Double-sided optical inspection system with fluorescence detection

Abstract

The present invention discloses a double-sided optical detection system with a fluorescence detection function, which detects the front and back sides of multiple grains carried on a light-transmitting support film, wherein the back sides of the measured grains have a fluorescent powder coating. The double-sided optical detection system includes: a detection seat and a first detection machine and a second detection machine respectively arranged on the upper and lower sides of the detection seat, the detection seat controls the light-transmitting support film through a film expansion adjustment component to increase the spacing between the grains, the first detection machine and the second detection machine both use detection light belonging to the visible light wavelength range for detection, wherein the second detection machine also includes a configuration for detecting the excited light using detection light of a shorter wavelength. In this way, the light-transmitting support film can have better support and make each grain easy to be individually detected, and the front and back sides of the grain can also be detected in the same detection system.

Description

[Technical field]

[0001] The present invention relates to a double-sided optical detection system, and more particularly, to a double-sided optical detection system with a fluorescence detection function. [Background technology]

[0002] During the semiconductor manufacturing process, various inspections need to be performed on the wafer or the die formed after the wafer is cut. For example, for light-emitting diodes using flip chip packaging technology, each light-emitting diode die needs to be inspected on at least the front and back sides to confirm whether there are any unexpected defects or impurities on the surface.

[0003] Furthermore, for flip-chip LEDs with fluorescent materials coated on one side of the crystal (e.g., the light-emitting surface), in addition to the appearance inspection of the electrode surface and the light-emitting surface on the opposite sides, the coating uniformity of the fluorescent material is also related to the luminous efficiency of the flip-chip LED. However, the traditional appearance inspection method uses irradiation light in the visible light range, which cannot excite the fluorescent coating to generate emitted light. Therefore, the traditional appearance inspection cannot effectively detect the coating status of the fluorescent coating of the LED, resulting in LEDs that pass the appearance inspection but have uneven fluorescent material coating, resulting in defects in luminous efficiency, and thus a decrease in the qualified rate. [Summary of the invention]

[0004] An object of the present invention is to provide an effective double-sided optical inspection system for phosphor-coated dies.

[0005] Another object of the present invention is to provide a good inspection environment for both the front and back sides of the die.

[0006] In order to achieve the above-mentioned purpose and other purposes, the present invention provides a double-sided optical detection system with a fluorescence detection function, which is used to detect the front and back sides of multiple grains carried on a transparent support film, and the back sides of the multiple grains have a fluorescent powder coating. The double-sided optical detection system includes: a detection seat, a first detection machine and a second detection machine; the detection seat includes a carrier and a film expansion adjustment component arranged on the carrier, the carrier has a detection through hole that passes through the body, and the film expansion adjustment component is used to maintain the transparent support film above the detection through hole, and to stretch the transparent support film so that the spacing between the multiple grains carried is increased. The first detection machine is arranged on the upper side of the transparent support film, and is used to generate a first detection light belonging to the visible light wavelength range to illuminate the front side of multiple grains. The first detection machine is also used to receive a first reflected light reflected from the front side of the multiple grains and belonging to the visible light wavelength range; the second detection machine is arranged on the lower side of the transparent support film to detect the back side of the multiple grains through the detection through hole and the transparent support film. The second detection machine is used to generate a second detection light belonging to the visible light wavelength range and to generate a third detection light to illuminate the back side of the multiple grains. The second detection machine is also used to receive a second reflected light reflected from the back side of the multiple grains and belonging to the visible light wavelength range, and to receive an excited light emitted from the back side of the multiple grains based on the excitation of the third detection light, wherein the wavelength of the third detection light is shorter than the wavelengths of the first detection light and the second detection light.

[0007] According to one embodiment of the present invention, the first detection machine may include: a first light irradiation unit and a first light detection unit, the first light irradiation unit can be used to generate a first detection light, and the first light detection unit can be used to receive a first reflected light, wherein the first light irradiation unit and the first light detection unit are configured in a coaxial lighting manner, and the first light irradiation unit can be closer to the detection seat relative to the first light detection unit.

[0008] According to one embodiment of the present invention, the second detection machine may include: a reflecting part, a second light detecting part, and a second light irradiating part and a third light irradiating part arranged between the reflecting part and the second light detecting part. The reflecting part may have a hollow cavity, and the upper end and the lower end of the reflecting part may each have an opening connected to the interior of the cavity, the second light irradiating part is used to generate a second detection light, and the third light irradiating part is used to generate a third detection light. The irradiation light of the second detection light may pass through the openings at the lower end and the upper end of the cavity in turn and irradiate to the reverse side of the plurality of grains through the transparent support film. The third detection light may be formed based on the method of obliquely incident on the inner wall of the cavity to reflect the third detection light to the reverse side of the plurality of grains. Among them, the second light detecting part is used to receive the second reflected light or the excited light.

[0009] According to one embodiment of the present invention, the reflective portion may be defined in the cavity as a reflective zone adjacent to the upper end and an attenuation zone adjacent to the lower end; the reflective zone may have a coating on the inner wall surface of the cavity for improving reflectivity, and the attenuation zone may have a coating on the inner wall surface of the cavity for suppressing reflectivity.

[0010] According to one embodiment of the present invention, the reflection area of ​​the reflection part can be constructed as a tube with uniform inner diameter, and the attenuation area of ​​the reflection part can be constructed as a truncated cone tube with an inner diameter gradually expanding from the part connected to the tube toward the lower end.

[0011] According to an embodiment of the present invention, the third light irradiation portion can be configured as a ring-shaped light emitting component adjacent to the lower edge of the truncated cone-shaped tube, and the ring-shaped light emitting component can be configured so that its irradiation direction is parallel to the inner wall surface of the truncated cone-shaped tube.

[0012] According to one embodiment of the present invention, the second light irradiation unit and the second light detection unit are configured in a coaxial lighting manner. The second light irradiation unit can be closer to the detection seat than the second light detection unit, and the third light irradiation unit can be closer to the detection seat than the second light irradiation unit.

[0013] According to an embodiment of the present invention, a filter element may be disposed in the second light detection unit, the filter element blocks light having a wavelength of the third detection light and allows light having a wavelength longer than the third detection light to pass.

[0014] According to an embodiment of the present invention, the second inspection machine may be configured to move in a first axial direction, and the second inspection machine is configured to make the upper end of the reflective portion support the light-transmitting support film.

[0015] In this way, the double-sided optical inspection system disclosed in the embodiment of the present invention can allow the grains to have spacing through the film expansion adjustment component, and at the same time provide support to allow the carried grains to be firmly fixed on the transparent support film, and the first inspection machine and the second inspection machine both include a configuration for using detection light belonging to the visible light wavelength range for detection, wherein the second inspection machine also includes a configuration for using detection light with a shorter wavelength to detect the excited light, thereby making the inspection environment complete, and the front and back sides of the grains can be inspected in the same inspection system.

[0016] In addition, the grains with phosphor coating can also generate excited light based on the detection light with a wavelength shorter than the wavelength of the first and second detection lights, so as to sample whether the fluorescent material coating is uniform, so that the subsequent system can judge whether there are defects based on the brightness of the excited light.

Brief Description of the Drawings

[0017] Figure 1 is a schematic diagram of a light path of a double-sided optical inspection system according to an embodiment of the present invention;

[0018] Figure 2is based on Figure 1 A partial perspective schematic diagram of a double-sided optical inspection system according to the illustrated embodiment;

[0019] Figure 3 is based on Figure 1 A schematic diagram of a portion of the light path of a double-sided optical inspection system according to the illustrated embodiment. [Specific implementation method]

[0020] In order to fully understand the purpose, features and effects of the present invention, the present invention is now described in detail with the help of the following specific implementation methods and the accompanying drawings, as follows:

[0021] In this application, the terms "a" or "an" are used to describe a unit, component, structure, device, module, system, part or region, etc. This is only for the convenience of description and to provide a general meaning for the scope of the present invention. Therefore, unless it is obvious that it is otherwise intended, such description should be understood to include one or at least one, and the singular also includes the plural.

[0022] In the present application, the terms "comprising, including, having" or any other similar terms are not limited to the elements listed in the present application, but may include other elements that are not explicitly listed but are generally inherent to the units, components, structures, devices, modules, systems, parts or regions.

[0023] In the present application, the words "first" or "second" and the like are used to distinguish or refer to elements, structures, parts or regions that are the same or similar, and do not necessarily imply the spatial order of such elements, structures, parts or regions. It should be understood by those skilled in the art that, in certain cases or configurations, the ordinal words can be used interchangeably without affecting the implementation of the present invention.

[0024] Please refer to Figure 1 and Figure 2 , Figure 1 is a schematic diagram of the light path of a double-sided optical detection system according to an embodiment of the present invention, Figure 2 Based on Figure 1 A partial three-dimensional schematic diagram of a double-sided optical inspection system according to the embodiment shown, Figure 2The detection seat 100 and part of the second detection machine 300 are mainly exemplified. The double-sided optical detection system includes: a detection seat 100, a first detection machine 200 and a second detection machine 300. The first detection machine 200 is configured above the detection seat 100, and the second detection machine 300 is configured below the detection seat 100. The front and back sides of the grain 400 carried on the detection seat 100 are detected by configuring the upper and lower sides. The first detection machine 200 and the second detection machine 300 may include more optical components, such as an objective lens group used to shape the irradiation light and / or adjust the magnification in the light irradiation part, a turntable component used to replace the objective lens group, and other components. In the embodiments of this case, for the convenience of explanation, the commonly used related components are presented in a simplified manner in the figure or are not drawn.

[0025] The detection seat 100 includes a carrier 110 and a film expansion adjustment component 120 configured on the carrier 110. The film expansion adjustment component 120 is used to stabilize and stretch the light-transmitting support film 130. The light-transmitting support film 130 is configured as a retractable film body with a certain degree of elasticity. Before the light-transmitting support film 130 is stretched, the film expansion adjustment component 120 allows the light-transmitting support film 130 to be firmly clamped and supports the wafer carried. When the wafer undergoes the process of cutting and splitting to form a plurality of grains closely together, the film expansion adjustment component 120 subsequently stretches and expands the film to increase the spacing between these grains. This helps the optical detection of each grain. The film expansion adjustment component 120 is, for example, a device for clamping a workpiece and clamping it at the periphery of the transparent support film 130. The film expansion adjustment component 120 also has an adjustable mechanism for adjusting to expand the clamping area and thereby enlarge the area of ​​the clamped object (the transparent support film 130), and also enlarge the spacing between the grains placed on the transparent support film 130.

[0026] The carrier 110 has a detection hole 111 that passes through its main body. The transparent support film 130 can be configured and maintained above the detection hole 111 through the film expansion adjustment component 120. The detection hole 111 allows the detection light of the second detection machine 300 below to be incident on the transparent support film 130, and then illuminate the back side (i.e., the light-emitting surface) of the grain 400.

[0027] The first inspection machine 200 is disposed on the upper side of the light-transmitting support film 130. The first inspection machine 200 is used to generate a first inspection light L1 belonging to the visible light wavelength range to illuminate the front of the die 400, and to receive a first reflected light R1 belonging to the visible light wavelength range reflected from the front of the die 400. For example, the first inspection light L1 is generated by the first light irradiation unit 210, and the first reflected light R1 is received by the first light detection unit 220, and the first light irradiation unit 210 is closer to the inspection seat 100 than the first light detection unit 220.

[0028] The first light irradiation unit 210 and the first light detection unit 220 can be configured by coaxial lighting, such as Figure 1 For example, the first light detection unit 220 can capture images by illuminating the grain 400 with the light of the first light irradiation unit 210 with coaxial illumination through an image sensor. The configuration of coaxial illumination can achieve the reflection of the first detection light L1 through a half-reflecting mirror and enter the optical axis in the first detection machine 200, and the first light detection unit 22 can also receive the first reflected light R1 on this optical axis by the first reflected light R1 penetrating the half-reflecting mirror. For another overall example, it can be composed of commonly used components such as a laser light emitting diode, a collimated lens, and a half-reflecting mirror as a light source, which will not be repeated here.

[0029] The second detector 300 includes: a second light irradiation unit 310, a second light detection unit 320, a third light irradiation unit 330 and a reflection unit 340. The reflection unit 340, the third light irradiation unit 330, the second light irradiation unit 310 and the second light detection unit 320 are arranged in order from the bottom of the detection base 100 downward. The reflection unit 340 has a hollow cavity 341, and the upper end and the lower end of the cavity 341 each have an opening communicating with the interior of the cavity 341.

[0030] The second light irradiation unit 310 is used to generate the second detection light L2, and the third light irradiation unit 330 is used to generate the third detection light L3. The wavelength of the second detection light L2 belongs to the visible light wavelength range (the same as the first detection light L1), and the second detection light L2 passes through the detection through hole 111 and penetrates the transparent support film 130 to irradiate the back surface of the die 400. The detection light belonging to the visible light wavelength range can be used to capture the surface condition of the die, so the second reflected light R2 reflected from the back surface of the die 400 penetrates the transparent support film 130, and passes through the detection through hole 111 and the cavity 341 of the reflection unit 340. Under the configuration of the second light irradiation unit 310 and the second light detection unit 320 with the same coaxial illumination, it is received by the second light detection unit 320 to obtain the image data of the appearance inspection of the back surface of the die 400.

[0031] The third light irradiation unit 330 is configured as a ring-shaped light emitting component, which allows the aforementioned second detection light L2 and the second reflected light R2 to pass through. The third detection light L3 generated by the third light irradiation unit 330 is incident obliquely on the inner wall surface of the cavity 341, and is reflected to the back surface of the grain 400 through the inner wall surface. The third detection light L3 has a shorter wavelength, and the wavelength of the third detection light L3 is shorter than the wavelengths of the aforementioned first detection light L1 and the second detection light L2. In the fluorescence detection mode, the third detection light L3 is configured as invisible light in the embodiment of the present invention, and is further used as an excitation light source. When this excitation light source is irradiated to the back surface of the grain 400 with a phosphor coating, the light source can be absorbed by the phosphor, and the phosphor further releases light in the visible light wavelength range (i.e., the excited light E1, the wavelength is longer than the wavelength of the third detection light L3), and the brightness of the excited light E1 received by the second light detection unit 320 is used to distinguish the defects on the back surface of the grain 400. Thus, for the reverse side of the die 400 having the fluorescent coating, when the fluorescent coating is uneven, the emitted excited light E1 will show uneven brightness. In more serious cases, some blocks may not even be able to generate the excited light E1. The image data in these cases can be obtained by the second detection machine 300 operating in the fluorescent detection mode.

[0032] Therefore, the first inspection machine 200 performs appearance inspection on the front side of the die 400 with visible light, and the second inspection machine 300 performs appearance inspection on the back side of the die 400 with visible light. In addition, the second inspection machine 300 can also operate in the fluorescence inspection mode to inspect the condition of the phosphor coating on the back side of the die 400 with invisible light. In a further embodiment, in order to improve the accuracy of the detection of the phosphor coating condition, a filter element can be arranged in front of the second light detection unit 320, and the filter element is used to block the light with the wavelength of the third detection light and allow the light with a wavelength longer than the third detection light L3 to pass, thereby preventing the third detection light L3 from interfering with the detection result in the fluorescence detection mode.

[0033] Please refer to Figure 2 and Figure 3 , Figure 3 Based on Figure 1 A schematic diagram of a portion of the light path of a double-sided optical inspection system according to the illustrated embodiment. Figure 3 It is mainly an example of the second detection machine 300. In order to further make the third detection light L3 irradiate the back surface of the die 400 in a more uniform manner and prevent the third detection light L3 from interfering with the reception of the excited light E1 by the second light detection unit 320, the reflection unit 340 is defined with a reflection area 342 adjacent to the upper end and an attenuation area 343 adjacent to the lower end in the cavity 341. The reflection area 342 is a coating having a reflectivity-enhancing coating on the inner wall surface of the cavity 341, and the attenuation area 343 is a coating having a reflectivity-reducing coating on the inner wall surface of the cavity 341.

[0034] like Figure 2 and Figure 3 As shown, the reflection area 342 of the reflection part 340 is constructed as a tube with a uniform inner diameter, and the attenuation area 343 of the reflection part 340 is constructed as a truncated cone-shaped tube with an inner diameter gradually expanding from the part connected to the tube toward the lower end. The truncated cone-shaped tube has an inclined wall surface in the cavity 341, and its inclined direction is substantially parallel to the emission direction of the third detection light L3 from the third light irradiation part 330. The third detection light L3 is incident on the wall surface of the reflection area 342 in the cavity 341, and then reflected to the back side of the grain 400. On the other hand, the excited light E1 excited from the phosphor coating on the back side of the grain 400 and passing through the reflection part 340 can be captured by the second light detection part 320.

[0035] In the embodiment of the double-sided optical inspection system disclosed in the present invention, it can be divided into the inspection in the visible light mode and the inspection in the invisible light mode. In the inspection in the visible light mode, the first inspection machine 200 and the second inspection machine 300 can respectively and sequentially perform the appearance inspection on the front and back sides of the die. In the inspection in the invisible light mode, the second inspection machine 300 performs the inspection on the back side of the die to obtain the image data of the fluorescent luminescence condition on the back side of the die, which can then be used by the back end to determine whether the fluorescent powder coating has defects through the uniformity of the fluorescent luminescence.

[0036] In addition, the second detection machine 300 may be configured to move in the first axial direction X1. Figure 1 and Figure 3 As shown, in the detection of the visible light mode or the invisible light mode, the second detection machine 300 is configured to move in the first axial direction X1 (upward), so that the upper end of the reflective portion 342 supports the transparent support film 130, which can not only further stabilize the transparent support film 130, but also prevent the light from leaking outward and obtain more first reflected light R1, second reflected light R2, and excited light E1. Figure 2 The second inspection machine 300 moving in the first axial direction X1 is illustrated in a state where the upper end of the reflection portion 342 does not yet support the light-transmitting support film 130 .

[0037] In summary, the light-transmitting support film can have better support properties and make it easy for each die to be individually inspected, and the front and back sides of the die can be inspected in the same inspection system. The relevant light source device and illumination environment based on invisible light are better configured in the second optical machine, thereby providing a reliable basis for the classification of die quality (accurate image data, including the uniformity of fluorescent light emission on the back of each die).

[0038] The present invention discloses preferred embodiments above, but those skilled in the art should understand that the embodiments herein are only used to describe the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to the embodiments of the present invention should be understood to be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

[0039] [Reference Signs]

[0040] 100 Detection seat

[0041] 110 Stage

[0042] 111 Detection through hole

[0043] 120 film expansion adjustment component

[0044] 130 Transparent support film

[0045] 200 First Inspection Machine

[0046] 210 first light irradiation unit

[0047] 220 first light detection unit

[0048] 300 Second inspection machine

[0049] 310 Second light irradiation unit

[0050] 320 Second light detection unit

[0051] 330 third light irradiation unit

[0052] 340 Reflector

[0053] 341 Cavity

[0054] 342 Reflection Zone

[0055] 343 Decay Zone

[0056] 400 grains

[0057] E1 is excited light

[0058] L1 First detection light

[0059] L2 Second detection light

[0060] L3 The third detection light

[0061] R1 First reflected light

[0062] R2 Second reflected light

[0063] X1 First axis

Claims

1. A double-sided optical inspection system with fluorescence inspection function, which is used to inspect the front and back sides of a plurality of grains carried on a transparent support film, wherein: The reverse sides of the plurality of grains have a phosphor coating; the double-sided optical inspection system comprises: An inspection seat, comprising a carrier and a film expansion adjustment component arranged on the carrier, the carrier having a detection through hole penetrating the body, the film expansion adjustment component being used to maintain the light-transmitting support film above the detection through hole, and to stretch the light-transmitting support film so that the spacing between the plurality of grains carried thereon is increased; a first inspection machine, which is disposed on the upper side of the light-transmitting support film, and is used to generate a first inspection light belonging to the visible light wavelength range to illuminate the front sides of the plurality of crystal grains, and is also used to receive a first reflected light reflected from the front sides of the plurality of crystal grains and belonging to the visible light wavelength range; and A second detection machine is arranged on the lower side of the transparent support film to detect the back sides of the multiple grains through the detection through hole and the transparent support film, the second detection machine is used to generate a second detection light belonging to the visible light wavelength range and to generate a third detection light to illuminate the back sides of the multiple grains, the second detection machine is also used to receive a second reflected light reflected from the back sides of the multiple grains and belonging to the visible light wavelength range, and to receive an excited light emitted from the back sides of the multiple grains based on the excitation of the third detection light, wherein the wavelength of the third detection light is shorter than the wavelengths of the first detection light and the second detection light.

2. The double-sided optical inspection system according to claim 1, wherein: The first detection machine includes: a first light irradiation unit and a first light detection unit, the first light irradiation unit is used to generate the first detection light, and the first light detection unit is used to receive the first reflected light, wherein the first light irradiation unit and the first light detection unit are configured in a coaxial lighting manner, and the first light irradiation unit is closer to the detection seat than the first light detection unit.

3. The double-sided optical inspection system according to claim 2, wherein: The second detection machine includes: a reflecting part, a second light detecting part, and a second light irradiating part and a third light irradiating part arranged between the reflecting part and the second light detecting part, the reflecting part has a hollow cavity, the upper end and the lower end of the reflecting part each have an opening connected to the inside of the cavity, the second light irradiating part is used to generate the second detection light, and the third light irradiating part is used to generate the third detection light, the irradiation light of the second detection light passes through the openings at the lower end and the upper end of the cavity in turn and is irradiated to the back surface of the multiple grains through the transparent supporting film, the third detection light is based on the method of oblique incidence on the inner wall of the cavity to form the third detection light reflected to the back surface of the multiple grains, wherein the second light detecting part is used to receive the second reflected light or the excited light.

4. The double-sided optical inspection system according to claim 3, wherein: The reflective portion defines a reflective zone adjacent to the upper end and an attenuation zone adjacent to the lower end in the cavity. The reflective zone has a coating on the inner wall surface of the cavity for improving reflectivity, and the attenuation zone has a coating on the inner wall surface of the cavity for suppressing reflectivity.

5. The double-sided optical inspection system according to claim 4, wherein: The reflection area of ​​the reflection part is configured as a tube with a uniform inner diameter, and the attenuation area of ​​the reflection part is configured as a truncated cone-shaped tube with an inner diameter gradually expanding from a position connected to the tube toward the lower end.

6. The double-sided optical inspection system according to claim 5, wherein: The third light irradiation part is configured as a ring-shaped light emitting component adjacent to the lower edge of the truncated cone-shaped tube body, and the ring-shaped light emitting component is configured by making its irradiation direction parallel to the inner wall surface of the truncated cone-shaped tube body.

7. The double-sided optical inspection system according to any one of claims 3 to 6, wherein: The second light irradiation unit and the second light detection unit are arranged in a coaxial illumination manner. The second light irradiation unit is closer to the detection seat than the second light detection unit. The third light irradiation unit is closer to the detection seat than the second light irradiation unit.

8. The double-sided optical inspection system according to claim 7, wherein: A filter element is arranged in front of the second light detection unit, and the filter element blocks light having a wavelength of the third detection light and allows light having a wavelength longer than the third detection light to pass.

9. The double-sided optical inspection system according to claim 7, wherein: The second inspection machine is configured to move in a first axial direction, and the second inspection machine is configured to make the upper end of the reflection part support the light-transmitting support film.

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