Sample tooling table and method of EBSD testing of a sample

Abstract

The application provides a sample tooling table and an EBSD testing method of a sample. The sample tooling table comprises a leveling seat, a leveling piece and a connecting assembly. The leveling seat comprises a first leveling part and a second leveling part. The plane where the first leveling part is located is parallel to the plane where the second leveling part is located. The second leveling part is suitable for placing a sample, so that the surface to be tested of the sample is parallel to the plane where the second leveling part is located. The leveling piece is detachably connected with the first leveling part. The plane where the leveling piece is located is parallel to the plane where the first leveling part is located. The leveling piece is suitable for being connected with an electron microscope sample table. The connecting assembly comprises an abutting part and a fixing part which are connected with each other. The fixing part is connected with the leveling piece. The distance between the end of the fixing part and the leveling piece is adjustable. The abutting part is fixedly connected with the mounting surface of the sample. The plane where the abutting part is located is parallel to the mounting surface.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of test apparatus and test method, in particular to a sample tooling table and an EBSD test method of sample. BACKGROUND

[0002] In the research of steel material, the electron backscatter diffraction (EBSD for short) technology is one of the commonly used methods for analyzing crystal structure and orientation. When loading the sample, the sample is required to be placed horizontally, the test surface is required to be unobstructed, the surface is required to be free of external stress, and the surface is required to be good in conductivity.

[0003] Currently, there are two kinds of sample tooling tables commonly used in laboratories. One is a hollow cylindrical sample table with an inner diameter of about 32mm, which is used to place a 30mm-diameter inlaid sample for testing. The other is a conventional nine-hole table, which is a planar sample table that can place multiple samples. During testing, the sample is tilted by 70°. Since the above two sample tables are horizontal, the test surface of the sample is required to be parallel to the opposite surface of the test surface so that the sample tooling table can be loaded horizontally.

[0004] The above two sample tooling tables require the test surface of the sample to be parallel to the opposite surface of the test surface during testing. However, when testing a special-shaped sample, it is difficult to ensure that the test surface of the sample is parallel to the opposite surface of the test surface, which results in the test surface of the sample being placed horizontally during loading. After tilting, the sample will appear unclear focusing phenomenon in some positions, which leads to no pattern or poor pattern quality in the test area, low calibration rate, and affects the test result. SUMMARY

[0005] Therefore, the technical problem to be solved by the present application is that in the prior art, the sample tooling table requires the test surface of the sample to be parallel to the opposite surface of the test surface during testing. However, when testing a special-shaped sample, it is difficult to ensure that the test surface of the sample is parallel to the opposite surface of the test surface, which results in the test surface of the sample being placed horizontally during loading. After tilting, the sample will appear unclear focusing phenomenon in some positions, which leads to no pattern or poor pattern quality in the test area, low calibration rate, and affects the test result.

[0006] To this end, the present application provides a sample tooling table, comprising:

[0007] a leveling seat, the leveling seat comprising a first leveling part and a second leveling part, the plane where the first leveling part is located is parallel to the plane where the second leveling part is located, and the second leveling part is adapted to place a sample so that the test surface of the sample is parallel to the plane where the second leveling part is located;

[0008] a leveling piece, which is detachably connected with the first leveling part, and the plane where the leveling piece is located is parallel to the plane where the first leveling part is located, and the leveling piece is adapted to be connected with an electron microscope sample table.

[0009] The connecting assembly comprises an abutting part and a fixing part connected with each other;

[0010] The fixing part is connected with the leveling piece, and the distance between the end of the fixing part and the leveling piece is adjustable;

[0011] The abutting part is fixedly connected with the mounting surface of the sample, and the plane where the abutting part is located is parallel to the mounting surface.

[0012] Optionally, the connecting assembly comprises:

[0013] At least one first fixing part, one end of which is connected with the leveling piece, and the other end of which is fixedly connected with the mounting surface of the sample;

[0014] At least one second fixing part, one end of which is connected with the leveling piece, and the other end of which is fixedly connected with the mounting surface of the sample, and the second fixing part is conductive with the mounting surface of the sample.

[0015] Optionally, the first fixing part comprises:

[0016] A first fixing part, which is connected with the leveling piece, and the distance between the end of the first fixing part and the leveling piece is adjustable;

[0017] A first abutting part, one end of which is connected with the first fixing part, and the other end of which is fixedly connected with the mounting surface of the sample, and the first abutting part is rotatable relative to the first fixing part, so that the plane where the first abutting part is located is parallel to the mounting surface of the sample.

[0018] Optionally, the second fixing part comprises:

[0019] A second fixing part, which is connected with the leveling piece, and the distance between the end of the second fixing part and the leveling piece is adjustable, and the first fixing part and the second fixing part constitute the fixing part;

[0020] A second abutting part, one end of which is connected with the second fixing part, and the other end of which is fixedly connected with the mounting surface of the sample, and the second abutting part is rotatable relative to the second fixing part, so that the plane where the second abutting part is located is parallel to the mounting surface, and the first abutting part and the second abutting part constitute the abutting part.

[0021] Optionally, one end of the first fixing part is provided with a first rotating head, and the first abutting part comprises

[0022] A first adapter disc, which is provided with a through hole for being arranged on the first fixing part, and the diameter of the through hole is smaller than the diameter of the first rotating head.

[0023] A first abutting disc is connected with the first adapting disc;

[0024] The first abutting disc is provided with a first groove on the side close to the first adapting disc, and the first groove is used for placing the first rotating head, so that the second abutting part can rotate relative to the first fixed part;

[0025] The first fixing member and the second fixing member are of the same structure.

[0026] Optionally, the connecting assembly comprises

[0027] At least one fastener is connected with the leveling member, and the distance between the end of the fastener and the leveling member is adjustable, and the fastener constitutes the fixed part;

[0028] At least one positioning member is fixedly connected with the mounting surface of the sample at one end, and the positioning member is conductive with the mounting surface of the sample, and the other end of the positioning member is movably connected with the fastener, so that the plane where the positioning member is located is parallel to the mounting surface, and the positioning member constitutes the abutting part;

[0029] A locking member is connected between the fastener and the positioning member, and is used for locking the fastener and the positioning member, preventing the positioning member from rotating relative to the fastener.

[0030] Optionally, the first leveling part comprises

[0031] A first clasp ring;

[0032] A second clasp ring is detachably connected with the first clasp ring, and the first clasp ring and the second clasp ring form a mounting cavity between them to mount the leveling member.

[0033] Optionally, the second leveling part comprises:

[0034] A placing table is connected with the first clasp ring;

[0035] A supporting seat is connected with the second clasp ring, the placing table and the supporting seat are detachably connected, and the placing table covers the supporting seat.

[0036] An EBSD testing method of a sample, comprising the following steps:

[0037] Sample placement: place the sample to be tested upside down on the second leveling part, and fix the first leveling part and the leveling member;

[0038] Sample fixing: rotate the first fixing part in the connecting assembly to make its first abutting part fit the mounting surface of the sample, fix the interface between them with instant glue, then rotate the second fixing part to fit the mounting surface of the sample, fix the interface between them with conductive glue;

[0039] Sample taking out: separate the first leveling part and the leveling part, and take out the leveling part with the sample;

[0040] EBSD testing: put the leveling part with the sample into the general sample stage of the electron microscope through the nail base, perform EBSD testing, and record experimental data.

[0041] Optionally, the sample tooling table adopts the sample tooling table described above.

[0042] The technical scheme provided by the application has the following advantages:

[0043] 1. The application provides a sample tooling table, which comprises a leveling seat, a leveling part and a connecting assembly, wherein the leveling seat comprises a first leveling part and a second leveling part, the plane where the first leveling part is located is parallel to the plane where the second leveling part is located, the second leveling part is suitable for placing a sample, so that the surface to be tested of the sample is parallel to the plane where the second leveling part is located; the leveling part is detachably connected with the first leveling part, and the plane where the leveling part is located is parallel to the plane where the first leveling part is located; the leveling part is suitable for being connected with an electron microscope sample stage; the connecting assembly comprises an abutting part and a fixing part which are connected with each other; the fixing part is connected with the leveling part, and the distance between the end of the fixing part and the leveling part is adjustable; the abutting part is fixedly connected with the mounting surface of the sample, and the plane where the abutting part is located is parallel to the mounting surface.

[0044] The sample tooling table of the structure, the leveling seat comprises a first leveling part and a second leveling part, and the plane where the first leveling part is located is parallel to the plane where the second leveling part is located; a leveling piece is detachably connected to the first leveling part, so that the plane where the leveling piece is located is parallel to the plane where the first leveling part is located; a connecting assembly is connected to the leveling piece; the connecting assembly comprises an abutting part and a fixing part connected to each other; the fixing part is connected to the leveling piece, and the distance between the end of the fixing part and the leveling piece is adjustable; when installing the sample, the sample is placed on the second leveling part, so that the test surface of the sample is parallel to the plane where the second leveling part is located, and then the distance between the end of the fixing part and the leveling piece is adjusted until the abutting part abuts on the mounting surface of the sample for fixation, so that the sample can be fixed, the test surface of the sample can be parallel to the leveling piece, and the leveling piece is suitable for being connected to the electron microscope sample table, so that the test surface of the sample can be placed horizontally when the sample is installed, the sample can be focused clearly after tilting, and the sample quality of the test area is improved.

[0045] 2. The sample tooling table provided by the application comprises at least one first fixing piece and at least one second fixing piece; one end of the first fixing piece is connected to the leveling piece, and the other end of the first fixing piece is fixedly connected to the mounting surface of the sample; one end of the second fixing piece is connected to the leveling piece, and the other end of the second fixing piece is fixedly connected to the mounting surface of the sample, and the second fixing piece is electrically connected to the mounting surface of the sample.

[0046] The sample tooling table of the structure, the first fixing piece is connected to the leveling piece and the mounting surface of the sample, the first fixing piece and the sample are fixed by instant adhesive, the second fixing piece is connected to the leveling piece and the mounting surface of the sample, the second fixing piece and the sample are fixed by conductive adhesive, the sample can be stably fixed by the first fixing piece, and the sample and the second fixing piece can be electrically connected to ensure that the sample can be tested.

[0047] 3. The sample tooling table provided by the application comprises a first rotating head at one end of the first fixing part, a first adapter disc comprising a through hole for being arranged on the first fixing part, and the diameter of the through hole is smaller than the diameter of the first rotating head; a first abutting disc is connected to the first adapter disc; a first recess is arranged on the side of the first abutting disc close to the first adapter disc, and the first recess is used for placing the first rotating head, so that the second abutting part can rotate relative to the first fixing part.

[0048] The sample tooling table of the structure is provided with a first rotating head at one end of the first fixing part, and the first rotating head is provided with a first adapting disc and a first abutting disc, and a through hole is formed in the first adapting disc, so that the first rotating head can rotate in the through hole. When the mounting surface of the sample is fixed by the first fixing part, since the mounting surface of the sample is not parallel to the test surface of the sample, when the mounting surface of the sample is fixed by the first abutting disc, the first adapting disc and the first abutting disc can be rotated, so that the plane where the first abutting disc is located can be parallel to the mounting surface of the sample. BRIEF DESCRIPTION OF DRAWINGS

[0049] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0050] Figure 1 The structure schematic view of the sample tooling table provided in the embodiments of the present application is shown in the figure.

[0051] Figure 2 The exploded view of the sample tooling table provided in the embodiments of the present application is shown in the figure.

[0052] Figure 3 The structure of the first fixing part in the sample tooling table provided in the embodiments of the present application is shown in the figure. Figure 2 The structure enlarged view of the circle A in the figure.

[0053] Figure 4 The structure exploded view of the first fixing part in the sample tooling table provided in the embodiments of the present application is shown in the figure.

[0054] Figure 5 The pattern quality contrast map measured in the EBSD test method of the sample provided in the embodiment 3 of the present application is shown in the figure.

[0055] Figure 6 The pattern quality contrast map measured in the EBSD test method of the sample provided in the embodiment 4 of the present application is shown in the figure.

[0056] Figure 7 The pattern quality contrast map measured in the EBSD test method of the sample provided in the embodiment 5 of the present application is shown in the figure.

[0057] Figure 8 The pattern quality contrast map measured in the EBSD test method of the sample provided in the embodiment 5 of the present application is shown in the figure.

[0058] Explanation of reference signs:

[0059] 1 - leveling seat; 11 - first leveling part; 111 - first clasp; 112 - second clasp; 12 - second leveling part; 121 - placing table; 122 - supporting seat;

[0060] 2 - leveling piece;

[0061] 3 - connecting assembly; 31 - first fixing piece; 311 - first fixing part; 312 - first abutting part; 3121 - first adapting disc; 3122 - first abutting disc; 313 - first rotating head; 32 - second fixing piece;

[0062] 4 - nail table base;

[0063] 5 - sample. DETAILED DESCRIPTION

[0064] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0065] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance. In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0066] Embodiment 1

[0067] The present embodiment provides a sample 5 tooling table, as shown in Figures 1 to 4 , comprising a leveling seat 1, a leveling piece 2 and a connecting assembly 3. Among them, the leveling seat 1 is connected with the leveling piece 2, the sample 5 is placed on the leveling seat 1, one end of the connecting assembly 3 is connected with the leveling piece 2, and the other end of the connecting assembly 3 is connected with the sample 5.

[0068] As shown in Figure 1 and Figure 2As shown, the leveling seat 1 includes a first leveling part 11 and a second leveling part 12. The plane where the first leveling part 11 is located is parallel to the plane where the second leveling part 12 is located. The first leveling part 11 is located above the second leveling part 12, and the first leveling part 11 and the second leveling part 12 are coaxially arranged. The second leveling part 12 is suitable for placing the sample 5 so that the test surface of the sample 5 is parallel to the plane where the second leveling part 12 is located.

[0069] Among them, such as Figure 2 As shown, the first leveling part 11 includes a first retaining ring 111 and a second retaining ring 112. The first retaining ring 111 has a threaded hole, and the second retaining ring 112 is provided with a bolt that matches the threaded hole, so that the first retaining ring 111 and the second retaining ring 112 can be connected into a complete ring through the bolt and the threaded hole. The first retaining ring 111 and the second retaining ring 112 have a limiting groove on their inner sides, and the leveling part 2 can be fixed in the ring structure formed by the first retaining ring 111 and the second retaining ring 112 by engaging with the limiting groove.

[0070] In other embodiments, the leveling member 2 can also be fixed in the annular structure formed by the first retaining ring 111 and the second retaining ring 112 by other means, such as by gluing or screw connection.

[0071] like Figure 2 As shown, the second leveling part 12 includes a placement platform 121 and a support base 122. The placement platform 121 and the support base 122 are detachably connected. The placement platform 121 is fixedly connected to the first retaining ring 111; the support base 122 is fixedly connected to the second retaining ring 112, so that the placement platform 121 and the first retaining ring 111 can move synchronously, and the support base 122 and the second retaining ring 112 can move synchronously. The placement platform 121 covers the support base 122, and the test surface of the sample 5 is attached to the surface of the placement platform 121. Since the plane where the first leveling part 11 is located is parallel to the plane where the second leveling part 12 is located, and the plane where the leveling component 2 is located is parallel to the plane where the first leveling part 11 is located, the test surface of the sample 5 can be parallel to the plane where the leveling component 2 is located. By covering the support base 122 with the placement platform 121, the present invention can avoid the stepping of the plane on which the sample 5 is placed due to the detachable connection between the placement platform 121 and the support base 122, which would cause the test surface of the sample 5 to be non-parallel to the plane where the second leveling part 12 is located.

[0072] like Figure 2 and Figure 3As shown, the connecting assembly 3 comprises a first fixing member 31, the first fixing member 31 comprises a first fixing part 311 and a first abutting part 312, wherein the first fixing part 311 is connected with the leveling member 2, and the distance between the end of the first fixing part 311 and the leveling member 2 is adjustable, for example, the outer surface of the first fixing part 311 is provided with external threads, and the leveling member 2 is provided with a through hole with internal threads, and the distance between the end of the first fixing part 311 and the leveling member 2 can be adjusted by rotating the first fixing part 311.

[0073] In other embodiments, a snap ring can also be provided on the leveling member 2, and the sliding and fixing between the first fixing part 311 and the leveling member 2 can be controlled by loosening or tightening the snap ring.

[0074] As shown in the drawings, Figure 3 the first fixing part 311 is provided with a first rotating head 313 at one end, and the first abutting part 312 comprises a first adapter disc 3121 and a first abutting disc 3122, wherein the first adapter disc 3121 is provided with a through hole in the middle, the first adapter disc 3121 is arranged on the first fixing part 311 through the through hole and can slide on the first fixing part 311, the diameter of the through hole is smaller than the diameter of the first rotating head 313, which can prevent the first adapter disc 3121 from falling off, the first abutting disc 3122 is provided with a first groove near one side of the first adapter disc 3121, the first adapter disc 3121 and the first abutting disc 3122 can be fixedly connected by bolts or other fasteners, and the first rotating head 313 is arranged in the first groove and can rotate in the first groove, so that the second abutting part can rotate relative to the first fixing part 311.

[0075] When fixing the sample 5 on the second leveling part 12, the first abutting part 312 is gradually moved close to the mounting surface of the sample 5 by rotating the first fixing part 311, the first abutting disc 3122 on the first abutting part 312 is attached to the mounting surface of the sample 5 by rotating the first abutting part 312, and then the first abutting disc 3122 and the mounting surface of the sample 5 are fixed by using 502 glue.

[0076] As shown in the drawings, Figure 2 the connecting assembly 3 further comprises a second fixing member 32, wherein the first fixing member 31 and the second fixing member 32 are the same in structure, the second fixing member 32 comprises a second fixing part and a second abutting part connected with each other, and the difference between the second fixing member 32 and the above-mentioned first fixing member 31 is that the second fixing member 32 is fixed to the mounting surface of the sample 5 by conductive glue, so that the sample 5 and the second fixing member 32 can conduct electricity, to ensure that the sample 5 can be tested.

[0077] The leveling piece 2 is provided with a plurality of reserved holes, the number of the first fixing piece 31 and the second fixing piece can be selected according to the volume of the sample 5 and the structure of the mounting surface, and it is easy to understand that the more the number of the first fixing piece 31 and the second fixing piece, the more stable the fixing of the sample 5.

[0078] As shown in Figure 4 The first abutting disc 3122 is provided with a second groove on the surface connected with the mounting surface of the sample 5, when it is needed to separate the first abutting disc 3122 from the mounting surface of the sample 5, the clock screwdriver is inserted into the second groove, and the sample 5 and the first abutting disc 3122 can be separated by tapping, and the sample 5 is taken out.

[0079] As shown in Figure 1 and Figure 2 The leveling piece 2 is provided with a plurality of reserved holes, the number of the first fixing piece 31 and the second fixing piece can be selected according to the volume of the sample 5 and the structure of the mounting surface, and it is easy to understand that the more the number of the first fixing piece 31 and the second fixing piece, the more stable the fixing of the sample 5.

[0080] The sample 5 workbench provided by the embodiment is installed, first, the leveling piece 2 is installed in the first leveling part 11, the plane where the leveling piece 2 is located is parallel to the plane where the first leveling part 11 is located, then the sample 5 is placed on the placing table 121 of the second leveling part 12, the test surface of the sample 5 is attached to the surface of the placing table 121, then the first fixing piece 31 is rotated until the first fixing piece 31 abuts against the mounting surface of the sample 5, the interface between the two is fixed by using 502 instant adhesive, then the second fixing piece 32 is rotated until the second fixing piece 32 abuts against the mounting surface of the sample 5, the interface between the two is fixed by using conductive adhesive such as silver conductive adhesive.

[0081] Embodiment 2

[0082] The embodiment provides an EBSD testing method of a sample, and the method comprises the following steps:

[0083] The sample 5 is placed: the sample 5 is placed upside down on the second leveling part 12, and the first leveling part 11 and the leveling piece 2 are fixed;

[0084] The sample 5 is fixed: the first fixing piece 31 in the connecting assembly 3 is rotated, so that the first abutting part 312 of the first fixing piece 31 is attached to the mounting surface of the sample 5, the interface between the two is fixed by using instant adhesive, and then the second fixing piece 32 is attached to the mounting surface of the sample 5, the interface between the two is fixed by using conductive adhesive;

[0085] The sample 5 is taken out: the first leveling part 11 and the leveling piece 2 are separated, and the leveling piece 2 with the sample 5 is taken out;

[0086] EBSD test: the leveling piece 2 with the sample 5 is loaded on the general sample 5 table of the electron microscope through the pin table base 4, and the EBSD test is performed, and the experimental data is recorded. Among them, the EBSD test method of the sample 5 adopts the sample 5 tooling table in Example 1.

[0087] Example 3

[0088] The embodiment provides an EBSD test method of a sample, which comprises the following steps:

[0089] Sample 5 placement: place the sample 5 to be tested upside down on the second leveling part 12, and fix the first leveling part 11 and the leveling piece 2.

[0090] Sample 5 fixation: rotate the first fixing part 31 in the connecting assembly 3 so that the first abutting part 312 is in close contact with the mounting surface of the sample 5, and then use instant glue to fix the interface between the two, and then rotate the second fixing part 32 to be in close contact with the mounting surface of the sample 5, and then use conductive glue to fix the interface between the two.

[0091] Sample 5 removal: separate the first leveling part 11 and the leveling piece 2, and take out the leveling piece 2 with the sample 5.

[0092] EBSD test: the leveling piece 2 with the sample 5 is loaded on the general sample 5 table of the electron microscope through the pin table base 4, and the EBSD test is performed, and the experimental data is recorded. Among them, the EBSD test method of the sample 5 adopts the sample 5 tooling table in Example 1.

[0093] Example 4

[0094] The embodiment provides an EBSD test method of a sample, which comprises the following steps:

[0095] Sample 5 placement: place the sample 5 to be tested upside down on the second leveling part 12, and fix the first leveling part 11 and the leveling piece 2.

[0096] Sample 5 fixation: rotate the first fixing part 31 in the connecting assembly 3 so that the first abutting part 312 is in close contact with the mounting surface of the sample 5, and then use instant glue to fix the interface between the two, and then rotate the second fixing part 32 to be in close contact with the mounting surface of the sample 5, and then use conductive glue to fix the interface between the two.

[0097] Sample 5 removal: separate the first leveling part 11 and the leveling piece 2, and take out the leveling piece 2 with the sample 5.

[0098] EBSD test: the leveling piece 2 with sample 5 was loaded on the general sample 5 table of the electron microscope through the pin table base 4, and EBSD test was performed, and the test parameters were: sample table tilt 70°, voltage 20 kV, current 10 nA, and experimental data was recorded. Among them, the EBSD test method of sample 5 adopts the sample 5 tooling table in example 1.

[0099] Example 5

[0100] The embodiment provides an EBSD test method of a sample, which comprises the following steps:

[0101] Sample 5 placement: the sample 5 to be tested is placed upside down on the second leveling part 12, and the first leveling part 11 and the leveling piece 2 are fixed;

[0102] Sample 5 fixation: the first fixing part 31 in the connecting assembly 3 is rotated so that the first abutting part 312 is attached to the mounting surface of the sample 5, the interface between the two is fixed with instant glue, and then the second fixing part 32 is attached to the mounting surface of the sample 5, and the interface between the two is fixed with conductive glue;

[0103] Sample 5 removal: the first leveling part 11 and the leveling piece 2 are separated, and the leveling piece 2 with the sample 5 is taken out;

[0104] EBSD test: the leveling piece 2 with sample 5 was loaded on the general sample 5 table of the electron microscope through the pin table base 4, and EBSD test was performed, and the test parameters were: sample table tilt 70°, voltage 20 kV, current 10 nA, and experimental data was recorded. Among them, the EBSD test method of sample 5 adopts the sample 5 tooling table in example 1.

[0105] Table 1 is the EBSD test parameters and diffraction pattern calibration rate

[0106]

[0107] The sample table tilt angle, voltage and current in Table 1 are independent variables in examples 3 to 5, and the calibration rate is the dependent variable.

[0108] Figure 5 The test result of example 3 is shown in the figure, and the diffraction pattern calibration rate is 95.1%;

[0109] Figure 6 The test result of example 4 is shown in the figure, and the diffraction pattern calibration rate is 95.3%;

[0110] Figure 7 The test result of example 5 is shown in the figure, and the diffraction pattern calibration rate is 95.6%;

[0111] Figure 8The pattern quality contrast map of EBSD is measured by the conventional test method, and the diffraction pattern indexing rate is 64%;

[0112] Table 1 summarizes the test results of the diffraction pattern indexing rate obtained in each embodiment, and it can be seen that the diffraction pattern indexing rate obtained in Embodiments 3 to 5 is much higher than that obtained by the conventional test method, and thus the method of the present application can significantly improve the diffraction pattern indexing rate.

[0113] Obviously, the above embodiments are only examples for clearly illustrating, but not limitation on the embodiments. Other different forms of changes or variations can be made by those skilled in the art on the basis of the above description. Here, it is not necessary and also impossible to enumerate all the embodiments. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A sample tooling table, characterized by, The application relates to a leveling device for electron microscopy, which comprises a leveling seat, a leveling piece, a connecting assembly and a sample. The leveling seat comprises a first leveling part and a second leveling part, the plane of the first leveling part is parallel to the plane of the second leveling part, and the second leveling part is suitable for placing a sample so that the surface of the sample to be tested is parallel to the plane of the second leveling part. The leveling piece is detachably connected with the first leveling part, and the plane of the leveling piece is parallel to the plane of the first leveling part. The connecting assembly comprises an abutting part and a fixing part which are connected with each other. The fixing part is connected with the leveling piece, and the distance between the end of the fixing part and the leveling piece is adjustable. The abutting part is fixedly connected with the mounting surface of the sample, and the plane of the abutting part is parallel to the mounting surface of the sample. The connecting assembly comprises at least one first fixing piece, one end of which is connected with the leveling piece, and the other end of which is fixedly connected with the mounting surface of the sample. At least one second fixing piece, one end of which is connected with the leveling piece, and the other end of which is fixedly connected with the mounting surface of the sample, and the second fixing piece is conductive with the mounting surface of the sample. The first fixing piece comprises a first fixing part and a first abutting part, the first fixing part is threadedly connected with the leveling piece, and the distance between the end of the first fixing part and the leveling piece is adjustable. The second fixing part is threadedly connected with the leveling piece, and the distance between the end of the second fixing part and the leveling piece is adjustable. The first leveling part comprises a first clamping ring and a second clamping ring which is detachably connected with the first clamping ring. The second leveling part comprises a placing table and a supporting seat, the placing table is connected with the first clamping ring, and the placing table is detachably connected with the supporting seat and covers the supporting seat. The first fixing part is provided with a first rotating head at one end. The first abutting part comprises a first adapting disc, a first abutting disc and a first recess. The first adapting disc is provided with a through hole for being arranged on the first fixing part, and the diameter of the through hole is smaller than the diameter of the first rotating head. The first abutting disc is connected with the first adapting disc. The first recess is arranged on the side of the first abutting disc close to the first adapting disc, and the first recess is used for placing the first rotating head so that the second abutting part can rotate relative to the first fixing part.

2. The sample tool table of claim 1, wherein, The first fixing piece and the second fixing piece are the same in structure. The connecting assembly comprises ​ ​ ​ 3. The sample tool table of claim 1, wherein, ​ At least one fastener, connected with the leveling member, and the fastener end is adjustable relative to the leveling member distance, the fastener constitutes the fixed part; At least one positioning member, one end is fixedly connected with the mounting surface of the sample, and the positioning member is conductive with the mounting surface of the sample, the other end of the positioning member is movably connected with the fastener, so that the plane where the positioning member is located is parallel to the mounting surface, and the positioning member constitutes the abutting part; Locking member, connected between the fastener and the positioning member, for locking the fastener and the positioning member, preventing the positioning member from rotating relative to the fastener.

4. An EBSD testing method of a sample using the sample holder stage according to any one of claims 1 to 3, characterized by, The method comprises the following steps: Sample placement: place the sample to be tested upside down on the second leveling part, fix the first leveling part and the leveling member; Sample fixation: rotate the first fixing member in the connecting assembly to make the first abutting part fit the mounting surface of the sample, fix the interface between them with instant glue, and then rotate the second fixing member to fit the mounting surface of the sample, fix the interface between them with conductive glue; Sample removal: separate the first leveling part and the leveling member, and remove the leveling member with the sample; EBSD test: load the leveling member with the sample into the general sample stage of the electron microscope through the pin base, perform EBSD test, and record the experimental data.

Images