A high speed integrated circuit test load board calibration adapter and calibration method

Abstract

This invention provides a high-speed integrated circuit test loading board calibration adapter and calibration method, belonging to the field of integrated circuit test systems. The calibration method includes: inputting a calibration signal into a signal input unit; the signal input unit inputs the differential signal from the calibration signal to the front probe array and the back probe array respectively, and inputs the common signal from the calibration signal to the front probe array and the back probe array; acquiring the position of the coordinate origin in the images of the front probe array and the back probe array; mapping the coordinates of all pads on the front probe array and the back probe array to the probe points of the probe card; and moving the probe card in the xyz direction according to the coordinates of the pads to achieve calibration of the loading board. The calibration method provided by this invention has the characteristics of high positioning accuracy, fast response speed, and ease of use.

Description

Technical Field

[0001] This invention belongs to the field of integrated circuit testing systems, and more specifically, relates to a high-speed integrated circuit test loading board calibration adapter and calibration method. Background Technology

[0002] For high-speed integrated circuit test boards, a dedicated calibration adapter is required for calibration because an auxiliary fixture is needed to connect the test board and the calibration instrument. Typically, high-speed integrated circuit test systems have thousands of test channels, and the function of each digital channel can be freely defined. While this facilitates test development, it also results in high-speed integrated circuit test boards having a large number of channels, a large scale, and complex definitions. Especially for high-speed differential signals, differential transmission lines offer advantages such as noise immunity, interference immunity, and effective suppression of ground noise and electromagnetic coupling interference caused by return paths, as well as signal distortion, making them a commonly used transmission line type in high-speed interconnects. When differential pairs are close or far apart, ordinary single-ended or differential probes cannot fit the pads of each differential pair. Furthermore, the acquisition of high-speed differential signals places high demands on real-time performance and high accuracy, resulting in existing calibration methods having low automation levels and failing to meet calibration requirements. Summary of the Invention

[0003] To address the shortcomings of existing technologies, the present invention aims to provide a high-speed integrated circuit test loading board calibration adapter and calibration method. This invention addresses the problem that existing calibration adapters or differential probes cannot adapt to the pads of each differential pair when the differential pairs are close or far apart. Furthermore, the acquisition of high-speed differential signals places high demands on real-time performance and high accuracy, resulting in low automation levels in existing calibration methods that are difficult to meet calibration requirements.

[0004] To achieve the above objectives, the present invention provides a high-speed integrated circuit test loading board calibration adapter, comprising: a fixture module and a signal acquisition module;

[0005] The fixture module includes a signal input unit, a front probe array, and a rear probe array; the signal acquisition module includes a probe card, a coordinate mapping unit, and an imaging device.

[0006] The front and back probe arrays are fixed to both sides of the loading plate, respectively. Two probe cards are symmetrically distributed on both sides of the fixture module and electrically connected to the front and back probe arrays, respectively. The signal input unit is electrically connected to the via of the loading plate being calibrated. The differential signal input from the signal input unit is input to the front and back probe arrays through the internal microstrip lines in the loading plate, and the common signal input from the signal input unit is input to the front and back probe arrays through the internal microstrip lines in the loading plate. The differential signal and the common signal together constitute the calibration signal. The calibration signal is used to calibrate the loading plate.

[0007] The imaging device is used to acquire the position of the coordinate origin in the images of the front probe array and the back probe array; the coordinate mapping unit is used to map the coordinates of all pads on the front probe array and the back probe array to the probe points on the probe card; the probe card is used to move in the xyz direction according to the coordinates of the pads.

[0008] More preferably, the signal acquisition module also includes a mounting base for locking the positions of the clamp module, probe card, and imaging device.

[0009] More preferably, the front probe array and the back probe array are fan-shaped.

[0010] More preferably, the probe card includes a single-ended microwave probe and a matching probe holder.

[0011] On the other hand, the present invention provides a high-speed integrated circuit test loading board calibration method based on a high-speed integrated circuit test loading board calibration adapter, comprising the following steps:

[0012] S1: Input the calibration signal to the signal input unit. The signal input unit inputs the differential signal in the calibration signal to the front probe array and the back probe array respectively, and inputs the common signal in the calibration signal to the front probe array and the back probe array.

[0013] S2: Acquire the position of the origin of the coordinate system in the images of the front probe array and the back probe array;

[0014] S3: Map the coordinates of all pads on the front and back probe arrays to the probe points on the probe card.

[0015] S4: Based on the coordinates of the pads, the probe moves in the xyz direction to calibrate the loading board.

[0016] More preferably, a fixing seat is used before S1 to lock the positions of the clamp module, probe card and imaging device.

[0017] More preferably, the front probe array and the back probe array are fan-shaped.

[0018] In summary, compared with the prior art, the above-described technical solutions conceived by this invention have the following advantages:

[0019] Beneficial effects:

[0020] This invention provides a high-speed integrated circuit test loading board calibration adapter and calibration method. Compared with existing calibration methods, in this invention, the front probe array and the back probe array are fixed to both sides of the loading board; two probe cards are symmetrically distributed on both sides of the fixture module and electrically connected to the front probe array and the back probe array, respectively; differential signals can be input to the front probe array and the back probe array through the internal microstrip lines in the loading board, and can be acquired using single-ended probe cards, suitable for the flexible definition of differential signals in the digital channels of integrated circuit test systems. Furthermore, this invention uses a monocular camera to locate the origin of the coordinates in the images of the front probe array and the back probe array in real time. Combined with preset pad positioning coordinates, differential signal detection can be quickly achieved using the probe cards. Therefore, the high-speed integrated circuit test loading board calibration adapter and calibration method provided by this invention have the characteristics of high positioning accuracy, fast response speed, and ease of use. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the high-speed integrated circuit test loading board calibration adapter provided in an embodiment of the present invention;

[0022] Figure 2(a) is a schematic diagram of the front structure of the calibration adapter for the high-speed integrated circuit test loading board based on differential signals provided in an embodiment of the present invention;

[0023] Figure 2(b) is a schematic diagram of the back structure of the calibration adapter for the high-speed integrated circuit test loading board based on differential signals provided in an embodiment of the present invention;

[0024] Figure 3 This is a flowchart of a high-speed integrated circuit test recorder calibration method based on differential signals provided in an embodiment of the present invention;

[0025] Marker explanation:

[0026] 1-Fan-shaped clamp module; 2-Signal acquisition module; 11-Signal input unit; 12-Front probe array; 13-Rear probe array; 14-Internal microstrip line; 21-Fixed base; 22-Probe card; 23-Monocular camera. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0028] Example 1

[0029] like Figure 1 As shown, the present invention provides a high-speed integrated circuit test loading board calibration adapter, including: a fan-shaped fixture module 1 and a signal acquisition module 2;

[0030] The fan-shaped clamp module 1 includes a through-hole-based signal input unit 11, a front probe array 12 as shown in Figure 2(a), and a back probe array 13 as shown in Figure 2(b); the signal acquisition module 2 includes a mounting base 21, a probe card 22, a monocular camera 23, and a coordinate mapping unit; wherein, the mounting base 21 and the probe card 22 are symmetrically distributed on both sides of the fan-shaped clamp module 1.

[0031] The via-based signal input unit 11 is electrically connected to the via of the calibration loading board; the internal microstrip line 14 connects the differential pair signals to the front probe array 12 and the back probe array 13 respectively during wiring and routing, and symmetrically connects the common signal to the front probe array 12 and the back probe array 13; the probe card 22 is capable of xyz three-axis movement; the probe card 22 is electrically connected to the front probe array 12 and the back probe array 13; the mounting base 21 locks the positions of the fan-shaped clamp module 1, the probe card 22 and the monocular camera 23;

[0032] The monocular camera 23 is used to quickly acquire the position of the coordinate origin in the image; the coordinate mapping unit is used to map the coordinates of all pads on the front probe array 12 and the back probe array 13 to the probe points on the probe card 22; the probe card 22 is used to move quickly in the xyz direction according to the coordinates of the pads.

[0033] Example 2

[0034] To achieve the above objectives, such as Figure 3As shown, this invention provides a high-speed integrated circuit test loading board calibration method based on differential signals. In this embodiment, a probe card is constructed using a GTL40-500 GSG-DX single-ended microwave probe and a compatible probe holder. A 16-channel via-based high-speed signal input unit and related interfaces, such as Rosenberger's TDRKit, are used. A DS-65VCP monocular camera supporting 4K@30fps output is selected as the image acquisition unit. The center coordinates (x, y, z) of the calibration adapter's sector are defined as (0,0,0). The detection points of all other differential signals are calibrated using a calculation unit. The corresponding calibration position is located using a positioning unit 3. In this invention, the positioning unit is the probe card; the calculation unit is a coordinate mapping unit.

[0035] In summary, compared with the prior art, the present invention has the following advantages:

[0036] This invention provides a high-speed integrated circuit test loading board calibration adapter and calibration method. Compared with existing calibration methods, in this invention, the front probe array and the back probe array are fixed to both sides of the loading board; two probe cards are symmetrically distributed on both sides of the fixture module and electrically connected to the front probe array and the back probe array, respectively; differential signals can be input to the front probe array and the back probe array through the internal microstrip lines in the loading board, and can be acquired using single-ended probe cards, suitable for the flexible definition of differential signals in the digital channels of integrated circuit test systems. Furthermore, this invention uses a monocular camera to locate the origin of the coordinates in the images of the front probe array and the back probe array in real time. Combined with preset pad positioning coordinates, differential signal detection can be quickly achieved using the probe cards. Therefore, the high-speed integrated circuit test loading board calibration adapter and calibration method provided by this invention have the characteristics of high positioning accuracy, fast response speed, and ease of use.

[0037] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A high-speed integrated circuit test loading board calibration adapter, characterized in that, include: Fixture module and signal acquisition module; The fixture module includes a signal input unit, a front probe array, and a rear probe array; the signal acquisition module includes a probe card, a coordinate mapping unit, and an imaging device. The front probe array and the back probe array are fixed to both sides of the loading plate, respectively. Two probe cards are symmetrically distributed on both sides of the fixture module and electrically connected to the front probe array and the back probe array, respectively. The signal input unit is electrically connected to the via of the loading plate being calibrated. The differential signal input from the signal input unit is input to the front probe array and the back probe array through the internal microstrip lines in the loading plate, respectively. The common signal input from the signal input unit is transmitted to the front probe array and the back probe array through the internal microstrip lines in the loading plate. The differential signal and the common signal together constitute the calibration signal. The calibration signal is used to calibrate the loading plate. The imaging device is used to acquire the position of the coordinate origin in the images of the front probe array and the back probe array; the coordinate mapping unit is used to map the coordinates of all pads on the front probe array and the back probe array to the probe points on the probe card; the probe card is used to move in the xyz direction according to the coordinates of the pads.

2. The high-speed integrated circuit test loading board calibration adapter according to claim 1, characterized in that, The signal acquisition module also includes a mounting base for locking the positions of the clamp module, probe card, and monocular camera.

3. The high-speed integrated circuit test loading board calibration adapter according to claim 1 or 2, characterized in that, The front probe array and the back probe array are fan-shaped.

4. The high-speed integrated circuit test loading board calibration adapter according to claim 3, characterized in that, The probe card includes a single-ended microwave probe and a matching probe holder.

5. The high-speed integrated circuit test loading board calibration adapter according to claim 1 or 4, characterized in that, The imaging device is a monocular camera.

6. A high-speed integrated circuit test loading board calibration method based on the high-speed integrated circuit test loading board calibration adapter according to claim 1, characterized in that, Includes the following steps: S1: Input the calibration signal to the signal input unit. The signal input unit inputs the differential signal in the calibration signal to the front probe array and the back probe array respectively, and inputs the common signal in the calibration signal to the front probe array and the back probe array. S2: Acquire the position of the origin of the coordinate system in the images of the front probe array and the back probe array; S3: Map the coordinates of all pads on the front and back probe arrays to the probe points on the probe card. S4: Based on the coordinates of the pads, the probe moves in the xyz direction to calibrate the loading board.

7. The high-speed integrated circuit test loading board calibration method according to claim 6, characterized in that, Before S1, a mounting bracket is used to lock the positions of the clamp module, probe card, and imaging device.

8. The high-speed integrated circuit test loading board calibration method according to claim 6 or 7, characterized in that, The front probe array and the back probe array are fan-shaped.

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