Sensor fault detection method and system

Abstract

The present invention provides a sensor fault detection method and system, comprising: obtaining preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor based on the installation position information of each liquid level sensor in a cooling water tank of a semiconductor waste gas treatment device; collecting trigger signals generated by the corresponding liquid level sensor based on different types of preset fault detection conditions; and determining the fault detection results of each liquid level sensor based on the collection results of the trigger signals and the preset liquid level signal judgment information. The present invention uses the installation position information of each liquid level sensor in the cooling water tank, the corresponding preset liquid level signal judgment information and the preset fault detection conditions, to determine the faults of liquid level sensors at different installation positions, thereby effectively and accurately detecting faults in the liquid level sensors and improving the stability and safety of the semiconductor waste gas treatment device.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor process waste gas treatment, and in particular to a sensor fault detection method and system. Background Art

[0002] Semiconductor exhaust gas treatment devices primarily treat process waste gases by applying high temperatures to the reaction chamber, causing the waste gases entering the device to undergo a redox reaction within the chamber, thereby transforming the waste gases into non-toxic and harmless gases. After the reaction is complete, the high-temperature gases need to be cooled before exiting the device. This cooling process requires cooling through the cooling water tank in the device's cooling system.

[0003] Cooling water tanks store water, which is acidic and corrosive. Leakage could endanger equipment and personnel. Current control systems only collect sensor signals but cannot determine if they are correct, meaning they cannot determine if the sensor has failed. Such failures could endanger equipment and personnel.

[0004] Therefore, there is an urgent need for a sensor fault detection method and system to solve the above problems. Summary of the Invention

[0005] In view of the problems existing in the prior art, the present invention provides a sensor fault detection method and system.

[0006] The present invention provides a sensor fault detection method, comprising:

[0007] According to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device, the preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor are obtained;

[0008] Based on different types of preset fault detection conditions, collecting the corresponding trigger signal generated by the liquid level sensor;

[0009] The fault detection results of the respective liquid level sensors are determined according to the acquisition results of the trigger signal and the preset liquid level signal judgment information.

[0010] According to a sensor fault detection method provided by the present invention, the liquid level sensors in the cooling water tank are arranged from low to high according to the liquid level detection height in the installation position information, namely, the first liquid level sensor, the second liquid level sensor, the third liquid level sensor, and the fourth liquid level sensor;

[0011] Among them, when the liquid level detection function of the liquid level sensor is normal, when the liquid level height in the cooling water tank reaches the sensing area height of the third liquid level sensor, the cooling water tank starts to drain, and after the liquid level height in the cooling water tank is lower than the sensing area height of the second liquid level sensor, the cooling water tank stops draining and starts to take in water until the liquid level height of the cooling water tank reaches the sensing area height of the third liquid level sensor again.

[0012] According to a sensor fault detection method provided by the present invention, the method obtains preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor based on the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device, including:

[0013] If the liquid level sensor is the first liquid level sensor, the determination time when the second liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the first liquid level sensor to obtain a first preset fault detection condition;

[0014] obtaining first preset liquid level signal determination information based on height difference information between the third liquid level sensor and the first liquid level sensor, wherein the first preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to drain the cooling water in the cooling water tank from the liquid level height of the third liquid level sensor to the liquid level height of the first liquid level sensor under normal circumstances;

[0015] If the liquid level sensor is the second liquid level sensor, during the drainage process of the cooling water tank, the moment when the trigger signal of the second liquid level sensor disappears is used as the preset fault detection condition of the second liquid level sensor to obtain the second preset fault detection condition;

[0016] obtaining second preset liquid level signal judgment information based on the height difference between the liquid level at which drainage of the cooling water tank stops and the height of the sensing area of ​​the second liquid level sensor, wherein the second preset liquid level signal judgment information is the time required for the liquid level detection function of the liquid level sensor to flow the cooling water in the cooling water tank from the liquid level at which drainage of the cooling water tank stops to the height of the sensing area of ​​the second liquid level sensor under normal circumstances;

[0017] If the liquid level sensor is the third liquid level sensor, the moment when the cooling water tank stops draining water is used as the preset fault detection condition of the third liquid level sensor to obtain a third preset fault detection condition;

[0018] obtaining third preset liquid level signal determination information based on height difference information between the second liquid level sensor and the third liquid level sensor in the cooling water tank, wherein the third preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to flow cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the third liquid level sensor under normal circumstances;

[0019] If the liquid level sensor is the fourth liquid level sensor, the determination time when the third liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the fourth liquid level sensor to obtain a fourth preset fault detection condition;

[0020] Obtaining fourth preset liquid level signal determination information based on height difference information between the second liquid level sensor and the fourth liquid level sensor, wherein the fourth preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to flow cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the fourth liquid level sensor under normal circumstances;

[0021] The collecting of the trigger signal generated by the corresponding liquid level sensor based on the preset fault detection conditions of different types includes:

[0022] When any one of the first preset fault detection condition, the second preset fault detection condition, the third preset fault detection condition and the fourth preset fault detection condition is met, a trigger signal generated by the corresponding liquid level sensor is collected.

[0023] According to a sensor fault detection method provided by the present invention, determining the fault detection result of each liquid level sensor according to the acquisition result of the trigger signal and the preset liquid level signal judgment information includes:

[0024] When it is determined that the first preset fault detection condition is met at the current moment, if the trigger signal generated by the first liquid level sensor is not obtained within the time period corresponding to the first preset liquid level signal judgment information, it is determined that the first liquid level sensor has a fault;

[0025] When it is determined that the second preset fault detection condition is met at the current moment, if the trigger signal generated by the second liquid level sensor is not obtained within the time period corresponding to the second preset liquid level signal judgment information, it is determined that the second liquid level sensor has a fault;

[0026] When it is determined that the third preset fault detection condition is met at the current moment, if the trigger signal generated by the third liquid level sensor is not obtained within the time period corresponding to the third preset liquid level signal judgment information, it is determined that the third liquid level sensor has a fault;

[0027] When it is determined that the fourth preset fault detection condition is met at the current moment, if the trigger signal generated by the fourth liquid level sensor is not obtained within the time period corresponding to the fourth preset liquid level signal judgment information, it is determined that the fourth liquid level sensor has a fault.

[0028] According to a sensor fault detection method provided by the present invention, the method further includes:

[0029] According to each preset fault tolerance margin, adjusting the duration of the corresponding preset liquid level signal judgment information to obtain adjusted preset liquid level signal judgment information, wherein the preset fault tolerance margin is determined based on the installation position information of the liquid level sensor;

[0030] Determining the fault detection results of each of the liquid level sensors according to the acquisition results of the trigger signal and the preset liquid level signal judgment information, including:

[0031] The fault detection result of each of the liquid level sensors is determined according to the acquisition result of the trigger signal and the judgment information of each of the adjusted preset liquid level signals.

[0032] According to a sensor fault detection method provided by the present invention, after determining the fault detection result of each liquid level sensor based on the acquisition result of the trigger signal and the preset liquid level signal judgment information, the method further includes:

[0033] According to the fault detection result, corresponding sensor fault display content and sound and light alarm information are generated.

[0034] The present invention also provides a sensor fault detection system, comprising:

[0035] A processing module, configured to obtain preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device;

[0036] A sensor signal acquisition module, configured to acquire trigger signals generated by the corresponding liquid level sensors based on different types of preset fault detection conditions;

[0037] The fault detection module is used to determine the fault detection result of each of the liquid level sensors according to the acquisition result of the trigger signal and the preset liquid level signal judgment information.

[0038] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the program, any of the above-described sensor fault detection methods is implemented.

[0039] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the sensor fault detection method described above is implemented.

[0040] The present invention also provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the computer program implements any of the above-mentioned sensor fault detection methods.

[0041] The present invention provides a sensor fault detection method and system, which uses the installation position information of each liquid level sensor in the cooling water tank of a semiconductor exhaust treatment device, corresponding preset liquid level signal judgment information and preset fault detection conditions to judge the faults of liquid level sensors at different installation positions, thereby effectively and accurately detecting the fault conditions of the liquid level sensors, thereby improving the stability and safety of the semiconductor exhaust treatment device. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0043] Figure 1 A schematic flow chart of the sensor fault detection method provided by the present invention;

[0044] Figure 2 A schematic structural diagram of the cooling water system of the semiconductor waste gas treatment device provided by the present invention;

[0045] Figure 3 A schematic structural diagram of the sensor fault detection system provided by the present invention;

[0046] Figure 4 A schematic diagram of the overall architecture of the semiconductor process control system provided by the present invention;

[0047] Figure 5 This is a schematic structural diagram of the electronic device provided by the present invention. DETAILED DESCRIPTION

[0048] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0049] Figure 1 A flow chart of the sensor fault detection method provided by the present invention is shown as follows: Figure 1 As shown, the present invention provides a sensor fault detection method, comprising:

[0050] Step 101, obtaining preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device;

[0051] In the present invention, corresponding liquid level sensors are set according to different liquid level heights, so as to monitor the cooling water level in the cooling water tank in real time. Preferably, in one embodiment, the various liquid level sensors in the cooling water tank are set from low to high according to the liquid level detection height in the installation location information, namely, a first liquid level sensor, a second liquid level sensor, a third liquid level sensor, and a fourth liquid level sensor; wherein, when the liquid level detection function of the liquid level sensor is normal, when the liquid level in the cooling water tank reaches the height of the sensing area of ​​the third liquid level sensor, the cooling water tank starts to drain, and after the liquid level in the cooling water tank falls below the height of the sensing area of ​​the second liquid level sensor, the cooling water tank stops draining and starts to take in water, until the liquid level in the cooling water tank reaches the height of the sensing area of ​​the third liquid level sensor again.

[0052] Figure 2 The schematic diagram of the cooling water system of the semiconductor waste gas treatment device provided by the present invention can be referred to Figure 2 As shown, in the present invention, after the water inlet valve on the water inlet side is opened, the cooling system of the semiconductor exhaust gas treatment device continues to inject water into the cooling water tank through the water inlet pipe to reduce the acidity inside the water tank, wherein the liquid level height inside the water tank is controlled by the water pump and the drain valve, thereby circulating between the two liquid level sensors, sensor 2 (i.e., the second liquid level sensor, which is a low liquid level sensor) and sensor 3 (i.e., the third liquid level sensor, which is a high liquid level sensor).

[0053] Furthermore, in order to improve the safety of the equipment, the cooling water tank is also provided with a sensor 1 for monitoring the lower liquid level (i.e. the first liquid level sensor, which is a low-low liquid level sensor), and a sensor 4 for monitoring the higher liquid level (i.e. the fourth liquid level sensor, which is a high-high liquid level sensor). When the liquid level is lower than sensor 2, if the liquid level continues to decrease and has not reached the monitoring position of sensor 1, the maintenance personnel can inspect and repair the equipment as soon as possible. At this time, the semiconductor exhaust treatment device still keeps running. When the liquid level is lower than sensor 1, it is a high-risk state. At this time, the cooling water tank cannot provide enough cooling water for cooling, and the semiconductor exhaust treatment device (including the entire semiconductor process equipment will also stop) will be forced to stop and wait for the maintenance personnel to eliminate the relevant faults before it can be turned on again. Similarly, when the liquid level is higher than sensor 3, if the liquid level continues to rise and has not reached the monitoring position of sensor 4, the maintenance personnel will inspect and repair the equipment as soon as possible to prevent the cooling water from overflowing. At this time, the semiconductor exhaust treatment device will still remain in operation. When the liquid level is higher than sensor 4, it is a high-risk state. At this time, the cooling water in the cooling water tank will overflow, and the entire semiconductor process-related equipment needs to be forced to stop and wait for the maintenance personnel to eliminate the relevant faults before it can be restarted.

[0054] However, when the liquid level sensor fails, it cannot detect the current liquid level, which can cause damage to the cooling water system. For example, when the low-level liquid level sensor (i.e., the first liquid level sensor) fails, it cannot detect the current liquid level, which can cause the water pump to run dry and damage the pump, and can also cause hazards such as excessive equipment temperature. Alternatively, if sensor 4 fails, as the last line of defense to protect the safe water level of the cooling water tank, the water inside the tank will overflow, endangering the safety of equipment and personnel. Therefore, the present invention constructs different fault judgment rules and detection conditions for sensors at different liquid level heights to perform fault detection on each sensor.

[0055] Step 102: Based on different types of preset fault detection conditions, the trigger signal generated by the corresponding liquid level sensor is collected.

[0056] In the present invention, when the liquid level sensor is operating normally, when the cooling water level reaches the corresponding liquid level sensor, the liquid level sensor is triggered to generate a signal. Based on the timing of the trigger signal generation, it can be determined whether the sensor is faulty. It should be noted that in the sensor fault determination process of the present invention, generally, if the corresponding trigger signal is not collected within a preset time period, the sensor is determined to be faulty. Trigger signals collected after the preset time period can also be determined to be faulty, for example, due to reduced sensitivity caused by sensor aging.

[0057] Step 103 : determining the fault detection result of each of the liquid level sensors according to the acquisition result of the trigger signal and the preset liquid level signal judgment information.

[0058] In the present invention, for liquid level sensors at different liquid level heights, different preset liquid level signal judgment information is used to perform fault detection on the corresponding liquid level sensors. In the event that the second liquid level sensor and the third liquid level sensor fail, the semiconductor process can be kept running normally, and maintenance personnel are prompted to check as soon as possible; when it is determined that the first liquid level sensor or the fourth liquid level sensor fails, the semiconductor process needs to be stopped immediately. After the fault is eliminated and the liquid level reaches a safe height (that is, the liquid level is between the second liquid level sensor and the third liquid level sensor), the semiconductor process is restarted.

[0059] The sensor fault detection method provided by the present invention uses the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust treatment device, and adopts the corresponding preset liquid level signal judgment information and preset fault detection conditions to judge the fault of the liquid level sensors at different installation positions, thereby effectively and accurately detecting the fault conditions of the liquid level sensors, thereby improving the stability and safety of the semiconductor exhaust treatment device.

[0060] On the basis of the above embodiment, the method of obtaining the preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device includes:

[0061] If the liquid level sensor is the first liquid level sensor, the determination time when the second liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the first liquid level sensor to obtain a first preset fault detection condition;

[0062] obtaining first preset liquid level signal determination information based on height difference information between the third liquid level sensor and the first liquid level sensor, wherein the first preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to drain the cooling water in the cooling water tank from the liquid level height of the third liquid level sensor to the liquid level height of the first liquid level sensor under normal circumstances;

[0063] In the present invention, reference may be made to Figure 2As shown, the cooling water tank's control logic is as follows: sensor 1 signals a low-level alarm, and sensor 4 signals a high-level alarm. When the liquid level falls below sensor 1 or rises above sensor 4, the semiconductor process is forced to shut down. Therefore, a sensor failure can cause equipment damage and personnel hazards. Therefore, when the sensors are operating normally, the water inlet pipe continuously fills the tank, reducing the acidity inside. The water inlet flow rate is Q, and the liquid level inside the tank circulates between sensors 2 and 3, controlled by the water pump and drain valve.

[0064] Since the installation position of the water tank liquid level sensor is fixed, the volume of cooling water between each liquid level sensor can be calculated by V=sl based on the bottom area s of the cooling water tank and the height difference l between each liquid level sensor. Specifically, the cooling water volume between sensor 1 and sensor 2 is V1, the cooling water volume between sensor 2 and sensor 3 is V2, and the water volume between sensor 3 and sensor 4 is V3. When the sensor is working normally, V2 is fixed during each drainage and water inlet process. Therefore, under the same working conditions, by collecting n groups (for example, 10 groups of data) of drainage time data every day, the average value is taken as the reference value Td of drainage time. Specifically, when sensor 3 is triggered, the control system will receive the drainage signal generated by the sensor. At this time, the drainage valve opens, and the control system records the drainage start time. When the water is drained to the position of sensor 2, the drainage end time is recorded. Therefore, based on the drainage start time and drainage end time, the drainage time when the sensor is working normally can be determined.

[0065] Furthermore, for the first liquid level sensor, when the liquid level inside the cooling water tank is normal, the liquid level circulates between the second and third liquid level sensors. Only when the second liquid level sensor fails is it necessary to perform a fault detection on the first liquid level sensor, thereby determining the first preset fault detection condition to ensure that the first liquid level sensor operates normally before the second liquid level sensor fails, thereby promptly knowing the current liquid level. Specifically, the present invention first calculates the drainage speed Sd based on the drainage time and drainage volume, that is:

[0066]

[0067] When the sensor is working normally, the cooling water level drops from the third level sensor to the first level sensor, and the volume of water V1+V2 needs to be discharged. The time required for the first preset level signal judgment information can be calculated. Right now

[0068] If the liquid level sensor is the second liquid level sensor, during the drainage process of the cooling water tank, the moment when the trigger signal of the second liquid level sensor disappears is used as the preset fault detection condition of the second liquid level sensor to obtain the second preset fault detection condition;

[0069] Based on the height difference information between the liquid level at which the cooling water tank stops draining and the height of the sensing area of ​​the second liquid level sensor, the second preset liquid level signal judgment information is obtained, wherein the second preset liquid level signal judgment information is the time required for the liquid level detection function of the liquid level sensor to, under normal circumstances, fill the cooling water in the cooling water tank from the liquid level at which the cooling water tank stops draining to the height of the sensing area of ​​the second liquid level sensor.

[0070] In the present invention, the water level in the cooling water tank circulates between the second and third liquid level sensors during normal operation. Since the timing of sensor failure is uncertain, each signal change is used as a criterion for determining sensor normality. Specifically, the signal from the second liquid level sensor disappears after each system drain operation. During this period, the water inlet valve remains open. After a period of time after draining stops, the signal from the second liquid level sensor will undoubtedly re-activate. Therefore, the timing of the signal reappearing is used as a preset fault detection condition for the second liquid level sensor, i.e., the second preset fault detection condition.

[0071] In the present invention, under normal drainage process, when the liquid level is lower than the second liquid level sensor, the signal generated by the second liquid level sensor disappears, and the cooling water tank starts to fill with water. When the cooling water level reaches the water level of the sensing area height L2 of the second liquid level sensor again from the liquid level when drainage stops, the water volume at this time is V=S*L2. The time required for the water to enter this volume is Thus, the second preset liquid level signal judgment information is obtained. Preferably, when the semiconductor process equipment is operating normally, since the daily drainage process is determined based on the liquid level height, if water inflow continues, if all liquid level sensors are operating normally, the daily drainage process time period is relatively fixed. Therefore, fixed fault detection trigger times corresponding to different time periods can also be set. For example, 8:00 to 8:10 every morning is a fixed fault detection trigger period (multiple fixed fault detection trigger periods can be set for detection during the day based on historical drainage conditions). Since the drainage process has certain fluctuations, by setting a trigger period during the corresponding time of the day, if the signal generated by the second liquid level sensor disappears during this period, it indicates that the second liquid level sensor is still in a normal working state during the drainage process, so that the liquid level height in the cooling water tank can be maintained in a cycle between the second liquid level sensor and the third liquid level sensor, and then the second preset fault detection condition and the second preset liquid level signal judgment information are used to determine whether the second liquid level sensor has a fault during the water inflow process. If the second liquid level sensor maintains a signal during the above time period (i.e., the liquid level height is lower than the second liquid level sensor, but it still generates a signal, indicating that the sensor is faulty), or the signal disappears before this time period, it indicates that the second liquid level sensor has a fault.

[0072] If the liquid level sensor is the third liquid level sensor, the moment when the cooling water tank stops draining water is used as the preset fault detection condition of the third liquid level sensor to obtain a third preset fault detection condition;

[0073] Based on the height difference information between the second liquid level sensor and the third liquid level sensor in the cooling water tank, the third preset liquid level signal judgment information is obtained, wherein the third preset liquid level signal judgment information is the time required for the liquid level detection function of the liquid level sensor to fill the cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the third liquid level sensor under normal circumstances.

[0074] In the present invention, for the third liquid level sensor, when the liquid level of the cooling water tank is drained from the third liquid level sensor to the second liquid level sensor, drainage is stopped at this time, and the moment of stopping drainage is used as the third preset fault detection condition, thereby triggering a fault check on the third liquid level sensor. Furthermore, when the semiconductor process equipment as a whole is in normal operation, the timer starts after the drainage is completed. The amount of water required to enter the third liquid level sensor for the liquid level to reach the level of the third liquid level sensor is V2, that is, the time corresponding to the third preset liquid level signal judgment information.

[0075] If the liquid level sensor is the fourth liquid level sensor, the determination time when the third liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the fourth liquid level sensor to obtain a fourth preset fault detection condition;

[0076] Based on the height difference information between the second liquid level sensor and the fourth liquid level sensor, the fourth preset liquid level signal judgment information is obtained, wherein the fourth preset liquid level signal judgment information is the time required for the liquid level detection function of the liquid level sensor to fill the cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the fourth liquid level sensor under normal circumstances.

[0077] In the present invention, for the fourth liquid level sensor, when the third liquid level sensor fails, the liquid level cannot be monitored normally, causing the liquid level to continue to rise, and the fourth liquid level sensor is needed as the last line of defense for monitoring. Therefore, the present invention uses the judgment moment when the third liquid level sensor is determined to be in a fault state as the fourth preset fault detection condition to start fault detection of the fourth liquid level sensor.

[0078] Furthermore, during normal operation of the device, the timing starts after the drainage is completed, and the height difference information between the second liquid level sensor and the fourth liquid level sensor is used to determine the amount of water that needs to enter the volume V2+V3 from the liquid level height at the end of drainage to the liquid level height of the fourth liquid level sensor, that is, the duration corresponding to the fourth preset liquid level signal judgment information.

[0079] The collecting of the trigger signal generated by the corresponding liquid level sensor based on the preset fault detection conditions of different types includes:

[0080] When any one of the first preset fault detection condition, the second preset fault detection condition, the third preset fault detection condition and the fourth preset fault detection condition is met, a trigger signal generated by the corresponding liquid level sensor is collected.

[0081] In the present invention, the preset fault detection conditions of different liquid level sensors are determined by the above embodiment. When any preset fault detection condition is met, the corresponding liquid level sensor will be fault detected to achieve real-time detection of the liquid level sensor in the cooling water tank.

[0082] On the basis of the above embodiment, the method of determining the fault detection result of each liquid level sensor according to the acquisition result of the trigger signal and the preset liquid level signal judgment information includes:

[0083] When it is determined that the first preset fault detection condition is met at the current moment, if the trigger signal generated by the first liquid level sensor is not obtained within the time period corresponding to the first preset liquid level signal judgment information, it is determined that the first liquid level sensor has a fault;

[0084] When it is determined that the second preset fault detection condition is met at the current moment, if the trigger signal generated by the second liquid level sensor is not obtained within the time period corresponding to the second preset liquid level signal judgment information, it is determined that the second liquid level sensor has a fault;

[0085] When it is determined that the third preset fault detection condition is met at the current moment, if the trigger signal generated by the third liquid level sensor is not obtained within the time period corresponding to the third preset liquid level signal judgment information, it is determined that the third liquid level sensor has a fault;

[0086] When it is determined that the fourth preset fault detection condition is met at the current moment, if the trigger signal generated by the fourth liquid level sensor is not obtained within the time period corresponding to the fourth preset liquid level signal judgment information, it is determined that the fourth liquid level sensor has a fault.

[0087] Based on the above embodiment, the method further includes:

[0088] According to each preset fault tolerance margin, adjusting the duration of the corresponding preset liquid level signal judgment information to obtain adjusted preset liquid level signal judgment information, wherein the preset fault tolerance margin is determined based on the installation position information of the liquid level sensor;

[0089] Determining the fault detection results of each of the liquid level sensors according to the acquisition results of the trigger signal and the preset liquid level signal judgment information, including:

[0090] The fault detection result of each of the liquid level sensors is determined according to the acquisition result of the trigger signal and the judgment information of each of the adjusted preset liquid level signals.

[0091] In the present invention, when constructing the preset liquid level signal judgment information of each liquid level sensor, since the drainage speed cannot be guaranteed to be consistent every time, a certain time tolerance margin (i.e., preset tolerance margin) is set for the preset liquid level signal judgment information. Specifically, for the first preset liquid level signal judgment information, it can be set to discharge more than (V1+V2) / 10 of water (this volume can be selected according to different tolerance volumes for different devices). The timer starts after the drain valve is opened. When the drainage time is long, the water level will be increased by 10%. When , the control system has not yet collected the signal change of the first liquid level sensor, and it is determined that the first liquid level sensor is faulty.

[0092] Furthermore, to ensure the accuracy of the judgment and the stability of the system operation, since the sensing area of ​​the sensor is not very large, for the second liquid level signal judgment information, 2 times the time can be used as the judgment benchmark (this multiple can be set to different values ​​according to different sensors). After the drainage is completed, start filling the water and timing to obtain the water filling time. When the control system cannot collect the signal of the second liquid level sensor, it is determined that the second liquid level sensor is faulty.

[0093] Furthermore, since the water inflow may fluctuate to a certain extent, it is necessary to set a certain time tolerance margin for the third liquid level signal judgment information, that is, to allow more water to enter in the volume of V2 / 10 (this volume can be selected according to different equipment). The timing starts after the drainage is completed. When the water inflow time is long When no signal change of the third liquid level sensor is received, it is determined that the third liquid level sensor is faulty.

[0094] Furthermore, it is necessary to set a certain time tolerance margin for the fourth liquid level signal judgment information, that is, to set the water volume to enter more than (V2+V3) / 10 (this volume can be selected according to different equipment). When no signal change of the fourth liquid level sensor is received, it is determined that the fourth liquid level sensor is faulty.

[0095] Based on the above embodiment, after determining the fault detection result of each of the liquid level sensors according to the acquisition result of the trigger signal and the preset liquid level signal judgment information, the method further includes:

[0096] According to the fault detection result, corresponding sensor fault display content and sound and light alarm information are generated.

[0097] In the present invention, for the fault detection results produced by different liquid level sensors, corresponding fault display content can be generated and displayed through the human-machine interface (HMI), or corresponding sound and light alarm prompt information can be generated to remind the operator to eliminate the fault as soon as possible and improve the operator's work efficiency.

[0098] The sensor fault detection system provided by the present invention is described below. The sensor fault detection system described below and the sensor fault detection method described above can be referenced to each other.

[0099] Figure 3 This is a schematic diagram of the structure of the sensor fault detection system provided by the present invention, as shown in FIG. Figure 3As shown, the present invention provides a sensor fault detection system, including a processing module 301, a sensor signal acquisition module 302 and a fault detection module 303, wherein the processing module 301 is used to obtain preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust treatment device; the sensor signal acquisition module 302 is used to collect the trigger signal generated by the corresponding liquid level sensor based on different types of preset fault detection conditions; the fault detection module 303 is used to determine the fault detection result of each liquid level sensor according to the collection result of the trigger signal and the preset liquid level signal judgment information.

[0100] In the present invention, the processing module 301 is provided with corresponding liquid level sensors according to different liquid level heights, so as to monitor the cooling water level in the cooling water tank in real time.

[0101] In one embodiment, the liquid level sensors in the cooling water tank are arranged in ascending order based on the liquid level detection heights in the installation location information, namely, a first liquid level sensor, a second liquid level sensor, a third liquid level sensor, and a fourth liquid level sensor. When the liquid level sensors are functioning properly, the cooling water tank begins draining when the liquid level in the cooling water tank reaches the sensing area of ​​the third liquid level sensor. After the liquid level in the cooling water tank falls below the sensing area of ​​the second liquid level sensor, the cooling water tank stops draining and begins filling with water until the liquid level in the cooling water tank reaches the sensing area of ​​the third liquid level sensor again.

[0102] Furthermore, in the present invention, when the liquid level sensor is operating normally, when the cooling water level reaches the corresponding liquid level sensor, it triggers the liquid level sensor to generate a signal. The sensor signal acquisition module 302 can collect these signals, thereby determining whether the sensor is faulty based on the time when the trigger signal is generated. It should be noted that in the sensor fault determination process of the present invention, generally, if the sensor signal acquisition module 302 does not collect the corresponding trigger signal within a preset time period, the sensor can be determined to be in a faulty state. If the sensor signal acquisition module 302 collects a trigger signal after the preset time period, it can also be determined that a fault exists, for example, due to reduced sensitivity caused by aging of the sensor.

[0103] Furthermore, for liquid level sensors at different liquid level heights, the fault detection module 303 uses different preset liquid level signal judgment information to perform fault detection on the corresponding liquid level sensors. In the event that the second liquid level sensor and the third liquid level sensor fail, the semiconductor process can be kept running normally, prompting maintenance personnel to check as soon as possible; when it is determined that the first liquid level sensor or the fourth liquid level sensor fails, the semiconductor process needs to be stopped immediately. After the fault is eliminated and the liquid level reaches a safe height (that is, the liquid level is between the second liquid level sensor and the third liquid level sensor), the semiconductor process is restarted. Figure 4 The overall architecture diagram of the semiconductor process control system provided by the present invention can be referred to Figure 4 As shown, the present invention integrates a sensor fault detection system into the controller, obtains the trigger signals of the cooling water tank flow meter and four liquid level sensors in real time, and then performs fault detection on the liquid level sensors. At the same time, the relevant data is sent to the data association system (which is mainly used to manage data in semiconductor processes) through the communication bus. Based on the fault detection results, corresponding sound and light alarm information and control instructions for the cold water tank are generated (for example, adjusting the water pump power, the control parameters of the water inlet valve or the drain valve, etc.).

[0104] The present invention provides a sensor fault detection system, which uses the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust treatment device, and adopts the corresponding preset liquid level signal judgment information and preset fault detection conditions to judge the fault of the liquid level sensors at different installation positions, thereby effectively and accurately detecting the fault conditions of the liquid level sensors, thereby improving the stability and safety of the semiconductor exhaust treatment device.

[0105] The system provided by the present invention is used to execute the above-mentioned method embodiments. Please refer to the above-mentioned embodiments for the specific processes and detailed contents, which will not be repeated here.

[0106] Figure 5 A schematic diagram of the structure of the electronic device provided by the present invention, such as Figure 5As shown, the electronic device may include: a processor (Processor) 501, a communication interface (Communications Interface) 502, a memory (Memory) 503, and a communication bus 504, wherein the processor 501, the communication interface 502, and the memory 503 communicate with each other via the communication bus 504. The processor 501 may call the logic instructions in the memory 503 to execute a sensor fault detection method, which includes: obtaining preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor based on the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device; based on different types of the preset fault detection conditions, collecting the trigger signal generated by the corresponding liquid level sensor; and determining the fault detection result of each liquid level sensor based on the collection result of the trigger signal and the preset liquid level signal judgment information.

[0107] In addition, the logic instructions in the above-mentioned memory 503 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when sold or used as an independent product. Based on this understanding, the technical solution of the present invention, or the part that contributes to the prior art, or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0108] On the other hand, the present invention also provides a computer program product, which includes a computer program stored on a non-transitory computer-readable storage medium, and the computer program includes program instructions. When the program instructions are executed by a computer, the computer can execute the sensor fault detection method provided by the above methods, and the method includes: according to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor waste gas treatment device, obtaining the preset liquid level signal judgment information and preset fault detection conditions corresponding to each of the liquid level sensors; based on different types of the preset fault detection conditions, collecting the trigger signal generated by the corresponding liquid level sensor; and determining the fault detection result of each of the liquid level sensors according to the collection result of the trigger signal and the preset liquid level signal judgment information.

[0109] On the other hand, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, it is implemented to execute the sensor fault detection method provided in the above-mentioned embodiments, the method comprising: obtaining preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor waste gas treatment device; based on different types of preset fault detection conditions, collecting the trigger signal generated by the corresponding liquid level sensor; and determining the fault detection result of each liquid level sensor according to the collection result of the trigger signal and the preset liquid level signal judgment information.

[0110] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, i.e., they may be located in one location or distributed across multiple network units. Some or all of the modules may be selected based on actual needs to achieve the objectives of the present embodiment. Persons of ordinary skill in the art will be able to understand and implement the present invention without inventive effort.

[0111] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, or of course, by hardware. Based on this understanding, the essence of the above technical solution or the part that contributes to the existing technology can be embodied in the form of a software product. The computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a magnetic disk, an optical disk, etc., and includes a number of instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or certain parts of the embodiments.

[0112] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A sensor fault detection method, characterized in that: include: According to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device, the preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor are obtained; Based on different types of preset fault detection conditions, collecting the corresponding trigger signal generated by the liquid level sensor; Determining the fault detection results of each of the liquid level sensors according to the acquisition results of the trigger signal and the preset liquid level signal judgment information; The liquid level sensors in the cooling water tank are arranged from low to high according to the liquid level detection height in the installation position information, namely, the first liquid level sensor, the second liquid level sensor, the third liquid level sensor and the fourth liquid level sensor; Wherein, when the liquid level detection function of the liquid level sensor is normal, when the liquid level height in the cooling water tank reaches the height of the sensing area of ​​the third liquid level sensor, the cooling water tank starts to drain, and after the liquid level height in the cooling water tank is lower than the height of the sensing area of ​​the second liquid level sensor, the cooling water tank stops draining and starts to take in water until the liquid level height in the cooling water tank reaches the height of the sensing area of ​​the third liquid level sensor again; The method of obtaining preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to the installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device includes: If the liquid level sensor is the first liquid level sensor, the determination time when the second liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the first liquid level sensor to obtain a first preset fault detection condition; obtaining first preset liquid level signal determination information based on height difference information between the third liquid level sensor and the first liquid level sensor, wherein the first preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to drain the cooling water in the cooling water tank from the liquid level height of the third liquid level sensor to the liquid level height of the first liquid level sensor under normal circumstances; If the liquid level sensor is the second liquid level sensor, during the drainage process of the cooling water tank, the moment when the trigger signal of the second liquid level sensor disappears is used as the preset fault detection condition of the second liquid level sensor to obtain the second preset fault detection condition; obtaining second preset liquid level signal judgment information based on the height difference between the liquid level at which drainage of the cooling water tank stops and the height of the sensing area of ​​the second liquid level sensor, wherein the second preset liquid level signal judgment information is the time required for the liquid level detection function of the liquid level sensor to flow the cooling water in the cooling water tank from the liquid level at which drainage of the cooling water tank stops to the height of the sensing area of ​​the second liquid level sensor under normal circumstances; If the liquid level sensor is the third liquid level sensor, the moment when the cooling water tank stops draining water is used as the preset fault detection condition of the third liquid level sensor to obtain a third preset fault detection condition; obtaining third preset liquid level signal determination information based on height difference information between the second liquid level sensor and the third liquid level sensor in the cooling water tank, wherein the third preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to flow cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the third liquid level sensor under normal circumstances; If the liquid level sensor is the fourth liquid level sensor, the determination time when the third liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the fourth liquid level sensor to obtain a fourth preset fault detection condition; Obtaining fourth preset liquid level signal determination information based on height difference information between the second liquid level sensor and the fourth liquid level sensor, wherein the fourth preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to flow cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the fourth liquid level sensor under normal circumstances; The collecting of the trigger signal generated by the corresponding liquid level sensor based on the preset fault detection conditions of different types includes: When any one of the first preset fault detection condition, the second preset fault detection condition, the third preset fault detection condition and the fourth preset fault detection condition is met, a trigger signal generated by the corresponding liquid level sensor is collected.

2. The sensor fault detection method according to claim 1, characterized in that: Determining the fault detection result of each of the liquid level sensors according to the acquisition result of the trigger signal and the preset liquid level signal judgment information includes: When it is determined that the first preset fault detection condition is met at the current moment, if the trigger signal generated by the first liquid level sensor is not obtained within the time period corresponding to the first preset liquid level signal judgment information, it is determined that the first liquid level sensor has a fault; When it is determined that the second preset fault detection condition is met at the current moment, if the trigger signal generated by the second liquid level sensor is not obtained within the time period corresponding to the second preset liquid level signal judgment information, it is determined that the second liquid level sensor has a fault; When it is determined that the third preset fault detection condition is met at the current moment, if the trigger signal generated by the third liquid level sensor is not obtained within the time period corresponding to the third preset liquid level signal judgment information, it is determined that the third liquid level sensor has a fault; When it is determined that the fourth preset fault detection condition is met at the current moment, if the trigger signal generated by the fourth liquid level sensor is not obtained within the time period corresponding to the fourth preset liquid level signal judgment information, it is determined that the fourth liquid level sensor has a fault.

3. The sensor fault detection method according to claim 1, characterized in that: The method further comprises: According to each preset fault tolerance margin, adjusting the duration of the corresponding preset liquid level signal judgment information to obtain adjusted preset liquid level signal judgment information, wherein the preset fault tolerance margin is determined based on the installation position information of the liquid level sensor; Determining the fault detection results of each of the liquid level sensors according to the acquisition results of the trigger signal and the preset liquid level signal judgment information, including: The fault detection result of each of the liquid level sensors is determined according to the acquisition result of the trigger signal and the judgment information of each of the adjusted preset liquid level signals.

4. The sensor fault detection method according to any one of claims 1 to 3, characterized in that: After determining the fault detection results of the respective liquid level sensors based on the acquisition results of the trigger signal and the preset liquid level signal judgment information, the method further includes: According to the fault detection result, corresponding sensor fault display content and sound and light alarm information are generated.

5. A sensor fault detection system, characterized in that: include: A processing module, configured to obtain preset liquid level signal judgment information and preset fault detection conditions corresponding to each liquid level sensor according to installation position information of each liquid level sensor in the cooling water tank of the semiconductor exhaust gas treatment device; A sensor signal acquisition module, configured to acquire trigger signals generated by the corresponding liquid level sensors based on different types of preset fault detection conditions; a fault detection module, configured to determine a fault detection result of each of the liquid level sensors based on the acquisition result of the trigger signal and the preset liquid level signal judgment information; The liquid level sensors in the cooling water tank are arranged from low to high according to the liquid level detection height in the installation position information, namely, the first liquid level sensor, the second liquid level sensor, the third liquid level sensor and the fourth liquid level sensor; Wherein, when the liquid level detection function of the liquid level sensor is normal, when the liquid level height in the cooling water tank reaches the height of the sensing area of ​​the third liquid level sensor, the cooling water tank starts to drain, and after the liquid level height in the cooling water tank is lower than the height of the sensing area of ​​the second liquid level sensor, the cooling water tank stops draining and starts to take in water until the liquid level height in the cooling water tank reaches the height of the sensing area of ​​the third liquid level sensor again; The processing module is specifically used for: If the liquid level sensor is the first liquid level sensor, the determination time when the second liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the first liquid level sensor to obtain a first preset fault detection condition; obtaining first preset liquid level signal determination information based on height difference information between the third liquid level sensor and the first liquid level sensor, wherein the first preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to drain the cooling water in the cooling water tank from the liquid level height of the third liquid level sensor to the liquid level height of the first liquid level sensor under normal circumstances; If the liquid level sensor is the second liquid level sensor, during the drainage process of the cooling water tank, the moment when the trigger signal of the second liquid level sensor disappears is used as the preset fault detection condition of the second liquid level sensor to obtain the second preset fault detection condition; obtaining second preset liquid level signal judgment information based on the height difference between the liquid level at which drainage of the cooling water tank stops and the height of the sensing area of ​​the second liquid level sensor, wherein the second preset liquid level signal judgment information is the time required for the liquid level detection function of the liquid level sensor to flow the cooling water in the cooling water tank from the liquid level at which drainage of the cooling water tank stops to the height of the sensing area of ​​the second liquid level sensor under normal circumstances; If the liquid level sensor is the third liquid level sensor, the moment when the cooling water tank stops draining water is used as the preset fault detection condition of the third liquid level sensor to obtain a third preset fault detection condition; obtaining third preset liquid level signal determination information based on height difference information between the second liquid level sensor and the third liquid level sensor in the cooling water tank, wherein the third preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to flow cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the third liquid level sensor under normal circumstances; If the liquid level sensor is the fourth liquid level sensor, the determination time when the third liquid level sensor is determined to be in a fault state is used as the preset fault detection condition of the fourth liquid level sensor to obtain a fourth preset fault detection condition; Obtaining fourth preset liquid level signal determination information based on height difference information between the second liquid level sensor and the fourth liquid level sensor, wherein the fourth preset liquid level signal determination information is the time required for the liquid level detection function of the liquid level sensor to flow cooling water in the cooling water tank from the liquid level height of the second liquid level sensor to the liquid level height of the fourth liquid level sensor under normal circumstances; The collecting of the trigger signal generated by the corresponding liquid level sensor based on the preset fault detection conditions of different types includes: When any one of the first preset fault detection condition, the second preset fault detection condition, the third preset fault detection condition and the fourth preset fault detection condition is met, a trigger signal generated by the corresponding liquid level sensor is collected.

6. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein: When the processor executes the computer program, the sensor fault detection method according to any one of claims 1 to 4 is implemented.

7. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the sensor fault detection method according to any one of claims 1 to 4 is implemented.

8. A computer program product comprising a computer program, characterized in that When the computer program is executed by a processor, the sensor fault detection method according to any one of claims 1 to 4 is implemented.

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