disposed in the substrate layer or the mechanical structure layer.

14. The inertial sensor according to any one of claims 1 to 4, 8 to 10, characterized in that, The inertial sensor is symmetrical with respect to the second direction, and the inertial sensor is symmetrical with respect to the third direction.

15. An electronic device, characterized in that, Including the inertial sensor as described in any one of claims 1 to 14.

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