Electromechanical combined control of acoustic levitation device of multi-dimensional rotating ultrasonic phased array

Abstract

The application discloses a kind of multi-dimensional rotation ultrasonic phased array electromechanical combined control acoustic levitation device, belong to acoustic levitation technical field, including two-dimensional rotating device, three-dimensional space movement control platform, ultrasonic phased array, single-chip module, field programmable logic gate array module, ultrasonic vibration element driving circuit module and motor driving circuit module;Single-chip module, field programmable logic gate array module, ultrasonic vibration element driving circuit module and motor driving circuit module calculate and issue the square wave signal of multiple drive ultrasonic vibration element and the control signal of multiple drive two-dimensional rotating device and three-dimensional space movement control platform, realize the control of the amplitude and phase of the sound wave generated by each ultrasonic vibration element in multiple ultrasonic phased arrays, control the two-dimensional angle and three-dimensional space position of each ultrasonic phased array simultaneously, multivariable collaborative control, greatly improve the control area of ultrasonic phased array, realize the non-contact pickup, transmission and fusion etc. operation of micro object in space.

Description

Technical Field

[0001] This invention relates to an acoustic levitation device with electromechanical combined control of a multi-two-dimensional rotating ultrasonic phased array, belonging to the field of acoustic levitation technology. Background Technology

[0002] The principle of acoustic levitation technology is to use sound radiation force to counteract the effects of gravity, thereby suspending objects in air or liquid. It utilizes sound radiation force to create sound fields such as standing waves in space, suspending tiny objects non-contactly.

[0003] Currently, most acoustic levitation devices in the field of acoustic levitation are based on fixed ultrasonic phased arrays, that is, the arrays remain in a fixed position in space. Specifically, a single ultrasonic phased array is placed flat on a horizontal platform, or several ultrasonic phased arrays form a certain spatial geometric relationship in space (e.g., two ultrasonic phased arrays are placed opposite each other in the vertical direction).

[0004] Fixed acoustic levitation devices have drawbacks such as limited control area, poor flexibility, and poor portability, which cannot meet the needs of some application scenarios that require high degree of control flexibility. For example, in wafer fabs, non-contact control of some precise micro-components is required, which often requires a wide range of highly flexible control capabilities, but most current devices lack such capabilities.

[0005] The control area of ​​a fixed ultrasonic levitation array is limited, primarily due to the limitation of the spatial pointing angle of the ultrasonic elements. Specifically, the ultrasonic waves generated by the ultrasonic elements cannot be uniformly emitted in a ±90-degree direction; the maximum boundary range is approximately ±50 degrees from the normal vector of the ultrasonic element's center. Furthermore, as the angle with the center normal vector increases, the amplitude of the ultrasonic wave continuously decreases. Additionally, the energy of the ultrasonic wave decreases continuously during propagation; the farther away from the ultrasonic element, the lower the energy, and consequently, the less energy is available to levitate an object. In summary, due to the limitation of the spatial pointing angle of the ultrasonic elements, and the continuous decrease in the energy and amplitude of the ultrasonic waves with increasing angle with the normal vector of the ultrasonic element, the fixed ultrasonic phased array levitation device, because of the fixed spatial position of the phased array, has a limited sound field focusing area. It can only control levitated objects within a certain area oriented by the ultrasonic phased array.

[0006] Furthermore, current fixed ultrasonic levitation arrays cannot meet the needs of some scenarios requiring high maneuverability. In some scenarios, such as the non-contact manipulation of objects using acoustic levitation technology to pick up, transfer, and release objects from a smooth surface, current fixed levitation arrays cannot achieve these functions.

[0007] In existing technologies, the proposed technique of "one robotic arm carrying one ultrasonic phased array" can meet the needs of some scenarios with low flexibility in order to expand the control range of the levitation array. However, it still has some limitations and cannot meet the requirements for high flexibility. For example, in the scenario of picking up small objects on a smooth plane, the device of "one robotic arm carrying one ultrasonic phased array" requires special control algorithm design to control the single ultrasonic phased array in order to pick up the object. Summary of the Invention

[0008] The purpose of this invention is to address the limitations of current ultrasonic arrays applied in the field of acoustic levitation, such as fixed spatial positions leading to restricted controlled areas, poor flexibility, and poor portability. Furthermore, current solutions combining mechanical devices with ultrasonic phased arrays suffer from monotonous control methods due to the unchanging relative positions of the arrays. This invention proposes an acoustic levitation device with electromechanical joint control of multiple two-dimensional rotating ultrasonic phased arrays. An ultrasonic phased array is mounted on a two-dimensional rotating device to form a two-dimensional rotation-controllable ultrasonic phased array unit. Multiple such units are then mounted on multiple three-dimensional spatial motion control platforms, in a one-to-one correspondence. A microcontroller module enables real-time control of the two-dimensional rotation angles and three-dimensional spatial positions of the multiple ultrasonic phased arrays. The proposed acoustic levitation device can achieve joint control of the three-dimensional coordinates, two-dimensional rotation angles, and amplitude and phase of each ultrasonic element of the ultrasonic phased array, realizing multi-variable joint control. This allows for complex electromechanical joint motion control, significantly improving the control area and operational flexibility of the acoustic levitation device.

[0009] The technical solution adopted by the present invention to achieve the above objectives is: an acoustic levitation device with electromechanical joint control of multiple two-dimensional rotating ultrasonic phased arrays, including a two-dimensional rotating device, a three-dimensional spatial motion control platform, an ultrasonic phased array, a microcontroller module, a field-programmable gate array module, an ultrasonic vibrator drive circuit module, a motor drive circuit module, and a power supply module. The number of ultrasonic phased arrays, two-dimensional rotating devices, and three-dimensional spatial motion control platforms is at least two, and the number of ultrasonic phased arrays, two-dimensional rotating devices, and three-dimensional spatial motion control platforms is the same and corresponds one-to-one. The ultrasonic phased array is installed on the two-dimensional rotating device to form a two-dimensional rotation angle controllable ultrasonic phased array unit. The two-dimensional rotation angle controllable ultrasonic phased array unit is installed on the three-dimensional spatial motion control platform to form a two-dimensional rotation angle controllable and three-dimensional spatial position controllable ultrasonic phased array module.

[0010] The output of the microcontroller module is connected to the input of the field-programmable gate array module and the motor drive circuit module, respectively; the output of the field-programmable gate array module is connected to the input of the ultrasonic vibration element drive circuit module; the output of the ultrasonic vibration element drive circuit module is connected to the ultrasonic vibration element in the ultrasonic phased array; the output of the motor drive circuit module is connected to the motor control port of the two-dimensional rotating device and the three-dimensional spatial motion control platform, respectively.

[0011] The microcontroller module calculates the phase and amplitude information of multiple square wave signals based on the two-dimensional rotation angle and three-dimensional spatial position of the ultrasonic phased array, and sends the information to the field-programmable gate array (FPGA) module. The FPGA module receives the information sent by the microcontroller module, parses the phase and amplitude information of the multiple square wave signals based on the received information, and then synchronously sends the phase and amplitude information of each square wave signal to the corresponding circuit in the FPGA module to generate each square wave signal, thereby generating multiple square wave signals. Each square wave signal carries corresponding phase and amplitude information. Subsequently, the multiple square wave signals are amplified by the ultrasonic vibrator drive circuit module and input into each ultrasonic vibrator of the electromechanically controlled acoustic levitation device of the multi-two-dimensional rotating ultrasonic phased array. At the same time, the microcontroller module sends a signal to the motor drive circuit module to control the movement of the motor. The motor drive circuit module responds to the signal to control the movement of the motor and amplifies and outputs it to drive and control the motors in the two-dimensional rotating device and the three-dimensional spatial motion control platform, thereby controlling the movement of the two-dimensional rotating device and the three-dimensional spatial motion control platform.

[0012] The ultrasonic vibrating element driving circuit module consists of multiple driving chips used to drive the ultrasonic vibrating element. The multiple driving chips are in parallel and do not interfere with each other. Each driving chip is used to amplify the square wave signal corresponding to it.

[0013] The motor drive circuit module consists of multiple motor drive chips used to drive the motor. The multiple motor drive chips are in parallel and do not interfere with each other. Each motor drive chip is used to amplify the signal sent by the microcontroller module to control the movement of the motor.

[0014] Connect the ground wires of all ultrasonic elements in all ultrasonic phased arrays together, and then connect them to the ground wire of the power module. Connect the control terminal of each ultrasonic element in all ultrasonic phased arrays to the output terminal of the ultrasonic element drive circuit module for issuing drive control signals.

[0015] The power supply module is used to supply power to the microcontroller module, the field-programmable gate array module, the ultrasonic vibration element drive circuit module, and the motor drive circuit module, respectively.

[0016] As a preferred embodiment of the present invention, the two-dimensional rotating device is selected from a servo motor, a DC motor, an AC motor, or a stepper motor.

[0017] As a preferred embodiment of the present invention, the three-dimensional spatial motion control platform is selected from a three-dimensional slide table or a robotic arm.

[0018] As a preferred embodiment of the present invention, the driving chip used to drive the ultrasonic vibrator is selected from the TC4427 chip, the MIC4127 chip, or the L298N chip.

[0019] As a preferred embodiment of the present invention, the motor drive chip used to drive the motor is selected from L298N chip and A4954 chip.

[0020] Furthermore, the power supply module is used to generate +5V, +12V, and +15V DC voltages. The +5V DC voltage terminal of the power supply module is connected to the power supply terminals of the microcontroller module and the field-programmable gate array module, respectively. The +12V DC voltage terminal of the power supply module is connected to the power supply terminal of the ultrasonic vibration element drive circuit module. The +15V DC voltage terminal of the power supply module is connected to the power supply terminal of the motor drive circuit module.

[0021] Through the above design scheme, the present invention can bring the following beneficial effects: The electromechanical joint control acoustic levitation device of the multi-two-dimensional rotating ultrasonic phased array proposed in the present invention first fixes the ultrasonic phased array to a two-dimensional rotating device that can control its rotation in two-dimensional space, and controls the ultrasonic phased array to rotate in two-dimensional space; then, multiple sets of ultrasonic phased array units with controllable two-dimensional rotation angles are respectively installed on multiple sets of three-dimensional motion control platforms that control their three-dimensional spatial positions, that is, the two-dimensional rotation angles and three-dimensional spatial positions of multiple ultrasonic phased arrays in space can be controlled. The microcontroller module, field-programmable gate array module, and ultrasonic element drive circuit module emit multiple square wave signals to drive the ultrasonic elements, enabling control of the amplitude and phase of the sound waves generated by each ultrasonic element in multiple ultrasonic phased arrays. The microcontroller module and motor drive circuit module emit multiple control signals to control multiple motors in multiple two-dimensional rotating devices and multiple three-dimensional spatial motion control platforms, enabling real-time control of the two-dimensional rotation angle and three-dimensional spatial position of the ultrasonic phased array. The microcontroller module jointly controls the two-dimensional rotation angle, three-dimensional spatial position, and amplitude and phase of the sound waves generated by each ultrasonic element of the ultrasonic phased array, enabling flexible non-contact pickup, transmission, and fusion of small objects in space, avoiding the shortcomings of traditional fixed acoustic levitation devices.

[0022] In summary, the acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array proposed in this invention has the following advantages:

[0023] (1) The ultrasonic phased array is installed on a two-dimensional rotating device and a three-dimensional spatial motion control platform to form a set of ultrasonic phased array modules with controllable two-dimensional rotation angle and controllable three-dimensional spatial position. Multiple sets of ultrasonic phased array modules with controllable two-dimensional rotation angle and controllable three-dimensional spatial position are jointly controlled, and the phase and amplitude of the sound waves generated by each ultrasonic element are controlled at the same time. Multi-variable joint control can greatly improve the control area of ​​the ultrasonic phased array.

[0024] (2) It can greatly improve the flexibility and portability of the device, and meet the needs of high flexibility and non-contact operation in complex environments. Attached Figure Description

[0025] Figure 1 A structural block diagram of an acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array;

[0026] Figure 2 This is a structural block diagram of the acoustic levitation device with electromechanical joint control of multiple two-dimensional rotating ultrasonic phased arrays in an embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of a planar ultrasonic phased array in an embodiment of the present invention;

[0028] Figure 4 This is a schematic diagram of a two-dimensional rotation-controllable ultrasonic phased array unit in an embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the combination of multiple sets of two-dimensional rotation-controllable ultrasonic phased array units and three-dimensional spatial motion control platform in an embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram showing the front view and controllable area of ​​a single-plane ultrasonic phased array in an embodiment of the present invention;

[0031] Figure 7 This is a schematic diagram of the focusing and levitation of a multi-planar ultrasonic phased array in an embodiment of the present invention;

[0032] Figure 8 This is a schematic diagram of multi-array collaborative levitation in an embodiment of the present invention;

[0033] In the diagram: 10 - ultrasonic vibrator, 20 - ultrasonic phased array support, 30 - suspended object. Detailed Implementation

[0034] To more clearly illustrate the present invention, the following description, in conjunction with preferred embodiments and accompanying drawings, further clarifies the invention. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of the invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains.

[0035] like Figures 1 to 8 As shown, the electromechanically controlled acoustic levitation device with multiple two-dimensional rotating ultrasonic phased arrays includes multiple two-dimensional rotating devices, multiple three-dimensional spatial motion control platforms, multiple ultrasonic phased arrays, a microcontroller module, a field-programmable gate array module, an ultrasonic vibrator drive circuit module, a motor drive circuit module, and a power supply module. The number of ultrasonic phased arrays, two-dimensional rotating devices, and three-dimensional spatial motion control platforms are the same and correspond one-to-one. It should be noted that in the description of this invention, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. The ultrasonic phased arrays are installed on the two-dimensional rotating devices to form two-dimensional rotation-controllable ultrasonic phased array units. The two-dimensional rotation-controllable ultrasonic phased array units are installed on the three-dimensional spatial motion control platforms to form two-dimensional rotation-controllable and three-dimensional spatial position-controllable ultrasonic phased array modules. The electromechanically controlled acoustic levitation device with multiple two-dimensional rotating ultrasonic phased arrays proposed in this invention is the result of the "Jilin University Graduate Student Innovation Fund Project", specifically the Jilin University 2022 Graduate Student Innovation Research Program Project, numbered 2022185.

[0036] The ultrasonic phased array, microcontroller module, field-programmable gate array module, ultrasonic vibrator drive circuit module, motor drive circuit module and power supply module all adopt modules that already exist in the prior art. As for each of the above devices or modules, the specific structure for realizing their respective functions already exists in the prior art. The protocols, software or programs involved in the operation of each device and / or module also already exist in the prior art, and are fully known to those skilled in the art.

[0037] The microcontroller module calculates the phase and amplitude information of multiple square wave signals based on the two-dimensional rotation angle and three-dimensional spatial position of the ultrasonic phased array to drive each ultrasonic element 10. The output of the microcontroller module is connected to the input port of the field-programmable gate array (FPGA) module. The FPGA module receives the information sent by the microcontroller module, parses the phase and amplitude information of the multiple square wave signals, and then synchronously sends the phase and amplitude information of each square wave signal to the corresponding circuit in the FPGA module to generate each square wave signal, thereby generating multiple square wave signals. Each square wave signal carries corresponding phase and amplitude information. Subsequently, the multiple square wave signals are amplified by the ultrasonic element driving circuit module, and the multiple square wave signals are then... The signal input is fed into each ultrasonic element 10 of the electromechanically controlled acoustic levitation device of the multi-two-dimensional rotating ultrasonic phased array. Some output ports of the microcontroller module are connected to the input terminals of the motor drive circuit module. The output terminals of the motor drive circuit module are connected to the motor control ports of multiple two-dimensional rotating devices and multiple three-dimensional spatial motion control platforms. The ultrasonic element drive circuit module is composed of multiple drive chips used to drive the ultrasonic element 10. The multiple drive chips are in parallel and do not interfere with each other. Each drive chip is used to amplify the corresponding square wave signal. The drive chips used to drive the ultrasonic element 10 include, but are not limited to: TC4427 chip, MIC4127 chip, L298N chip, etc.

[0038] The motor drive circuit module consists of multiple motor drive chips used to drive the motor. These multiple motor drive chips operate in parallel and do not interfere with each other. Each motor drive chip amplifies the signal sent by the microcontroller module that controls the movement of the motor. The motor drive chips used to drive the motor are selected from chips such as L298N and A4954.

[0039] like Figure 2 As shown, in this specific implementation case, the microcontroller module adopts the STM32ZET6 control module, the field-programmable gate array module adopts the Altera-CycloneIV-EP4CE6 module, the ultrasonic vibrator drive circuit module adopts the MIC4127 drive circuit module, and the motor drive circuit module adopts the L298N drive circuit module. However, it is not limited to these. The microcontroller module, the field-programmable gate array module, the ultrasonic vibrator drive circuit module, and the motor drive circuit module can adopt other models that can achieve their functions in the prior art.

[0040] The STM32ZET6 control module calculates and generates the phase and amplitude information of multiple square wave signals, and sends this information to the Altera-CycloneIV-EP4CE6 module. The Altera-CycloneIV-EP4CE6 module receives the information from the STM32ZET6 control module, parses it to obtain the phase and amplitude information of each square wave signal, and then synchronously updates the phase and amplitude information of each square wave signal to the corresponding circuit in the Altera-CycloneIV-EP4CE6 module, ensuring that each signal generates the corresponding phase and amplitude.

[0041] In a specific implementation case, a 40kHz square wave signal is used to send the multiple square wave signals generated by the Altera-CycloneIV-EP4CE6 module to the MIC4127 driver circuit module. Subsequently, the MIC4127 driver circuit module inputs the multiple square wave signals into each ultrasonic element 10 of the ultrasonic phased array.

[0042] Multiple output ports of the STM32ZET6 control module are first connected to the L298N driver circuit module, which in turn connects to the control terminals of the motors in multiple two-dimensional rotating devices. The signals from the STM32ZET6 control module to control the motor movement are amplified by the L298N driver circuit module and then sent to the control ports of the motors in the two-dimensional rotating devices, controlling their rotation in space. Other output ports of the STM32ZET6 control module are also connected to the L298N driver circuit module, which in turn connects to the control terminals of the motors in multiple three-dimensional motion control platforms. The signals from the STM32ZET6 control module to control the motor movement are amplified by the L298N driver circuit module and then sent to the control ports of the motors in the three-dimensional motion control platforms, thereby controlling the movement of the three-dimensional motion control platforms in space.

[0043] The power module is responsible for generating +5V, +12V, and +15V DC voltages. The +5V DC voltage terminal of the power module is connected to the power terminals of the STM32ZET6 control module and the Altera-CycloneIV-EP4CE6 module; the +12V DC voltage terminal of the power module is connected to the power terminal of the MIC4127 driver circuit module; and the +15V DC voltage terminal of the power module is connected to the power terminal of the L298N driver circuit module.

[0044] The MIC4127 driver circuit module is a circuit composed of multiple MIC4127 chips. Each MIC4127 chip is in parallel and does not interfere with each other. The input terminal of the MIC4127 driver circuit module is used to receive the multiple square wave signals generated by the Altera-CycloneIV-EP4CE6 module and amplify each square wave signal. The output terminal of the MIC4127 driver circuit module is connected to each ultrasonic element 10.

[0045] The L298N driver circuit module is a circuit composed of multiple L298N chips. Each L298N chip operates in parallel and does not interfere with the others. The STM32ZET6 control module generates multiple signals to control the motors. The STM32ZET6 control module connects to the control ports of motors in multiple two-dimensional rotating devices and multiple three-dimensional spatial motion platforms through the multiple L298N chips in the L298N driver circuit module. The L298N driver circuit module is used to amplify the signals controlling the motors.

[0046] The types of ultrasonic phased arrays used include, but are not limited to, planar arrays, concave arrays, and other ultrasonic phased arrays of arbitrary shapes. The electromechanical co-controlled acoustic levitation device of multiple two-dimensional rotating ultrasonic phased arrays employs multiple ultrasonic phased arrays. In the final electromechanical co-controlled acoustic levitation device of multiple two-dimensional rotating ultrasonic phased arrays, there can be any combination of multiple ultrasonic phased arrays of arbitrary shapes.

[0047] like Figures 3 to 8 As shown, in a specific implementation, multiple planar ultrasonic phased arrays are used as an example. Each planar ultrasonic phased array includes a planar ultrasonic phased array support 20 and multiple ultrasonic elements 10. Each ultrasonic element 10 is installed in the ultrasonic phased array support 20 and embedded in its surface.

[0048] The size and resonant frequency of each ultrasonic element 10 are not limited, but the size is generally 10mm or 16mm in diameter, and the resonant frequency is generally above 20kHz. An ultrasonic phased array uses ultrasonic elements 10 of the same size and resonant frequency. In a specific implementation, an ultrasonic element 10 with a diameter of 10mm and a resonant frequency of 40kHz is used, specifically model MA40S4S.

[0049] Connect the ground wires of all ultrasonic elements 10 in all ultrasonic phased arrays together, and then connect them to the ground wire of the power supply module. Connect the control terminal of each ultrasonic element 10 in all ultrasonic phased arrays to one output port of the MIC4127 driver circuit module, that is, the control terminal of each ultrasonic element 10 is connected to one square wave signal.

[0050] Multiple ultrasonic phased arrays, once assembled, are mounted onto multiple two-dimensional rotation devices that control their two-dimensional rotation. These two-dimensional rotation devices include, but are not limited to, servo motors, DC motors, AC motors, and stepper motors. In this specific embodiment, an MG90S servo motor is used. The two ends of the planar ultrasonic phased array are mounted to the output ends of the servo motor, allowing control of the servo motor's rotation to drive the planar ultrasonic phased array to rotate two-dimensionally in space. This enables operations such as forward rotation, reverse rotation, and setting a fixed rotation angle for the planar phased array, as shown in the attached diagram. Figure 4 As shown, multiple sets of two-dimensional rotation-controllable ultrasonic phased array units were finally constructed.

[0051] The connection between the ultrasonic phased array and the servo motor can be arbitrary. The central axis of the ultrasonic phased array can be used as the axis for controlling its rotation. Alternatively, any position can be chosen as the axis for connection to the servo motor. This connection allows control of the servo motor's rotation, thereby controlling the two-dimensional rotation of the ultrasonic phased array.

[0052] Multiple sets of two-dimensional (2D) angle-controllable ultrasonic phased array units were constructed. Each 2D angle-controllable ultrasonic phased array unit was installed onto a corresponding 3D spatial motion control platform. The 3D spatial motion control platform includes, but is not limited to, a 3D slide table and a robotic arm. The ultrasonic phased array was mounted on a 2D rotating device composed of servo motors. The base of one 2D angle-controllable ultrasonic phased array unit was mounted on the moving end of the 3D spatial motion control platform. In this specific implementation, the 3D spatial motion control platform is a 3D slide table, which is fixed to the moving end of the 3D slide table. By controlling the movement of the 3D slide table, the movement of the 2D angle-controllable ultrasonic phased array unit in 3D space is controlled, thereby controlling the 3D spatial position of the ultrasonic phased array. Multiple sets of "2D angle-controllable ultrasonic phased array unit + 3D spatial motion control platform" units were constructed, as detailed below. Figure 5 As shown.

[0053] The following is a brief description of the control method, using a front view of a planar ultrasonic phased array as an example to illustrate the control method.

[0054] like Figure 5 The diagram depicts a front view of a planar ultrasonic phased array, composed of an ultrasonic phased array support 20 and multiple ultrasonic elements 10. The outer fan-shaped region represents the controllable area of ​​the ultrasonic phased array. For a single ultrasonic phased array, the area beyond the dashed lines cannot stably suspend small objects. Therefore, to achieve stable levitation, the suspended particles need to be within the fan-shaped dashed line area. Furthermore, for a single ultrasonic phased array, the closer to the center line of the array, the greater the focused acoustic radiation force and the more stable the control. Figure 6As shown in the figure, the area enclosed by the dashed rectangle is the region with greater acoustic levitation force, in which more stable levitation can be achieved.

[0055] like Figure 7 As shown, the black dot represents the suspended object 30. Extending from a single ultrasonic phased array to multiple ultrasonic phased arrays, to obtain greater levitation force and a more stable levitation effect, this invention adjusts the spatial two-dimensional rotation angle of multiple ultrasonic phased arrays according to the real-time position of the suspended target. This ensures that the geometric center normal vector of each ultrasonic phased array tracks and points to the position of the suspended target in real time. By controlling the two-dimensional rotation angle of multiple ultrasonic phased arrays in real time according to the position of the suspended target, the focusing energy can be maximized at the physical level.

[0056] By setting the position of the focal point and utilizing the time difference in arrival at the target position of each ultrasonic element 10 on different ultrasonic phased arrays, focusing can be achieved at any target position in space based on the classic focusing algorithms known in the prior art, which can be used to suspend tiny objects.

[0057] The STM32ZET6 control module sends multiple square wave signals with different amplitudes and phases, along with control signals to the two-dimensional rotating device and the three-dimensional motion control platform, to control the positions of multiple ultrasonic phased arrays in three-dimensional space. It adjusts the two-dimensional rotation angle of each ultrasonic phased array in real time, forming an array shape that wraps around the target location. Figure 8 As shown.

[0058] The specific control methods for the electromechanical combined control of the acoustic levitation device using a multi-dimensional rotating ultrasonic phased array can be divided into the following three types:

[0059] 1. By controlling only the three-dimensional spatial motion control platform, the three-dimensional spatial position of each ultrasonic phased array can be controlled. By jointly controlling multiple ultrasonic phased arrays, the suspended target can move over a wide range in space.

[0060] 2. By controlling only the two-dimensional rotation device of each ultrasonic phased array, the rotation angle and attitude control of multiple ultrasonic phased arrays can be realized, enabling small-range, high-precision control within a certain space.

[0061] 3. By controlling only the amplitude and phase of each ultrasonic element 10, high-precision control within a certain range can be achieved.

[0062] By combining the three methods 1, 2, and 3 in pairs, a wide range of high-precision control can be achieved. By combining the three methods 1, 2, and 3 in combination, a wide range of high-precision motion control can be achieved.

[0063] The method proposed in this invention organically integrates and consolidates the above-mentioned devices into a whole. It should be emphasized that, as for each individual device, the specific structure for realizing its respective function already exists in the prior art, and the protocols, software or programs involved in the operation of each device also already exist in the prior art, which are well known to those skilled in the art.

[0064] The electromechanically controlled acoustic levitation device based on multiple two-dimensional rotating ultrasonic phased arrays proposed in this invention first fixes the ultrasonic phased array onto a two-dimensional rotating device that can control its rotation in two-dimensional space, forming a two-dimensional rotation-controllable ultrasonic phased array unit. Then, this two-dimensional rotation-controllable ultrasonic phased array unit is installed on a three-dimensional motion control platform, forming a set of ultrasonic phased array modules with controllable two-dimensional rotation angles and three-dimensional spatial positions. The electromechanically controlled acoustic levitation device based on multiple two-dimensional rotating ultrasonic phased array modules with controllable two-dimensional rotation angles and three-dimensional spatial positions consists of multiple sets of ultrasonic phased array modules with controllable two-dimensional rotation angles and three-dimensional spatial positions, a microcontroller module, a field-programmable gate array module, an ultrasonic vibrator drive circuit module, and a motor drive circuit module. The microcontroller module, field-programmable gate array module, ultrasonic element drive circuit module, and motor drive circuit module calculate and send square wave signals to generate multiple driving ultrasonic elements 10, as well as control signals to drive the two-dimensional rotating device and the three-dimensional spatial motion control platform. This enables control over the amplitude and phase of the sound waves generated by each ultrasonic element 10 in multiple ultrasonic phased arrays, and simultaneously controls the two-dimensional rotation angle and three-dimensional spatial position of each ultrasonic phased array. This multi-variable collaborative control can greatly improve the control area of ​​the ultrasonic phased array, enabling non-contact pickup, transfer, and fusion of small objects in space.

[0065] This invention proposes an acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array, aiming to improve the flexibility and portability of acoustic levitation device operation and greatly enhance its motion control range. The proposed device can achieve real-time control of the two-dimensional rotation angle, three-dimensional spatial position, and amplitude and phase of all ultrasonic elements 10 of the ultrasonic phased array, enabling multi-variable joint control and electromechanical joint control. This addresses the limitations of fixed ultrasonic levitation array control range and the lack of flexibility and control over levitated objects inherent in "single ultrasonic phased array + single robotic arm" devices.

Claims

1. An acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array, characterized in that, It includes a two-dimensional rotating device, a three-dimensional spatial motion control platform, an ultrasonic phased array, a microcontroller module, a field-programmable gate array module, an ultrasonic vibration element drive circuit module, a motor drive circuit module, and a power supply module. The number of ultrasonic phased arrays, two-dimensional rotating devices, and three-dimensional spatial motion control platforms is at least two, and the number of ultrasonic phased arrays, two-dimensional rotating devices, and three-dimensional spatial motion control platforms is the same and corresponds one-to-one. The ultrasonic phased array is installed on the two-dimensional rotating device to form a two-dimensional rotation angle controllable ultrasonic phased array unit. The two-dimensional rotation angle controllable ultrasonic phased array unit is installed on the three-dimensional spatial motion control platform to form a two-dimensional rotation angle controllable and three-dimensional spatial position controllable ultrasonic phased array module. The output of the microcontroller module is connected to the input of the field-programmable gate array module and the motor drive circuit module, respectively; the output of the field-programmable gate array module is connected to the input of the ultrasonic vibration element drive circuit module; the output of the ultrasonic vibration element drive circuit module is connected to the ultrasonic vibration element in the ultrasonic phased array; the output of the motor drive circuit module is connected to the motor control port of the two-dimensional rotating device and the three-dimensional spatial motion control platform, respectively. The microcontroller module calculates the phase and amplitude information of multiple square wave signals based on the two-dimensional rotation angle and three-dimensional spatial position of the ultrasonic phased array, and sends the information to the field-programmable gate array (FPGA) module. The FPGA module receives the information sent by the microcontroller module, parses the phase and amplitude information of the multiple square wave signals based on the received information, and then synchronously sends the phase and amplitude information of each square wave signal to the corresponding circuit in the FPGA module to generate each square wave signal, thereby generating multiple square wave signals. Each square wave signal carries corresponding phase and amplitude information. Subsequently, the multiple square wave signals are amplified by the ultrasonic vibrator drive circuit module and input into each ultrasonic vibrator of the electromechanically controlled acoustic levitation device of the multi-two-dimensional rotating ultrasonic phased array. At the same time, the microcontroller module sends a signal to the motor drive circuit module to control the movement of the motor. The motor drive circuit module responds to the signal to control the movement of the motor and amplifies and outputs it to drive and control the motors in the two-dimensional rotating device and the three-dimensional spatial motion control platform, thereby controlling the movement of the two-dimensional rotating device and the three-dimensional spatial motion control platform. The ultrasonic vibrating element driving circuit module consists of multiple driving chips used to drive the ultrasonic vibrating element. The multiple driving chips are in parallel and do not interfere with each other. Each driving chip is used to amplify the square wave signal corresponding to it. The motor drive circuit module consists of multiple motor drive chips used to drive the motor. The multiple motor drive chips are in parallel and do not interfere with each other. Each motor drive chip is used to amplify the signal sent by the microcontroller module to control the movement of the motor. Connect the ground wires of all ultrasonic elements in all ultrasonic phased arrays together, and then connect them to the ground wire of the power module. Connect the control terminal of each ultrasonic element in all ultrasonic phased arrays to the output terminal of the ultrasonic element drive circuit module for issuing drive control signals. The power supply module is used to supply power to the microcontroller module, the field-programmable gate array module, the ultrasonic vibration element drive circuit module, and the motor drive circuit module, respectively.

2. The acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array according to claim 1, characterized in that: The two-dimensional rotating device can be a servo motor, DC motor, AC motor or stepper motor.

3. The acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array according to claim 1, characterized in that: The three-dimensional spatial motion control platform can be a three-dimensional slide table or a robotic arm.

4. The acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array according to claim 1, characterized in that: The driving chip used to drive the ultrasonic vibrator is selected from the TC4427 chip, MIC4127 chip, or L298N chip.

5. The acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array according to claim 1, characterized in that: The motor driver chips used to drive the motor are selected from L298N and A4954 chips.

6. The acoustic levitation device with electromechanical joint control of a multi-two-dimensional rotating ultrasonic phased array according to claim 1, characterized in that: The power supply module is used to generate +5V, +12V, and +15V DC voltages. The +5V DC voltage terminal of the power supply module is connected to the power supply terminals of the microcontroller module and the field-programmable gate array module, respectively. The +12V DC voltage terminal of the power supply module is connected to the power supply terminal of the ultrasonic vibration element drive circuit module. The +15V DC voltage terminal of the power supply module is connected to the power supply terminal of the motor drive circuit module.

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