A sputtering source device with multiple degrees of freedom

Abstract

The present invention provides a sputtering source device with multiple degrees of freedom, comprising: a sputtering source rotation driving device, a sputtering source revolution driving device and a moving device. The sputtering source rotation driving device is used to drive the sputtering source to rotate, the sputtering source revolution driving device is used to drive the sputtering source to revolution, and the moving device is used to drive the sputtering source to move forward and backward and left and right. The present invention can ensure uniform coating and improve the quality of the film layer.

Description

Technical Field

[0001] The invention relates to the field of film coating, and in particular to a sputtering source device with multiple degrees of freedom. Background Art

[0002] The traditional ion beam sputtering coating machine has a simple design of sputtering source equipment, which can only rotate and has too few degrees of freedom of movement, resulting in low utilization of the sputtering source. As a result, manufacturers need to frequently change targets, which consumes a lot of man-hours and leads to low production efficiency. At the same time, the sputtering source is seriously wasted and the product cost remains high. A schematic structure of a traditional ion beam sputtering system can be shown as follows: Figure 1 As shown, the sputtering source 300 can rotate along the rotation axis 400 to switch back and forth between the three target positions, but a single sputtering source cannot move up and down or left and right, and the sputtering area of ​​the sputtering source can only be limited to a small part. The traditional ion beam sputtering system can improve the utilization rate of the sputtering source by rotating the angles of the three targets, but the angle of the particle beam 200 sputtered by the sputtering source 100 will also change, affecting the coating target area and the uniformity of the film layer. Summary of the invention

[0003] In view of the above technical problems, the technical solution adopted by the present invention is:

[0004] An embodiment of the present invention provides a sputtering source device with multiple degrees of freedom, comprising: a moving device and a sputtering source rotation driving device and a sputtering source revolution driving device arranged on the moving device;

[0005] Among them, the sputtering source self-rotation driving device includes an automatic driving motor and at least one sputtering source, the self-rotation driving motor is used to drive the sputtering source to rotate, the sputtering source revolution driving device is used to drive the sputtering source self-rotation driving device to rotate, and the moving device is used to drive the sputtering source self-rotation driving device and the sputtering source revolution driving device to move as a whole in a first direction and a second direction in a horizontal plane, and the first direction and the second direction are perpendicular.

[0006] The present invention has at least the following beneficial effects:

[0007] The sputtering source device with multiple degrees of freedom provided in the embodiment of the present invention can realize simultaneous revolution and rotation and can move forward, backward, left and right. Therefore, all areas of the entire sputtering source surface can be sputtered by the ion source, so that the target material utilization rate can reach 100%, which can ensure the uniformity of the film layer and improve the quality of the film layer, thereby improving production efficiency and reducing product costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0009] Figure 1 It is a schematic diagram of the structure of an existing sputtering source equipment.

[0010] Figure 2 and 3 A schematic diagram of the three-dimensional structure of a sputtering source device with multiple degrees of freedom provided in an embodiment of the present invention.

[0011] Figure 4 and Figure 5 Schematic diagram of the internal structure of the sputtering source rotation drive device according to an embodiment of the present invention.

[0012] Figure 6 Schematic diagram of the internal structure of the sputtering source revolution driving device according to an embodiment of the present invention.

[0013] Figure 7 Schematic diagram of a sputtering source connection structure according to an embodiment of the present invention.

[0014] Figure 8 Schematic diagram of the structure of a clamp according to an embodiment of the present invention. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0016] Figure 2 and 3 A schematic diagram of the three-dimensional structure of a sputtering source device with multiple degrees of freedom provided in an embodiment of the present invention. Figure 4 and Figure 5 Schematic diagram of the internal structure of the sputtering source rotation drive device according to an embodiment of the present invention. Figure 6 Schematic diagram of the internal structure of the sputtering source revolution driving device according to an embodiment of the present invention. Figure 7 Schematic diagram of a sputtering source connection structure according to an embodiment of the present invention. Figure 8 Schematic diagram of the structure of a clamp according to an embodiment of the present invention.

[0017] like Figures 2 to 6As shown, an embodiment of the present invention provides a sputtering source device with multiple degrees of freedom, including: a moving device and a sputtering source rotation driving device 3 and a sputtering source revolution driving device 4 arranged on the moving device.

[0018] Furthermore, in an embodiment of the present invention, the sputtering source self-rotation driving device 4 may include an automatic driving motor 22 and at least one sputtering source 13 , and the self-rotation driving motor 22 is used to drive the sputtering source 13 to rotate.

[0019] In an exemplary embodiment of the present invention, three sputtering sources 13 may be included to improve equipment utilization. Figure 4 and Figure 5 As shown, the self-rotation drive device 3 may include a first self-rotation base, a second self-rotation base and a third self-rotation base, and a sputtering source 13 is arranged on the outer side of each base. The first self-rotation base and the second self-rotation base are connected by a first self-rotation drive shaft 24, and the first self-rotation drive shaft 24 is provided with a first drive gear 20 and a pivoting portion 31; the third self-rotation base is provided with a second self-rotation drive shaft 27 and a self-rotation drive motor 22, the second self-rotation drive shaft 27 is also connected to the pivoting portion 31 and is arranged perpendicularly to the first drive shaft 24, and the second self-rotation drive shaft 27 is provided with a second drive gear 25 and a third drive gear 21, that is, the second drive gear 25 and the third drive gear 21 rotate coaxially. The third drive gear 21 is meshedly connected with the first drive gear 20, and the self-rotation drive motor 22 is arranged on the self-rotation drive mounting seat 23 and connected with the fourth drive gear 26, and the fourth drive gear 26 is meshedly connected with the first drive gear 20. The fourth drive gear 26 and the second drive gear 25 can be spur gears, and the fourth drive gear 26 is connected to the drive shaft of the self-rotation drive motor 22, and the diameter of the fourth drive gear 26 is smaller than the diameter of the second drive gear 25. The first drive gear 20 and the third drive gear 21 can be bevel gears. In this way, under the driving force of the self-rotation drive motor 22, the fourth drive gear 26 will be driven to rotate first, and then the second drive gear will be driven to rotate, and then the sputtering source connected to the second drive shaft will be driven to rotate, and at the same time the third drive gear will be driven to rotate, and then the first drive gear will be driven to rotate, and then the two sputtering sources connected to the first drive shaft will be driven to rotate, that is, the self-rotation of the three sputtering sources can be achieved by the sputtering source rotation drive device. In an illustrative embodiment, the self-rotation direction can be as follows: Figure 2 The direction indicated by the reference numeral 17 in the figure, i.e., rotation around the center of the drive shaft.

[0020] Those skilled in the art know that different numbers of sputtering sources can be set according to actual needs. For example, one sputtering source or two sputtering sources can be set instead of three sputtering sources. Figure 4 and Figure 5 The structure can be adjusted accordingly, and the present invention is not particularly limited thereto.

[0021] Further, the rotation drive device may include a rotation housing. One end of the rotation housing is connected to the revolution drive device through a revolution drive shaft 19, and the other end is connected to a mounting plate through a rotating shaft, and the mounting plate is fixedly arranged on the mobile device. The drive shaft, drive wheel and drive motor in the rotation drive device may be installed inside the rotation housing. The drive shaft extends out of the rotation housing and is connected to the sputtering source.

[0022] Furthermore, in the embodiment of the present invention, the sputtering source 13 can be connected to the corresponding base via a sputtering source connection structure. Figure 7 As shown, the sputtering source connection structure may include a first connection platform 32, a second connection platform 33 and a clamp 14. The first connection platform 32 is connected to the corresponding sputtering source 13, the second connection platform 33 is connected to the corresponding self-rotation drive shaft, and the clamp 14 is used to connect the first connection platform 32 and the second connection platform 33.

[0023] Specifically, the first connecting platform 32 is connected to the sputtering source fixing plate, and includes a circular first contact surface and a first inclined surface connected to the first contact surface. Figure 7 As shown, the first connecting platform 32 is formed with an inwardly inclined inclined surface on the surface close to the sputtering source fixing plate. The inclination angle of the inclined surface can be set based on actual needs and is not particularly limited in the present invention. The second connecting platform 33 is set on the corresponding self-rotating drive shaft and includes a circular second contact surface and a second inclined surface connected to the second contact surface. Figure 7 As shown, the second connecting platform 33 is formed with an inwardly inclined inclined surface on the surface close to the driving shaft. The inclination angle of the inclined surface can be set based on actual needs and is not particularly limited in the present invention.

[0024] like Figure 8As shown, the clamp 14 may include a clamping block 34, a first clamping claw 35, a second clamping claw 36, a first connecting bolt 37, a second connecting bolt 38, a locking bolt 39, a first spring 40, and a second spring 41. The first connecting bolt 37 passes through the first end of the clamping block 34, the first clamping claw 35, and the second clamping claw 36 in sequence, and both ends of the first connecting bolt 37 are fixed by nuts. The second connecting bolt passes through the second end of the clamping block 34, the first clamping claw 35, and the second clamping claw 36 in sequence, and both ends of the second connecting bolt 38 are fixed by nuts. The first spring 40 is sleeved on the first connecting bolt 37 and is located between the first clamping claw 35 and the second clamping claw 36, and the second spring 41 is sleeved on the second connecting bolt 38 and is located between the first clamping claw 35 and the second clamping claw 36. The first clamping claw 35 and the second clamping claw 36 are respectively formed with a fixing groove 42 for accommodating the first connecting platform and the second connecting platform, and openings are respectively formed at both ends of the fixing groove 42, and the openings include a third inclined surface and a fourth inclined surface, the third inclined surface is adapted to the first inclined surface, and the fourth inclined surface is adapted to the second inclined surface. The locking bolt 39 is used to lock the clamping block 34 and the first clamping claw 35 when the first connecting platform and the second connecting platform are in contact and located in the fixing groove 42.

[0025] Specifically, when installing the sputtering source 13, the first connecting platform is inserted from one end of the fixing groove, and the second connecting platform is inserted from the other end of the fixing groove. When the circular contact surfaces of the first connecting platform and the second connecting platform are in close contact, the third inclined surface is parallel to and in close contact with the first inclined surface, and the fourth inclined surface is parallel to and in close contact with the second inclined surface. At this time, the locking bolt 39 is tightened to lock the clamping block 34 and the first clamping claw 35, thereby fixing the sputtering source. When the sputtering source needs to be disassembled, the locking bolt 39 can be loosened in the opposite direction. At this time, under the action of the spring, the first clamping claw and the second clamping claw can be popped open, thereby realizing the rapid disassembly of the sputtering source.

[0026] Furthermore, the sputtering source revolution driving device is used to drive the sputtering source rotation driving device to rotate. Specifically, Figure 6As shown, the sputtering source public installation drive device 4 may include a revolving drive motor 30, a revolving drive worm 28 and a revolving drive worm wheel 29 that are meshingly connected, and a revolving drive shaft 19. The revolving drive worm 28 is connected to the revolving drive motor 30, and the revolving drive worm wheel 29 is arranged on the revolving drive shaft 19. The revolving drive shaft 19 is connected to the pivot part 31, and is respectively arranged vertically with the first self-rotation drive shaft 24 and the second self-rotation drive shaft 27. In addition, a sealing member 11 is arranged on the outside of the revolving drive shaft 19. In this way, when the revolving drive motor 30 is driven, it will drive the revolving drive worm 28 to rotate, and then drive the revolving drive worm wheel and the revolving drive shaft 19 to rotate, and then drive the sputtering source self-rotating drive device to rotate as a whole, that is, revolve. In an illustrative embodiment, the revolving direction may be as follows: Figure 2 The direction indicated by the middle number 18 is the rotation around the center line of the orbital drive shaft 19.

[0027] Furthermore, the revolution drive device may include a revolution housing. The revolution housing is fixed to the mobile device. The drive shaft, drive wheel and drive motor in the revolution drive device may be installed inside the revolution housing. The drive shaft extends out of the revolution housing and is connected to the pivotal portion. In addition, a wire outlet 12 is provided on the revolution housing for leading out electrical connection wires of the rotation drive device and the revolution drive device.

[0028] Furthermore, in an embodiment of the present invention, guide grooves 43 for connecting the coolant are provided inside the revolving drive shaft 19, the first rotating drive shaft 24 and the second rotating drive shaft 27; a coolant distributor (not shown) is provided in the pivotal portion 31, and the guide groove 43 is connected to the coolant distributor for providing the coolant to the back of the sputtering source to achieve cooling of the sputtering source.

[0029] Furthermore, in an embodiment of the present invention, the moving device is used to drive the sputtering source rotation driving device and the sputtering source revolution driving device to move as a whole in a first direction and a second direction in a horizontal plane, and the first direction and the second direction are perpendicular. In an exemplary embodiment, the first direction may be Figure 2 The second direction may be Figure 2 The direction is shown by reference numeral 15.

[0030] like Figure 2 and Figure 3 As shown, in the embodiment of the present invention, the moving device may include: a moving base 44, a first moving mechanism and a second moving mechanism, and both ends of the moving base are rotationally connected to the sputtering source revolution driving device and the sputtering source rotation driving device respectively.

[0031] Specifically, the first moving mechanism includes a first drive motor 7, a first guide 8 and a first slide 9, and the second moving mechanism includes a second drive motor 10, a second guide 5 and a second slide 6. The first slide 9 is rotatably arranged on the moving base 44 and is slidably connected to the first guide 8, the first drive motor 7 is used to drive the first slide 6 to slide along the first guide 8, and the first guide 8 is arranged in the first direction. The second guide 5 is arranged in the second direction on the horizontal plane, the second slide 6 is rotatably arranged on the first guide 8 and is slidably connected to the second guide 5, and the second drive motor 10 is used to drive the second slide 6 to slide along the second guide 5. In this way, under the action of the first drive motor, the self-rotation drive device and the revolution drive device will move as a whole in the first direction, so that the sputtering source can move in the first direction, that is, move forward and backward. Under the action of the second drive motor, the self-rotation drive device and the revolution drive device will move as a whole in the second direction, so that the sputtering source can move in the second direction, that is, move left and right.

[0032] Those skilled in the art know that the first drive motor and the second drive motor can move the corresponding sliding member through an existing power transmission mechanism.

[0033] Further, it may include two first guide members and two second guide members, each of which is slidably connected to two sliding members. Specifically, two first sliding members are respectively provided on both sides of the mobile base. A second sliding member is provided at both ends of each first guide member. In an embodiment of the present invention, the sliding member and the guide member can be set based on actual conditions, and can be any existing mobile components, as long as they can cooperate with each other to achieve movement. In an exemplary embodiment, the guide member is a guide rail, and the sliding member is a roller that cooperates with the guide rail, that is, a wheel with a groove in the middle. In another exemplary implementation, the guide member can be a guide groove, and the sliding member can be a pulley that cooperates with the guide groove.

[0034] The sputtering source device provided by the embodiment of the present invention is used in specific applications, such as Figure 2 and Figure 3 As shown, it can be arranged in the vacuum coating chamber 1, and the sputtering source 13 is used to receive the ion beam emitted by the ion source 2. Since the sputtering source can realize multiple degrees of freedom of movement such as rotation, revolution, forward and backward and left and right movement, the ion beam can hit different positions of the sputtering source, such as the position shown by the circle on the sputtering source in the figure, so that all areas of the entire sputtering source surface can be sputtered by the ion source. In theory, the utilization rate of the sputtering source can reach 100%, thereby greatly improving the production efficiency and reducing the product cost.

[0035] In addition, in a specific application scenario, that is, when the sputtering source equipment is installed in a vacuum chamber, since the electrical connection lines of the rotation drive device and the revolution drive device are led out of the vacuum chamber through the wire lead-out port, the interiors of the rotation drive device and the revolution drive device are both in the atmospheric environment, thereby being able to promptly discharge the heat generated by the drive motor into the atmospheric environment.

[0036] Although some specific embodiments of the present invention have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should also be understood by those skilled in the art that various modifications may be made to the embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A sputtering source device with multiple degrees of freedom, characterized in that: include: A moving device and a sputtering source rotation driving device and a sputtering source revolution driving device arranged on the moving device; Among them, the sputtering source rotation drive device includes a self-rotation drive motor and at least one sputtering source, the self-rotation drive motor is used to drive the sputtering source to rotate, the sputtering source revolution drive device is used to drive the sputtering source rotation drive device to rotate, and the moving device is used to drive the sputtering source rotation drive device and the sputtering source revolution drive device to move as a whole in a first direction and a second direction in a horizontal plane, and the first direction and the second direction are perpendicular.

2. The device according to claim 1, characterized in that The self-rotation drive device also includes a first rotation base, a second rotation base and a third rotation base, and a sputtering source is arranged on the outer side of each base, wherein the first rotation base and the second rotation base are connected by a first rotation drive shaft, and the first rotation drive shaft is provided with a first driving gear and a pivot part; the third rotation base is provided with a second rotation drive shaft and the self-rotation drive motor, the second rotation drive shaft is also connected to the pivot part and is arranged perpendicular to the first rotation drive shaft, the second rotation drive shaft is provided with a second driving gear and a third driving gear, the third driving gear is meshingly connected with the first driving gear, the self-rotation drive motor is connected to the fourth driving gear, and the fourth driving gear is meshingly connected with the first driving gear.

3. The device according to claim 2, characterized in that The sputtering source revolution drive device includes a revolution drive motor, a meshingly connected revolution drive worm and revolution drive worm wheel, and a revolution drive shaft. The revolution drive worm is connected to the revolution drive motor, the revolution drive worm wheel is arranged on the revolution drive shaft, and the revolution drive shaft is connected to the pivot part and is respectively arranged perpendicular to the first rotation drive shaft and the second rotation drive shaft.

4. The device according to claim 1, characterized in that The sputtering source is connected to the corresponding base through a sputtering source connecting structure, and the sputtering source connecting structure includes a first connecting platform, a second connecting platform and a clamp, the first connecting platform is connected to the corresponding sputtering source, the second connecting platform is connected to the corresponding rotation drive shaft, and the clamp is used to connect the first connecting platform and the second connecting platform.

5. The device according to claim 4, characterized in that The first connecting platform is connected to the sputtering source fixing plate to form a first inclined surface, and the second connecting platform is arranged on the corresponding rotation driving shaft to form a second inclined surface.

6. The device according to claim 5, characterized in that The clamp includes a clamping block, a first clamping claw, a second clamping claw, a first connecting bolt, a second connecting bolt, a locking bolt, a first spring and a second spring, the first connecting bolt passes through the clamping block, the first clamping claw, and the first end of the second clamping claw in sequence, the second connecting bolt passes through the clamping block, the first clamping claw, and the second end of the second clamping claw in sequence, the first spring is sleeved on the first connecting bolt and is located between the first clamping claw and the second clamping claw, the second spring is sleeved on the second connecting bolt and is located between the first clamping claw and the second clamping claw, the first clamping claw and the second clamping claw are respectively formed with fixing grooves for accommodating the first connecting platform and the second connecting platform, and openings are respectively formed at both ends of the fixing grooves, the openings include a third inclined surface and a fourth inclined surface, the third inclined surface is adapted to the first inclined surface, and the fourth inclined surface is adapted to the second inclined surface, and the locking bolt is used to lock the clamping block and the first clamping claw when the first connecting platform and the second connecting platform are in contact and located in the fixing groove.

7. The device according to claim 3, characterized in that The revolving drive shaft, the first rotating drive shaft and the second rotating drive shaft are provided with guide grooves for communicating with the coolant; the pivoting part is provided with a coolant distributor, and the guide groove is connected to the coolant distributor.

8. The device according to claim 1, characterized in that The moving device comprises: a moving base, a first moving mechanism and a second moving mechanism, and two ends of the moving base are rotatably connected to a sputtering source revolution driving device and a sputtering source rotation driving device respectively; The first moving mechanism includes a first driving motor, a first guide and a first sliding member, and the second moving mechanism includes a second driving motor, a second guide and a second sliding member. The first sliding member is rotatably arranged on the moving base and is slidably connected to the first guide member. The first driving motor is used to drive the first sliding member to slide along the first guide member. The first guide member is arranged in a first direction; the second guide member is arranged in a second direction on a horizontal plane. The second sliding member is rotatably arranged on the first guide member and is slidably connected to the second guide. The second driving motor is used to drive the second sliding member to slide along the second guide.

9. The device according to claim 8, characterized in that It comprises two first guide members and two second guide members, and each guide member is slidably connected with two sliding members.

10. The device according to claim 8 or 9, characterized in that The guide member is a guide rail, and the sliding member is a roller.

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