A processing method for a micro-structural component

Abstract

The present invention relates to a processing method for micro-structural components. The maximum size of the micro-structural components does not exceed 5 mm; the processing method includes: (1) placing workpieces to be processed of a plurality of micro-structural components in holes of a tooling bracket having array holes, and filling the gaps between the workpieces to be processed and the holes with an adhesive; (2) then placing them in a precision engraving machine, and realizing batch processing of the micro-structural components through the precise positioning function of the precision engraving machine; (3) finally, cleaning the adhesive with a solvent to obtain the micro-structural components.

Description

Technical Field

[0001] The present invention relates to a processing method for micro-structural components, belonging to the field of processing. Background Art

[0002] In the existing microfabrication technologies, the size and precision of mechanical microfabrication are restricted by factors such as machine tool precision, tool size, and system precision, and it is difficult to meet the requirements for processing even smaller sizes.

[0003] Moreover, the existing microfabrication technologies generally focus on the processing of individual structural components and it is difficult to achieve mass production. In particular, in many fields such as microwave communication and fiber optic connectors, the processing of micro-structural devices such as functional ceramics and quartz glass with micro-structures is required. Especially during the research and development process, processing is needed during the small-batch verification process. Due to the small size of the devices, there are many problems in clamping and measurement during processing. The present invention is to solve the above processing problems. Summary of the Invention

[0004] In a first aspect, the present invention provides a processing method for micro-structural components, where the maximum size of the micro-structural components does not exceed 5 mm; the micro-structural components are micro-workpieces whose outer shape does not need to be processed and only the internal structure needs to be processed;

[0005] The processing method includes:

[0006] (1) Place the workpieces to be processed of multiple micro-structural components into the holes of a tooling bracket with array holes, and use an adhesive to fill the gaps between the workpieces to be processed and the holes;

[0007] (2) Then place it in a precision engraving machine, and through the precise positioning function of the precision engraving machine, achieve batch processing of micro-structural components;

[0008] (3) Finally, clean the adhesive with a solvent to obtain the micro-structural components.

[0009] Preferably, the cross-sectional shape of the workpiece to be processed of the micro-structural component is the same as the cross-sectional shape of each hole in the tooling bracket.

[0010] Preferably, the cross-sectional shape of the workpiece to be processed is circular, rectangular, square, triangular, or hexagonal.

[0011] Preferably, the cross-sectional size of the workpiece to be processed ≤ 5 mm, the cross-sectional size of the hole ≤ 5 mm; 0 ≤ the difference between the cross-sectional size of the hole and the cross-sectional size of the workpiece to be processed ≤ 0.02 mm.

[0012] Preferably, the height of the tooling bracket is the same as that of the processed workpiece.

[0013] Preferably, the adhesive is a solid wax adhesive or 502 glue; the solvent is acetone or gasoline.

[0014] Preferably, the material of the tooling bracket is selected from glass, ceramics (machinable ceramics, such as alumina, aluminum nitride, etc.), or graphite, etc.

[0015] Preferably, the material of the workpiece to be processed of the micro-structural component is selected from fused quartz or various ceramics (such as dielectric ceramics), etc. The micro-structural component is a micro-workpiece whose outer shape does not need to be processed and only the internal structure needs to be processed.

[0016] In a second aspect, the present invention provides a method for processing a micro-structural component, and the maximum size of the micro-structural component does not exceed 5 mm;

[0017] The processing method includes:

[0018] (1) First, fix the block to be processed in a precision engraving machine, and use precision engraving technology to achieve the hollowing preparation of the micro-structural component; wherein, 0 < the difference between the height of the block to be processed and the height of the micro-structural component ≤ 5 mm;

[0019] (2) Fill the pores between the micro-structural component and the block to be processed with a binder, and then through grinding and solvent immersion, achieve the batch preparation of the micro-structural component.

[0020] Preferably, the micro-structural component is a micro-workpiece that needs to process the internal and / or external structure.

[0021] Preferably, the binder is a solid wax binder, 502 glue, etc.

[0022] Preferably, the solvent is acetone, solvent gasoline.

[0023] Preferably, the material of the block to be processed of the micro-structural component is selected from fused quartz, various ceramics (such as alumina, aluminum nitride, etc.), etc.; the micro-structural component is a micro-workpiece with small batch production and high-precision processing requirements; the micro-structural component is a micro-workpiece that needs to process the internal and / or external structure.

[0024] Preferably, the equipment used for the precision engraving technology is a numerically controlled three-axis precision engraving machine.

[0025] Beneficial effects:

[0026] The method of the present invention is simple and can achieve the batch preparation of micro-structural components. Both methods can realize the small batch production of most micro-structural workpieces and achieve relatively high processing precision. Description of the Drawings

[0027] Figure 1 It is a structural diagram of the workpiece to be processed of the micro-structural component in Embodiment 1;

[0028] Figure 2Schematic diagram of the processing of the micro-structural component in Embodiment 1;

[0029] Figure 3 Schematic diagram of the processing of the micro-structural component in Embodiment 2. Specific implementation manners

[0030] The present invention will be further described below by the following implementation manners. It should be understood that the following implementation manners are only used to illustrate the present invention and do not limit the present invention.

[0031] The processing method of the micro-structural component in the present invention will be exemplarily described below.

[0032] Place the workpieces to be processed of multiple micro-structural components into the holes of a tooling bracket with array holes, and then place them in a precision engraving machine. Through precision engraving technology, batch processing of the micro-structural components is realized.

[0033] First, fix the block to be processed in a precision engraving machine, and adopt precision engraving technology to realize the hollow preparation of the micro-structural component. During the engraving process, it should be ensured that there is no penetration between the micro-structural component and the block to be processed, and it should be ensured that 0 mm < the difference between the height of the block to be processed and the height of the micro-structural component ≤ 2 mm. In order not to affect the design dimensions of the micro-structural component during the subsequent grinding process, it should be ensured that 0.5 mm ≤ the difference between the processing depth and the design height of the micro-structural component ≤ 1 mm (the cutting depth is 0.5 mm to 1 mm more than the height of the workpiece). Then, use an adhesive to fill the pores between the micro-structural component and the block to be processed, and then through grinding and solvent immersion, batch preparation of the micro-structural component is realized.

[0034] Examples will be further given below to illustrate the present invention in detail. Similarly, it should be understood that the following examples are only used to further illustrate the present invention and cannot be construed as limiting the protection scope of the present invention. Those skilled in the art's non-essential improvements and adjustments made based on the above content of the present invention all fall within the protection scope of the present invention. The specific process parameters and the like in the following examples are also only an example within a suitable range, that is, those skilled in the art can make selections within a suitable range through the description in this article, rather than being limited to the specific values in the following examples.

[0035] Embodiment 1

[0036] (1) Refer to Figure 1 , the workpiece to be processed of the micro-structural component (made of quartz glass) is a solid cylinder with a diameter of 2.8 mm and a height of 3.5 mm, and an internal structure needs to be processed. The internal structure is a stepped hole with an inner diameter of 1.8 mm and 1.0 mm, and the total height is 3.5 mm;

[0037] (2) Place the workpieces of multiple micro-structural components to be processed into the holes of a tooling bracket (made of machinable ceramic) with array holes (circular in shape, 2.82 mm in diameter, and 3.5 mm in height), and then place them in a precision engraving machine. Through precision engraving technology, the processing of micro-structural components is achieved;

[0038] (3) The parameters of the precision engraving technology include:

[0039] First, use a precision engraving machine to process tooling through holes (as shown in Figure 2 ) on a 3.5-mm-thick machinable ceramic (the depth of the hole is also 3.5 mm). Then, bond a solid workpiece with a diameter of 2.8 mm and a height of 3.5 mm in the just-processed hole with solid wax, so that the workpiece and the tooling are aligned and integrated in the height direction;

[0040] Then, use the positioning function of the precision engraving machine to find the processing center point of the workpiece, and then process the interior of each workpiece;

[0041] (4) After processing, melt the solid wax with a heating platform, take out the workpiece, and clean the workpiece with solvent gasoline, thus completing the processing of the workpiece shown in the above figure;

[0042] (5) This method is applicable to micro-workpieces whose outer shapes do not need to be processed and only the internal structures need to be processed.

[0043] Example 2

[0044] (1) Set the cross-sectional shape of the required micro-structural component to be annular, with an outer diameter of 3 mm, an inner diameter of 2.4 mm, and a height of 5 mm;

[0045] (2) First, fix the block to be processed (7 mm thick) in a precision engraving machine, and adopt precision engraving technology to achieve the hollow preparation of micro-structural components. The parameters of the precision engraving technology include: as shown in the following figure, first use a precision engraving machine to engrave the contour of the workpiece on the block to be processed, and its processing depth is Φ6 mm (greater than the 5-mm height dimension of the workpiece and less than the 7-mm thickness of the block), ensuring that the processed workpiece is connected to the block;

[0046] (3) Then, fill the carved void part with 502 glue to re-form a block, then invert the block, and bond the processing surface to a parallel loading plate, and grind the block from the back with a surface grinder to a thickness of 5 mm;

[0047] (4) Then soak the block in acetone to make the workpiece automatically separate, thus completing the processing of the micro-workpiece;

[0048] (5) This method is applicable to micro-workpieces with small batch and high-precision processing requirements.

Claims

1. A processing method for a micro-structural component, characterized in that, The maximum size of the micro-structural component does not exceed 5 mm, and the micro-structural component is a micro-structural component with an annular cross-sectional shape; The processing method includes: (1) First, fix the block to be processed of the micro-structural component in a precision engraving machine, and use precision engraving technology to achieve the hollow preparation of the micro-structural component; wherein, 0 mm < the difference between the height of the block to be processed and the height of the micro-structural component ≤ 2 mm; to ensure the connection between the processed workpiece and the block; (2) Control 0.5 mm ≤ the difference between the processing depth and the designed height of the micro-structural component ≤ 1 mm to ensure that the designed dimensions of the micro-structural component are not affected during subsequent polishing. Fill the pores between the micro-structural component and the block to be processed with an adhesive, then invert the filled block, polish the block from the back to the required thickness of the micro-structural component, and finally soak and clean the adhesive with a solvent to achieve the batch preparation of the micro-structural component.

2. The processing method according to claim 1, characterized in that, The adhesive is a solid wax adhesive or 502 glue; the solvent is acetone or gasoline.

3. The processing method according to claim 1, characterized in that, The material of the block to be processed of the micro-structural component is selected from quartz glass or ceramic.

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